Clean Room Patents (Class 454/187)
  • Patent number: 10968630
    Abstract: The apparatus of the Invention is a modular gas utility raceway for providing gas service within a clean room. The modular utility raceway has a front face and a back face coinciding with the inside and outside surfaces of the clean room walls. The utility raceway includes a vertically-oriented box-shaped beam that is open at the top to allow escape of any leaked gas above the ceiling of the clean room for the safety of clean room occupants. A support bracket supports gas pipes and connectors and extends above the top side of the clean room ceiling and discourages a user from blocking the open top of the box-shaped beam.
    Type: Grant
    Filed: August 8, 2019
    Date of Patent: April 6, 2021
    Assignee: AES Clean Technology, Inc.
    Inventors: Richard Dobson, Ralph J Melfi, Gilberto R Perez, John M Thomas
  • Patent number: 10955812
    Abstract: A method for configuring a clean room (2) for the manufacture of pharmaceutical products and the manufacture of pharmaceutical products includes the steps: selecting a pharmaceutical product for the manufacture in the clean room (2); determining one or a plurality of specific devices (16) and/or one or a plurality of specific materials (18) for the manufacture of the selected pharmaceutical product; and assigning locations for the particular, respectively specific devices (16) and/or specific materials (18) in the clean room (2) and, that is, by using a navigation system (4). The navigation system (4) issues at least one notification (6, 8, 10, 12, 14) associated with a location in the clean room (2) indicating where the specific device (16) and/or the specific material (18) for the manufacture of the selected pharmaceutical product is/are to be placed.
    Type: Grant
    Filed: January 10, 2019
    Date of Patent: March 23, 2021
    Inventors: Stefan Schlack, Lars Boettcher, Mario Becker
  • Patent number: 10955573
    Abstract: A system and method for a distributed earthquake analysis and reporting system are provided. The system includes a facility control system at a facility that obtains earthquake information sent from one or more seismic sensors, and sends the earthquake information over a network directly or indirectly to other facility control systems. The facilities which include the facility control systems can be owned/operated by different business organizations or by the same organization, in examples. The facility control system at each facility responds to received earthquake information from the other facility control systems by configuring building systems such as public address systems to warn building occupants, industrial machine controllers to stop machinery, and elevator controllers to stop elevators at a nearest floor and open its doors, in examples.
    Type: Grant
    Filed: April 5, 2019
    Date of Patent: March 23, 2021
    Assignee: Sensormatic Electronics, LLC
    Inventor: Thomas P. Naughton
  • Patent number: 10930536
    Abstract: An improved stocker configuration for storing workpieces in a fabrication facility is disclosed, employing workpiece compartments arranged stationarily around a robot handling assembly. The robot handler can be designed with three degrees of freedom, to improve speed, throughput and minimum particle generation. In addition, the stocker storage area is stationary with the movable components are the robot assembly, thus further contributing to the cleanliness of the storage stocker. The stocker configuration can be open storage area for fast access, space saving and ease of clean air purging. The stocker configuration can provide highly dense workpiece storage, utilizing a circumferential edge gripper robot handling assembly.
    Type: Grant
    Filed: April 16, 2018
    Date of Patent: February 23, 2021
    Inventor: Lutz Rebstock
  • Patent number: 10925184
    Abstract: A data center includes a floor; a side wall configured to partition a space above the floor into a room; a plurality of heat generating device columns arranged in a row direction on the floor, each of the plurality of heat generating device columns including a plurality of heat generating devices that are arranged to form a column in a column direction; an air blower including a plurality of air outlets disposed along a side with respect to the row direction, facing the plurality of heat generating device columns, the air blower being configured to blow air in the column direction from, the plurality of air outlets; and an inclined ceiling that increases in height from a first side toward a second side in the row direction.
    Type: Grant
    Filed: November 5, 2018
    Date of Patent: February 16, 2021
    Assignees: NTT Ltd Japan Corporation, RagingWire Data Centers, Inc.
    Inventors: Tomoki Morita, Kuang Min Tan, Naoki Yoshida, Taku Oyama, Robert Patrick Wichert
  • Patent number: 10889438
    Abstract: A stocker includes a wall that separates inside and outside of the stocker, a storage area on an inner side of the wall to store articles, a duct on a wall side of the storage area and extending in a vertical direction, an inlet at an upper end of the duct to introduce air flowing downward into the duct, a flow regulator to regulate an airflow between an upper side and a lower side of the duct, blowout openings on a storage area side of the duct to blow out air to the storage area, and a fan on a lower side of the flow regulator of the duct to draw in outside air and introduce the outside air into the duct.
    Type: Grant
    Filed: January 11, 2018
    Date of Patent: January 12, 2021
    Assignee: MURATA MACHINERY, LTD.
    Inventors: Yu Kusama, Fumiki Goto
  • Patent number: 10821202
    Abstract: An airborne pathogen extraction system that provides for continuous airborne pathogen particle extraction from a specifically targeted area in a room or a specifically targeted area proximate to a user. The pathogenic particles are filtered and/or disinfected before the air is returned proximate to the originating location, or are directed an area away from the user(s). The airborne pathogen extraction systems and methods lower the chances of contagion or infection from airborne pathogens, such as viruses.
    Type: Grant
    Filed: June 25, 2020
    Date of Patent: November 3, 2020
    Inventor: Arnold Chase
  • Patent number: 10767897
    Abstract: An air conditioner includes a base including a first fixation member, a front panel including a second fixation member, and a filter. A first end of the filter is detachably connected to the first fixation member, and a second end of the filter is detachably connected to the second fixation member. At least one of the base or the front panel includes a supporting member abutting against the filter to cause the filter to bend in an arc shape.
    Type: Grant
    Filed: December 5, 2019
    Date of Patent: September 8, 2020
    Assignees: GD MIDEA AIR-CONDITIONING EQUIPMENT CO., LTD., MIDEA GROUP CO., LTD.
    Inventors: Hui Yu, Yuanshun Huang
  • Patent number: 10714367
    Abstract: The present invention relates to an apparatus for removing fume which includes, a wafer cassette for stacking wafers; and an exhaust for exhausting the fume of the wafers stacked in the wafer cassette, wherein the wafer cassette includes stacking shelves provided at both sides for stacking wafers; and a front opening for incoming and outgoing of the wafers which are being stacked in the stacking shelf, wherein the stacking shelves include multiple inclined ramp portions which are slanted towards the wafers stacked in the stacking shelves as they travel towards the front opening, wherein a purge gas outlet is provided in the inclined ramp portion for supplying purge gas for the wafers stacked in the stacking shelves. According to the present invention, the residual process gases on wafers can be removed efficiently.
    Type: Grant
    Filed: May 22, 2018
    Date of Patent: July 14, 2020
    Inventor: Bum Je Woo
  • Patent number: 10669096
    Abstract: The present disclosure relates to a storage and retrieval vehicle for a pallet storage system having at least one racking system and having at least one floor rail for moving the storage and retrieval vehicle, wherein the storage and retrieval vehicle comprises at least one linear guide, in particular a telescopic linear guide, outwardly coupled via at least one vertical guide to a base body of the storage and retrieval vehicle, and wherein the base body is rotatably arranged, in particular by 360°, about the vertical axis. The present disclosure further relates to a pallet storage system having a corresponding storage and retrieval vehicle and to a modular floor rail for a pallet storage system.
    Type: Grant
    Filed: July 21, 2017
    Date of Patent: June 2, 2020
    Assignee: LIEBHERR-VERZAHNTECHNIK GMBH
    Inventors: Thomas Mattern, Markus Zollitsch
  • Patent number: 10654036
    Abstract: Biosafety units, methods of making and sealing the same are disclosed herein. The present invention includes a unitary structure able to be validated for pharmaceutical manufacturing comprising: at least one controlled air, sealable, sterilizable cleanroom; a mechanical system room adjacent to and separate from the cleanroom comprising: one or more air handling units that provide conditioned air to the cleanroom; and one or more power busses that provide power to electrical outlets in the cleanroom from two sources, wherein the at least two power supplies are connectable to one or more external electrical power sources; an integrated fire suppression system integral to the cleanroom; and one or more corridor connectors, wherein a corridor can be attached at the corridor connector.
    Type: Grant
    Filed: October 6, 2017
    Date of Patent: May 19, 2020
    Assignee: G-CON Manufacturing, Inc.
    Inventors: R. Barry Holtz, Troy Arledge, Phillip B. Maples, David M. Shanahan
  • Patent number: 10638638
    Abstract: A module for housing electronic and electromechanical equipment and for managing waste heat during surgery. The module including a lower section configured to house unrelated waste heat-producing electronic and electromechanical surgical equipment during surgery and a tower-like upper section located above the lower section. A rear portion of the lower section is configured to fit into an unused space under an arm-board of a surgical table. The upper section is configured to be positioned adjacent an anesthesia side of an arm-board of the surgical table and the upper section is configured to accommodate mounting of equipment controls and a display at a height to be viewed and operated by a user.
    Type: Grant
    Filed: August 1, 2019
    Date of Patent: April 28, 2020
    Assignee: Augustine Biomedical + Design, LLC
    Inventors: Scott D. Augustine, Susan D. Augustine, Garrett J. Augustine, Brent M. Augustine, Ryan S. Augustine, Randall C. Arnold
  • Patent number: 10618660
    Abstract: Systems and methods provide airflow to a flight deck from a passenger entry area. The system includes a fan mounted within a door separating a flight deck from a passenger entry area. The fan is configured to direct airflow from the passenger entry area into the flight deck. The fan having a shield positioned adjacent to the passenger entry area that is configured to conceal the fan.
    Type: Grant
    Filed: November 20, 2017
    Date of Patent: April 14, 2020
    Assignee: THE BOEING COMPANY
    Inventor: David W. Kirkbride
  • Patent number: 10586721
    Abstract: A purge device capable of appropriately purging a container in accordance with a type of a container includes a type detector that detects a type of a container to be purged, and a purge controller that determines purge conditions for the container based on a detection result from the type detector.
    Type: Grant
    Filed: June 20, 2016
    Date of Patent: March 10, 2020
    Assignee: MURATA MACHINERY, LTD.
    Inventors: Masanao Murata, Takashi Yamaji
  • Patent number: 10566227
    Abstract: A controlling method for a wafer transportation part and a load port part on an EFEM includes a fixing step of fixing a container on an installation stand of the load port part, a first cleaning step of connecting a bottom nozzle of the load port part to multiple bottom holes formed on a bottom surface of the container and introducing a cleaning gas into the container and discharging a gas from the container via the nozzle, a connection step of connecting the container and the transportation room, and a wafer transportation step of transporting the wafer from the container to a processing room via the opening and the transportation room and transporting the wafer from the processing room to the container via the transportation room and the opening.
    Type: Grant
    Filed: December 8, 2016
    Date of Patent: February 18, 2020
    Assignee: TDK CORPORATION
    Inventors: Tsutomu Okabe, Hidetoshi Horibe
  • Patent number: 10544950
    Abstract: The present invention relates to an aluminum repair station. More specifically, the present invention provides an enclosed area having a floor, a ceiling, and a rigid wall, and a curtain wall, said rigid wall and said curtain wall defining a perimeter of said enclosed area between the ceiling and the floor, said ceiling comprising an exhaust system for circulating air into and out of the enclosed area.
    Type: Grant
    Filed: May 29, 2015
    Date of Patent: January 28, 2020
    Assignee: Global Finishing Solutions LLC.
    Inventors: William McFadden, Michael Lampshire
  • Patent number: 10512931
    Abstract: Apparatus and techniques for use in manufacturing a light emitting device, such as an organic light emitting diode (OLED) device can include using one or more modules having a controlled environment. The controlled environment can be maintained at a pressure at about atmospheric pressure or above atmospheric pressure. The modules can be arranged to provide various processing regions and to facilitate printing or otherwise depositing one or more patterned organic layers of an OLED device, such as an organic encapsulation layer (OEL) of an OLED device. In an example, uniform support for a substrate can be provided at least in part using a gas cushion, such as during one or more of a printing, holding, or curing operation comprising an OEL fabrication process. In another example, uniform support for the substrate can be provided using a distributed vacuum region, such as provided by a porous medium.
    Type: Grant
    Filed: January 31, 2017
    Date of Patent: December 24, 2019
    Assignee: KATEEVA, INC.
    Inventors: Alexander Sou-Kang Ko, Justin Mauck, Eliyahu Vronsky, Conor F. Madigan, Eugene Rabinovich, Nahid Harjee, Christopher Buchner, Gregory Lewis
  • Patent number: 10488060
    Abstract: A flexible industrial air filter system including a plurality of workstations, air filter units and a plurality of duct sections interconnected together to define a modular duct work grid. T-connectors are mounted between some of the sections with the workstations and air filter units positioned generally adjacent the T-connectors. Connection ducts interconnect the T-connectors and either the workstations or air filter units. Quick release connectors connect the connection ducts to the T-connectors and to the work stations and the air filter units such that the workstations and air filter units can be quickly added, removed, moved, and repositioned as desired.
    Type: Grant
    Filed: November 14, 2017
    Date of Patent: November 26, 2019
    Assignee: ROBOVENT PRODUCTS GROUP, INC.
    Inventors: John Reid, James Reid
  • Patent number: 10445463
    Abstract: A health booth (10) includes a shell (20), at least one chair (30), and at least one measurement arrangement (31, 32, 33, 34) for measuring data relative to the health of a user. The booth includes: a determination apparatus (41-50) for determining, at the time of taking a measurement, at least one condition under which said measurement is taken; and a storage device for storing the measurement results in a data structure together with said condition.
    Type: Grant
    Filed: September 11, 2007
    Date of Patent: October 15, 2019
    Assignee: H4D INTERNATIONAL S.A.
    Inventors: Franck Baudino, Laurent Baudino
  • Patent number: 10408476
    Abstract: An air supply system (200, 300) for providing a clean air flow (250) in a room (1) is provided. The air supply system (200, 300) comprises a first air supply section (120) through which a first flow of clean air is supplied with a lower temperature than the temperature of the ambient air in the room (1), and a second air supply section (230) through which a second flow of clean air is supplied. The first air supply section (120) is arranged to form a gravitationally induced downward flow, whereas the second air supply section (230) is arranged to adjust the velocity (vi) of the second flow of clean air when entering the second air supply section (230) to a predetermined velocity (v2), and is adapted to direct the second flow of clean air downwards. A method (600) for providing a clean air flow in a room is further provided.
    Type: Grant
    Filed: December 2, 2014
    Date of Patent: September 10, 2019
    Assignee: Avidicare AB
    Inventors: Peter Ekolind, Henrik Skredsvik
  • Patent number: 10363507
    Abstract: The present invention relates to an air filter housing for supplying air to a space, said air filter housing being configured to be arranged in a ceiling of said space, said housing having a mouth facing downward, said mouth comprising a sealing surface configured to receive a panel type air filter comprising a frame and a filter medium held within said frame, such that a sealing connection between said sealing surface and said frame is achieved, characterized in that said filter housing further comprises at least one resilient member arranged below the sealing surface such that when a panel type air filter is inserted into the mouth, the resilient member will be deformed by the filter frame as the filter passes the resilient member, and resume its original shape once the filter has passed, such that the filter is retained between the sealing surface and the resilient member.
    Type: Grant
    Filed: September 3, 2015
    Date of Patent: July 30, 2019
    Assignee: Camfil AB
    Inventors: Mathieu Hugues, Stefan Ljungström
  • Patent number: 10350588
    Abstract: In a state where an operator performs operation using a safety cabinet while confirming standard operating procedures and sample data, a display device such as a monitor screen provided in the safety cabinet is arranged at a position that is not subject to effects of deterioration due to diffused reflection of light from a fluorescent lamp or sterilization lamp irradiation, and that does not generate resistance in an airflow path, while also protecting the display device from decontamination operation and preventing dirt from being adhered to a portion related to display.
    Type: Grant
    Filed: December 22, 2015
    Date of Patent: July 16, 2019
    Assignee: Hitachi Industrial Equipment Systems Co., Ltd.
    Inventors: Takeshi Kaneko, Hirotoshi Sato, Yukio Mori, Yukiyasu Sano
  • Patent number: 10345215
    Abstract: A filter has a rectilinear configuration with top and bottom surfaces, front and rear surfaces, and side surfaces. A ceiling has a coupling plate with a test port and a sensor port. Test equipment located below the ceiling is adapted to generate a flow of input aerosol. A coupling line is positioned between the test equipment and the test port. Sensor equipment is positioned below the ceiling and is adapted to sense a flow of output aerosol. An output line is positioned between the sensor equipment and the sensor port. First and second intermediate lines are operatively coupled between the test port and the filter and between the filter and the sensor port. An air conditioner line is operatively coupled to the top surface of the filter.
    Type: Grant
    Filed: August 19, 2016
    Date of Patent: July 9, 2019
    Assignee: Performance Assurance Systems LLC
    Inventors: Dean A. Pedalino, Peter L. Day, John R. Bentley, II
  • Patent number: 10340157
    Abstract: A mini-environment apparatus includes a wafer transportation machine transporting a wafer, a wafer transportation room having the machine and passed by the wafer transported to a processing room, a circulating passage where a gas detoured from the transportation room flows, a blowing means forming a circulating current falling in the transportation room and rising in the passage, a current member arranged in a ceiling part of the transportation room and laminarizing the current and introducing this laminarized current into the transportation room, a particle removal filter arranged in either the ceiling part of the transportation room or the passage, and a chemical filter arranged in the passage detachably and separately from the removal filter. The chemical filter is arranged at a position lower than a lowest position where the wafer may pass through in the transportation room.
    Type: Grant
    Filed: December 13, 2016
    Date of Patent: July 2, 2019
    Assignee: TDK CORPORATION
    Inventors: Tsutomu Okabe, Hidetoshi Horibe
  • Patent number: 10321658
    Abstract: The invention relates to a device for producing processed cheese portions, comprising a plurality of modules that are arranged successively in the direction of production, in which the processed cheese is formed into a band, cooled, and divided into portions, wherein the modules define a production space through which the processed cheese travels during the production of the processed cheese portions. The production space is enclosed by a spray-proof casing, wherein the casing comprises a frame structure and a plurality of sheet metal elements which are detachably connected to the frame structure, and wherein a sealing hose is arranged between a sheet metal element and the area of the frame structure opposite thereto, and encircles the sheet metal element or the area of the frame structure opposite thereto.
    Type: Grant
    Filed: December 14, 2017
    Date of Patent: June 18, 2019
    Assignee: Hochland SE
    Inventors: Andreas Biggel, Sebastian Schmidt, Richard Bechteler, Josef Burger, Thomas Handerer
  • Patent number: 10309665
    Abstract: The present teachings relate to various embodiments of an hermetically-sealed gas enclosure assembly and system that can be readily transportable and assemblable and provide for maintaining a minimum inert gas volume and maximal access to various devices and apparatuses enclosed therein. Various embodiments of an hermetically-sealed gas enclosure assembly and system of the present teachings can have a gas enclosure assembly constructed in a fashion that minimizes the internal volume of a gas enclosure assembly, and at the same time optimizes the working space to accommodate a variety of footprints of various OLED printing systems. Various embodiments of a gas enclosure assembly so constructed additionally provide ready access to the interior of a gas enclosure assembly from the exterior during processing and readily access to the interior for maintenance, while minimizing downtime.
    Type: Grant
    Filed: May 25, 2017
    Date of Patent: June 4, 2019
    Assignee: Kateeva, Inc.
    Inventors: Justin Mauck, Alexander Sou-Kang Ko, Eliyahu Vronsky, Shandon Alderson
  • Patent number: 10309664
    Abstract: An airflow treatment device configured to be installed inline in the ductwork of an air handling system (e.g., HVAC system) in a manner that is substantially free of obstructing the airflow through the ductwork or requiring any supplemental power to treat the airflow passing by the treatment device. The disclosed airflow treatment device can also be maintained substantially free of any interruptions, disassembly or downtime to the air handling system after initial inline installation of the disclosed device. In one arrangement, the airflow treatment device is capable of accepting a threaded odor neutralizer container at its base. Ductwork need only be disassembled once to attach the disclosed device inline in the airflow path of the ductwork. When the odor neutralizing agent needs replenished, the container can be detached from the device, replenished, and reattached to the device free of disruption to the air flow of the air handling system.
    Type: Grant
    Filed: October 13, 2016
    Date of Patent: June 4, 2019
    Inventor: Mason Edward Eike
  • Patent number: 10306866
    Abstract: A modular vivarium is assembled from pre-manufactured, transportable, sterile modules of distinct types, called pods. A hallway pod forms a spine, with cage-rack pods, ingress/egress pods and optional HVACPIT pods providing HVAC, power and IT services connected as spur pods to the hallway. Supplies and waste are also within modular pods. Temporary or single-use seals cover doorways during transit. Modules are joined or removed while maintaining sterility on both sides of the flush-to-wall doorway junction. A spur pod is sterilely connected to a hallway pod by aligning respective doors proximal, placing a seal between the pods around the doorways, sterilizing air between the pods, then removing the temporary seals from each doorway. Pods may be constructed from easily transportable ISO intermodal containers.
    Type: Grant
    Filed: November 14, 2018
    Date of Patent: June 4, 2019
    Assignee: Vium, Inc
    Inventor: Jonathan Betts-Lacroix
  • Patent number: 10274214
    Abstract: A storage facility is achieved that is capable of suppressing, with a simple configuration, the inactive gas concentration in the gas discharged to the outside of a storage space. The storage facility includes a storage device including a plurality of storage sections in an inside of a storage space formed so as to be partitioned from the outside, and an inactive gas supply portion that supplies inactive gas to an inside of a container stored in the storage section. The storage device includes a gas discharge portion that discharges, to the outside of the storage space, gas within the storage space that contains the gas discharged from the container. The gas discharge portion includes a restricting orifice portion serving as a restricting portion that restricts a flow rate of gas, and the restricting orifice portion is formed below a region where the storage sections are disposed.
    Type: Grant
    Filed: June 20, 2014
    Date of Patent: April 30, 2019
    Assignee: Daifuku Co., Ltd.
    Inventors: Hiroshi Otsuka, Shinsuke Kawamura, Tadahiro Yoshimoto
  • Patent number: 10251313
    Abstract: Disclosed is the redirection of air flow in a sub-plenum using a multi-directional plume that is attached to the bottom surface of an air-grate floor panel. The air-grate floor panel 102 has openings which allow redirected air to flow in an upward direction to cool computer equipment, including servers. The multi-directional plume has a series of vanes that are disposed in various different directions to deflect a flow of air conditioning air through a sub-plenum in a vertical direction to flow through openings in the air-grate floor panel. Since the multi-directional plume is capable of redirecting air from various different directions in the sub-plenum, the air-grate floor panels do not have to be repositioned to capture air flow from any particular direction.
    Type: Grant
    Filed: March 21, 2017
    Date of Patent: April 2, 2019
    Assignee: RAYMOND & LAE ENGINEERING, INC.
    Inventor: Gary Meyer
  • Patent number: 10239098
    Abstract: Disclosed is an air shower room. The shower room comprises a chamber, an air supply apparatus, an air exhaust apparatus, a sensing mechanism and a controller. The sensing mechanism is disposed at a height inside the chamber and operable to detect presence of the user's arm at the height. The height is chosen such that the user has to raise his arm such that the presence of the arm at the height can be detected by the sensing mechanism. The controller is configured to control operations of the air supply apparatus and the air exhaust apparatus based on the detection by the sensing mechanism. Also disclosed is a dust-free workshop.
    Type: Grant
    Filed: April 28, 2016
    Date of Patent: March 26, 2019
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventor: Ying Ding
  • Patent number: 10231892
    Abstract: Laminar-flow operating theater that comprises a support (4) that defines a horizontal plane, on which the patient (2) rests, which has a main longitudinal direction, on which support (4) there is, in addition, an operating region (R), laminar-flow-emitting unit (5) and an air-absorption unit (6), wherein the laminar-flow-emitting unit (5) emits the laminar flow in a horizontal direction which is oblique with respect to the longitudinal position of the support (4) such that said direction of incidence of the flow reaches the operating region (R) for the patient (4), and the air-absorption unit (6) is in a horizontal absorption direction which is oblique with respect to said longitudinal direction of the patient's support (4).
    Type: Grant
    Filed: February 2, 2018
    Date of Patent: March 19, 2019
    Inventor: Carlos Ruiz Lapuente
  • Patent number: 10208488
    Abstract: A processing facility for manufacturing integrated circuits on semiconductor wafers is provided with at least one radiation generator that generates an EUV (extreme ultraviolet) radiation that is supplied to at least one lithography machine, housed in a factory building, for exposure of the semiconductor wafers. The radiation generator is housed in a building or a building section separate from the factory building. At least one beam guide extends from the building or the building section to the factory building, wherein the EUV radiation is supplied from the building or the building section through the at least one beam guide to the factory building. At least one supply line branches off at an obtuse angle from the at least one beam guide inside the factory building, wherein at least a portion of the EUV radiation is supplied through the at least one supply line to the lithography machine.
    Type: Grant
    Filed: September 14, 2016
    Date of Patent: February 19, 2019
    Assignee: M+W Group GmbH
    Inventors: Hartmut Schneider, Freyja Eberle, Steffen Köhler, Peter Csatary, Herbert Blaschitz
  • Patent number: 10196214
    Abstract: A transport vehicle system includes: a first transport vehicle configured to travel on a lower track in one direction; a second transport vehicle configured to travel on an upper track in one direction; a first transfer section onto which a conveyed object is delivered from the second transport vehicle and from which the conveyed object is received by the first transport vehicle; and a second transfer section onto which the conveyed object is delivered from the first transport vehicle and from which the conveyed object is received by the second transport vehicle.
    Type: Grant
    Filed: June 17, 2016
    Date of Patent: February 5, 2019
    Assignee: MURATA MACHINERY, LTD.
    Inventor: Yoichi Motoori
  • Patent number: 10136612
    Abstract: A modular vivarium is constructed entirely from transportable, sterile modules of distinct types, called pods. A hallway pod forms a spine, with cage-rack pods, ingress/egress pods and optional VHACPIT pods providing HVAC, power and IT services connected as spur pods to the hallway. Supplies and waste are also within modular pods. Temporary or single-use seals cover doorways during transit. Modules are joined or removed while maintaining sterility on both sides of the flush-to-wall doorway junction. Supply and return air for all pods is through hallway based ducting. Pods may be constructed from ISO intermodal containers. Embodiments have no permanent buildings. Pods may be moved, leveled and aligned for joining via special supports. Cage-rack pods are configured with two cage racks and a single isle permitting robotic cage placement and retrieval. Embodiments provide vibration, noise and earthquake isolation.
    Type: Grant
    Filed: June 28, 2016
    Date of Patent: November 27, 2018
    Assignee: Vium, Inc.
    Inventor: Jonathan Betts-Lacroix
  • Patent number: 10113724
    Abstract: A structural beam and light fixture for a walkable ceiling of a clean room is composed of an elongated channel and a lamp disposed in the elongated channel. The lamp is configured to direct light through the bottom side of the elongated channel. The structural beam and light fixture is attached to adjoining ceiling components and is configured to support a load applied to the adjoining ceiling components. The structural beam and light fixture, combined with other walkable ceiling components, define ceiling top and bottom sides that are flush.
    Type: Grant
    Filed: June 8, 2016
    Date of Patent: October 30, 2018
    Assignee: AES Clean Technology, Inc.
    Inventors: Louis C. Satterfield, Robert G. Satterfield, Robert J. Bright, Robert J. Geiger, Richard Dobson
  • Patent number: 10056276
    Abstract: A system and method provide for monitoring and controlling fluid flow in semiconductor manufacturing apparatuses. The method and system include a vortex flow meter coupled to a digital readout that displays the measured flow rate and trip point. The flow meter display includes input devices used to adjust the trip point. The system and method provide for sending signals via a custom relay to the semiconductor manufacturing apparatus which is adapted to terminate a processing operation or change the fluid flow if the trip point is tripped. The system and method also provide for sending an electrical signal to a computer by way of a data acquisition unit and a converter. The converter converts the signal to a communication protocol consistent with the computer network and provides fluid flow information and trip point data as a function of time to the computer which then displays such data graphically.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: August 21, 2018
    Assignee: WAFERTECH, LLC
    Inventor: Chris Lary
  • Patent number: 10058012
    Abstract: A multizone variable damper for air passageways having a plurality of damper zones, a plurality of opposed blades that are rotatable about a horizontal axis, a pair of blades of the plurality of blades being provided in each zone of the plurality of damper zones, and an actuator for each pair of blades, each actuator being configured to independently rotate each of the pairs of blades of the plurality of opposed blades so as to selectively and independently control a degree of openness of each of the pairs of blades of the plurality of opposed blades in each damper zone of the plurality of damper zones.
    Type: Grant
    Filed: December 17, 2010
    Date of Patent: August 21, 2018
    Assignee: TATE ACCESS FLOORING LEASING, INC.
    Inventors: Daniel J. Curtin, William W. Reynolds, Daniel B. Kennedy
  • Patent number: 10006218
    Abstract: A prefabricated white chamber structure is adapted to be periodically sanified and washed and comprises one or more shop pre-assembled modules, including all the necessary utility assemblies and adapted to be re-assembled at a use site.
    Type: Grant
    Filed: July 29, 2016
    Date of Patent: June 26, 2018
    Assignee: SINTECO IMPIANTI S.R.L.
    Inventor: Attilio Marinoni
  • Patent number: 9943164
    Abstract: A filter cleaning device has an improved structure which is capable of effectively cleaning dust in a filter used in an air conditioner. The filter cleaning device includes: a filter; a brush unit movably installed at one side of the filter to separate dust from the filter; a brush movement unit configured so that the brush unit is movable along the filter; and brush guides installed at two sides of the brush unit to guide a movement of the brush unit. Each of the brush guides includes: a first guide groove formed so that the brush unit is moved to be in contact with the filter; and a second guide groove formed so that the brush unit is moved to be separated from the filter.
    Type: Grant
    Filed: February 9, 2016
    Date of Patent: April 17, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Wan-Ku Kang, Chan Young Park, Hyun Uk Park, Geon Hee Lee, Jea Won Lee
  • Patent number: 9943355
    Abstract: A smoke evacuation system for an open surgical site is disclosed which includes a filter cartridge assembly including a housing having an inlet port, a flow path extending from the inlet port, and a filter element disposed within the flow path, a flexible conduit having a proximal end connected to the inlet port of the filter assembly, and a smoke evacuator configured for detachable connection to a distal end of the flexible conduit for drawing smoke away from the surgical site and into the filter assembly through the conduit.
    Type: Grant
    Filed: March 30, 2016
    Date of Patent: April 17, 2018
    Assignee: Surgiquest, Inc.
    Inventors: Carlos Babini, Dominick Mastri, Kenneth Blier, Gregory Runner
  • Patent number: 9839876
    Abstract: An air cleaning device using water as a filter comprises a water tank, a water pump, a pressure equalizer and air-inhale tubes. The water tank includes an accommodation space for containing water, air inlets and air outlets. A cover hoods the water tank and has a water storage tank and air inlets. The water pump is disposed inside the water tank and connected with the pressure equalizer. Jet pipes of the pressure equalizer respectively interconnect with the air inlets through the air-inhale tubes. The water pump sucks the water in the accommodation space. Through the air-inhale tubes, the jet pipes inhale air in a jet fashion from exterior of the air inlets disposed in multiple directions. The air cleaning device can filter out the impurities in the air and fast clean the air of a large space. The present invention uses water as the filter and favors environmental protection.
    Type: Grant
    Filed: August 24, 2015
    Date of Patent: December 12, 2017
    Inventors: Tsung-Hsin Tsai, I-Ta Tsai
  • Patent number: 9795957
    Abstract: Biosafety units, methods of making and sealing the same are disclosed herein. The present invention includes a unitary structure able to be validated for pharmaceutical manufacturing comprising: at least one controlled air, sealable, sterilizable cleanroom; a mechanical system room adjacent to and separate from the cleanroom comprising: one or more air handling units that provide conditioned air to the cleanroom; and one or more power busses that provide power to electrical outlets in the cleanroom from two sources, wherein the at least two power supplies are connectable to one or more external electrical power sources; an integrated fire suppression system integral to the cleanroom; and one or more corridor connectors, wherein a corridor can be attached at the corridor connector.
    Type: Grant
    Filed: November 6, 2012
    Date of Patent: October 24, 2017
    Assignee: G-CON MANUFACTURING, INC.
    Inventors: R. Barry Holtz, Troy Arledge, Phillip B. Maples, David M. Shanahan
  • Patent number: 9793142
    Abstract: When a substrate W is processed, a cover member covers a peripheral portion of the upper surface of the substrate held by the substrate holding unit, and a central portion of the substrate located at an inner position than the peripheral portion in a radial direction is exposed without being covered by the cover member. A gap is formed between the lower surface of the cover member and the peripheral portion of the upper surface of the substrate held by the substrate holding unit. When the interior space of the cup is exhausted, a gas present above the interior space of the cup is introduced from a space enclosed by the internal peripheral surface of the cover member through the gap into the interior space of the cup.
    Type: Grant
    Filed: October 17, 2013
    Date of Patent: October 17, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Jiro Higashijima, Yoshifumi Amano, Eiichiro Okamoto, Yuki Ito
  • Patent number: 9793146
    Abstract: A fab can be constructed as a round or rectangular annular tube with a primary cleanspace located in-between its inner and outer tubes. The fab can be encircled with levels upon which tools can be densely packed while preserving unidirectional air flow. If only tool ports are inside, and robotics are used, primary cleanspace size can be minimized. Highly simplified robotics can be used. Tools can be removed and repaired centrally. A secondary cleanspace can be added for tool bodies. Multilevel construction enhances use of prefabricated units for fab build or maintenance. Curves or folds, applied to a conventional planar cleanroom, can construct a wide range of fab geometries, including a tubular non-annular fab. A fab can also be constructed according to a curved or non-curved sectional cut of an annular tube. A novel fab, of a non-curved section, can include a non-segmented cleanspace or have its tools vertically stacked.
    Type: Grant
    Filed: September 11, 2013
    Date of Patent: October 17, 2017
    Assignee: Futrfab, Inc.
    Inventor: Frederick A. Flitsch
  • Patent number: 9786699
    Abstract: The present invention provides an UV cleaning device of a glass substrate, comprising a lamp box, an UV lamp positioned above inside the lamp box, a transparent shield positioned under the UV lamp, a humidifier positioned under the transparent shield and a power exhaust device under the transparent shield and opposite to the humidifier; in usage, the glass substrate is conveyed to be inside the lamp box, and UV light generated by the UV lamp irradiates on the glass substrate through the shield to clean the glass substrate and a humidity and an oxygen content inside the lamp box are adjusted with the humidifier to make a surface of the glass substrate adsorb one layer of water molecules.
    Type: Grant
    Filed: July 1, 2015
    Date of Patent: October 10, 2017
    Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventor: Jiangbo Yao
  • Patent number: 9771663
    Abstract: The invention discloses an anodization sealing process for an aluminum or aluminum alloy element for vehicles, including the steps for rinsing with pure water, electrolysis, rinsing once again, electrical deposition sealing, rinsing with pure water several times and baking. The aluminum or aluminum alloy element for vehicles obtained thus has improved alkali resistance and erosion resistance.
    Type: Grant
    Filed: March 1, 2014
    Date of Patent: September 26, 2017
    Assignee: JIAXING XINGHE AUTOMOTIVE PARTS CO., LTD.
    Inventors: Zhenyu Yu, Chen Xing, Jia Li, Adam Jankowski
  • Patent number: 9771651
    Abstract: Polycrystalline silicon with low contamination by impurities, especially boron and phosphorus, is manufactured by the Siemens process or by the fluidized bed process, in which deposition of polycrystalline silicon takes place in a reactor maintained within a clean room of the 1 to 100,000 class, and air entering the facility enclosing the reactors is filtered by a multiple stage filtration system wherein coarse and fine filter elements contain less than 0.1% by weight of boron and phosphorus and less than 0.01% by weight of arsenic and aluminum. Following production of the polycrystalline silicon, the polycrystalline silicon may be further treated by steps such as comminution, classifying, wet-chemical treatment, and packing, all these further steps also preferably taking place within a clean room of the 1 to 100,000 class.
    Type: Grant
    Filed: October 17, 2014
    Date of Patent: September 26, 2017
    Assignee: Wacker Chemie AG
    Inventor: Hanns Wochner
  • Patent number: 9581347
    Abstract: In a system and method of controlling particulate count in a clean room having a number of compartments/zones in series, in response to a first level of energy consumption by speed adjustable fans supplying a first volume of air per unit of time to the clean room, differential air pressures are established in the clean room compartment/zone-by-compartment/zone in series from a first compartment/zone which has a requirement for the highest air pressure to a last compartment/zone which has a requirement for the lowest air pressure. In response to a second level of energy consumption by the speed adjustable fans supplying a second volume of air per unit of time to the clean room, the same differential air pressures are substantially maintained in the clean room.
    Type: Grant
    Filed: February 16, 2012
    Date of Patent: February 28, 2017
    Inventor: John L. Fiorita, Jr.
  • Patent number: 9561911
    Abstract: A portable conveyor system comprising a modularly constructed conveyor and a plurality of transport modules each formed of a plurality of previously installed and previously tested conveyor components, wherein the modules are arranged at least one of directly adjacent next to each other and on top of each other for commonly forming the system in a connected state, wherein the conveyor comprises: a plurality of conveying lines commonly forming, with regard to material flow, a predefined course of conveying lines, wherein each of the conveying lines comprises a separate machine frame; at least one drive unit; at least one control device; and transport means movable along the course of conveying lines by the at least one drive unit in order to transport load supports through the system; and wherein each of the modules comprises: a standardized exterior dimension; a support structure, a dimension of which is adapted to the standardized exterior dimension; and at least one of the conveying lines, wherein the machi
    Type: Grant
    Filed: April 1, 2015
    Date of Patent: February 7, 2017
    Assignee: SSI SCHÄFER PEEM GMBH
    Inventor: Rainer Buchmann