Alignment, Registration, Or Position Determination Patents (Class 382/151)
  • Patent number: 8343693
    Abstract: A focus test reticle for measuring focus information includes an outer pattern. The outer pattern has a line pattern composed of a light shielding film extending in the Y direction, a phase shift portion provided on a side in the +X direction of the line pattern and formed to have a line width narrower than the line pattern, a transmitting portion provided on a side in the ?X direction of the line pattern and formed to have a line width narrower than the line pattern, a transmitting portion provided on a side in the +X direction of the phase shift portion, and a phase shift portion provided on a side in the ?X direction of the transmitting portion. Focus information of a projection optical system is measured at a high measuring reproducibility and a high measuring efficiency.
    Type: Grant
    Filed: November 5, 2010
    Date of Patent: January 1, 2013
    Assignee: Nikon Corporation
    Inventors: Shigeru Hirukawa, Shinjiro Kondo
  • Patent number: 8329360
    Abstract: Provided is an apparatus that includes an overlay mark. The overlay mark includes a first portion that includes a plurality of first features. Each of the first features have a first dimension measured in a first direction and a second dimension measured in a second direction that is approximately perpendicular to the first direction. The second dimension is greater than the first dimension. The overlay mark also includes a second portion that includes a plurality of second features. Each of the second features have a third dimension measured in the first direction and a fourth dimension measured in the second direction. The fourth dimension is less than the third dimension. At least one of the second features is partially surrounded by the plurality of first features in both the first and second directions.
    Type: Grant
    Filed: December 4, 2009
    Date of Patent: December 11, 2012
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Guo-Tsai Huang, Fu-Jye Liang, Li-Jui Chen, Chih-Ming Ke
  • Patent number: 8331670
    Abstract: A document alteration detection method compares a target image with an original image by comparing character shape features without actually recognizing the characters. Bounding boxes for the characters are generated for both images, each enclosing one or more connected groups of pixels of one character. The bounding boxes in the original and target images are matched into pairs. Addition and deletion of text is detected if a bounding box in one image does not have a matching one in the other image. Each pair of bounding boxes is processed to compare their shape features. The shape features include the Euler numbers of the characters, the aspect ratio of the bounding boxes, the pixel density of the bounding boxes, and the Hausdorff distance between the two characters. The two characters are determined to be the same or different based on the shape feature comparisons.
    Type: Grant
    Filed: March 22, 2011
    Date of Patent: December 11, 2012
    Assignee: Konica Minolta Laboratory U.S.A., Inc.
    Inventors: Songyang Yu, Wei Ming
  • Patent number: 8326081
    Abstract: A correlation image detector is provided that co-registers sonar images by finding peaks in correlation images. To obtain the peaks, the mean of the absolute values of the correlation coefficients in the correlation image is found and the Rayleigh parameter is determined from the mean. Based on the Rayleigh parameter, an appropriate threshold can be determined using a desired probability of false detection. The threshold can be chosen such that the probability of a single false detection over the expected life of the mission for which correlation detection is being performed is extremely low, e.g., one in a million. The peak value in the image is determined and a correlation is considered detected when the peak value is greater than the product of the threshold and the Rayleigh parameter. If a detection occurs, the correlation image detector returns the transformation that co-registers the two images.
    Type: Grant
    Filed: May 18, 2009
    Date of Patent: December 4, 2012
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventor: Richard Rikoski
  • Patent number: 8320708
    Abstract: A reading machine that operates in various modes includes image correction processing is described. The reading device pre-processes an image prior to optical character recognition processing by detect distortion in an image of a page by measuring an extent to which page boundaries in the image deviate from a simple rectangular shape and correcting for the optical distortion by transforming the image to restore the page to a rectangular shape.
    Type: Grant
    Filed: April 1, 2005
    Date of Patent: November 27, 2012
    Assignee: K-NFB Reading Technology, Inc.
    Inventors: Raymond C. Kurzweil, Paul Albrecht, Lucy Gibson, Lev Lvovsky
  • Patent number: 8319501
    Abstract: A circuit board including a plurality of components; a plurality of light sources aligned along at least one axis; and a controller configured to activate the light sources to identify at least one of the components. The components on the circuit board can be identified by the light sources in response to a variety of conditions.
    Type: Grant
    Filed: June 22, 2009
    Date of Patent: November 27, 2012
    Assignee: Xerox Corporation
    Inventors: Larry Lam Pham, Paul Leonard Pankratz
  • Patent number: 8315478
    Abstract: A coordinate system converter efficiently converts coordinates of one coordinate system to a different coordinate system. A base system library module provides a common platform where different algorithms based on different coordinate systems can “shake hands” or be integrated into an overall conversion process in a manner that is transparent to each other. The number of supported coordinate systems can be dynamically extended without changing software to support different tools.
    Type: Grant
    Filed: October 23, 2008
    Date of Patent: November 20, 2012
    Assignee: DFMSim, Inc.
    Inventors: Nungavaram Sundara Viswanathan, Matthias Frank
  • Patent number: 8314792
    Abstract: The invention relates to a system (100) for propagating a model mesh based on a first mean model mesh and on a second mean model mesh, the system comprising: a registration unit (110) for computing a registration transformation for registering the first model mesh with the first mean model mesh; a forward transformation unit (120) for transforming the model mesh into a registered model mesh using the registration transformation; a computation unit (130) for computing a propagation field for propagating the registered model mesh, the propagation field comprising vectors of displacements of vertices of the second mean model mesh relative to respective vertices of the first mean model mesh; a propagation unit (140) for transforming the registered model mesh into the propagated registered model mesh based on applying the vertex displacement vectors comprised in the propagation field to respective vertices of the registered model mesh; and an inverse transformation unit (150) for transforming the propagated regist
    Type: Grant
    Filed: July 2, 2007
    Date of Patent: November 20, 2012
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Jens Von Berg, Cristian Lorenz
  • Publication number: 20120288183
    Abstract: A method of operating a chip mounter is provided, comprising: preparing an electronic part on a part supply unit and a printed circuit board on a main body; gripping the electronic part using a part conveyor unit to move the electronic part along a part moving path on the part supply unit and the main body; photographing the electronic part when the electronic part is located at a part recognition region within the part moving path without stoppage and during the movement of the electronic part; transmitting a photographed image of the electronic part to a controller using the image processing unit; comparing the photographed image with a reference image using the controller; and displaying the photographed image to the exterior using the controller; wherein the part recognition region is set by at least one coordinate in the controller to be located on a light source of the processing unit.
    Type: Application
    Filed: July 24, 2012
    Publication date: November 15, 2012
    Applicant: Samsung Techwin Co., Ltd.
    Inventor: Jae-Hyun Park
  • Patent number: 8311368
    Abstract: When retrieving an image from an archive of stored images that is similar to an inputted image, an image-processing apparatus (200) extracts more than one characteristic point from the inputted image (S504), computes a characteristic amount for the characteristic points thus extracted (S505), and evaluates the fluctuation in the characteristic amount when a prescribed alteration is applied to the inputted image (S506). The image-processing apparatus selects a characteristic point from among the characteristic points thus extracted from the inputted image, and retrieves (S508) a stored image that is similar to the inputted image, in accordance with the characteristic amount of the characteristic point thus selected.
    Type: Grant
    Filed: March 28, 2008
    Date of Patent: November 13, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventors: Koichi Magai, Hirotaka Shiiyama, Hidetomo Sohma, Tomomi Takata
  • Patent number: 8311365
    Abstract: An analysis method for a regional image is disclosed for an image datum from a C-arm device. The analysis method includes: providing an indication module, reading the image datum, selecting a plurality of ROIs (Regions of Interest), calculating an average brightness of each of the ROIs, searching every of the steel ball image data, comparing each of the steel ball image data and analyzing each of the steel ball image data. By individually analyzing the regional image datum, the brighter or darker image signal can be excluded so that it can improve precision during searching the steel ball image data. Moreover, it is also more effective for comparing an image profile of the steel ball image datum with a real profile of the steel ball of the indication module. Thus, the steel ball image can be readily defined by its correspondence with the steel ball of the indication module.
    Type: Grant
    Filed: September 18, 2009
    Date of Patent: November 13, 2012
    Assignee: Accumis, Inc.
    Inventors: Yen-Chu Chen, Kuo-Tung Kao, Hong-Yu Zhu, Chi-Bin Wu
  • Patent number: 8306313
    Abstract: A method for placing at least one component provided with connection points on a substrate. First, positions of the connection points are determined, after which the component is positioned at desired positions on the substrate with the connection points thereof. Upon placement of a number of components, the contour of a component as well as the positions of the connection points relative to said contour are determined for a first number of components. On the basis of the calculated positions of the connection points relative to the contours average positions of the connection points relative to the contour are calculated. Upon placement of a second number of components the contour of a component is determined, whereupon the expected positions of the connection points relative to the contour are calculated on the basis of said average positions.
    Type: Grant
    Filed: July 2, 2008
    Date of Patent: November 6, 2012
    Assignee: Assembleon B.V.
    Inventor: Hubert Francijn Maria Hoogers
  • Patent number: 8300923
    Abstract: A process control method and data registration program for a surface mount line includes retrieving printing quality data, mounting quality data, and soldering pass/fail data from a primary recorder, recording the printing quality data, the mounting quality data, and the soldering pass/fail data for each of the components in a secondary recorder, and determining whether the solder printer and the mounter need adjustment by using the data of the components which are associated with the soldering pass/fail data recorded in the secondary recorder by a computer.
    Type: Grant
    Filed: January 19, 2012
    Date of Patent: October 30, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kazuki Tateyama, Hideki Ogawa, Satoshi Imi
  • Patent number: 8300925
    Abstract: An image processing apparatus that superimposes additional information on image data, the apparatus sets, in the image data, a main region in which the superimposing intensity for superimposing the additional information is constant, and a superimposing intensity change region in which the superimposing intensity for superimposing the additional information is not constant, sets, the superimposing intensity according to the target pixel in the superimposing intensity change region, and superimposes the additional information on image data using the set superimposing intensity.
    Type: Grant
    Filed: April 7, 2009
    Date of Patent: October 30, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventor: Hiroyasu Kunieda
  • Patent number: 8295586
    Abstract: A position detection method and a position detection device for detecting with sufficient accuracy the position or the attitude of an object by using an image of the object captured by a single camera. The position detection method detects the position or the attitude of the object by using a measurement pixel position in images of multiple points on the object, which images are captured by the single camera and have a known positional relationship.
    Type: Grant
    Filed: January 25, 2008
    Date of Patent: October 23, 2012
    Assignee: Honda Motor Co., Ltd.
    Inventor: Chiaki Aoyama
  • Patent number: 8295585
    Abstract: A method for determining the position of an object (1) in space is described, in which measurement characteristics (4) of the object (1) are recorded with an optical recording device (3) calibrated to a space coordinate system (5), and on the basis of these measurement characteristics (4), the position of the object (1) in the space coordinate system (5) is determined in an image processing device. To enable reliable ascertainment of the position even with only a few recording devices, it is provided that at least two measurement characteristics (4) of the object (1) are detected simultaneously in a recording device (3) and used to determine the position of the object (1).
    Type: Grant
    Filed: February 1, 2005
    Date of Patent: October 23, 2012
    Assignee: ISRA Vision Systems AG
    Inventors: Stephan Wienand, Georg Lambert
  • Patent number: 8290239
    Abstract: An apparatus and method for automatically inspecting and repairing printed circuit boards includes an inspection functionality automatically inspecting printed circuit boards and providing a machine readable indication of regions thereon requiring repair. An automatic repair functionality employs the machine readable indication to repair the printed circuit boards at some of the regions thereon requiring repair. An automatic repair reformulation functionality automatically reinspects the printed circuit boards following an initial automatic repair operation, and provides to the automatic repair functionality a reformulated machine readable indication of regions thereon requiring repair.
    Type: Grant
    Filed: October 21, 2005
    Date of Patent: October 16, 2012
    Assignee: Orbotech Ltd.
    Inventors: Amir Noy, Gilad Davara
  • Patent number: 8285030
    Abstract: A technique for determining a set of calibration parameters for use in a model of a photo-lithographic process is described. In this calibration technique, images of a test pattern that was produced using the photo-lithographic process are used to determine corresponding sets of calibration parameters. These images are associated with at least three different focal planes in an optical system, such as a photo-lithographic system that implements the photo-lithographic process. Moreover, an interpolation function is determined using the sets of calibration parameters. This interpolation function can be used to determine calibration parameters at an arbitrary focal plane in the photo-lithographic system for use in simulations of the photo-lithographic process, where the set of calibration parameters are used in a set of transmission cross coefficients in the model of the photo-lithographic process.
    Type: Grant
    Filed: March 15, 2010
    Date of Patent: October 9, 2012
    Assignee: Synopsys, Inc.
    Inventors: Xin Zhou, Yaogang Lian, Robert E. Gleason
  • Patent number: 8285025
    Abstract: An improved method and apparatus for detecting problems with fit and finish of manufactured articles is presented which uses structured light. Two or more structured light images acquired from opposing directions is used to measure the fit of mating surfaces while avoiding false positives caused by small defects near the seam.
    Type: Grant
    Filed: March 25, 2008
    Date of Patent: October 9, 2012
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Leo Baldwin, Joseph J. Emery
  • Patent number: 8285028
    Abstract: Aims to provide an inspection apparatus which precisely detects an amount of misalignment of a component mounted on a panel through an adhesive which contains conductive particles.
    Type: Grant
    Filed: September 24, 2008
    Date of Patent: October 9, 2012
    Assignee: Panasonic Corporation
    Inventors: Takashi Iwahashi, Toshihiko Tsujikawa, Atsushi Katayama
  • Patent number: 8279491
    Abstract: In a color misalignment detection method, an alignment pattern is obtained by designating a plurality of lines having line width and line intervals formed by superposing a line image of a black color as a reference color and a line image of a color other than the reference color, for example, a cyan line image, as one patch, and continuously forming these patches by shifting the relative position between the line images of the two colors by an optional quantity. An alignment pattern detection sensor has a light emitting diode and a photodiode. These elements are arranged along the scanning direction of the alignment pattern such that the photodiode can only receive diffused reflected light of reflected light from the alignment pattern. A spot shape of the light emitting diode and a spot shape of the photodiode are both formed in a square shape.
    Type: Grant
    Filed: September 29, 2008
    Date of Patent: October 2, 2012
    Assignee: Ricoh Company, Limited
    Inventor: Hitoshi Ishibashi
  • Patent number: 8275191
    Abstract: The invention provides an image processing apparatus for generating coordination calibration points. The image processing apparatus includes a subtracting module, an edge detection module and an intersection point generation module. The subtracting module subtracts a first image from a second image to generate a first subtracted image, and subtracts the first image from a third image to generate a second subtracted image. The edge detection module performs an edge detection process for the first subtracted image to generate a first edge image, and performs the edge detection process for the second subtracted image to generate a second edge image, wherein the first edge image includes a first edge and the second edge image includes a second edge. The intersection point generation module generates, according to the first and second edges, an intersection point pixel, serving as the coordination calibration point corresponding to the first edge and the second edge.
    Type: Grant
    Filed: October 24, 2008
    Date of Patent: September 25, 2012
    Assignee: Quanta Computer Inc.
    Inventors: Yi-Ming Huang, Ching-Chun Chiang, Yun-Cheng Liu
  • Patent number: 8274535
    Abstract: A method of using stereo vision to interface with a computer is provided. The method includes capturing a stereo image, and processing the stereo image to determine position information of an object in the stereo image. The object is controlled by a user. The method also includes communicating the position information to the computer to allow the user to interact with a computer application.
    Type: Grant
    Filed: August 17, 2007
    Date of Patent: September 25, 2012
    Assignee: QUALCOMM Incorporated
    Inventors: Evan Hildreth, Francis MacDougall
  • Patent number: 8264535
    Abstract: The invention relates to a method for analyzing a group of at least two masks for photolithography, wherein each of the masks comprises a substructure of a total structure, which is to be introduced in a layer of the wafer in the lithographic process, and the total structure is introduced in the layer of the wafer by introducing the substructures in sequence. In this method, a first aerial image of a first one of the at least two masks is recorded, digitized and stored in a data structure. Then, a second aerial image of a second one of the at least two masks is recorded, digitized and stored in a data structure. A combination image is generated from the data of the first and second aerial images, which combination image is represented and/or evaluated.
    Type: Grant
    Filed: July 11, 2008
    Date of Patent: September 11, 2012
    Assignee: Carl Zeiss SMS GmbH
    Inventors: Oliver Kienzle, Rigo Richter, Norbert Rosenkranz, Yuji Kobiyama, Thomas Scheruebl
  • Patent number: 8264534
    Abstract: A method for processing the image data of the surface of a wafer (2) recorded by at least one camera (5) is disclosed, wherein an image field (15) is defined for each camera (5) in such a way that the recorded image content is repeated after N recorded images. In an evaluation electronics (18) M utility programs (19) are determined, wherein M is equal to the number of recorded images after which the image content is repeated. The number M of utility programs (19) is adapted to the number N of images. Each of the M utility programs (19) of the plurality of recorded images is only fed with images having the same image contents in order to detect defects on the basis of the image contents of the images of the surface of the wafer. The results of the M utility programs (19) are respectively forwarded to a central program (20) in a sequential manner, which compiles a distribution of the defects present on the surface of the wafer (2) from the individual results of the M utility programs (19).
    Type: Grant
    Filed: December 4, 2008
    Date of Patent: September 11, 2012
    Assignee: Vistec Semiconductor Systems GmbH
    Inventor: Detlef Michelsson
  • Patent number: 8260034
    Abstract: A technique for identifying a defect in an object produced by a controllable process. A first type of data generated as a result of production of the object by the controllable process is obtained. A second type of data generated as a result of production of the object by the controllable process is obtained. The first type of data and the second type of data are jointly analyzed. A defect is identified in the object based on the joint analysis of the first type of data and the second type of data. By way of example, the controllable process comprises a semiconductor manufacturing process such as a silicon wafer manufacturing process and the object produced by the semiconductor manufacturing process comprises a processed wafer. The first type of data comprises tool trace data and the second type of data comprises wafer image data. The tool trace data is generated by a photolithographic tool.
    Type: Grant
    Filed: January 22, 2008
    Date of Patent: September 4, 2012
    Assignee: International Business Machines Corporation
    Inventors: Lisa Amini, Brian Christopher Barker, Perry G. Hartswick, Deepak S. Turaga, Olivier Verscheure, Justin Wai-chow Wong
  • Publication number: 20120218402
    Abstract: A pick and place machine is described which uses an imprint left in a layer of fluid by a component that has been dipped in the fluid to guide a placement process. An apparatus for placing a component is disclosed, which includes a surface that receives a layer of fluid, an imprint of a component in the layer of fluid, and a camera that captures an image of the imprint in the fluid. A method of placing a component with a pick and place machine is disclosed which includes dipping a component in a layer of fluid, capturing an image of the layer of fluid, analyzing the image of the layer of fluid, and placing the component based on results of the analysis of the image of the layer of fluid. The image can be used to determine the status of the component or where to place the component.
    Type: Application
    Filed: February 24, 2011
    Publication date: August 30, 2012
    Applicant: UNIVERSAL INSTRUMENTS CORPORATION
    Inventors: Koenraad A. Gieskes, Michael R. Vinson, Michael Yingling
  • Patent number: 8249329
    Abstract: Disclosed are methods and apparatus for automatic optoelectronic detection and inspection of objects, based on capturing digital images of a two-dimensional field of view in which an object to be detected or inspected may be located, analyzing the images, and making and reporting decisions on the status of the object. Decisions are based on evidence obtained from a plurality of images for which the object is located in the field of view, generally corresponding to a plurality of viewing perspectives. Evidence that an object is located in the field of view is used for detection, and evidence that the object satisfies appropriate inspection criteria is used for inspection. Methods and apparatus are disclosed for capturing and analyzing images at high speed so that multiple viewing perspectives can be obtained for objects in continuous motion.
    Type: Grant
    Filed: May 24, 2005
    Date of Patent: August 21, 2012
    Assignee: Cognex Technology and Investment Corporation
    Inventor: William M Silver
  • Patent number: 8244024
    Abstract: A machine vision system is configured to facilitate placement of a vehicle service apparatus relative to an associated vehicle. The machine vision system is configured to utilize images of optical targets received from one or more cameras to guide the placement of the vehicle service apparatus relative to the associated vehicle.
    Type: Grant
    Filed: April 7, 2008
    Date of Patent: August 14, 2012
    Assignee: Hunter Engineering Company
    Inventors: Daniel R. Dorrance, Timothy A. Strege, Leigh R. Burns, Jr., Mark S. Shylanski, Thomas J. Golab
  • Patent number: 8243336
    Abstract: An image forming apparatus embeds second class data that is different from sheet to sheet in first class data that is common throughout a printing operation. First and second unfolding sections unfold the first and second class data to image data. An image carrying body image examination section compares image data unfolded by the second unfolding section and picked up image data unfolded by the first unfolding section and prepared by an image carrying body image pickup section, and an intermediate transfer body image examination section compares image data unfolded by the second unfolding section and picked up image data unfolded by the first unfolding section and prepared by an intermediate transfer body image pickup section.
    Type: Grant
    Filed: March 16, 2009
    Date of Patent: August 14, 2012
    Assignee: Seiko Epson Corporation
    Inventor: Toru Fujita
  • Patent number: 8243273
    Abstract: A semiconductor wafer may include a dummy field configured to enable overlay measurements. The enhanced dummy field may include a plurality of encoding blocs that enable OVL measurements to be made throughout the enhanced dummy field.
    Type: Grant
    Filed: June 4, 2009
    Date of Patent: August 14, 2012
    Assignee: KLA-Tencor Corporation
    Inventors: Vladimir Levinski, Michael Adel, Mark Ghinovker, Alexander Svizher
  • Patent number: 8242932
    Abstract: An imaging system (10) and method (200) for reading residential and/or commercial meters. The system and method comprise a transmission element (12) that attaches to an external location of a meter (24). The transmission element (12) selectively communicates a reading signal (40) corresponding to a meter value. The system and method further comprise an imaging unit (14) located within the transmission element (12) that images the meter value at a prescribed frequency. The system and method also comprise a transceiving arrangement (16) that receives the reading signal (40) communication from the transmission element. The transceiving arrangement (16) also comprises a converter (44) that analyzes and converts the reading signal (40) communication to a use signal (46).
    Type: Grant
    Filed: November 24, 2009
    Date of Patent: August 14, 2012
    Assignee: Symbol Technologies, Inc.
    Inventors: Thomas Roslak, Andrew Doorty, Luis Llamas Martinez Garza
  • Patent number: 8238646
    Abstract: A system for the characterization of webs that permits the identification of anomalous regions on the web to be performed at a first time and place, and permits the localization and marking of actual defects to be performed at a second time and place.
    Type: Grant
    Filed: May 6, 2011
    Date of Patent: August 7, 2012
    Assignee: 3M Innovative Properties Company
    Inventors: Steven P. Floeder, James A. Masterman, Carl J. Skeps
  • Patent number: 8238639
    Abstract: Disclosed are methods and systems for dynamic feature detection of physical features of objects in the field of view of a sensor. Dynamic feature detection substantially reduces the effects of accidental alignment of physical features with the pixel grid of a digital image by using the relative motion of objects or material in and/or through the field of view to capture and process a plurality of images that correspond to a plurality of alignments. Estimates of the position, weight, and other attributes of a feature are based on an analysis of the appearance of the feature as it moves in the field of view and appears at a plurality of pixel grid alignments. The resulting reliability and accuracy is superior to prior art static feature detection systems and methods.
    Type: Grant
    Filed: April 9, 2008
    Date of Patent: August 7, 2012
    Assignee: Cognex Corporation
    Inventor: William M. Silver
  • Patent number: 8233700
    Abstract: A component mounting system includes a solder printing inspection apparatus and a component mounting apparatus. The solder printing inspection apparatus includes an ideal solder position generation unit, an ideal loading position generation unit, an image processing unit, and an ideal solder inspection standard generation unit. The ideal solder position generation unit generates ideal solder position information, and the ideal loading position generation unit generates ideal loading position information. The image processing unit generates actual solder position information and loading estimate position information. The ideal solder inspection standard generation unit generates ideal solder inspection position information.
    Type: Grant
    Filed: February 10, 2009
    Date of Patent: July 31, 2012
    Assignee: CKD Corporation
    Inventor: Takahiro Mamiya
  • Patent number: 8233696
    Abstract: The present invention discloses apparatuses and methods for simultaneous viewing and reading top and bottom images from a workpiece. The present ID reader can comprise an enclosure covering a top and bottom section of the workpiece with optical elements to guide the light from the workpiece images to a camera. The optical element can be disposed to receive images from a high angle with respect to the surface of the workpiece. The present ID reader can further comprise a light source assembly to illuminate the image. The light source assembly can utilize a coaxial light path with the images, preferably for bright field illumination. The light source assembly can also utilize a non-coaxial light path, preferably for dark field illumination. In an embodiment, the simultaneous images reaching the camera are separate into two distinct images on two different sections of the camera. In another embodiment, the simultaneous images reaching the camera are superimposed into one image on the camera.
    Type: Grant
    Filed: September 22, 2007
    Date of Patent: July 31, 2012
    Assignee: Dynamic Micro System Semiconductor Equipment GmbH
    Inventor: David Barker
  • Patent number: 8229205
    Abstract: A pattern matching method for use in manufacturing a semiconductor memory device increases a pattern matching rate between a GDS image and an SEM image. The pattern matching method includes extracting a scanning electron microscope (SEM) image and a graphic data system (GDS) image to perform a pattern matching; performing a two-dimensional Fourier transform (FFT) for the extracted GDS image and analyzing a low spatial frequency; deciding whether or not a pattern is a repeated pattern or non-repeated pattern by using the analyzed low spatial frequency; and limiting an X/Y range for a pattern matching when the decision result is for the repeated pattern, and then performing the pattern matching between the SEM image and the GDS image.
    Type: Grant
    Filed: October 17, 2008
    Date of Patent: July 24, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chan-Kyeong Hyon, Young-Seog Kang, Sang-Ho Lee, Hyun-Jong Lee
  • Patent number: 8221671
    Abstract: A solid imaging apparatus is provided that includes a replaceable cartridge containing a source of build material and an extendable and retractable flexible transport film for transporting the build material layer-by-layer from the cartridge to the surface of a build in an image plane. An operator using the device needs merely to remove a spent cartridge and replace it with a fresh cartridge to continue solid imaging virtually uninterrupted. The apparatus also includes the capability of withdrawing and inserting an imager without the operator having to perform a separate alignment step. A brush attached to the transport film and forming part of the cartridge provides for intra-layer removal of excess uncured build material. If desired, the apparatus can produce a fully reacted build. A high intensity UV source cures the build between layers. An injection molded build pad is designed to hold a build in an inverted position for improving the build.
    Type: Grant
    Filed: September 17, 2007
    Date of Patent: July 17, 2012
    Assignee: 3D Systems, Inc.
    Inventors: Charles W. Hull, Jouni Partanen, Charles R. Sperry, Suzanne M. Scott, Dennis F. McNamara, Jr.
  • Patent number: 8224063
    Abstract: An inspection apparatus and method for precisely detect an amount of misalignment of a component mounted on a panel through an adhesive which contains conductive particles. The inspection apparatus detects an amount of misalignment, from a predetermined mounting position, of a component mounted on a surface of a panel through an ACF, and includes: a visible light camera which captures an image of a panel recognition mark formed on the panel and a component recognition mark formed on the component; an obtaining unit which obtains, from the image captured by the camera, positions of feature points of the respective recognition marks; and a calculation unit which calculates an amount of misalignment of the feature point of the component recognition mark in the image captured by the camera from a predetermined position that is determined using the position of the feature point of the panel recognition mark as a reference.
    Type: Grant
    Filed: September 19, 2008
    Date of Patent: July 17, 2012
    Assignee: Panasonic Corporation
    Inventors: Akira Kameda, Atsushi Katayama, Ryuji Hamada
  • Patent number: 8218906
    Abstract: An apparatus for evaluating image registration is provided.
    Type: Grant
    Filed: August 20, 2008
    Date of Patent: July 10, 2012
    Assignee: Hankuk University of Foreign Studies Research and Industry-University Cooperation Foundation
    Inventor: Il Dong Yun
  • Patent number: 8218829
    Abstract: A system and method are provided which utilize biometrics technology in a conference environment. A biometrics engine detects facial images of a user, generates biometrics of the detected facial images, and compares the generated biometrics with biometrics information of authorized users. If a match is found, then the user is authorized and is automatically logged into the conference network. Once logged in, conferences may be automatically established, the user may be tracked by at least one video sensor, user preferences may be automatically set, and/or conference content may be easily accessed and shared with remote conference participants.
    Type: Grant
    Filed: July 31, 2006
    Date of Patent: July 10, 2012
    Assignee: Polycom, Inc.
    Inventor: Michael Kenoyer
  • Patent number: 8208140
    Abstract: A lithographic apparatus according to one embodiment of the invention includes an alignment system for aligning a substrate or a reticle. The alignment system includes a radiation source configured to illuminate an alignment mark on the substrate or on the reticle, the alignment mark comprising a maximum length sequence or a multi periodic coarse alignment mark. An alignment signal produced from the alignment mark is detected by a detection system. A processor determines an alignment position of the substrate or the reticle based on the alignment signal.
    Type: Grant
    Filed: March 5, 2010
    Date of Patent: June 26, 2012
    Assignee: ASML Netherlands B.V.
    Inventors: Edo Maria Hulsebos, Franciscus Godefridus Casper Bijnen, Patrick Warnaar
  • Patent number: 8204298
    Abstract: Methods and apparatus for placing wafers axially in an optical inspection system. A “best worst” focus method includes a series of through-focus images of a test wafer acquired using full field of view of the inspection optics. The value of the worst quality in each image is associated with the respective axial location, forming a locus of “worst” values as a function of axial location. The axial location is chosen which optimizes the locus, giving an axial location that provides the “best-worst” image quality. A “video focus” method includes a series of through-focus images generated using reduced field of view. A figure of merit is associated with each image, providing through-focus information. The “video focus” can be calibrated against the “best worst” focus. Further, a point sensor can be used to generate a single z-value for one (x,y) location that can be calibrated with “video focus”.
    Type: Grant
    Filed: July 11, 2011
    Date of Patent: June 19, 2012
    Assignee: Rudolph Technologies, Inc.
    Inventor: David Vaughnn
  • Patent number: 8198906
    Abstract: By examining scrub mark properties (such as position and size) directly, the performance of a wafer probing process may be evaluated. Scrub mark images are captured, image data measured, and detailed information about the process is extracted through analysis. The information may then be used to troubleshoot, improve, and monitor the probing process.
    Type: Grant
    Filed: July 1, 2010
    Date of Patent: June 12, 2012
    Assignee: Rudolph Technologies, Inc.
    Inventor: John T. Strom
  • Patent number: 8200017
    Abstract: Described is a technology in which face alignment data is obtained by processing an image using a component-based discriminative search algorithm. For each facial component, the search is guided by an associated directional classifier that determines how to move the facial component (if at all) to achieve better alignment relative to its corresponding facial component in the image. Also described is training of the classifiers.
    Type: Grant
    Filed: October 4, 2008
    Date of Patent: June 12, 2012
    Assignee: Microsoft Corporation
    Inventors: Lin Liang, Fang Wen, Jian Sun
  • Patent number: 8194969
    Abstract: A visual inspection apparatus includes an image-data acquisition unit for acquiring plural pieces of image data A to C on an inspection target, image comparison units for comparing the image data A to C with each other thereby to create plural pieces of sign-affixed difference-image data D and E, the image data A to C being acquired by the image-data acquisition unit, difference-image comparison units for determining the difference between the sign-affixed difference-image data D and E created by the image comparison units, and a judgment unit for subjecting, to a threshold-value processing, difference data F between the difference-image data D and E, the difference data F being acquired by the difference-image comparison units, obtaining a detection sensitivity by enlarging the difference between an abnormal signal level of an image of an area where an abnormality exists from the visual inspection.
    Type: Grant
    Filed: March 31, 2010
    Date of Patent: June 5, 2012
    Assignee: Hitachi High-Technologies Corporation
    Inventor: Kei Shimura
  • Patent number: 8170374
    Abstract: An image reconstruction method includes: fetching at least two images; calculating a relative displacement between those adjacent images by utilizing a phase correlation algorithm; calculating an absolute displacement between any one of those images and the first image of those images; and computing a common area of those images by utilizing the relative displacement and the absolute displacement, then deleting remainder portions of the image excluding the common area; determining a rotation centers of those images; and reconstructing three-dimensional data of those images. In the present invention, the phase correlation algorithm can be utilized to process numerous noise signals so as to get a higher precision of the image reconstruction.
    Type: Grant
    Filed: November 29, 2010
    Date of Patent: May 1, 2012
    Assignee: National Synchrotron Radiation Research Center
    Inventor: Gung-Chian Yin
  • Patent number: 8170373
    Abstract: An image reconstruction method includes: fetching at least two images; calculating a relative displacement between those adjacent images by utilizing a phase correlation algorithm; calculating an absolute displacement between any one of those images and the first image of those images; and computing a common area of those images by utilizing the relative displacement and the absolute displacement, then deleting remainder portions of the image excluding the common area; and accumulating the common area of every image. In the present invention, the phase correlation algorithm can be utilized to process numerous noise signals so as to get a higher precision of the image reconstruction.
    Type: Grant
    Filed: November 29, 2010
    Date of Patent: May 1, 2012
    Assignee: National Synchrotron Radiation Research Center
    Inventor: Gung-Chian Yin
  • Patent number: 8159243
    Abstract: A method of performing alignment of an array of probe tips of a probe card to corresponding contact pads for wafer probing applications by performing the steps of: obtaining a backside image of the wafer; overlaying a mapping of the contact pads over the backside image; selecting contact pads as landing points; obtaining an image of the probe tips array; comparing the landing points to corresponding positions of probe tips; and, if the positions of probe tips are not aligned with the landing point, rotating the probe card to align the positions of probe tips to the landing points.
    Type: Grant
    Filed: November 12, 2009
    Date of Patent: April 17, 2012
    Assignee: DCG Systems, Inc.
    Inventor: Richard Alan Portune
  • Patent number: 8159717
    Abstract: Combining section 21 creates the composite image data by combining the image data of the original image and the additional image, and log management section 22 stores the condition of composite images at the time of image combining as log information 40. Printer section 18 prints the composite image based on the composite image data, and a scanner section 16 optically reads the printed composite image. Judgment section 23 judges the condition of adding the additional image in the composite image (presence or absence of overlapping, etc.,) based on stored log information 40 and on the image data obtained by reading out the composite image, and notification control section 24 notifies the user of the judgment result either by displaying or by printing out.
    Type: Grant
    Filed: July 19, 2006
    Date of Patent: April 17, 2012
    Assignee: Konica Minolta Business Technologies, Inc.
    Inventors: Kiyohari Nakagama, Kouichi Hanada, Toyotsugu Sawaki, Hiroji Ito