Abstract: A substrate processing apparatus includes a liquid film forming unit 16A configured to form a liquid film of a liquid for anti-drying on a substrate; a drying processing unit 16B configured to dry the substrate; and a transfer mechanism 17 configured to transfer the substrate from the liquid film forming unit into the drying processing unit. By a transfer time adjusting operation of adjusting a volatilization amount of the liquid during a transfer of the substrate by adjusting a transfer time during which the substrate is transferred from the liquid film forming unit into the drying processing unit or by an initial liquid film thickness adjusting operation of adjusting a thickness of the liquid film formed in the liquid film forming unit, the thickness of the liquid film when a drying processing is begun in the drying processing unit is controlled to fall within a target range.

Abstract: Provided is a safety cabinet that prevents oversights in airtightness tests and HEPA filter penetration ratio tests even if a pathogen or the like leaks from a workspace wall surface in the interior of the safety cabinet. The safety cabinet includes: a work surface at the bottom of a workspace; a front panel at the front of the workspace; a work opening section below the front panel; and a first air purification means that filters exhaust air that is air discharged from within the workspace. The safety cabinet is characterized in that the non-workspace sides of a side wall surface and a back wall surface of the workspace are formed by an outer wall of a device with prescribed airtightness performance.

Abstract: A substrate treating apparatus and a substrate transporting method wherein a platform is disposed on a first ID block, and a platform is placed on a second ID block. A currently-used carrier platform is provided only on the first ID block. Accordingly, a substrate is transported in both a forward path and a return path between the first ID block and a second treating block. The substrate is returned not to the first ID block but to the second ID block disposed between the two treating blocks in the return path.

Abstract: A dust collector includes a housing, a passage structure and a dust collecting region. The passage structure is disposed in the housing, and configured to accelerate an airflow containing dust particles and separate the dust particles from the airflow. The dust collecting region is connected to the passage structure, and is configured to collect at least part of the dust particles of the airflow.

Abstract: A modular fan housing configured to hold an array of motors and fans is provided. The modular fan housing is configured for use in an air-handling system that delivers air to a ventilation system for at least a portion of a building. The fan housing comprises a plurality of modular units configured to be stacked adjacent to one another in at least one row or column to form an array. The modular units each include an interior surface and have a front end and a back end that define a chamber. The chambers are configured to receive the motors and fans. Sound attenuation layers extend along at least a portion of the interior surface of the corresponding chambers. The sound attenuation layers are positioned between at least some of the adjacent chambers.

Abstract: A popcorn popper is provided having a cabinet including a popcorn popping chamber, a kettle positioned within the popcorn popping chamber, at least one inlet provided in the top wall of the popcorn popping chamber configured to receive effluent from the kettle when popping popcorn and a recirculation passage in fluid communication with the at least one inlet that is configured to receive effluent from the at least one inlet. A filter is positioned in the recirculation passage and a blower including a housing in fluid communication with the recirculation passage is provided with an outlet of the housing being configured to direct filtered effluent into the popcorn popping chamber through the top wall and downwardly generally parallel to one of the side walls. A method of operating a popcorn popper is also provided.

Abstract: A filter cleaning device for an air conditioner includes: a casing; a filter that is disposed in the casing and through which an air flow passes; a cleaning brush that is contactable with the filter surface and removes particulate matter from the filter surface; and a dust box that receives the particulate matter, and includes a housing accommodating the cleaning brush and having an opening through which the cleaning brush protrudes to contact a filter surface, a suction tool that includes an outlet in the housing to communicate with the dust box, and applies a suction force to the dust box to remove the particulate matter from the dust box; and a lid that is movable between first and second positions, and closes the opening of the housing in the second position when the suction force is applied.

Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.

Abstract: A filter support sheet extruded from a fluoroplastic material includes a base section having spaced-apart ribs extending outwardly from at least one surface thereof. Segments between spaced-apart ribs provide flow channels and apertures are punched through the sheet in a predetermined pattern unaffected by the structure of the support sheet. A method includes the steps of: (1) extruding a thermoplastic, fluoroplastic material to form of a sheet; (2) passing the sheet through a nip region provided by opposed rollers; at least one having an outer surface with counter-sunk grooves. Counter-sunk grooves in one roller are aligned with an outer surface or counter-sunk grooves of the other roller in the nip region to form a ribbed sheet having ribs upstanding from at least one surface of said sheet; (3) setting the ribbed sheet and (4) punching apertures through the ribbed sheet in a predetermined pattern.

Abstract: An operating method of a wafer cassette handling apparatus includes at least the following steps. A stage that carries a wafer cassette is moved into a main body of a wafer cassette handling apparatus to open a cassette door of the wafer cassette. The stage that carries the wafer cassette is moved out of the main body after the cassette door is opened. A wafer is extracted from the wafer cassette and transferred to a processing system. Another operating method and a wafer cassette handling apparatus are also provided.

Abstract: A method of constructing a cleanroom pass-thru chamber includes bending a single sheet of material into a monolithic frame having a first side, an opposing second side, a third side extending between the first and second sides, an open front end and an open rear end. The first side defines a first lip at a free end thereof and the second side defines a second lip at a free end thereof. The monolithic frame is bent to form four coved internal corners. The first lip and the second lip define an open portion therebetween. A first plate is attached to the two opposing lips and extends therebetween, closing the open portion of the monolithic frame, thereby forming an inner shell. The inner shell is positioned within, and attached to, an outer frame.

Abstract: System and method to reduce risk of exposure to pathogens using a system comprising transportable clinical chambers, often configured with the exterior dimensions of a shipping container. The transportable chamber can be partially or completely self-contained, and configured for rapid transport and setup. The chamber is typically equipped with suitable automatic airborne sterilizing agent generators, sensors, mechanisms, and automatic air control devices. After suitable safety checks, the system isolates the interior air from external air, and activates an air phase anti-microbial agent generator, filling at least a portion of the chamber with an air-phase anti-pathogen agent. After sterilization, the invention deactivates the generator and then restores the connection to outside sterilized air.

Abstract: A wall member that covers lateral sides of an article storage rack includes a main wall portion that is installed in an orientation in which it extends along a vertical direction at a position that is spaced apart upward from an installation floor, and a sub-wall portion that is installed at a position that is spaced apart upward from the installation floor. An inlet port is formed at an upper end of the main wall portion, a first space surrounded by the main wall portion and a second space directly below the sub-wall portion are in communication with each other, an outlet port is formed below an end portion of the sub-wall portion on a second side, and an end portion of the sub-wall portion on a first side is connected to a lower end of the main wall portion in a state in which the flow of air between the sub-wall portion and the main wall portion is restricted.

Abstract: The apparatus of the Invention is a modular gas utility raceway for providing gas service within a clean room. The modular utility raceway has a front face and a back face coinciding with the inside and outside surfaces of the clean room walls. The utility raceway includes a vertically-oriented box-shaped beam that is open at the top to allow escape of any leaked gas above the ceiling of the clean room for the safety of clean room occupants. A support bracket supports gas pipes and connectors and extends above the top side of the clean room ceiling and discourages a user from blocking the open top of the box-shaped beam.

Abstract: A method for configuring a clean room (2) for the manufacture of pharmaceutical products and the manufacture of pharmaceutical products includes the steps: selecting a pharmaceutical product for the manufacture in the clean room (2); determining one or a plurality of specific devices (16) and/or one or a plurality of specific materials (18) for the manufacture of the selected pharmaceutical product; and assigning locations for the particular, respectively specific devices (16) and/or specific materials (18) in the clean room (2) and, that is, by using a navigation system (4). The navigation system (4) issues at least one notification (6, 8, 10, 12, 14) associated with a location in the clean room (2) indicating where the specific device (16) and/or the specific material (18) for the manufacture of the selected pharmaceutical product is/are to be placed.

Abstract: A system and method for a distributed earthquake analysis and reporting system are provided. The system includes a facility control system at a facility that obtains earthquake information sent from one or more seismic sensors, and sends the earthquake information over a network directly or indirectly to other facility control systems. The facilities which include the facility control systems can be owned/operated by different business organizations or by the same organization, in examples. The facility control system at each facility responds to received earthquake information from the other facility control systems by configuring building systems such as public address systems to warn building occupants, industrial machine controllers to stop machinery, and elevator controllers to stop elevators at a nearest floor and open its doors, in examples.

Abstract: An improved stocker configuration for storing workpieces in a fabrication facility is disclosed, employing workpiece compartments arranged stationarily around a robot handling assembly. The robot handler can be designed with three degrees of freedom, to improve speed, throughput and minimum particle generation. In addition, the stocker storage area is stationary with the movable components are the robot assembly, thus further contributing to the cleanliness of the storage stocker. The stocker configuration can be open storage area for fast access, space saving and ease of clean air purging. The stocker configuration can provide highly dense workpiece storage, utilizing a circumferential edge gripper robot handling assembly.

Abstract: A data center includes a floor; a side wall configured to partition a space above the floor into a room; a plurality of heat generating device columns arranged in a row direction on the floor, each of the plurality of heat generating device columns including a plurality of heat generating devices that are arranged to form a column in a column direction; an air blower including a plurality of air outlets disposed along a side with respect to the row direction, facing the plurality of heat generating device columns, the air blower being configured to blow air in the column direction from, the plurality of air outlets; and an inclined ceiling that increases in height from a first side toward a second side in the row direction.

Abstract: A stocker includes a wall that separates inside and outside of the stocker, a storage area on an inner side of the wall to store articles, a duct on a wall side of the storage area and extending in a vertical direction, an inlet at an upper end of the duct to introduce air flowing downward into the duct, a flow regulator to regulate an airflow between an upper side and a lower side of the duct, blowout openings on a storage area side of the duct to blow out air to the storage area, and a fan on a lower side of the flow regulator of the duct to draw in outside air and introduce the outside air into the duct.

Abstract: An airborne pathogen extraction system that provides for continuous airborne pathogen particle extraction from a specifically targeted area in a room or a specifically targeted area proximate to a user. The pathogenic particles are filtered and/or disinfected before the air is returned proximate to the originating location, or are directed an area away from the user(s). The airborne pathogen extraction systems and methods lower the chances of contagion or infection from airborne pathogens, such as viruses.

Abstract: An air conditioner includes a base including a first fixation member, a front panel including a second fixation member, and a filter. A first end of the filter is detachably connected to the first fixation member, and a second end of the filter is detachably connected to the second fixation member. At least one of the base or the front panel includes a supporting member abutting against the filter to cause the filter to bend in an arc shape.

Abstract: The present invention relates to an apparatus for removing fume which includes, a wafer cassette for stacking wafers; and an exhaust for exhausting the fume of the wafers stacked in the wafer cassette, wherein the wafer cassette includes stacking shelves provided at both sides for stacking wafers; and a front opening for incoming and outgoing of the wafers which are being stacked in the stacking shelf, wherein the stacking shelves include multiple inclined ramp portions which are slanted towards the wafers stacked in the stacking shelves as they travel towards the front opening, wherein a purge gas outlet is provided in the inclined ramp portion for supplying purge gas for the wafers stacked in the stacking shelves. According to the present invention, the residual process gases on wafers can be removed efficiently.

Abstract: The present disclosure relates to a storage and retrieval vehicle for a pallet storage system having at least one racking system and having at least one floor rail for moving the storage and retrieval vehicle, wherein the storage and retrieval vehicle comprises at least one linear guide, in particular a telescopic linear guide, outwardly coupled via at least one vertical guide to a base body of the storage and retrieval vehicle, and wherein the base body is rotatably arranged, in particular by 360°, about the vertical axis. The present disclosure further relates to a pallet storage system having a corresponding storage and retrieval vehicle and to a modular floor rail for a pallet storage system.

Abstract: Biosafety units, methods of making and sealing the same are disclosed herein. The present invention includes a unitary structure able to be validated for pharmaceutical manufacturing comprising: at least one controlled air, sealable, sterilizable cleanroom; a mechanical system room adjacent to and separate from the cleanroom comprising: one or more air handling units that provide conditioned air to the cleanroom; and one or more power busses that provide power to electrical outlets in the cleanroom from two sources, wherein the at least two power supplies are connectable to one or more external electrical power sources; an integrated fire suppression system integral to the cleanroom; and one or more corridor connectors, wherein a corridor can be attached at the corridor connector.

Abstract: A module for housing electronic and electromechanical equipment and for managing waste heat during surgery. The module including a lower section configured to house unrelated waste heat-producing electronic and electromechanical surgical equipment during surgery and a tower-like upper section located above the lower section. A rear portion of the lower section is configured to fit into an unused space under an arm-board of a surgical table. The upper section is configured to be positioned adjacent an anesthesia side of an arm-board of the surgical table and the upper section is configured to accommodate mounting of equipment controls and a display at a height to be viewed and operated by a user.

Abstract: Systems and methods provide airflow to a flight deck from a passenger entry area. The system includes a fan mounted within a door separating a flight deck from a passenger entry area. The fan is configured to direct airflow from the passenger entry area into the flight deck. The fan having a shield positioned adjacent to the passenger entry area that is configured to conceal the fan.

Abstract: A purge device capable of appropriately purging a container in accordance with a type of a container includes a type detector that detects a type of a container to be purged, and a purge controller that determines purge conditions for the container based on a detection result from the type detector.

Abstract: A controlling method for a wafer transportation part and a load port part on an EFEM includes a fixing step of fixing a container on an installation stand of the load port part, a first cleaning step of connecting a bottom nozzle of the load port part to multiple bottom holes formed on a bottom surface of the container and introducing a cleaning gas into the container and discharging a gas from the container via the nozzle, a connection step of connecting the container and the transportation room, and a wafer transportation step of transporting the wafer from the container to a processing room via the opening and the transportation room and transporting the wafer from the processing room to the container via the transportation room and the opening.

Abstract: The present invention relates to an aluminum repair station. More specifically, the present invention provides an enclosed area having a floor, a ceiling, and a rigid wall, and a curtain wall, said rigid wall and said curtain wall defining a perimeter of said enclosed area between the ceiling and the floor, said ceiling comprising an exhaust system for circulating air into and out of the enclosed area.

Abstract: Apparatus and techniques for use in manufacturing a light emitting device, such as an organic light emitting diode (OLED) device can include using one or more modules having a controlled environment. The controlled environment can be maintained at a pressure at about atmospheric pressure or above atmospheric pressure. The modules can be arranged to provide various processing regions and to facilitate printing or otherwise depositing one or more patterned organic layers of an OLED device, such as an organic encapsulation layer (OEL) of an OLED device. In an example, uniform support for a substrate can be provided at least in part using a gas cushion, such as during one or more of a printing, holding, or curing operation comprising an OEL fabrication process. In another example, uniform support for the substrate can be provided using a distributed vacuum region, such as provided by a porous medium.

Abstract: A flexible industrial air filter system including a plurality of workstations, air filter units and a plurality of duct sections interconnected together to define a modular duct work grid. T-connectors are mounted between some of the sections with the workstations and air filter units positioned generally adjacent the T-connectors. Connection ducts interconnect the T-connectors and either the workstations or air filter units. Quick release connectors connect the connection ducts to the T-connectors and to the work stations and the air filter units such that the workstations and air filter units can be quickly added, removed, moved, and repositioned as desired.

Abstract: A health booth (10) includes a shell (20), at least one chair (30), and at least one measurement arrangement (31, 32, 33, 34) for measuring data relative to the health of a user. The booth includes: a determination apparatus (41-50) for determining, at the time of taking a measurement, at least one condition under which said measurement is taken; and a storage device for storing the measurement results in a data structure together with said condition.

Abstract: An air supply system (200, 300) for providing a clean air flow (250) in a room (1) is provided. The air supply system (200, 300) comprises a first air supply section (120) through which a first flow of clean air is supplied with a lower temperature than the temperature of the ambient air in the room (1), and a second air supply section (230) through which a second flow of clean air is supplied. The first air supply section (120) is arranged to form a gravitationally induced downward flow, whereas the second air supply section (230) is arranged to adjust the velocity (vi) of the second flow of clean air when entering the second air supply section (230) to a predetermined velocity (v2), and is adapted to direct the second flow of clean air downwards. A method (600) for providing a clean air flow in a room is further provided.

Abstract: The present invention relates to an air filter housing for supplying air to a space, said air filter housing being configured to be arranged in a ceiling of said space, said housing having a mouth facing downward, said mouth comprising a sealing surface configured to receive a panel type air filter comprising a frame and a filter medium held within said frame, such that a sealing connection between said sealing surface and said frame is achieved, characterized in that said filter housing further comprises at least one resilient member arranged below the sealing surface such that when a panel type air filter is inserted into the mouth, the resilient member will be deformed by the filter frame as the filter passes the resilient member, and resume its original shape once the filter has passed, such that the filter is retained between the sealing surface and the resilient member.

Abstract: In a state where an operator performs operation using a safety cabinet while confirming standard operating procedures and sample data, a display device such as a monitor screen provided in the safety cabinet is arranged at a position that is not subject to effects of deterioration due to diffused reflection of light from a fluorescent lamp or sterilization lamp irradiation, and that does not generate resistance in an airflow path, while also protecting the display device from decontamination operation and preventing dirt from being adhered to a portion related to display.

Abstract: A filter has a rectilinear configuration with top and bottom surfaces, front and rear surfaces, and side surfaces. A ceiling has a coupling plate with a test port and a sensor port. Test equipment located below the ceiling is adapted to generate a flow of input aerosol. A coupling line is positioned between the test equipment and the test port. Sensor equipment is positioned below the ceiling and is adapted to sense a flow of output aerosol. An output line is positioned between the sensor equipment and the sensor port. First and second intermediate lines are operatively coupled between the test port and the filter and between the filter and the sensor port. An air conditioner line is operatively coupled to the top surface of the filter.

Abstract: A mini-environment apparatus includes a wafer transportation machine transporting a wafer, a wafer transportation room having the machine and passed by the wafer transported to a processing room, a circulating passage where a gas detoured from the transportation room flows, a blowing means forming a circulating current falling in the transportation room and rising in the passage, a current member arranged in a ceiling part of the transportation room and laminarizing the current and introducing this laminarized current into the transportation room, a particle removal filter arranged in either the ceiling part of the transportation room or the passage, and a chemical filter arranged in the passage detachably and separately from the removal filter. The chemical filter is arranged at a position lower than a lowest position where the wafer may pass through in the transportation room.

Abstract: The invention relates to a device for producing processed cheese portions, comprising a plurality of modules that are arranged successively in the direction of production, in which the processed cheese is formed into a band, cooled, and divided into portions, wherein the modules define a production space through which the processed cheese travels during the production of the processed cheese portions. The production space is enclosed by a spray-proof casing, wherein the casing comprises a frame structure and a plurality of sheet metal elements which are detachably connected to the frame structure, and wherein a sealing hose is arranged between a sheet metal element and the area of the frame structure opposite thereto, and encircles the sheet metal element or the area of the frame structure opposite thereto.

Abstract: An airflow treatment device configured to be installed inline in the ductwork of an air handling system (e.g., HVAC system) in a manner that is substantially free of obstructing the airflow through the ductwork or requiring any supplemental power to treat the airflow passing by the treatment device. The disclosed airflow treatment device can also be maintained substantially free of any interruptions, disassembly or downtime to the air handling system after initial inline installation of the disclosed device. In one arrangement, the airflow treatment device is capable of accepting a threaded odor neutralizer container at its base. Ductwork need only be disassembled once to attach the disclosed device inline in the airflow path of the ductwork. When the odor neutralizing agent needs replenished, the container can be detached from the device, replenished, and reattached to the device free of disruption to the air flow of the air handling system.

Abstract: A modular vivarium is assembled from pre-manufactured, transportable, sterile modules of distinct types, called pods. A hallway pod forms a spine, with cage-rack pods, ingress/egress pods and optional HVACPIT pods providing HVAC, power and IT services connected as spur pods to the hallway. Supplies and waste are also within modular pods. Temporary or single-use seals cover doorways during transit. Modules are joined or removed while maintaining sterility on both sides of the flush-to-wall doorway junction. A spur pod is sterilely connected to a hallway pod by aligning respective doors proximal, placing a seal between the pods around the doorways, sterilizing air between the pods, then removing the temporary seals from each doorway. Pods may be constructed from easily transportable ISO intermodal containers.

Abstract: The present teachings relate to various embodiments of an hermetically-sealed gas enclosure assembly and system that can be readily transportable and assemblable and provide for maintaining a minimum inert gas volume and maximal access to various devices and apparatuses enclosed therein. Various embodiments of an hermetically-sealed gas enclosure assembly and system of the present teachings can have a gas enclosure assembly constructed in a fashion that minimizes the internal volume of a gas enclosure assembly, and at the same time optimizes the working space to accommodate a variety of footprints of various OLED printing systems. Various embodiments of a gas enclosure assembly so constructed additionally provide ready access to the interior of a gas enclosure assembly from the exterior during processing and readily access to the interior for maintenance, while minimizing downtime.

Abstract: A storage facility is achieved that is capable of suppressing, with a simple configuration, the inactive gas concentration in the gas discharged to the outside of a storage space. The storage facility includes a storage device including a plurality of storage sections in an inside of a storage space formed so as to be partitioned from the outside, and an inactive gas supply portion that supplies inactive gas to an inside of a container stored in the storage section. The storage device includes a gas discharge portion that discharges, to the outside of the storage space, gas within the storage space that contains the gas discharged from the container. The gas discharge portion includes a restricting orifice portion serving as a restricting portion that restricts a flow rate of gas, and the restricting orifice portion is formed below a region where the storage sections are disposed.

Abstract: Disclosed is the redirection of air flow in a sub-plenum using a multi-directional plume that is attached to the bottom surface of an air-grate floor panel. The air-grate floor panel 102 has openings which allow redirected air to flow in an upward direction to cool computer equipment, including servers. The multi-directional plume has a series of vanes that are disposed in various different directions to deflect a flow of air conditioning air through a sub-plenum in a vertical direction to flow through openings in the air-grate floor panel. Since the multi-directional plume is capable of redirecting air from various different directions in the sub-plenum, the air-grate floor panels do not have to be repositioned to capture air flow from any particular direction.

Abstract: Disclosed is an air shower room. The shower room comprises a chamber, an air supply apparatus, an air exhaust apparatus, a sensing mechanism and a controller. The sensing mechanism is disposed at a height inside the chamber and operable to detect presence of the user's arm at the height. The height is chosen such that the user has to raise his arm such that the presence of the arm at the height can be detected by the sensing mechanism. The controller is configured to control operations of the air supply apparatus and the air exhaust apparatus based on the detection by the sensing mechanism. Also disclosed is a dust-free workshop.

Abstract: Laminar-flow operating theater that comprises a support (4) that defines a horizontal plane, on which the patient (2) rests, which has a main longitudinal direction, on which support (4) there is, in addition, an operating region (R), laminar-flow-emitting unit (5) and an air-absorption unit (6), wherein the laminar-flow-emitting unit (5) emits the laminar flow in a horizontal direction which is oblique with respect to the longitudinal position of the support (4) such that said direction of incidence of the flow reaches the operating region (R) for the patient (4), and the air-absorption unit (6) is in a horizontal absorption direction which is oblique with respect to said longitudinal direction of the patient's support (4).

Abstract: A processing facility for manufacturing integrated circuits on semiconductor wafers is provided with at least one radiation generator that generates an EUV (extreme ultraviolet) radiation that is supplied to at least one lithography machine, housed in a factory building, for exposure of the semiconductor wafers. The radiation generator is housed in a building or a building section separate from the factory building. At least one beam guide extends from the building or the building section to the factory building, wherein the EUV radiation is supplied from the building or the building section through the at least one beam guide to the factory building. At least one supply line branches off at an obtuse angle from the at least one beam guide inside the factory building, wherein at least a portion of the EUV radiation is supplied through the at least one supply line to the lithography machine.

Abstract: A transport vehicle system includes: a first transport vehicle configured to travel on a lower track in one direction; a second transport vehicle configured to travel on an upper track in one direction; a first transfer section onto which a conveyed object is delivered from the second transport vehicle and from which the conveyed object is received by the first transport vehicle; and a second transfer section onto which the conveyed object is delivered from the first transport vehicle and from which the conveyed object is received by the second transport vehicle.

Abstract: A modular vivarium is constructed entirely from transportable, sterile modules of distinct types, called pods. A hallway pod forms a spine, with cage-rack pods, ingress/egress pods and optional VHACPIT pods providing HVAC, power and IT services connected as spur pods to the hallway. Supplies and waste are also within modular pods. Temporary or single-use seals cover doorways during transit. Modules are joined or removed while maintaining sterility on both sides of the flush-to-wall doorway junction. Supply and return air for all pods is through hallway based ducting. Pods may be constructed from ISO intermodal containers. Embodiments have no permanent buildings. Pods may be moved, leveled and aligned for joining via special supports. Cage-rack pods are configured with two cage racks and a single isle permitting robotic cage placement and retrieval. Embodiments provide vibration, noise and earthquake isolation.

Abstract: A structural beam and light fixture for a walkable ceiling of a clean room is composed of an elongated channel and a lamp disposed in the elongated channel. The lamp is configured to direct light through the bottom side of the elongated channel. The structural beam and light fixture is attached to adjoining ceiling components and is configured to support a load applied to the adjoining ceiling components. The structural beam and light fixture, combined with other walkable ceiling components, define ceiling top and bottom sides that are flush.

Abstract: A system and method provide for monitoring and controlling fluid flow in semiconductor manufacturing apparatuses. The method and system include a vortex flow meter coupled to a digital readout that displays the measured flow rate and trip point. The flow meter display includes input devices used to adjust the trip point. The system and method provide for sending signals via a custom relay to the semiconductor manufacturing apparatus which is adapted to terminate a processing operation or change the fluid flow if the trip point is tripped. The system and method also provide for sending an electrical signal to a computer by way of a data acquisition unit and a converter. The converter converts the signal to a communication protocol consistent with the computer network and provides fluid flow information and trip point data as a function of time to the computer which then displays such data graphically.