Abstract: A method of manufacturing an orientation film which method is suitable for manufacturing an orientation film containing a ceramic at low cost. The method includes the steps of: (a) forming a ceramic film on a seed substrate in which crystal orientation is controlled at least on a surface thereof by using an aerosol deposition method of injecting powder toward a substrate and depositing the powder on the substrate; and (b) heat-treating the ceramic film formed at step (a) to form an orientation film in which crystal grains contained in the ceramic film is oriented.

Abstract: A method and system for detecting tobacco-specific nitrosamines. The method includes exposing at least one microcantilever beam to a medium, which may contain tobacco-specific nitrosamines, and measuring a deflection of the microcantilever beam, wherein the deflection indicates a presence of tobacco-specific nitrosamines in the medium. The at least one microcantilever beam can include a silicon base layer and a gold-coated receptor layer with a plurality of thiol molecules having a sulfur head and carboxyl-terminated group. The at least one microcantilever beam can include a silicon base layer and a metal or metal oxide coated receptor layer. Alternatively, the microcantilever beam can be formed by co-absorbing tobacco-specific nitrosamines and silane molecules on a silicon microcantilever surface, wherein the template molecules of tobacco-specific nitrosamines physically co-adsorb between the silane molecules.

Abstract: The present invention provides a method of depositing a metallic layer on to a surface of a piezoelectric substrate, which method comprises the application of cold spraying to deposit the metallic layer or layers.

Abstract: A composition for ferroelectric thin film formation, comprising at least a colloidal solution containing metals serving as materials constituting a ferroelectric thin film, the colloidal solution having an average colloidal particle diameter of 1 to 100 nm, and obtaining a particle size distribution having two or more peaks; a ferroelectric thin film formed from the composition for ferroelectric thin film formation, and a liquid-jet head equipped with a piezoelectric element having the ferroelectric thin film.

Abstract: A method of producing a piezoelectric actuator includes the steps of: forming a first electrode layer on a substrate by jetting an aerosol containing particles of a conductive material and ceramic particles onto the substrate to make the particles adhere to the substrate; forming a piezoelectric layer on the first electrode layer by jetting an aerosol containing particles of a piezoelectric material onto the first electrode layer to make the particles adhere to the electrode; performing an annealing treatment for the piezoelectric layer; and forming, on the piezoelectric layer, a second electrode layer paring with the first electrode layer. Accordingly, the adherence between the substrate and the first electrode layer and between the first electrode layer and the piezoelectric layer are improved, thereby hardly causing exfoliation of the layers due to differences in coefficients of thermal expansion between the layers.

Abstract: Systems and methods for detecting a gaseous analyte utilize a micromechanical piezoelectric resonator having a functionalization layer configured to bind with the gaseous analyte. The functionalization layer may include a layer of carbon nanotubes affixed to the resonator and coated with biopolymers configured to bind with the gaseous analyte. The gaseous analyte may be detected by operating the micromechanical piezoelectric resonator and functionalization layer in the presence of the gas, detecting a change in the resonant frequency of the resonator, and determining the concentration of the gaseous analyte from the change in resonant frequency. Finally, the layer of carbon nanotubes may be grown on the piezoelectric resonator by depositing a catalyst on a piezoelectric structure, heating the piezoelectric structure and the catalyst to enhance the growth of the carbon nanotubes, and growing the carbon nanotubes at growth sites on the piezoelectric structure.

Abstract: An ultrafine metal oxide particle dispersion liquid is prepared by mixing an ultrafine titanium-based composite metal oxide particle dispersion liquid prepared by hydrolysis in a microemulsion containing a hydrophobic dispersion medium, water, and a surfactant and an organic metal compound solution for the same titanium-based composite metal oxide at a ratio of 1:1 to 1:30 in terms of the composite metal oxide contained.

Abstract: A method of manufacturing a liquid ejection head, includes forming a first substrate into a curved shape so as to form a portion of a substantially cylindrical shape, the first substrate being provided with a liquid flow channel of liquid and a drive wire for supplying a drive signal to a piezoelectric element; forming a second substrate into a curved shape so as to form a portion of a substantially cylindrical shape, the second substrate forming a pressure generating chamber for ejecting the liquid and a diaphragm which forms a surface of the pressure generating chamber; forming the piezoelectric element on the diaphragm at a position corresponding to the pressure generating chamber; forming an ejection port plate on an opposite side across the pressure generating chamber from the diaphragm; and bonding together the first substrate and the second substrate.

Abstract: A photo-resist of a dry film patterned to form opening portions and non-opening portions is provided on a release film. An electrically conductive paste is applied by a doctor blade and thereafter is dried. Then, the release film of the dry film is removed and thereafter the dry film is adhered to a ceramic green sheet. The photo-resist is removed from the ceramic green sheet to form an electrically conductive film on the ceramic green sheet. The ceramic electronic component is manufactured by sintering the ceramic green sheet having the electrically conductive film formed.

Abstract: A method includes applying a lip, comprised of a first material, along at least a portion of an actuator of an electronic device, and applying a coating, comprised of an elastic material, to cover a part of the actuator, the coating disposed to facilitate actuation of the actuator.

Abstract: A method of manufacturing an ink-jet head according to the present invention includes a step of providing a vibration plate in which grooves associated with respective pressure chambers are formed on a surface of the vibration plate, and a piezoelectric layer forming step of forming a piezoelectric layer by depositing particles of a piezoelectric material on the surface of the vibration plate on an opposite side of a channel unit. Since grooves corresponding to the grooves in the vibration plate are formed also in the piezoelectric layer, it is possible to reduce a cross talk between operating sections of the piezoelectric layer. Further, chip and crack is hardly developed in the piezoelectric layer.

Abstract: A piezoelectric layer has a multilayer structure including a tensile stress layer and a compression stress layer. The mechanical strength of the piezoelectric layer is increased to prevent the occurrence of cracks and to realize a high electromechanical coupling coefficient. An acoustic resonator 1 includes a first electrode 13 including at least one conductive layer, a piezoelectric layer 14 including a plurality of layers, the piezoelectric layer 14 being formed adjacent to the top face of the first electrode 13, and a second electrode 15 including at least one conductive layer, the second electrode 15 being formed adjacent to the top face of the piezoelectric layer 14. The piezoelectric layer 14 includes a tensile compression layer 23 in which tensile stress is present and compression stress layers 21 and 25 in which compression stress is present. The tensile stress in the tensile stress layer 23 and the compression stress in the compression stress layers 22 and 25 are adjusted to cancel each other.

Abstract: A MEMS device with a thin piezoelectric actuator is described. A substrate with a first surface has a crystalline orientation prompting layer on the first surface. A piezoelectric portion contacts the crystalline orientation prompting layer and has an orientation corresponding to the orientation of the crystalline orientation prompting layer. A dielectric material surrounds the piezoelectric portion. The dielectric material is formed of an inorganic material.

Abstract: The present invention provides a method to design, manufacture and structure a multi-component energy device having a unified structure, wherein the individual components are chosen from the list consisting of electrochemical cells, photovoltaic cells, fuel-cells, capacitors, ultracapacitors, thermoelectric, piezoelectric, microelectromechanical turbines and energy scavengers. Said components are organized into a structure to achieve an energy density, power density, voltage range, current range and lifetime range that the single components could not achieve individually, i.e. to say the individual components complement each other. The individual components form a hybrid structure, wherein the elements are in electrical, chemical and thermal conduction with each other.

Abstract: A manufacturing method of a dielectric device includes steps described below. (1) Mixing step: Powders serving as a matrix and additive powders for sintering the matrix are mixed. (2) Mixture heat-treating step: The mixture of the matrix and the additive that has been subject to the mixing step is heat-treated. (3) Deposition layer formation step: The material powders obtained through the mixture heat-treating step are injected toward a substrate so as to form a deposition layer on the substrate. (4) Deposition layer heat-treating step: The deposition layer formed on the substrate through the deposition layer formation step is heat-treated so as to form the dielectric layer on the substrate.

Abstract: An encapsulated nanostructure fabricated using layers of polymer material and further processed for use in a micro-scale target device is presented. The fabrication includes the formation on a substrate of an array of encapsulated nanostructures. The encapsulated nanostructures each include a nanostructure and a micro-scale, multi-block structure that encapsulates the nanostructure. Each encapsulated nanostructure can be made usable by a target device by removing, e.g., by etching, one of the layers to expose a portion of the nanostructure.

Abstract: A method of producing a piezoelectric ceramic thick film on a substrate, said method comprising: providing a piezoelectric ceramic material in powder form; forming a liquid mixture by mixing the powdered material with a liquid phase precursor of a metal oxide of low-melting point, said precursor being adapted to decompose, upon subsequent annealing, into the metal oxide; drying the liquid mixture to form a precipitate; milling the precipitate to form a powdered precipitate; adding an organic carrier to the powdered precipitate; further milling the precipitate to form a paste; depositing a layer of the paste, as a wet film, onto the substrate; and annealing the layered substrate at a temperature and for a time sufficient to cause transformation of the paste into the thick film.

Abstract: A piezo-electric film forming method includes (1) a first moving step of moving a nozzle with respect to a substrate along a first direction to form a first piezo-electric band extending along the first direction, (2) a measuring step of measuring thickness distribution along the width of the first piezo-electric band, (3) a calculating step of calculating a shifting distance based on the thickness distribution, (4) a shifting step of moving the nozzle with respect to the substrate along a second direction by the calculated shifting distance, wherein the second direction intersects with the first direction, and (5) a second moving step of moving the nozzle with respect to the substrate along the first direction to form a second piezo-electric band extending along the first direction. The piezo-electric film is formed such that the first piezo-electric band and the second piezo-electric band are overlapped.

Abstract: A surface acoustic wave filter comprised of a plurality of surface acoustic wave resonators having different resonance frequencies, the filter comprising a substrate made of a lithium niobate, comb electrodes (1201 and 1202) formed on the substrate, and a thin dielectric film covering the comb electrodes (1201 and 1202), wherein the surface acoustic wave resonator having a lower resonance frequency is formed to have a metallization ratio larger than a metallization ratio of the surface acoustic wave resonator having a higher resonance frequency, thereby providing the surface acoustic wave filter and an antenna duplexer featuring superior characteristics with insignificant ripples while suppressing spurious responses of the surface acoustic wave resonators.

Abstract: Provided is a lead-containing perovskite-type oxide film having principally (100) and/or (001) orientation and containing lead as a chief component, which is over 2 ?m thick and exhibits such hysteresis characteristics that two coercive fields are both positive. A method of producing such an oxide film, a piezoelectric device including such an oxide film, and a liquid ejecting apparatus provided with such a piezoelectric device are also provided.

Abstract: A piezoelectric film of a perovskite oxide represented by a general expression (P) below and has a pyrochlore free single phase perovskite structure with a/b?1.06. Pba(Zrx,Tiy,Mb-x-y)bOc??(P) (where, M represents one or more types of metal elements, 0<x<b, 0<y<b, 0?b-x-y, and a:b:c=1:1:3 is standard, but the molar ratio may deviate from the standard within a range in which a perovskite structure can be obtained.

Abstract: A method for a piezoelectric actuator and an ink-jet head uses, for forming a lower electrode on a vibration plate, metal-nano particles which can start to sinter with a low temperature as a conductive material; and uses, for forming a piezoelectric layer, an aerosol deposition method requiring no calcination step. Accordingly, upon forming the lower electrode and piezoelectric layer, any calcination under severe condition is not needed. In addition, the calcination of the lower electrode can be advanced simultaneously with an annealing step required after forming the piezoelectric layer. Accordingly, the thermal cycle during producing process can be minimized, thereby suppressing the exfoliation of layers and diffusion of material forming vibration plate into the piezoelectric layer due to thermal history, and consequently lower the degradation of piezoelectric characteristics.

Abstract: Disclosed herein is a device comprising a pair of electrodes; and a nanotube, a nanorod and/or a nanowire; the nanotube, nanorod and/or nanowire comprising a piezoelectric and/or pyroelectric polymeric composition; the pair of electrodes being in electrical communication with opposing surfaces of the nanotube, nanorod and/or a nanowire; the pair of electrodes being perpendicular to a longitudinal axis of the nanotube, nanorod and/or a nanowire.

Abstract: A microelectromechanical system diaphragm is provided. The microelectromechanical system diaphragm includes a substrate, a first conductive layer, a second conductive layer, a first dielectric layer, and a second dielectric layer. The first conductive layer is disposed on the substrate. The first conductive layer has a flexible portion in which a plurality of trenches is formed. The second conductive layer is disposed between the first conductive layer and the substrate, in which the flexible portion is located above the second conductive layer. The first dielectric layer is disposed between the second conductive layer and the substrate. The second dielectric layer is disposed between the substrate and a portion of the first conductive layer so as to suspend the flexible portion. Furthermore, at least one first opening is formed in the first conductive layer.

Abstract: A surface acoustic wave device includes a piezoelectric substrate; comb electrodes provided on a first surface of the piezoelectric substrate; and an insulating film provided on at least one of the first surface of the piezoelectric substrate and a second surface thereof opposite to the first surface, the insulating film having a thickness greater than that of the piezoelectric substrate and having a linear expansion coefficient smaller than that of the piezoelectric substrate in a direction of propagation of a surface acoustic wave.

Abstract: An inorganic film formed of an inorganic material on a metal film having a surface including surface-oxidized areas. The surface-oxidized areas are surface oxidized to different degrees. For example, the surface-oxidized areas are one or more lowly-surface-oxidized areas and one or more highly-surface-oxidized areas. The inorganic film includes regions which are respectively formed on the surface-oxidized areas, and the regions have different crystal structures according to the different degrees of surface oxidation. For example, a patterned inorganic film constituted by one or more protruding portions arranged on one or more lowly-surface-oxidized areas of the surface of the metal film can be produced by removing the portions of the inorganic film formed on highly-surface-oxidized areas.

Abstract: A producing method for a liquid discharge head having a pressure generation chamber communicating with a discharge port for discharging a liquid, a piezoelectric element provided corresponding to the pressure generation chamber, and a vibration plate provided between the pressure generation chamber and the piezoelectric element, the method including: a preparation step of preparing a flat plate-shaped substrate having a recess on a main surface thereof, a piezoelectric element forming step of forming the piezoelectric element in the recess, a vibration plate forming step of forming the flat vibration plate on the main surface of the substrate and the piezoelectric element, a pressure generation chamber forming step of forming the pressure generation chamber on the vibration plate, and a removing step of removing the substrate in at least a peripheral portion of the piezoelectric element.

Abstract: A film forming method in which crystalline film having PZT (001) or PZT (100) as a principal component thereof is laminated on a foundation film having a (111) oriented noble metal as a principal component thereof, the method including the steps of: performing reduction treatment on a surface of the foundation film; and forming the crystalline film by an MOCVD method on the surface of the foundation film.

Abstract: A media for an information storage device includes a substrate of single-crystal silicon, a buffer layer of an epitaxial single crystal insulator formed over the substrate, a bottom electrode layer of an epitaxial single crystal conductor formed over the buffer layer, a ferroelectric layer of an epitaxial single crystal ferroelectric material formed over the bottom electrode layer, and an overlayer of an epitaxial single crystal material formed over the ferroelectric layer. Dipole charges generally having a first orientation exist at an interface between the bottom electrode layer and the ferroelectric layer includes, while dipole charges generally having a second orientation opposite the first orientation exist at an interface between the ferroelectric layer and the overlayer includes.

Abstract: Methods can be adapted for design of a sensitive monolayer for detection of hydrogen sulphide at room temperature with SAW/BAW devices. The sensitive monolayer can be synthesized based on chemical compounds, which belongs to a class of thiacalix[n]arenas, mercapto halides, mercapto alcohols and chloromethylated thiacalix[n]arenas. The sensitive monolayer can be directly immobilized or anchored at the surface of a piezoelectric quartz substrate in a covalently bonded manner by means of direct printing process. The piezoelectric quartz substrate can be activated in basic medium or in acid medium before the immobilization of the sensitive monolayer in order to increase the population of OH groups. Thus, the synthesized sensitive monolayer exhibits a high site density, fast response and long-term stability for H2S sensing.

Abstract: A piezoelectric film laminate including a sapphire substrate and a lead zirconate titanate niobate film and a potassium niobate film formed on the sapphire substrate.

Abstract: An oxide source material solution for forming an oxide film having a composition expressed by PbuZrxTi1-x-yMyO3 is presented. A composition of metal element constituents in the oxide source material solution is expressed by [Pb]:([Zr]+[Ti]+[M])=v:1, and a difference (v?u) in composition ratio of Pb between the oxide source material solution and the oxide film is 0.01 or less.

Abstract: A piezoelectric element includes a piezoelectric layer disposed between a first electrode and a second electrode. Anti-deformation layers continue from the piezoelectric layers ad contain a less moisture-permeable component than the piezoelectric layer. The piezoelectric layers and the anti-deformation layers are alternately and continuously disposed in the direction of the arrangement of the rows of the pressure generating chambers. The anti-deformation layers are disposed at least in regions opposing a partition member with the vibration plate therebetween. The piezoelectric layer is enclosed by the first electrode, the second electrode and at least either the vibration plate or the anti-deformation layer.

Abstract: Disclosed are a piezoelectric substrate and a surface acoustic wave (SAW) filter. A piezoelectric substrate 10a includes a base member 11 including an oxide layer 12 with a plurality of grooves 12a on one surface of the base member 11; a buffer member 13 being formed on the oxide layer 12 to expose one end and another end of the oxide layer 12; an insulating member 14 being formed on another surface of the base member 11; and a piezoelectric member 15 being formed on the buffer member 13. A SAW filter using the piezoelectric substrate 10a, includes the base member 11 including the oxide layer 12 with the plurality of grooves 12a on one surface; the buffer member 13; the insulating member 14; the piezoelectric member 15; and a plurality of interdigital transducer (IDT) electrodes 17 and 17 being formed on the piezoelectric member 15 to receive an electrical signal, filter the electrical signal, and output the filtered electrical signal.

Abstract: An array of piezoelectric elements is easily manufactured by making insulating portions at side surfaces smaller. The piezoelectric element includes: a multilayered structure in which piezoelectric material layers and internal electrode layers are alternately stacked; first insulating films formed by using an AD method, for covering a first group of internal electrode layers at a first surface of the multilayered structure; second insulating films formed by using the AD method, for covering a second group of internal electrode layers at a second surface of the multilayered structure; a first external electrode connected to the second group of internal electrode layers and insulated from the first group of internal electrode layers at the first surface; and a second external electrode connected to the first group of internal electrode layers and insulated from the second group of internal electrode layers at the second surface.

Abstract: A method of manufacturing a dielectric film includes a coating step of coating sol made of an organic metal compound and forming a dielectric precursor film, a drying step of drying the dielectric precursor film, a degreasing step of degreasing the dielectric precursor film, and a baking step of baking the dielectric precursor film to form a dielectric film. The drying step includes a first drying step of drying the dielectric precursor film by heating the dielectric precursor film to a temperature lower than a boiling point of a solvent which is a main solvent of the sol and then holding the dielectric precursor film at the temperature for a predetermined period of time, and a second drying step of drying the dielectric precursor film further by reheating the dielectric precursor film and then holding the dielectric precursor film at the temperature for a predetermined period of time.

Abstract: A method for manufacturing a potassium niobate deposited body includes: forming a buffer layer above a substrate composed of an R-plane sapphire substrate; forming above the buffer layer a potassium niobate layer or a potassium niobate solid solution layer that epitaxially grows in a (100) orientation in a pseudo cubic system expression; and forming an electrode layer above the potassium niobate layer or the potassium niobate solid solution layer, wherein a (100) plane of the potassium niobate layer or the potassium niobate solid solution layer is formed to tilt with a [11-20] direction vector as a rotation axis with respect to an R-plane (1-102) of the R-plane sapphire substrate.

Abstract: Droplets of an ultraviolet-curing resin are jetted on to a cavity plate included in a stacked body, and the droplets are cured by irradiating ultraviolet rays. Next, a vibration layer is formed on the cavity plate by an AD method. Further, a common electrode is formed on the vibration layer, and a mask is arranged on the vibration layer. Next, a piezoelectric layer is formed on the vibration layer, and thereafter, the mask is removed. Further, a through hole and pressure chambers are formed by removing parts of the cavity plate. Thereafter, individual electrodes are formed on the piezoelectric layer, and by heating the stacked body at about 850° C., annealing of the piezoelectric layer and sintering of the electrodes are performed. Accordingly, an ink-jet head including a filter which has a low channel resistance is manufactured.

Abstract: An apparatus including vertically separated acoustic resonators are disclosed. The apparatus includes a first acoustic resonator on a substrate and a second acoustic resonator vertically separated above the first acoustic resonator. Because the resonators are vertically separated above another, total area required to implement the resonators is reduced thereby savings in die size and cost are realized. The vertically separated resonators are supported by standoffs that are fabricated on the substrate, or on a resonator.

Abstract: A method for producing a piezoelectric actuator having a diffusion-preventive layer and a piezoelectric layer stacked on a vibration plate includes providing the vibration plate having a surface on which a groove is formed; and blowing an aerosol containing ceramics particles toward an area, on the surface of the vibration plate, in which the groove is formed from a first direction and a second direction different from the first direction by using an aerosol deposition method to form the diffusion-preventive layer on the vibration plate. The aerosol is blown toward the vibration plate in the first and second directions. Therefore, the material particles contained in the aerosol can be collided with the inner walls of the groove formed on the vibration plate as well, and thus the diffusion-preventive layer can be formed on the vibration plate without causing any unevenness.

Abstract: Provided are a ferroelectric thin film formation composition, a ferroelectric thin film and a method of fabricating a ferroelectric thin film, the ferroelectric thin film formation composition being capable of effectively preventing occurrence of a striation and expanding the range of choice of a sol composition. A ferroelectric thin film formation composition containing a metal compound that is a material to form a ferroelectric thin film contains a hydrophobic compound which includes a reactive group reacting with a hydroxy group and in which at least an end side of a remnant exclusive of the reactive group has a hydrophobic property. Thus, it is possible to expand the range of choice of the sol composition while effectively suppressing occurrence of the striation.

Abstract: Methods of reducing phase and amplitude ripples in a BAW resonator frequency response by providing a substrate, fabricating a Bragg mirror having alternate layers of a high acoustic material and a low acoustic material on a first surface of the substrate, fabricating a BAW on the Bragg mirror, and coating a second side of the substrate opposite the first side with a lossy material having an acoustic impedance in the range of 0.01x to 1.0x the acoustic impedance of the layers of high impedance material, the second surface of the substrate being a polished surface. Various embodiments are disclosed.

Abstract: The invention relates to a method for a complex oxide film having a high relative dielectric constant and a thickness which can be arbitrarily controlled, which is obtained, without using any large-scale equipment, by forming a metal oxide layer containing a first metal element on substrate surface and then allowing the layer to react with a solution containing a second metal ion to thereby form a complex oxide film containing the first and second metal elements, and a production method thereof. Further, the invention relates to a dielectric material and a piezoelectric material containing the complex oxide film, a capacitor and a piezoelectric element including the material, and an electronic device comprising the element.

Abstract: Methods of forming depositing a ferroelectric thin film, such as PGO, by preparing a substrate with an upper surface of silicon, silicon oxide, or a high-k material, such as hafnium oxide, zirconium oxide, aluminum oxide, and lanthanum oxide, depositing an indium oxide film over the substrate, and then depositing the ferroelectric film using MOCVD.

Abstract: Provided are a ferroelectric thin film formation composition, a ferroelectric thin film and a method of fabricating a ferroelectric thin film, the ferroelectric thin film formation composition being capable of effectively preventing occurrence of a striation and expanding the range of choice of a sol composition. A ferroelectric thin film formation composition containing a metal compound that is a material to form a ferroelectric thin film contains a hydrophobic compound which includes a reactive group reacting with a hydroxy group and in which at least an end side of a remnant exclusive of the reactive group has a hydrophobic property wherein the reactive group is at least one of a silane halide, a hydroxysilane and an alkoxysilane. Thus, it is possible to expand the range of choice of the sol composition while effectively suppressing occurrence of the striation.

Abstract: In a method for manufacturing a piezoelectric actuator, the piezoelectric layer is formed by using material particles M having a composition which differs from an optimum composition by a diffusion amount of Ti. The piezoelectric layer has a two-layer structure including a first piezoelectric layer formed on a vibration plate and a second piezoelectric layer laminated on the first piezoelectric layer. Only the first piezoelectric layer has a composition different from the optimum composition, and the second piezoelectric layer laminated thereupon has the optimum composition. When the piezoelectric layer of such a two-layer structure is subjected to the annealing treatment, the composition of the first piezoelectric layer is corrected and becomes the optimum composition by the diffusion of a diffusion element.

Abstract: The invention relates to a method for obtaining a composite ferro-electric material, consisting of the following stages: particles of a ferro-electric compound are covered with a dielectric layer; a dense composite material is formed by sintering the covered particles. The invention is characterized in that in the covering stage the particles of the ferro-electric compound are brought into contact with a fluid containing at least one solvent and a precursor of the dielectric compound, said fluid being pressurized.

Abstract: Microelectromechanical systems (MEMS) include critical devices for various highly sensitive applications. However, MEMS operation may be impaired by vibration. A modular vibration control pedestal for integration with a MEMS is provided according to embodiments of the present invention which includes a piezoelectric perovskite oxide disposed on a substrate and a shape memory alloy component disposed on the piezoelectric perovskite oxide. In particular embodiments of a MEMS device including a modular VCP, vibration is reduced by at least 50%.

Abstract: A method for making a piezoelectric element including a piezoelectric film formed on a substrate by a gas deposition technique includes the steps of ejecting ultra-fine particles of a piezoelectric material having a perovskite structure from an ejecting device toward the substrate, and applying an electric field to the ultra-fine particles traveling to the substrate. The substrate may be composed of a metal or a resin.

Abstract: A recess is formed on an upper surface of a vibration plate at a position corresponding to a pressure chamber. Next, a low-elasticity material having a lower modulus of elasticity than the vibration plate is filled in the recess. Then, aerosol including a piezoelectric material particles and carrier gas is sprayed on the upper surface of the vibration plate to form a piezoelectric layer. At this time, the particles of the piezoelectric material do not adhere to a surface of the low-elasticity material filled in the recess, and hence the piezoelectric layer can be formed only in an area excluding the surface of the low-elasticity material. Thus, there is provided a method of manufacturing a piezoelectric actuator, the method capable of easily preventing, when forming the piezoelectric layer by an aerosol deposition method, formation of the piezoelectric layer on a surface of the recess.