Abstract: A system and method for sampling air in a controlled environment that includes two or more air sampling devices at different locations within the controlled environment. A controller is provided at a location outside of the controlled environment and in separate air flow communication with each of the two or more air sampling devices via separate first vacuum tubes, the controller having a manifold configured to separately control a rate of air flow from the two or more air sampling devices to the controller via each of the separate first vacuum tubes and to selectively direct the air flow from each of the separate first vacuum tubes to one or more second vacuum tubes. A vacuum source is provided at a location outside the controlled environment and in air flow communication with the controller via the one or more second vacuum tubes, the vacuum source providing suction and being controlled by the controller to generate the air flow through each of the first vacuum tubes.

Abstract: A clean room air handling system is disclosed. The system includes an air handler adapted to receive an air flow, the air handler further provided with a cooling apparatus, and at least one supply fan for generating the air flow without a cooling apparatus directly associated therewith, and modulation means for operating said system.

Abstract: A mobile, modular, cleanroom facility is made from one or more pre-assembled modules, transportable in their pre-assembled form. Each pre-assembled module includes an air filtration system including a ceiling plenum for providing clean air to the interior of the module. The air filtration system provides air cleaned to at least an ISO 8 classification. When the mobile, modular cleanroom facility is made of two or more modules, each of the modules is pre-assembled, and is transportable in its pre-assembled form. Each of the modules also includes an air filtrations system having a ceiling plenum for providing clean air to the interior of the module. Most preferably, the modules are connected by a connection assembly effective for providing a seamless transition from one module to the other while maintaining the appropriate clean air classification in the transition space.

Abstract: A clean room suit for clothing a person in a clean room, the clean room suit comprising a fabric configured to cover at least a part of a body of the person, and a clean room lock adapter arranged on and/or in the fabric and being configured for coupling to a clean room lock in such a manner that, in an operation mode in which the clean room lock is coupled to the clean room lock adapter and is activated, particles on and/or in the fabric are moved out of the fabric towards an exterior of the clean room suit.

Abstract: An isolation damper for preventing the migration of air from a ventilated space includes a high differential pressure sealing chamber in the damper assembly that prevents the flow of air from the “clean” side of the damper assembly to the “dirty” side thereof. Pressurized air leaking out of the sealing chamber creates reverse flow leakage toward the dirty side which assures the clean side air is not contaminated by the dirty side air. Differential pressure between the sealing chamber and the dirty side is monitored with the differential pressure reported and alarmed externally if reductions in pressure indicate the sealing effect of the sealing chamber could be affected.

Abstract: A measuring unit arranged to measure a clean environment is placed on a cell by a retrieval and storage apparatus to measure clean environment of the cell. Based on a measurement result, a fan filter unit or an exhaust vent is controlled to maintain the clean environment of the cell at a predetermined level or more.

Abstract: The present invention describes an air quality containment unit for isolating a construction, renovation or maintenance project. The air quality containment unit contains dust, molds and other air-borne pollutants using a filter, such as a high-efficiency particulate air (HEPA) filter, to maintain a negative air pressure in the unit. The air quality containment unit includes at least one sealable orifice that allows workers to introduce, for example, an electrical cord into the unit without breaching containment.

Abstract: Provided are methods for ventilating a surgical theater using temperature-regulated laminar air flow. Velocity of a downward directed laminar clean air flow is determined by an air-temperature difference between the supply air and room air temperature at the level of the operating table. Room air temperature at the level of the operating table is measured and clean supply air temperature controlled in relation to this measurement. In order to maintain a constant downward directed laminar clean air flow velocity, a constant difference in temperature is maintained between room air temperature at the level of the operating table and the lower temperature of the supply air. In preferred embodiments, this constant temperature difference provides a downward directed air flow velocity of at least 0.25 m/s and is maintained in part by minimizing fluctuations in ambient air-temperature through use of air supply units supplying heated or cooled air outside the clean air zone.

Abstract: Embodiments of the invention generally provide a containment system having integrated bubble tight-dampers. In another embodiment, the containment system includes an integral auto-scan mechanism disposed in the housing of the containment system so that a filter element, disposed in the housing, may be leak tested without accessing the interior of the housing. In yet another embodiment, a method for testing a filter disposed in a containment system includes challenging an upstream side of a filter element disposed in a housing of the containment system with a test aerosol, and automatically moving a probe disposed within the housing to obtain samples for leak testing.

Abstract: A building structure includes means to utilize solar radiation to heat the building structure during relatively cold ambient environmental conditions and to cool the building structure during relatively hot ambient environmental conditions. The building structure includes chambered wall and floor constructions having integral heat sink masses. These integral heat sink masses provide for radiation of heat when air temperature in an interior space of the building structure is below a temperature of the heat sink masses and for absorption of heat when the air temperature in the interior space of the building structure is above a temperature of the heat sink masses. A flow of thermally treated air to the heat sink masses serves to regulate the temperature of the heat sink masses.

Abstract: In an air conditioner having a main body provided with a panel 1 including a front panel 1a and a top panel 1b, the main body incorporating an air passage connecting an air inlet 2 and an air outlet 3, an air filter 4, a heat exchanger 5, a blower fan 6, and a dedusting device 7 attached to the front face of the air filter 4 which is reciprocated along the surface of the air filter 4, the top panel 1b is opened/closed as the dedusting device 7 is reciprocated.

Abstract: A liquid processing apparatus, includes an apparatus main body, a power room having an atmosphere separated from the clean room by a partition member, an air suction path configured to suction an air in the clean room and take the air into the power room, a temperature control part provided in the power room and configured to control at least a temperature of the air taken in via the air suction path, an air supplying path configured to supply the air from the temperature control part to the liquid processing unit, a ventilation part configured to take the air from the air suction path and supply the air via the air supplying path, and a cleaning filer configured to clean the air taken in from the air suction path.

Abstract: The invention concerns an isolation chamber for isolating substances from the ambient while simultaneously maintaining aseptic conditions within the isolation chamber and protecting the operator from potent compounds. The isolation chamber comprises a first container surrounding and defining an isolation space of holding the substances and a second container surrounding the first container. Preferably, the pressure of the isolation space is lower than the pressure of the barrier space.

Abstract: In various exemplary embodiments described herein, a system and related method to reduce particle contamination on substrates is disclosed. The system includes a substrate traverser mechanism having tracks to transport substrate carriers with one or more traverser ducts arranged to surround, at least partially, the tracks. The one or more ducts have slits along at least a substantial portion of a length of the tracks. A traverser exhaust fan is coupled to one end of each of the one or more traverser ducts. The fan provides sufficient volumetric airflow such that a velocity of the volumetric airflow through the slits is greater than a terminal settling velocity of a predetermined particle size. The fan draws particles less than approximately the predetermined particle size generated by the substrate traverser mechanism into the one or more traverser ducts.

Abstract: Laminar-flow operating theatre that comprises a support (4) that defines a horizontal plane, on which the patient (2) rests, which has a main longitudinal direction, on which support (4) there is, in addition, an operating region (R), laminar-flow-emitting unit (5) and an air-absorption unit (6), wherein the laminar-flow-emitting unit (5) emits the laminar flow in a horizontal direction which is oblique with respect to the longitudinal position of the support (4) such that said direction of incidence of the flow reaches the operating region (R) for the patient (4), and the air-absorption unit (6) is in a horizontal absorption direction which is oblique with respect to said longitudinal direction of the patient's support (4).

Abstract: A system for circulating and conditioning air within a nuclear reactor habitability area is provided. The system may include an upper plenum formed between a lowered ceiling partition within the habitability area and a ceiling of the habitability area and a lower plenum formed between a raised floor partition within the habitability area and a floor of the habitability area. The system can additionally include at least one recirculation air handling unit located within the habitability area, the at least one recirculation air handling unit operable to generate a recirculation air flow within the habitability area by circulating air between the lower and upper plenums absent any air carrying ductwork routed through the ceiling, floor or walls of the habitability area.

Abstract: The invention concerns an isolation chamber for isolating substances from the ambient while simultaneously maintaining aseptic conditions within the isolation chamber and protecting the operator from potent compounds. The isolation chamber comprises a first container surrounding and defining an isolation space of holding the substances and a second container surrounding the first container. Preferably, the pressure of the isolation space is lower than the pressure of the barrier space.

Abstract: An enclosure which forms a biological chemical barrier system and has a bottom wall that rests on a gurney so as to be mobile while housing a patient on a backboard or mattress placed therein. A front wall of the enclosure has biomedical ports and an air filtration system therein. A rear wall of the enclosure has an access door therein formed by a hinged portion thereof cut therefrom and selectively closed by a zipper. Side walls of the enclosure have sleeve gloves therein. A top wall of the enclosure has a plurality of hanger straps thereon that extend upwardly therefrom, for wrapping around an associated personnel pole, and are relaseably maintained thereon by complementary portions of hook and loop pile fasteners disposed on themselves.

Abstract: To provide an intermediate storage unit for the intermediate storage of objects to be painted in the form of vehicle bodies and/or parts of vehicle bodies and/or for the transport of objects to be painted in the form of vehicle bodies and/or parts of vehicle bodies from one process section of a paint shop to another process section of the paint shop, which allows the objects to be painted to also be stored in the intermediate storage unit over a lengthy period of time, e.g. during a shift change, overnight or over a weekend, without impairment to the quality of the painting of the objects to be painted, it is proposed that the intermediate storage unit is configured as a clean-room area.

Abstract: A system for sampling air in a controlled environment that includes two or more air sampling devices at different locations within the controlled environment. A controller is provided at a location outside of the controlled environment and in separate air flow communication with each air sampling devices via separate first vacuum tubes. A ffow switch for each of the air sampling devices is provided at a location between a corresponding air sampling device and the vacuum source, each of the flow switches being configured to separately measure and control the rate of air flow through a corresponding first vacuum tube. An alarm is automatically activated at a location inside the controlled environment by one or more of the flow switches when the rate of air flow measured at one or more of the flow switches deviates from a desired value by a predetermined amount.

Abstract: A liquid processing apparatus, includes an apparatus main body, a power room having an atmosphere separated from the clean room by a partition member, an air suction path configured to suction an air in the clean room and take the air into the power room, a temperature control part provided in the power room and configured to control at least a temperature of the air taken in via the air suction path, an air supplying path configured to supply the air from the temperature control part to the liquid processing unit, a ventilation part configured to take the air from the air suction path and supply the air via the air supplying path, and a cleaning filer configured to clean the air taken in from the air suction path.

Abstract: A system for sampling air in a controlled environment that includes air sampling devices at different locations within the controlled environment. A controller is provided at a location outside of the controlled environment and in separate air flow communication with the air sampling devices via separate first vacuum tubes, the controller having a manifold configured to separately control a rate of air flow from the air sampling devices to the controller via each of the separate first vacuum tubes and to selectively direct the air flow from each of the separate first vacuum tubes to one or more second vacuum tubes. An alarm is automatically activated at a location inside the controlled environment by one or more of the flow switches when the rate of air flow measured at one or more of the flow switches deviates from a desired value by a predetermined amount.

Abstract: A modular air-handling plenum for capable of supporting surgical apparatus or other objects is disclosed. The plenum is usually rectangular, may be formed of sheet metal, and features a truss spanning the width of the plenum to carry the weight of the apparatus. The plenum itself is attached to the ceiling of a room. An air handling component may be included to provide filtered and/or conditioned air in the vicinity of the suspended apparatus, or the plenum may be used strictly as an apparatus support, with no air-conditioning function. An ordinary suspended ceiling may also be mounted in the plenum for continuity with the remainder of the room.

Abstract: An outer dust collecting filter covers a casing an intake port and an outer fan flows air from an external environment into the casing via the outer dust collecting filter. A clean chamber has an intake port within the casing, an inner dust collecting filter for covering the intake port, and an inner fan for flowing the air within the casing. A control unit controls fan rotating speeds so that a measured pressure within the casing becomes higher at a set value than a measured pressure in the external environment, and a measured pressure within the clean chamber becomes higher at a set value than the measured pressure within the casing.

Abstract: In an apparatus for transferring a substrate, a partition wall is disposed in a vertical direction in a housing to divide an interior space of the housing into a first space and a second space. A pressure generating member divides the first space into an upper space and a lower space and moves in a vertical direction in the first space such that a positive pressure and a negative pressure are alternately generated in the upper space and the lower space. A substrate supporting member is movably disposed in the second space to support and to transfer the substrate. A plurality of gates is disposed on a side wall of the housing and the partition wall, and is opened and closed by the positive pressure and the negative pressure such that the particles are eliminated from the second space to an exterior space via the first space.

Abstract: A liquid processing apparatus, includes an apparatus main body, a power room having an atmosphere separated from the clean room by a partition member, an air suction path configured to suction an air in the clean room and take the air into the power room, a temperature control part provided in the power room and configured to control at least a temperature of the air taken in via the air suction path, an air supplying path configured to supply the air from the temperature control part to the liquid processing unit, a ventilation part configured to take the air from the air suction path and supply the air via the air supplying path, and a cleaning filer configured to clean the air taken in from the air suction path.

Abstract: Biosafety units, methods of making, and sealing the same are disclosed herein. The units comprise at least one controlled air, sealable, sterilizable cleanroom; and a mechanical system room adjacent to the cleanroom comprising: at least two air handling units in a support room adjacent the cleanroom that provide redundant air to the cleanroom with at least Class 100,000 air purity, the air handling units connected to a one or more supply ducts to the cleanroom, and an exhaust duct in communication with the cleanroom and the air handling unit exhaust, wherein a pressure gradient is formed between the cleanroom and the exterior of the structure; and at least two power supplies that provide redundant power to electrical outlets in the cleanroom, wherein the at least two power supplies are connectable to one or more external power sources and the structure is pre-validatable or validated for pharmaceutical manufacturing.

Abstract: Embodiments of the invention generally provide a containment system having integrated bubble tight-dampers. In another embodiment, the containment system includes an integral auto-scan mechanism disposed in the housing of the containment system so that a filter element, disposed in the housing, may be leak tested without accessing the interior of the housing. In yet another embodiment, a method for testing a filter disposed in a containment system includes challenging an upstream side of a filter element disposed in a housing of the containment system with a test aerosol, and automatically moving a probe disposed within the housing to obtain samples for leak testing.

Abstract: An air shower device which prevents allergenic substances which cause hay fever from being brought into a living space, in which a person resides or carries out an activity, by an outside body. The air shower device includes a suction unit, which takes in outside air; an air blower unit having an air blower which blows air which has been taken in, at a specific air-flow rate and a filter which cleans by removing dust, including pollen, from air which is blown; and a dust collecting unit which collects dust, including pollen, from exhaust of an air shower room which includes the air blower unit. Further, the air shower device includes an air-flow rate control unit which controls the amount of air blown by an air blower according to an amount of pollen dispersed in the outside air.

Abstract: A self balancing air handling system for conditioning an interior space includes an air handling unit having an outlet for supplying conditioned air to the space, an entrance providing an access from an exterior space to the interior space, an air plenum surrounding said space, and an inlet for returning air from said plenum to said air handling unit wherein said air handling unit supplies said conditioned air under conditions providing a positive pressure differential at said entrance between the interior space and the exterior space thereby limiting infiltration air into the interior space.

Abstract: A semiconductor manufacturing process facility requiring use therein of air exhaust for its operation, such facility including clean room and gray room components, with the clean room having at least one semiconductor manufacturing tool therein, and wherein air exhaust is flowed through a region of the clean room. The facility includes an air exhaust treatment apparatus arranged to (i) receive air exhaust after flow thereof through said region of said clean room, (ii) produce a treated air exhaust, and (iii) recirculate the treated air exhaust to an ambient air environment in the facility, e.g., to the gray room of the facility.

Abstract: A beverage bottling plant and foodstuff containing element filling plant each having a clean room and each having apparatus for assisting in the cleaning of the clean room, and a method of cleaning the clean room. The abstract of the disclosure is submitted herewith as required by 37 C.F.R. §1.72(b). As stated in 37 C.F.R. §1.72(b): A brief abstract of the technical disclosure in the specification must commence on a separate sheet, preferably following the claims, under the heading “Abstract of the Disclosure.” The purpose of the abstract is to enable the Patent and Trademark Office and the public generally to determine quickly from a cursory inspection the nature and gist of the technical disclosure. The abstract shall not be used for interpreting the scope of the claims. Therefore, any statements made relating to the abstract are not intended to limit the claims in any manner and should not be interpreted as limiting the claims in any manner.

Abstract: A semiconductor manufacturing system, having a filter that is disposed in a clean room and removes an organic solvent containing siloxane from a gas supplied from the outside of said clean room; a first semiconductor manufacturing apparatus that is disposed in said clean room and uses light in an atmosphere containing the gas having passed through said filter; a second semiconductor manufacturing apparatus that is disposed in said clean room and has an exhaust gas outlet for discharging a gas containing an organic solvent containing siloxane; and a removing device that is disposed at said exhaust gas outlet of said second semiconductor manufacturing apparatus, filters out the organic solvent containing siloxane from the exhaust gas output from said exhaust gas outlet, and discharges the filtered gas into an exhaust gas duct for discharging the exhaust gas to the outside of said clean room.

Abstract: This invention relates to a mobile laboratory for analysis of pathogenic agents. According to the invention, the laboratory (1) consists of a transportable mobile container defining a basic chamber (10), the space inside said chamber being isolated from the outside by means of a sealed box (5) inserted in said room, said box comprising a sealed zone for analysis of pathogenic agents (50d, 500d) fitted with a pressure device that maintains a negative pressure inside said zone relative to its external environment, characterised in that the sealed box (5) includes a first protective equipment airlock (500a), - a second sealed airlock (500b) communicating between said sealed zone for the analysis of pathogenic agents and said first airlock, a third sealed airlock (500c) communicating between said sealed zone for the analysis of pathogenic agents and said first airlock, wherein the zone for analysing pathogenic agents (500d) can only be entered through said second airlock.

Abstract: The invention relates to an allergy test chamber comprising at least one inlet for supplying allergen-free air, especially fresh air, into the chamber. Said chamber is characterised in that the at least one inlet (23) for allergen-free air is provided with an air flow distribution device (26, 27), and in that the allergy test chamber (20) also comprises at least one inlet (25) for allergen test particles, such as plant pollen or mite faeces, and at least one outlet (24) for removing air loaded with allergen test particles from the chamber by means of suction. Said outlet (24) is arranged at a distance from the inlets (23, 25) for allergen-free air and allergen test particles. Said air movement principle i.e.

Abstract: A filter element having a frame defining an interior volume and having exterior surfaces. Filter media is mounted within the frame so as to allow fluid to enter an upstream side of the media and exit a downstream side of the media. At least one component of a multi-component filter frame seal, the at least one component being positioned on an outer surface of the frame and substantially circumscribing the filter frame at a location selected to align to a complementary component of the multi-component filter frame seal. The complementary component is provided separately from the filter element.

Abstract: A system for providing air substantially free from radioactive and toxic contaminates to a nuclear reactor habitability area is provided. The system can include at least one emergency air filtration unit structured and operable to provide air free from radioactive and toxic contaminates to the habitability area. The system can additionally include at least one stored energy power source structured and operable to provide operating power to each emergency air filtration unit.

Abstract: Environmental containment systems, and in certain embodiments, systems and methods involving vessels and unit operations or components of cell culture, cell containment, bioreactor, chemical manufacturing, or pharmaceutical manufacturing systems provided with environmental containment are provided. Certain vessels, unit operations, devices, and components may be used to perform all or part of biological, chemical, and/or pharmaceutical manufacturing processes therein. In some embodiments, an environmental containment system includes a multi-level containment apparatus. For instance, a first substantially closed environmental containment enclosure may be contained within a second substantially closed environmental containment enclosure; the first and second enclosures may be contained in a third substantially closed environmental containment enclosure, etc.

Abstract: The present invention is a mobile air contaminant control system that includes a filter assembly enclosed by a mobile outer chamber. The filter assembly is tapered to create a large volume air way downstream from the filter assembly that enables more even air flow and filter loading. One or more exhaust fans pull the air through the filter assembly and exhaust it to the exterior of the chamber. The system is functionally attached to an exterior structure having at least one air intake and housing a work piece. As airborne contaminants are generated from the work piece(s), the control system exhausts them from the exterior structure through the filter assembly and into the external environment.

Abstract: An integrated, portable shelter including a frame and at least two supports hingedly connected to the frame. The supports being movable between a storage position and a support position, where in the support position, the frame is positioned above an underlying support surface. The shelter also includes a bottom wall supported by the frame, a peripheral wall structure connected to the frame, where the peripheral wall structure includes a front wall, a rear wall and at least two sidewalls and the front wall defines an opening, and a top wall connected to the peripheral wall structure. The peripheral wall structure and the top wall define an interior space. The shelter further includes a front panel hingedly connected to the front wall. The front panel is movable between an open position away from the front wall and a closed position adjacent to the front wall.

Abstract: A filter system for an air cleaner is provided according to an embodiment of the invention. The filter system includes one or more filter elements and a filter tray adapted to be received in a filter tray receptacle of the air cleaner. The filter tray includes a bottom surface and one or more bottom airflow apertures formed in the bottom surface. The filter tray receives the one or more filter elements.

Abstract: The invention relates to a storage configuration having a predeterminable storage atmosphere, comprising a storage chamber for receiving a plurality of storage product carriers for storage product, which can be delivered to a feeding and removal opening for the storage and removal of the storage product using a transport apparatus, and further comprising an air-conditioning apparatus, which associated with the storage chamber and exhausts air from the storage chamber, treats it, and injects it back into the storage chamber via exhaust and injection openings provided on the storage chamber. The exhaust and injection openings are disposed such that the air flows through the storage chamber in the vertical direction.

Abstract: Embodiments of the invention generally provide a containment system having integrated bubble tight-dampers. In another embodiment, the containment system includes an integral auto-scan mechanism disposed in the housing of the containment system so that a filter element, disposed in the housing, may be leak tested without accessing the interior of the housing. In yet another embodiment, a method for testing a filter disposed in a containment system includes challenging an upstream side of a filter element disposed in a housing of the containment system with a test aerosol, and automatically moving a probe disposed within the housing to obtain samples for leak testing.

Abstract: An arrangement for the sterile, aseptic production and/or filling of pharmaceutical products contains a housing which, with the exception of an inlet and an outlet with a clearly defined cross-section, is closed in an airtight manner. Through the air inlet air is forced via a filter into the interior of the housing. The air passes out of the housing through the air outlet or channels. The size of the cross-section of the air outlet and the performance of the ventilating device are matched in such a way that within the interior of the housing there is a laminar unidirectional or combined airflow and a constant overpressure with respect to the pressure outside the housing.

Abstract: A filter for suspended particles for a clean room has at least one filter medium and at least one illumination device. The illumination device is arranged at least mostly within a vertical extension of the at least one filter medium. Alternatively, the illumination device is arranged in an area outside of an outflow cross-section of the at least one filter medium. The flow of clean air into the clean room is not disturbed in this way.

Abstract: A method and apparatus for the controlled feeding of added air into a permanently inertized room in which a predefined inertization level is or must be set and maintained within a certain control range provide for the volume flow rate at which an inert gas is fed into the room atmosphere to attain a value that is adequate for maintaining the predefined inertization level in the room atmosphere that will minimize fire risk. In addition, provisions are made whereby at all times just enough fresh air is injected into the room atmosphere as is necessary to remove from the room atmosphere that proportional concentration of hazardous substances that has not already been removed, via a corresponding return-air exhaust system as a result of the injection of inert gas.

Abstract: Provided are methods for ventilating a surgical theater using temperature-regulated laminar air flow. Velocity of a downward directed laminar clean air flow is determined by an air-temperature difference between the supply air and room air temperature at the level of the operating table. Room air temperature at the level of the operating table is measured and clean supply air temperature controlled in relation to this measurement. In order to maintain a constant downward directed laminar clean air flow velocity, a constant difference in temperature is maintained between room air temperature at the level of the operating table and the lower temperature of the supply air. In preferred embodiments, this constant temperature difference provides a downward directed air flow velocity of at least 0.25 m/s and is maintained in part by minimizing fluctuations in ambient air-temperature through use of air supply units supplying heated or cooled air outside the clean air zone.

Abstract: A unit type clean room has a wide operation space while providing a high air cleaning effect, is unitized and can be easily installed. The unit type clean room is characterized by including: a machine room unit; a front room unit; and a clean room unit, wherein an air conditioner and a fixed air volume device are installed in the machine room unit, the air conditioner is connected to two HEPA filter units installed in the clean room unit via an air duct, the fixed air volume device is connected to a return air chamber installed in the clean room unit via a return air duct to circulate purified air, purified air is always retained in the clean room, and a front room and an air shower are placed in the front room unit.

Abstract: In a clean unit which has a dust filter with a blowing power source on the upper surface of a working chamber and which can maintain a clean environment, an external gas flow passage is directly connected or connected through a partition wall, through which dust particles cannot pass but gas molecules can pass, to a feedback gas flow passage for connecting air-tightly a ventilation hole formed in the wall of the working chamber and the inlet of the dust filter to each other. On both sides of the partition wall, the flow velocity vector of a gas flowing in the feedback gas flow passage is made to be equal to the flow velocity vector of the gas flowing in an external gas flow passage.

Abstract: A container configured to hold a plurality of substrates lined up vertically with space therebetween, which includes a container main unit formed in a tube shape having a quadrangular cross section as a whole that includes a first opening provided on one end side and a second opening provided on the other end side of the container spaced apart in the horizontal direction from the first opening, the first opening serving as an entrance for loading and unloading the substrates, a fan filter unit that is provided in an area of the second opening and that causes movement of air from the second opening toward the first opening, and a lid configured to be attached in an area of the entrance of the container main unit, the lid having an open state and a closed state, and forming a ventilation opening that allows air to pass in the closed state.