Abstract: A method of forming an insulation film includes the steps of forming an insulation film on a substrate, and modifying a film quality of the insulation film by exposing the insulation film to atomic state oxygen O* or atomic state hydrogen nitride radicals NH* formed with plasma that uses Kr or Ar as inert gas.

Abstract: The present invention is related to systems and methods for modifying various non-equidimensional substrates with modifying agents. The system comprises a processing chamber configured for passing the non-equidimensional substrate therethrough, wherein the processing chamber is further configured to accept a treatment mixture into the chamber during movement of the non-equidimensional substrate through the processing chamber. The treatment mixture can comprise of the modifying agent in a carrier medium, wherein the carrier medium is selected from the group consisting of a supercritical fluid, a near-critical fluid, a superheated fluid, a superheated liquid, and a liquefied gas. Thus, the modifying agent can be applied to the non-equidimensional substrate upon contact between the treatment mixture and the non-equidimensional substrate.

Abstract: A degassed polyester varnish is applied to the transduction driver to increase surface dielectric strength (insulation resistance), driver voltage breakdown, physical protection, and heat and water resistance. A vacuum chamber application process is used to apply the polyester varnish. The disclosed coating technique is applicable to all transducer drive materials and all transducer types.

Abstract: By optimizing the pressure condition for sucking up an excess of coating liquid with a recovering slit, a coating layer on a web with a very small and even thickness can be obtained. In a coating method using two slits of a coating slit and the recovering slit, a liquid pressure P (MPa) at a suction port of the recovering slit is adjusted in a range of 0.05>P≧0. Thus, coating thickness variations in the web width direction of the coating layer formed on the web can be restrained, and score-like coating omission can be prevented from occurring on the coating layer surface.

Abstract: A filter having two zones, the first zone having a low electrical conductivity and the second zone having a high electrical conductivity at electrode attachment zones due to infiltration of metal within the second zone.

Abstract: An ion processing element employing composite media disposed in a porous substrate, for facilitating removal of selected chemical species from a fluid stream. The ion processing element includes a porous fibrous glass substrate impregnated by composite media having one or more active components supported by a matrix material of polyacrylonitrile. The active components are effective in removing, by various mechanisms, one or more constituents from a fluid stream passing through the ion processing element. Due to the porosity and large surface area of both the composite medium and the substrate in which it is disposed, a high degree of contact is achieved between the active component and the fluid stream being processed. Further, the porosity of the matrix material and the substrate facilitates use of the ion processing element in high volume applications where it is desired to effectively process a high volume flows.

Abstract: A friction lining for wet running consists of a fabric which can be applied to a carrier (6) and is partly impregnated with resin. In order to provide favorable friction conditions it is proposed that the porosity of the fabric (1) impregnated with resin is higher in the zone of the friction face (4) by a lower resin content in a surface layer (h) than in the remaining layer.

Abstract: In manufacturing a magnetic recording disk, a magnetic film for a recording layer is deposited on a substrate of the magnetic recording disk in a magnetic-film deposition chamber, and the substrate is transferred from the magnetic-film deposition chamber to a lubricant-layer preparation chamber without exposing the substrate to the atmosphere. Then, a lubricant layer is prepared on the substrate in the lubricant-layer preparation chamber.

Abstract: Porous carpeting for use within vehicles, and methods of making same, are provided. A carpet backing is heated to achieve a fluid or semi-fluid state and then subjected to intense vacuum to draw air through the carpet backing to create a porous structure. A layer of porous thermoformable material may be applied to the porous carpet structure to provide mechanical strength.

Abstract: A composite porous structure capable of absorbing organic pollutants from water is produced by preparing a dispersion of non film-forming PVC particles in a water-soluble organic liquid, impregnating a macroporous matrix such as a cellulosic sponge or paper with the dispersion, and curing the impregnated matrix by heating to achieve sintering of the PVC particles to produce a microporous substrate which is retained within the macroporous matrix.

Abstract: A resonant cavity frequency sensing device is used to sense the moisture content of a substrate. Data obtained by the sensing device can be used in a feedback loop in the apparatus employing the device, to help control the operation of the apparatus in order to obtain consistent results. The sensor may employ one pair of sensing plates or an array of pairs of sensing plates to obtain data from each part of the substrate. In an illustrated embodiment, the device is used to monitor and control dip uptake in a fabric adhesive dipping process.

Abstract: A method for manufacturing reinforced oriented strand boards includes steps of injecting melamine-formaldehyde resin or phenol-formaldehyde resin in finished oriented stand boards, of heating and pressing them to let the resin harden. As strands of woods of the originally oriented strand boards cannot completely closely bonded together, with many gaps remained, so injected resin can fill up those gaps and filtrate and wrap the strand woods to make the whole oriented strand boards having reinforced strength and fire-resistant property as well.

Abstract: This invention is directed to apparatus and a method for removing particles from a surface, such as a semiconductor wafer. A fluid is applied to the surface on which the particles are distributed so as to coat the particles with the fluid. At least some of these particles have a dimension of less than approximately one micron. A suction force is applied in the vicinity of the surface after applying the fluid so as to remove from the surface the majority of those particles having the dimension of less than approximately one micron.

Abstract: In a coating method for forming a film of a coating material on a substrate by supplying the coating material from a coating unit to the substrate held by a stage while the coating unit is moved relative to the stage, the stage includes a substrate-holding section and a peripheral section which has a surface higher than that of the substrate-holding section. The coating method includes the steps of mounting the substrate on the substrate-holding section of the stage; forming the film of the coating material so that the coating covers the substrate and extends to the peripheral section; and removing the coating material remaining in the peripheral section by a coating material removing unit after the substrate provided with the film is dismounted from the stage.

Abstract: A novel materials technology has been developed and demonstrated for providing a high modulus composite material for use to 1000° F. and above. This material can be produced at 5-20% of the cost of refractory materials, and has higher structural properties. This technology successfully resolves the problem of “thermal shock” or “ply lift,” which limits traditional high temperature laminates (such as graphite/polyimide and graphite/phenolic) to temperatures of 550-650° F. in thicker (0.25″ and above) laminates. The technology disclosed herein is an enabling technology for the nose for the External Tank (ET) of the Space Shuttle, and has been shown to be capable of withstanding the severe environments encountered by the nose cone through wind tunnel testing, high temperature subcomponent testing, and full scale structural, dynamic, acoustic, and damage tolerance testing.

Abstract: Method of thin layer preparation for a radionuclide source comprising the following steps: deposition of a drop of a radionuclide dissolved in a solvent onto a on a support substrate, placing said support substrate with said drop in a confined space with a reduced pressure, directing at least one flow of a hot gas onto the drop, rotating the source relative to the hot gas jet creating turbulences inside the drop, evaporating the solvent and obtaining a thin layer of dry radionuclide.

Abstract: An ion processing element employing composite media disposed in a porous substrate, for facilitating removal of selected chemical species from a fluid stream. The ion processing element includes a porous fibrous glass substrate impregnated by composite media having one or more active components supported by a matrix material of polyacrylonitrile. The active components are effective in removing, by various mechanisms, one or more constituents from a fluid stream passing through the ion processing element. Due to the porosity and large surface area of both the composite medium and the substrate in which it is disposed, a high degree of contact is achieved between the active component and the fluid stream being processed. Further, the porosity of the matrix material and the substrate facilitates use of the ion processing element in high volume applications where it is desired to effectively process a high volume flows.

Abstract: A thermal barrier coating for nickel based superalloy articles such as turbine engine vanes and blades that are exposed to high temperature gas is disclosed. The coating includes a columnar grained ceramic layer applied to a platinum modified Ni3Al gamma prime phase bond coat having a high purity alumina scale. The preferred composition of the bond coat is 5 to 16% by weight of aluminum, 5 to 25% by weight of platinum with the balance, at least 50% by weight, nickel. A method for making the bond coat is also disclosed.

Abstract: A resonant cavity frequency sensing device is used to sense the moisture content of a substrate. Data obtained by the sensing device can be used in a feedback loop in the apparatus employing the device, to help control the operation of the apparatus in order to obtain consistent results. The sensor may employ one pair of sensing plates or an array of pairs of sensing plates to obtain data from each part of the substrate. In an illustrated embodiment, the device is used to monitor and control dip uptake in a fabric adhesive dipping process.

Abstract: A method for forming an insulating film, wherein a precursor film of a coating type insulating film having Si—H bonding is coated, the precursor film is calcined in an atmosphere containing at least one of an inert gas and oxygen gas for converting it into a ceramic film as the insulating film, and then the ceramic film is cooled under reduced pressure lower than that for the calcination.

Abstract: The present invention relates to a method for depositing a parylene polymer barrier coating on a polymeric substrate for improving the chemical resistance of the substrate. The method comprises the steps of thoroughly treating a surface portion of the substrate to remove any contaminants, depositing at least one layer of parylene polymer on the contaminant-free surface portion via chemical vapor deposition, and then annealing each of the at least one layer of parylene polymer for a sufficient time. The present invention also relates to a composition for a barrier coating on a polymeric substrate comprising at least one layer of parylene polymer bonded to the surface of the polymeric substrate. The substrate can be a silicone rubber keypad.

Abstract: The present invention provides for a dual-layer inorganic microporous membrane capable of molecular sieving, and methods for production of the membranes. The inorganic microporous supported membrane includes a porous substrate which supports a first inorganic porous membrane having an average pore size of less than about 25 Å and a second inorganic porous membrane coating the first inorganic membrane having an average pore size of less than about 6 Å. The dual-layered membrane is produced by contacting the porous substrate with a surfactant-template polymeric sol, resulting in a surfactant sol coated membrane support. The surfactant sol coated membrane support is dried, producing a surfactant-templated polymer-coated substrate which is calcined to produce an intermediate layer surfactant-templated membrane.

Abstract: Single wafer processing methods and systems for manufacturing films having low-k properties and low indices of refraction. The methods incorporate a processing station in which both curing and post-cure, in situ gas cooling take place.

Abstract: A process is disclosed for infiltrating a liquid composition, such as a molten metal or thermoplastic or thermosetting polymer, into a porous solid material, such as a ceramic or porous metal, by contacting the porous material with the liquid composition at a first pressure and then increasing the pressure by at least the critical capillary pressure for the liquid composition/porous solid material system to effect infiltration. The infiltrated liquid composition may then be solidified inside the porous material, such as by cooling, to produce composite materials including ceramic-metal composites as well as ceramic-polymer, metal-polymer, and metal—metal composites.

Abstract: Sheet products, such as card stock, envelopes and other paper products (10) are advanced on a vacuum surface conveyor belt (30) beneath a glue applicator drum (35). The glue transfer strips (37 and 38) of the glue applicator drum apply stripes of glue (42 and 43) at the ends of the sheet product, leaving a belt engaging space (41) without glue between the glue stripes. The sheet product is grasped by overlying conveyor belts (46 and 47) at the belt engaging space (41), thereby exposing the wet glue stripes on opposite sides of the belts. Hot air is applied on opposite sides of the conveyor belts (46 and 47), drying the glue. The glue transfer strips (37 and 38) of the glue applicator drum can be adjusted in size, shape and position so as to apply glue to one end, the other end, or both ends of the sheet product, and if glue is applied to only one end, one of the dryers (50 or 51) can be deactivated, saving energy.

Abstract: A process for the removal of galvanic electrolytic residues from galvanically reinforced fiber structure frames, where the fiber structure frame is produced through chemical metallization of a textile substrate based on fleeces or felts made of synthetic fibers and then through galvanic reinforcement of the metallized textile substrate in a galvanic bath containing a galvanic electrolyte. The invention provides that the galvanic electrolytic residues are removed by suction from the fiber structure frame. The fiber structure frame then makes contact at least once under high pressure with the wash liquid in a wash station, and subsequently the wash liquid is removed by suction from the fiber structure frame. In order to remove by suction, the galvanic electrolytic residues or the wash liquid, a belt-shaped porous supporting device is inserted between the suction port and a main area of the fiber structure frame.

Abstract: A method for impregnating a porous surface with a magneto-rheological substance includes the steps of providing a porous surface with a porosity sufficient to receive the magneto-rheological substance within the pores and covering a portion of one side of the porous surface with the magneto-rheological substance. The method further includes the step of providing a magnet on the opposite side of the porous surface to apply a magnetic field and draw the magneto-rheological substance into the porous surface.

Abstract: A stable oxidized structure and an improved method of making such a structure, including an improved method of making an interfacial template for growing a crystalline metal oxide structure, are disclosed. The improved method comprises the steps of providing a substrate with a clean surface and depositing a metal on the surface at a high temperature under a vacuum to form a metal-substrate compound layer on the surface with a thickness of less than one monolayer. The compound layer is then oxidized by exposing the compound layer to essentially oxygen at a low partial pressure and low temperature. The method may further comprise the step of annealing the surface while under a vacuum to further stabilize the oxidized film structure. A crystalline metal oxide structure may be subsequently epitaxially grown by using the oxidized film structure as an interfacial template and depositing on the interfacial template at least one layer of a crystalline metal oxide.

Abstract: Sheet products, such as card stock, envelopes and other paper products (10) are advanced on a vacuum surface conveyor belt (30) beneath a glue applicator drum (35). The glue transfer strips (37 and 38) of the glue applicator drum apply stripes of glue (42 and 43) at the ends of the sheet product, leaving a belt engaging space (41) without glue between the glue stripes. The sheet product is grasped by overlying conveyor belts (46 and 47) at the belt engaging space (41), thereby exposing the wet glue stripes on opposite sides of the belts. Hot air is applied on opposite sides of the conveyor belts (46 and 47), drying the glue. The glue transfer strips (37 and 38) of the glue applicator drum can be adjusted in size, shape and position so as to apply glue to one end, the other end, or both ends of the sheet product, and if glue is applied to only one end, one of the dryers (50 or 51) can be deactivated, saving energy.

Abstract: A method of drying a resinous composition layer, comprises the steps of coating a resinous composition over a substrate and drying the resinous composition layer to be dried. The drying method is a vacuum dry. And a drying condition in that case is such that an exhaustion is performed taking over 6 sec. till a degree of vacuum comes to 100 Torr.

Abstract: In a manufacturing method of a printed circuit board comprising a process of coating insulative resin on a surface of a printed circuit board having a blind hole and a process of filling up the insulative resin in the blind hole, the printed circuit board coated with the insulative resin is kept in a low pressure atmosphere of 1.3 to 666 hPa, and then the insulative resin is hardened, so that the insulative resin is filled up in the blind hole appropriately.

Abstract: A member covered with a self-fluxing alloy sprayed coating is produced by previously forming a porous ceramic sprayed coating on a surface of a self-fluxing alloy sprayed coating prior to a refusing treatment of the coating formed on a substrate, heating the sprayed coating in an inert gas atmosphere controlled to 1˜300 hPa or by a high frequency induction heating system and thereafter removing the ceramic sprayed coating to expose the self-fluxing alloy sprayed coating. This member is uniform in the thickness, less in the retention of pores or oxide impurities and has a strong coating property.

Abstract: A process and product for increasing the flame resistance and thermal insulation properties of chemically treated substances, in some cases providing the treated substance with flame resistance at temperatures higher than 1800° C. (direct fire), with no limit to the time of exposure. A number of embodiments of flame resistant compositions are discussed herein but all embodiments include a mixture containing water, inorganic acids, ammonium salts, sodium carbonate and pyrophosphate and, in some instances other constituents. The disclosed process treats substances to prevent the generation of any flames. The substances that have successfully been tested with the disclosed process include cloth (natural and synthetic), rugs and carpets, wood, cardboard, and paper. However, it is believed that this process can be applied to an unlimited number of flammable cellulose substances.

Abstract: In a manufacturing method of a printed circuit board comprising a process of coating insulative thermosetting resin on a surface of a printed circuit board having a blind hole and a process of filling up the insulative thermosetting resin in the blind hole, the printed circuit board coated with the insulative thermosetting resin is kept in a low pressure atmosphere of 1.3 to 666 hPa, and then the insulative thermosetting resin is hardened, so that the insulative thermosetting resin is filled up in the blind hole appropriately.

Abstract: An apparatus and method technique for producing plane-parallel flakes is disclosed. In a preferred embodiment, the present invention is realized through a multi-chamber apparatus for producing plane-parallel flakes from layers vapor deposited in vacuum on an endlessly circulating substrate. The present invention includes the sequential steps of: vapor deposition of a separating agent layer in high vacuum on the endlessly circulating substrate; vapor deposition of one or more layers of metal, oxides, fluorides, and nitrides in high vacuum on the separating agent layer; and stripping the vapor deposited layers from the endlessly circulating substrate under low vacuum. The vapor deposited layers are subsequently present in a separate vacuum stage separated from the vapor deposition chamber by dynamic locks as a suspension of fine flakes in a mixture of solvent. and separating agent. The suspension may continuously or intermittently be transferred out of the separate vacuum stage for further processing.

Abstract: A method for manufacturing a prepreg in which a reinforcing substrate is impregnated with a thermosetting matrix resin. In the method, the reinforcing substrate is moved in a traveling direction. The thermosetting matrix resin is supplied to an outer circumferential surface of a transferring roller. The thermosetting matrix resin which substantially contains no solvent and which is in a molten state is transferred from the outer circumferential surface of the transferring roller to a first surface of a reinforcing substrate while the reinforcing substrate moves. The thermosetting matrix resin which is transferred to the first surface is forced to permeate through the reinforcing substrate by pressing at least one pressing roller on the thermosetting matrix resin transferred to the first surface while the reinforcing substrate moves. The reinforcing substrate impregnated with the thermosetting matrix resin is heated to semi-cure the thermosetting matrix resin.

Abstract: Method and arrangement for coating a web in a film press nip defined by a pair of rotating rolls and through which the web runs and in which a coating agent is applied as a film onto a face of at least one of the rolls and transferred in the nip from the face of the roll(s) onto a respective side of the web to thereby coat the respective side of the web. Steam jets are applied to each side of the web that is being coated to prevent formation of coating-agent mist at a web-outlet side of the nip. The steam jets can be directed from a location after the nip to the web-outlet side of the nip and/or substantially to a point of separation of the web from contact with the roll(s).

Abstract: An apparatus applies a liquid or viscid coating medium onto a moving material web, especially one made of paper or cardboard. A coating mechanism first applies the coating medium onto an applicator element or an applicator roll, which subsequently transfers the coating medium at a coating location onto the material web in the form of a coating layer. Furthermore, if so desired, a doctoring device can be positioned at a doctor station, adjacent to the coating location, on the downstream side relative to the movement of the material web for the purpose of smoothing and/or metering the coating. The coating apparatus incorporates an apparatus for the generation and/or supplying of a fluid, preferably steam. This apparatus is positioned adjacent to the coating location or to the doctor station on the downstream side relative to the movement L of the material web.

Abstract: Plasma assisted polymerization and deposition of a very thin inner surface coating in a plastic or metal container without an undesirable increase in container surface temperature is provided to change the surface properties of the internal plastic surface of a container by reaction of the surface with a reactive gas which has been energized to produce a plasma or the surface is activated by a plasma of reactive gas so that it becomes receptive to a further surface reaction.

Abstract: An apparatus and method for evenly applying an atomized adhesive for bonding a die to a leadframe is disclosed. In one embodiment, the apparatus includes a hood in communication with an air supply and a vacuum plenum that encompass a semiconductor device component located in a target area during adhesive application so that the adhesive is selectively applied to specific portions of the leadframe or other semiconductor device component and adhesive is not allowed outside the system. A mask or stencil may be employed for further prevention of adhesive application to undesired areas. A gas purge may be employed to direct the adhesive mist toward the component to be coated. In another embodiment, a fine adhesive spray is directed against the surface of the workpiece to be coated, selected areas being masked to prevent coating. Wafers may be coated as well as leadframes.

Abstract: In accordance with the present invention, a process for coating a titanium or titanium alloy golf club head is presented, wherein a brazing composition is securely adhered to the titanium or titanium alloy golf club head, preferably on the striking surface thereof. The brazing composition is disposed on the titanium striking surface and the golf club head is subjected to a vacuum furnace process. The vacuum process of the present invention is designed so that the brazing composition including the plurality of hard particles is securely bonded to the titanium striking surface to form a hard, durable striking surface on the golf club head.

Abstract: A preform resin immersion process (PRIP) for impregnating resin into a preform for the fabrication of composite structures. The resin contains a heatactivated catalyst and a thixotropic agent which maintain the viscosity of the resin at selected low level during the resin immersion process. The dry preform is placed in an impregnation vessel, and the resin is held in a resin storage vessel, with both vessels initially held at vacuum of about 5.0 mm Hg torr to draw off any air or volatiles. Pressure is introduced into the resin storage vessel, causing the resin to flow through a line into the impregnation vessel which is still held at vacuum conditions. When enough resin is in the impregnation vessel to completely immerse the preform, the flow of resin to this tank is stopped. Once the resin has completely permeated the preform, the resin is drawn back into the resin storage vessel, and the saturated preform is raised up from the impregnation vessel so that the excess resin drips off into collection means.

Abstract: A method for preventing radioactive contamination of porous surfaces comprising providing an apparatus for handling radioactive material comprising a porous surface; exposing the porous surface to a vacuum; depositing a flowable precursor material onto the porous surface, wherein the porous surface comprises pores and the vacuum is effective to substantially fill the pores with the flowable precursor material; subjecting the flowable precursor material to energy sufficient to convert the flowable precursor material to an effective sealant film comprising amorphous carbon. In a preferred embodiment, the porous surface is an anodized aluminum surface.

Abstract: The use of certain siloxane and silane materials for the conservation of organic and inorganic materials. More specifically, this invention deals with a method of impregnating organic and inorganic materials with siloxanes and silanes and ultimately curing such materials to provide preservation properties to such materials. An especially significant use of the method is to preserve and conserve ancient artifacts. The curable materials are represented by silanol containing polymers crosslinked with trialkoxysilanes.

Abstract: When in use a highly luminous automobile discharge lamp will experience a temperature rise to about 700.degree. C. at the lamp glass surface. As such, the light-screening film formed on the lamp will also be exposed to a temperature of 700.degree. C.; the temperature of the glass surface of a lamp rises and, accordingly, that of the light-screening film formed thereon also rises. Especially with a highly luminous automobile discharge lamp, the temperature of the lamp glass surface rises to about 700.degree. C. during the lighting. Necessarily, the light-screening film on the glass surface is also exposed to a temperature of 700.degree. C. As such, a light-screening film material free of discoloration or peeling even after exposure to a temperature of 700.degree. C. has been desired. There is disclosed a light-screening film paint for lamps containing (1) at least one compound of either manganese oxide or an iron oxide compound doped with a metallic manganese and having the formula (Fe.sub.x Mn.sub.1-x).sub.

Abstract: The invention relates to a process for the continuous chemical metallizing of porous substrates in a wet-chemical manner. According to the invention, the different reaction rates of the adsorption or ionic reduction reaction, in the case of activating with Pd/Sn, are adapted to the chemical metallizing reaction used. The removal of the spent process solutions from the pores of the substrate takes place by suction. The invention permits a continuous implementation of the process of depositing a metal layer on an electrically non-conductive, synthetic substrate, which can be used at the start of a galvanic reinforcing process of the chemically deposited metal coating.

Abstract: A develop processing apparatus is provided for processing an object with a developing solution, comprising a retaining member for rotatably retaining the object, a developing solution supply nozzle for supplying the developing solution to the object, a developing solution sucking nozzle for sucking the developing solution supplied to the object, a developing solution supply nozzle moving mechanism for moving the developing solution supply nozzle above the object, a developing solution sucking nozzle moving mechanism for moving the developing solution sucking nozzle above the object. After the developing solution is supplied to the object subsequent to moving the developing solution supply nozzle, the developing solution sucking nozzle is moved and the developing solution on the object is sucked.

Abstract: A method for dispensing a chemical, such as an edge bead removal solvent, onto a semiconductor wafer comprising the steps of dispensing the chemical selectively onto the wafer and applying a suction to the area immediately surrounding the location at which the chemical is dispensed onto the wafer. Preferably, the suction is applied simultaneously with the dispensing of the chemical. One specific version of the invention provides an edge bead removal system wherein suction is applied to the area immediately surrounding the solvent dispensing nozzle to remove dissolved coating material and excess solvent from the wafer. In one aspect of this system, an apparatus for removing the edge bead includes a mechanism for dispensing a solvent selectively onto the edge of the wafer, and a mechanism surrounding the dispensing mechanism for vacuuming excess solvent and dissolved coating material from the edge of the wafer.

Abstract: In an electrostatic powder coating method of the present invention, a wheel is placed on a supporting jig and powder is electrostatically applied on the surface of the wheel. Unnecessary powder adhered on a tapered surface of a bolt hole is eliminated by suctioning the air inside the bolt hole through a suction opening of the supporting jig. Thereby, a coating film can be formed on the road wheel without applying a coating on the tapered surface of the bolt hole.

Abstract: A batch process for the high-pressure forming of metal plugs in the dielectric layers of semiconductor wafers. After holes are etched in the dielectric layer of each wafer, and a layer of a metal such as aluminum deposited over the dielectric, both the etching and the deposition being done in vacuum chamber cluster machines, the wafers are removed from the cluster machines and placed together in a high pressure chamber where they are subjected to high isostatic pressure that forces the metal into the holes.