Abstract: Systematic and effective methodology to clean capacitively coupled plasma reactor electrodes and reduce surface roughness so that the cleaned electrodes meet surface contamination specifications and manufacturing yields are enhanced. Pre-cleaning of tools used in the cleaning process helps prevent contamination of the electrode being cleaned.

Abstract: A method produces a coating including a conjugated polymer on a substrate. The method includes the steps of: —providing a substrate, —introducing a conjugated polymer coating forming material into an atmospheric pressure plasma discharge, or into the reactive gas stream resulting therefrom, —simultaneously with the introduction of a coating forming material, introducing an additional material into the plasma discharge or the reactive gas stream resulting therefrom, —exposing the substrate to the plasma discharge or the reactive gas stream resulting therefrom, thereby obtaining the coating.

Abstract: An LCD device adapted to improve a residual image matter is disclosed. The LCD device includes an alignment layer aligning the liquid crystal. The alignment layer is formed of an optically aligned composition inclusive of an aromatic compound. Also, the alignment layer undergoes a crosslinking process. In accordance therewith, the thermalization of the alignment layer is improved. As a result, the residual image problem of the LCD device can be solved.

Abstract: A method for depositing a coating onto a glass substrate for adhesive bonding. The process comprises depositing a coating where the surface is cleaned during a first time period, and depositing a high-velocity impact polymer reaction coating on the surface at ambient air pressure during a second time period using an atmospheric pressure air plasma. The coated glass can be bonded using a CASE compound, consisting of coatings, adhesives, sealants, elastomers, and combinations thereof. The opposing surface of the CASE compound is adjacent to a frame, such as an automotive vehicle windshield flange.

Abstract: A method and a device for coating an inner surface of a hollow endless geometry, in particular of a pipe/tube includes introducing a gas mixture comprising at least one precursor into the endless geometry, in which the endless geometry is passed through at least one electrode unit, in which an alternating electric voltage is applied to the electrode unit, so that the gas mixture inside the endless geometry is at least partially transformed into a plasma state in the region of the electrode unit. A reaction product is produced in the gas mixture from the precursor by the plasma and the reaction product is deposited on the inner surface of the endless geometry.

Abstract: A medical device comprising a substrate having a plasma polymerized functionality bonded to at least a portion of the substrate. A superoxide dismutase mimic agent having a complimentary functional group to the plasma polymerized functionality is bonded to the portion of the substrate by bonding to the plasma polymerized functionality. The functionalities can be carboxylate, amine, or sulfate groups and/or polyethylene glycol and can optionally include crosslinking groups.

Abstract: The present invention is related to a luminescent material generated by polymerization of a pyrromethene complex by glow discharge. The polymer material of the present invention exhibits semi-conductive properties and has a luminescence maximum in a spectrum region in the range of about 540 nm to about 585 nm with a half-width of the luminescence band in the range of about 55 nm to about 75 nm, a quantum yield of photoluminescence in the range of about 0.6 to about 0.8, and an electric conductivity at a temperature of about 20° C. in the range of about 1×10?10 S/cm to about 5×10?10 S/cm. The resultant polymer layer has a thickness in the range of about 0.01 ?m to about 10 ?m on a substrate placed between or on any of the electrodes. The starting pyrromethene complex may be a 1,3,5,7,8-pentamethyl-2,6-diethylpyrromethene difluoroborate complex (pyrromethene 567).

Abstract: A method of manufacturing a magnetic recording head includes a resist pattern forming step of forming a resist layer that is made of thermoplastic resin and in which a hole is formed in the shape of a main magnetic pole of the magnetic recording head, a hardening treatment step of hardening surfaces of the resist layer; a baking step that heat-bakes the resist layer after the hardening treatment step to temporarily make the resist layer fluid; and a main magnetic pole forming step of forming a main magnetic pole by filling the hole in the resist layer with a material of the main magnetic pole.

Abstract: A thin film formed from at least one polycyclic alicyclic compound selected from among compounds of the following formulas (1), (2) and (3) as a precursor.

Abstract: The invention relates to a method for depositing a polymer layer containing nanoparticles on a substrate material. The method comprises the steps of providing the substrate material, providing a polymerization material near a surface of the substrate material, conducting a gas flow near the surface of the substrate material, the gas flow comprising a nanomaterial, and depositing the polymer layer at the surface of the substrate material by applying a plasma polymerization process.

Abstract: A method of making a polymer coating on a microstructured substrate. The method may be performed by vaporizing a liquid monomer or other pre-polymer composition and condensing the vaporized material onto a microstructured substrate, followed by curing. The resulting article may possess a coating that preserves the underlying microstructural feature profile. Such a profile-preserving polymer coating can be used to change or enhance the surface properties of the microstructured substrate while maintaining the function of the structure.

Abstract: A photosensitive monomer of formula. “L1”, “L2”, “L3”, “L4”, “L5”, “L6” are selected from hydrogen, fluorine, chlorine, cyano, alkyl, alkylcarbonyl, alkoxycarbonyl, and alkylcarbonyloxy having 1 to 7 carbon atoms, in which one or more hydrogen atoms may be substituted by fluorine or chlorine. “R1”, “R2”, “R3” and “R4” are selected from hydrogen, fluorine, chlorine, cyano, thiocyanato, pentafluoro sulfanyl, nitrite, straight-chained alkyl/branched alkyl, and a “Z-Sp-P” group. At least one of “R1”, “R2”, “R3” and “R4” is “Z-Sp-P” group. “Z” is selected from oxygen, sulfur, methyoxy, carbonyl, caroboxyl, carbamoyl, methylthio, ethenylcarbonyl, carbonylethenyl, and a single bond. “Sp” is selected from straight-chained alkyl or branched alkyl and a single bond. “P” comprises a polymerizable group.

Abstract: There are disclosed novel uses of aziridine compounds. The aziridine compounds can be formed into films by plasma deposition on a wide variety of substrates. The films prevent biofouling, impart biocompatible or antithrombotic properties, and can immobilize therapeutic and pharmaceutical agents to provide a drug delivery system.

Abstract: The purpose of the invention is a process for obtaining a material comprising a substrate at least part of whose surface and at least one of whose faces is based on organic compounds, the said process being implemented at atmospheric pressure and without heating the entire substrate. The said process comprises moreover the following stages: In the immediate vicinity of the said substrate a zone containing active species of a non-thermal plasma is created. Into the said zone is injected at least one precursor of a chemical element so as to deposit upon at least one face of the said substrate (at least part of whose surface comprises an organic compound base), a first thin layer capable of protecting the said substrate against oxidation reactions, specifically those due to radicals. A further purpose of the invention is the material obtainable according to this process.

Abstract: A method of forming a protective film that restrains gas adsorption while preserving durability and corrosion resistance of a plasma CVD carbon film is disclosed. A protective film of a slide-resistant member is deposited by means of a plasma CVD method using a raw material of hydrocarbon gas, wherein a bias voltage higher than ?500 V is applied to the slide-resistant member in an initial stage of depositing the protective film, and a bias voltage of ?500 V or lower is applied in a final stage of deposition. A proportion of time duration of the final stage is preferably at most 25% of the total time for depositing the protective film. A magnetic recording medium comprising a magnetic recording layer and a protective film formed by the method also is disclosed.

Abstract: A medical device comprising a substrate having a plasma polymerized functionality bonded to at least a portion of the substrate. A superoxide dismutase mimic agent having a complimentary functional group to the plasma polymerized functionality is bonded to the portion of the substrate by bonding to the plasma polymerized functionality.

Abstract: The invention relates to method of coating the surface of an inorganic substrate of glass, silicon dioxide, ceramics or carbon, which method comprises a step of cleaning the surface of the substrate by subjecting the surface to a reducing gas plasma, a step of activating the surface by generating radicals on the surface of the substrate by subjecting the surface to a reducing gas plasma and forming a first layer on the substrate surface using a plasma enhanced polymerization process employing one or more monomers comprising monomers with a sufficient low molecular weight for them to be in their gaseous state in the gas plasma, selected from the group consisting of C1-C16 alkanes, C2-C16 alkanes, C2-C16 alkynes, C2-C16 alkynes, styrene, aromatic monomers of styrene compounds, monomers of vinyl- and acrylate-compounds.

Abstract: Coatings for implantable medical devices, such as stents, and methods of coating the devices are disclosed. The method includes forming a coating by plasma polymerization of a monomer or a blend of monomers.

Abstract: The present invention discloses porous fuel cell electrode structures, assemblies, and systems having one or more conformal metallic layers selectively deposited on one or more pore surfaces, as well as to various methods relating thereto. In one embodiment, the present invention is directed to an electrode structure adapted for use with a fuel cell system (e.g., a hydrogen or a direct hydrocarbon fuel cell system), wherein the electrode structure comprises a substrate or support structure having one or more discrete porous bulk matrix regions disposed across a top surface of the substrate. In this embodiment, each of the one or more discrete porous bulk matrix regions is defined by a plurality of acicular pores that extend through the substrate or support structure. The plurality of acicular pores define inner pore surfaces, and the inner pore surfaces have a conformal electrically conductive layer thereon, as well as a plurality of catalyst particles.

Abstract: The present invention relates generally to a grafting process comprising the formation of a grafted polymeric structure having a substrate polymer in hybrid formation with one or more of the same or other polymers or monomeric subunits thereof. More particularly, the present invention contemplates a method of generating a homogenous or heterogenous grafted polymer by inducing or otherwise facilitating free radical formation to initiate polymerization of monomer units corresponding to the same or different polymers to a substrate polymer previously subjected to physical stress means. The resulting hybrid polymer may comprise a substrate polymer and a population of a second or further polymers in homogenous or heterogenous hybrid formation with the substrate polymer. A homogenous population includes a grafted population of the same polymer whereas a heterogenous population comprises a grafted population of two or more different polymers.

Abstract: An improved method for applying polymeric antireflective coatings to substrate surfaces and the resulting precursor structures are provided. Broadly, the methods comprise plasma enhanced chemical vapor depositing (PECVD) a polymer on the substrate surfaces. The most preferred starting monomers are 4-fluorostyrene, 2,3,4,5,6-pentafluorostyrene, and allylpentafluorobenzene. The PECVD processes comprise subjecting the monomers to sufficient electric current and pressure so as to cause the monomers to sublime to form a vapor which is then changed to the plasma state by application of an electric current. The vaporized monomers are subsequently polymerized onto a substrate surface in a deposition chamber. The inventive methods are useful for providing highly conformal antireflective coatings on large surface substrates having super submicron (0.25 ?m or smaller) features.

Abstract: A novel biosensor was accomplished using a plasma-polymerized membrane. The biosensor of the present invention is a high-performance biosensor produced by a simpler method and applicable to a wide range of fields.

Abstract: The substrates of the present invention comprise a polyimide base polymer derived at least in part from collinear monomers together with crankshaft monomers. The resulting polyimide material has been found to provide advantageous properties, particularly for electronics type applications.

Abstract: A film contains first and second metal or metal alloy layers separated by a crosslinked polymeric spacing layer whose thicknesses are such that the film is extensible visible light-transmissive and infrared reflective. The film can be joined or laminated into glazing (especially non-planar vehicular safety glazing) with reduced likelihood that the metal or metal alloy layers will be damaged or distorted.

Abstract: The application discloses methods of plasma treatment that employ an ion sheath in a capacitively-coupled system to increase the hydrophilicity of porous articles, including microporous articles having pore sizes of 0.05 to 1.5 micrometers, both on their surfaces and in their pores such that the articles' bulk wetting properties are improved.

Abstract: The present invention is to provide a method of enhancement of electrical conductivity for conductive polymer by use of field effect control, wherein on the substrate, whose surface was treated with a field, was coated by a containing monomer or oligomer solution of conductive polymer, through a field mechanism a monomer or oligomer of conductive polymer can demonstrate the sequential order molecular structure layer on the substrate, on this molecular structure layer was coated by an available amount of oxidant to proceed the polymerization, it was subjected to a field during polymerization to form 3-dimensional order stacking structure in order to increase the functional characteristic and electrical conductivity for conductive polymer.

Abstract: A method for making a polymer layer with a selected index of refraction. The method includes flash evaporating a polymer precursor material capable of cross linking into a polymer with the selected index of refraction, forming an evaporate, passing the evaporate to a glow discharge electrode creating a glow discharge polymer precursor plasma from the evaporate, and cryocondensing the glow discharge polymer precursor plasma on a substrate as a condensate and crosslinking the condensate thereon, the crosslinking resulting from radicals created in the glow discharge polymer precursor plasma, forming a polymer having the selected index of refraction.

Abstract: An apparatus and method that generates plasma using a microwave radiation supply. The plasma is used to treat a surface of a workpiece at approximately atmospheric pressure. Plasma excites a working gas to create an excited gaseous species without degradation from undue heat caused by the plasma. The gaseous species exit an outlet of the apparatus to treat the surface of a workpiece when the outlet is juxtaposed with the workpiece.

Abstract: The invention relates to method of coating the surface of an inorganic substrate of glass, silicon dioxide, ceramics or carbon, which method comprises a step of cleaning the surface of the substrate by subjecting the surface to a reducing gas plasma, a step of activating the surface by generating radicals on the surface of the substrate by subjecting the surface to a reducing gas plasma and forming a first layer on the substrate surface using a plasma enhanced polymerization process employing one or more monomers comprising monomers with a sufficient low molecular weight for them to be in their gaseous state in the gas plasma, selected from the group consisting of C1-C16 alkanes, C2-C16 alkanes, C2-C16 alkynes, C2-C16 alkynes, styrene, aromatic monomers of styrene compounds, monomers of vinyl- and acrylate-compounds.

Abstract: A medical device with a hydrophilic and lubricious coating, wherein the coating includes a hydrophilic polymeric unit layer deposited on the medical device and cross-linked with a plasma deposited double bond monomer. The hydrophilic polymeric unit can include ethylene oxide with one or more primary or secondary alcohol groups or glycosaminoglycans such as hyaluronic acid, and the double bond monomer includes monomers containing at least one double bond, preferably a C═C, C═N or C═O bond, including N-trimethylsilyl-allylamine, ethylene, propylene and allyl alcohol.

Abstract: An object of the present invention is to provide a manufacturing apparatus and method for a carbon nanotube, by which it is possible to efficiently synthesize a high purity carbon nanotube on an industrial basis.

Abstract: A capacitor is formed utilizing a plasma deposited capacitor dielectric wherein the plasma deposition is a two-component reaction comprising a silicon donor, which is non-carbon containing and non-oxygenated, and an organic precursor, which is non-silicon containing and non-oxygenated. The plasma deposition produces a capacitor dielectric that can exhibit a low dielectric constant and, in selected depositions, a response to photo-oxidation induced by exposure to radiated electromagnetic energy in the presence of oxygen. Photo-oxidation of selected depositions can be used to alter the dielectric constant of the capacitor dielectric after the capacitor has been fabricated. The capacitor may be used in precision filter applications.

Abstract: A process for creating plasma polymerized deposition on a substrate by a corona discharge is described. The corona discharge is created between an electrode and a counterelectrode supporting a substrate. A mixture of a balance gas and a working gas is flowed rapidly through the electrode, plasma polymerized by corona discharge, and deposited onto the substrate as an optically clear coating or to create surface modification. The process, which is preferably carried out at or near atmospheric pressure, can be designed to create an optically clear powder-free or virtually powder free deposit of polymerized plasma that provides a substrate with properties such as surface modification, chemical resistance, and barrier to gases.

Abstract: A method for conformally coating a microtextured surface. The method includes flash evaporating a polymer precursor forming an evaporate, passing the evaporate to a glow discharge electrode creating a glow discharge polymer precursor plasma from the evaporate, cryocondensing the glow discharge polymer precursor plasma on the microtextured surface and crosslinking the glow discharge polymer precursor plasma thereon, wherein the crosslinking resulting from radicals created in the glow discharge polymer precursor plasma.

Abstract: A method of plasma polymerisation of monomers for providing a cross-linked polymeric material, the method comprising: treating a monomer gas in a plasma, said monomer gas comprising one or more monomers selected from substituted benzenes, wherein said plasma is generated by a multiple phase AC supply or a DC supply at a plasma power density allowing a substantial portion of substituent groups of said substituted benzenes to be preserved.

Abstract: A method for preparing a carbonaceous complex struture including forming an adherent carbonaceous thin film on a smooth surface of a substrate and forming an adherent fullerine thin film on the thus formed carbonaceous thin film.

Abstract: A medical device comprising a substrate having a plasma polymerized functionally bonded to at least a portion of the substrate. A superoxide dismutase mimic agent having a complimentary functional group to the plasma polymerized functionality is bonded to the portion of the substrate by bonding to the plasma polymerized functionality.

Abstract: A method and apparatus for generating a plasma having a selected electron temperature, by: generating electrical power having components at at least two different frequencies; deriving electromagnetic energy at the at least two different frequencies from the generated electrical power and inductively coupling the derived electromagnetic energy into a region containing an ionizable gas to ionize the gas and create a plasma composed of the resulting ions; and selecting a power level for the electrical power component at each frequency in order to cause the plasma to have the selected electron temperature.

Abstract: The invention provides a method for single-step surface modification, grafting and sterilization for bio-active coating on materials and biomaterials used in medical devices, such as catheters, tissue engineering scaffolds, or drug delivery carrier materials. This may include any medical device or implantable that could benefit from improved antithrombogenic and biocompatible surfaces. Other relevant device examples may include heparin or urokinase coated stents to reduce clotting and restenosis, dental or ophthamological implants. These materials may be comprised of a variety of polymeric compositions such as, polyurethane, polyester, polytetrafluoroethylene, polyethylene, polymethylmethacrylate, polyHEMA, polyvinyl alcohol, polysiloxanes, polylactic or glycolic acids, polycaprolactone, etc. The substrates can also be metal, ceramics or biologically derived materials.

Abstract: A poled polymer material is formed on the surface of a substrate by poling a nonlinear optical reactant during a plasma polymerizing deposition of the reactant onto the surface. The substrate is fixed between the positive plasma-generating and ground electrodes in an air-evacuated chamber so that the substrate electrically floats relative to the electrodes. This arrangement permits the application of an electrostatic poling field to the depositing polymer material while the plasma excitation power is maintained. The electrostatic poling field is produced by the application of a dc voltage to poling electrodes that can be arranged in various configurations relative to the substrate.

Abstract: A selective wetting material is formed by plasma depositing a film on a substrate from a two-component reaction of a silicon donor and organic precursor, and photo-oxidizing selected regions of the deposited film to form wetting regions to which a liquid will selectively adhere. When the liquid is an electrically conductive material, the process may be used to form printed circuits on a circuit board. When the substrate is optically transparent and the non-photo-oxidized regions of the film are removed, the process may be used to form a photomask.

Abstract: The coating of substrates, particularly polymers and ceramic or metal substrate, for the production of a polar, polymeric coating is conducted by plasma polymerization. The process gas used for this purpose is free from water or water vapor and contains at least one organic compound, in addition to an inorganic gas and/or carbon monoxide and/or carbon dioxide and/or ammonium and/or nitrogen and/or another gas containing nitrogen.

Abstract: A hybrid film, comprising a first polymer film having a plasma-treated surface and a second polymer film having first and second surfaces, with the first surface of the second polymer film being disposed along the first plasma-treated surface of the first polymer film has superior thermal and mechanical properties that improve performance in a number of applications, including food packaging, thin film metallized and foil capacitors, metal evaporated magnetic tapes, flexible electrical cables, and decorative and optically variable films. One or more metal layers may be deposited on either the plasma-treated surface of the substrate and/or the radiation-cured acrylate polymer. A ceramic layer may be deposited on the radiation-cured acrylate polymer to provide an oxygen and moisture barrier film. The hybrid film is produced using a high speed, vacuum polymer deposition process that is capable of forming thin, uniform, high temperature, cross-linked acrylate polymers on specific thermoplastic or thermoset films.

Abstract: The present invention relates to a method of producing high-density polyidimide (HPI) films and its production equipment. The production equipment comprises a raw material supplying means, a vacuum cavity, an energy supplier, a clad laminator, and a baked solidified polymer. The foregoing components constitutes the production equipment, using the monomer with the CONH bond or copolymer as raw materials to extract the unsaturated C═N bond by heat, electrons, light, radiation rays or ions as energy under low-pressure environment, so that the H in vacuum can extract the non-solidified HPI film from the electronic radical covalent polymers and via heat or light to rearrange the structure into a solidified HPI film. By means of the method according to the present invention, the original HPI that is not easily to produce as a film can be easily made in form of a film of HPI polymer on the clad laminator.

Abstract: Coating an implantable device, such as micro electromechanical devices, is highly desirable to protect the implantable device from corrosion. A coating method includes depositing, preferably by plasma glow discharge, a reactant monomer on at least one surface of an implantable device, preferably at ambient temperature. The method will likely decrease the manufacturing time required for assembling such devices because completely assembled devices can be coated.

Abstract: The infusion set comprises of a connecting tube of polyethylene which is treated to form a wetable surface or treated with a primer and then bonded to a PVC hub by using solvent adhesive to solvent bond the low density polyethylene tubing or Teflon tubing to a PVC hub. The surface treatment methods include a methane plasma surface that is applied to tubing in a continuous manner and alternatively a primer that is applied locally and dried prior to applying the adhesive. Both techniques form a strong and resilient bond for the infusion needle and tube when assembled to the PVC hubs.

Abstract: A method for plasma enhanced chemical vapor deposition of low vapor monomeric materials. The method includes flash evaporating a polymer precursor forming an evaporate, passing the evaporate to a glow discharge electrode creating a glow discharge polymer precursor plasma from the evaporate, and cryocondensing the glow discharge polymer precursor on a substrate as a cryocondensed polymer precursor layer, and crosslinking the cryocondensed polymer precursor layer thereon, the crosslinking resulting from radicals created in the glow discharge polymer precursor plasma.

Abstract: A siloxan polymer insulation film has a dielectric constant of 3.3 or lower and has —SiR2O— repeating structural units. The siloxan polymer has dielectric constant, high thermal stability and high humidity-resistance on a semiconductor substrate. The siloxan polymer is formed by directly vaporizing a silicon-containing hydrocarbon compound expressed by the general formula Si&agr;O&bgr;CxHy (&agr;, &bgr;, x, and y are integers) and then introducing the vaporized compound to the reaction chamber of the plasma CVD apparatus. The residence time of the source gas is lengthened by reducing the total flow of the reaction gas, in such a way as to form a siloxan polymer film having a micropore porous structure with low dielectric constant.

Abstract: A method of modifying surfaces of a device, for example, a medical device, is disclosed. The method includes modifying a surface of a device by providing a device, exposing the device to a reactive gas and plasma energy to create a plasma deposited surface on the device, and quenching the device with the reactive gas. The device exhibits changes in its surface properties thereby making it more desirable for an intended use.

Abstract: A method for plasma enhanced chemical vapor deposition of low vapor pressure monomeric materials. The method includes making an evaporate by receiving a plurality of monomeric particles of the low vapor pressure monomeric materials as a spray into a flash evaporation housing, evaporating the spray on an evaporation surface, and discharging the evaporate through an evaporation outlet; making a monomer plasma from the evaporate by passing the evaporate proximate a glow discharge electrode; and cryocondensing the monomer plasma onto the substrate as a cryocondensed monomer. The invention also involves a method for making self-curing polymer layers in a vacuum chamber.