Abstract: A storage facility is achieved that is capable of suppressing, with a simple configuration, the inactive gas concentration in the gas discharged to the outside of a storage space. The storage facility includes a storage device including a plurality of storage sections in an inside of a storage space formed so as to be partitioned from the outside, and an inactive gas supply portion that supplies inactive gas to an inside of a container stored in the storage section. The storage device includes a gas discharge portion that discharges, to the outside of the storage space, gas within the storage space that contains the gas discharged from the container. The gas discharge portion includes a restricting orifice portion serving as a restricting portion that restricts a flow rate of gas, and the restricting orifice portion is formed below a region where the storage sections are disposed.

Abstract: Disclosed is the redirection of air flow in a sub-plenum using a multi-directional plume that is attached to the bottom surface of an air-grate floor panel. The air-grate floor panel 102 has openings which allow redirected air to flow in an upward direction to cool computer equipment, including servers. The multi-directional plume has a series of vanes that are disposed in various different directions to deflect a flow of air conditioning air through a sub-plenum in a vertical direction to flow through openings in the air-grate floor panel. Since the multi-directional plume is capable of redirecting air from various different directions in the sub-plenum, the air-grate floor panels do not have to be repositioned to capture air flow from any particular direction.

Abstract: Disclosed is an air shower room. The shower room comprises a chamber, an air supply apparatus, an air exhaust apparatus, a sensing mechanism and a controller. The sensing mechanism is disposed at a height inside the chamber and operable to detect presence of the user's arm at the height. The height is chosen such that the user has to raise his arm such that the presence of the arm at the height can be detected by the sensing mechanism. The controller is configured to control operations of the air supply apparatus and the air exhaust apparatus based on the detection by the sensing mechanism. Also disclosed is a dust-free workshop.

Abstract: Laminar-flow operating theater that comprises a support (4) that defines a horizontal plane, on which the patient (2) rests, which has a main longitudinal direction, on which support (4) there is, in addition, an operating region (R), laminar-flow-emitting unit (5) and an air-absorption unit (6), wherein the laminar-flow-emitting unit (5) emits the laminar flow in a horizontal direction which is oblique with respect to the longitudinal position of the support (4) such that said direction of incidence of the flow reaches the operating region (R) for the patient (4), and the air-absorption unit (6) is in a horizontal absorption direction which is oblique with respect to said longitudinal direction of the patient's support (4).

Abstract: A processing facility for manufacturing integrated circuits on semiconductor wafers is provided with at least one radiation generator that generates an EUV (extreme ultraviolet) radiation that is supplied to at least one lithography machine, housed in a factory building, for exposure of the semiconductor wafers. The radiation generator is housed in a building or a building section separate from the factory building. At least one beam guide extends from the building or the building section to the factory building, wherein the EUV radiation is supplied from the building or the building section through the at least one beam guide to the factory building. At least one supply line branches off at an obtuse angle from the at least one beam guide inside the factory building, wherein at least a portion of the EUV radiation is supplied through the at least one supply line to the lithography machine.

Abstract: A transport vehicle system includes: a first transport vehicle configured to travel on a lower track in one direction; a second transport vehicle configured to travel on an upper track in one direction; a first transfer section onto which a conveyed object is delivered from the second transport vehicle and from which the conveyed object is received by the first transport vehicle; and a second transfer section onto which the conveyed object is delivered from the first transport vehicle and from which the conveyed object is received by the second transport vehicle.

Abstract: A modular vivarium is constructed entirely from transportable, sterile modules of distinct types, called pods. A hallway pod forms a spine, with cage-rack pods, ingress/egress pods and optional VHACPIT pods providing HVAC, power and IT services connected as spur pods to the hallway. Supplies and waste are also within modular pods. Temporary or single-use seals cover doorways during transit. Modules are joined or removed while maintaining sterility on both sides of the flush-to-wall doorway junction. Supply and return air for all pods is through hallway based ducting. Pods may be constructed from ISO intermodal containers. Embodiments have no permanent buildings. Pods may be moved, leveled and aligned for joining via special supports. Cage-rack pods are configured with two cage racks and a single isle permitting robotic cage placement and retrieval. Embodiments provide vibration, noise and earthquake isolation.

Abstract: A structural beam and light fixture for a walkable ceiling of a clean room is composed of an elongated channel and a lamp disposed in the elongated channel. The lamp is configured to direct light through the bottom side of the elongated channel. The structural beam and light fixture is attached to adjoining ceiling components and is configured to support a load applied to the adjoining ceiling components. The structural beam and light fixture, combined with other walkable ceiling components, define ceiling top and bottom sides that are flush.

Abstract: A system and method provide for monitoring and controlling fluid flow in semiconductor manufacturing apparatuses. The method and system include a vortex flow meter coupled to a digital readout that displays the measured flow rate and trip point. The flow meter display includes input devices used to adjust the trip point. The system and method provide for sending signals via a custom relay to the semiconductor manufacturing apparatus which is adapted to terminate a processing operation or change the fluid flow if the trip point is tripped. The system and method also provide for sending an electrical signal to a computer by way of a data acquisition unit and a converter. The converter converts the signal to a communication protocol consistent with the computer network and provides fluid flow information and trip point data as a function of time to the computer which then displays such data graphically.

Abstract: A multizone variable damper for air passageways having a plurality of damper zones, a plurality of opposed blades that are rotatable about a horizontal axis, a pair of blades of the plurality of blades being provided in each zone of the plurality of damper zones, and an actuator for each pair of blades, each actuator being configured to independently rotate each of the pairs of blades of the plurality of opposed blades so as to selectively and independently control a degree of openness of each of the pairs of blades of the plurality of opposed blades in each damper zone of the plurality of damper zones.

Abstract: A prefabricated white chamber structure is adapted to be periodically sanified and washed and comprises one or more shop pre-assembled modules, including all the necessary utility assemblies and adapted to be re-assembled at a use site.

Abstract: A smoke evacuation system for an open surgical site is disclosed which includes a filter cartridge assembly including a housing having an inlet port, a flow path extending from the inlet port, and a filter element disposed within the flow path, a flexible conduit having a proximal end connected to the inlet port of the filter assembly, and a smoke evacuator configured for detachable connection to a distal end of the flexible conduit for drawing smoke away from the surgical site and into the filter assembly through the conduit.

Abstract: A filter cleaning device has an improved structure which is capable of effectively cleaning dust in a filter used in an air conditioner. The filter cleaning device includes: a filter; a brush unit movably installed at one side of the filter to separate dust from the filter; a brush movement unit configured so that the brush unit is movable along the filter; and brush guides installed at two sides of the brush unit to guide a movement of the brush unit. Each of the brush guides includes: a first guide groove formed so that the brush unit is moved to be in contact with the filter; and a second guide groove formed so that the brush unit is moved to be separated from the filter.

Abstract: An air cleaning device using water as a filter comprises a water tank, a water pump, a pressure equalizer and air-inhale tubes. The water tank includes an accommodation space for containing water, air inlets and air outlets. A cover hoods the water tank and has a water storage tank and air inlets. The water pump is disposed inside the water tank and connected with the pressure equalizer. Jet pipes of the pressure equalizer respectively interconnect with the air inlets through the air-inhale tubes. The water pump sucks the water in the accommodation space. Through the air-inhale tubes, the jet pipes inhale air in a jet fashion from exterior of the air inlets disposed in multiple directions. The air cleaning device can filter out the impurities in the air and fast clean the air of a large space. The present invention uses water as the filter and favors environmental protection.

Abstract: Biosafety units, methods of making and sealing the same are disclosed herein. The present invention includes a unitary structure able to be validated for pharmaceutical manufacturing comprising: at least one controlled air, sealable, sterilizable cleanroom; a mechanical system room adjacent to and separate from the cleanroom comprising: one or more air handling units that provide conditioned air to the cleanroom; and one or more power busses that provide power to electrical outlets in the cleanroom from two sources, wherein the at least two power supplies are connectable to one or more external electrical power sources; an integrated fire suppression system integral to the cleanroom; and one or more corridor connectors, wherein a corridor can be attached at the corridor connector.

Abstract: A fab can be constructed as a round or rectangular annular tube with a primary cleanspace located in-between its inner and outer tubes. The fab can be encircled with levels upon which tools can be densely packed while preserving unidirectional air flow. If only tool ports are inside, and robotics are used, primary cleanspace size can be minimized. Highly simplified robotics can be used. Tools can be removed and repaired centrally. A secondary cleanspace can be added for tool bodies. Multilevel construction enhances use of prefabricated units for fab build or maintenance. Curves or folds, applied to a conventional planar cleanroom, can construct a wide range of fab geometries, including a tubular non-annular fab. A fab can also be constructed according to a curved or non-curved sectional cut of an annular tube. A novel fab, of a non-curved section, can include a non-segmented cleanspace or have its tools vertically stacked.

Abstract: When a substrate W is processed, a cover member covers a peripheral portion of the upper surface of the substrate held by the substrate holding unit, and a central portion of the substrate located at an inner position than the peripheral portion in a radial direction is exposed without being covered by the cover member. A gap is formed between the lower surface of the cover member and the peripheral portion of the upper surface of the substrate held by the substrate holding unit. When the interior space of the cup is exhausted, a gas present above the interior space of the cup is introduced from a space enclosed by the internal peripheral surface of the cover member through the gap into the interior space of the cup.

Abstract: The present invention provides an UV cleaning device of a glass substrate, comprising a lamp box, an UV lamp positioned above inside the lamp box, a transparent shield positioned under the UV lamp, a humidifier positioned under the transparent shield and a power exhaust device under the transparent shield and opposite to the humidifier; in usage, the glass substrate is conveyed to be inside the lamp box, and UV light generated by the UV lamp irradiates on the glass substrate through the shield to clean the glass substrate and a humidity and an oxygen content inside the lamp box are adjusted with the humidifier to make a surface of the glass substrate adsorb one layer of water molecules.

Abstract: Polycrystalline silicon with low contamination by impurities, especially boron and phosphorus, is manufactured by the Siemens process or by the fluidized bed process, in which deposition of polycrystalline silicon takes place in a reactor maintained within a clean room of the 1 to 100,000 class, and air entering the facility enclosing the reactors is filtered by a multiple stage filtration system wherein coarse and fine filter elements contain less than 0.1% by weight of boron and phosphorus and less than 0.01% by weight of arsenic and aluminum. Following production of the polycrystalline silicon, the polycrystalline silicon may be further treated by steps such as comminution, classifying, wet-chemical treatment, and packing, all these further steps also preferably taking place within a clean room of the 1 to 100,000 class.

Abstract: The invention discloses an anodization sealing process for an aluminum or aluminum alloy element for vehicles, including the steps for rinsing with pure water, electrolysis, rinsing once again, electrical deposition sealing, rinsing with pure water several times and baking. The aluminum or aluminum alloy element for vehicles obtained thus has improved alkali resistance and erosion resistance.

Abstract: In a system and method of controlling particulate count in a clean room having a number of compartments/zones in series, in response to a first level of energy consumption by speed adjustable fans supplying a first volume of air per unit of time to the clean room, differential air pressures are established in the clean room compartment/zone-by-compartment/zone in series from a first compartment/zone which has a requirement for the highest air pressure to a last compartment/zone which has a requirement for the lowest air pressure. In response to a second level of energy consumption by the speed adjustable fans supplying a second volume of air per unit of time to the clean room, the same differential air pressures are substantially maintained in the clean room.

Abstract: A portable conveyor system comprising a modularly constructed conveyor and a plurality of transport modules each formed of a plurality of previously installed and previously tested conveyor components, wherein the modules are arranged at least one of directly adjacent next to each other and on top of each other for commonly forming the system in a connected state, wherein the conveyor comprises: a plurality of conveying lines commonly forming, with regard to material flow, a predefined course of conveying lines, wherein each of the conveying lines comprises a separate machine frame; at least one drive unit; at least one control device; and transport means movable along the course of conveying lines by the at least one drive unit in order to transport load supports through the system; and wherein each of the modules comprises: a standardized exterior dimension; a support structure, a dimension of which is adapted to the standardized exterior dimension; and at least one of the conveying lines, wherein the machi

Abstract: Provided is an apparatus of an inhalation type for stocking a wafer at a ceiling and an inhaling type wafer stocking system having the same including a stocking system having a shelf that is fixed to a ceiling and supports a container in which a wafer is present; and an inhalation assembly that is installed in the stocking system so as to correspond to the shelf and is configured so as to inhale gas that leaks from the container.

Abstract: Provided are methods for decontamination of compartments, such as aircraft compartments and other types of compartments, and systems for implementing these methods. In some embodiments, a method involves detecting presence of one or more contaminants in a compartment. This information is used to select various decontamination conditions. In some embodiments, additional information, such as the type of the compartment (e.g., an aircraft compartment), temperature, and humidity, may be also considered while selecting the decontamination conditions. The decontamination conditions include identification of one or more decontaminating agents to be dispensed in the compartment, temperature profile of the air to be flown into the compartment, and timing of the decontaminant dispensing and air flowing operations. These conditions are selected to increase efficacy of the selected decontaminating agents with respect to the one or more detected contaminants and reduce impact on the aircraft compartment.

Abstract: Embodiments of the present invention relate to improvements to single-substrate, multi-chamber processing platform architecture for minimizing fabrication facility floor space requirements. Prior art systems require significant floor space around all sides to allow for adequate installation and servicing. Embodiments of the present invention provide platforms that allow for servicing the chambers and supporting systems via a front and rear of the platform allowing multiple, side-by-side platform placement within a fabrication facility, while providing improved serviceability of the platform components.

Abstract: A method for controlling a ventilation system for the ventilation of an enclosure. The ventilation system includes two or more ventilation units, which each selectively and repeatedly can be controlled to establish an air flow to and/or from the enclosure. The method includes the steps of: determining information regarding operational conditions of one or more of the two or more ventilation units by measuring the air flow through or the pressure differential across the ventilation units, generating operation control data for one or more of the ventilation units from information regarding operational conditions determined for at least one other of the ventilation units, and controlling the operation of one or more of the two or more ventilation units by applying the generated operation control data. The invention further relates to a ventilation system for ventilating an enclosure.

Abstract: The present invention provides a cleanroom for storing glass substrates, and which comprises an exhaust is disposed on a bottom floor of the cleanroom. A first filtering device is arranged on a ceiling of the cleanroom to provide purified airflow to the cleanroom. A second filtering device is arranged on the bottom floor of the cleanroom jointly to create a vertical airflow with the first filtering device so as to reduce the turbulence within the cleanroom. The present invention can readily resolve the prior art issue in which the airborne particles stirred by turbulence within the cleanroom cannot be effectively eliminated.

Abstract: Disclosed is an air distribution control unit or a filtration/ventilation unit which is portable and/or can be mounted on or integrated in furniture e.g. as a cabinet of at the head region of a bed. The filtration/ventilation unit cleanses air from a person/patient by aspirating the person's/patient's exhalation air into the filtration/ventilation unit. To construct an at least partly isolated area around the patient, filtered air can be directed e.g. vertically out of the filtration/ventilation unit to perform an air curtain. Use of the filtration/ventilation unit reduces the risk of dissipation of air-borne diseases and health hazardous matter, and reduces the amount of air to ventilate a room with patients.

Abstract: Methods, apparatus, and systems are provided for measuring the supply of a consumable product/energy source, such as electrical power, to a facility over time and analyzing the measurements to determine the consumption or supply of the product by one or more loads and/or sources in the facility, and to determine induced and residual heat flow through the facility's envelope. Various aspects compare the measured supply of the consumable product to a database of consumption signatures, which characterize access to the consumable product by particular users. Operating conditions and facility characteristics, such as temperatures, load factors, insulation factors, etc., may be further considered in determining a particular user's access of the consumable product. To aid in the controlling of energy use, thermal resistance factors of the building are determined, which are based on the induced and residual heat flow through the facility.

Abstract: A semiconductor manufacturing line includes an inert environment selected from the group consisting essentially of an inert airtight wafer holder, an inert wafer transport channel, an inert production tool, an inert clean room, and combinations thereof.

Abstract: A substrate treating apparatus includes a treating block including a plurality of cells arranged one over another. Each cell has treating units for treating substrates and a single main transport mechanism for transporting the substrates to the treating units. Each cell also has a blowout unit for supplying a clean gas into a transporting space of the main transport mechanism and an exhaust unit for exhausting gas from the transporting space. The blowout unit and the exhaust unit are arranged one over the other in the transporting space to separate the transporting space of each cell from that of another cell.

Abstract: Provided are a system and method capable of providing a sulfuric acid solution containing peroxosulfuric acid for use in cleaning even in an installation-limited space such as a clean room while suppressing the fluid pressure in a heating part such as a rapid heating heater.

Abstract: Container filling plant for aseptically filling containers, which plant has a filling machine and a closing machine inside a clean room. The plant further has shields which surround the filling machine and/or the closing machine to minimize the passage of contaminants produced by the operation or repair of the machines into an area of the clean room outside of the shields. Air is passed through the interior of the shields to conduct contaminants through an outlet and out of the clean room.

Abstract: A rear door heat exchanger is used to cool exhaust air as it exits a rack containing a plurality of computing devices. An air flow rate is determined for each of the plurality of computing devices within the rack, wherein each of the plurality of computing devices includes a fan drawing air through the computing device. The position of a baffle or louver is controlled to allow exhaust air to bypass the rear door heat exchanger in response to determining that the total air flow rate through the plurality of computing devices exceeds a predetermined air flow capacity threshold of the rear door heat exchanger.

Abstract: An air guiding element for an aircraft air-conditioning system includes a distributing pipe having an air inlet opening arranged in the region of an end face of the distributing pipe and an air discharge opening arranged in the region of a generated surface of the distributing pipe. The air guiding element further comprises a flow diverting element having a first section connected to the air discharge opening of the distributing pipe and a second section arranged downstream of the first section relative to the direction of the air flow through the air guiding element. The second section is configured to deflect the air as it flows through the second section at an angle of approximately 45 to 135° relative to the direction of the air flow through the first section, and a diffuser which is arranged downstream of the second section.

Abstract: An enclosure has a perforated front door with a replaceable filter, and a perforated rear side allowing air to flow through the enclosure. The enclosure also has mounting brackets for heat generating elements, such as line cards or other rack mounted electronics. A fan draws air through the perforated front door, though the filter, and across the heat generating elements. Side brushes are disposed on a side wall near the front of the enclosure, which allow any cables attached to the heat generating elements to exit the enclosure. The front door is removable, opening up one side of the side brushes and allowing the cables to slide in the side brushes while still connected to the heat generating elements.

Abstract: An airflow-organization testing method for a clean room and a system using the same method are disclosed. The airflow-organization testing method for a clean room uses a thermal imaging device to detect a sample gas-flow formed by a sample gas in the clean room, and the sample gas has a temperature difference from ambient air. The airflow-organization testing system for a clean room includes a sample gas supplier and a thermal imaging device, and the thermal imaging device can continuously detect a spatial position of the sample gas and display it on a display, thereby improving detection precision and expanding detection range.

Abstract: A filter assembly including a rectangular inlet frame having a rectangular inlet opening to receive a primary filter and optional a prefilter. The filter assembly may include a rectangular outlet frame and a housing body that is collapsible to have a flattened shipping state and an erect state. The rectangular inlet frame may also be used as a housing by itself to support and house primary filters and prefilters. A gridwork including one or more grid dividers may be used in the rectangular inlet frame to provide 2 or more openings for receipt of filters.

Abstract: A smart home system having a controller which controls an ozone generator, gas supply outlets connected to gas supply outlets of the ozone generator via a pipe, and solenoid valves which control opening and closing of the gas supply outlets. The controller is connected with each of the solenoid valves and controls opening and closing of each of the solenoid valves. An operation method for the system discloses driving the ozone generator by the controller to generate ozone, controlling opening of the solenoid valves by the central processor when the central processor receives an external signal for opening the solenoid valves, reducing opening level of the solenoid valves when a gas flow sensor detects that the ozone flow rate passing through the gas inlet is greater than the flow rate threshold, and controlling closing of the solenoid valves by the central processor when the central processor receives a signal for closing the solenoid valves.

Abstract: A load part has a nozzle unit having outlets for generating outflow and/or inflow of gas used for replacing the atmosphere of a wafer storage container, in a direction approximately parallel to spaces between adjacent wafers being stored, are a driving unit for extending the nozzle unit to a door opening portion.

Abstract: An isolator includes a work chamber, a sterilizing substance supply unit, a gas flow channel pressure adjustment unit, a work chamber barometer, and a controller. The controller is configured to control execution of a gas flow channel leak test for checking a gas leak in a gas flow channel based on a detection result by the work chamber barometer after making the gas flow channel pressure adjustment unit increase or decrease the pressure in the gas flow channel, and is configured to control supply of the sterilizing substance by the sterilizing substance supply unit. The controller performs heating of a heater, which accompanies the supply of the sterilizing substance, in parallel with the gas flow channel leak test.

Abstract: Embodiments of the invention generally provide a containment system having integrated bubble tight-dampers. In another embodiment, the containment system includes an integral auto-scan mechanism disposed in the housing of the containment system so that a filter element, disposed in the housing, may be leak tested without accessing the interior of the housing. In yet another embodiment, a method for testing a filter disposed in a containment system includes challenging an upstream side of a filter element disposed in a housing of the containment system with a test aerosol, and automatically moving a probe disposed within the housing to obtain samples for leak testing.

Abstract: A clean air apparatus comprises clean air means for producing a flow of clean air and for discharging the clean air from an outlet and towards a target clean area. The apparatus comprises a Coanda effect device disposed at least adjacent the clean air means, which is arranged, in use, to induce a Coanda effect upon the flow of clean air. The apparatus comprises guide means for guiding the clean air towards a target clean area in the form of an air curtain.

Abstract: A system for managing cleanroom resources by providing a number of critical features in an integrated, low-cost package is described. The critical features include monitoring and recording cleanroom environmental conditions such as temperature, humidity and room differential pressure, notifying users of alarm situations when cleanroom environmental conditions fall outside predetermined limits, and reducing cleanroom energy usage by turning off HEPA filter fan units (FFUs) and cleanroom lights when they are not needed.

Abstract: An aircraft has a ventilation system that employs a plurality of nozzles positioned in a cavity between a sidewall of the aircraft cabin and a section of the aircraft fuselage. The nozzles receive a supply of ventilation air and direct jets of air from the nozzles, through the cavity and into the aircraft cabin. The jets of air produced by the nozzles create low-pressure areas in the cavity. At least one return air opening in the cabin sidewall communicates the low-pressure areas with the cabin interior, whereby the low pressure areas draw air from the cabin interior into the cavity where the drawn air is entrained with the jets of air produced by the nozzles. Devices inside the cavity remove suspended impurities from the air drawn into the cavity. In this manner, the ventilation system filters or sanitizes the air drawn through the system.

Abstract: A ventilation device for supplying air to a clean room having a passage duct (16) with a waste air inlet (13) for receiving waste air form the room and a supply air outlet (14) for discharging supply air (34) to the room. A speed controllable rotatable fan (49) is provided in the passage duct (16) for conveying air from a suction chamber (47) coupled to the waste air inlet (13) to a pressure chamber (48) coupled to the supply air outlet (14). An outside air duct (22) is provided for receiving outside air (27) which is emitted into the passage duct (16), and an exhaust air duct (28) is provided for receiving a part of the waste air (32) extracted from the room for exhaust to the outside. First and second air flow regulators (36, 37) are provided in the respective air ducts (22, 28), and a control unit (68) is provided for controlling operation of the air flow regulators (36, 37) and the rotational speed of the fan (49).

Abstract: An isolator device having a work chamber, air supply means for supplying air of a unidirectional airflow traveling from an upper part to a lower part in the work chamber, and air discharge means for discharging air of the unidirectional airflow from a lower part of the work chamber are provided, and moreover, a bulkhead provided in parallel with a peripheral wall portion of the work chamber along the air of the unidirectional airflow and longitudinal air outlets opened along a width direction of a lower end portion in a lower part of the lower end portion of the bulkhead and attached so as to oppose an air inlet portion by a filter unit for air purification is provided.

Abstract: A device for sanitizing objects using ozone is disclosed having a container defining an enclosed space and a selectively closeable opening for enclosing the space, an ozone generator, an ozone converter, a controller, and a timer working together to generate a predetermined concentration of ozone within the enclosed space and maintain approximately the same concentration for a predetermined period of time. Also disclosed are assemblies and methods detecting and warning of entrapment within the enclosure and halting ozone production when it occurs. Further disclosed are devices and methods for coupling a maintenance device to the sanitizing system to perform various maintenance operations such as adjusting operational control parameters, and observing conditions within the enclosed chamber in real-time such as temperature, humidity, and ozone concentration.

Abstract: A ventilation system includes a ventilation tile. The ventilation tile has a substantially circular opening to allow air to flow through the ventilation tile and a collapsible damper operable to collapse and expand to alter the size of the substantially circular opening in the ventilation tile and thereby variably restrict air flow through the substantially circular opening.

Abstract: An arrangement for a laboratory room that is confined by a floor, a ceiling and walls connecting the floor with the ceiling, the arrangement comprises: a main base suspended on the floor; a tool base arranged on the main base; a platform arranged around the tool base, wherein the platform is permeable for air, and the platform is suspended at the walls; an air inlet arranged below the platform; an air outlet arranged above the tool base; and air guides for directing an air flow upwards at least partially parallel to the main base and/or the tool base.