Rotating Or Inverting Patents (Class 427/425)
  • Patent number: 6207231
    Abstract: In forming a resist film by supplying a resist liquid onto a surface of an LCD substrate loaded in a rotation cup, a coating liquid is coated on the surface of the substrate by spraying the resist liquid onto the surface thereof while not rotating the substrate to thus form the coating film on the overall surface of the substrate, then the substrate is sealed into the rotation cup by closing the processing vessel by a lid member, and then a film thickness of the coating film is regulated by rotating the rotation cup and the substrate.
    Type: Grant
    Filed: April 27, 1998
    Date of Patent: March 27, 2001
    Assignee: Tokyo Electron Limited
    Inventor: Kiyohisa Tateyama
  • Patent number: 6203858
    Abstract: The invention is directed to a process and system for coating a traveling material web, especially paper or cardboard, with at least one liquid medium, in which the coating medium is conveyed to an applicator device with a spray nozzle fitted in a vacuum chamber to generate a spray mist. The spray mist is applied to the material web according to the invention in that it is applied to the outside of at least one roll and transferred to the material web from the roll.
    Type: Grant
    Filed: June 16, 1995
    Date of Patent: March 20, 2001
    Assignee: Voith Sulzer Papiermaschinen GmbH
    Inventor: Anton Plomer
  • Patent number: 6203849
    Abstract: In a method for coating of disc-shaped data storage media with a coating medium at least one coating nozzle is moved quickly by a first movement into the vicinity of a coating medium application location at the inner area of a storage medium and subsequently the at least one application nozzle is moved slowly by a second movement to the location of application. The coating medium is applied at the location of application and is distributed by a centrifugal force resulting from rotation of the storage medium. The device for coating disc-shaped data storage media with a coating medium has a rotatable support for the storage medium and at least one coating nozzle comprising a drive unit for moving the at least one coating nozzle across the storage medium to a location of application of the coating medium. The drive unit is a hydraulic arrangement with a first hydraulic cylinder for a first, fast movement and a second hydraulic cylinder for a second, slow movement of the at least one coating nozzle.
    Type: Grant
    Filed: November 13, 1998
    Date of Patent: March 20, 2001
    Assignee: Steag Hamatech GmbH Machines
    Inventors: Klaus Weber, Martin Kallis
  • Patent number: 6200633
    Abstract: Disclosed is a coating apparatus, comprising: a first stream-combining valve communicating with each of a first solvent tank and a resist solution tank, a first pump for supplying an initial resist solution from the resist solution tank toward said first stream-combining valve, a second pump for supplying a solvent from said first solvent supply toward said first stream-combining valve, a first mixer for mixing under stirring the initial resist solution flowing out of said first stream-combining valve with a solvent, a second stream-combining valve arranged downstream of said first mixer and communicating with each of the first mixer and said second solvent supply, a third pump for supplying the solvent from said second solvent supply toward the second stream-combining valve, a second mixer for mixing under stirring said primary mixed liquid material coming out of said second stream-combining valve with a solvent so as to prepare a final mixed liquid material, a nozzle equipped with a liquid spurting port for
    Type: Grant
    Filed: August 9, 1999
    Date of Patent: March 13, 2001
    Assignees: Tokyo Electron Limited, Kabushiki Kaisha Toshiba
    Inventors: Takahiro Kitano, Katsuya Okumura, Shinichi Ito
  • Patent number: 6197372
    Abstract: A coating and developing apparatus comprises a processing unit group having a plurality of processing units including a complex unit in which a first mounting stand mounting a substrate and a second mounting stand mounting and cooling the substrate are stacked. A plurality of processing units individually perform processes necessary for coating and developing the substrate. A plurality of processing units are multi-tiered. First, a substrate is carried from a substrate storing member which stores a plurality of substrates to the first mounting stand. Next, the substrate is carried out from the first mounting stand to be coated and developed. Thereafter, the coated and developed substrate is carried to the second mounting stand, from which the substrate is carried into the substrate storing member.
    Type: Grant
    Filed: July 29, 1998
    Date of Patent: March 6, 2001
    Assignee: Tokyo Electron Limited
    Inventors: Masami Akimoto, Issei Ueda
  • Patent number: 6197385
    Abstract: A coating unit, an aging unit, and a solvent substituting unit are adjacently disposed. The waiting time period after a wafer is loaded to the coating unit until the coating process of the coating process is started, is adjusted so that the staying time period of the wafer in the coating unit becomes longer than the staying time period of the wafer in the aging unit and the staying time period of the wafer in the solvent substituting unit (whichever longer). The staying time period of the wafer in the coating unit is designated as a rate determiner. Thus, after the coating solution is coated to the wafer, the wafer is quickly conveyed to the next process. Consequently, since the solvent can be suppressed from evaporating, an excellent thin film can be obtained.
    Type: Grant
    Filed: February 3, 1999
    Date of Patent: March 6, 2001
    Assignee: Tokyo Electron Limited
    Inventors: Kazuhiro Takeshita, Shinji Nagashima, Yoji Mizutani
  • Patent number: 6183810
    Abstract: Disclosed is a method of forming a coating film, in which a coating solution is supplied from a linear nozzle onto a substrate held by a spin chuck arranged inside a cup having an opening so as to form a coating film on the substrate, comprising the steps of (a) allowing a spin chuck to hold rotatably a substrate, and (b) moving the linear nozzle and supplying a coating solution from the linear nozzle onto the substrate while rotating the substrate in a moving direction of the linear nozzle.
    Type: Grant
    Filed: January 18, 1999
    Date of Patent: February 6, 2001
    Assignee: Tokyo Electron Limited
    Inventor: Yoshiharu Ota
  • Patent number: 6180325
    Abstract: A method for exposing photo-sensitive printing plates comprises applying a patterned coating to the printing plate to form a mask. The coating may be sprayed onto the printing plate and patterned by laser ablation. The method avoids the need to stock printing plates with integral masking layers. In preferred implementations the printing plate is exposed to actinic radiation without dismounting it from the apparatus in which the coating is applied. This minimizes the likelihood that the coating could be damaged in handling. The coating may be a thin sprayed on layer of carbon in a suitable binder.
    Type: Grant
    Filed: June 23, 1999
    Date of Patent: January 30, 2001
    Assignee: Creo SRL
    Inventor: Daniel Gelbart
  • Patent number: 6165542
    Abstract: A method of fabrication and inspection includes depositing a coating and determining at least one physical property of the coating using eddy current techniques. In a detailed embodiment an abradable coating having a metal volume fraction in the range of from 0.3 to 0.5 is applied to an inner circumference of a stator for a gas turbine engine compressor. The eddy current probe is positioned by a manipulator. A distance separating the probe and a surface of the coating is measured using a frequency above one megahertz (MHz). The thickness of the coating is measured by determining the rolloff frequency for the coating's complex impedance. The coating density is determined by its complex impedance at a characteristic frequency below four MHz. The density can be used as an indication of the performance of the coating with respect to abradability and the erosion resistance. The measurements may also be applied as a post-process quality control technique.
    Type: Grant
    Filed: December 23, 1998
    Date of Patent: December 26, 2000
    Assignee: United Technologies Corporation
    Inventors: Mark Jaworowski, Glenn T. Janowsky, Charles H. Weston
  • Patent number: 6165552
    Abstract: A film-forming method comprises the steps of: (a) holding a rectangular substrate by a spin chuck provided in a cup; (b) positioning a solvent supply nozzle above the rectangular substrate and supplying a solvent to the rectangular substrate, the solvent supply nozzle having a liquid discharge port which has a length at least corresponding to that of a peripheral portion of the rectangular substrate; (c) positioning a process liquid supply nozzle above the rectangular substrate and supplying a process liquid to a portion at a rotation center portion of the rectangular substrate, thereby to form a film; (d) rotating the rectangular substrate in the cup to adjust a film thickness of the film; and (e) thereafter positioning the solvent supply nozzle above one peripheral portion of the rectangular substrate and supplying the solvent to the one peripheral portion of the rectangular substrate, whereby the film is removed from the one peripheral portion of the rectangular substrate, the substrate being subsequently
    Type: Grant
    Filed: August 18, 1998
    Date of Patent: December 26, 2000
    Assignee: Tokyo Electron Ltd.
    Inventors: Noriyuki Anai, Tsutae Omori, Masaaki Takizawa, Mitsuhiro Sakai
  • Patent number: 6162507
    Abstract: An apparatus is disclosed for dispensing liquids on to a rotating surface. The apparatus includes first and second dispense lines connected to at least one liquid source to permit the dispensing of liquids from the first and second dispense lines on to a rotating surface. In a preferred embodiment, the first and second dispense lines are tubular and have first and second dispense tube disposed within the interior region of the first and second dispense lines, respectively. The first and second dispense tubes define first and second annular regions with the dispense lines, which are preferably connected by a fluid channel. A heat exchanger is attached to the first and second annular region to enable a heat transfer medium to be circulated through the first and second annular regions and the fluid channel.
    Type: Grant
    Filed: December 8, 1998
    Date of Patent: December 19, 2000
    Assignee: Micron Technology, Inc.
    Inventors: Bruce L. Hayes, Mark V. Peckham
  • Patent number: 6162496
    Abstract: A mixing system with a vessel for supplying a liquid and a device for supplying solid pieces to mix with the liquid. The system has an elongate enclosure with a first end opposing a second end. The enclosure defines a chamber in fluid communication with the vessel to receive the liquid. The chamber also has a inlet and an outlet with the inlet being closer to the first end than the outlet. The chamber receives the pieces from the device through the inlet and issues the pieces through the outlet. A motor driven mixing auger positioned in the chamber between the first and second ends rotates a selected direction about a rotational axis to intermix the liquid and pieces. The auger includes a first helical flight between the inlet and the outlet to convey the pieces from the inlet to the outlet when the shaft is rotated the selected direction. The auger also includes a second helical flight between the first flight and the second end to urge the solid pieces in a direction opposite the first flight.
    Type: Grant
    Filed: January 14, 1999
    Date of Patent: December 19, 2000
    Inventor: David Blue
  • Patent number: 6159541
    Abstract: A coating process comprises the steps of (a) holding a substrate using a spin chuck surrounded by inner and outer cups, such that the substrate can rotate, (b) rotating the substrate by rotating the spin chuck, and applying a coating liquid onto the substrate, thereby forming a coating on the substrate, (c) discharging, from the inner and outer cups, that part of the coating liquid which is scattered from the substrate while the substrate is rotated, (d) exhausting the inner and outer cups through a plurality of exhaust ports formed in outer peripheral portions of the outer cup, and (e) reducing, from a peripheral region of the substrate, the mist of the coating liquid which has occurred during the step (b), before the substrate stops rotation.
    Type: Grant
    Filed: October 30, 1998
    Date of Patent: December 12, 2000
    Assignee: Tokyo Electron Limited
    Inventors: Mitsuhiro Sakai, Hideyuki Takamori, Masafumi Nomura
  • Patent number: 6159290
    Abstract: An end effector in a robotic arm assembly receives a substrate in a cassette module and moves the substrate into a process module. A turntable rotatable on a fixed axis rotates a stator and a planet in the process chamber to a position of the planet in axial alignment with the end effector in the process chamber. A lifter assembly axially aligned with, and initially axially displaced from, the axially aligned planet is moved axially to lift the substrate from the end effector. The end effector is then withdrawn by the robotic arm assembly from the process chamber and the substrate is deposited by the lifter assembly on the axially aligned planet. When successive substrates have been sequentially deposited on a plurality of planets in the process chamber in the manner described above, the planets are individually rotated by the turntable relative to the stator on a second axis displaced from the first axis. The stator has peripheral teeth which mesh with teeth on the planets, the teeth being constructed (e.g.
    Type: Grant
    Filed: October 2, 1998
    Date of Patent: December 12, 2000
    Assignee: Shamrock Technology Corp.
    Inventors: Peter J. Clarke, Amos Barb
  • Patent number: 6143386
    Abstract: The invention relates to a form for the rotary printing, coating or imprinting of web-shaped materials and a method of producing the form wherein an elastomer layer is applied onto a carrier with a cylindrical surface area with the layer machined and engraved at the outer circumference to result in a cylindrical shape after curing. The form according to the invention is characterized in that the elastomer layer is formed of cold cure material. The engraving of the elastomer layer preferably is attained by laser engraving.
    Type: Grant
    Filed: June 15, 1998
    Date of Patent: November 7, 2000
    Inventors: Heinz Lorig, Jorg Richard, Franz-Josef Giesen, Klaus Langerbeins, Alfred Ernst Link
  • Patent number: 6139636
    Abstract: A spray coating device for coating a rotating wafer according to the invention is disclosed. The spray coating device comprises a spray head having a plurality of spray holes which are located on one end thereof with more in number on both sides than on the center of the end for uniformly spraying a chemical liquid on the rotated wafer. Since spray holes are more in number on the both sides than on the center of the end, the rotated wafer can be uniformly spray coated with the chemical liquid even though several spray holes are congested.
    Type: Grant
    Filed: November 12, 1998
    Date of Patent: October 31, 2000
    Assignee: United Microelectronics Corp.
    Inventors: Kuo-Feng Huang, Kuo-Chen Wang, Ming-Che Yang, Hsien-Jung Hsu
  • Patent number: 6136374
    Abstract: Method and apparatus for applying a protective coating to the surfaces of air vents in a vented brake rotor wherein the method includes the steps of rotating the rotor, directing coating material along with a stream of air toward the inlets of the vents to flood the vents with coating material to coat the surfaces, applying a suction to the outlets of the vents to remove and recover the excess material, and curing the coating. The apparatus includes fixtures for mounting the rotors that are driven to rotate the rotors during the coating operation, and for automatic operation a conveyer for advancing the rotors through a vent coating station, an exterior coating station for coating exterior rotor surfaces, and a curing station.
    Type: Grant
    Filed: October 14, 1999
    Date of Patent: October 24, 2000
    Inventor: Craig J. Reuscher
  • Patent number: 6136375
    Abstract: This invention provides making a rotogravure printing medium which includes a member coated with a film that is selectively removable to produce ink-retaining cells. A series of adjacent strip or bead portions of a self leveling, curable plastic composition which is engraveable after curing is provided on the surface of the member. The adjacent strip or bead portions merge and self level at and after deposition to produce a uniform, continuous coating of the plastic composition.
    Type: Grant
    Filed: April 26, 1991
    Date of Patent: October 24, 2000
    Assignee: W. R. Chesnut Engineering
    Inventors: David E. Bressler, W. Richard Chesnut, Daniel Caligaro
  • Patent number: 6093449
    Abstract: A method and spray forming system for effectively spraying the inner diameters of intricate objects and makes inner diameter spray forming practical for articles that have various and complicated inner geometries. The spray forming system can include at least one of a rotating mandrel and preform, and atomizer, which is fed with liquid metal, to form a spray. The atomizer is positioned with respect to inner walls of at least one of the rotating mandrel and preform to accurately and fully spray form an inner diameter of an article, even if the article has complicated and irregular inner surfaces.
    Type: Grant
    Filed: May 12, 1997
    Date of Patent: July 25, 2000
    Assignee: General Electric Company
    Inventors: William Thomas Carter, Jr., Mark Gilbert Benz, Robert John Zabala, Bruce Alan Knudsen
  • Patent number: 6090261
    Abstract: According to aspect of the invention, a plating system is provided which includes a tank for containing a plating solution, a shaft extending into the tank, and a substrate holder mounted to the shaft. The shaft and the tank are rotatable relative to one another. The substrate holder is configured to support a substrate in position so that at least a first face of the substrate is exposed to the plating solution in the tank.
    Type: Grant
    Filed: May 21, 1998
    Date of Patent: July 18, 2000
    Assignee: FormFactor, Inc.
    Inventor: Gaetan L. Mathieu
  • Patent number: 6083571
    Abstract: A method of applying a pattern to a surface of a substrate includes forming mutually parallel pattern rows applied by at least two output channels. In order to produce a pattern without strip-like visible faults, provision is made for the output channels in each case to be displaced transversely in relation to the pattern rows such that pattern rows can optionally be applied by at least some of the output channels in order to obtain a complete pattern. The individual pattern rows are applied by different output channels and are mixed with one another.
    Type: Grant
    Filed: March 19, 1999
    Date of Patent: July 4, 2000
    Assignee: Schablonentechnik Kufstein Aktiengesellschaft
    Inventor: Harald Kapfinger
  • Patent number: 6066207
    Abstract: A powder coating booth for performing therein powder coating onto an article to be coated is divided into an automatic coating zone in which coating is performed only by automatic coating machines and manual coating zones in which coating is performed by a worker. A dry type of first recovering apparatus which recovers only that powder coating material in the automatic coating zone which has not been coated onto the article to be coated is provided separately from a second recovering apparatus which recovers that powder coating material in the manual coating zones which has not been coated onto the article to be coated. In this manner, the ratio of reuse of the recovered uncoated powder coating material is improved.
    Type: Grant
    Filed: May 18, 1998
    Date of Patent: May 23, 2000
    Assignee: Honda Giken Kogyo Kabushiki Kaisha
    Inventors: Hiroshi Arai, Yukihide Yamashita, Masayuki Yamaguchi, Kenichirou Mori
  • Patent number: 6066575
    Abstract: A semiconductor processor for spray coating wafers or other semiconductor articles. The processor has a compartment in which are mounted a wafer transfer, coating station and thermal treatment station. The coating station has a spray processing vessel in which a movable spray-head and rotatable wafer holder. The spray station has coating viscosity control features. An ultrasonic resonating spray-head is precisely supplied with coating from a metering pump. The heat treatment station heat cures the coating and then cools the wafer. The system allows coatings to be applied in relatively uniform conformational layers upon irregular surfaces.
    Type: Grant
    Filed: June 26, 1997
    Date of Patent: May 23, 2000
    Assignee: Semitool, Inc.
    Inventors: Timothy J. Reardon, Craig P. Meuchel, Thomas H. Oberlitner
  • Patent number: 6056998
    Abstract: A coating apparatus of the present invention comprises coating solution supply sources for supplying a coating solution, a mounting table for holding a substrate to allow a surface to be coated to face upward, nozzles for pouring the coating solution toward the surface of the substrate to be coated, mounted on the mounting table, a pump chamber capable of swinging its volume and having a sucking port for introducing the coating solution from the coating solution supply source and a spurting port for spurting the coating solution and to be supplied toward the nozzle, pump driving mechanisms for increasing and decreasing an inner pressure of the pump chamber to introduce and spurt the coating solution into/from the pump chamber, a filter provided inside or at the upstream side of the pump chamber for filtrating the coating solution before the coating solution is spurted out from the pump chamber through the spurting outlet, a valve provided between the pump chamber and the nozzle for regulating a flow amount of
    Type: Grant
    Filed: March 2, 1998
    Date of Patent: May 2, 2000
    Assignee: Tokyo Electron Limited
    Inventor: Akihiro Fujimoto
  • Patent number: 6056993
    Abstract: A porous, tubular synthetic prosthesis, prosthesis precursor, and methods of producing the same are provided. Specifically the method involves co-spraying both a water soluble and water insoluble fibrous component onto a mold to form the prosthesis precursor. The water soluble fibrous component may then be at least partially removed so as to provide a porous, tubular synthetic prosthesis.
    Type: Grant
    Filed: April 17, 1998
    Date of Patent: May 2, 2000
    Assignee: Schneider (USA) Inc.
    Inventors: Jacob Leidner, Karim Amellal
  • Patent number: 6053977
    Abstract: A coating apparatus comprises a spin chuck for supporting a wafer rotatably, a driving mechanism for rotating the spin chuck, a nozzle for supplying a resist solution or a solvent to the wafer supported by the spin chuck, an outer cup arranged to surround the wafer supported by the spin chuck, an inner cup formed like a ring and arranged along an outer peripheral portion of the wafer to be coated over and in close vicinity of the outer peripheral portion upon coating, and an attaching and detaching mechanism for attaching and detaching the inner cup.
    Type: Grant
    Filed: June 26, 1998
    Date of Patent: April 25, 2000
    Assignee: Tokyo Electron Limited
    Inventor: Nobuo Konishi
  • Patent number: 6042885
    Abstract: Application of a release agent onto the interior surfaces of a commercial bakery trough is accomplished by a system for dispensing a gel having two spray head assemblies. While the trough is stationary, each head in turn descends into the trough and propels the release agent onto a portion of the interior surfaces including side walls, an end wall, and the bottom wall of the trough. Each head includes a disc that spins to distribute the release agent. An edge on the disc defines a predetermined spray pattern. Waste of release agent due to overspray is minimized by controlling a release agent valve in the head, controlling disc rotation, and monitoring position of the head in the trough.
    Type: Grant
    Filed: April 17, 1998
    Date of Patent: March 28, 2000
    Assignee: ABITEC Corporation
    Inventors: Douglas J. Woollard, John H. Sharrock
  • Patent number: 6042647
    Abstract: In a nozzle system for feeding treatment liquid, a storage tank is equipped with a nozzle comprising an opening and a stopcock which opens and closes said opening. When the stopcock opens the opening, a predetermined amount of liquid developer is dropped from the tank onto a wafer through a narrow gap between the outer surface of the stopcock and the inner edge of the opening. Thereby, the large amount of the liquid developer can be discharged and diffused on the entire wafer surface for a short time. Besides, the liquid amount is controlled with ease, and damage to the wafer is reduced, which enables a high quality of the development.
    Type: Grant
    Filed: May 15, 1998
    Date of Patent: March 28, 2000
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Kazushi Kawakami, Toshinori Imai
  • Patent number: 6027769
    Abstract: A method for depositing at least two components having dissimilar compositions on a cylindrical surface is disclosed wherein the method comprises the steps of:(a) rotating the cylindrical surface about its axis;(b) locating a mixing head a short distance from the cylindrical surface, said mixing head being connected to separate supply means for each of said components via flow controlling means;(c) opening a first flow controlling means thereby supplying a first component to the mixing head;(d) moving the mixing head in the axial direction along the cylindrical surface while depositing the first component from the mixing head onto the cylindrical surface;(e) opening a second flow controlling means to the extent necessary to supply a second component to the mixing head at a flow rate lower than that at which the first component is supplied;(f) gradually decreasing the flow rate of the first component while gradually increasing the flow rate of the second component until the flow of the first component is termi
    Type: Grant
    Filed: August 24, 1998
    Date of Patent: February 22, 2000
    Inventors: Vincent J. Gajewski, Ronald W. Fuest
  • Patent number: 6004627
    Abstract: An apparatus for applying a coating to the head-shank junction of externally threaded fasteners in an automated fashion. The fasteners are positioned, head down, on rotating part holders positioned about the periphery of a rotating disc. The part holders may be magnetic or other forms, and are adapted to maintain the fasteners in a generally fixed position during their movement. The fasteners are pre-heated at a heating station during their rotational movement on the disc. A dispenser is then used to apply the coating to the articles, in timed sequence to the movement of the articles. In this fashion, a coating can be applied to selected portions of the entire periphery of the head-shank junction. A method for applying a coating to the head-shank junction of externally threaded fasteners in an automated fashion also forms part of the present invention.
    Type: Grant
    Filed: January 7, 1997
    Date of Patent: December 21, 1999
    Assignee: Nylok Fastener Corporation
    Inventors: Richard Duffy, Eugene Sessa
  • Patent number: 5989644
    Abstract: A spray painting apparatus and methodology. A plurality of parts are loaded onto a carrier at circumferentially spaced locations about a central spin axis of the carrier whereafter the carrier is moved in indexing fashion to a spray station where drive means engage the carrier to spin the carrier about its spin axis while a spray gun assembly is moved up and down in reciprocal fashion parallel to the spin axis. The parts are mounted on the carrier in a fashion to simulate impellers which have the effect of sucking air into the center region of the carrier to augment painting of the interior surfaces of the parts. The carriers are preferably moved to the paint spray station by a power and free conveyor system wherein the carrier is disengaged from the power conveyor at the paint spray station and is reengaged with the power conveyor following spinning movement of the carrier and reciprocal movement of the spray gun assembly.
    Type: Grant
    Filed: June 12, 1998
    Date of Patent: November 23, 1999
    Assignee: Adac Plastics, Inc.
    Inventor: Terry L. Williams
  • Patent number: 5952056
    Abstract: Atomized metal is deposited metal onto a substrate so as to cause at least partial solidification of the deposited metal; further atomized metal is deposited onto the partially solidified deposited metal on the substrate; and the metal deposited onto the partially solidified deposited metal is allowed to fully solidify on the substrate; the cooling of the further deposited metal, and the composition of the metal and/or of a gas used in the atomization of the further atomized metal being tailored such that volumetric contraction on solidification and cooling of the further deposited metal is compensated for, when the deposited metal has been cooled to ambient temperature, by volumetric expansion in a reaction or phase change in the further deposited metal.
    Type: Grant
    Filed: March 24, 1997
    Date of Patent: September 14, 1999
    Assignee: Sprayform Holdings Limited
    Inventors: Richard Michael Jordan, Allen Dennis Roche
  • Patent number: 5945160
    Abstract: A nozzle actuating and adjustment system for applying sealant to a can lid member comprising a nozzle which has a sealant dispensing opening, a needle valve means, a needle valve seat surface and a sealant flow passage for enabling flow of sealant material onto the lid member. The needle valve is selectively axially movable between an open sealant applying position and a closed non-flow position relative to the needle valve seat surface. A spring means is operatively associated with the needle valve means to normally hold the needle valve means in the closed lowered position. A needle valve actuator solenoid is operatively connected to the needle valve for selectively causing axial upward movement of the needle valve from the closed position to the open position by a predetermined axial distance to provide a predetermined sealant flow gap in the nozzle means to dispense a predetermined amount of sealant material during a predetermined dispensing time period.
    Type: Grant
    Filed: July 24, 1997
    Date of Patent: August 31, 1999
    Assignee: Preferred Machining Corporation
    Inventors: Roger Leo Kobak, Gary L. Yount, James S. Stirbis, William W. Weil
  • Patent number: 5925410
    Abstract: A method for forming a layer of material, particularly a dielectric material, on a substrate includes the steps of dispensing the material onto the substrate, spinning the substrate to produce a layer of the dispensed material, and vibrating the substrate to eliminate voids and/or gaps in the dispensed material. The dispensed material is hardened and if not sufficiently planar, may be subjected to a planarization step.
    Type: Grant
    Filed: May 6, 1997
    Date of Patent: July 20, 1999
    Assignee: Micron Technology, Inc.
    Inventors: Salman Akram, Paul D. Shirley, William T. Rericha
  • Patent number: 5912054
    Abstract: A coating apparatus has a nozzle for delivering a photo-resist liquid onto a semiconductor wafer supported by a spin chuck. The nozzle is movable between a supply position and a wait position. At the wait position, there are a roller which is rotatable in one direction and has a circumferential surface with thinner thereon, and a wiper for wiping the circumferential surface of the roller. While the nozzle is located at the wait position, a waiting mode is first performed, and a preparing mode is then performed immediately before the nozzle is moved from the wait position to the supply position. In the waiting mode, delivery of the photo-resist liquid from the nozzle is stopped and the wiper is located at a retreat position, such that a tip port of the nozzle is wetted by the thinner present on the circumferential surface of the roller.
    Type: Grant
    Filed: August 21, 1997
    Date of Patent: June 15, 1999
    Assignee: Tokyo Electron Limited
    Inventor: Kiyohisa Tateyama
  • Patent number: 5908657
    Abstract: In the present invention, a waste solution and a exhaust gas are guided together from a drain cup DC into a storing means through common discharge means. Naturally, the gas-liquid separation is performed within the storing means in place of performing the gas-liquid separation within the drain cup DC. Therefore, the waste solution is not solidified within the drain cup so as to plug the common discharge means. Also, a predetermined waste solution is kept stored in the storing means included in the coating apparatus of the present invention, making it possible to permit the surface of the stored waste solution to absorb the mist, and the waste solution is prevented from being solidified within the storing means. Further, since a minimum amount of the exhaust gas is kept discharged even during non-operation of the coating apparatus by using an exhaust gas damper whose degree of opening can be controlled, the waste solution stored in the storing means is prevented from being solidified.
    Type: Grant
    Filed: October 9, 1997
    Date of Patent: June 1, 1999
    Assignee: Tokyo Electron Limited
    Inventors: Yoshio Kimura, Satoshi Morita, Yuuji Matsuyama
  • Patent number: 5906860
    Abstract: The invention provides an apparatus for treating a substrate with resist, comprising a spin chuck for horizontally holding a substrate, a first motor for variably rotating the spin chuck, a nozzle for applying resist solution onto the upper surface of the substrate held on the spin chuck, a cup having an upper opening through which the substrate is put in or taken out of the cup and a lower opening through which extends the driving shaft of the spin chuck, the cup positioned to surround the substrate held on the spin chuck to receive liquid centrifugally separated from the substrate which is rotated about its axis, a lid to close the upper opening of the cup to define a space around the substrate, a second motor for variably rotating the cup independently of the spin chuck rotation, a liftable cylinder for relatively moving at least one of the spin chuck and cup, which are positioned apart from each other, toward each other to achieve mutual contact, and an O-ring for hermetically sealing the mutual contact p
    Type: Grant
    Filed: April 4, 1997
    Date of Patent: May 25, 1999
    Assignee: Tokyo Electron Limited
    Inventors: Kimio Motoda, Kiyomitsu Yamaguchi, Yoshitaka Matsuda, Tetsu Kawasaki
  • Patent number: 5897922
    Abstract: A composite part consisting of a metallic matrix and reinforcing fibers is fabricated by the simultaneous winding of the fiber and plasma spraying of the matrix onto a rotating mandrel, wherein an axi-symmetric part is produced with multiple layers of the fibers aligned in the circumferential direction. Single or multiple fiber strands are wound onto a mandrel and simultaneously sprayed with the heated powder matrix material using a thermal spray process. Rotation and translation of the mandrel produces an axi-symmetric composite part. The content of the fiber material in the plasma sprayed matrix is typically up to 40% by volume. The light-weight composite part is produced in a single processing step. The part may be used either directly, or as an insert in other components with or without further densification.
    Type: Grant
    Filed: April 7, 1997
    Date of Patent: April 27, 1999
    Assignee: National Research Council of Canada
    Inventors: Pawan Saxena, Jonathan C. Beddoes, Ashok K. Koul
  • Patent number: 5895689
    Abstract: A method for coating a cylindrical object which comprises applying to the cylindrical object an effective amount of a polyurethane composition comprising:a) an isocyanate-terminated polyurethane prepolymer; andb) a curative agent comprising i) a polyol; ii) an aromatic diamine; iii) a thixotropic aliphatic amine; and iv) a thixotropic colloidal additive.
    Type: Grant
    Filed: May 6, 1998
    Date of Patent: April 20, 1999
    Assignee: Uniroyal Chemical Company, Inc.
    Inventor: Vincent John Gajewski
  • Patent number: 5885661
    Abstract: An apparatus and method are provided for efficiently and effectively coating a substantially flat surface, i.e., a substrate, with a high-viscosity chemical such as photoresist. The chemical is dispensed through a piezo electrically controlled droplet jet cartridge on to the surface. The thickness of the chemical coating is controlled by controlling the rate at which chemical is dispensed through the droplet jet cartridge. A number of droplet jet cartridges are aligned such that gaps in chemical dispensed by one droplet jet cartridge are filled by chemical dispensed by other droplet jet cartridges. An array of droplet jet cartridges which spans the width of the surface moves across the surface to coat the surface with chemical in a single pass. To coat a circular surface, the surface is spun while a droplet jet cartridge is moved from the center of the surface to the outer edge of the surface. Chemical is dispensed on to the surface in a helical pattern.
    Type: Grant
    Filed: July 26, 1995
    Date of Patent: March 23, 1999
    Assignee: Semiconductor Systems, Inc.
    Inventor: William T. Batchelder
  • Patent number: 5871832
    Abstract: A guide for leveling the flow of a coating from a nozzle onto a generally cylindrical substrate of a polymeric printing component in a printing machine is provided. The substrate is rotated about its longitudinal axis by a turning apparatus having a axially movable slide for mounting the nozzle to the slide. The coating is spirally applied to the substrate. The guide includes a member operably associated with the slide and moves with the slide. The member has a surface parallel to and slightly spaced from the periphery of the substrate so as to assist in evenly distributing the coating on the periphery of the substrate.
    Type: Grant
    Filed: June 26, 1996
    Date of Patent: February 16, 1999
    Assignee: Xerox Corporation
    Inventors: Patrick J. Finn, Anthony J. Formicola, Joseph R. Blaszak
  • Patent number: 5860204
    Abstract: An improved continuous tube forming and coating process and apparatus, wherein the tube is preferably formed and welded with the seam located at the bottom of the tube. One surface of the strip is coated with a paint or other protective coating and the open seam tube is formed with the painted surface on the inside of the tube. An improved coating applicator and impeder is disclosed which coats the inner surface of the seam following welding preferably in an inert atmosphere. The improved impeder includes an outer annular chamber adjacent the casing which includes one or more ferrite rods and circulating coolant and an inner axial paint applicator tube having a free end which extends through the impeder casing having a nozzle which applies a protective coating over the seam, preferably located in the lower portion of the tube. In one preferred embodiment of the impeder, an inert gas passage surrounds the paint applicator tube.
    Type: Grant
    Filed: December 31, 1996
    Date of Patent: January 19, 1999
    Assignee: The Idod Trust
    Inventors: Theodore H. Krengel, John J. Borzym
  • Patent number: 5849359
    Abstract: The present invention relates to an apparatus for simultaneously coating a plurality of workpieces. The apparatus includes a modular fixture having a plurality of bushing and spindle arrangements for supporting the workpieces to be coated. The bushing and spindle arrangements allow each workpiece to rotate about its longitudinal axis. They further allow each workpiece to assume a first position where it is tilted towards a source of coating material during a first portion of the coating cycle and a second position substantially parallel to the source of coating material during a second portion of the coating cycle. By providing the novel bushing and spindle arrangement of the present invention, it is possible to coat surfaces of the workpiece which are substantially perpendicular to other surfaces of the workpiece and still obtain a substantially uniform coating along the other surfaces of the workpiece. A process for simultaneously coating the workpieces is also described.
    Type: Grant
    Filed: July 17, 1997
    Date of Patent: December 15, 1998
    Assignee: United Technologies Corporation
    Inventors: Steven M. Burns, Richard William Varsell
  • Patent number: 5803971
    Abstract: The present invention relates to an improved fixture for facilitating the coating of workpieces such as turbine blades and vanes. The fixture has a hollow core member and a plurality of workpiece receptacles positioned along the length of and about the periphery of the core member. Each of the workpiece receptacles comprises an open sided workpiece support structure and a cover for closing the open side of the support structure. During the coating operation, the fixture of the present invention is rotated about its longitudinal axis while the workpieces being coated remain stationary within the receptacles.
    Type: Grant
    Filed: January 13, 1997
    Date of Patent: September 8, 1998
    Assignee: United Technologies Corporation
    Inventors: John William Menchetti, Steven Michael Burns
  • Patent number: 5763004
    Abstract: Also disclosed is an appliance for introducing sealing compound into lug caps, the appliance containing a turntable for accommodating the cap, and an injection unit, the injection unit containing a nozzle block, which has annularly arranged injection nozzles, and a delivery device for the sealing compound, the turntable and the nozzle block being arranged so as to be centered and the nozzle block being rotatable in the same direction as the turntable.The invention also relates to a process for introducing sealing compound into lug caps and to the use of the appliance for injecting sealing compound into lug caps.
    Type: Grant
    Filed: March 22, 1996
    Date of Patent: June 9, 1998
    Assignee: BASF Lacke + Farben, AG
    Inventor: Erwin Hammen
  • Patent number: 5756155
    Abstract: The invention provides a combination of a nozzle and a vacuum hood. The vacuum hood has a chamber that surrounds the tip of the nozzle and removes residue from the tip by a vacuum which flows in the chamber past the nozzle tip. This vacuum catches and removes residue from the nozzle tip and prevents the reside from interfering with the spraying action or dripping down. The method of the instant invention provides for dispensing a fluid from a nozzle without dripping fluid from the nozzle having a vacuum hood. The method comprises: (a) dispensing a fluid on a rotating semiconductor wafer through a nozzle over the wafer; (b) terminating the fluid flow through the nozzle; (c) creating an upward flow of gas about the dispensing nozzle when the flow of fluid through the nozzle is terminated; (d) capturing any fluid residue from the nozzle in the upward flow of gas; (e) removing the wafer and positioning another wafer; and (f) terminating the upward flow of gas; and repeating the process of steps (a) through (f).
    Type: Grant
    Filed: January 22, 1996
    Date of Patent: May 26, 1998
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Hao Tzeng, Dong-Shiuh Cheng, Cherng-Yui Chang, Yung-Kai Lin
  • Patent number: 5731044
    Abstract: A process for coating a front surface of a cathode ray, the process being characterized by using a ultraviolet ray setting plastic material as a coating material. According to the process, a preformed cathode ray tube bulb having a front surface is maintained with the front surface directed upwards and a transparent, fluidized or molten plastic material of ultraviolet setting property is discharged to the front surface of the bulb through a plurality of thin nozzles arranged in at least one row or one or more nozzles each having an elongated nozzle opening. In this instance, it is preferable that the molten plastic material discharged from the nozzles is received by a film forming surface which is arranged adjacent to the nozzles to form a thin plastic film before it reaches the front surface of the bulb. Preferably, the film forming surface is provided by a sheet of a material, such as a silicon rubber, which is not wettable to the plastic material.
    Type: Grant
    Filed: June 18, 1996
    Date of Patent: March 24, 1998
    Assignee: Kyowa Electric & Chemical Co., Ltd.
    Inventors: Kashichi Hirota, Aijiro Okuzumi, Yoshiaki Masumura
  • Patent number: 5721019
    Abstract: An EMI shielding member and method of making the member. The member includes a non-metallic substrate having an electrically non-conductive coating of a dielectric polymer matrix material loaded with an EMI shieldingly effective amount of electrically conductive fibers. The member can be formed by spraying the fiber loaded, dielectric polymer matrix onto a flexible fabric or tape.
    Type: Grant
    Filed: June 7, 1995
    Date of Patent: February 24, 1998
    Assignee: Martin Marietta Corporation
    Inventors: H. Carl Ashcraft, Walter B. May, Douglas R. Dowell
  • Patent number: 5702578
    Abstract: A surface coating applied to a subject surface includes an undercoating, a color base layer, coated over the undercoating layer, which contains a coloring material, and a color clear layer, coated over the color base layer, which contains a coloring dye of a hue within +/-10 from a hue of the coloring material of the base color layer on the 100-division Mansell hue ring.The color clear layer may be applied with a paint spray device while rotating the subject surface around an axis and continuously moving the subject surface along the axis to form a spiral pattern of paint spray relative to and around the subject surface at regular pitches. Preferably, the ratio of each of the regular pitches to a width of the pattern of paint spray is less than 0.3.
    Type: Grant
    Filed: March 19, 1996
    Date of Patent: December 30, 1997
    Assignee: Mazda Motor Corporation
    Inventors: Hironori Umeda, Tohru Mashimo, Kazuo Hironaka, Tadamitsu Nakahama, Takakazu Yamane, Makoto Aizawa, Yukifumi Taniguchi
  • Patent number: 5686148
    Abstract: A body of a vehicle, that is supported by a carrier or conveyor is rotated about a rotational axis extending in an approximately horizontal direction of the carrier or conveyor. When the body is supported in a normally standing position with its roof at the top of the body and its floor at the bottom thereof, the center of gravity of a rotary member containing the body is set to be at a position underneath the rotational axis in a vertically extending plane containing the rotational axis. The body is locked by a clamping unit so as to prevent rotation when the body is coated in the coating station. In the drying station, the locking by the clamping unit is released and the body is then displaced at a given angle so as to cause rotation on account of inertia on the basis of its own weight. After the drying station, the forcible rotation is shifted to free rotation which in turn is caused to be converged into a rest or normally standing position.
    Type: Grant
    Filed: July 21, 1994
    Date of Patent: November 11, 1997
    Assignee: Mazda Motor Corporation
    Inventor: Hidenori Suzuki