Having Enclosed Cavity Patents (Class 438/456)
  • Patent number: 8741693
    Abstract: A package structure includes a micro-electromechanical element having a plurality of electrical contacts; a package layer enclosing the micro-electromechanical element and the electrical contacts, with a bottom surface of the micro-electromechanical element exposed from a lower surface of the package layer; a plurality of bonding wires embedded in the package layer, each of the bonding wires having one end connected to one of the electrical contacts, and the other end exposed from the lower surface of the package layer; and a build-up layer structure provided on the lower surface of the package layer, the build-up layer including at least one dielectric layer and a plurality of conductive blind vias formed in the dielectric layer and electrically connected to one ends of the bonding wires. The package structure is easier to accurately control the location of an external electrical contact, and the compatibility of the manufacturing procedures is high.
    Type: Grant
    Filed: November 13, 2013
    Date of Patent: June 3, 2014
    Assignee: Siliconware Precision Industries Co., Ltd.
    Inventors: Chun-An Huang, Hsin-Yi Liao, Shih-Kuang Chiu
  • Patent number: 8735260
    Abstract: The present disclosure provide a method of manufacturing a microelectronic device. The method includes forming a bonding pad on a first substrate; forming wiring pads on the first substrate; forming a protection material layer on the first substrate, on sidewalls and top surfaces of the wiring pads, and on sidewalls of the bonding pad, such that a top surface of the bonding pad is at least partially exposed; bonding the first substrate to a second substrate through the bonding pad; opening the second substrate to expose the wiring pads; and removing the protection material layer.
    Type: Grant
    Filed: December 13, 2010
    Date of Patent: May 27, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shang-Ying Tsai, Jung-Huei Peng, Hsin-Ting Huang, Hung-Hua Lin, Ming-Tung Wu, Ping-Yin Liu, Yao-Te Huang, Yuan-Chih Hsieh
  • Patent number: 8722502
    Abstract: A method of manufacturing a semiconductor device, includes forming a trench surrounding a first area of a semiconductor substrate, the trench having a bottom surface and two side surfaces being opposite to each other, forming a silicon film on the bottom surface and side surfaces of the trench, forming an insulation film on the silicon film in the trench, grinding a bottom surface of the semiconductor substrate to expose the insulation film formed over the bottom surface of the trench, and forming a through electrode in the first area after grinding the bottom surface of the semiconductor substrate, the through electrode penetrating the semiconductor substrate.
    Type: Grant
    Filed: April 13, 2011
    Date of Patent: May 13, 2014
    Inventor: Shiro Uchiyama
  • Patent number: 8716852
    Abstract: A device includes a capping substrate bonded with a substrate structure. The substrate structure includes an integrated circuit structure. The integrated circuit structure includes a top metallic layer disposed on an outgasing prevention structure. At least one micro-electro mechanical system (MEMS) device is disposed over the top metallic layer and the outgasing prevention structure.
    Type: Grant
    Filed: February 17, 2012
    Date of Patent: May 6, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Pao Shu, Chia-Ming Hung, Wen-Chuan Tai, Hung-Sen Wang, Hsiang-Fu Chen, Alex Kalnitsky
  • Patent number: 8711897
    Abstract: A split ring-resonator includes a substrate, an inner-trench or cavity formed into the substrate, the inner trench or cavity including a split, and an outer trench or cavity formed into the substrate around the inner trench or cavity, the outer trench or cavity including another split disposed at an opposite end of the split in the inner trench or cavity, wherein the inner trench or cavity and the outer trench or cavity are configured to receive an electrically conductive gas and/or plasma to form a split-ring resonator.
    Type: Grant
    Filed: March 15, 2011
    Date of Patent: April 29, 2014
    Assignee: Miles Technologies, LLC
    Inventor: Patrick Allen Miles
  • Patent number: 8697543
    Abstract: A chip-to-wafer bonding method and a three-dimensional integrated semiconductor device are provided. The method comprises providing a chip and a wafer having a bonding region of the same size and shape as the chip; preparing hydrophilic areas and hydrophobic areas on the chip; preparing in the bonding region hydrophilic areas and hydrophobic areas respectively corresponding to the hydrophilic and hydrophobic areas on the chip; adding a liquid drop onto the hydrophilic areas in the bonding region; and pre-aligning and placing the chip on the bonding region of the wafer, such that the hydrophilic areas on the chip each contacts the corresponding hydrophilic area in the bonding region via the liquid. The sum of perimeters of the hydrophilic areas on the chip is larger than a perimeter of the chip. The sum of perimeters of the hydrophilic areas in the bonding region is larger than a perimeter of the bonding region.
    Type: Grant
    Filed: July 17, 2012
    Date of Patent: April 15, 2014
    Assignee: Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Yunqi Sui, Chang Liu
  • Patent number: 8698131
    Abstract: Provided is an organic EL apparatus including: an organic EL panel including organic EL devices; a heat releasing member; and a pair of film sheets of which at least one is transparent, wherein the organic EL panel and the heat releasing member overlap and are interposed and encapsulated by the pair of film sheets in a state where a portion of the heat releasing member is exposed outside the pair of film sheets.
    Type: Grant
    Filed: March 24, 2010
    Date of Patent: April 15, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Kozo Gyoda
  • Patent number: 8692257
    Abstract: Present embodiments provide a display apparatus including a substrate; a sealing substrate facing the substrate; a display unit between the substrate and the sealing substrate; a first sealing member between the substrate and the sealing substrate to be spaced apart from the display unit, so as to bond the substrate and the sealing substrate to each other; a second sealing member between the substrate and the sealing substrate to be spaced apart from the display unit and the first sealing member, so as to bond the substrate and the sealing substrate to each other; and a light pattern layer on a surface of the sealing substrate opposite to a surface facing the display unit, so as to adjust light intensity transmitted through the sealing substrate. The light pattern layer includes a first pattern corresponding to the first sealing member and a second pattern corresponding to the second sealing member.
    Type: Grant
    Filed: August 18, 2011
    Date of Patent: April 8, 2014
    Assignee: Samsung Display Co., Ltd.
    Inventor: Kyung-Jun Lee
  • Patent number: 8691658
    Abstract: A method for aligning an electronic CMOS structure with respect to a buried structure in the case of a bonded and thinned back stack of semiconductor wafers. The method for aligning the electronic CMOS structure may include forming alignment marks in the process of fabricating the structure to be buried on a front side, which is used for bonding of the semiconductor wafer, which includes the structure to be buried. The alignment marks may be formed on the edge of the semiconductor wafer. The method for aligning the electronic CMOS structure may include providing a cover wafer with first thinned portions of the wafer thickness provided from the bonding side at positions corresponding to positions of the alignment marks.
    Type: Grant
    Filed: July 27, 2009
    Date of Patent: April 8, 2014
    Assignee: X-Fab Semiconductor Foundries AG
    Inventors: Holger Klingner, Jens Ungelenk
  • Patent number: 8685834
    Abstract: A package structure and fabrication method thereof. The structure includes a substrate having a terminal, a chip overlying the substrate, the chip having an active surface, having a center region and periphery region, the periphery region having an electrode thereon, a patterned cover plate overlying the chip and exposing the electrode, a conductive material electrically connecting the electrode and terminal, and an encapsulant covering the terminal, conductive material, and electrode, but exposing the cover plate overlying the center region of the chip.
    Type: Grant
    Filed: November 6, 2009
    Date of Patent: April 1, 2014
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Pei-Haw Tsao, Chender Huang, Chuen-Jye Lin
  • Patent number: 8670246
    Abstract: A computer including an undiced semiconductor wafer having a multitude of microchips. The computer also including an outer chamber and at least one inner chamber inside the outer chamber. The outer chamber and the inner chamber being separated at least in part by an internal sipe, and at least a portion of a surface of the outer chamber forming at least a portion of a surface of the internal sipe. The internal sipe has opposing surfaces that are separate from each other and therefore can move relative to each other, and at least a portion of the opposing surfaces are in contact with each other in a unloaded condition. The outer chamber including a Faraday Cage. The multitude of microchips on the wafer are configured to allow the microchip to function independently and including independent communication capabilities.
    Type: Grant
    Filed: February 24, 2012
    Date of Patent: March 11, 2014
    Inventor: Frampton E. Ellis
  • Patent number: 8664085
    Abstract: A composite-substrate manufacturing method is provided with: a step of carrying out implantation of ions through a surface of a bulk substrate composed of the nitride compound semiconductor; a step of setting said surface of the bulk substrate against the second substrate, and bonding the bulk substrate and the second substrate together to obtain a bonded substrate; a step of elevating the temperature of the bonded substrate to a first temperature; a step of sustaining the first temperature for a fixed time; and a step of producing a composite substrate by severing the remaining portion of the bulk substrate from the bonded substrate; characterized in that a predetermined formula as for the first temperature, the thermal expansion coefficient of the first substrate, and the thermal expansion coefficient of the second substrate is satisfied.
    Type: Grant
    Filed: October 17, 2012
    Date of Patent: March 4, 2014
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Yoko Maeda, Fumitaka Sato, Akihiro Hachigo, Seiji Nakahata
  • Patent number: 8664082
    Abstract: The invention pertains to a combination of a substrate and a wafer, wherein the substrate and the wafer are arranged parallel to one another and bonded together with the aid of an adhesive layer situated between the substrate and the wafer, and wherein the adhesive is chosen such that its adhesive properties are neutralized or at least diminished when a predetermined temperature is exceeded. According to the invention, the adhesive layer is only applied annularly between the substrate and the wafer in the edge region of the wafer.
    Type: Grant
    Filed: June 12, 2013
    Date of Patent: March 4, 2014
    Inventor: Erich Thallner
  • Patent number: 8664028
    Abstract: (a) On a growth substrate, a void-containing layer that is made of a group III nitride compound semiconductor and contains voids is formed. (b) On the void-containing layer, an n-type layer that is made of an n-type group III nitride compound semiconductor and serves to close the voids is formed. (c) On the n-type layer, an active layer made of a group III nitride compound semiconductor is formed. (d) On the active layer, a p-type layer made of a p-type group III nitride compound semiconductor is formed. (e) A support substrate is bonded above the p-type layer. (f) The growth substrate is peeled off at the boundary where the voids are produced. In the above step (a) or (b), the supply of at least part of the materials that form the layer is decreased, while heating, before the voids are closed.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: March 4, 2014
    Assignee: Stanley Electric Co., Ltd.
    Inventors: Yasuyuki Shibata, Ji-Hao Liang
  • Patent number: 8664083
    Abstract: InP epitaxial material is directly bonded onto a Silicon-On-Insulator (SOI) wafer having Vertical Outgassing Channels (VOCs) between the bonding surface and the insulator (buried oxide, or BOX) layer. H2O and other molecules near the bonding surface migrate to the closest VOC and are quenched in the buried oxide (BOX) layer quickly by combining with bridging oxygen ions and forming pairs of stable nonbridging hydroxyl groups (Si—OH). Various sizes and spacings of channels are envisioned for various devices.
    Type: Grant
    Filed: January 27, 2012
    Date of Patent: March 4, 2014
    Assignee: The Regents of the University of California
    Inventor: Di Liang
  • Patent number: 8656740
    Abstract: The invention provides a manufacturing method of a glass-sealed package, and a glass substrate used for the glass-sealed package, whereby an amount of warp in a glass substrate is reduced to improve processing accuracy in a subsequent step in which the glass substrate is combined (such as by anodic bonding) with another glass substrate provided with a thin film. The front side of the glass substrate includes a region where the cavities used to house electronic devices such as semiconductor IC chips and crystal blanks are not formed. The region devoid of the cavities is provided in the formed of a frame to reduce an amount of warp in the glass substrate.
    Type: Grant
    Filed: February 19, 2010
    Date of Patent: February 25, 2014
    Assignee: Seiko Instruments Inc.
    Inventor: Yoshihisa Tange
  • Publication number: 20140042586
    Abstract: There are provided a silicon substrate and a method of fabricating the same, the silicon substrate including: first and second silicon substrates having corresponding bonding surfaces; a silicon oxide film formed between the first and second silicon substrates and having at least one trench communicating with the outside; and a hermetic portion formed on an end portion of the trench according to oxidation of the silicon oxide film.
    Type: Application
    Filed: November 9, 2012
    Publication date: February 13, 2014
    Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
    Inventors: Hyun Kee LEE, Sung Min CHO
  • Patent number: 8647962
    Abstract: The present disclosure provides a method of bonding a plurality of substrates. In an embodiment, a first substrate includes a first bonding layer. The second substrate includes a second bonding layer. The first bonding layer includes silicon; the second bonding layer includes aluminum. The first substrate and the second substrate are bonded forming a bond region having an interface between the first bonding layer and the second bonding layer. A device having a bonding region between substrates is also provided. The bonding region includes an interface between a layer including silicon and a layer including aluminum.
    Type: Grant
    Filed: March 23, 2010
    Date of Patent: February 11, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Martin Liu, Richard Chu, Hung Hua Lin, Hsin-Ting Huang, Jung-Huei Peng, Yuan-Chih Hsieh, Lan-Lin Chao, Chun-Wen Cheng, Chia-Shiung Tsai
  • Patent number: 8636912
    Abstract: A method of forming a device is provided. A substrate having a component is provided and a sacrificial layer is formed over the component. The sacrificial layer includes a cavity portion disposed about the component and a tunnel portion adjacent to the cavity portion. In addition, an encapsulation layer having a cover portion and a perimeter portion is formed over the sacrificial layer. The cover portion encapsulates the cavity portion such that the cavity portion forms a cavity within the cover portion. The perimeter portion is disposed over the tunnel portion. Moreover, an access hole is formed in the perimeter portion of the encapsulation layer.
    Type: Grant
    Filed: February 20, 2012
    Date of Patent: January 28, 2014
    Assignee: RF Micro Devices, Inc.
    Inventors: Sangchae Kim, Steven Crist
  • Patent number: 8633048
    Abstract: A fabrication method of a package structure having MEMS elements includes: disposing a plate on top of a wafer having MEMS elements and second alignment keys; cutting the plate to form therein a plurality of openings exposing the second alignment keys; performing a wire bonding process and disposing block bodies corresponding to the second alignment keys, respectively; forming an encapsulant and partially removing the encapsulant and the block bodies from the top of the encapsulant; and aligning through the second alignment keys so as to form on the encapsulant a plurality of metal traces. The present invention eliminates the need to form through holes in a silicon substrate as in the prior art so as to reduce the fabrication costs. Further, since the plate only covers the MEMS elements and the encapsulant is partially removed, the overall thickness and size of the package structure are reduced.
    Type: Grant
    Filed: December 8, 2011
    Date of Patent: January 21, 2014
    Assignee: Siliconware Precision Industries Co., Ltd.
    Inventors: Chen-Han Lin, Hong-Da Chang, Cheng-Hsiang Liu, Hsin-Yi Liao, Shih-Kuang Chiu
  • Patent number: 8633088
    Abstract: A bonded semiconductor device comprising a support substrate, a semiconductor device located with respect to one side of the support substrate, a cap substrate overlying the support substrate and the device, a glass frit bond ring between the support substrate and the cap substrate, an electrically conductive ring between the support substrate and the cap substrate. The electrically conductive ring forms an inner ring around the semiconductor device and the glass frit bond ring forms an outer bond ring around the semiconductor device.
    Type: Grant
    Filed: April 30, 2012
    Date of Patent: January 21, 2014
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Ruben B Montez, Robert F Steimle
  • Publication number: 20140001604
    Abstract: Semiconductor structures are fabricated that include a semiconductor material bonded to a substrate with a layer of dielectric material between the semiconductor material and the substrate. At least one fluidic microchannel extends in a lateral direction through the layer of dielectric material between the semiconductor material and the substrate. The at least one fluidic microchannel includes at least one laterally extending section having a transverse cross-sectional shape entirely surrounded by the layer of dielectric material.
    Type: Application
    Filed: June 28, 2012
    Publication date: January 2, 2014
    Applicant: SOITEC
    Inventor: Mariam Sadaka
  • Patent number: 8592952
    Abstract: A semiconductor chip and semiconductor package with stack chip structure include align patterns. The align patterns are formed of magnetic materials having opposite polarities on the top and bottom of the semiconductor chip. Thus, when the plurality of chips are stacked on the substrate in order for the packaging, the semiconductor chips may be exactly aligned by the magnetic force between the align patterns of the vertically stacked chips. The semiconductor package includes a plurality of stacked semiconductor chips and a filling material. Each of the stacked semiconductor chips includes a semiconductor substrate having a first surface and a second surface, wherein a circuit pattern such as a bonding pad is formed on the first surface, and a first align pattern formed on the first surface of the semiconductor substrate, wherein the first align pattern is formed of a magnetic material.
    Type: Grant
    Filed: April 28, 2011
    Date of Patent: November 26, 2013
    Assignee: SK Hynix Inc.
    Inventors: Seung Hee Jo, Seong Cheol Kim
  • Patent number: 8586450
    Abstract: A semiconductor device includes a first wafer having at least one first integrated-circuit chip and a first support layer surrounding the first integrated circuit chip. A first electrical-connection layer is placed on a frontside of the first wafer and includes a first electrical-connection network. A second wafer is placed on a frontside of the first electrical-connection layer. The second wafer includes at least one second integrated-circuit chip and a second support layer surrounding the second integrate circuit chip. The second integrated circuit chip has an active side facing the first electrical-connection layer, and one or more through-holes filled with a conductor forming electrical-connection vias. A second electrical-connection layer is placed on the backside of the second wafer and includes a second electrical-connection network.
    Type: Grant
    Filed: May 9, 2011
    Date of Patent: November 19, 2013
    Assignee: STMicroelectronics (Grenoble 2) SAS
    Inventor: Eric Saugier
  • Patent number: 8585910
    Abstract: A process for producing a micromachined tube (microtube) suitable for microfluidic devices. The process entails isotropically etching a surface of a first substrate to define therein a channel having an arcuate cross-sectional profile, and forming a substrate structure by bonding the first substrate to a second substrate so that the second substrate overlies and encloses the channel to define a passage having a cross-sectional profile of which at least half is arcuate. The substrate structure can optionally then be thinned to define a microtube and walls thereof that surround the passage.
    Type: Grant
    Filed: March 3, 2009
    Date of Patent: November 19, 2013
    Assignee: Integrated Sensing Systems Inc.
    Inventors: Douglas Ray Sparks, Nader Najafi
  • Patent number: 8569090
    Abstract: Methods of fabricating a Micro-Electromechanical System (MEMS) in a hermetically sealed cavity formed at a substrate level are provided. Generally, the method comprises: (i) forming a number of first open cavities in a surface of a first substrate and a number of second open cavities in a surface of a second substrate corresponding to the first open cavities; (ii) forming an actuator/sensor layer including a number of MEMS devices with electrically conductive regions therein; (iii) bonding the first substrate and the second substrate to the actuator/sensor layer so that at least one of the number of the first and second open cavities align with at least one of the number of MEMS devices to form a sealed cavity around the MEMS; and (iv) electrically connecting the electrically conductive regions of the MEMS device to a pad outside of the sealed cavity through an electrical interconnect. Other embodiments are also described.
    Type: Grant
    Filed: November 29, 2011
    Date of Patent: October 29, 2013
    Inventor: Babak Taheri
  • Patent number: 8564085
    Abstract: Provided is a method of fabricating an image sensor device. The method includes providing a first substrate having a radiation-sensing region disposed therein. The method includes providing a second substrate having a hydrogen implant layer, the hydrogen implant layer dividing the second substrate into a first portion and a second portion. The method includes bonding the first portion of the second substrate to the first substrate. The method includes after the bonding, removing the second portion of the second substrate. The method includes after the removing, forming one or more microelectronic devices in the first portion of the second substrate. The method includes forming an interconnect structure over the first portion of the second substrate, the interconnect structure containing interconnect features that are electrically coupled to the microelectronic devices.
    Type: Grant
    Filed: July 18, 2011
    Date of Patent: October 22, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Min-Feng Kao, Dun-Nian Yaung, Jen-Cheng Liu, Chun-Chieh Chuang, Wen-De Wang
  • Patent number: 8546903
    Abstract: There has been very little (if any) attention to address contamination diffusion within an integrated circuit (IC) because there are very few applications where a protective overcoat will be penetrated as part of the manufacturing process. Here, a sealing ring is provided that address this problem. Preferably, the sealing ring uses the combination of electrically conductive barrier rings and the tortuous migration path to allow an electronic device (i.e., thermopile), where a protective overcoat is penetrated during manufacture, to communicate with external devices while being isolated to prevent contamination.
    Type: Grant
    Filed: October 7, 2010
    Date of Patent: October 1, 2013
    Assignee: Texas Instruments Incorporated
    Inventors: Walter Meinel, Kalin V. Lazarov
  • Patent number: 8547278
    Abstract: A sensing device may include an antenna. The antenna may include a top wafer and a bottom wafer coupled to the top wafer. The antenna may further include an air cavity between the top wafer and the bottom wafer. The sensing device may further include a substrate and an interposer disposed between the antenna and the substrate.
    Type: Grant
    Filed: April 30, 2010
    Date of Patent: October 1, 2013
    Assignee: Electronics and Telecommunications Research Institute
    Inventors: Dong Suk Jun, Yong Sung Eom, Hyun Seo Kang, Moo Jung Chu, Soo Young Oh
  • Patent number: 8546952
    Abstract: A 3D integrated circuit including a first wafer and a second wafer is provided. The first wafer includes a first conduction pattern. The second wafer includes a second conduction pattern which is electrically connected to the first conduction pattern. A displacement between the first wafer and the second wafer is determined by a resistance of the first conduction pattern and the second conduction pattern.
    Type: Grant
    Filed: November 11, 2011
    Date of Patent: October 1, 2013
    Assignee: National Chiao Tung University
    Inventors: Kuan-Neng Chen, Shih-Wei Li
  • Patent number: 8536021
    Abstract: A trap rich layer for an integrated circuit chip is formed by chemical etching and/or laser texturing of a surface of a semiconductor layer. In some embodiments, a trap rich layer is formed by a technique selected from the group of techniques consisting of laser texturing, chemical etch, irradiation, nanocavity formation, porous Si-etch, semi-insulating polysilicon, thermal stress relief and mechanical texturing. Additionally, combinations of two or more of these techniques may be used to form a trap rich layer.
    Type: Grant
    Filed: November 26, 2012
    Date of Patent: September 17, 2013
    Assignee: IO Semiconductor, Inc.
    Inventors: Anton Arriagada, Michael A. Stuber, Stuart B. Molin
  • Patent number: 8536020
    Abstract: The invention pertains to a combination of a substrate and a wafer, wherein the substrate and the wafer are arranged parallel to one another and bonded together with the aid of an adhesive layer situated between the substrate and the wafer, and wherein the adhesive is chosen such that its adhesive properties are neutralized or at least diminished when a predetermined temperature is exceeded. According to the invention, the adhesive layer is only applied annularly between the substrate and the wafer in the edge region of the wafer.
    Type: Grant
    Filed: May 4, 2012
    Date of Patent: September 17, 2013
    Inventor: Erich Thallner
  • Patent number: 8530256
    Abstract: (a) Forming on a growth substrate a void-containing layer that is made of a group III nitride compound semiconductor and contains voids. (b) Forming on the void-containing layer an n-type layer that is made of an n-type group III nitride compound semiconductor and serves to close the voids. (c) Forming on the n-type layer an active layer made of a group III nitride compound semiconductor. (d) Forming on the active layer a p-type layer made of a p-type group III nitride compound semiconductor. (e) Bonding a support substrate above the p-type layer. (f) Peeling off the growth substrate at the boundary where the void are produced. (g) Planarizing the n-type layer. Step (b) comprises (b1) forming part of the n-type layer under conditions where horizontal growth is relatively weak and (b2) forming the remaining part of the n-type layer under conditions where horizontal growth is relatively strong.
    Type: Grant
    Filed: March 9, 2012
    Date of Patent: September 10, 2013
    Assignee: Stanley Electric Co., Ltd.
    Inventors: Yasuyuki Shibata, Ji-Hao Liang, Takako Chinone
  • Patent number: 8524571
    Abstract: Disclosed is a vacuum wafer level packaging method for a micro electro mechanical system device, including: forming a plurality of via holes on an upper wafer for protecting a micro electro mechanical system (MEMS) wafer; forming at least one metal layer on inner walls of the plurality of via holes and regions extended from the plurality of via holes; arranging and bonding the upper wafer and the MEMS wafer at atmospheric pressure; applying solder paste to the regions extended from the plurality of via holes; filling a solder in the plurality of via holes by increasing the temperature of a high-vacuum chamber to melt the solder paste; and changing the solder in the plurality of via holes to a solid state by lowering the temperature of the high-vacuum chamber.
    Type: Grant
    Filed: December 2, 2011
    Date of Patent: September 3, 2013
    Assignee: Electronics and Telecommunications Research Institute
    Inventors: Jong Tae Moon, Yong Sung Eom, Hyun-Cheol Bae
  • Patent number: 8518725
    Abstract: A method for processing a silicon substrate includes providing a combination of a first silicon substrate, a second silicon substrate, and an intermediate layer including a plurality of recessed portions, which is provided between the first silicon substrate and the second silicon substrate, forming a first through hole that goes through the first silicon substrate by executing etching of the first silicon substrate on a surface of the first silicon substrate opposite to a bonding surface with the intermediate layer by using a first mask, and exposing a portion of the intermediate layer corresponding to the plurality of recessed portions of the intermediate layer, forming a plurality of openings on the intermediate layer by removing a portion constituting a bottom of the plurality of recessed portions, and forming a second through hole that goes through the second silicon substrate by executing second etching of the second silicon substrate by using the intermediate layer on which the plurality of openings ar
    Type: Grant
    Filed: January 13, 2011
    Date of Patent: August 27, 2013
    Assignee: Canon Kabushiki Kaisha
    Inventors: Atsunori Terasaki, Masahiko Kubota, Ryoji Kanri, Yoshiyuki Fukumoto
  • Patent number: 8513094
    Abstract: In the manufacturing steps of a power-type semiconductor device, after grinding the back surface of the semiconductor wafer, when a metal film is deposited by sputtering deposition over the back surface of the wafer in a preheated state, the wafer is contained in an annular susceptor, and processed. A radial vertical cross section of the annular shape of the susceptor has a first upper surface closer to a horizontal surface for holding a peripheral portion of the top surface of the semiconductor wafer against gravity, and a second upper surface continued to and located outside the first upper surface and closer to a vertical surface for holding a side surface of the semiconductor wafer against lateral displacement.
    Type: Grant
    Filed: May 14, 2012
    Date of Patent: August 20, 2013
    Assignee: Renesas Electronics Corporation
    Inventor: Tatsuhiko Miura
  • Patent number: 8507360
    Abstract: A method includes arranging a bonding layer of a predetermined thickness on at least one of a first functional region bonded on a release layer, which is capable of falling into a releasable condition when subjected to a process, on a first substrate, and a region, to which the first functional region is to be transferred, on a second substrate; bonding the first functional region to the second substrate through the bonding layer; and separating the first substrate from the first functional region at the release layer.
    Type: Grant
    Filed: November 3, 2009
    Date of Patent: August 13, 2013
    Assignee: Canon Kabushiki Kaisha
    Inventors: Takao Yonehara, Yasuyoshi Takai
  • Patent number: 8507930
    Abstract: An organic light emitting diode (OLED) display includes: a first substrate including an OLED; a second substrate that is opposite to the first substrate; a sealant that is positioned between the first substrate and the second substrate and that couples the first substrate and the second substrate; and a sealant contraction reinforcement auxiliary structure that is positioned in at least one of a position between the first substrate and the sealant and a position between the second substrate and the sealant.
    Type: Grant
    Filed: November 19, 2010
    Date of Patent: August 13, 2013
    Assignee: Samsung Display Co., Ltd.
    Inventors: Byung-Uk Han, Hee-Chul Jeon
  • Publication number: 20130203235
    Abstract: A capped integrated device includes a semiconductor chip, incorporating an integrated device and a protective cap, bonded to the semiconductor chip for protection of the integrated device by means of a bonding layer made of a bonding material. The bonding material forms anchorage elements within recesses, formed in at least one between the semiconductor chip and the protective cap.
    Type: Application
    Filed: March 12, 2013
    Publication date: August 8, 2013
    Applicant: STMICROELECTRONICS S.R.L.
    Inventor: STMicroelectronics S.r.l.
  • Patent number: 8502399
    Abstract: Disclosed is a resin composition for encapsulating a semiconductor containing a curing agent, an epoxy resin (B) and an inorganic filler (C), wherein the curing agent is a phenol resin (A) having a predetermined structure. Also disclosed is a semiconductor device obtained by encapsulating a semiconductor element with a cured product of the resin composition for encapsulating a semiconductor.
    Type: Grant
    Filed: June 16, 2010
    Date of Patent: August 6, 2013
    Assignee: Sumitomo Bakelite Co., Ltd.
    Inventor: Masahiro Wada
  • Patent number: 8497186
    Abstract: Several embodiments for semiconductor devices and methods for forming semiconductor devices are disclosed herein. One embodiment is directed to a method for manufacturing a microelectronic imager having a die including an image sensor, an integrated circuit electrically coupled to the image sensor, and electrical connectors electrically coupled to the integrated circuit. The method can comprise covering the electrical connectors with a radiation blocking layer and forming apertures aligned with the electrical connectors through a layer of photo-resist on the radiation blocking layer. The radiation blocking layer is not photoreactive such that it cannot be patterned using radiation. The method further includes etching openings in the radiation blocking layer through the apertures of the photo-resist layer.
    Type: Grant
    Filed: May 23, 2011
    Date of Patent: July 30, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Swarnal Borthakur, Marc Sulfridge
  • Patent number: 8486744
    Abstract: The present disclosure provides a method for fabricating a MEMS device including multiple bonding of substrates. In an embodiment, a method includes providing a micro-electro-mechanical systems (MEMS) substrate including a first bonding layer, providing a semiconductor substrate including a second bonding layer, and providing a cap including a third bonding layer. The method further includes bonding the MEMS substrate to the semiconductor substrate at the first and second bonding layers, and bonding the cap to the semiconductor substrate at the second and third bonding layers to hermetically seal the MEMS substrate between the cap and the semiconductor substrate. A MEMS device fabricated by the above method is also provided.
    Type: Grant
    Filed: September 28, 2010
    Date of Patent: July 16, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Hsien Lin, Chia-Hua Chu, Li-Cheng Chu, Yuan-Chih Hsieh, Chun-Wen Cheng
  • Patent number: 8481405
    Abstract: An integrated circuit chip is formed with a circuit layer, a trap rich layer and through-semiconductor-vias. The trap rich layer is formed above the circuit layer. The through-semiconductor-vias are also formed above the circuit layer. In some embodiments, the circuit layer is included in a wafer, and the trap rich layer and through-semiconductor-vias are included in another wafer. The two wafers are bonded together after formation of the trap rich layer and through-semiconductor-vias. Additionally, in some embodiments, yet another wafer may also be bonded to the wafer that includes the trap rich layer and through-semiconductor-vias. Furthermore, in some embodiments, another circuit layer may be formed in the wafer that includes the trap rich layer and through-semiconductor-vias.
    Type: Grant
    Filed: October 15, 2012
    Date of Patent: July 9, 2013
    Assignee: IO Semiconductor, Inc.
    Inventors: Anton Arriagada, Chris Brindle, Michael A. Stuber
  • Patent number: 8470631
    Abstract: A simple and economical method for manufacturing very thin capped MEMS components. In the method, a large number of MEMS units are produced on a component wafer. A capping wafer is then mounted on the component wafer, so that each MEMS unit is provided with a capping structure. Finally, the MEMS units capped in this way are separated to form MEMS components. A diaphragm layer is formed in a surface of the capping wafer by using a surface micromechanical method to produce at least one cavern underneath the diaphragm layer, support points being formed that connect the diaphragm layer to the substrate underneath the cavern. The capping wafer structured in this way is mounted on the component wafer in flip chip technology, so that the MEMS units of the component wafer are capped by the diaphragm layer. The support points are then cut through in order to remove the substrate.
    Type: Grant
    Filed: March 19, 2010
    Date of Patent: June 25, 2013
    Assignee: Robert Bosch GmbH
    Inventors: Torsten Kramer, Kathrin Knese, Hubert Benzel, Karl-Heinz Kraft, Simon Armbruster
  • Patent number: 8461614
    Abstract: A packaging substrate device includes: a first laminate including a first ceramic substrate and a first copper pattern disposed on an upper surface of the first ceramic substrate; and a second laminate disposed over the first copper pattern and including a second ceramic substrate, a second copper pattern that is disposed on an upper surface of the second ceramic substrate, and a through hole extending through the second ceramic substrate and the second copper pattern to expose a copper portion of the first copper pattern. A light emitting semiconductor die can be mounted on the copper portion within the through hole. Efficient heat dissipation can be achieved through the first laminate.
    Type: Grant
    Filed: April 2, 2010
    Date of Patent: June 11, 2013
    Assignee: Tong Hsing Electronic Industries, Ltd.
    Inventors: Wen-Chung Chiang, Keng-Chung Wu, Ying-Chi Hsieh, Cheng-Kang Lu, Ming-Huang Fu
  • Patent number: 8455365
    Abstract: A device and method for device fabrication includes forming a buried gate electrode in a dielectric substrate and patterning a stack that includes a high dielectric constant layer, a carbon-based semi-conductive layer and a protection layer over the buried gate electrode. An isolation dielectric layer formed over the stack is opened to define recesses in regions adjacent to the stack. The recesses are etched to form cavities and remove a portion of the high dielectric constant layer to expose the carbon-based semi-conductive layer on opposite sides of the buried gate electrode. A conductive material is deposited in the cavities to form self-aligned source and drain regions.
    Type: Grant
    Filed: May 19, 2011
    Date of Patent: June 4, 2013
    Inventors: Dechao Guo, Shu-Jen Han, Keith Kwong Hon Wong, Jun Yuan
  • Patent number: 8455287
    Abstract: A method for manufacturing a semiconductor device is provided, which includes the step of forming a microstructure comprising a layer containing silicon over a first substrate, the step of forming an interlayer insulating layer over the microstructure, the step of forming a connection conductive layer over the interlayer insulating layer, and the step of separating the microstructure from the first substrate.
    Type: Grant
    Filed: August 29, 2011
    Date of Patent: June 4, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Konami Izumi, Mayumi Yamaguchi
  • Patent number: 8454851
    Abstract: A method for manufacturing a flexible display device in which a flexible substrate is acquired by forming display devices on one side of the substrate and thinning the substrate by removing surface portions on an opposite side of the substrate. The thickness of the substrate is changed from a first thickness, which gives rigidity to the substrate to the second thickness, which gives flexibility to the substrate.
    Type: Grant
    Filed: July 10, 2007
    Date of Patent: June 4, 2013
    Assignee: LG Display Co., Ltd.
    Inventors: Chang Dong Kim, Hyun Sik Seo, Yong In Park, Seung Han Paek, Jung Jae Lee, Sang Soo Kim
  • Patent number: 8445323
    Abstract: A semiconductor device includes an IPD structure, a first semiconductor die mounted to the IPD structure with a flipchip interconnect, and a plurality of first conductive posts that are disposed adjacent to the first semiconductor die. The semiconductor device further includes a first molding compound that is disposed over the first conductive posts and first semiconductor die, a core structure bonded to the first conductive posts over the first semiconductor die, and a plurality of conductive TSVs disposed in the core structure. The semiconductor device further includes a plurality of second conductive posts that are disposed over the core structure, a second semiconductor die mounted over the core structure, and a second molding compound disposed over the second conductive posts and the second semiconductor die. The second semiconductor die is electrically connected to the core structure.
    Type: Grant
    Filed: March 19, 2012
    Date of Patent: May 21, 2013
    Assignee: STATS ChipPAC, Ltd.
    Inventors: Yaojian Lin, Jianmin Fang, Kang Chen, Haijing Cao
  • Patent number: 8440543
    Abstract: A method of improving thermal cycling reliability for a hybrid circuit structure requires providing at least two circuit layers, aligning two of the circuit layers vertically such that their respective circuit elements have a precise and well-defined spatial relationship, and providing an adhesive material which wicks into a portion of the space between the aligned layers so as to mitigate damage to the structure and/or interconnections that might otherwise occur due to thermal contraction mismatch between the layers. The adhesive material is required to have an associated viscosity such that, when provided under predetermined conditions, the adhesive stops wicking before reaching, and possibly degrading the performance of, the circuit elements.
    Type: Grant
    Filed: September 19, 2011
    Date of Patent: May 14, 2013
    Assignee: Teledyne Scientific & Imaging, LLC
    Inventors: Donald E. Cooper, William E. Tennant