Abstract: A method for the removal of fluorine or chlorine residue from an etched precision surface such as a semiconductor sample is provided which comprises exposing said precision surface to liquid CO.sub.2 under appropriate conditions that are sufficient to remove the residue from the precision surface. Cryogenic aerosol may be used in conjunction with liquid CO.sub.2.
Type:
Grant
Filed:
November 30, 1998
Date of Patent:
November 2, 1999
Assignee:
International Business Machines Corporation
Inventors:
Kenneth John McCullough, Robert Joseph Purtell, Laura Beth Rothman, Jin-Jwang Wu
Abstract: An apparatus for variably texturing a first surface of a rigid-disk substrate having an annular inner recording head-landing zone and an annular outer data zone surrounding the head-landing zone is characterized by a stepped force-exerting cylindrical stepped roller which forces a movable tape having an abrasive containing slurry on its surface to variably texture the zones of the surface of the substrate. A method of variably texturing a surface of a rigid-disc substrate includes the steps of providing a movable abrasive-containing tape between the stepped cylindrical roller and disk substrate to force the tape against the substrate with greater pressure on a head landing zone than on a data zone.
Abstract: A device for magnetic-abrasive machining of a part has the steps of forming a magnetic field, arranging a part to be machined in the magnetic field, supplying a magnetic-abrasive powder in a machining zone toward a surface of the part to be machined, and supplying a fluid jet under pressure toward the magnetic-abrasive powder so as to move the magnetic-abrasive powder relative the surface of the part to be machined.
Abstract: A composition and method of using the composition is provided which greatly aids in the removal of contaminants contained in a finishing solution used in a mass finishing process. The composition contains water, monoethanolamine borate, monoethanolamine octanoate and triethanolamine. The composition additionally contains either triethanolamine octanoate and an ethylene oxide-propylene oxide polymer or a linear alcohol ethoxylate and a cationic polyacrylamide.
Abstract: The mechanical roughening of the surface of a printing plate substrate comprising aluminum or an aluminum alloy is carried out by wet brushing with the use of a cylinder brush 1 in which brush rows 2, 3 having bundles of organic fibers 22 and metal wires 33 are arranged side by side on the surface 7. The suspension used for the wet brushing contains from 5 to 80% by weight of abrasive particles in water.
Type:
Grant
Filed:
May 23, 1996
Date of Patent:
July 7, 1998
Assignee:
AGFA-Gevaert AG
Inventors:
Stephan J. W. Platzer, Walter Mackert, Rudolf Neubauer
Abstract: A magnetic-abrasive machining of a part includes generating a magnetic field; introducing a part to be machined into the magnetic field; supplying a magnetic-abrasive powder into a machining zone toward a surface of the part to be machined; and generating a vacuum between the magnetic-abrasive powder and the surface of the part to be machined so that the magnetic-abrasive powder is moved relative to the surface of the part to be machined.
Type:
Grant
Filed:
March 27, 1997
Date of Patent:
July 7, 1998
Assignee:
Scientific Manufacturing Technologies, Inc.
Inventors:
Gennady Kremen, Savva Feigyn, Leonid Igelshteyn
Abstract: An improved Chemical Mechanical Planarization (CMP) method is provided for selectively removing a layer of metallization material such as tungsten or copper and a liner film such as Ti/Tin or Ta/TaN from the surface of an oxide layer of a semiconductor wafer. The method includes removing the metallization and liner layers with a first removal process which utilizes CMP polishing and an alumina-based slurry. The first removal process is stopped after the metallization layer is completely removed and before the liner film is completely removed. The remainder of the liner film is removed using a second removal process which includes CMP polishing using a neutral pH silica-based slurry which is selective to the liner film.
Type:
Grant
Filed:
December 6, 1995
Date of Patent:
October 14, 1997
Assignee:
International Business Machines Corporation
Inventors:
William Francis Landers, Matthew Jeremy Rutten, Thomas Robert Fisher, Jr., Dean Allen Schaffer
Abstract: A disk drive unit includes a housing enclosing a spindle and motor assembly, a number of magnetic data storage disks and a number of transducer heads. Each magnetic data storage disk includes a surface with a coarsely textured head landing zone and a finely textured data storage area. The coarse texture is applied over the fine texture in the landing zone without forming a step in elevation at the boundary. A method for texturing the magnetic disk includes first applying a fine texture to both the data storage area and the landing zone, and then applying a coarse texture to the landing zone only. Texturing apparatus includes peripheral disk clamps permitting axial compliant movement when the opposed disk surfaces are engaged by balanced, pneumatically biased abrading tools. A free abrasive slurry is introduced to pads carried by the tools.
Type:
Grant
Filed:
November 15, 1995
Date of Patent:
January 14, 1997
Assignee:
International Business Machines Corporation
Abstract: A method for repairing and refinishing an audio and video compact disk having a scratch or a plurality of scratches on a plastic cover bottom side of the disk. The scratch interfering with a laser beam reading digital information upwardly through the bottom side of the disk. The top side of the disk having a thin film layer of the recorded digital information secured thereon. The interference by the scratch causing an unwelcome "skip" during the play of the disk thereby lending its playing qualities unacceptable. The method of repair includes first inspecting the disk to determine the depth of the scratch. If the scratch is deep, a heavy cut, medium cut and fine cut cleaner may be used. The top side of the disk is then placed against the soft covered wheel and secured thereto. As the disk is spun at low rpm, the heavy cut cleaner is applied evenly across the surface of the bottom side of the disk using a clean cotton cloth or cotton pad.
Abstract: A constant range polishing apparatus for polishing an end face of an optical fiber connector ferrule. The apparatus comprises a polishing plate adapted to be rotated about a polishing plate axis for polishing the end face of the connector ferrule. The polishing plate includes a disc-shaped substrate having a circular surface including an outer ring area, an inner ring area disposed radially inwardly with respect to the outer ring area, and an inner portion disposed radially inwardly with respect to the inner ring area.
Type:
Grant
Filed:
April 21, 1994
Date of Patent:
April 2, 1996
Assignee:
Nippon Telegraph and Telephone Corporation
Abstract: A magnetic data storage disk includes a surface with a coarsely textured head landing zone and a finely textured data storage area. The coarse texture is applied over the fine texture in the landing zone without forming a step in elevation at the boundary. A method for texturing the magnetic disk includes first applying a fine texture to both the data storage area and the landing zone, and then applying a coarse texture to the landing zone only. Texturing apparatus includes peripheral disk clamps permitting axial compliant movement when the opposed disk surfaces are engaged by balanced, pneumatically biased abrading tools. A free abrasive slurry is introduced to pads carried by the tools.
Type:
Grant
Filed:
December 19, 1994
Date of Patent:
January 9, 1996
Assignee:
International Business Machines Corporation
Abstract: A method of cleaning, either continuously or intermittently, a pneumatically operated pulverized coal system by injecting into this system a stream of generally uniformly sized coke breeze particles. This coke breeze stream would abrade the interior surface of the pulverized coal system thereby cleaning it. Additionally, due to the high carbon content of the coke breeze, this substance will replace or displace a portion of the coal stream delivered to the furnace. Furthermore, such use of coke breeze will eliminate the need to dispose of this by-product in cases where alternative uses are not available.
Type:
Grant
Filed:
March 7, 1994
Date of Patent:
September 5, 1995
Assignee:
The Babcock & Wilcox Company
Inventors:
Robert A. Kuchner, Peter H. Scheuler, Jerald M. Wennerstrom
Abstract: In a powder beam etching method, a nozzle for injecting fine particles and a work are moved relative to each other in two perpendicular directions, viz., a scanning direction and a feed pitch direction during each scanning motion. During each return scanning motion the path followed is arranged to fall in between the path of the preceding forward motion.