Abstract: A method of performing a lower temperature bonding technique to bond together two mating pieces of glass includes applying a sodium silicate aqueous solution between the two pieces.

Abstract: A method for treating magnesium die castings sufficiently cleans the die castings and improves their paint adhesion and corrosion resistance by utilizing hydroxy acetic acid, among other constituents. The method includes cleaning the castings with an alkaline cleaning solution, rinsing with water, pickling the castings with an aqueous hydroxy acetic acid solution, rinsing with water again, and then contacting the castings with a chrome-free pretreatment. The alkaline cleaning and pickling steps appear to remove substantially all die casting impurities in order to adequately prepare the metal for application of the pretreatment. The chrome-free pretreatment may be an organofunctional silane solution or an aqueous polymeric system having hydroxyl and carboxylic functional groups along with a compound of a group IV-B element. The pretreatment is then painted or contacted with another decorative coating, with no rinsing step occurring between the pretreatment and painting steps.

Abstract: The present invention provides an improved method for making a solar control sheet having one or more metal layers. In the prior art solar control sheets, each metal layer would normally be non-porous so that water vapor would not be readily transmitted therethrough. However, in this invention the metal layer is rendered porous because it is deposited on a porosity inducing surface. The porosity inducing surface may be the surface of a porous primer layer or a surface which has been roughened. Consequently when the solar control film of this invention is mounted on a window with a water based mounting media, the water can quickly evaporate through the film without causing undesirable cloudiness which is normally associated with water which becomes trapped between the film and the window.

Abstract: A method for plating a high impact resistant plastic, particularly a polycarbonate substrate which has been modified with up to about 50 percent by weight of acrylonitrile-butadiene-styrene. The surface of the plastic is first conditioned with a halogenated organic solvent conditioner, preferably 1-3-dichloro-2-propanol, prior to the electrochemical deposition of the desired metal layer.

Abstract: A process for forming a zinc oxide film including immersing an electroconductive substrate having a surface including a plurality of linear projections in an aqueous solution containing at least nitrate ions and zinc ions to form a zinc oxide film on the electroconductive substrate by a liquid-phase deposition. The plurality of linear projections may preferably provide an uneven surface which has a center-line average surface roughness Ra(X) of 15-300 nm when scanned in a direction parallel to the linear projections, a center line average surface roughness Ra(Y) of 20-600 nm when scanned in a direction perpendicular to the linear projections, and an Ra(X)/Ra(Y) ratio of at most 0.8. The thus formed zinc oxide film is provided with an uneven surface suitable for an optical-confinement layer of a photo-electricity generating device excellent in photoelectric performances.

Abstract: A method of cleaning a substrate by covering the substrate with a composition in a sufficient amount to clean the substrate. The composition includes a substantial amount of at least one low viscosity organic compound which includes a radiation curable group. The compound is reclaimed for further use. The reclaimed compound may be used as a reactive diluent in a radiation curable coating composition.

Abstract: An ion beam sputtering system having a chamber, an ion beam source, a multiple targets, a shutter, and a substrate stage for securely holding a wafer substrate during the ion beam sputtered deposition process in the chamber. The substrate stage is made to tilt about its vertical axis such that the flux from the targets hit the wafer substrate at a non-normal angle resulting in improved physical, electrical and magnetic properties as well as the thickness uniformity of the thin films deposited on the substrate in the ion beam sputtering system.

Abstract: There is disclosed a method of treating running faces subjected to wear of a workpiece in which ions or molecule chain components of fluorocarbon molecules are arranged on the surface of the workpiece. It is especially preferred to attach ions of polyfluoroether molecules. The attachment can be effected by adhesion or by chemical bonding. Principally the method according to the invention can be applied to metallic and ceramic materials, wherein especially good experiences have been made with the surface treatment of aluminum workpieces, ceramic inserts etc.

Abstract: A heat resistant, mold releasing coating characterized in: (a) that it comprises a layer A formed to cover the surface of the base material to be coated, wherein the coating layer forming components thereof comprise 20 to 95% by weight of frit and 5 to 80% by weight of at least one heat resistant resin selected from the group consisting of fluoro resins, silicon based resins, aromatic polysulfone resins, poly(phenylenesulfide) resins, polyamideimide resins and polyimide resins, and (b) that it comprises a layer B formed to cover the surface of said layer A, wherein the coating layer forming components thereof comprise 20 to 100% by weight of one or more fluoro resins, 0 to 20% by weight of frit, and 0 to 80% by weight of at least one heat resistant resin selected from the group consisting of silicon based resins, aromatic polysulfone resins, poly(phenylenesulfide) resins, polyamideimide resins and polyimide resins.

Abstract: A method is provided for zincating aluminum substrates for metal plating thereon wherein the plated aluminum product has smoothness, dimensional integrity and increased production yield of the plated products. The substrates also have enhanced paramagnetic thermal stability of ENP coatings used on memory disk products. A zincate bath contains as additives Fe.sup.+3 and NaNO.sub.3, and a chelator to chelate the iron, with a preferred iron chelator being Rochelle Salt and with the amount of Fe.sup.+3 being controlled at a preferred concentration of 0.2 to 0.3 g/l. A preferred zincating method employs an etchant composition comprising HNO.sub.3, H.sub.2 S0.sub.4 and H.sub.3 PO.sub.4 to etch the aluminum substrate prior to zincating. Use of this etchant composition, either alone or with the zincate bath of the invention, is particularly effective for aluminum substrates which have been ground to a smoothness of less than 100 .ANG..

Abstract: A method is provided for preparing the surface of a cyanate ester resin composite for metal plating. More particularly, a layer consisting essentially of cyanate ester resin is applied to the surface of the composite. Thereafter, the surface of the resin layer is etched, preferably by treatment with an etching solution containing either a quaternary ammonium hydroxide or a primary amine. Upon completion of the etching process, the cyanate ester resin layer may be successfully plated with metal. The method of the invention operates to improve adhesion between the cyanate ester resin composite and a subsequently-plated metal by providing the composite with a homogenous distribution of mechanical anchoring sites for a subsequently-plated metal, such that uniformity of adhesion is achieved.

Abstract: The object of the present invention is to provide a surface modified rubber and a seal material which enable obtaining a rubber molding being excellent in nonadherence, low friction, abrasion resistance and plasma resistance while retaining strength, compression set, sealing capability and deformation follow-up properties inherently possessed by a rubber material. The process for producing a surface modified rubber according to the present invention comprises contacting a treatment liquid containing a monomer having a polymerizable double bond, a polymerization initiator and a solvent with a rubber base material; and heating the thus contact treated rubber base material so that the monomer is polymerized to thereby modify the rubber base material at its surface and vicinity thereof.

Abstract: A method of preparing electrodes is now described, which electrodes have enhanced adhesion of subsequently applied coatings combined with excellent coating service life. In the method, a substrate metal, such as a valve metal as represented by titanium, is provided with a highly desirable rough surface characteristic for subsequent coating application. This can be achieved by various operations including etching to ensure a roughened surface morphology. In subsequent operations, a barrier layer is provided on the surface of enhanced morphology. This may be achieved by operations including heating, as well as including thermal decomposition of a layer precursor. Subsequent coatings provide enhanced lifetime even in the most rugged commercial environments.

Abstract: The present invention is directed to a method and apparatus for producing a highly-textured surface on a copper substrate with only extremely small amounts of texture-inducing seeding or masking material. The texture-inducing seeding material is delivered to the copper substrate electrically switching the seeding material in and out of a circuit loop.

Abstract: A process of inhibiting a corrosion of metal plugs formed in integrated circuits is described. The corrosion inhibiting process includes providing a partially fabricated integrated circuit surface including the metal plugs on a polishing pad to carry out chemical-mechanical polishing, introducing slurry including a corrosion inhibiting compound on the polishing pad in sufficient concentration to inhibit corrosion of the metal plugs of the partially fabricated integrated circuit surface, and polishing the partially fabricated integrated circuit surface.

Abstract: Extremely thin polymer film substrates are conditioned for subsequent electroless plating by contact with a mild caustic solution. Aqueous solutions of about 1/2 wt % NaOH or KOH can successfully condition polyimide films with contact times of less than an hour. The more robust PET polymer films benefit from the addition of a permanganate salt to the solution to accelerate the conditioning process. Since these films are so thin, less than 1 mil, significant loss of polymer is not necessarily desirable. This process is designed to roughen the surface of the polymer film and render it hydrophilic to enhance the effectiveness of the subsequent electroless metal film deposition.

Abstract: A wet chemical process is provided for treating an emitter formed on a substrate of a field emission display, the process comprises applying a solution including hydrogen to the emitter. In one embodiment of the invention, the steps of applying a solution comprises applying a solution of hydrofluoric acid to the emitter.

Abstract: A method for making a circuit device having at least one peripheral interconnect for electrically connecting the device to another circuit device on a motherboard, includes forming at least one opening in a substrate, the opening having an inner surface extending between first and second major surfaces of the substrate. The inner surface of the opening and portions of the major surfaces adjacent the opening are coated with electrically conductive material. Electrically conductive material is removed from opposing regions of the inner surface of the opening prior to plating and then, after plating, the substrate is cut in a line extending across opposing regions to expose the coated and plated inner surface as the peripheral electrical interconnect. The method produces interconnects with reduced contamination by conductive particulates.

Abstract: A method for producing an electronic apparatus casing including: a step of forming a copper layer by way of non-electrolytic plating onto a casing body made from a magnesium or magnesium alloy material shaped into a predetermined configuration; a step of forming a nickel layer on the copper layer by way of non-electrolytic plating; a step of carrying out a surface grinding and a honing to the nickel layer; a step of forming a hard transparent glass layer by using a colloid solution containing SiO.sub.2 and Na.sub.2 O; and a step of forming a silica layer on the hard glass layer by using a partially hydrolyzed solution of an organic silicate ester.

Abstract: Disclosed is a method of forming electroless metal plating layers on one single surface of a plastic substrate and the product thereof. The method includes steps of degreasing or pre-etching the material for forming the substrate, etching the material, adding catalysis, activating, drying, spraying non-conducting paint on a first surface of the material, accelerating, forming an electroless copper plating layer on a second surface of the material, activating, forming an electroless nickel plating layer on the second surface of the material, sealing, dehydrating, drying, inspecting, and packing. Wherein, the steps of spraying non-conducting paint and drying give the material a beautiful painted appearance on the first surface thereof. The non-conducting paint on the first surface of the material facilitates easy formation of smooth electroless copper and nickel plating layers on the second surface of the material. Therefore, a product of the method can be used in electronic products requiring high sensitivity.

Abstract: The invention relates to a process for the continuous chemical metallizing of porous substrates in a wet-chemical manner. According to the invention, the different reaction rates of the adsorption or ionic reduction reaction, in the case of activating with Pd/Sn, are adapted to the chemical metallizing reaction used. The removal of the spent process solutions from the pores of the substrate takes place by suction. The invention permits a continuous implementation of the process of depositing a metal layer on an electrically non-conductive, synthetic substrate, which can be used at the start of a galvanic reinforcing process of the chemically deposited metal coating.

Abstract: A method of forming an integrated circuit device includes the steps of forming a conductive pattern on an integrated circuit device, and forming an insulating layer on the conductive pattern and on the integrated circuit substrate. An upper surface portion of the insulating layer opposite the substrate is removed, and a photoresist layer is formed on the insulating layer after the step of removing the upper surface portion. The photoresist layer is patterned, and exposed portions of the insulating layer are etched using the patterned photoresist layer as an etching mask thereby forming contact holes through the insulating layer.

Abstract: Method of manufacturing a multilayer structure, in which method gold is deposited on a basic layer (3, 11) for forming a gold layer (7, 13), whereafter aluminium oxide is deposited on the gold layer for forming an aluminium oxide layer (9, 15). Silicon oxide is deposited on the aluminium oxide layer by means of PE-CVD for forming a silicon oxide layer (11, 13), and the aluminium oxide layer constitutes an adhesive layer between the gold layer and the silicon oxide layer. Together with the aluminium oxide layer, the silicon oxide layer constitutes an insulating and/or protective cladding layer for the gold layer.

Abstract: A method of manufacturing a semiconductor device is provided superior in planarization, crack resistance, and moisture resistance, and with no corrosion in wiring while the manufacturing cost is suppressed without increasing the number of manufacturing steps in forming an interlayer film therein. This method includes the step of forming a silicon oxide film on a substrate so as to cover a first wiring formed with a silicon oxide film therebetween. A thick-film inorganic SOG film is coated on the silicon oxide film, and then a thermal treatment is applied. Next, a silicon oxide film is formed, and a via hole is formed according to a predetermined mask. By carrying out a thermal treatment at the temperature of 150.about.550.degree. C. and at the pressure of not more than 10.sup.-3 Torr with a portion of the thick-film inorganic SOG film exposed at a side surface of the via hole, residual gas such as CO.sub.2, and H.sub.2 O adsorbed to the side surface of the via hole is released.

Abstract: A press plate for producing decorative laminate from resin impregnated paper, with alumina particles on its pressing surface, is coated with diborides selected from the group consisting of hafnium diboride, molybdenum diboride, tantalum diboride, titanium diboride, tungsten diboride, vanadium diboride, or zirconium diboride or mixtures thereof for making the press plate resistant to scratching. The preferred diborides are titanium and zirconium. The most preferred diboride is titanium. The color, gloss and surface appearance of laminate pressed with a titanium diboride coated press plate is substantially the same as laminate pressed with the press plate before coating.

Abstract: A blank for magnetic hard disk and a method for producing the same are provided, characterized in that the attachment or adhesion of a blank of a disk shape to each other can be prevented when such blank is stacked together for disk annealing, thereby improving the productivity of magnetic hard disk, and that the damage of blank surface can be prevented during blanking. Firstly, an aluminium alloy plate is subjected to continuous surface washing process with an etching solution while winding off the aluminium alloy plate in a coil, whereby the oxide film on the surface of the aluminium alloy plate is removed to concurrently deposit insoluble smut on the surface. Then, the aluminium alloy plate after the washing process is pressed for blanking thereof into a blank of a disk shape.

Abstract: A process for metal plating a high impact, high temperature plastic suitable for forming trim elements of an automobile. The process is particularly directed to plating an elastomer-modified PPA resin, and entails closely controlled process steps that include selectively etching the elastomer and the PPA matrix with a solution containing chromic acid, then effectively removing from the substrate any retained chromium which would adversely affect the ability of metal plating to adhere to the substrate, and thereafter protecting the substrate from attack by sulfuric acid. The process is particularly effective for electroplating a PPA resin modified with about five to about 30 weight percent EPDM.

Abstract: There is now provided a body coated with at least one diamond layer on a substrate of cemented carbide or cermets. The substrate is before the diamond coating process provided with spotwise occurring particles containing an element either being any of W, Ta, Ti, Mo Cr, V, Nb, Mg, Ca, Na, K or, preferably, any of B, Si, S, Al or P. These particles are dispersed at a density giving an average distance between two particles of 20 .mu.m or less, preferably 5 .mu.m or less.

Abstract: In PCB manufacture, the pads and/or through-holes of a bare board are protected prior to mounting of other components by a silver plating process. The silver plate is applied from a plating composition by a replacement process in which silver ions oxidized copper and deposit a layer of silver at the surface. In the aqueous plating composition the silver ions are maintained in solution by the incorporation of a multidentate complexing agent. The compositions may contain a silver tarnish inhibitor and are free of reducing agent capable of reducing silver ions to silver metal, halide ions and substantially free of non-aqueous solvent. Surface mounted components can be soldered direct to the silver coated contact using any commercially available solder. Silver does not deposit onto solder mask, but only onto metal which is less electropositive than silver.

Abstract: An organic electroluminescent display panel having a plurality of emitting portions includes; a substrate (2) on which a plurality of first display electrodes (3) corresponding to emitting portions are formed; electrical insulation ramparts (7) projecting from the substrate for exposing at least portions of the first display electrodes respectively; organic function layers (8) each including at least one organic electroluminescent medium formed on exposed portions of the first display electrodes; second display electrodes (8) formed on the organic function layers; and each electrical insulation rampart having an overhanging portion (7a) projecting in a direction parallel to substrate. The cathodes are patterned automatically without use of the photolithography.

Abstract: The substrate of a magnetic recording medium is laser textured employing a fiber-optic laser delivery system. Fiber optic cables are optically linked at one end to a laser light beam source, and at the other lens to a microfocusing lens. The use of a fiber optic cable delivery system facilitates alignment and reduces maintenance.

Abstract: The invention provides a composition for a platable resinous substrate having enhanced heat performance comprising: a thermoplastic mixture of at least one polyphenylene ether and at least one poly(alkenylaromatic) compound, at least one rubber compound, and at least one inorganic filler material.

Abstract: A slider of the type for use with a rotatable magnetic disk is disclosed. The slider has two ends and a bottom surface which includes an air bearing surface. An adhesive layer and continuous coating of carbon is located on the air bearing surface. A method of sputter depositing this continuous layer of carbon upon the air bearing surface of the slider is also provided. The continuous layer of carbon is crown-shaped and deposited using the sputtering technique. The carbon is directed from a source at the air bearing surface of a slider. A mask is placed between the source and slider so that the carbon is deposited in a crown shape. When the slider is viewed from front to rear the maximum depth of the coating is less than about 6 to 10 nm, while at the ends of the slider the coating depth is near 0 nm. The resistivity of the protective carbon layer is controlled for the additional benefit of protection from damages by electrostatic discharge.

Abstract: A process for metal plating a high impact, high temperature plastic suitable for forming trim elements of an automobile. The process is particularly directed to plating an elastomer-modified PPA resin, and entails closely controlled process steps that include selectively etching the elastomer and the PPA matrix with a solution containing chromic acid, then effectively removing from the substrate any retained chromium which would adversely affect the ability of metal plating to adhere to the substrate, and thereafter protecting the substrate from attack by sulfuric acid. The process is particularly effective for electroplating a PPA resin modified with about five to about 30 weight percent elastomeric materials.

Abstract: A method of depositing a polycrystalline diamond layer on a nitride substrate is disclosed, which comprises chemically-etching the nitride substrate with a KOH or NaOH solution or melt and depositing the polycrystalline diamond layer on the nitride substrate from a vapor phase, wherein the etching temperature, time and concentration of the etchant are controlled so that at least 75% of the interface between the substrate and the diamond layer is covered by diamond crystals, each diamond crystal having a contact area with the substrate of .gtoreq.20 um.sup.2.

Abstract: The invention provides in improved proton exchange membrane for use in electrochemical cells having internal passages parallel to the membrane surface, an apparatus and process for making the membrane, membrane and electrode assemblies fabricated using the membrane, and the application of the membrane and electrode assemblies to a variety of devices, both electrochemical and otherwise. The passages in the membrane extend from one edge of the membrane to another and allow fluid flow through the membrane and give access directly to the membrane for purposes of hydration.

Abstract: At least the surface region of a cutting tool substrate made of tungsten carbide in a cobalt matrix is carburized to chemically passivate the cobalt prior to deposition of diamond film on it. The passivation improves adhesion by preventing reaction of the cobalt with the diamond in the course of the deposition process.

Abstract: In order to improve the wear resistancy--including adherence behaviour, ductility and shearing strength--at a diamond coated multiphase body, an element enrichment is applied in controlled manner in the interphase of base body and diamond layer.

Abstract: A protective mask is formed of an annular magnetic sheet. Such a sheet may be used to cover annular surfaces to be protected. Adhesive is formed on one side of the sheet. In use, a fluid impervious sheet is adhered to the first side and across the central opening of the annular magnetic sheet. A method of protecting a metallic workpiece during treatment, the metallic workpiece having a portion to be protected during treatment, for example a raised face of a flanged pipe, the method comprising the steps of magnetically attaching a protective mask to the portion of the metallic workpiece to be protected, the protective mask being formed of an annular magnetic sheet and treating the workpiece, such as by painting or sandblasting. A method of protecting a pipe during transportation of the pipe, the pipe having a flanged pipe end and a pipe bore, the method comprising the steps of magnetically attaching a circular protective sheet to the flanged pipe end over the pipe bore; and transporting the pipe.

Abstract: A process for coating of an intraocular lens to impart tissue compatibility thereto, comprising the steps: a) priming said lens using a solution of a polyamine; b) coating the lens treated in step a) above with a solution of a periodate-oxidized polysaccharide selected from heparin, heparain sulphate, and chondroitin sulphate to stabilize said polyamine by covalent and/or ionical cross-linking; c) coating the lens treated in step b) above with a solution of a polyamine; and d) coating the lens treated according to step c) above with a solution of a periodate-oxidized polysaccharide selected from heparin, heparain sulphate, and chondroitin sulphate in the presence of a cyanoborohydride to convert formed labile Schiff's bases to stable secondary amines.

Abstract: A method of altering a portion of the semiconductive layer of an electric power cable, to increase its resistance so as to render it electrically insulative. The semiconductive layer is loaded with carbon powder which forms chains to provide conductive pathways through the layer. By introducing an intercalant into the semiconductive layer, which causes the layer to swell, the conductive pathways are interrupted and the material is rendered insulative (>10.sup.4 .OMEGA.-cm). The intercalant may be a polymerizable material with a curing agent which is cured in situ, i.e., without removing the semiconductive layer from the cable. By this method, flashover to the semiconductive layer at a cable splice or termination may be prevented without requiring tedious removal of the exposed portion of the semiconductive layer. The method is usable with both strippable and coextruded semiconductive layers.

Abstract: The present invention is directed to a polymeric prosthesis precoated with a bone cement compatible polymer. The bone cement compatible polymer coating, which can be polymethyl methacrylate, is bonded to the outer surface of the prosthesis. For instance, in one embodiment, the bone cement compatible polymer coating is believed to be copolymerized with the polymeric prosthesis. Once bonded to a polymeric prosthesis in accordance with the present invention, the precoat strengthens the interface between a bone cement and a prosthesis when the prosthesis is later implanted. The precoat also decreases the likelihood that the prosthesis will loosen and break away from the cement over time. The polymeric implant product of the present invention is particularly well suited for use as an acetabular cup or a tibia plateau in replacing hip joints and knee joints respectively.

Abstract: A surface treatment, especially for titanium and aluminum alloys, forms a sol-gel film covalently bonded on the metal surface to produce strong, durable adhesive bonds between the metal and an organic adhesive without using toxic chemicals and while significantly reducing or eliminating rinse water requirements of traditional anodizing or etching processes. An aqueous sol containing an alkoxyzirconium and an organosilane with an organic acid catalyst and zirconium stabilizer is applied to etched or grit blasted substrates by dipping, spraying, or drenching, to produce bonds in a single application comparable in strength and performance to standard anodize controls. Parameters affecting performance include the sol composition, the Si/Zr ratio, the ratio of sol ingredients, the concentration of the sol, the carrier solvent, solution age, catalysts, surface pretreatment, application method, curing process, and primer used.

Abstract: A magnetoresistive (MR) sensor for MR heads comprising a magnetoresistive ferromagnetic layer (MR layer) and an antiferromagnetic layer in direct contact with the surface of the MR layer. The MR layer has a face-centered-cubic (fcc) structure. The crystalline structure of the antiferromagnetic layer is the fcc structure in the vicinity of the interface of the MR layer and the antiferromagnetic layer, and continuously changes to a face-centered-tetragonal (fct) structure toward the surface opposite to the interface. The interface of the MR layer and the antiferromagnetic layer is continuous with respect to the crystalline structure due to the epitaxial growth of the antiferromagnetic layer on the surface of the MR layer.

Abstract: Composite architectural panels comprising a substrate composed of a laminate of two metal sheets joined by a thermoplastic core and having a factory-applied polymeric surface coating which is not receptive to artists' materials, are prepared for use as a support or substrate for traditional artists' materials by roughening the surface using abrasive and/or chemical means. After thoroughly cleaning the prepared surface, one or more artists' materials are applied and permanently bonded to the panel surface by heating the panel substrate to a temperature which is less than the melting temperature of the thermoplastic core and maintaining the substrate at that temperature for a time that is sufficient to bond the artists' materials to the surface.

Abstract: The invention solves a problem of that sufficient adhesive intensity to satisfy recent demand for high adhesive property cannot be obtained by conventional surface treatment, and provides a method of improving adhesive property of polyimide film and achieving distinctly improved effect of adhesive property. The invention further provides novel polyimide film having improved adhesive property.

Abstract: A method for regenerating an extrusion die for ceramic honeycomb structural bodies. The extrusion die includes a base metal and a titanium-based hard coating of an abrasion-resistant material which is formed on a surface of the base metal. The extrusion die is immersed in a solution of nitric acid when it has worn, so as to remove a residue of the hard coating from the surface of the base metal. Subsequently, a titanium-based fresh hard coating is formed on the surface of the base metal, and a pattern adjustment of the die is then performed wherein the surface of the fresh hard coating is locally ground so that the sliding resistance of the raw ceramic material becomes substantially uniform over the entire region of the die.

Abstract: An improved CVD apparatus for depositing a uniform film is shown. The apparatus comprises a reaction chamber, a substrate holder and a plurality of light sources for photo CVD or a pair of electrodes for plasma CVD. The substrate holder is a cylindrical cart which is encircled by the light sources, and which is rotated around its axis by a driving device. With this configuration, the substrates mounted on the cart and the surroundings can be energized by light of plasma evenly throughout the surfaces to be coated.

Abstract: An elemental titanium-free liner and cavity cleansing process is provided that allows for the elimination of conventional sputter etch and elemental titanium depositions. A low power plasma etch provides for pre-conditioning/cleansing of cavities such as contacts and vias. A refractory metal is provided as a cavity liner. Preferably, the liner is comprised of several discrete refractory metal liner layers, each having a thickness of about 25-100 .ANG., that can be applied by CVD and/or PVD. A low power plasma cleanse is preferably interposed between each liner layer deposition. A suitable metal plug can be deposited and directed into the cavity to complete cavity filling. Preferably, the metal plug is an elemental aluminum or aluminum alloy plug that is deposited by CVD and force-filled into the cavity to reduce the incidence of micro-voids within the cavity.Elimination of the conventional sputter etch and the high temperature processing (temp..gtoreq..sup..about. 400.degree. C.

Abstract: The present invention relates to a method for plating nickel onto metal substrates. The method broadly comprises the steps of passing the metal substrate to be plated through a dilute organic acid bath solution to remove contaminants and other deleterious materials, agitating the bath solution as the metal substrate passes therethrough, and thereafter electrolessly plating nickel on the surfaces of the metal substrate. The method of the present invention may be used to nickel plate substrates formed from steel, copper and aluminum.