Alignment, Registration, Or Position Determination Patents (Class 382/151)
  • Patent number: 10817999
    Abstract: A metrology system includes a controller coupled to a detector to image a sample based on the light captured by an objective lens, where an object plane of the detector with respect to the sample is adjustable. The controller may direct the detector to generate reference images of an overlay target on the sample at multiple object planes including at least a first reference image at a first sample layer and a second reference image at a second sample layer. The controller may further determine a reference overlay between the first layer and the second layer at the overlay target based on the first reference image and the second reference image. The controller may further select a measurement object plane for single-image overlay determination that corresponds to the reference overlay within a selected tolerance. The controller may further determine overlay for additional overlay targets at the measurement plane.
    Type: Grant
    Filed: July 12, 2018
    Date of Patent: October 27, 2020
    Assignee: KLA Corporation
    Inventors: David Gready, Nimrod Shuall, Claire Staniunas
  • Patent number: 10817226
    Abstract: A processing data generation program, a processing data generation system, and a processing data generation method are provided for enabling printed matters having various shapes and sizes. A processing data generation apparatus is configured to display a preview image of a template for print data (S121), contain templates for respective pieces of print data of multiple images having designs identical to each other and different sizes, receive designation of a template selected from a group of templates preview images of which are displayed at S121 (S122), identify cut data indicating a size of a cut area that matches the size of an image in the print data corresponding to the template the designation of which has been received at S122, and generate POP data including the cut data and print data created from the print data corresponding to the template the designation of which has been received at S122.
    Type: Grant
    Filed: August 22, 2019
    Date of Patent: October 27, 2020
    Inventor: Taiki Takaoka
  • Patent number: 10803344
    Abstract: Provided are a panel adsorption device and an automatic adsorption method using the same. A position of a liquid crystal panel on a platform is determined by providing a plurality of image capture devices above the platform, and then correspondingly sets the vacuum adsorption hole to a negative pressure state to firmly locate the liquid crystal panel on the platform. Meanwhile, the platform can be compatible with panels of various models and sizes.
    Type: Grant
    Filed: February 25, 2019
    Date of Patent: October 13, 2020
    Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd.
    Inventor: Yuejun Tang
  • Patent number: 10759055
    Abstract: An encoder includes a base portion, a scale portion that is provided to be relatively movable or rotatable with respect to the base portion, and has three or more marks which are different from each other, an imaging element that is disposed in the base portion, and images the marks, and an estimation portion that selects at least one reference image from among three or more reference images, performs template matching on a captured image in the imaging element by using the reference image, so as to detect positions of the marks, and estimates a movement state or a rotation state of the scale portion with respect to the base portion, in which the estimation portion predicts a reference image to be used for post-template matching on the basis of a result of pre-template matching, and performs the post-template matching by using the predicted reference image.
    Type: Grant
    Filed: September 27, 2018
    Date of Patent: September 1, 2020
    Assignee: Seiko Epson Corporation
    Inventors: Takayuki Kondo, Daiki Tokushima
  • Patent number: 10699166
    Abstract: Font recognition and similarity determination techniques and systems are described. In a first example, localization techniques are described to train a model using machine learning (e.g., a convolutional neural network) using training images. The model is then used to localize text in a subsequently received image, and may do so automatically and without user intervention, e.g., without specifying any of the edges of a bounding box. In a second example, a deep neural network is directly learned as an embedding function of a model that is usable to determine font similarity. In a third example, techniques are described that leverage attributes described in metadata associated with fonts as part of font recognition and similarity determinations.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: June 30, 2020
    Assignee: Adobe Inc.
    Inventors: Zhaowen Wang, Luoqi Liu, Hailin Jin
  • Patent number: 10699157
    Abstract: An image comparison method constituted of: receiving images; point matching the images to identify tentatively corresponding points; responsive to the identified points, defining a plurality of first image tiles within the first image; defining a plurality of second image tiles within the second image, each corresponding to a respective first image tile; adjusting the intensity of a set of pixels responsive to the cumulative relative frequency of the respective pixel intensity within the respective tile; for each tile, applying a plurality of non-linear functions; for each function, separately determining a moment of the outcome of the respective non-linear function for each axis of the respective tile; for each first image tile and corresponding second image tile, determining a distance between the subspaces spanned by moment vectors; and responsive to determined distances, determining whether respective first and second image tiles comprise observations of the same portion.
    Type: Grant
    Filed: March 15, 2017
    Date of Patent: June 30, 2020
    Assignee: Sightec (Israel) Ltd.
    Inventors: Joseph Francos, Rami Hagege
  • Patent number: 10618181
    Abstract: On the basis of received first region information indicating a first region, which is a region designated for an acquired picked-up image of a plurality of target objects, and second region information indicating a second region different from the first region, a robot control device causes a robot to grip the target object for which the second region not overlapping the first region of another of the target objects is designated and does not cause the robot to grip the target object, the second region for which overlaps the first region of the other target object.
    Type: Grant
    Filed: August 29, 2017
    Date of Patent: April 14, 2020
    Assignee: Seiko Epson Corporation
    Inventors: Seiji Aiso, Nobuyuki Setsuda, Kentaro Tsukamoto
  • Patent number: 10607337
    Abstract: An object inspection system enabling a quick and easy registering of a master image and an inspection image when there is a displacement between the master image and the inspection image. The object inspection system includes an imaging section, a movement machine configured to move a first object or a second object and an imaging section relative to each other, a positional data acquisition section configured to acquire positional data of the movement machine when the movement machine disposes the first object or the second object and the imaging section at a relative position, an image data acquisition section configured to acquire a first image of the first object and a second image of the second object, and an image registering section configured to register the first image and the second image.
    Type: Grant
    Filed: December 7, 2018
    Date of Patent: March 31, 2020
    Inventors: Junichirou Yoshida, Fumikazu Warashina
  • Patent number: 10572762
    Abstract: To each of points at a position corresponding to each of candidate points extracted from a target object image in a layer upper than a target object image, an area including the point at the position corresponding to the candidate point and an area threshold are set. As a result of predicting a degree of similarity, in a case where the degree of similarity has a value smaller than the area threshold, calculation of the degree of similarity is terminated in the middle. In a case where the degree of similarity has a value equal to or greater than the area threshold, calculation of the degree of similarity is continued, and in a case where the degree of similarity has a value greater than the area threshold when calculation of the degree of similarity is completed, a next area threshold is updated with a value greater than the area threshold.
    Type: Grant
    Filed: December 15, 2016
    Date of Patent: February 25, 2020
    Assignee: Canon Kabushiki Kaisha
    Inventor: Hiroshi Kitajima
  • Patent number: 10547432
    Abstract: A method and apparatus for selecting multiple transport formats and transmitting multiple transport blocks (TBs) in a transmission time interval simultaneously with multiple hybrid automatic repeat request (H-ARQ) processes in a wireless communication system are disclosed. Available physical resources and H-ARQ processes associated with the available physical resources are identified and channel quality of each of the available physical resources is determined. Quality of service (QoS) requirements of higher layer data to be transmitted are determined. The higher layer data is mapped to at least two H-ARQ processes. Physical transmission and H-ARQ configurations to support QoS requirements of the higher layer data mapped to each H-ARQ process are determined. TBs are generated from the mapped higher layer data in accordance with the physical transmission and H-ARQ configurations of each H-ARQ process, respectively. The TBs are transmitted via the H-ARQ processes simultaneously.
    Type: Grant
    Filed: May 24, 2018
    Date of Patent: January 28, 2020
    Assignee: InterDigital Technology Corporation
    Inventors: Stephen E. Terry, Jin Wang, Arty Chandra
  • Patent number: 10540525
    Abstract: There is provided a system that uses a two-dimensional information code. The system administers an information code which is provided with a data recording region and an image region. The system is provided with a specific information acquisition section that acquires specific information of a subject or an object, as information recorded in the data recording region, or as information to be correlated to the information recorded in the data recording region. Further, the is provided with a unique image acquisition section that acquires a unique image of a subject or an object, or a unique image for specifying the subject or the object, as information indicated in the image region. Further, the system is provided with a registration section that registers specific information acquired by the specific information acquisition section, being correlated to a unique image acquired by the unique image acquisition section.
    Type: Grant
    Filed: December 18, 2013
    Date of Patent: January 21, 2020
    Inventors: Kazuto Nosaka, Shin Nakayama, Masami Tanaka, Takuya Yoda
  • Patent number: 10516636
    Abstract: A real-time messaging system platform receives from, a communication application installed on a first user communication device, a first user identifier, an indication that a messaging service message composed by the first user is being directed to a first destination associated with a second user, and an identification of data present in the messaging service message. The identification of the data and a message transmission history of the first user is used to enable selection of a message of a first entity. The selected message of the first entity is caused to be displayed by the communication application within a message framework that frames the first user messaging service message. The first entity message is caused to be included in the messaging service message transmitted to the second user device, wherein the first entity is not provided with access to the identity of the first user or the second user.
    Type: Grant
    Filed: March 20, 2019
    Date of Patent: December 24, 2019
    Assignee:, Inc.
    Inventors: Steven Richard Brown, Leonard Robert Butterman, Anthony Pisciotto, Jr.
  • Patent number: 10474045
    Abstract: A method of characterizing a deformation of a plurality of substrates is described. The method includes: measuring, for a plurality of n different alignment measurement parameters ? and for a plurality of substrates, a position of the alignment marks; determining a positional deviation as the difference between the n alignment mark position measurements and a nominal alignment mark position; grouping the positional deviations into data sets; determining an average data set; subtracting the average data set from the data sets to obtain a plurality of variable data sets; performing a blind source separation method on the variable data sets, thereby decomposing the variable data sets into a set of eigenwafers representing principal components of the variable data sets; and subdividing the set of eigenwafers into a set of mark deformation eigenwafers and a set of substrate deformation eigenwafers.
    Type: Grant
    Filed: June 28, 2016
    Date of Patent: November 12, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Franciscus Godefridus Casper Bijnen, Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren, Patricius Aloysius Jacobus Tinnemans, Alexander Ypma, Irina Anatolievna Lyulina, Edo Maria Hulsebos, Hakki Ergün Cekli, Xing Lan Liu, Loek Johannes Petrus Verhees, Victor Emanuel Calado, Leon Paul Van Dijk
  • Patent number: 10475179
    Abstract: Methods and apparatus for inspection of electronic parts such as semiconductor wafers, high-density circuit boards, multi-layer substrates, chrome on glass masks, and other fine line products which compensates for reference misalignment. Conductor linewidth and space measurements are performed along the entire length of every conductor to sub-camera pixel, sub-micron accuracy in real time as the part is scanned. Billions of metrology measurements are also performed in real time to sub-micron accuracy. A self-learning automated method to extract measurement values from Computer Aided Design (CAD) files is described. This method automatically determines locations to perform these billons of operations within defined allowed manufacturing tolerances.
    Type: Grant
    Filed: March 19, 2019
    Date of Patent: November 12, 2019
    Assignee: Velocity Image Processing LLC
    Inventors: Robert P. Bishop, Timothy Pinkney
  • Patent number: 10458777
    Abstract: Targets, target elements and target design method are provided, which comprise designing a target structure to have a high contrast above a specific contrast threshold to its background in polarized light while having a low contrast below the specific contrast threshold to its background in non-polarized light. The targets may have details at device feature scale and be compatible with device design rules yet maintain optical contrast when measured with polarized illumination and thus be used effectively as metrology targets. Design variants and respective measurement optical systems are likewise provided.
    Type: Grant
    Filed: November 23, 2015
    Date of Patent: October 29, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Eran Amit, Barry Loevsky, Andrew Hill, Amnon Manassen, Nuriel Amir, Vladimir Levinski, Roie Volkovich
  • Patent number: 10445860
    Abstract: A scene presented by a headset is adjusted to correct for distortion from optical errors of an optics block in the headset. To correct for the distortion, the scene is pre-distorted when presented based on previously modeled distortion of the optics block, so distortion from the optics block corrects the pre-distortion. To model the distortion, the headset displays calibration image including features and images of the calibration image are captured from multiple positions. Differences between locations of features in the calibration images and locations of corresponding features in captured images of the calibration image are identified and a distortion correction is determined based on the differences.
    Type: Grant
    Filed: December 8, 2015
    Date of Patent: October 15, 2019
    Assignee: Facebook Technologies, LLC
    Inventors: Alexander Jobe Fix, Douglas Robert Lanman, Ying Geng
  • Patent number: 10408602
    Abstract: Methods are provided, which estimate a quality of a metrology target by calculating a noise metric of its ROI kernels, derived from application of a Fourier filter on the measured kernel with respect to a periodicity of the target's periodic structure(s); and using the calculated noise metric to indicate the target quality. An additional Fourier filter may be applied perpendicularly on the measured kernel with respect to a periodicity of a perpendicular segmentation of the periodic structure(s), and the (2D) noise metric may be derived by application of both Fourier filters. The estimated noise may be analyzed statistically to provide various types of information on the target.
    Type: Grant
    Filed: April 18, 2016
    Date of Patent: September 10, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Boris Efraty, Yuri Paskover
  • Patent number: 10380764
    Abstract: This invention provides a system and method for hand-eye calibration of a vision system using an object under manufacture having at least one feature. The feature can be a linear feature and the object moves in at least one degree of freedom in translation or rotation on a motion stage. The system further comprises at least a first vision system camera and vision processor. The first vision system camera is arranged to acquire an image of the first linear feature on the object under manufacture and to track motion of the first linear feature in response to moving of the motion stage in at least one degree of translation. The first linear feature is identified in at least two different positions along a plane. The system computes a mapping between pixel positions in a pixel coordinate system of the first camera and physical positions in a motion coordinate system based upon locations of the at least two positions.
    Type: Grant
    Filed: December 18, 2013
    Date of Patent: August 13, 2019
    Assignee: Cognex Corporation
    Inventor: Gang Liu
  • Patent number: 10319086
    Abstract: According to various exemplary embodiments of the present disclosure, an electronic device may include a memory for storing one or more instructions, and a processor. The processor may be configured to acquire at least one image of at least one object, determine a change of an attribute corresponding to the at least one object, select at least one correction method based on the attribute change, correct the at least one image using the at least one correction method, and displaying the at least one image corrected by the at least one correction method on a display.
    Type: Grant
    Filed: July 28, 2016
    Date of Patent: June 11, 2019
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Wooyong Lee, Hyejin Kang, Gyuhee Han, Jae-Yun Song, Kihuk Lee
  • Patent number: 10314220
    Abstract: A mounting machine which mounts one or more components on a substrate includes: a mounting head which has a fiducial mark, holds the component, and moves the component onto the substrate; an imaging section which images the mounting head; setting means for setting, out of image data of the fiducial mark and component held by the moving mounting head captured by the imaging section, a processing region containing the component, based on the position of the fiducial mark; and detection means for detecting a state of the component which is held by the mounting head by processing the image data of the set processing region.
    Type: Grant
    Filed: August 9, 2013
    Date of Patent: June 4, 2019
    Inventor: Koji Kawaguchi
  • Patent number: 10304165
    Abstract: Example vehicle stain and trash detection systems and methods are described. In one implementation, a method receives a clean image and clean Lidar data associated with a clean vehicle interior. The method also receives a second image and second Lidar data associated with the vehicle interior after a passenger has occupied the vehicle. Differences are identified between the clean image and the second image. Additionally, differences are identified between the clean Lidar data and the second Lidar data. The method determines whether the vehicle interior includes at least one of a stain, dirt, or trash based on the identified differences.
    Type: Grant
    Filed: May 12, 2017
    Date of Patent: May 28, 2019
    Inventor: Shant Tokatyan
  • Patent number: 10290527
    Abstract: The inventive concept provides a method of manufacturing a semiconductor device using a plasma etching apparatus including an alignment chamber and a process chamber. The method includes: loading a wafer in the alignment chamber of the plasma etching apparatus; rotating the wafer loaded in the alignment chamber according to a plurality of heating zones arranged in an electrostatic chuck of the process chamber, thereby rotating a reference point of the wafer; transferring the wafer that was rotated in the alignment chamber onto the electrostatic chuck of the process chamber; and plasma-etching the wafer that was rotated in the alignment chamber on the electrostatic chuck of the process chamber.
    Type: Grant
    Filed: March 19, 2018
    Date of Patent: May 14, 2019
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jun-soo Lee, Jae-hoon Kim, Kyung-hak Min
  • Patent number: 10275682
    Abstract: When there are a plurality of detection candidate objects, to detect a target object that is appropriately visible as a whole, an information processing apparatus calculates detection likelihoods in a plurality of local areas of each of the plurality of detection target candidates, and a detection reliability of each of the detection target candidates based on a distribution of the detection likelihoods.
    Type: Grant
    Filed: July 28, 2014
    Date of Patent: April 30, 2019
    Inventors: Yuichiro Iio, Yusuke Mitarai
  • Patent number: 10234285
    Abstract: A tiltmeter-integrated two element optical relative alignment monitor provides relative alignment and contact sensing and can provide precise information regarding the nature of physical contact experienced by objects being monitored. A computer monitor can display the information in real time, in an intuitive manner. This system can provide all the information with good resolution in a low-cost, easily installable package for a wide variety of research, high energy physics applications, and industrial uses. A projector unit is mounted on one component containing a diffuse light source, a coded mask, and a lens. The projector is aligned with a camera to receive the focused image. Shifts in the image of the mask indicate relative motion between the camera and the projector unit. A tiltmeter is affixed to either the camera or projector, to distinguish between image shifts due to translational movement and image shifts due to rotation or tilting.
    Type: Grant
    Filed: September 12, 2016
    Date of Patent: March 19, 2019
    Assignee: The United States of America, as represented by the Secretary of the Navy
    Inventor: David J. Goldstein
  • Patent number: 10222712
    Abstract: The present invention provides a conveyance apparatus which conveys a substrate to a stage, the apparatus comprising a holding unit configured to hold and rotate the substrate, a detection unit configured to detect a height of the substrate held by the holding unit, a conveyance unit configured to convey the substrate from the holding unit to the stage, and a control unit configured to control, based on a detection result of the detection unit obtained while the holding unit rotates the substrate, conveyance of the substrate by the conveyance unit.
    Type: Grant
    Filed: March 29, 2017
    Date of Patent: March 5, 2019
    Inventor: Yasunao Matsuhira
  • Patent number: 10198827
    Abstract: A method of inspecting a sample includes performing a focusing operation on a target pattern of a sample. The focusing operation includes scanning the target pattern at different focusing levels to obtain a plurality of focus images. The method further includes using at least one of the plurality of the focus images as a target pattern image of the target pattern and then measuring a dimension of the target pattern based on the target pattern image.
    Type: Grant
    Filed: January 19, 2017
    Date of Patent: February 5, 2019
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Woongkyu Son, Sangkyo Lim, Sunhee Shim, MiJung Jeon
  • Patent number: 10183541
    Abstract: The invention pertains to a system comprising: a source to generate a pulsed radiation pattern; a detector; a processor to process data from the detector when radiation is reflected by an object; a synchronization means interfacing between the detector and the source; wherein: the detector is synchronized with the source so that radiation to be processed is detected only during the pulses, the processor determines a characteristic of the object by determining displacement of detected spots with reference to predetermined positions, the source emits monochromatic light and the detector is equipped with a bandpass filter and optics arranged so as to modify an angle of incidence onto said filter to confine light to a predetermined range around a normal of said filter, said optics comprising an image-space telecentric lens.
    Type: Grant
    Filed: December 31, 2015
    Date of Patent: January 22, 2019
    Assignee: XENOMATIX NV
    Inventors: Johan Van Den Bossche, Dirk Van Dyck, Liesbet Conings
  • Patent number: 10137575
    Abstract: A synthetic representation of a robot tool for display on a user interface of a robotic system. The synthetic representation may be used to show the position of a view volume of an image capture device with respect to the robot. The synthetic representation may also be used to find a tool that is outside of the field of view, to display range of motion limits for a tool, to remotely communicate information about the robot, and to detect collisions.
    Type: Grant
    Filed: June 21, 2017
    Date of Patent: November 27, 2018
    Assignee: Intuitive Surgical Operations, Inc.
    Inventors: Brandon D. Itkowitz, Simon P. DiMaio, Daniel J. Halabe, Christopher J. Hasser, Brian D. Hoffman, David Q. Larkin, Catherine J. Mohr, Paul W. Mohr, Tao Zhao, Wenyi Zhao
  • Patent number: 10114995
    Abstract: A method and arrangements for estimating one or more dominating orientations (?dom) in at least a part (201; 301) of a digital image (200; 300; 600). Representative angles (?1 . . . ?N) representing angles of gradient vectors (g1 . . . gN) for pixels (1 . . . N) of said at least part are obtained (401). It is further obtained (402) a target number (n) of dominating orientations. It is also obtained (404) a first sum (a) comprising added sine factors based on computed sines. The sines are computed for angles that correspond to said representative angles (?1 . . . ?N) multiplied with two times the target number (n). Further it is obtained (405) a second sum (b) comprising added cosine factors based on computed cosines for the same angles that said sine were computed for. Said one or more dominating orientations (?dom) are then estimated (406) based on the first sum (a), the second sum (b) and the target number (n).
    Type: Grant
    Filed: June 22, 2016
    Date of Patent: October 30, 2018
    Assignee: SICK IVP AB
    Inventor: Ola Friman
  • Patent number: 10108641
    Abstract: Method and system for discovering artistic preferences by using a graphical user interface (GUI) tool to navigate through a collection of art images based on one or more dimensions within an art image. The GUI tool allows a user to display one or more selectable dimensions of a first image that, when selected, are used as a query to locate and display other images that have a dimension that is equal or similar to the one or more selected dimensions.
    Type: Grant
    Filed: December 23, 2013
    Date of Patent: October 23, 2018
    Assignee: ART.COM, INC.
    Inventors: Madhav Mehra, Geoffroy Martin, Thanigai Vellore
  • Patent number: 10092984
    Abstract: A method of aligning a subject tooling element of a material handling system of an ultrasonic bonding system is provided. The method includes the steps of: a) providing an overlay defining a relative position of at least a portion of a reference tooling element; b) viewing an image of at least a portion of the subject tooling element combined with a corresponding portion of the overlay; and c) adjusting a position of at least a portion of the subject tooling element by referring to the overlay in the image.
    Type: Grant
    Filed: February 15, 2018
    Date of Patent: October 9, 2018
    Assignee: Kulicke and Soffa Industries, Inc.
    Inventors: Jonathan Michael Byars, Garrett Leigh Wong
  • Patent number: 10020166
    Abstract: The present application discloses methods, systems and devices for using charged particle beam tools to pattern and inspect a substrate. The inventors have discovered that it is highly advantageous to use patterns generated using the Hadamard transform as alignment and registration marks (Hadamard targets) for multiple-column charged particle beam substrate processing and inspection tools. Hadamard targets can be written to a substrate using charged particle beams performing, for example, resist-based lithography or resist-less direct processing. High-order Hadamard targets can also be patterned and imaged to obtain superior column performance metrics for applications such as super-rapid beam calibration DOE, column matching, and column performance tracking.
    Type: Grant
    Filed: March 24, 2017
    Date of Patent: July 10, 2018
    Inventors: Kevin M. Monahan, Michael C. Smayling, Theodore A. Prescop, David K. Lam
  • Patent number: 10015387
    Abstract: A focus adjustment method and a device for the same are capable of realizing automatic focusing on a feature point of an arbitrary object selected from an image in which objects having various shapes are captured. The focus adjustment method includes a first step of obtaining a partial captured image in which a portion of the substrate is captured by the image capture device, and displaying the partial captured image in the image display region having a plurality of divided regions, a second step of causing the in-focus determination device to perform in-focus image determination for one divided region that is selected by a user through the input device, and a third step of displaying the captured image, which has been determined as the in-focus image, in the image display region.
    Type: Grant
    Filed: August 4, 2014
    Date of Patent: July 3, 2018
    Inventor: Kazumasa Ikushima
  • Patent number: 10014156
    Abstract: There is provided a method capable of calibrating a sample stage easily. This method is for use in a charged particle beam system having the sample stage for moving a sample and an imaging subsystem for capturing a charged particle beam image and obtaining a final image. The method includes the steps of obtaining the final image from the imaging subsystem (step S100), obtaining correlation information that associates a given position in the final image with a position of the sample stage assumed when the final image was taken (step S102), obtaining length information about a length per pixel of the final image at a final magnification (step S106), and finding a correction between coordinates of the final image and coordinates of the sample stage on the basis of the correlation information and of the length information (step S110).
    Type: Grant
    Filed: October 21, 2016
    Date of Patent: July 3, 2018
    Assignee: JEOL Ltd.
    Inventor: Naoki Hosogi
  • Patent number: 9996771
    Abstract: A system and method for procedurally synthesizing a training dataset for training a machine-learning model. In one embodiment, the system includes: (1) a training designer configured to describe variations in content of training images to be included in the training dataset and (2) an image definer coupled to the training designer, configured to generate training image definitions in accordance with the variations and transmit the training image definitions: to a 3D graphics engine for rendering into corresponding training images, and further to a ground truth generator for generating associated ground truth corresponding to the training images, the training images and the associated ground truth comprising the training dataset.
    Type: Grant
    Filed: February 15, 2016
    Date of Patent: June 12, 2018
    Assignee: Nvidia Corporation
    Inventors: Jesse Clayton, Vladimir Glavtchev
  • Patent number: 9992471
    Abstract: Systems and methods for generating high resolution dewarped images for an image of a document captured by a 3D stereo digital camera system, or a mobile phone camera capturing a sequence of images, which may improve OCR performance. Example embodiments include a compact stereo camera with two sensors mounted at fixed locations, and a multi-resolution pipeline to process and to dewarp the images using a three dimensional surface model based on curve profiles of the computed depth map. Example embodiments also include a mobile phone including a camera which captures a sequence of images, and a processor which computes a disparity map using the captured sequence of image frames, computes a model of the at least one document page by generating a cylindrical three dimensional geometric surface using the computed disparity map, and renders a dewarped image from the computed model.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: June 5, 2018
    Assignee: FUJI XEROX CO., LTD.
    Inventors: Patrick Chiu, Michael Patrick Cutter, Chelhwon Kim, Surendar Chandra
  • Patent number: 9990685
    Abstract: An automated guidance system for a coordinated movement machine includes a camera and a processor. The camera is mounted to a movable component of the coordinated movement machine. The processor is configured to visually recognize individual workpieces among a plurality of similarly shaped workpieces using a program running on the processor. The processor is further configured to determine x, y and z and Rx, Ry and Rz of the movable component with respect to each recognized workpiece among the plurality of recognized workpieces, and to move the movable component of the coordinated movement machine after determining x, y and z and Rx, Ry and Rz of the movable component.
    Type: Grant
    Filed: March 21, 2016
    Date of Patent: June 5, 2018
    Assignee: Recognition Robotics, Inc.
    Inventors: Simon Melikian, Stefano Cristiano
  • Patent number: 9986060
    Abstract: The present disclosure relates to a geographic information system (GIS) for collecting data for future usage. In operation, a spatial server receives an image request to a client device, applies a hash function to the image request to generate a standardized identifier. The GIS client device uses the standardized identifier, attributes of GIS data associated with the standardized identifier or the GIS data, or attributes of GIS data associated with a stored identifier that corresponds to the standardized identifier to determine whether to retrieve or cache a GIS data associated with the standardized or stored identifier for display on the client device.
    Type: Grant
    Filed: March 30, 2015
    Date of Patent: May 29, 2018
    Assignee: General Electric Company
    Inventor: Phillip James Robinson
  • Patent number: 9955039
    Abstract: An image processing device comprises a receiving port, a processor and an output port. The receiving port receives old image data from a peripheral device. The old image data has partial positioning mark data corresponding to a portion of a positioning mark of a document, and partial main image data corresponding to a partial main image of a portion of a main image of the document. The processor electrically connected to the receiving port shifts the partial main image by a calibration distance in a calibration direction to a standard position of a typesetting page according to the partial positioning mark data and the partial main image data, and adds a predetermined image to one side or neighboring two sides of the partial main image to generate new image data. The output port electrically connected to the processor outputs the new image data. Copy apparatus and method are also provided.
    Type: Grant
    Filed: June 22, 2017
    Date of Patent: April 24, 2018
    Assignee: Avision Inc.
    Inventors: Chen-Chang Li, Cheng Chen Tseng
  • Patent number: 9949418
    Abstract: An electronic component mounting apparatus includes an electronic component supply device for supplying an electronic component, a head including a head main body and a head camera unit, and a control device. The head main body includes nozzles, a nozzle drive unit for driving the nozzles and a head support body for supporting the nozzles and the nozzle drive unit. The head camera unit is fixed to the head support body and has head cameras corresponding to the nozzles respectively for photographing electronic components. The head drives the nozzles to hold the electronic components, transfers the electronic components from the electronic component supply device to the substrate and mounts the electronic components onto the substrate. The control device synthesizes images photographed by the head cameras to generate an image with fields of the head cameras connected together, and determines a process based on the synthesized image synthesized.
    Type: Grant
    Filed: February 25, 2015
    Date of Patent: April 17, 2018
    Inventors: Naoki Kurita, Takahiro Oohashi, Takahiko Imasu, Kouei Kobayashi, Yasuaki Sakata
  • Patent number: 9898815
    Abstract: A fault diagnostic device comprises an arithmetic processing device configured to judge a fault on the basis of an image captured by the camera. The arithmetic processing device includes an imaging command part configured to transmit a command for capturing the image of a diagnosis portion and a judgement part configured to judge whether or not the diagnosis portion has the fault. A storage part stores a reference image when the diagnosis portion is in a normal state. The imaging command part transmits an imaging command so as to capture the image of the diagnosis portion after changing a position and a posture of the robot. The judgement part compares the image of the diagnosis portion captured by the camera with the reference image and judges the fault in the diagnosis portion.
    Type: Grant
    Filed: February 7, 2017
    Date of Patent: February 20, 2018
    Inventors: Tomoyuki Yamamoto, Hiromitsu Takahashi
  • Patent number: 9881235
    Abstract: A system and method is provided for generating a digital image configured to facilitate measuring at least one physical dimension in the digital image. At least one light source is configured to project a plurality of substantially parallel light beams onto at least one physical object spaced away from the at least one light source. The light beams form a reference pattern on the at least one physical object. The reference pattern includes at least one feature defining a physical dimension having a predetermined magnitude. A digital camera is configured to store a digital image of at least a portion of the at least one physical object and the at least one feature. The digital image includes an image data file having a plurality of pixels and metadata. At least a portion of the metadata is indicative of a conversion factor relating the predetermined magnitude of the physical dimension with a pixel distance corresponding to the predetermined magnitude of the physical dimension.
    Type: Grant
    Filed: November 20, 2015
    Date of Patent: January 30, 2018
    Inventor: Mahmoud Narimanzadeh
  • Patent number: 9823574
    Abstract: A device for semiconductor fabrication includes a substrate and a layer formed over the substrate, wherein the layer includes an alignment mark. The alignment mark includes a first plurality of elongated members that are oriented lengthwise along a first direction and are distributed along a second direction. The alignment mark further includes a second plurality of elongated members that are oriented lengthwise along a third direction perpendicular to the first direction and are distributed along the second direction, wherein the second direction is different from each of the first and third directions.
    Type: Grant
    Filed: September 29, 2015
    Date of Patent: November 21, 2017
    Inventors: Ching-Huang Chen, Hung-Chang Hsieh, Kuei-Liang Lu, Ya Hui Chang, Spencer Lin
  • Patent number: 9818223
    Abstract: A construction method of freeform surface shape based on XY-polynomial obtains a plurality of data points of a freeform surface according to an object point and an imaging point in a three-dimensional Cartesian coordinates system Oxyz. Each of the plurality of data points comprises a coordinate value Qi and a normal vector Ni. A first sum of squares e1(P) of coordinate differences in z direction between the coordinate value Qi and the freeform surface is applied, and by a second sum of squares e2(P) between the normal vector Ni of the data points and a normal vector ni of the freeform surface, a modulus of vector differences is acquired. An evaluation function ƒ(p)=e1(P)+we2(P) is proposed and a plurality of freeform surface shapes obtained by selecting and applying different weightings. A final freeform surface shape ?opt is chosen from the plurality of freeform surface shapes.
    Type: Grant
    Filed: May 12, 2015
    Date of Patent: November 14, 2017
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Jun Zhu, Xiao-Fei Wu, Wei Hou, Tong Yang, Guo-Fan Jin, Shou-Shan Fan
  • Patent number: 9794619
    Abstract: Methods, apparatus, and articles of manufacture for using location information to manage spillover in an audience monitoring system are disclosed. An example method involves identifying a first location of a portable metering device at a first time based on a plurality of location coordinates received from a location information system. The example method also involves generating media monitoring information corresponding to a media signal received at the first time. Additionally, the example method involves identifying the media monitoring information as being associated with a spillover signal in response to determining that a media delivery device is not located at the first location of the portable metering device at the first time.
    Type: Grant
    Filed: July 15, 2015
    Date of Patent: October 17, 2017
    Assignee: The Nielsen Company (US), LLC
    Inventors: Morris Lee, Daniel Nelson, Weston Headley
  • Patent number: 9756240
    Abstract: A wide-angle lens calibration system is provided, which may include a rotation unit, an image input unit, and a processing unit. A lens to be calibrated may be disposed on the rotation unit; the rotation direction of the rotation unit may be parallel to the horizontal direction; the optical axis center of the lens may be aligned with a reference object. The image input unit may receive images from the lens. The processing unit may control the rotation unit to rotate and analysis the images received from the lens. The processing unit may execute a distortion calibration process, wherein the processing unit may continuously rotate the rotation unit by a predetermined angle and then record the distance between the position of the reference object in the image and the optical axis center and a total rotation angle after each rotation so as to establish a distortion calibration model.
    Type: Grant
    Filed: December 30, 2015
    Date of Patent: September 5, 2017
    Inventors: Wei-Cheng Liu, Yu-Chung Chen
  • Patent number: 9696150
    Abstract: The purpose of the present invention is to provide an overlay error measuring device for correcting a pattern displacement other than an overlay error to thereby achieve high-precision overlay error measurement. To accomplish the abovementioned purpose, the present invention proposes an overlay error measuring device which measures a dimension between a plurality of patterns belonging to different layers using a signal obtained by a charged particle beam device, and when measuring the dimension, corrects an amount corresponding to a pattern shift due to an optical proximity effect and measures the dimension between the plurality of patterns.
    Type: Grant
    Filed: June 10, 2013
    Date of Patent: July 4, 2017
    Inventor: Ryoichi Matsuoka
  • Patent number: 9669544
    Abstract: Via intuitive interactions with a user, robots may be trained to perform tasks such as visually detecting and identifying physical objects and/or manipulating objects. In some embodiments, training is facilitated by the robot's simulation of task-execution using augmented-reality techniques.
    Type: Grant
    Filed: June 24, 2015
    Date of Patent: June 6, 2017
    Inventors: Christopher J. Buehler, Michael Siracusa
  • Patent number: 9639781
    Abstract: Systems and methods for training a machine vision system create geometric models. The disclosed methods can extract one or more corresponding features and one or more differentiating features from different sets of training images. The one or more differentiating features can be used to differentiate between the different work pieces. The disclosed methods can generate an alignment model using the corresponding features and a classification model using the one or more differentiating features.
    Type: Grant
    Filed: April 10, 2015
    Date of Patent: May 2, 2017
    Inventor: Simon Barker
  • Patent number: 9639559
    Abstract: Partial-image search criteria are derived that include a combination of multiple partial-image user selections of portions of at least one image. Visual search results are returned responsive to a search for images that correspond to the derived partial-image search criteria. The visual search results include at least one identified image that includes features that correspond to the derived partial-image search criteria that include the combination of the multiple partial-image user selections.
    Type: Grant
    Filed: March 14, 2016
    Date of Patent: May 2, 2017
    Inventors: Kimberly H. Cady, Scott B. Greer, Andrew J. Lavery, Sarah R. Plantenberg