Abstract: A polishing apparatus has a spindle disposed rotatably through an opening of a base plate, a pair of side walls attached to the spindle, a compression roller attached rotatably to an end part of and between the side walls for compressing a polishing tape onto a target object, a tape-supplying roller and a take-up roller which are both attached rotatably between and to the side walls between the spindle and the compression roller, and a tape-running roller attached rotatably between and to the side walls for causing the polishing tape to travel. The axis of rotation of the compression roller intersects that of the spindle perpendicularly and both the tape-supplying and take-up rollers are parallel to the compression roller and their axes of rotation intersect that of the spindle such that the center of gravity of the apparatus is always on the axis of rotation of the spindle.

Abstract: A sizing and finishing machine includes a mechanism for rotating an associated workpiece and a first microfinishing belt for selectively contacting the associated workpiece. The belt has a maximum grit size of 60 microns. A structure is provided for rotatably holding the first microfinishing belt and a housing is provided on which the structure is mounted. A mechanism moves the first housing and hence the first microfinishing belt toward and away from the associated workpiece. The mechanism is timed to the rotation of the associated workpiece to maintain a substantially constant pressure of the first microfinishing belt on the associated workpiece. If desired, a second microfinishing belt mounted separately on a second housing can be provided with the two housings and their respective belts being separately controlled. The force exerted by the microfinishing belt on the associated workpiece is limited to a pressure of less than approximately 25 psi.

Abstract: A pressure bar for a belt grinding machine includes an elongated carrier (10) with a base plate (12) facing the grinding belt (20) and having a plurality of bores arranged in a matrix pattern, in which bores axially freely movable bolt-shaped pressure members (16) are held. The pressure members have free ends for engagement with the grinding belt (20). A plurality of positioning devices (26) are arranged next to one another in the longitudinal direction of the carrier (10) with each having a ram adjustable perpendicularly to the base plate (12) to groupwise position the pressure members (16) in their bores. Between the ends of the pressure members (16) remote from the grinding belt (20) and the rams (28) of the positioning devices (26) is arranged an elastic lamina (22) common to all of the pressure members and extending parallel to the longitudinal direction of the carrier.

Abstract: A superfinishing apparatus has an abrasive film feed mechanism for feeding out and winding up an abrasive film (4). The apparatus includes a backup roll (2) for pressing and vibrating the film against a workpiece. A guide member (3) is provided for the film feed mechanism immediately before the backup roll (2). The guide member has two pairs of helical grooves (11, 12) and (13, 14) arranged opposite in turning direction to each other. The helical grooves are different in radius from the center from each other and are provided on both side faces of the guide member. Also, when the film has passed through the helical grooves (11 and 13 or 12 and 14), its traveling path is translated transversely of the guide member.

Abstract: A technique for controlling a polishing rate across a substrate surface when performing CMP, in order to obtain uniform polishing of the substrate surface. A support housing which underlies a polishing pad includes a plurality of openings for dispensing a pressurized fluid. The openings are arranged into a pre-configured pattern for dispensing the fluid to the underside of the pad opposite the substrate surface being polished. The openings are configured into a number of groupings, in which a separate channel is used for each grouping so that fluid pressure for each group of openings can be separately and independently controlled.

Abstract: A technique for controlling a polishing rate across a substrate surface when performing CMP, in order to obtain uniform polishing of the substrate surface. A support housing which underlies a polishing pad includes a plurality of openings for dispensing a pressurized fluid. The openings are arranged into a pre-configured pattern for dispensing the fluid to the underside of the pad opposite the substrate surface being polished. The openings are configured into a number of groupings, in which a separate channel is used for each grouping so that fluid pressure for each group of openings can be separately and independently controlled.

Abstract: A method and tool for fine machining an outside circumferential surface of radially outwardly expanded, ring-shaped workpieces having respective holes therein, the workpieces being combined to form a stack. The tool includes a clamping arrangement for clamping the stack; a pair of segments disposed adjacent the clamping arrangement, each of the segments having a segment surface defining a predetermined radius of curvature corresponding approximately to a nominal radius of curvature of each of the workpieces; and a grinding belt arrangement disposed adjacent the segment surfaces. The segments are moved into a processing position wherein the radii of curvature of respective ones of the segment surfaces share a common center point, the step of moving the segments including the step of advancing the segments toward the stack such that the grinding belt arrangement is brought into grinding contact with the stack and thereby assumes a contour of the segment surfaces.

Abstract: A technique for utilizing sensors to monitor the polishing of a semiconductor wafer when a linear polisher is utilized to polish the wafer. The sensors are distributed along the surface or are coupled to openings along the surface to monitor the on-going polishing process. The sensed information from the sensors are processed in order to provide feedback for compensating the fluid dispensing when fluid platens are used and/or the downforce exerted by the wafer carrier.

Abstract: An edge grinding device for rounding off edges of members which are passed through the grinding device. The device includes a main frame for supporting the structural member, and a grinding aggregate which is pivotably mounted on the frame about an axis running substantially parallel to the directional motion of the member, the grinding aggregate having a grinding element which has a convex grinding surface, wherein the grinding aggregate pivots the convex grinding surface about the edge which is to be round while the member is moving through the device.

Abstract: A support shoe for supporting an abrasive tape having an abrasive face and an opposed back face, wherein the support shoe comprises a pressure face including a frictional engagement material for frictionally engaging the back face of the abrasive tape. The frictional engagement material comprises a plurality of cells and a first frictional engagement surface comprising a plurality of particles distributed and arranged within the plurality of cells, wherein at least some of the plurality of particles are fixed within and extend from the plurality of cells, so that when the back face of the abrasive tape contacts the first frictional engagement surface, the plurality of particles attenuate relative movement between the abrasive tape and the pressure face in response to shear forces induced during abrading. The pressure face may be curvilinear, arcuate, convex, or concave. The frictional engagement material may be attached to the pressure face by brazing, sintering, adhering, or soldering.

Abstract: A platen ring for use with a platen on a linear polisher, in which the platen ring is used to reduce fluctuation of the belt/pad assembly as it encounters the platen. The platen ring is disposed around the platen so that a fluctuation of the belt/pad assembly is dampened before the belt/pad assembly engages the platen. Reduction of the belt/pad fluctuation ensures a reduction in the within-wafer non-uniformity and provides for a more uniform polishing rate across the surface of the wafer.

Abstract: A grinding machine utilizing multiple, parallel, endless, abrasive belts for simultaneously grinding several surfaces on a workpiece, such as cam lobes on a cam shaft. The grinding machine includes a contouring head assembly comprising a plurality of contour feed units, each contour unit including a curved back-up shoe, a back-up shoe holder, an adaptor for mounting the shoe holder, and a ball-spline mechanism secured to the adaptor for transmitting power from a drive motor to the back-up shoe to press an abrasive belt, associated with the back-up shoe against a workpiece. A locating lip is defined on each adaptor, and a reference pad is established on the contouring head assembly.

Abstract: Tooling for applying an abrasive belt on a machine for abrasive belt machining of cylindrical bearing surfaces comprises, for each bearing surface to be machined, an arm and three abrasive belt application shoes a first of which is mounted in a top median position on the arm and the other two of which are mounted in a bottom lateral position on two jaws articulated to the arm and coupled together in such manner that they can be clamped together. The arm carries a first shoe having a concave abrasive belt application surface subtending an angle greater than 90.degree. and less than 180.degree. and a gauge with two opposed and horizontally aligned sensors and each jaw carries a second shoe having a concave abrasive belt application surface subtending an angle slightly less than 90.degree. whereby when clamped around the bearing surface to be machined the three shoes together envelope the bearing surface to be machined over an angle of at least 270.degree.

Abstract: A manicure device which is well suited for filing or buffing the convex top surfaces and the outer convex edges of fingernails and toenails includes a flexible, textured belt disposed in a cartridge which is detachably secured to a housing containing a high speed electric motor. The casing includes bearings over which the belt passes when the device is being used, and a belt opening which exposes a portion of the textured surface of the belt so that a fingernail can be pressed thereto. The machine allows the belt to be pressed against a convex surface or edge of a fingernail or toenail, so that the belt will conform to the convex shape thereof and provide uniformly smooth filing or buffing. The cartridges are relatively inexpensive and easily replaced, which facilitates and promotes replacement of the cartridge whenever the machine is being used to file or buff the fingernails or toenails of a different person, whereby better hygiene is achieved.

Abstract: Sanding accessory for a conventional belt sander or the like, enabling manually held workpieces to be sanded to a super-smooth finish without rounding off their edges. A workpiece held by hand sideways against a fence parallel to the direction of travel of the belt moves forward by belt friction to a crosswise face of the fence and is retained there as the fence reciprocates laterally across the belt and back, sanding the workpiece evenly and distributing the belt wear uniformly over substantially its entire abrasive surface.

Abstract: In an apparatus for pressing the grinding belt of a belt grinding machine to the upper surface of a workpiece, a pressing beam located above and extending transversely to the feed direction of the workpiece carries a row of positioning units having downwardly extending positioning rods for applying forces to an equalizing mat positioned between the lower ends of the rods and the inner side of the grinding belt to push the belt downwardly onto the top surface of the workpiece. The forces are transferred from the positioning rods to the equalizing mat by a row of pressure plates respectively associated with the positioning rods with the lower ends of the positioning rods lying loosely against the pressure plates. This achieves a simplified construction easing maintenance and repair and allows the equalizing pad to have the ability to uniformly distribute the forces onto the grinding belt and to have the flexibility needed to accommodate workpiece top surfaces of different shapes.

Abstract: An adjustable fence assembly includes a planar fence secured with a handle having an arcuate body portion which is rotatably coupled through an arcuate trolley member with an arcuate body portion of a fence traveler. The fence is directly pivotally coupled along its lower edge to the traveler along an axis of rotation which lies generally along the lower surface of the traveler. The lower traveler surface is supported on an upper surface of a fence track, which can be adjustably mounted to the rear cover of a conventional jointer-planer. Each arcuate body portion is about 45.degree. or less in arcuate extent with respect to the pivot axis to permit the portions to collapse and the fence to be rotated from an upright position to at least a 45.degree. position away from the jointer-planer. The angular position of the fence is selectably adjustable through the use of a single threaded fastener.

Abstract: A semi-conductor wafer polishing machine having a polishing pad assembly and a wafer holder includes a support positioned adjacent the polishing pad assembly. This support has at least one fluid inlet connectable to a source of fluid at a higher pressure, at least one fluid outlet connectable to a fluid drain at a lower pressure, and at least one bearing surface over which fluid flows from the source to the drain. The polishing pad is supported by the fluid over the bearing surface for low-friction movement with respect to the support. Similar fluid bearings can be used in the wafer holder. An array of generally parallel grooves is provided on a belt support surface to reduce hydroplaning of a polishing belt. A turbine drive system rotates a wafer chuck in a wafer holder.

Abstract: A conversion grinding wheel frame for an abrasive-belt to secure thereto for replacing a conventional stone grinding wheel used on a cylindrical roll grinding machine. The abrasive-belt conversion wheel is secured to a spindle of the grinding machine by a wheel clamping assembly. The abrasive-belt conversion wheel frame having an engagement working surface and a mounting surface with both surfaces having apertures therethrough traversing from a chamber within the abrasive-belt conversion grinding wheel frame. Fluid under pressure in the chamber escapes through the apertures to the working surface and mounting surface. The pressure of the gas expands the abrasive-belt while being mounted onto the abrasive-belt conversion grinding wheel frame. The mounting surface is diametrically tapered in relation to the working surface to afford initial engagement of the abrasive-belt which further assists mounting the abrasive-belt onto the working surface.

Abstract: A pair of supporting arms are rotatably attached to both ends of a fixed shaft. A supporting shaft extends across forward ends of the supporting arms and in parallel to the fixed shaft. A grinding roller on which an abrasive tape is arranged, and guide rollers sandwiching it are attached to this shaft. Axial centers of the grinding roller and the guide rollers are in an eccentric state. Thus when the guide rollers contact a color filter, a gap is given between the grinding roller and the color filter, and projections can be ground corresponding to the gap.

Abstract: A polishing apparatus, for polishing/cleaning a target object surface by using a polishing tape, has a spindle rotatably placed inside an opening formed in a base plate, a motor for rotating the spindle, a compression roller rotatably supported between a pair of side walls attached to the spindle, supply and take-up rollers supported rotatably by the side walls for advancing the polishing tape, and a motor for the take-up roller. The polishing tape is supplied from the supply roller and taken up by the take-up roller through the compression roller, while rotating around with the spindle. The compression roller has a smaller diameter at its center part than at its end parts for preventing the polishing tape from becoming twisted or wrinkled when the compression roller is rotated by the motion of the spindle while being pressed against a target object and being advanced from the supply roller to the take-up roller.

Abstract: A semi-conductor wafer polishing machine having a polishing pad assembly and a wafer holder includes a support positioned adjacent the polishing pad assembly. The support includes multiple fluid bearings that support the polishing pad assembly on the support. These fluid bearings are arranged concentrically to provide concentric regions of support for the polishing pad assembly, and each fluid bearing is coupled to a respective source of pressurized fluid at a respective pressure.

Abstract: A polishing method and apparatus for a silicon substrate or the like, the method including disposing a polishing cloth in contact with a surface of a work to be polished, pressing the polishing cloth using pressing rods against the surface of the work to be polished in a region with a smaller area than the area of the surface of the work to be polished while adjusting the pressure of contact, and polishing the entire surface to be polished while moving the work relative to the polishing cloth and putting it under circulating movement with a radius smaller than a diametrical length of the region along the surface to be polished without autorotation.

Abstract: A computer diskette burnishing machine that consists of two burnishing units adapted to operate on the magnetic medium of a conventional computer disk through the upper and lower read/write head access windows in the disk's protective shell. The assembled diskette is positioned on a lower burnishing unit that comprises a supporting plate having the same mechanical characteristics of a corresponding computer disk drive, including an electric motor equipped with a spindle/hub interface and shell registration pins. While the disk rotates, the burnishing units polish the disk's upper and lower surfaces by means of upper and lower abrasive tapes fed by a system of supply and take-up reels. The lower burnishing unit includes a resilient roller backing up the lower abrasive tape and disposed radially with respect to the plane of the disk. The upper burnishing unit consists of a spring-loaded resilient roller backing up the upper abrasive tape and disposed radially in parallel to the lower roller.

Abstract: A floating-type or compliant follower system for use in conjunction with a robotic or automated workpiece finishing apparatus. The follower device in a preferred embodiment cooperates with the tool to create a contact force with the workpiece which can be maintained constant with a high degree of accuracy and with a high responsiveness. The follower device in a preferred embodiment includes a constant-torque rotatable electric motor, such as a servo motor, which torque remains constant even when the motor is held in a stall condition by an external load or is driven backwards by the load. The motor output is drivingly coupled through a rotary-to-linear drive mechanism to a follower which is coupled to a driving tool such as a belt grinder.

Abstract: While a magnetic disk is being rotated, compressed air is jetted to corresponding positions on the two surfaces of the magnetic disk. An abrasive tape, which has tension in its longitudinal direction, is interposed between at least either one of the two surfaces of the magnetic disk and the compressed air jetted thereto such that the compressed air may now be jetted to the abrasive tape. The air pressure of the compressed air, which is jetted to the abrasive tape, and the tension on the abrasive tape are adjusted such that the abrasive tape may be formed into a bent shape having a level of rigidity appropriate for pushing the magnetic disk. The bent shape portion of the abrasive tape is brought into sliding contact with the magnetic surface of the magnetic disk, and the region of the sliding contact of the magnetic surface of the magnetic disk with the abrasive tape is thereby uniformly burnished.

Abstract: The invention is to a jig that may be either temporarily or permanently mounted for use on a simple, low cost, belt or drum sander. On a belt sander, the jig is placed over the fence on the sander and secured thereto by thumb screws, or may be bolted to the sides of some sanders. The jig is mounted adjacent to a drum sander. The jig is an adjustable guide under which a work piece is placed. When the work piece is sanded to the desired thickness, the attachment is stopped from further downward movement by set screws, and the work piece is not further sanded.

Abstract: A belt grinder includes a base plate mounting a drive motor, belt drive wheel, and belt tensioning idler wheel. A tension arm movably mounted on the base plate is biased to an extended position under a predetermined adjustable bias force to regulate belt tension. Air cylinder and weighted pivot arm embodiments for biasing the tension arm are disclosed. The idler wheel is pivotally mounted on the tension arm for adjusting position of the belt along the axis of the idler wheel. A plurality of grooves in the base plate allow precise securement of various attachments in repeatable alignments. A platen assembly attachment includes a tool rest and belt platen disposed between belt supporting rollers which may be quickly removed from the base plate and reattached in precise alignment without disturbing the adjustment of the tool rest and platen.

Abstract: The grinder has a frame (6) movable on rollers (8) on which is fitted a grinding device (18) drivable by a motor (84). In order to simplify the grinder and its application to a roll (4) to be treated, the rollers (8) are designed to lower the frame (6) on a scraper (10) or on a rail (56) of a scraper device (2) associated with the roll (4), which rail replaces the scraper (10). The frame (6) has a supporting roller (14) fitted on an adjustable holder (12) which is laterally supported on a bearer (16) for the scraper (10).

Abstract: A grinding machine utilizing multiple, parallel, endless, abrasive belts for simultaneously grinding several surfaces on a workpiece, such as cam lobes on a cam shaft. The grinding machine includes a contouring head assembly comprising a plurality of contour feed units, each contour unit including a curved back-up shoe, a back-up shoe holder, an adaptor for mounting the shoe holder, and a ball-spline mechanism is secured to the adaptor for transmitting power from a drive motor to the back-up shoe to press an abrasive belt, associated with the back-up shoe against a workpiece. A locating lip is defined on each adaptor, and a reference pad is established on the contouring head assembly.The adapters are divided into an upper and lower row, and the locating lips are formed oversized. One row of lips is ground to a desired distance from the reference pad, and the other row of lips is then ground relative to the previously ground row of locating lips.

Abstract: A crankshaft is rotated about its central longitudinal axis and abrasive belts are moved along paths substantially perpendicular to the crankshaft such that the abrasive surfaces of the belts grind the crankpin journals while the crankshaft rotates. The belts are guided independently of one another at the point of contact with the crankpin journals along a variable path according to the position of the crankpin journal around the central longitudinal axis of the crankshaft as the crankshaft rotates. Each belt may be guided by a thin, flat blade across which the belt slides, or it may be guided by a freely rotatable roller in substantially frictionless contact with the belt.

Abstract: A locking mechanism for the contouring head assembly of a belt grinding machine that employs multiple, parallel, abrasive grinding belts, and back-up shoes for pressing the belts against the surfaces on a workpiece to be ground. The locking mechanism secures the contouring head assembly to the bed of the grinding machine. The locking mechanism includes a protrusion, such as a ball, that is carried by the contouring head assembly and a pivotable arm with a socket defined near its free end. The pivotable arm is secured to a shaft that is driven by a rotary actuator, that is powered by a hydraulic motor. The socket engages the protrusion to securely support one side of the contouring feed assembly. A hydraulic cylinder forces a tapered plunger against the pivotable arm to enhance the locking action.

Abstract: The invention relates to an apparatus for grinding recesses into the ends of tubular workpieces with a revolving, driven grinding belt, the front pulley of which apparatus has a diameter that corresponds to the diameter of the desired recess in a tube end, which pulley can easily be exchanged. Moreover, the pipe to be ground is disposed on a support assembly constructed with a clamping device, which can in turn be rotated to permit the grinding of such tube ends at angles other than 90.degree..