Including Diode Patents (Class 438/237)
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Patent number: 11664369Abstract: A semiconductor device includes a semiconductor layer, a first conductor disposed on the semiconductor layer, a second conductor disposed on the semiconductor layer so as to be separated from the first conductor, a relay portion that is formed on the semiconductor layer so as to straddle the first conductor and the second conductor and that is made of a semiconductor having a first conductivity type region and a second conductivity type region, a first contact by which the first conductivity type region and the second conductivity type region are electrically connected to the first conductor, and a second contact that electrically connects the first conductivity type region of the relay portion and the second conductor together and that is insulated from the second conductivity type region.Type: GrantFiled: March 29, 2019Date of Patent: May 30, 2023Assignee: ROHM CO., LTD.Inventor: Yusuke Kubo
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Patent number: 11532607Abstract: Electrostatic discharge (ESD) structures are provided. An ESD structure includes a semiconductor substrate, a first epitaxy region with a first type of conductivity over the semiconductor substrate, a second epitaxy region with a second type of conductivity over the semiconductor substrate, and a plurality of first semiconductor layers and a plurality of second semiconductor layers. The first semiconductor layers and the second semiconductor layers are alternatingly stacked over the semiconductor substrate and between the first and second epitaxy regions. Each of the first and second semiconductor layers has a first side contacting the first epitaxy region and a second side contacting the second epitaxy region, and the first side is opposite the second side.Type: GrantFiled: August 19, 2020Date of Patent: December 20, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chun-Chia Hsu, Tung-Heng Hsieh, Yung-Feng Chang, Bao-Ru Young, Jam-Wem Lee, Chih-Hung Wang
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Patent number: 11362267Abstract: A memory device includes a substrate, an etch stop layer, a protective layer, and a resistance switching element. The substrate has a memory region and a logic region, and includes a metallization pattern therein. The etch stop layer is over the substrate, and has a first portion over the memory region and a second portion over the logic region. The protective layer covers the first portion of the etch stop layer. The protective layer does not cover the second portion of the etch stop layer. The resistance switching element is over the memory region, and the resistance switching element is electrically connected to the metallization pattern through the etch stop layer and the protective layer.Type: GrantFiled: December 19, 2019Date of Patent: June 14, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hsin-Hsiang Tseng, Chih-Lin Wang, Yi-Huang Wu
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Patent number: 11251282Abstract: In order to provide a power semiconductor device reducing a leakage current due to a defect layer and having a small fluctuation in a threshold voltage, included are an n-type epitaxial film layer formed on a surface of the single crystal n-type semiconductor substrate and having a concave portion and a convex portion; an insulating film formed on a first region in a top portion of the convex portion; a p-type thin film layer formed on a surface of the insulating film and a surface of the n-type epitaxial film layer to form a pn junction between the p-type thin film layer and the n-type epitaxial film layer; and an anode electrode, at least part of which is formed on a surface of the p-type thin film layer and part of which passes through the p-type thin film layer and the insulating film.Type: GrantFiled: December 18, 2018Date of Patent: February 15, 2022Assignee: MITSUBISHI ELECTRIC CORPORATIONInventors: Tatsuro Watahiki, Yohei Yuda
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Patent number: 11211120Abstract: Various embodiments of the present application are directed towards an integrated chip. The integrated chip includes an array overlying a substrate and including multiple memory stacks in a plurality of rows and a plurality of columns. Each of the memory stacks includes a data storage structure having a variable resistance. A plurality of word lines are disposed beneath the array and extend along corresponding rows of the array. The word lines are electrically coupled with memory stacks of the array in the corresponding rows. A plurality of upper conductive vias extend from above the array of memory stacks to contact top surfaces of corresponding word lines.Type: GrantFiled: March 17, 2020Date of Patent: December 28, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chang-Chih Huang, Jui-Yu Pan, Kuo-Chyuan Tzeng
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Patent number: 11201088Abstract: A method for forming a semiconductor device includes providing a substrate, forming an oxide layer over the substrate, forming a plurality of first gate oxide layers by etching the oxide layer, forming a second gate oxide layer between adjacent first gate oxide layers, forming a silicon layer over the plurality of first gate oxide layers and the second gate oxide layer, and etching the plurality of first gate oxide layers, the silicon layer, and the second gate oxide layer to expose the substrate, thereby forming a plurality of gate structures. The first gate oxide layer of the plurality of first gate oxide layers has sloped sidewalls. A thickness of the second gate oxide layer is less than a thickness of the first gate oxide layer. Each gate structure includes an etched first oxide layer, a portion of the second gate oxide layer, and a portion of the silicon layer.Type: GrantFiled: July 16, 2020Date of Patent: December 14, 2021Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) CorporationInventors: Hu Wang, Shan Shan Wang, Feng Qiu, Wei Hu Zhang
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Patent number: 10461125Abstract: In an example, a memory array may include a plurality of first dielectric materials and a plurality of stacks, where each respective first dielectric material and each respective stack alternate, and where each respective stack comprises a first conductive material and a storage material. A second conductive material may pass through the plurality of first dielectric materials and the plurality of stacks. Each respective stack may further include a second dielectric material between the first conductive material and the second conductive material.Type: GrantFiled: August 29, 2017Date of Patent: October 29, 2019Assignee: Micron Technology, Inc.Inventors: Agostino Pirovano, Andrea Redaelli, Fabio Pellizzer, Innocenzo Tortorelli
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Patent number: 10211332Abstract: A semiconductor device including a field-effect transistor having source and drain source regions, first and second gate electrodes and a protective diode connected to the transistor. The first gate electrode is formed over a first gate insulating film in a lower part of a trench. The second gate electrode is formed over a second gate insulating film in an upper part of the trench. The first gate electrode includes a first polysilicon film, and the second gate electrode includes a second polysilicon film, wherein an impurity concentration of the first polysilicon film is lower than an impurity concentration of the second polysilicon film.Type: GrantFiled: December 1, 2017Date of Patent: February 19, 2019Assignee: Renesas Electronics CorporationInventors: Yoshito Nakazawa, Yuji Yatsuda
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Patent number: 9735142Abstract: With a microwave FET, an incorporated Schottky junction capacitance or PN junction capacitance is small and such a junction is weak against static electricity. However, with a microwave device, the method of connecting a protecting diode cannot be used since this method increases the parasitic capacitance and causes degradation of the high-frequency characteristics. In order to solve the above problems, a protecting element, having a first n+-type region—insulating region—second n+-type region arrangement is connected in parallel between two terminals of a protected element having a PN junction, Schottky junction, or capacitor. Since discharge can be performed between the first and second n+ regions that are adjacent each other, electrostatic energy that would reach the operating region of an FET can be attenuated without increasing the parasitic capacitance.Type: GrantFiled: April 15, 2014Date of Patent: August 15, 2017Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Tetsuro Asano, Mikito Sakakibara, Toshikazu Hirai
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Patent number: 9671363Abstract: A chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A material defines an opening extending to the upper surface of the floating gate conductor, the material comprising a first dielectric underlying a second dielectric. A conductive element contacts the upper surface of the floating gate conductor and extending a distance along a sidewall of the opening.Type: GrantFiled: November 12, 2015Date of Patent: June 6, 2017Assignee: Life Technologies CorporationInventors: Keith G. Fife, Jordan Owens, Shifeng Li, James Bustillo
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Patent number: 9281185Abstract: Methods for passivating a nanotube fabric layer within a nanotube switching device to prevent or otherwise limit the encroachment of an adjacent material layer are disclosed. In some embodiments, a sacrificial material is implanted within a porous nanotube fabric layer to fill in the voids within the porous nanotube fabric layer while one or more other material layers are applied adjacent to the nanotube fabric layer. Once the other material layers are in place, the sacrificial material is removed. In other embodiments, a non-sacrificial filler material (selected and deposited in such a way as to not impair the switching function of the nanotube fabric layer) is used to form a barrier layer within a nanotube fabric layer. In other embodiments, individual nanotube elements are combined with and nanoscopic particles to limit the porosity of a nanotube fabric layer.Type: GrantFiled: November 7, 2014Date of Patent: March 8, 2016Assignee: Nantero Inc.Inventors: Thomas Rueckes, H. Montgomery Manning, Rahul Sen
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Patent number: 9236450Abstract: Fabricating a semiconductor device includes: forming a gate trench in an epitaxial layer overlaying a semiconductor substrate; depositing gate material in the gate trench; forming a body; forming a source; forming an active region contact trench that extends through the source and the body into a drain; forming a Schottky barrier controlling layer in the epitaxial layer in bottom region of the active region contact trench; and disposing a contact electrode within the active region contact trench. The Schottky barrier controlling layer controls Schottky barrier height of a Schottky diode formed by the contact electrode and the drain.Type: GrantFiled: June 10, 2014Date of Patent: January 12, 2016Assignee: Alpha and Omega Semiconductor LimitedInventors: Anup Bhalla, Xiaobin Wang, Ji Pan, Sung-Po Wei
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Patent number: 9224852Abstract: A corner layout for a semiconductor device that maximizes the breakdown voltage is disclosed. The device includes first and second subsets of the striped cell arrays. The ends of each striped cell in the first array is spaced a uniform distance from the nearest termination device structure. In the second subset, the ends of striped cells proximate a corner of the active cell region are configured to maximize breakdown voltage by spacing the ends of each striped cell a non-uniform distance from the nearest termination device structure. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: GrantFiled: July 30, 2012Date of Patent: December 29, 2015Assignee: Alpha and Omega Semiconductor IncorporatedInventors: Lingpeng Guan, Anup Bhalla
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Patent number: 9209225Abstract: A cell structure of a non-volatile memory is provided. The cell structure includes a first metal layer, a first dielectric layer, a first material layer, a second material layer, a first transition layer, a second metal layer, a second dielectric layer, a third material layer, a fourth material layer, a second transition layer, and a third metal layer. The first dielectric layer has a first via, and the first metal layer is exposed through the first via. The first material layer and the second material layer are reacted with each other to form the first transition layer. The second dielectric layer has a second via, and the second metal layer is exposed through the second via. The third material layer and the fourth material layer are reacted with each other to form the second transition layer.Type: GrantFiled: July 7, 2014Date of Patent: December 8, 2015Inventor: Chrong-Jung Lin
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Patent number: 9153570Abstract: An electrostatic discharge tolerant device includes a semiconductor body having a first conductivity type, and a pad. A surrounding well having a second conductivity type is laid out in a ring to surround an area for an electrostatic discharge circuit in the semiconductor body. The surrounding well is relatively deep, and in addition to defining the area for the electrostatic discharge circuit, provides the first terminal of a diode formed with the semiconductor body. Within the area surrounded by the surrounding well, a diode coupled to the pad and a transistor coupled to the voltage reference are connected in series and form a parasitic device in the semiconductor body.Type: GrantFiled: February 25, 2010Date of Patent: October 6, 2015Assignee: Macronix International Co., Ltd.Inventors: Shih-Yu Wang, Chia-Ling Lu, Yan-Yu Chen, Yu-Lien Liu, Tao-Cheng Lu
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Patent number: 9136833Abstract: There is provided a power source connection circuit, when a switch having a low dielectric strength is employed, capable of preventing excessive power consumption when the switch between an input terminal and an output terminal is turned off, and also discharging electric charges accumulated in a gate of the switch. A power source connection circuit includes a MOS switch connected to an output terminal; a step-up circuit for supplying electric charges to a gate of the MOS switch; an electric-charge discharging unit coupled between the gate and a ground terminal; and a comparator for comparing a voltage of the output terminal with a reference voltage, wherein the electric-charge discharging unit includes a rectifier unit coupled between the gate and the ground terminal, and a switch coupled in series with the rectifier unit between the gate and the ground terminal to receive an output signal of the comparator at a gate.Type: GrantFiled: February 22, 2013Date of Patent: September 15, 2015Assignee: Asahi Kasei Microdevices CorporationInventor: Naoto Hayasaka
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Patent number: 9130163Abstract: A method of forming a phase change material memory cell includes forming a number of memory structure regions, wherein the memory structure regions include a bottom electrode material and a sacrificial material, forming a number of insulator regions between the number of memory structure regions, forming a number of openings between the number of insulator regions and forming a contoured surface on the number of insulator regions by removing the sacrificial material and a portion of the number of insulator regions, forming a number of dielectric spacers on the number of insulator regions, forming a contoured opening between the number of insulator regions and exposing the bottom electrode material by removing a portion of the number of dielectric spacers, and forming a phase change material in the opening between the number of insulator regions.Type: GrantFiled: October 10, 2013Date of Patent: September 8, 2015Assignee: Micron Technology, Inc.Inventor: Sanh D. Tang
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Patent number: 9082896Abstract: A pixel of an image sensor, the pixel includes a floating diffusion node to sense photo-generated charge, a reset diode to reset the floating diffusion node in response to a reset signal, and a set diode to set the floating diffusion node.Type: GrantFiled: January 9, 2013Date of Patent: July 14, 2015Assignee: Intellectual Ventures II LLCInventor: Jaroslav Hynecek
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Patent number: 9077920Abstract: A solid-state image pickup device includes a pixel array section including an effective pixel region, an optical black pixel region, and a pixel region between the effective pixel region and the optical black pixel region; a vertical drive section which performs driving so that signals of pixels of the pixel region disposed at a side of the effective pixel region in a vertical direction are skipped and signals of pixels of the effective pixel region and the optical black pixel region are read; and a horizontal drive section which performs driving so that, from among the pixels selected by the vertical drive section, the signals of the pixels of the pixel region disposed at a side of the effective pixel region in a horizontal direction are skipped and the signals of the pixels of the effective pixel region and the optical black pixel region are read.Type: GrantFiled: April 19, 2012Date of Patent: July 7, 2015Assignee: Sony CorporationInventors: Ryoji Suzuki, Takayuki Toyama, Koji Mishina, Hiroyuki Tsuchiya
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Layout method of semiconductor device with junction diode for preventing damage due to plasma charge
Patent number: 9053936Abstract: A method for forming a unit layout pattern includes: forming first through third active regions in the unit layout pattern, each of the first through third active regions aligning and extending along a length in a first direction and having a width in a second direction perpendicular to the first direction; forming first and second gate regions on the first and second active regions, the first and second gate regions electrically connected to each other; forming the first active region of a first conductive type within a second conductive type well region; forming the second active region of a second conductive type; and forming the third active region connected with the first and second gate regions to form a junction diode, the third active region being located between the first or the second active region and an end of the length in the first direction of the unit pattern.Type: GrantFiled: September 13, 2012Date of Patent: June 9, 2015Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Soo-Young Kim, Jong-Hak Won -
Publication number: 20150147855Abstract: A semiconductor device includes: first and second n-type wells formed in p-type semiconductor substrate, the second n-type well being deeper than the first n-type well; first and second p-type backgate regions formed in the first and second n-type wells; first and second n-type source regions formed in the first and second p-type backgate regions; first and second n-type drain regions formed in the first and second n-type wells, at positions opposed to the first and second n-type source regions, sandwiching the first and the second p-type backgate regions; and field insulation films formed on the substrate, at positions between the first and second p-type backgate regions and the first and second n-type drain regions; whereby first transistor is formed in the first n-type well, and second transistor is formed in the second n-type well with a higher reverse voltage durability than the first transistor.Type: ApplicationFiled: February 5, 2015Publication date: May 28, 2015Inventor: Kazuhiko Takada
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Publication number: 20150137135Abstract: An embodiment of a semiconductor device includes a semiconductor substrate that includes an upper surface and a channel, a gate electrode disposed over the substrate electrically coupled to the channel, and a Schottky metal layer disposed over the substrate adjacent the gate electrode. The Schottky metal layer includes a Schottky contact electrically coupled to the channel which provides a Schottky junction and at least one alignment mark disposed over the semiconductor substrate. A method for fabricating the semiconductor device includes creating an isolation region that defines an active region along an upper surface of a semiconductor substrate, forming a gate electrode over the semiconductor substrate in the active region, and forming a Schottky metal layer over the semiconductor substrate. Forming the Schottky metal layer includes forming at least one Schottky contact electrically coupled to the channel and providing a Schottky junction, and forming an alignment mark in the isolation region.Type: ApplicationFiled: November 19, 2013Publication date: May 21, 2015Inventors: BRUCE M. GREEN, DARRELL G. HILL, KAREN E. MOORE
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Patent number: 9029235Abstract: A trench isolation metal-oxide-semiconductor (MOS) P-N junction diode device and a manufacturing method thereof are provided. The trench isolation MOS P-N junction diode device is a combination of an N-channel MOS structure and a lateral P-N junction diode, wherein a polysilicon-filled trench oxide layer is buried in the P-type structure to replace the majority of the P-type structure. As a consequence, the trench isolation MOS P-N junction diode device of the present invention has the benefits of the Schottky diode and the P-N junction diode. That is, the trench isolation MOS P-N junction diode device has rapid switching speed, low forward voltage drop, low reverse leakage current and short reverse recovery time.Type: GrantFiled: May 26, 2014Date of Patent: May 12, 2015Assignee: PFC Device Corp.Inventors: Mei-Ling Chen, Hung-Hsin Kuo, Kuo-Liang Chao
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Publication number: 20150115351Abstract: An integrated circuit includes a power component including a plurality of first trenches in a cell array and a first conductive material in the first trenches electrically coupled to a gate terminal of the power component, and a diode component including a first diode device trench and a second diode device trench disposed adjacent to each other. A second conductive material in the first and the second diode device trenches is electrically coupled to a source terminal of the diode component. The first trenches, the first diode device trench and the second diode device trench are disposed in a first main surface of a semiconductor substrate. The integrated circuit further includes a diode gate contact including a connection structure between the first and the second diode device trenches. The connection structure is in contact with the second conductive material in the first and the second diode device trenches.Type: ApplicationFiled: October 30, 2013Publication date: April 30, 2015Inventor: Britta Wutte
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Patent number: 9012997Abstract: A semiconductor device includes a semiconductor-on-insulator (SOI) substrate having a bulk substrate layer, an active semiconductor layer and a buried insulator layer disposed between the bulk substrate layer and the active semiconductor layer. A trench is formed through the SOI substrate to expose the bulk substrate layer. A doped well is formed in an upper region of the bulk substrate layer adjacent trench. The semiconductor device further includes a first doped region different from the doped well that is formed in the trench.Type: GrantFiled: October 26, 2012Date of Patent: April 21, 2015Assignee: International Business Machines CorporationInventors: Tenko Yamashita, Terence B. Hook, Veeraraghavan S. Basker, Chun-Chen Yeh
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Publication number: 20150087122Abstract: Provided is a semiconductor device that can be manufactured at low cost and that can reduce a reverse leak current, and a manufacturing method thereof. A semiconductor device has: a source region and a drain region having a body region therebetween; a source trench that reaches the body region, penetrating the source region; a body contact region formed at the bottom of the source trench; a source electrode embedded in the source trench; and a gate electrode that faces the body region. The semiconductor device also has: an n-type region for a diode; a diode trench formed reaching the n-type region for a diode; a p+ region for a diode that forms a pn junction with the n-type region for a diode at the bottom of the diode trench; and a schottky electrode that forms a schottky junction with the n-type region for a diode at side walls of the diode trench.Type: ApplicationFiled: December 4, 2014Publication date: March 26, 2015Applicant: ROHM CO., LTD.Inventor: Kenichi YOSHIMOCHI
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Publication number: 20150084119Abstract: A semiconductor device includes a vertical field-effect-transistor (FET) and a bypass diode. The vertical FET device includes a substrate, a drift layer formed over the substrate, a gate contact and a plurality of source contacts located on a first surface of the drift layer opposite the substrate, a drain contact located on a surface of the substrate opposite the drift layer, and a plurality of junction implants, each of the plurality of junction implants laterally separated from one another on the surface of the drift layer opposite the substrate and extending downward toward the substrate. Each of the one or more bypass diodes are formed by placing a Schottky metal contact on the first surface of the drift layer, such that each Schottky metal contact runs between two of the plurality of junction implants.Type: ApplicationFiled: September 20, 2013Publication date: March 26, 2015Applicant: Cree, Inc.Inventors: Vipindas Pala, Edward Robert Van Brunt, Lin Cheng, John Williams Palmour
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Publication number: 20150084118Abstract: A semiconductor device includes a vertical FET device and a Schottky bypass diode. The vertical FET device includes a gate contact, a source contact, and a drain contact. The gate contact and the source contact are separated from the drain contact by at least a drift layer. The Schottky bypass diode is coupled between the source contact and the drain contact and monolithically integrated adjacent to the vertical FET device such that a voltage placed between the source contact and the drain contact is distributed throughout the drift layer by the Schottky bypass diode in such a way that a voltage across each one of a plurality of P-N junctions formed between the source contact and the drain contact within the vertical FET device is prevented from exceeding a barrier voltage of the respective P-N junction.Type: ApplicationFiled: September 20, 2013Publication date: March 26, 2015Applicant: Cree, Inc.Inventors: Edward Robert Van Brunt, Vipindas Pala, Lin Cheng
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Publication number: 20150084059Abstract: A semiconductor device according to an embodiment includes a first GaN based semiconductor layer of a first conductive type, a second GaN based semiconductor layer of the first conductive type provided above the first GaN based semiconductor layer, a third GaN based semiconductor layer of a second conductive type provided above a part of the second GaN based semiconductor layer, a epitaxially grown fourth GaN based semiconductor layer of the first conductive type provided above the third GaN based semiconductor layer, a gate insulating film provided on the second, third, and fourth GaN based semiconductor layer, a gate electrode provided on the gate insulating film, a first electrode provided on the fourth GaN based semiconductor layer, a second electrode provided at the side of the first GaN based semiconductor layer opposite to the second GaN based semiconductor layer, and a third electrode provided on the second GaN based semiconductor layer.Type: ApplicationFiled: August 6, 2014Publication date: March 26, 2015Applicant: Kabushiki Kaisha ToshibaInventors: Miki YUMOTO, Masahiko Kuraguchi
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Patent number: 8975123Abstract: Device structures, fabrication methods, and design structures for tunnel field-effect transistors. A drain comprised of a first semiconductor material having a first band gap and a source comprised of a second semiconductor material having a second band gap are formed. A tunnel barrier is formed between the source and the drain. The second semiconductor material exhibits a broken-gap energy band alignment with the first semiconductor material. The tunnel barrier is comprised of a third semiconductor material with a third band gap larger than the first band gap and larger than the second band gap. The third band gap is configured to bend under an external bias to assist in aligning a first energy band of the first semiconductor material with a second energy band of the second semiconductor material.Type: GrantFiled: July 9, 2013Date of Patent: March 10, 2015Assignee: International Business Machines CorporationInventors: Douglas M. Daley, Hung H. Tran, Wayne H. Woods, Ze Zhang
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Patent number: 8969150Abstract: A trench gate type MISFET and a diode are formed in a semiconductor substrate. First and second trenches are formed in the semiconductor substrate. A gate electrode is formed in the first trench through a gate insulating film. A dummy gate electrode is formed in the second trench through a dummy gate insulating film. A cathode n+-type semiconductor region and an anode p-type semiconductor region are formed in the semiconductor substrate and the second trench is formed so as to surround the n+-type semiconductor region in a planar view. A part of the anode p-type semiconductor region is formed directly below the n+-type semiconductor region, so that a PN junction is formed between the part of the anode p-type semiconductor region and the n+-type semiconductor region. Thereby a diode is formed. The dummy gate electrode is electrically coupled to one of an anode and a cathode.Type: GrantFiled: July 7, 2014Date of Patent: March 3, 2015Assignee: Renesas Electronics CorporationInventors: Hiroaki Katou, Taro Moriya, Hiroyoshi Kudou, Satoshi Uchiya
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Publication number: 20150035006Abstract: A semiconductor device includes a first-conductivity-type semiconductor layer including an active region in which a transistor having impurity regions is formed and a marginal region surrounding the active region, a second-conductivity-type channel layer formed between the active region and the marginal region and forming a front surface of the semiconductor layer, at least one gate trench formed in the active region to extend from the front surface of the semiconductor layer through the channel layer, a gate insulation film formed on an inner surface of the gate trench, a gate electrode formed inside the gate insulation film in the gate trench, and at least one isolation trench arranged between the active region and the marginal region to surround the active region and extending from the front surface of the semiconductor layer through the channel layer, the isolation trench having a depth equal to that of the gate trench.Type: ApplicationFiled: October 17, 2014Publication date: February 5, 2015Inventor: Kenichi YOSHIMOCHI
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Patent number: 8947936Abstract: A 3D memory device includes a plurality of ridge-shaped stacks, in the form of multiple strips of conductive material separated by insulating material, arranged as strings which can be coupled through decoding circuits to sense amplifiers. Diodes are connected to the bit line structures at either the string select of common source select ends of the strings. The strips of conductive material have side surfaces on the sides of the ridge-shaped stacks. A plurality of conductive lines arranged as word lines which can be coupled to row decoders, extends orthogonally over the plurality of ridge-shaped stacks. Memory elements lie in a multi-layer array of interface regions at cross-points between side surfaces of the conductive strips on the stacks and the conductive lines.Type: GrantFiled: January 28, 2014Date of Patent: February 3, 2015Assignee: Macronix International Co., Ltd.Inventors: Chun-Hsiung Hung, Shin-Jang Shen, Hang-Ting Lue
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Patent number: 8946018Abstract: Some embodiments include methods of forming semiconductor constructions. A heavily-doped region is formed within a first semiconductor material, and a second semiconductor material is epitaxially grown over the first semiconductor material. The second semiconductor material is patterned to form circuit components, and the heavily-doped region is patterned to form spaced-apart buried lines electrically coupling pluralities of the circuit components to one another. At least some of the patterning of the heavily-doped region occurs simultaneously with at least some of the patterning of the second semiconductor material.Type: GrantFiled: August 21, 2012Date of Patent: February 3, 2015Assignee: Micron Technology, Inc.Inventors: Jaydip Guha, Shyam Surthi
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Publication number: 20150021680Abstract: A FET incorporating a Schottky diode has a structure allowing the ratio of an area in which the Schottky diode is formed and an area in which the FET is formed to be freely adjusted. A trench extending for a long distance is utilized. Schottky electrodes are interposed at positions appearing intermittently in the longitudinal direction of the trench. By taking advantage of the growth rate of a thermal oxide film formed on SiC being slower, and the growth rate of a thermal oxide film formed on polysilicon being faster, a structure can be obtained in which insulating film is formed between gate electrodes and Schottky electrodes, between the gate electrodes and a source region, between the gate electrodes and a body region, and between the gate electrodes and a drain region, and in which insulating film is not formed between the Schottky electrodes and the drain region.Type: ApplicationFiled: June 9, 2014Publication date: January 22, 2015Inventors: Yukihiko WATANABE, Sachiko AOI, Hidefumi TAKAYA, Atsuya AKIBA
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Publication number: 20150014769Abstract: A high-voltage LDMOS device with voltage linearizing field plates and methods of manufacture are disclosed. The method includes forming a continuous gate structure over a deep well region and a body of a substrate. The method further includes forming oppositely doped, alternating segments in the continuous gate structure. The method further includes forming a contact in electrical connection with a tip of the continuous gate structure and a drain region formed in the substrate. The method further includes forming metal regions in direct electrical contact with segments of at least one species of the oppositely doped, alternating segments.Type: ApplicationFiled: July 11, 2013Publication date: January 15, 2015Inventors: John J. ELLIS-MONAGHAN, Theodore J. LETAVIC, Santosh SHARMA, Yun SHI, Michael J. ZIERAK
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Patent number: 8928072Abstract: Provided is a semiconductor device that can be manufactured at low cost and that can reduce a reverse leak current, and a manufacturing method thereof. A semiconductor device has: a source region and a drain region having a body region therebetween; a source trench that reaches the body region, penetrating the source region; a body contact region formed at the bottom of the source trench; a source electrode embedded in the source trench; and a gate electrode that faces the body region. The semiconductor device also has: an n-type region for a diode; a diode trench formed reaching the n-type region for a diode; a p+ region for a diode that forms a pn junction with the n-type region for a diode at the bottom of the diode trench; and a schottky electrode that forms a schottky junction with the n-type region for a diode at side walls of the diode trench.Type: GrantFiled: May 3, 2013Date of Patent: January 6, 2015Assignee: Rohm Co., Ltd.Inventor: Kenichi Yoshimochi
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Publication number: 20150001579Abstract: A capacitive component region is formed below a temperature detecting diode or below a protective diode. In addition, the capacitive component region is formed below an anode metal wiring line connecting the temperature detecting diode and an anode electrode pad and below a cathode metal wiring line connecting the temperature detecting diode and a cathode electrode pad. The capacitive component region is an insulating film interposed between polysilicon layers. Specifically, a first insulating film, a polysilicon conductive layer, and a second insulating film are sequentially formed on a first main surface of a semiconductor substrate, and the temperature detecting diode, the protective diode, the anode metal wiring line, or the cathode metal wiring line is formed on the upper surface of the second insulating film. Therefore, it is possible to improve the static electricity resistance of the temperature detecting diode or the protective diode.Type: ApplicationFiled: September 12, 2014Publication date: January 1, 2015Applicant: FUJI ELECTRIC CO., LTD.Inventor: Takeyoshi NISHIMURA
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Publication number: 20140374766Abstract: A semiconductor device includes a bidirectional GaN FET formed on a non-insulating substrate. The semiconductor device further includes a first electrical clamp connected between the substrate and a first source/drain node of the bidirectional GaN FET, and a second electrical clamp connected between the substrate and a second source/drain node of the bidirectional GaN FET. The first clamp and the second clamp are configured to bias the substrate at a lower voltage level of an applied bias to the first source/drain node and an applied bias to the second source/drain node, within an offset voltage of the relevant clamp.Type: ApplicationFiled: June 20, 2013Publication date: December 25, 2014Inventors: Sandeep R. BAHL, Matthew SENESKY, Naveen TIPIRNENI, David I. ANDERSON, Sameer PENDHARKAR
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Publication number: 20140374824Abstract: Aspects of the present disclosure describe a Schottky structure with two trenches formed in a semiconductor material. The trenches are spaced apart from each other by a mesa. Each trench may have first and second conductive portions lining the first and second sidewalls. The first and second portions of conductive material are electrically isolated from each other in each trench. The Schottky contact may be formed at any location between the outermost conductive portions. The Schottky structure may be formed in the active area or the termination area of a device die. It is emphasized that this abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: ApplicationFiled: June 25, 2013Publication date: December 25, 2014Inventors: Daniel Calafut, Yeeheng Lee
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Patent number: 8907393Abstract: A semiconductor device including buried bit lines formed of a metal silicide and silicidation preventing regions formed in a substrate under trenches that separate the buried bit lines.Type: GrantFiled: December 18, 2012Date of Patent: December 9, 2014Assignee: SK Hynix Inc.Inventor: Ju-Hyun Myung
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Patent number: 8907414Abstract: Aspects of the present disclosure describe high voltage fast recovery trench diodes and methods for make the same. The device may have trenches that extend at least through a top P-layer and an N-barrier layer. A conductive material may be disposed in the trenches with a dielectric material lining the trenches between the conductive material and sidewalls of the trenches. A highly doped P-pocket may be formed in an upper portion of the top P-layer between the trenches. A floating N-pocket may be formed directly underneath the P-pocket. The floating N-pocket may be as wide as or wider than the P-pocket. It is emphasized that this abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: GrantFiled: March 26, 2014Date of Patent: December 9, 2014Assignee: Alpha and Omega Semiconductor IncorporatedInventors: Jun Hu, Karthik Padmanabhan, Madhur Bobde, Hamza Yilmaz
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Publication number: 20140357030Abstract: Fabricating a semiconductor device includes: forming a gate trench in an epitaxial layer overlaying a semiconductor substrate; depositing gate material in the gate trench; forming a body; forming a source; forming an active region contact trench that extends through the source and the body into a drain; forming a Schottky barrier controlling layer in the epitaxial layer in bottom region of the active region contact trench; and disposing a contact electrode within the active region contact trench. The Schottky barrier controlling layer controls Schottky barrier height of a Schottky diode formed by the contact electrode and the drain.Type: ApplicationFiled: June 10, 2014Publication date: December 4, 2014Inventors: Anup Bhalla, Xiaobin Wang, Ji Pan, Sung-Po Wei
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Publication number: 20140346594Abstract: A semiconductor device with an embedded schottky diode and a manufacturing method thereof are provided. A semiconductor device having a schottky diode include: an epilayer of a first conductivity type, a body layer of a second conductivity type, and a source layer of the first conductivity type arranged in that order; a gate trench that extends from the source layer to a part of the epilayer; a body trench formed a predetermined distance from the gate trench and extends from the source layer to a part of the epilayer; and a guard ring of the second conductivity type that contacts an outer wall of the body trench and formed in the epilayer.Type: ApplicationFiled: August 27, 2013Publication date: November 27, 2014Applicant: MagnaChip Semiconductor, Ltd.Inventor: Francois HEBERT
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Publication number: 20140342515Abstract: An ESD protection circuit with a diode string coupled to a diode-isolated, gate-grounded NMOS ESD device. A method of forming an ESD protection circuit with a diode string coupled to a diode-isolated, gate-grounded NMOS ESD device.Type: ApplicationFiled: August 7, 2014Publication date: November 20, 2014Inventors: Ponnarith POK, Kyle SCHULMEYER, Roger A. CLINE, Charvaka DUVVURY
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Publication number: 20140342510Abstract: Aspects of the disclosure provide a dual electrostatic discharge (ESD) protection device in fin field effect transistor (FinFET) process technology and methods of forming the same. In one embodiment, the dual ESD protection device includes: a bulk silicon substrate; a shallow trench isolation (STI) region formed over the bulk silicon substrate; a first ESD device positioned above the STI region; and a second ESD device positioned below the STI region, wherein the first ESD device conducts current above the STI region and the second ESD device conducts current below the STI region.Type: ApplicationFiled: August 4, 2014Publication date: November 20, 2014Inventors: Robert J. Gauthier, JR., Tom C. Lee, Junjun Li, Souvick Mitra, Christopher Stephen Putnam
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Patent number: 8890279Abstract: A trench Schottky rectifier device includes a substrate having a first conductivity type, a plurality of trenches formed in the substrate, and an insulating layer formed on sidewalls of the trenches. The trenches are filled with conductive structure. There is an electrode overlying the conductive structure and the substrate, and thus a Schottky contact forms between the electrode and the substrate. A plurality of embedded doped regions having a second conductivity type are formed in the substrate and located under the trenches. Each doped region and the substrate form a PN junction to pinch off current flowing toward the Schottky contact so as to suppress current leakage.Type: GrantFiled: November 15, 2013Date of Patent: November 18, 2014Assignee: PFC Device Corp.Inventors: Kou-Liang Chao, Mei-Ling Chen, Tse-Chuan Su, Hung-Hsin Kuo
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Publication number: 20140335670Abstract: A semiconductor device comprises a first substrate portion and a second substrate portion disposed a distance away from the first substrate portion. The first substrate portion includes a first active semiconductor layer defining at least one semiconductor fin and a first polycrystalline layer formed directly on the fin. The first polycrystalline layer is patterned to define at least one semiconductor gate. The second substrate portion includes a doped region interposed between a second active semiconductor region and an oxide layer. The oxide layer protects the second active semiconductor region and the doped region. The doped region includes a first doped area and a second doped area separated by the first doped region to define a depletion region.Type: ApplicationFiled: June 4, 2013Publication date: November 13, 2014Inventors: Veeraraghavan S. Basker, Tenko Yamashita
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Patent number: 8883589Abstract: A method of forming a memory cell is provided, the method including forming a diode including a first region having a first conductivity type, counter-doping the diode to change the first region to a second conductivity type, and forming a memory element coupled in series with the diode. Other aspects are also provided.Type: GrantFiled: September 28, 2010Date of Patent: November 11, 2014Assignee: SanDisk 3D LLCInventors: Xiying Costa, Abhijit Bandyopadhyay, Kun Hou, Brian Le, Yung-Tin Chen
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Patent number: 8883590Abstract: A phase change memory apparatus is provided that includes a first electrode that is longer than it is wide, the first electrode having a trench formed on an active region of a semiconductor substrate, a second electrode formed in a bottom portion of the trench, and a bottom electrode contact formed on the second electrode.Type: GrantFiled: December 31, 2012Date of Patent: November 11, 2014Assignee: SK Hynix Inc.Inventor: Jang Uk Lee