Clean Room Patents (Class 454/187)
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Patent number: 7677963Abstract: An enclosing structure (S), in particular for enclosing and isolating outer environment of a packaging machine includes a plurality of enclosing panels (2), suitably and air-tightly assembled. At least one of the panels (2) defines a separating surface (1) for separating two different environments (A,B). Conveying means for conveying flows of purified air (F,F1,F2,F3,F4) are associated to the panel (2) to define, together therewith, a fluid-dynamic barrier, which avoids relative contamination between one environment (A) and the other environment (B).Type: GrantFiled: June 17, 2004Date of Patent: March 16, 2010Assignee: I.M.A. Industria Macchine AutomaticheInventor: Pietro Bigoni
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Patent number: 7674440Abstract: An enclosure (23) for carrying out operations under sterile conditions having apparatus for sterilsing the enclosure and its content includes a gas generator (17,18) having a fan (18) for producing a stream of air and an evaporator (17) for evaporating hydrogen peroxide solution to be carried by the airstream throughout the enclosure to condense on surfaces in the enclosure to sertilise the surfaces. A pump (13) is provided to draw gas from the enclosure at a location remote from the gas generator to ensure that the sterile vapour reaches the most remote part of the enclosure from the generator and also to maintain the pressure in the generator below atmospheric pressure around the generator so that any leak path in the enclosure results in leakage from the atmosphere into the enclosure and not release of sterilant vapour to atmosphere outside the enclosure.Type: GrantFiled: December 17, 2004Date of Patent: March 9, 2010Assignee: Bioquell UK LimitedInventor: Anthony Martin
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Publication number: 20100041328Abstract: An air-pressure-control system, the system comprising a system inlet, a system outlet, and a variable-speed fan configured to operate at a speed. A motor controller in communication with the fan is configured to control the speed of the fan. A differential-pressure transducer configured to monitor an air pressure at the system inlet and an air pressure at the system outlet. A closed-loop pressure controller in communication with the motor controller and differential-pressure transducer, wherein the pressure controller is configured to vary the speed of the fan based on the pressure differential between the inlet and outlet of the system, thereby controlling a pressure within a space. An ultraviolet kill chamber may be disposed between the inlet and outlet to expose airborne particulate to UV radiation. The system may also have a filter located within an air-flow path between the system inlet and system outlet.Type: ApplicationFiled: October 21, 2009Publication date: February 18, 2010Applicant: AMERICAN INNOVATIVE RESEARCH CORP.Inventor: David W. Palmer
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Publication number: 20100022179Abstract: A dust-exhaust acceleration face of a dust-exhaust assistant member is disposed so as to face a top face of a heat radiating member of a production facility or the like so that a gap between the top face of the heat radiating member and the dust-exhaust acceleration face of the dust-exhaust assistant member is occupied by ascending air flows, each having a falling velocity (terminal velocity) that is not accelerated beyond a fixed velocity, to form a balanced state between the size of an object, such as a dust particulate or a chemical substance particulate, and air resistance when the object is freely falling in the air; thus, the object, such as a dust particulate and a chemical substance particulate, is prevented from falling onto the heat radiating member.Type: ApplicationFiled: October 20, 2008Publication date: January 28, 2010Inventors: Katsuhito Uematsu, Naoko Matsuda, Hiroyuki Naka
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Publication number: 20090305626Abstract: The invention is directed to a ready-to-use modular cleanroom and facility, in particular for the production of drugs and biological substances, which is equipped with pre-approved manufacturing equipment cores. The modular cleanroom is implemented in the interior space of a container, such as a standard shipping container, and includes at least one bioreactor station. The modular facility can be installed on-site from pre-approved cleanroom modules without further regulatory approval. The cleanroom and facility comply with FDA-approved good manufacturing practices (GMP) and good laboratory practices (GLP).Type: ApplicationFiled: December 5, 2006Publication date: December 10, 2009Inventor: Ernest G. Hope
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Patent number: 7630198Abstract: Multi-stage air movers for cooling computers and other systems are described herein. In one embodiment, a computer system includes a computer cabinet holding a plurality of computer modules. The computer cabinet includes an air inlet and an air outlet. The computer system further includes a multi-stage air mover configured to move a flow of cooling air from the air inlet, past the plurality of computer modules, and out the computer cabinet via the air outlet.Type: GrantFiled: March 8, 2006Date of Patent: December 8, 2009Assignee: Cray Inc.Inventor: Wade J. Doll
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Publication number: 20090294116Abstract: The present invention relates to a measure for minimizing an undesired passage of fluid from a first sector (1) to a second sector (2) separated by a non-fluid-tight separation (3), wherein a first pressure (P1-1) prevails in the first sector (1) and a lower second pressure (P2-1) than the first pressure (P1-1) prevails in the second sector (2). An intermediate chamber (4) which separates the two sectors (1, 2) from one another is arranged at the separation (3). A conveyor mechanism (5) is further provided which is designed to convey fluid from the intermediate chamber (4) to the first sector (1) in order to generate a lower pressure in the intermediate chamber (4) than the first pressure (P1-1) prevailing in the first sector (1), wherein the pressure (P4-1) generated in the intermediate chamber (4) is just as high or higher than the second pressure (P2-1) prevailing in the second sector (2).Type: ApplicationFiled: May 28, 2009Publication date: December 3, 2009Applicant: AMRONA AGInventor: Michael Kind
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Patent number: 7625277Abstract: An air-pressure-control system, the system comprising a system inlet, a system outlet, and a variable-speed fan configured to operate at a speed. A motor controller in communication with the fan is configured to control the speed of the fan. A differential-pressure transducer configured to monitor an air pressure at the system inlet and an air pressure at the system outlet. A closed-loop pressure controller in communication with the motor controller and differential-pressure transducer, wherein the pressure controller is configured to vary the speed of the fan based on the pressure differential between the inlet and outlet of the system, thereby controlling a pressure within a space. An ultraviolet kill chamber may be disposed between the inlet and outlet to expose airborne particulate to UV radiation. The system may also have a filter located within an air-flow path between the system inlet and system outlet.Type: GrantFiled: May 24, 2007Date of Patent: December 1, 2009Assignee: American Innovative Research Corp.Inventor: David W. Palmer
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Publication number: 20090275278Abstract: In one embodiment, an air filtration system includes a first ventilation path connected between at least one external air supply and a clean room. The first ventilation path is configured to direct air from the at least one external air supply to the clean room. A second ventilation path is connected to the clean room. The second ventilation path is configured to recirculate air in the clean room. A third ventilation path, separate from the first path, is connected between the at least one external air supply and a tool environment disposed within the clean room. The third ventilation path includes an ultra-pure air filtration unit disposed between the outdoor air supply and the tool environment. The ultra-pure air filtration unit includes a compressor and a dryer.Type: ApplicationFiled: April 30, 2008Publication date: November 5, 2009Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tzu-Sou Chuang, James Jeng-Jyi Hwang
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Patent number: 7597617Abstract: A gas diffusion device used in conjunction with a flow of gas from a conduit utilizing a sheet having a peripheral edge defining a surface inwardly from the edge. The surface possesses a first zone, and a second zone between the first zone and the peripheral edge. A first plurality of apertures through the sheet lie in the first zone. A second plurality of apertures through the sheet lie in the second zone. The percentage of open area of the first plurality of apertures relative to the area of the first zone is less than the percentage of open area due to the second plurality of apertures through the second zone.Type: GrantFiled: March 2, 2007Date of Patent: October 6, 2009Inventors: Andrew Solberg, Keith Kibbee, Bart Naughton
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Publication number: 20090245985Abstract: A measuring unit arranged to measure a clean environment is placed on a cell by a retrieval and storage apparatus to measure clean environment of the cell. Based on a measurement result, a fan filter unit or an exhaust vent is controlled to maintain the clean environment of the cell at a predetermined level or more.Type: ApplicationFiled: March 31, 2009Publication date: October 1, 2009Applicant: MURATA MACHINERY, LTD.Inventor: Katsumi MATSUBA
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Patent number: 7591867Abstract: The present invention provides a compact ventilation system provided with an air purifying function. The present invention includes a case having at least one inlet and outlet communicating with an indoor space, an air supply duct connected to the case to allow the case to communicate with an outdoor environment, a fan provided within the case, the fan sucking air introduced into the case via the air supply duct, the fan blowing out the sucked air to the at least one outlet, an air guide provided within the case to guide the air introduced into the case to the fan and to guide the air blown from the fan to the at least one outlet, and an air purifying member situated next to a lateral side of the fan between the fan and the at least one outlet to purify the air blown from the fan.Type: GrantFiled: June 8, 2005Date of Patent: September 22, 2009Assignee: LG Electronics Inc.Inventors: Keun Hyoung Choi, Jeong Yong Kim
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Patent number: 7569037Abstract: A method and apparatus for applying an atomized liquid solution upon a person, comprising a spray enclosure booth; an exhaust vent located below an anticipated user's facial area zone, the exhaust vent disposed within the bottom tray or a lower area of at least one wall or a lower area of a door and configured for exhausting ambient atomized liquid solution from the spray enclosure booth; a rigid conduit support defining a central air flow conduit connected to a bottom tray and pneumatically connected to an exhaust vent and providing structural integrity to the enclosure booth; an atomizing spray head assembly movably connected to the rigid conduit support and physically supported by the rigid conduit support; and an exhaust system configured to exhaust ambient atomized liquid solution from the spray enclosure booth by drawing atomized solution into the exhaust vent then through and out of the rigid conduit.Type: GrantFiled: January 27, 2006Date of Patent: August 4, 2009Inventor: Paul Spivak
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Publication number: 20090176447Abstract: An air shower room (100) is connected to a clean room (200). The air shower includes a door (101), a floor (103), two side walls (104), an exit (111) and an interior ceiling (105). The door, the floor, two side walls and the ceiling defines the inside of the air shower room, and the exit lead from the shower room to the clean room. An air curtain machine (109) is positioned in the inside of the air shower room adjacent to the exit, and the floor of the air shower room is higher than the floor of the clean room.Type: ApplicationFiled: August 20, 2008Publication date: July 9, 2009Applicants: SHENZHEN FUTAIHONG PRECISION INDUSTRY CO., LTD., FIH (HONG KONG) LIMITEDInventors: XIAN-JUN YUAN, XIN LIU, JIA ZHANG
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Publication number: 20090127167Abstract: The invention relates to the separation of microparticles by means of a nozzle (12) for the release of a separating stream (20), comprising at least one enveloping fluid and microparticles entrained Therein, with a vibration generator (18), for the dispersion of the separation flow (20) into a droplet flow (20?), with a deflector device (24), for separation of the droplet flow (20?) into a through flow (20A) and at least one side flow (20B, 20C, . . . ), depending on signals from an analytical device (38). Said analytical device (38) is provided for the analysis of the microparticles(s) contained in the droplets and to control the deflector device (24). Also provided is a protective chamber for product and personnel protection, in which at least the nozzle (12), the oscillation generator (18) and the deflector device (24) are arranged.Type: ApplicationFiled: June 2, 2006Publication date: May 21, 2009Applicant: UNIVERSITAT DUISBURG ESSENInventors: Uwe Kirstein, Klaus Lennartz
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Patent number: 7534167Abstract: A system including a substantially sealed, substantially airtight cabinet sized for housing a vertical array of heat-producing units, the cabinet having an exterior shell and the system including an interior divider wall disposed inside the cabinet, the shell and divider wall providing an equipment chamber adapted to support the array such that the array cooperates with the shell and divider wall in use to define a first plenum, the first plenum having a first inlet defined by the divider wall for recieiving a flow of cooling gas and having a first outlet defined by a plurality of openings through the array whereby the first plenum communicates with the openings in use to exhaust substatially all of the flow of cooling fluid through the openings and hence through the array, whereby the divider wall is configured to allow the first inlet to admit the gas to the first plenum in a substantially horizontal direction.Type: GrantFiled: March 28, 2003Date of Patent: May 19, 2009Assignee: American Power Conversion CorporationInventor: Tony Day
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Publication number: 20090120047Abstract: A ceiling-mounted air-treatment unit is described. The unit includes an inlet air duct arranged to receive an inflowing air stream, a ceiling mounted plasma reactor for filtering and biologically decontaminating the air stream as it passes through the reactor, and an outlet duct for discharging treated air into a room requiring a sterile environment. The plasma reactor includes a plasma generator, an electrostatic filter, and optionally a catalyst to remove reactive species from the treated airflow. Additionally, the plasma reactor is arranged in a ceiling mounted frame that arranges the plasma reactor in an operating position in the ceiling and is movable to a service position where the plasma reactor can be moved downward into the sterile room for maintenance and servicing.Type: ApplicationFiled: November 13, 2007Publication date: May 14, 2009Applicant: AirInSpace BVInventors: Aymeric PERRIER, Vivien DARRACQ
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Patent number: 7531017Abstract: A biohazard safety enclosure or workstation particularly adapted for enclosing automated instrumentation includes a chamber defined by front, back, top, bottom, and opposed end walls; a HEPA filter across an air inlet opening into the chamber, and an airflow means to direct air horizontally through at least part of the chamber between the end walls. Preferably, the workstation has a second HEPA filter across an air outlet opening in the work chamber, with the airflow means including a conduit extending from the air outlet opening to the air inlet opening. A fan draws air through the conduit. All of the air can be exhausted from the workstation, or a part of the filtered air can be exhausted from the workstation and replenished through a make-up air inlet into the chamber.Type: GrantFiled: May 23, 2005Date of Patent: May 12, 2009Assignee: Flow Sciences, Inc.Inventors: Raymond F. Ryan, John H. McNally
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Patent number: 7527664Abstract: A system for machining workpieces (12) and separating the chips from the workpieces (12) includes a plurality of workstations (14) detachably interconnected by a housing (16) and arranged along a processing path (A). A coolant and filtration device (56) extends through the workstations (14) and is adaptable for separating the chips from the workpieces (12). A mist collection device (54) is cooperable with the workstations (14) and the coolant and filtration device (56) for removing mist generated by the workstations (14) while machining the workpieces (12). The workstations (14) are interconnected with the mist collection device (54) and the coolant and filtration device (56) to form a single machining module (10) of various dimensions and configurations to be adaptable for various manufacturing environments.Type: GrantFiled: June 6, 2005Date of Patent: May 5, 2009Assignee: Durr Ecoclean, Inc.Inventor: Mark Jackson
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Patent number: 7513086Abstract: The fan filter mounting frame is useful in installation of equipment in a cell of suspension grid systems when the equipment is passed through and is placed in a corner of the cell. The equipment is supported partially directly by the grid and partially indirectly by the grid through an adapting frame insert. The frame insert is connected between the equipment and the suspension grid system and may have two legs that meet at an apex, a first leg extending along a first grid rail and a second leg extending along an adjacent second grid rail. Each of the two legs also extends between its respective rail and the equipment, supporting the equipment on the respective suspension grid rails. Thus, the grid system may be in its design position or condition prior to and during placement and replacement of the equipment without disruption.Type: GrantFiled: March 17, 2006Date of Patent: April 7, 2009Assignee: Mod-Tec, LLCInventor: Martin Craig Helmus
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Patent number: 7513822Abstract: A fab can be constructed as a round or rectangular annular tube with a primary cleanspace located in-between its inner and outer tubes. The fab can be encircled with levels upon which tools can be densely packed while preserving unidirectional air flow. If only tool ports are inside, and robotics are used, primary cleanspace size can be minimized. Highly simplified robotics can be used. Tools can be removed and repaired centrally. A secondary cleanspace can be added for tool bodies. Multilevel construction enhances use of prefabricated units for fab build or maintenance. Curves or folds, applied to a conventional planar cleanroom, can construct a wide range of fab geometries, including a tubular non-annular fab. A fab can also be constructed according to a curved or non-curved sectional cut of an annular tube. A novel fab, of a non-curved section, can include a nonsegmented cleanspace or have its tools vertically stacked.Type: GrantFiled: June 18, 2005Date of Patent: April 7, 2009Inventor: Frederick A. Flitsch
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Patent number: 7510470Abstract: In one example, an air processing system comprises an inlet portion defining a first inlet to receive internal air from a room and a second inlet to receive air external to the room. An air decontamination portion is downstream of the inlet portion. A first outlet portion to the room is downstream of the air decontamination portion. A HEGA filter is downstream of the first outlet. A first damper is downstream of the air decontamination portion and upstream of the HEGA filter to selectively direct air to the first outlet and the gas absorber. A second damper and a second outlet are downstream of the HEGA filter. The first and second dampers are configured and positionable to selectively seal an upstream side and a downstream side of the gas absorber, respectively, when not in use. Safe rooms including the system are also disclosed.Type: GrantFiled: July 27, 2005Date of Patent: March 31, 2009Inventor: Theodore A. M. Arts
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Publication number: 20090081108Abstract: A clean bench comprising a worktable on which polycrystalline silicon is placed, a box part which includes side plates to surround three sides except a front face of a working space above the worktable, and a ceiling plate which covers an upper side of the working space. Supplying holes are formed in the ceiling plate of the box part, which supply clean air onto an upper surface of the worktable. An ionizer is provided, which ionizes the clean air supplied from the supplying holes to the working space and removes static electricity on the worktable. Suction holes are formed in the side plate of the box part, which suction air from the working space.Type: ApplicationFiled: September 2, 2008Publication date: March 26, 2009Applicant: MITSUBISHI MATERIALS CORPORATIONInventors: Kazuhiro Sakai, Yukiyasu Miyata
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Patent number: 7503951Abstract: A system for measuring fume generation rates and total fume emissions of welding and allied processes includes a fume collection chamber and an automated welding assembly. The fume collection chamber includes a fume chamber housing, a door attached to the housing, a filter support connected to the housing, a hood connected to the housing and a connector attached to the housing and/or the hood. The automated welding assembly includes a rail, a carriage moveably mounted on the rail, a gun arm connected to the carriage and a welding gun mounted to the gun arm.Type: GrantFiled: March 14, 2005Date of Patent: March 17, 2009Assignee: Lincoln Global, Inc.Inventors: Gerald A. Dudash, David Fedor, Jason R. Sattesson, Mitchell L. Shellenberger
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Publication number: 20090053989Abstract: The invention provides a method and system for constructing a new space or improving and existing space to achieve and maintain high air quality in the interior of the space by limiting airborne allergens, VOCs, particulates, and bio-aerosols therein. One method of the invention, includes the steps of sampling the air quality of the indoor space, removing suspected sources of pollutants, selecting replacement materials having low-VOC off gassing, testing the air quality to ensure the space meets a pre-determined base line air quality, and maintaining the air quality of the indoor space at or below the pre-determined base line air quality.Type: ApplicationFiled: October 5, 2007Publication date: February 26, 2009Inventors: Tom Lunde, Nick Nardella
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Patent number: 7485169Abstract: A semiconductor manufacturing process facility requiring use therein of air exhaust for its operation, such facility including clean room and gray room components, with the clean room having at least one semiconductor manufacturing tool therein, and wherein air exhaust is flowed through a region of the clean room. The facility includes an air exhaust treatment apparatus arranged to (i) receive air exhaust after flow thereof through said region of said clean room, (ii) produce a treated air exhaust, and (iii) recirculate the treated air exhaust to an ambient air environment in the facility, e.g., to the gray room of the facility.Type: GrantFiled: September 12, 2006Date of Patent: February 3, 2009Assignee: Advanced Technology Materials, Inc.Inventors: W. Karl Olander, Joseph D. Sweeney, Luping Wang
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Patent number: 7468084Abstract: A device for conditioning recirculating air in a cleanroom has at least one fan having a housing. A return air conduit is provided through which a first portion of recirculating air is supplied from the cleanroom to the at least one fan. A second portion of the recirculating air is directly supplied to the at least one fan by bypassing the at least one return air conduit.Type: GrantFiled: December 11, 2004Date of Patent: December 23, 2008Assignee: M+W Zander Facility Engineering GmbHInventors: Helmut Bauer, Manfred Renz
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Patent number: 7467024Abstract: The present invention provides methods and apparatus capable of routine placement and replacement of fabricator tools in a designated tool location. The tool location can be selected from multiple tool locations arranged in a matrix with horizontal and vertical designations. In another aspect, the fabricator tool placement and replacement can be accomplished while maintaining a clean space environment about the fabricator tool.Type: GrantFiled: August 26, 2006Date of Patent: December 16, 2008Inventor: Frederick A. Flitsch
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Patent number: 7465225Abstract: A clean room unit which is equipped with a work room and a clean bench unit can be independently installed inside a building, can generate an air shower in the work room, and can realize miniaturization and cost reduction. The clean room has a work room, a clean bench unit which has a work opening and has the work opening installed to look onto the work room, an air conditioning system which can perform purification and pressure control of air inside the work room and the clean bench unit and can generate an air shower in the work room, and a control unit. The air conditioning system is controlled by the control unit to switch exclusively between the air shower mode, the ventilation mode, the positively-pressurized work mode, and the negatively-pressurized work mode.Type: GrantFiled: June 3, 2004Date of Patent: December 16, 2008Assignee: Tosho, Inc.Inventors: Shiro Ohmura, Yoshihito Ohmura, Hideaki Hirobe, Takehiko Imura
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Publication number: 20080304944Abstract: A semiconductor manufacturing line includes an inert environment selected from the group consisting essentially of an inert airtight wafer holder, an inert wafer transport channel, an inert production tool, an inert clean room, and combinations thereof.Type: ApplicationFiled: June 29, 2007Publication date: December 11, 2008Inventors: Chien-Ming Sung, Simon Wang, Jia-Ren Chen, Henry Lo, Chen-Hua Yu, Jean Wang, Kewei Zuo
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Patent number: 7462213Abstract: A method of operating a plurality of clean room in a compound within a common enclosure and supplying each room with filtered air by a blower-filter unit by arranging the clean rooms and the blowers connected thereto in two parallel spaced rows with a corridor therebetween, and permitting filtered air to escape the clean rooms from beneath the walls of the clean rooms. Continuous operation of the blowers produces a bubble-like volume of air surrounding the blowers which consists primarily of clean, recirculated air escaping from the clean rooms. By arranging the clean rooms and blowers so that the clean air bubble produced by each blower overlaps the bubbles produced by at least two other blowers, the entire compound can be contained in a highly purified atmosphere consisting primarily of recirculated filtered air. A portion of the air from one or more clean rooms may be discharged in an upward direction through an opening in its top wall.Type: GrantFiled: October 26, 2005Date of Patent: December 9, 2008Inventor: Charles W. Spengler
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Patent number: 7448945Abstract: A mobile clean room has a substantially rectangular frame having an upper and lower portion and is formed of a plurality of metal tube members and transparent plastic wall panels affixed to the frame to form an end wall and front and rear walls. A floor plate is affixed to the lower portion of the frame. A plurality of locking swivel wheels is affixed to the lower portion of the frame. A ladder is mounted between the floor plate and the upper portion of the frame. A dust guard assembly is attached to the top of the frame and is movably mounted. A door is pivotally mounted to the frame.Type: GrantFiled: August 11, 2005Date of Patent: November 11, 2008Inventor: Kyle B. Bessent
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Patent number: 7445654Abstract: Disclosed is a method and apparatus for a storage system having an adsorbtive element capable of adsorbing gas home molecules from gas for the storage system. In one configuration the storage system can include an enclosure adapted to contain a plurality of data storage drive devices and data storage media and wherein the data storage drive devices are adapted to functionally operate. The enclosure is capable of containing gas having, among other constituents, gas borne molecules.Type: GrantFiled: September 27, 2004Date of Patent: November 4, 2008Assignee: Spectra Logic CorporationInventor: Walter Wong
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Blow-off incorporating apparatus for evacuating water and dirt from a cooler box of a cooling system
Publication number: 20080261507Abstract: Apparatus for evacuating water and dirt from a cooler box of a cooling system, incorporated with a blow-off for an air screen of the system. The water and dirt will flow through an aperture in a lower region of the cooler box into a smaller box of the apparatus disposed therebelow. A fan operable for generating the air flow through the air screen and the cooler box, also blows a portion of the flow through a blow-off channel to the air screen for blowing debris away from the air screen. The channel and smaller box are cooperatively configured such that the air flow through the channel will generate a partial vacuum condition in the smaller box operable for evacuating the water and the dirt into the channel so as to be carried away with debris from the air screen.Type: ApplicationFiled: April 17, 2008Publication date: October 23, 2008Inventors: David D'hondt, Rudi Verbeek -
Patent number: 7438514Abstract: A wafer transfer system, and method of controlling pressure in the system, includes a loadport for receiving a wafer container, a housing operably connected to the loadport, a wafer transfer mechanism for transferring a wafer between the wafer container and the housing, a wafer container sensor for detecting a presence of the wafer container on the loadport, a variable speed fan disposed in a first portion of the housing, a variable exhaust unit disposed in a second portion of the housing facing the first portion, the variable exhaust unit being capable of varying an exhaust rate of air from the housing, and a controller for variably operating the variable speed fan and the variable exhaust unit in response to a signal from the wafer container sensor.Type: GrantFiled: October 14, 2004Date of Patent: October 21, 2008Assignee: Samsung Electronics Co., Ltd.Inventors: Soo-woong Lee, Hyung-seok Choi, Jung-sung Hwang, Sung-hwan Choi
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Patent number: 7421851Abstract: An application and method for disinfecting HVAC systems that includes features for protecting service personnel from unintended exposure to ultraviolet radiation. The safeguards include an interlock that prevents illumination of germicidal lamps when their enclosure case is not properly attached to a duct.Type: GrantFiled: July 12, 2006Date of Patent: September 9, 2008Assignee: UltraViolet Devices, Inc.Inventors: David L. Witham, Thomas M. Veloz, Thomas C. Bowles, Roberto Arance, Keith Crawford, Jon W. Orr, Richard N. Metzger, Larry F. Randall
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Patent number: 7416574Abstract: A filter apparatus for improving gas temperature stability while maintaining a high impurity removal capacity. The filter apparatus includes a filter for removing impurities from a gas and a temperature adjuster for adjusting the temperature of the gas to a predetermined temperature. The filter apparatus further includes a humidity detector, arranged at the upstream side of the filter, for adjusting the humidity of the gas before the gas passes through the filter.Type: GrantFiled: December 2, 2005Date of Patent: August 26, 2008Assignee: Nikon CorporationInventors: Kenji Udagawa, Yoshitomo Nagahashi
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Publication number: 20080196786Abstract: The invention relates to a method and an installation for controlling the pressure in a working chamber (10) of an insulator (1), which is shielded from the outer environment (U), during opening or closing of the insulator with respect to the outer environment (U), with the aim of avoiding critical pressure bursts in the working chamber (10). The working chamber (10) is provided with an access for introduction or removal of the product to be treated. Purified air is supplied to the working chamber (10) from a circulating air Zone (11), and air arrives from the working chamber (10) at the circulating air Zone (11) via a returning air channel (14), and the working chamber and the circulating air Zone form an interior space (18). A supply air unit (a3) is provided on the insulator (1) and comprises a supply air ventilator (B) and a blockable first supply air adjusting element (21), mounted between the supply air ventilator (B) and the interior space (18).Type: ApplicationFiled: April 21, 2005Publication date: August 21, 2008Inventors: Volker Sigwarth, Reto Specht, Markus Sollberger, Thomas Neuschwander
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Patent number: 7403390Abstract: A server including a cooling fan assembly and an input/output assembly at opposite ends of the server, and a processor assembly located between the cooling fan assembly and input/output assembly. The server also includes a cover plate that covers the processor assembly and cooling fan assembly and that has a power supply on the face of the cover plate facing the processor assembly and is electrically connected to the processor assembly.Type: GrantFiled: October 2, 2006Date of Patent: July 22, 2008Assignee: International Business Machines CorporationInventors: Keenan W. Franz, Raymond A. Longhi, Robert K. Mullady, Edward J. Seminaro
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Publication number: 20080160905Abstract: Provided is an exhaust unit capable of preventing large pressure fluctuations within a process chamber due to atmospheric pressure changes. The exhaust unit includes a main exhaust duct and a supplemental exhaust duct that acts as a partial bypass. A flap is located at a downstream opening between the main exhaust duct and supplemental exhaust duct and controls the amount of bypassed gas flowing from the supplemental exhaust duct to the main exhaust duct. First and second plates of the flap are pivotally coupled to the main exhaust duct adjacent the downstream opening, the first plate colliding with gas flowing through the main exhaust duct and the second plate partially blocking bypassed gas flowing back into the main exhaust duct from the supplemental exhaust duct. When gas is exhausted through the main exhaust line and the supplemental exhaust duct, the flap passively controls the amount by which the supplemental exhaust duct is opened through fluctuations in atmospheric pressure.Type: ApplicationFiled: December 31, 2007Publication date: July 3, 2008Inventors: Moon-Jeong Kim, Kang-Ho Ahn, Suck-Hoon Kang, Jae-Young Lee, Jai-Heung Choi, Jung-Sung Hwang
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Patent number: 7393373Abstract: A portable clean molding apparatus for receipt of molded articles ejected from a mold machine. The apparatus includes a receiving chamber having a first interior space and a selectively openable first door, a secondary chamber joined to the receiving chamber and having a second interior space and a selectively openable second door, and an air filtration cover unit installed over the receiving and secondary chambers so as to provide a low-particulate, positive airflow into the first and second interior spaces. The apparatus further includes at least one vent communicating with the second interior space so as to allow the airflow to exit the secondary chamber and at least one chute communicating with the first interior space so as to allow the airflow to exit the receiving chamber, the chute being located adjacent to the mold machine for the transfer of molded articles to the receiving chamber.Type: GrantFiled: June 14, 2004Date of Patent: July 1, 2008Assignee: H.K. Plastics Engineering, Inc.Inventors: Gerry R. Krippner, Dean F. Gaffney
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Patent number: 7389813Abstract: The present invention provides systems and methods of controlling local environment. In one embodiment, incoming air enters a contactor such the Direct Contact Cooler-Condenser (DCCC) where the air contacts water distributed on the contact media. After passing through the DCCC, the air is saturated at a temperature equal or close to that of the water. Depending on the state of the incoming air, in the DCCC will be humidified or dehumidified to yield saturated air at the desired humidity ratio. In one embodiment, a blower draws air through the DCCC and blows into the heater. The heater heats the air to the desired dry-bulb temperature. Before exiting, the air may pass through a filter.Type: GrantFiled: August 23, 2005Date of Patent: June 24, 2008Assignee: ASML Holding N.V.Inventors: Dikran S. Babikian, Bryan H. Wade
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Publication number: 20080146140Abstract: A device is provided for encapsulating a hand held electromagnetic radiation transceiver, the device comprising a hollow body having a top panel, a bottom panel, two side walls, and a front wall, said panels and walls continuously attached at their respective joints; a rear wall having an opening to allow insertion of the transceiver; whereby the device is finally hermetically sealed so as to prevent contamination of the transceiver by biological fluids, such as saliva, blood, and non-biological fluids, such as low-level radioactive waste, or organic materials. The device also contains indicators for pathogen and/or toxic agent contamination.Type: ApplicationFiled: October 20, 2006Publication date: June 19, 2008Inventor: Robert D. Harty
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Publication number: 20080146142Abstract: A fab can be constructed as a round or rectangular annular tube with a primary cleanspace located in-between its inner and outer tubes. The fab can be encircled with levels upon which tools can be densely packed while preserving unidirectional air flow. If only tool ports are inside, and robotics are used, primary cleanspace size can be minimized. Highly simplified robotics can be used. Tools can be removed and repaired centrally. A secondary cleanspace can be added for tool bodies. Multilevel construction enhances use of prefabricated units for fab build or maintenance. Curves or folds, applied to a conventional planar cleanroom, can construct a wide range of fab geometries, including a tubular non-annular fab. A fab can also be constructed according to a curved or non-curved sectional cut of an annular tube. A novel fab, of a non-curved section, can include a nonsegmented cleanspace or have its tools vertically stacked.Type: ApplicationFiled: October 31, 2007Publication date: June 19, 2008Inventor: Frederick A. Flitsch
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Publication number: 20080146141Abstract: In order to provide an air shower apparatus having good usability and high dust removing efficient, a nozzle for blowing out air is constructed to comprise a first body structure provided with a first air flowing path guiding air from a filter side to an air shower chamber side and with a second air flowing path in communication with the first air flowing path at mutually opposite positions on a side wall thereof, and a second body structure rotatably supporting the first body structure, wherein part of air sucked into the first air flowing path flows through the second air flowing path to cause a pressure difference between regions where the second air flowing path intersects with the first air flowing path and by change of the pressure difference with time, a flow direction of air flowing through the first air flowing path is varied with time.Type: ApplicationFiled: July 30, 2007Publication date: June 19, 2008Inventors: Tomoru Murao, Youichi Yada, Taiki Yoshii
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Publication number: 20080138179Abstract: A fab can be constructed as a round or rectangular annular tube with a primary cleanspace located in-between its inner and outer tubes. The fab can be encircled with levels upon which tools can be densely packed while preserving unidirectional air flow. If only tool ports are inside, and robotics are used, primary cleanspace size can be minimized. Highly simplified robotics can be used. Tools can be removed and repaired centrally. A secondary cleanspace can be added for tool bodies. Multilevel construction enhances use of prefabricated units for fab build or maintenance. Curves or folds, applied to a conventional planar cleanroom, can construct a wide range of fab geometries, including a tubular non-annular fab. A fab can also be constructed according to a curved or non-curved sectional cut of an annular tube. A novel fab, of a non-curved section, can include a nonsegmented cleanspace or have its tools vertically stacked.Type: ApplicationFiled: October 31, 2007Publication date: June 12, 2008Inventor: Frederick A. Flitsch
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Publication number: 20080120924Abstract: A portable enclosure, easily erectable and collapsible, to provide environment control and prevent contaminants from being released from the enclosure. The enclosure provides a flexible envelope attached to the interior of the space defined by vertical and horizontal supports which can be erected and collapsed. When erected the enclosure functions as an anteroom and has removable panels in the sides and top. In use, the enclosure is sealed against a vertical or horizontal surface to be worked on and a panel from the side of the enclosure is opened and closed to provide access to the surface by the user. When collapsed the enclosure is a package approximately the size of an average golf club bag which is easily portable to another location. Ducting is provided to which negative pressure pumps are connected to maintain negative pressure within the enclosure and draw contaminants into the pump and then into a closed container.Type: ApplicationFiled: January 15, 2008Publication date: May 29, 2008Inventors: Kevin J. Mintie, Jose Guadalupe Munoz
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Patent number: 7377952Abstract: An air decontamination system including a sealed room to hold at least one person and the sealed room having an air inlet. The system further including a vacuum unit to create a negative pressure within the sealed room, by suctioning air through the air inlet into the sealed room and then from the sealed room into an inlet of the vacuum unit. The system still further including a work surface disposed in the sealed room at a predetermined height above a floor of the sealed room and the work surface to receive at least one mail piece and the air to be suctioned downwardly over the at least one mail piece and the work surface; and a filter unit to filter the air as the air is drawn out of the sealed room.Type: GrantFiled: September 1, 2005Date of Patent: May 27, 2008Assignee: American Safe Air, Inc.Inventors: David A. Stout, William R. Lehman
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Publication number: 20080113604Abstract: An embedded computer chassis may include a fan tray receptacle adapted to receive at least one primary fan tray, where the at least one primary fan tray is adapted to be non-redundant in providing cooling air to the embedded computer chassis. Embedded computer chassis may also include a cooling air plenum, where the cooling air plenum is adapted to receive a service fan tray, where the service fan tray is adapted to temporarily provide the cooling air to the embedded computer chassis absent the at least one primary fan tray.Type: ApplicationFiled: October 10, 2006Publication date: May 15, 2008Applicant: MOTOROLA, INC.Inventors: Robert C. Tufford, Mark S. Lanus
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Patent number: 7361082Abstract: A system and method for ventilating a room in which the system has at least one air supply unit and one air exhaust unit. The air inlet unit has a guiding slot diffuser for guiding an airstream in a certain direction, such that a patient, lying down in a bed on his back, receives the airstream frontally. The exhaust unit is arranged near the floor and near a head end of the bed such that air is arranged to leave the room after having ventilated the patient. The air supply unit is also provided with a booster fan arranged in air communication with the guiding slot diffuser such that fresh air can be forced through the diffuser by the aid of the booster fan forming a first an airstream. The first airstream leaves the diffuser bringing with it a larger mass of fresh air leaving the air supply unit via perforated sheets, forming the airstream devised to cool the patient.Type: GrantFiled: September 4, 2003Date of Patent: April 22, 2008Assignee: Johnson Medical Development Pte. Ltd.Inventor: Agne Nilsson