Abstract: The present invention provides a method for the formation of an organic coating on a substrate. The method includes: providing a substrate in a vacuum; providing at least one vaporized organic material comprising at least one component from at least one source, wherein the vaporized organic material is capable of condensing in a vacuum of less than about 130 Pa; providing a plasma from at least one source other than the source of the vaporized organic material; directing the vaporized organic material and the plasma toward the substrate; and causing the vaporized organic material to condense and polymerize on the substrate in the presence of the plasma to form an organic coating.

Abstract: A gas and radiation are used to produce a protective coating that is substantially void-free on the molecular scale, self-terminating, and degradation resistant. The process can be used to deposit very thin (≈5-20 Å) coatings on critical surfaces needing protection from degradative processes including, corrosion and contamination.

Abstract: The method of the present invention for conformally coating a microtextured surface has the steps of (a) flash evaporating a coating material monomer in an evaporate outlet forming an evaporate; (b) passing the evaporate to a glow discharge electrode creating a glow discharge monomer plasma from the evaporate; and (c) cryocondensing the glow discharge monomer plasma on the microtextured surface and crosslinking the glow discharge monomer plasma thereon, wherein the crosslinking results from radicals created in the glow discharge monomer plasma and achieves self curing.

Abstract: Disclosed herein is a process for producing a color filter substrate for picture device constructed by selectively arranging light-shielding members and a plurality of coloring members different in spectral characteristics from each other on a transparent base, which comprises the steps of forming a water-repellent layer composed of a silane coupling agent on the base on which the light-shielding members are partially formed, exposing the surface of the base to oxygen plasma, and arranging a plurality of the coloring members different in spectral characteristics from each other on transparent regions of the base.

Abstract: Generally, the apparatus of the present invention is (a) a flash evaporation housing with a monomer atomizer for making monomer particles, heated evaporation surface for making an evaporate from the monomer particles, and an evaporate outlet, connected to (b) a glow discharge electrode creating a glow discharge plasma from the evaporate, wherein (c) the substrate is proximate the glow discharge plasma for receiving and cryocondensing the glow discharge plasma thereon. The method of the present invention has the steps of (a) flash evaporating a liquid monomer an evaporate outlet forming an evaporate; (b) passing the evaporate to a glow discharge electrode creating a glow discharge monomer plasma from the evaporate; and (c) cryocondensing the glow discharge monomer plasma on a substrate and crosslinking the glow discharge plasma thereon, wherein the crosslinking results from radicals created in the glow discharge plasma and achieves self curing.

Abstract: Generally, the method of the present invention has the steps of (a) flash evaporating a liquid monomer forming an evaporate; (b) passing the evaporate to a glow discharge electrode creating a glow discharge monomer plasma from the evaporate; and (c) cryocondensing the glow discharge monomer plasma on a fixture and crosslinking the glow discharge plasma thereon, wherein the crosslinking results from radicals created in the glow discharge plasma and achieves self curing.

Abstract: A hybrid film, comprising a first polymer film having a plasma-treated surface and a second polymer film having first and second surfaces, with the first surface of the second polymer film being disposed along the first plasma-treated surface of the first polymer film, has superior thermal and mechanical properties that improve performance in a number of applications, including food packaging, thin film metallized and foil capacitors, metal evaporated magnetic tapes, flexible electrical cables, and decorative and optically variable films. One or more metal layers may be deposited on either the plasma-treated surface of the substrate and/or the radiation-cured acrylate polymer A ceramic layer may be deposited on the radiation-cured acrylate polymer to provide an oxygen and moisture barrier film. The hybrid film is produced using a high speed, vacuum polymer deposition process that is capable of forming thin, uniform, high temperature, cross-liked acrylate polymers on specific thermoplastic or thermoset films.

Abstract: The method of the present invention has the steps of (a) flash evaporating a conjugated material in an evaporate outlet forming an evaporate; (b) passing the evaporate to a glow discharge electrode creating a glow discharge conjugated monomer plasma from the evaporate; and (c) cryocondensing the glow discharge conjugated monomer plasma on a substrate and crosslinking the glow discharge conjugated monomer plasma thereon, wherein the crosslinking results from radicals created in the glow discharge conjugated monomer plasma and achieves self curing.

Abstract: The method of the present invention for making a polymer layer with a selected index of refraction has the steps of (a) flash evaporating a monomer material capable of cross linking into a polymer with the selected index of refraction, forming an evaporate; (b) passing the evaporate to a glow discharge electrode creating a glow discharge monomer plasma from the evaporate; and (c) cryocondensing the glow discharge monomer plasma on a substrate and crosslinking the glow discharge monomer plasma thereon, wherein the crosslinking results from radicals created in the glow discharge monomer plasma and achieves self curing and forms a polymer having the selected index of refraction.

Abstract: The present invention provides an optically clear, hydrophilic coating upon the surface of a silicone medical device by sequentially subjecting the surface of the lens to plasma polymerization reaction in a hydrocarbon atmosphere to form a carbon layer, and then graft polymerizinga mixture of monomers comprising hydrophilic monomers onto the carbon layer. The invention is especially useful for forming a biocompatible coating on silicone hydrogel contact lenses.

Abstract: A method for processing a substrate having an aluminum neodymium-containing layer is disclosed. The aluminum neodymium-containing layer has residual chlorine proximate to its etch surface. The method includes providing a first gas chemistry including HBr and SF6 which supplies a first plurality of fluorine ions, forming a first plasma from said first gas chemistry, passivating the etch surface of the aluminum neodymium-containing layer with the first plasma to cause a second plurality of fluorine ions to replace a first portion of the residual chlorine. This second plurality of fluorine ions is a subset of the first plurality of fluorine ions.

Abstract: This invention relates to an economical coating composition for porous substrates that provides extremely glossy surfaces, is capable of supporting holographic images, provides good oxygen barrier properties as well as good oil, grease, solvent and water resistance. Said coatings on paper substrates are printable, biodegradable, recyclable, and repulpable. They are also suitable for use in conjunction with food products. This invention also relates to a process for applying said coatings onto porous substrates as well as a process for the economical production of inexpensive holographic images on substrates such as paper and cardboard containers.

Abstract: The present invention relates to coated particles wherein the polymer chains of the coating are obtainable by after-glow plasma induced polymerization of a monomer under special plasma conditions. The invention further relates to a method for the production of articles coated with a polymer having these features.

Abstract: A method is presented for the vapor deposition of a material film upon a substrate. The method comprises the use of a Jet Vapor Deposition process with a vaporized polymer gas flowing at supersonic velocity. The vaporized polymer gas consists of a carrier gas and a vaporized polymer, such as Parylene. The vaporized polymer gas impinges upon the substrate through a port and forms the material film.

Abstract: This development is a method for accelerating thermoset resin cure and enhancing adhesions of coatings to thermoset articles comprising the steps of providing a thermoset article having at least one surface and corona treating the thermoset article to increase the surface energy thereof. The corona treating allows for painting in line with the pultrusion process for producing thermoset articles.

Abstract: Method for producing at least one organically-modified oxide, oxinitride or nitride layer by vacuum coating on a substrate through plasma-enhanced evaporation of evaporation material comprising nitride-forming evaporation material and one of oxide and suboxide evaporation material, wherein the at least one layer is deposited through plasma-enhanced, reactive high-rate evaporation of the evaporation material with use of gaseous monomers and a reactive gas including at least one of oxygen and nitrogen, and wherein the evaporation material, gaseous monomers, and reactive gas pass through a high-density plasma zone immediately in front of the substrate.

Abstract: Process for producing adhesion promoter layers on a material in web form, characterized in that the adhesion promoter layers are applied to the web-form material by means of low-pressure plasma polymerization, the material in web form being guided continuously through a plasma zone in which there is a low-pressure plasma which is generated by electrical discharge, especially kHz, MHz or GHz discharge.

Abstract: This invention relates to a method of promoting the adhesion of textiles to rubber compounds through a vinyl compound plasma pre-treatment procedure and a subsequent application of resorcinol-formaldehyde latex (RFL) to the textile surface. The inventive method encompasses a process through which free radicals of compounds comprising strong carbon--carbon bonds form a film over textile films and then covalently bonded to the resin component of the RFL. Such a method thus produces an extremely strong and versatile adhesive that facilitates adhesion between rubber compounds and heretofore unusable or difficult-to-use textiles. The resultant textile/rubber composites are utilized as reinforcements within such materials as automobile tires, fan belts, conveyor belts, and the like. Such materials and composites are also contemplated within this invention.

Abstract: The present invention is a non-ideal barrier coating composition and the method for applying the coating composition to substrates. The non-ideal barrier coating is useful for providing an effective barrier against gas permeability in containers and for extending shelf-life of containers, especially plastic evacuated blood collection devices.

Abstract: An apparatus for forming a film on a substrate includes a gas inlet and an insert attached to the gas inlet, the insert including a deposition source material such as lithium. To form the film on the substrate, the substrate is mounted in a vacuum chamber. After the vacuum chamber is pumped clown to a subatmospheric pressure, a first process gas such as argon is provided through the gas inlet and insert and into a plasma region proximate the substrate. Power is then coupled to generate a plasma inside of the insert which heats the insert and causes the deposition source material to vaporize. The deposition source material vapor is mixed with a plasma polymerizable material in the plasma region proximate the substrate causing a plasma enhanced chemical vapor deposition (PECVD) thin film such as silicon oxide including the deposition source material (e.g. lithium) to be deposited on the substrate.

Abstract: A process for applying a protective coating on the reflective layer of projector reflectors by means of plasma polymerization is provided, where a first protective layer which was applied on the reflective layer in a vacuum chamber by plasma polymerization of an organic silicon compound, is provided by means of a plasma in the same processing chamber, under uninterrupted vacuum conditions, with a second, hydrophilic layer substantially composed of a hydrocarbon skeleton and polar functional groups linked thereto, use is made of an apparatus which comprises a plurality of treatment stations (8, 9, 10) held by a fixed, circular cylindrical vacuum chamber wall (16) and a rotatable inner wall cylinder (17) which is enclosed by said vacuum chamber wall (16) and which holds four substrate chambers (12 through 15) and where the wall of the vacuum chamber (16) is provided with four openings (3 through 6) with which the substrate chambers (3 through 6) can be aligned and through which openings the treatment material c

Abstract: The present invention manifests a highly excellent effect of allowing the plasma polymerization film to be formed stably for a long time while very rarely suffering occurrence of abnormal discharge during the formation of the plasma polymerization film and promoting the improvement of the yield of products because it adopts as the electrode for implementing plasma polymerization that of the electrodes which is located on the side confronting a surface on which the plasma polymerization film is formed, coats this electrode with a polymer material at a covering ratio in the range of 50-100%, and effects the formation of the plasma polymerization film on an elongate substrate under the operating pressure in the range of 10.sup.-3 -1 Torr. Further, the properties of the plasma polymerization film also become highly excellent.

Abstract: A substrate structure having three-dimensional functional film network comprising a plurality of radio frequency discharge plasma film layers. The plasma film layers include a first layer, comprising a plurality of a first functional group, and a second layer, comprising a plurality of a second functional group. The employment of three-imensional film networks with desired functional groups located either on the periphery or both the periphery and interstitial spaces of the networks provides means for significantly increasing the surface functional density.

Abstract: A method and apparatus are disclosed for forming thin polymer layers on semiconductor substrates. In one embodiment, the method and apparatus include the sublimation of stable dimer parylene material, the pyrolytic conversion of such gaseous dimer material into reactive monomers, and for the optional blending of the resulting gaseous parylene monomers with one or more polymerizable materials in gaseous form capable of copolymerizing with the parylene monomers to form a low dielectric constant polymerized parylene material. An apparatus is also disclosed which provides for the distribution of the polymerizable gases into the deposition chamber, for cooling the substrate down to a temperature at which the gases will condense to form a polymerized dielectric material, for heating the walls of the deposition chamber to inhibit formation and accumulation of polymerized residues thereon, and for recapturing unreacted monomeric vapors exiting the deposition chamber.

Abstract: An electronic device fabrication apparatus a reaction chamber; a cathode electrode and an anode electrode opposed to each other in the reaction chamber; a gas introduction pipe introduced into the reaction chamber for supplying reaction gas into the reaction chamber, the gas introduction pipe being electrically connected to the cathode electrode; and a high frequency power generation device for applying high frequency lower having a high exciting frequency which is included in one of a VHF band and a UHF band to the cathode electrode through the gas introduction pipe for exciting the reaction gas into a plasma state. The gas introduction pipe includes an impedance adjusting device for adjusting an impedance of the gas introduction pipe.

Abstract: Amorphously crosslinked aromatic polymeric low .kappa. materials and methods for their fabrication are provided. The subject materials are prepared by a modified transport polymerization process, in which aromatic precursors are pyrolyzed to produce radical comprising aromatic monomeric precursors which are then allowed to polymerize by deposition onto a substrate surface, where during and/or after deposition the growing polymer chain is exposed to a high energy crosslinking agent, such as high energy photons or plasma. The subject crosslinked materials find use in a variety of applications, particularly as low .kappa. dielectrics in the manufacture of integrated circuits.

Abstract: The invention provides a method for vapor-depositing a polymer film having constituents that are synthesized during the deposition and that can therefore be customized by time-dependent process control during the deposition. In the vapor-deposition process, a hydrocarbon precursor is reacted with an oxygen-containing precursor in a plasma environment. The plasma reaction synthesizes O--H bonds and forms a polymer having O--H bonds, C--C bonds, and C--H.sub.x bonds. Preferably, the hydrocarbon and oxygen-containing precursors are employed in a ratio selected such that the resulting polymer film has a selected level of oxygen constituency providing a corresponding selected ratio of O--H bond concentration to C--H.sub.x bond concentration. The precursor ratio is preferably varied as a function of time during the plasma reaction to result in a corresponding distribution, e.g., a depth-dependent distribution, of O--H bonds in the film.

Abstract: This invention describes a new approach to three-dimensional molecular tailoring of surfaces. In this process, a plasma deposition step is initially employed to deposit reactive functional groups on the surface of a solid substrate. This is then followed by immersion of the coated substrate in a solution during which time solute molecules react with the functional surface groups introduced during the plasma process. Solute molecules are attached to the surface during this second step. This simple two-step process is of general utility in that both the nature of the plasma introduced surface group and the nature of the solute molecules can be varied. Additionally it is possible to provide exact control of the surface density of reactive groups introduced during the plasma process and thus the concentration of solute molecules coupled to the solid surfaces.

Abstract: The present invention provides a method for producing a a high-performance black matrix taking the palce of a Cr film black matrix and a high-performance color display thin film, which is comprises steps of vaporizing one or more organic pigments or vaporizing and exciting a metal or an alloy together with said organic pigments, and forming a thin film or a mixed composite thin film onto a substrate by the plasma exciting deposition.

Abstract: Improved porous materials useful in blotting analyses of proteinaceous and genomic matter are prepared by treating porous substrates with a gas plasma containing at least one monomer. Thus, a porous sheet-like substrate is modified by means of a deposit of a plasma polymerizate on at least one of its surfaces, whereby this modified surface exhibits reduced nonspecific binding of chemical probes in a blotting analysis. By means of a controlled deposition of the plasma polymer at a plasma composite parameter W/FM of less than 1.0.times.10.sup.9 Joules/kilogram, improved porous materials are obtained having increased signal-to-background ratios and enhanced sensitivities in genomic analyses.

Abstract: In a vapor phase apparatus such as a plasma chemical vapor deposition (CVD) having a pair of electrodes, a surface of one of the electrodes has an uneven shape (concave portion and convex portion). An interval between the electrodes is 10 mm or less. A density of a convex portion is increased in a center portion of the electrode. An aspect ratio of the uneven shape is increased from a peripheral portion of the electrode to a center portion of the electrode. The aspect ratio represents a ratio (b/a) of a pitch (a) and a height (b) of the convex portion.

Abstract: This invention relates to a new technique for preparing metal devices such as guidewires for the subsequent attachment of hydrophilic coatings. The invention also relates to guidewires and other devices made according to that method.In one embodiment of the method of this invention, a hydrocarbon residue undercoat is applied to a metal guidewire core by plasma deposition. A photoactive hydrophilic polymer is then deposited on the hydrocarbon residue coating and activated by ultraviolet light. The hydrocarbon residue coating acts as a tie layer between the hydrophilic polymer and the metal guidewire core apparently by providing C--C bonds for the covalent linking of the coating material to the tie layer. The resulting article of this invention is a guidewire having the maneuverability of a metal guidewire and the biocompatibility of a lubricious, hydrophilic polymer.

Abstract: A three-dimensional functional film network comprising a plurality of radio frequency discharge plasma film layers. The plasma film layers include a first layer, comprising a plurality of a first functional group, and a second layer, comprising a plurality of a second functional group. The employment of three-dimensional film networks with desired functional groups located either on the periphery or both the periphery and interstitial spaces of the networks provides means for significantly increasing the surface functional density.

Abstract: A method of creating a hollow sphere within a chamber including the steps of depositing a coating on a conductive fluid spherical mass at zero gravity, solidifying the coating, and removing the interior conductive fluid mass from the sphere to form a hollow sphere. In alternate embodiments the hollow sphere can be formed from, or coated with, a polymer.

Abstract: A method for producing at least a polymer surface layer on at least part of the inner surface of a hollow article that is at least partially of plastic, comprising coating said at least part of the inner surface of the hollow article by establishing a low pressure gas atmosphere within the hollow article, formin a polymerizable plasma within the article by excitation of the gas atmospher within the article by high-frequency electromagnetic energy, and allowing polymerization of the gas atmosphere to take place, whereby a polymerized coating is applied to said part of the inner surface, the gas atmospherre that forms the plasma containing a component that predominantly forms chains at sufficient speed and can be polymerized under the particular plasma conditions, and a component that forms predominantly branching or cross-linking points and can be polymerized under the particular plasma conditions.

Abstract: A static chuck and a workpiece push-up pin are disposed on a susceptor which is one of opposed electrodes generating plasma. The push-up pin and the susceptor are electrically connected. A grounding circuit which discharges electric charges remaining on the susceptor is disposed in parallel with an RF power supply circuit which supplies RF power to the susceptor. Thus, electric charges remaining in the power supply circuit can be discharged and an abnormal discharging between the push-up pin and the susceptor can be prevented.

Abstract: The invention relates to a method for providing a surface with carboxyl groups. A compound is applied to the surface with at least one functional group which can be converted into a carboxyl group. Thereafter, this surface is treated with a plasma to immobilize the compound, and then the functional group is converted into a carboxyl group. Also provided is a surface having carboxyl groups which is obtained with this method and a product with such a surface for exposure to blood, typically in vivo blood flows.

Abstract: Solid particles are coated in a fluidized bed by application of a gaseous coating agent from a plasma, wherein the plasma is generated outside the fluidized bed under 0.01-500 mbar, and the plasma-activated gas is passed into the fluidized bed, which is operated under 0.1-500 mbar, wherea. the plasma is generated from the total amount of gaseous coating agent with or without another gas, orb. the plasma is generated from a portion of the gaseous coating agent with or without another gas, and the remaining portion is introduced directly into the fluidized bed, orc. the plasma is generated from another gas, and the total amount of gaseous coating agent is introduced directly into the fluidized bed.

Abstract: A method of producing a plasma treated article in a tool having electrically isolated conductive members, wherein at least one of the members has a surface closely conforming to the surface of the article which is to be treated. The method includes the steps of placing the article between the members so as to create a relatively small bounded space between the article surface and the closely conforming member surface, drawing a vacuum in the bounded space, introducing a polymerizable gas into the bounded space and applying an electric field between the members to create a plasma in the bounded space to react with the article surface.

Abstract: The invention concerns an ultra thin polymer film electret comprising a polymer and a substrate having a surface electric charge, wherein a side chain of the polymer and the substrate are physically or chemically bonded. A method of manufacturing an ultra thin polymer film electret comprising: adsorbing a monomolecular film comprising a unsaturated group or a laminated film comprising the monomolecular film on to a substrate surface, irradiating the monomolecular film or the laminated film with an energy beam to polymerize the unsaturated groups and applying a high voltage to the film is also disclosed. Further, a method of manufacturing an ultra thin polymer film electret comprising: physically bonding a side chain of the polymer to a substrate surface to form a thin film and applying a high voltage to the thin film is also disclosed.

Abstract: The invention concerns a process for depositing a thin layer of silicon oxide bonded to a substrate of a polymeric material comprising, concomitantly or consecutively (1) subjecting a surface of the substrate to an electrical discharge with dielectric barrier and (2) exposing said surface of the substrate to an atmosphere containing a silane, thus forming a deposit of silicon oxide bonded to said surface of the substrate Application to the production of sheets or films useful for example as food wrapping.

Abstract: A method for pretreating the surface of a medical device, and of applying a biological coating in a further step, uses the plasma polymerization technique or the plasma grafting technique. A functional monomer, i.e. a monomer with a functional group, or a mixture of a pure monomer and a substance which can provide the required functional groups under spark discharge or under the influence of charge carriers, results in a polymer coating with free functional groups which may react with the biological coating to provide optimum adhesion of the biological coating. The process is carried out in a pressure-tight chamber with an inlet for the functional monomer under low pressure and electromagnetic radiation provided by a radiation source.

Abstract: The present invention discloses oriented optical epoxy compositions comprising a reaction product of arylhydrazones with a monomer copolymerizable therewith and to oriented crosslinked polymeric composition comprising the reaction product of an epoxy arylhydrazone or the epoxy composition of the invention with a curing agent. The present invention also discloses processes for making the said compositions.

Abstract: The invention concerns an ultra thin polymer film electret comprising a polymer and a substrate having a surface electric charge, wherein a side chain of the polymer and the substrate are physically or chemically bonded. A method of manufacturing an ultra thin polymer film electret comprising: adsorbing a monomolecular film comprising a unsaturated group or a laminated film comprising the monomolecular film on to a substrate surface, irradiating the monomolecular film or the laminated film with an energy beam to polymerize the unsaturated groups and applying a high voltage to the film is also disclosed. Further, a method of manufacturing an ultra thin polymer film electret comprising: physically bonding a side chain of the polymer to a substrate surface to form a thin film and applying a high voltage to the thin film is also disclosed.

Abstract: An improved CVD apparatus for depositing a uniform film is shown. The apparatus comprises a reaction chamber, a substrate holder and a plurality of light sources for photo CVD or a pair of electrodes for plasma CVD. The substrate holder is a cylindrical cart which is encircled by the light sources, and which is rotated around its axis by a driving device. With this configuration, the substrates mounted on the cart and the surroundings can be energized by light of plasma evenly throughout the surfaces to be coated.

Abstract: A process for forming a coating on a surface of a textile fiber, comprising subjecting the fiber surface to first and second process phases while passing the fiber through a reaction medium comprising a cold flowing plasma containing an active species, the first phase including treating the fiber surface in order to increase its adhesive properties, and the second phase including introducing a polymerizable material comprising at least one of a prepolymer and a monomer into the cold flowing plasma in the presence of the fiber under conditions sufficient to induce the formation of a polymerized coating on the fiber surface, polymerization being induced by the active species.

Abstract: A method is disclosed for the treatment of a powder by use of a plasma reactor under atmospheric pressure, comprising the steps of providing a reaction chamber having first and second electrodes covered with a dielectric, an upper gas exhaust means and a lower gas inlet means, feeding a fluidizing gas comprising a rare gas, a monomer gas or a mixture thereof through said gas inlet means into said chamber to agitate a powder to be treated in said chamber, concurrently removing said gas from said chamber through said gas exhaust means; and generating a glow plasma under atmospheric pressure in said chamber by applying a voltage to said first electrode and grounding said second electrode whereby said powder is provided with an anticorrosive surface treatment.

Abstract: Formed articles having improved surface properties, such as wettability, printability, adhesion, antistaticity and clouding resistance, consisting of a polymeric finished article or semi-finished article coated on at least a surface with a polyhydroxethylacrylate layer, preferably prepared by means of plasma polymerization.

Abstract: In a method to modify the chemistry of a portion of the surface of an article, the surface is placed adjacent an electrode in a plasma chamber, the distance to the wall of the chamber being at least five times the size of the electrode. A plasma of very high power density is generated in a discharge volume surrounding the electrode so that the surface area closest to the electrode receives a very intense plasma which diminishes with increasing distance from the discharge volume thus forming a chemical gradient on the article surface. The preferred article is a tube having one closed end, and the gradient may be formed from either the closed end or the open end. The gradient may be of decreasing glass-like character or decreasing plastic like character.

Abstract: This invention relates to the use of low temperature plasma technology for significantly improved corrosion protection of metals. The plasma process involves pretreatment of the surface of the metal with a gas plasma to remove oxygen, followed by plasma deposition of a thin polymeric film on the treated surface, followed by cathodic electrocoat application of a primer.