Abstract: Provided is a porous electrode substrate capable of reducing a drop in electromotive force when used in a battery. This porous electrode substrate comprises a carbon fiber sheet wherein carbon fibers are bound by a binder. For dust of 0.3 ?m or more in particle size, the dust generation amount per 1 m2 of the porous electrode substrate is 120,000/m2 or less, as determined by the following method: dust particles in a gas obtained by suctioning at 47.2 mL/s for 40 minutes using a dust collecting hood having an opening of 500 mm×100 mm while traveling the sheet at a speed of 10 m/min from a position 200 mm below the sheet are used; the number of dust particles having a diameter within a predetermined range is measured by a particle counter; and the measured value is divided by 200 m2, which is a suction area, and the resulting value is defined as a dust generation amount per 1 m2.

Abstract: To provide a high-quality and high-performance micro-channel device which can be manufactured by a simple method. Provided is a micro-channel device used in analyzing a sample. The micro-channel device includes at least two substrates and an elastic film interposed between the two substrates. The substrates are thermally fused to the elastic film in at least a part thereof. Also provided is a method for manufacturing a micro-channel device used in analyzing a sample. The method includes a surface activation step of activating a joining surface of a substrate and/or an elastic film, a lamination step of laminating the elastic film between at least two of the substrates, and a thermal fusion step of thermally fusing the substrates to the elastic film in at least a part thereof.

Abstract: A layered coating for a sapphire component is described herein. The sapphire component comprises one or more layers of alumina adhered to the surface of a sapphire member. At least the first layer of alumina adheres to the surface of the sapphire member filling all defects in the surface forming a pristine new layer that also provides isolation from damage.

Abstract: A surface-tensioned sapphire plate and a corresponding manufacturing process. The plate may include a planar sapphire substrate and at least one layer disposed on the surface of the substrate for tensing the substrate. The layer may include at least 50 wt.-% of aluminum oxide (Al2O3). The manufacturing process for producing of a sapphire plate may include providing a planar sapphire substrate, and coating at least one surface of the substrate with a layer tensing the substrate. The layer may include at least 50 wt.-% of aluminum oxide (Al2O3).

Abstract: The use of a hot-melt adhesive as a protective element for objects is disclosed, wherein the hot-melt adhesive contains over 80 wt. % of at least one modified polyolefin copolymer produced from a high-molecular-weight polyolefin copolymer by thermomechanical degradation of the polymer under shear stress and/or heating, wherein the viscosity of the copolymer is reduced, and up to 20 wt. % of additives and auxiliary substances, wherein the adhesive has a softening point from 70 to 150° C.

Abstract: A method of manufacturing a semiconductor device including: mounting a substrate on a substrate mounting member that is disposed in a reaction container; heating the substrate at a predetermined processing temperature and supplying a first gas and a second gas to the substrate to process the substrate; stopping supply of the first gas and the second gas, and supplying an inert gas into the reaction container; and unloading the substrate to outside the reaction container.

Abstract: A method of applying wax to the top surface of a surfboard. The method may include heating the wax until the wax is molten and in liquid form. Then the liquid wax may be applied to the surface. The liquid wax may then cool and harden on the top surface of the surfboard. In certain embodiments, designs, ripples and patterns may be formed on the liquid wax when the liquid wax is on the surfboard.

Abstract: A method of forming a textile element (10) for use as a structural support component in a garment. The method comprises the steps of: (i) providing a fabric strip (12) having a plush surface (16); (ii) applying a thermoplastic coating (14) to the plush surface (16) of the fabric strip (12) so that the thermoplastic coating (14) penetrates the plush surface (16); and (iii) allowing the thermoplastic coating (14) to cool and rigidify so as to embed at least surface yarns of the plush surface (16) in the thermoplastic coating (14) and thereby form a composite structure at the juncture (J) between the thermoplastic coating (14) and the plush surface (16).

Abstract: A lubricating coating which can prevent the occurrence of galling even when makeup is carried out with a high torque and which has excellent rust preventing properties is formed on the contact surfaces of a pin and/or a box of a tubular threaded joint. The lubricating coating contains copolymer particles made from particles of an acrylic-silicone copolymer with an average particle diameter of 10-50 ?m dispersed in a highly viscous matrix made from a mixture of a rosin-based substance selected from rosin and its derivatives, wax, a metal soap, and a basic metal salt of an aromatic organic acid (such as highly basic Ca sulfonate).

Abstract: A method of depositing a coating of a first metal alloy on a fiber extending in a main direction, including: a) heating a first mass of a first metal alloy above its melting temperature; and b) moving the fiber through the liquid first mass to be covered by a coating of a non-zero thickness over the entire periphery of the fiber; and prior to a): i) providing a second mass of a second metal alloy having a higher melting temperature than the first alloy; j) heating the second mass to above its melting temperature to be in its liquid state and then moving the fiber through the second alloy such that the second alloy is taken up under visco-capillary conditions and the fiber becomes covered over a portion by a coating of the second alloy of non-zero thickness; and k) cooling the second coating until it becomes solid.

Abstract: Preferably, obtaining internal and external thermal measurement values of a sealed process chamber allows a control system to generate a control signal based on a comparison of the internal and external thermal measurement values to the predetermined value. The control signal is provided to a fluid handling system, wherein the fluid handling system modulates flow of a first fluid around the exterior of the sealed process chamber. The control signal is further provided to a closed loop heat exchange system, wherein the closed loop heat exchange system modulates flow of a second fluid within an interior cavity of the sealed process chamber based on the control signal. The control signal is still further provided to an open loop heat exchange system, wherein the open loop heat exchange system modulates flow of a third fluid within the interior of cavity of the sealed process chamber.

Abstract: The invention relates to the use of a melt-in-place acrylic binder that is applied to a substrate in the form of a powder, followed by a fusing together of the binder powder by heat or radiation. Particulate filler is present either on the substrate, mixed with the binder powder, or admixed into the binder powder prior to fusion. The fused binder helps adhere the particulate fillers to the substrate, and may or may not cover the particulate filler.

Abstract: An aluminum or aluminum alloy-coated steel material includes base steel; and a coating layer formed on a surface of the base steel and containing by mass % Mg: 6% to 10%, Si: 3% to 7%, Fe: 0.2% to 2%, Mn: 0.02% to 2%, and the balance as Al and incidental impurities, where-in the coating layer has pseudoternary eutectic microstructures of ?Al—Mg2Si—(Al—Fe—Si—Mn) and an area ratio of the pseudoternary eutectic microstructures in the coating layer is at least 30%.

Abstract: The present disclosure provides methods for fabricating various regenerated silk geometries using temperature control. In addition to temperature control, mechanical processing can be used to enhance properties of the fabricated article. The present disclosure also provides silk foam and paper-like materials molded using freezer processing.

Abstract: There is provided a method of producing a composite that separates carbon dioxide that has a carbon dioxide separating film on a support includes preparing, at greater than or equal to 50° C., a coating liquid for carbon dioxide separating film formation that contains a water absorbent polymer, a carbon dioxide carrier and a gelling agent, and that gels, after being left at 12° C. at a solution film thickness of less than or equal to 1 mm, within 120 seconds and liquid not dropping-off due to gravity; coating the coating liquid on a strip-shaped support; cooling, at less than or equal to 12° C., a coated film obtained by the coating, and obtaining a gel film; and drying the gel film at least by warm air, and obtaining a carbon dioxide separating film, wherein, from coating to drying are carried out continuously while conveying the support in a given direction.

Abstract: The present invention provides a Zn—Al—Mg—Cr alloy-coated steel material with excellent corrosion resistance. A molten Zn—Al—Mg—Si—Cr alloy-coated steel material which is a steel material having a Zn—Al—Mg—Cr alloy coating layer and which has an interfacial alloy layer formed of coating layer components and Fe at the coating layer-steel material interface, wherein the interfacial alloy layer has a multilayer structure consisting of an Al—Fe-based alloy layer and an Al—Fe—Si-based alloy layer and furthermore, the Al—Fe—Si-based alloy layer contains Cr.

Abstract: A deacidification composition for use in for treating printed cellulosic materials is provided. A method of making the composition and a method of preparing components of the composition also are provided. The composition includes zinc oxide in the form of nanoparticles and/or nanoclusters.

Abstract: A composite armor plate includes a fracture layer placed adjacent to a ceramic layer. The ceramic layer provides a ballistic resistant layer that receives a ballistic impact and propagates a compression wave. The fracture layer is placed behind the ceramic layer and absorbs a portion of the compression wave propagating out in front of the ballistic impact. The absorbed compression wave causes the fracture layer to at least partially disintegrate into fine particles, which dissipates energy in the process. To cause a higher degree of fracturing (and thus larger dissipation of compression wave energy) the fracture layer includes a plurality of resonators embedded in a fracture material.

Abstract: A BCP having first block of first monomer and second block of second monomer, adapted to undergo a transition from disordered state to ordered state at a temperature less than TOD, further including a bridging moiety having a functional group to provide hydrogen bonding between bridging moieties of adjacent first and second BCP molecules when in the ordered state and at a temperature in excess of a glass transition temperature Tg for the BCP. Composition including BCP comprising first block of first monomer and second block of second monomer, and a crosslinking compound having first and second terminal groups joined by a central moiety and arranged to crosslink second blocks of adjacent first and second BCP molecules by providing non-covalent bonding between the terminal groups and a functional group of the second monomer of the second blocks when the BCP is in the ordered state.

Abstract: Forming a wear- and corrosion-resistant coating on an industrial component such as a chemical processing or nuclear power valve component by applying a cobalt-based dilution buffer layer to an iron-based substrate by slurry coating, and then applying by welding a cobalt-based build-up layer over the cobalt-based dilution buffer layer. An industrial component having a dilution buffer layer and a welding build-up layer thereover.

Abstract: The invention relates to a method for the protection of surfaces against damage by applying a protective layer, wherein said surface is brought into contact with an aqueous polysaccharide solution having gelatinizing properties.

Abstract: An improved apparatus and method for dispersion of a labeling conjugate in a diagnostic assay, the result being a one-step assay. By eliminating a conjugate pad as in conventional lateral diagnostic devices, and forming a frazil ice pellicle (FIP), rehydration and flow are improved resulting in better reproducibility, improved sensitivity, and reduced costs of individual assay devices. The formation of a frazil ice film formed on a super cooled surface of a sample receiving means simplifies assay assembly. Lyophilization of the FIP improves the release of a sample/analyte/label matrix into into a macro channel as in a direct flow assay, while at the same time allowing reagents to mix and flow, thereby optimizing the assay performance. The reagents of the conjugate and the formation of the FIP stabilize the conjugate proteins and provide extended shelf life to the diagnostic assay device.

Abstract: The present invention relates to aluminum plated steel sheet which does not require coating after plating and is high in production flexibility enabling application of conventional production processes as they are or exhibits excellent corrosion resistance to flex fuels and further is excellent in appearance and to fuel tanks characterized by being produced using the steel sheet. The means for solving this is characterized by defining the Si, Mg, Ca, and Ti ingredients in the aluminum plating layer and controlling the cooling method after hot dip aluminum coating so as to make Mg2Si particles with a long axis of 10 ?m or less and an aspect ratio of 1 to 3 finely disperse in the plating layer. Due to the Mg2Si particles, it is possible to give an excellent corrosion resistance to flex fuels and suppress the deterioration in appearance due to MgO.

Abstract: Disclosed is a crosslinkable mixture comprising a polyolefin, an alkoxysilane, an organopolysiloxane, a free radical initiator and a liquid polymer modifier. The organopolysiloxane contains two or more hydroxyl end groups. When the crosslinkable mixture is melt-shaped, a unique crosslinked composition is formed. The liquid polymer modifier improves flexibility of the melt-shaped article without decreasing dielectric strength.

Abstract: When applying a current to a plated steel plate, plating often biases. In the present invention, when applying a current, the current is applied with a flux guiding member arranged in proximity to a side surface of the plated steel plate. The direction of the magnetic flux at the side surface of the plated steel plate is corrected, and the bias of the plating is efficiently suppressed.

Abstract: A method of making catalysts includes loading a quantity of catalyst material and quantity of carrier in into a plasma gun in a desired ratio and vaporizing the catalyst material and carrier in a reaction chamber, thereby forming a vapor cloud. The vapor cloud is quenched in a quench chamber to form solid nanoparticles, wherein the quench chamber comprises a frusto-conical body having a wide end, a narrow end, and a quench region formed between the wide end and the narrow end, and a reactive mixture inlet configured to receive the vapor cloud and to supply the vapor cloud into the quench region in the direction of the narrow end. The quench chamber further includes at least one conditioning fluid inlet configured to supply a conditioning fluid into the quench region in the direction of the narrow end. The nanoparticles are bonded to supports.

Abstract: The invention relates to a thermally reversible hot melt adhesive that is isocyanate-free, moisture independent, crosslinkable and thermally reversible. The thermally reversible hot melt adhesive may be repeatedly heated and cooled without negatively affecting the performance of the adhesive. The thermally reversible composition may also be used as a primer layer. The thermally reversible hot melt adhesive and primer are particularly well suited for end use applications such as packaging, graphic arts, construction, footwear, textiles, general assembly, automotive and consumer goods.

Abstract: Systems and methods in accordance with embodiments of the invention implement layers of metallic glass-based materials. In one embodiment, a method of fabricating a layer of metallic glass includes: applying a coating layer of liquid phase metallic glass to an object, the coating layer being applied in a sufficient quantity such that the surface tension of the liquid phase metallic glass causes the coating layer to have a smooth surface; where the metallic glass has a critical cooling rate less than 1000 K/s; and cooling the coating layer of liquid phase metallic glass to form a layer of solid phase metallic glass.

Abstract: Provided herein is a resin-metal complex and a manufacturing method thereof, the resin-metal complex being a synthetic resin comprising an olefin resin, filler, and coupling agent combined with a metallic material, the filler being at least one of an organic filler and inorganic filler, the inorganic filler being wood flour, wood pellet, wood fiber, or paper powder, and the inorganic filler being talc, calcium carbonate, wollastonite, or kaolinite.

Abstract: An example of a nanoballoon thermal protection system includes a refractory ceramic foam having carbide balloons. The foam has a closed cell structure not allowing liquid to penetrate through the foam. Each of the carbide balloons is hollow and has a diameter greater than 0 nm and less than 900 nm. Each of the carbide balloons includes a refractory carbide. In addition, a vehicle with thermal shield includes a surface and a first and second nanoballoon closed cell foam coatings. Each of the foam coatings has a melting point temperature greater than 1000° C. and a density less than 85%. Each of the foam coatings has hollow balloons having a diameter less than 900 nm. Each of the foam coatings includes a closed cell structure not allowing liquid to penetrate through the respective coating. Methods for manufacturing a nanoballoon system and a nanoballoon thermal protection system are also disclosed.

Abstract: Methods are disclosed for controlling the morphology and the release-rate of active agent from a coating layer for medical devices comprising a polymer matrix and one or more active agents. The methods comprise exposing a wet or dry coating to a freeze-thaw cycle. The coating layer can be used for controlled delivery of an active agent or a combination of active agents.

Abstract: A method of continuously forming a thin film includes the step of: moving a glass substrate with a thin strip shape having a constant db/2(d+b), where d is a thickness thereof and b is a width thereof in a cross section thereof, within a range from 0.015 to 0.15 through a film depositing region in which a reaction gas is supplied and a temperature is controlled to be high so that the glass substrate is rapidly heated; and moving continuously the glass substrate, immediately after the film depositing region, to pass through a cooling region in which a temperature is lower than that of the film depositing region, so that the glass substrate is rapidly cooled and the thin film formed of a component of the reaction gas is formed on the glass substrate.

Abstract: Provided herein are surface treatments such as paints, coatings, stains, varnishes, sealants, films, inks, and the like, containing heat labile component/carrier combinations and methods for making the formulations suitable for treating surfaces. The surface treatments and/or the treated surfaces can be subjected to elevated temperatures at or above which the heat labile component alone decomposes, reacts, or volatilizes. Because the heat labile component adsorbed on the carrier survives the elevated temperature, the resulting treated surfaces exhibit properties derived from the heat labile component(s). Resulting treated surfaces can exhibit properties derived from one or a combination of heat labile components including, but not limited to bacteriocides, fungicides, algaecides, viruscides, insecticides, antibiotics, enzymes, repellents (animal and insect), herbicides, pheromones, molluscicides, acaricides, miticides, rodenticides, fragrances, and the like.

Abstract: A back-sheet for a photovoltaic module is provided. A process for forming a back-sheet for a photovoltaic module includes the steps of providing a fluoropolymer film, providing a polymer melt comprising 20 to 95 weight percent ethylene propylene diene terpolymer, 5 to 70 weight percent of inorganic particulates, and 0 to 50 weight percent of adhesive selected from thermoplastic polymer adhesives and tackifiers, and depositing the polymer melt directly on the fluoropolymer film and pressing the fluoropolymer film and polymer melt together and cooling the polymer melt to form a first polymer layer adhered to the fluoropolymer film.

Abstract: A method and structure are provided for implementing leak prevention of water cooling hoses. A water cooling hose includes an inner hose layer and an outer hose layer. Potential water leaks are prevented from the water cooling hose or tubing by sealing of the cut end of the tubing after sizing of the water cooling hose has been completed. The cut end of the water cooling hose is dipped into a selected solution bath, and upon removal a seal is formed before hose assembly is provided.

Abstract: A method for imparting wear- and corrosion-resistance to a metal component comprising overlaying the component with a ductile Co-based alloy comprising between about 0.12 wt % and about 0.7 wt % C, between about 20 wt % and about 30 wt % Cr, between about 10 wt % and about 15 wt % Mo, between about 1 wt % and about 4 wt % Ni, and balance of Co, without forming cracks during the alloy's solidification.

Abstract: In a process for applying a friction-resistant coating to a steel sucker rod, the rod is passed, in sequence, through a surface preparation stage (for example, scale removal, shot peening, or other suitable method), an adhesive application stage (to enhance the strength of the coating's bond to the rod), an extrusion stage (in which the rod is passed through a die in conjunction with a flow of melted polymeric coating material), and a cooling (coating solidification) stage. Typically, the radial thickness of the coating will be between 0.125 and 0.375 inches. The process is adaptable to apply extruded coatings to continuous rod or to individual sucker rods having upset ends. The coating may be selected from but is not limited to high-density polyethylene, cross-linked polyethylene, polyvinylidene fluoride, ethylene tetrafluoroethylene, polytetrafluoroethylene, polyphenylensulfide, nylon, polyester, polyethersulfone, polyethylene terephthalate, polypropylene, polystyrene, epoxy, or acetyl.

Abstract: The present disclosure generally describes techniques suitable for use in the construction or recycling of composite materials, such as thermoplastics. A coated thermoplastic article may comprise a thermoplastic portion coupled to a supramolecular polymer interface layer, with a coating layer applied to a surface of the supramolecular polymer interface layer. Application of heat to the coated thermoplastic article may cause the supramolecular polymer interface layer to undergo a phase change, allowing the coating layer to be removed from the thermoplastic portion. Application of force to the coated thermoplastic article may enhance the removal of the coating layer. Embodiments of methods, compositions, articles and/or systems may be disclosed and claimed.

Abstract: Iron-silicon oxide particles with a core and an outer shell have improved heating rates in a magnetic field. The core contains maghemite, magnetite, and haematite. The outer shell is essentially or exclusively silicon dioxide. The crystallite diameter of the haematite determined by X-ray diffraction is greater than 120 nm. A ratio of the brightness of the Debye-Scherrer diffraction ring by electron diffraction at a lattice plane spacing of 0.20+/?0.02 nm, comprising maghemite and magnetite, to the brightness of the Debye-Scherrer diffraction ring by electron diffraction at a lattice plane spacing of 0.25+/?0.02 nm, comprising maghemite, magnetite and haematite, is no more than 0.2.

Abstract: A metal compound catalyst is formed by vaporizing a quantity of catalyst material and a quantity of carrier thereby forming a vapor cloud, exposing the vapor cloud to a co-reactant and quenching the vapor cloud. The nanoparticles are impregnated onto supports. The supports are able to be used in existing heterogeneous catalysis systems. A system for forming metal compound catalysts comprises components for vaporizing a quantity of catalyst material and a quantity of carrier, quenching the resulting vapor cloud, forming precipitate nanoparticles comprising a portion of catalyst material and a portion of carrier, and subjecting the nanoparticles to a co-reactant. The system further comprises components for impregnating the supports with the nanoparticles.

Abstract: In order to provide a tubular threaded joint constituted by a pin and a box each having threads and an unthreaded metal contact portion with excellent galling resistance and gas tightness even in extremely cold environments at ?60° C. to ?20° C. and rust preventing properties without using a compound grease, a thermoplastic solid lubricating coating containing low friction copolymer particles made from an acrylic-silicone copolymer and preferably further containing a solid lubricant (e.g., graphite) in a thermoplastic polymer matrix (e.g., selected from polyolefin resins and ethylene-vinyl acetate copolymer resins) is formed on the surface of the threads and unthreaded metal contact portion of a pin and/or a box.

Abstract: The invention relates to a method for producing seamlessly manufactured vehicle components, in particular vehicle flaps, having a continuous support of a thermoplastic plastics material, which vehicle components have at least one transparent region that is an integral part of the support.

Abstract: Provided are magnetic core-ceramic shell (e.g., magnetite (Fe3O4) core-calcium phosphate (Ca3(PO4)2) shell) nanocrystals with high crystallization degree, uniform size, and high chemical stability and a method for synthesizing the same. A core-shell structure is synthesized in a process of forming magnetite seeds corresponding to cores by the reduction of magnetite precursors and then, sequentially, coating the magnetite with Ca3(PO4)2 by the reduction of Ca3(PO4)2 precursors.

Abstract: The invention relates to an article of manufacture minimally comprising a wash soluble composition having at least one laundry benefit on a water-insoluble first substrate such as a nonwoven fabric, and a second laundry wash insoluble substrate adhered the first substrate by means of mutual contact with the wash soluble composition, for use in the laundering process, first in the washer and subsequently at least one substrate carried along with the wet fabrics in the tumble dryer. In this manner, a single article can assist in delivery of multiple laundry benefits to the washed and dried fabrics. The present invention further relates to methods for manufacturing such a laundry article.

Abstract: A one piece hoof sock bandage for use with horses, livestock, and other hoofed animals includes an elastic, water resistant sock material having a sole portion coated with a resilient, puncture resistant material. The sock material provides uniform compression to avoid constriction and extends up the leg to the pastern or higher where it is held in place by a cuff portion. The resilient sole portion covers the sole of the hoof and extends up the wall of the hoof far enough to prevent the sole portion from sliding on the hoof and to protect as much of the hoof as desired. The sock and sole portions may contain medications in various forms and generally function to treat the hoof area and protect it from contamination.

Abstract: A metal catalyst is formed by vaporizing a quantity of metal and a quantity of carrier forming a vapor cloud. The vapor cloud is quenched forming precipitate nanoparticles comprising a portion of metal and a portion of carrier. The nanoparticles are impregnated onto supports. The supports are able to be used in existing heterogeneous catalysis systems. A system for forming metal catalysts comprises means for vaporizing a quantity of metals and a quantity of carrier, quenching the resulting vapor cloud and forming precipitate nanoparticles comprising a portion of metals and a portion of carrier. The system further comprises means for impregnating supports with the nanoparticles.

Abstract: A metal catalyst is formed by vaporizing a quantity of metal and a quantity of carrier forming a vapor cloud. The vapor cloud is quenched forming precipitate nanoparticles comprising a portion of metal and a portion of carrier. The nanoparticles are impregnated onto supports. The supports are able to be used in existing heterogeneous catalysis systems. A system for forming metal catalysts comprises means for vaporizing a quantity of metals and a quantity of carrier, quenching the resulting vapor cloud and forming precipitate nanoparticles comprising a portion of metals and a portion of carrier. The system further comprises means for impregnating supports with the nanoparticles.

Abstract: A method is provided for forming a coating layer on a surface, wherein the coating composition includes at least two reactive components. At least one of the components is encapsulated in a plurality of microspheres, which are then mixed with the second component in a single chamber of a container. The mixture is sprayed from the chamber through a single spray nozzle onto the surface. Then, the microspheres degrade to release the first component and allow the first and second components to react with one another, thereby forming the coating layer on the surface.

Abstract: An oxide catalyst is formed by vaporizing a quantity of at least one precursor material or catalyst material thereby forming a vapor cloud. The vapor cloud is quenches forming precipitate nanoparticles. The nanoparticles are impregnated onto supports. The supports are able to be used in existing heterogeneous catalyst systems. A system for forming oxide catalysts comprises components for vaporizing a quantity of at least one precursor material or at least one catalyst material, quenching the resulting vapor cloud and forming precipitate nanoparticles. The system further comprises components for supports with the nanoparticles.

Abstract: A thin film deposition apparatus and a using method thereof are disclosed. The apparatus includes a preheating chamber, a reacting chamber, a cooling chamber, and at least one transmission module. The preheating chamber is configured for preheating the substrate. The reacting chamber is configured for receiving the substrate being preheated and transferred from the preheating chamber, heating the substrate to a working temperature, depositing a thin film on the substrate under the working temperature, and cooling the substrate being deposited to a temperature lower than the working temperature. The cooling chamber is configured for receiving the substrate being deposited and transferred from the reacting chamber and further cooling the substrate. The transmission module is configured for transferring the substrate between the preheating chamber, the reacting chamber, and the cooling chamber.