Clean Room Patents (Class 454/187)
  • Patent number: 8827780
    Abstract: A fan coil block of the present invention preferably includes a fan for drawing air and a cooling device for cooling air drawn by the fan. A flexible air handling system of the present invention preferably includes a fan coil block that is supportable overhead by an overhead support system. The present invention is also directed to an air handling method that includes the steps of providing an overhead support system for supporting overhead devices, defining a return air chase within the interior space of a building, and supporting a fan coil block above or within the return air chase using the overhead support system. The fan coil block draws and cools air from the return air chase and returns the cooled air to a plenum above the overhead support system.
    Type: Grant
    Filed: December 30, 2002
    Date of Patent: September 9, 2014
    Assignee: Huntair, Inc.
    Inventors: David Emmett Benson, Kent Peterson, Michael Thomas Post
  • Patent number: 8778066
    Abstract: Disclosed is a vacuum pump exhaust pipe of a chemical vapor deposition apparatus, wherein two ports of the vacuum pump exhaust pipe are respectively connected to a vacuum pump outlet and a scrubber, and anti-sticking inner pipes are installed inside the exhaust pipe and closely contacted with inner walls of the exhaust pipe. The present invention also relates to a vacuum pump of the chemical vapor deposition apparatus. Blockage hardly occurs in the vacuum pump exhaust pipe of the chemical vapor deposition apparatus and the relevant vacuum pump according to the present invention to solve problems of the easily found blockage in the exhaust pipe, wasting the manpower and the time for clearing the exhaust pipe and the effect to the uptime of the chemical vapor deposition apparatus in the prior arts.
    Type: Grant
    Filed: September 27, 2011
    Date of Patent: July 15, 2014
    Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
    Inventor: Peng Chen
  • Publication number: 20140179216
    Abstract: A particle containment system includes an anteroom, an air-cleaning machine, and a vent. The anteroom includes a door and a first end configured to engage an opening in a building. The air-cleaning machine is coupled to a first port formed in a first wall of the anteroom. The air-cleaning machine is configured to provide filtered air to an interior of the anteroom or filter air provided from the interior of the anteroom. The vent is coupled to a second port formed in the first wall or a second wall of the anteroom. The vent is configured to close and seal when the door of the anteroom is opened.
    Type: Application
    Filed: December 21, 2012
    Publication date: June 26, 2014
    Applicant: Walters Healthcare Resources, Inc.
    Inventor: Mark W. Walters
  • Patent number: 8758681
    Abstract: A free radical sterilization system having a chamber defining a region, and a generator for generating free radical reach effluent from a free radical electric generator and/or a vaporizer. A closed loop circulating system without a free-radical destroyer is provided for supplying the mixture of free radicals from the electric generator mixed with the hydrogen peroxide solution in the form of the effluent to the chamber. The free-radical sterilization system is used in sterilizing items in the chamber and, with an open-bottomed wound chamber, in treating wounds on a body.
    Type: Grant
    Filed: June 15, 2012
    Date of Patent: June 24, 2014
    Inventor: Czeslaw Golkowski
  • Patent number: 8741227
    Abstract: An isolator includes a workroom having a first sterilizing material supply port, a first sterilizing material discharge port, a first gas supply port and a first gas discharge port, a sterilization chamber having a second sterilizing material supply port, a second sterilizing material discharge port, a second gas supply port and a second gas discharge port, a sterilizing material supply unit, a first sterilizing material supply path connecting the sterilizing material supply unit to the first sterilizing material supply port, a second sterilizing material supply path connecting the sterilizing material supply unit to the second sterilizing material supply port, a first circulating path connecting the first sterilizing material discharge port to the sterilizing material supply unit, a second circulating path connecting the second sterilizing material discharge port to the sterilizing material supply unit, a first gas supply path, a second gas supply path, a first gas discharge path, a second gas discharge path
    Type: Grant
    Filed: January 26, 2010
    Date of Patent: June 3, 2014
    Assignee: Panasonic Healthcare Co., Ltd.
    Inventors: Yasuhiko Yokoi, Jiro Ohnishi, Shinji Fukui, Akifumi Iwama
  • Patent number: 8713814
    Abstract: A shower drying system directs air downwardly onto the walls, surfaces and/or shower curtain of a shower enclosure. In one embodiment, the air is heated. The movement of the air in the downward direction helps urge droplets of water on the shower surface towards a drain at the lower level of the shower enclosure. Remaining water on the surfaces is evaporated into water vapor that is exhausted from above the shower enclosure, thereby reducing mold and mildew.
    Type: Grant
    Filed: April 5, 2013
    Date of Patent: May 6, 2014
    Inventor: Josh Martin
  • Publication number: 20140087650
    Abstract: The present invention provides a cleanroom for storing glass substrates, and which comprises an exhaust is disposed on a bottom floor of the cleanroom. A first filtering device is arranged on a ceiling of the cleanroom to provide purified airflow to the cleanroom. A second filtering device is arranged on the bottom floor of the cleanroom jointly to create a vertical airflow with the first filtering device so as to reduce the turbulence within the cleanroom. The present invention can readily resolve the prior art issue in which the airborne particles stirred by turbulence within the cleanroom cannot be effectively eliminated.
    Type: Application
    Filed: October 9, 2012
    Publication date: March 27, 2014
    Applicant: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Yunshao Jiang, Chunhao Wu, Kunhsien Lin, Yongqiang Wang, Zhiyou Shu, Zhenhua Guo
  • Publication number: 20140087649
    Abstract: The present invention discloses a cleanroom for storing glass substrates. The cleanroom includes an outlet disposed on a bottom of the cleanroom. A cleaning unit is arranged on a ceiling of the cleanroom and which provides a cleaned, ionized air flow so as to eliminate a static electricity and airborne particles accumulated over a surface of a glass substrate. In addition, the present invention further provides a cleaning unit. An ionized airflow is generated so as to remove the airborne particles and static electricity accumulated over the glass substrate. It features an excellent performance, and therefore increases the yield of the product.
    Type: Application
    Filed: October 8, 2012
    Publication date: March 27, 2014
    Inventors: Yunshao Jiang, Chunhao Wu, Kunhsien Lin, Yongqiang Wang, Zhiyou Shu, Zhenhua Guo
  • Patent number: 8656858
    Abstract: A device and a method for chemically or electrolytically treating work pieces (1) are proposed in an effort to avoid irregular contours of finest conductive structures, pads and lands as well as bridges (shorts) on the one side or breaks on printed circuit boards on the other side. The device comprises processing tanks (2) for the treating of work pieces and a conveyor system for the transport thereof. The conveyor system comprises at least one transport carriage (18), at least one holding element (14, 25) and at least one connection means (12, 13, 35) between the transport carriage(s) and the holding element(s). The processing tanks adjoined with a clean room zone (3). The work pieces are conveyed through the clean room zone using the conveyor system.
    Type: Grant
    Filed: June 30, 2005
    Date of Patent: February 25, 2014
    Assignee: Atotech Deutschland GmbH
    Inventor: Reinhard Schneider
  • Patent number: 8658107
    Abstract: An isolator includes a work chamber, a sterilizing substance supply unit, a gas flow channel pressure adjustment unit, a work chamber barometer, and a controller. The controller is configured to control execution of a gas flow channel leak test for checking a gas leak in a gas flow channel based on a detection result by the work chamber barometer after making the gas flow channel pressure adjustment unit increase or decrease the pressure in the gas flow channel, and is configured to control supply of the sterilizing substance by the sterilizing substance supply unit. The controller performs heating of a heater, which accompanies the supply of the sterilizing substance, in parallel with the gas flow channel leak test.
    Type: Grant
    Filed: August 20, 2009
    Date of Patent: February 25, 2014
    Assignee: Panasonic Healthcare Co., Ltd.
    Inventors: Yasuhiko Yokoi, Jiro Ohnishi, Akifumi Iwama, Masaki Harada, Yoshiaki Noguchi
  • Patent number: 8656670
    Abstract: A system, workflow and facilities for hybrid tissue banks are provided with a central access way having spaces on both sides for public and private diagnostic areas, public and private clean room areas for processing, culturing and other manufacturing steps, public and private storage areas, wherein air flow is into said clean rooms and out of said diagnostic areas and said storage areas, and wherein all public facilities are on one side of the central access-way and private facilities are on the other side, and wherein there are sample pass-throughs between each area, and at least the sample pass-through into and out of the clean room processing areas comprise small enclosed chambers having two access panels (one leading to each space), wherein only one panel can open at a time. Preferably, these areas are preceded by receiving spaces and terminated by shipping spaces, which also have pass-through chambers.
    Type: Grant
    Filed: July 22, 2012
    Date of Patent: February 25, 2014
    Assignee: Stem Cell Reserve, LP
    Inventor: Raymond Mouzannar
  • Patent number: 8641824
    Abstract: A fab can be constructed as a round or rectangular annular tube with a primary cleanspace located in-between its inner and outer tubes. The fab can be encircled with levels upon which tools can be densely packed while preserving unidirectional air flow. If only tool ports are inside, and robotics are used, primary cleanspace size can be minimized. Highly simplified robotics can be used. Tools can be removed and repaired centrally. A secondary cleanspace can be added for tool bodies. Multilevel construction enhances use of prefabricated units for fab build or maintenance. Curves or folds, applied to a conventional planar cleanroom, can construct a wide range of fab geometries, including a tubular non-annular fab. A fab can also be constructed according to a curved or non-curved sectional cut of an annular tube. A novel fab, of a non-curved section, can include a nonsegmented cleanspace or have its tools vertically stacked.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: February 4, 2014
    Inventor: Frederick A. Flitsch
  • Patent number: 8637842
    Abstract: A method of using automatic whole body personnel contamination monitors and/or means for decontaminating individuals exposed to radioactive material contamination is provided. The inventive method involves the use of these monitors and/or decontamination means in intermodal containers of mobile-unit structures dedicated to responding to radiological emergency situations. Also provided are such mobile-unit structures, as well as systems that employ such mobile-unit structures.
    Type: Grant
    Filed: March 22, 2012
    Date of Patent: January 28, 2014
    Assignee: UniTech Services Group, Inc.
    Inventors: Leslie B. Case, III, Michael R. Fuller, Gregg A. Johnstone, Thomas Pearce O'Kelley, Glenn E. Roberts
  • Publication number: 20140013556
    Abstract: A fab can be constructed as a round or rectangular annular tube with a primary cleanspace located in-between its inner and outer tubes. The fab can be encircled with levels upon which tools can be densely packed while preserving unidirectional air flow. If only tool ports are inside, and robotics are used, primary cleanspace size can be minimized. Highly simplified robotics can be used. Tools can be removed and repaired centrally. A secondary cleanspace can be added for tool bodies. Multilevel construction enhances use of prefabricated units for fab build or maintenance. Curves or folds, applied to a conventional planar cleanroom, can construct a wide range of fab geometries, including a tubular non-annular fab. A fab can also be constructed according to a curved or non-curved sectional cut of an annular tube. A novel fab, of a non-curved section, can include a non-segmented cleanspace or have its tools vertically stacked.
    Type: Application
    Filed: September 11, 2013
    Publication date: January 16, 2014
    Inventor: Frederick A. Flitsch
  • Patent number: 8608825
    Abstract: Embodiments of the invention generally provide a containment system having integrated bubble tight-dampers. In another embodiment, the containment system includes an integral auto-scan mechanism disposed in the housing of the containment system so that a filter element, disposed in the housing, may be leak tested without accessing the interior of the housing. In yet another embodiment, a method for testing a filter disposed in a containment system includes challenging an upstream side of a filter element disposed in a housing of the containment system with a test aerosol, and automatically moving a probe disposed within the housing to obtain samples for leak testing.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: December 17, 2013
    Assignee: Camfil Farr, Inc.
    Inventors: Thomas C. Morse, Mark Huza
  • Publication number: 20130324026
    Abstract: In a system and method of controlling particulate count in a clean room having a number of compartments/zones in series, in response to a first level of energy consumption by speed adjustable fans supplying a first volume of air per unit of time to the clean room, differential air pressures are established in the clean room compartment/zone-by-compartment/zone in series from a first compartment/zone which has a requirement for the highest air pressure to a last compartment/zone which has a requirement for the lowest air pressure. In response to a second level of energy consumption by the speed adjustable fans supplying a second volume of air per unit of time to the clean room, the same differential air pressures are substantially maintained in the clean room.
    Type: Application
    Filed: February 16, 2012
    Publication date: December 5, 2013
    Inventor: John L. Fiorita, JR.
  • Patent number: 8584349
    Abstract: A flexible, multi-product, multi-technology, expandable facility for manufacturing products, such as biologicals, pharmaceuticals, or chemicals, and manufacturing processes using elements of such a facility.
    Type: Grant
    Filed: November 15, 2012
    Date of Patent: November 19, 2013
    Assignee: Xoma Technology Ltd.
    Inventors: Patrick J. Scannon, Frank A. Bernard, Alfred C. Dadson, Jr., Robert S. Tenerowicz
  • Patent number: 8583289
    Abstract: A climate control system or a data center includes a computer room air conditioner (CRAC) and an air economizer. A control module determines whether outside air is suitable for use in cooling the data. If the outside air is suitable for use, outside air and not the CRAC is used to cool the data center when the dry bulb temperature of the outside air is below a minimum set point. The outside air is conditioned before it is introduced as supply air so that it is above a minimum temperature. If the outside air is suitable for use and the dry bulb temperature of the outside air is above the set point, the control module determines a cooling percentage of cooling of the data center to be provided by the CRAC and a cooling percentage to be provided by the outside air.
    Type: Grant
    Filed: February 16, 2009
    Date of Patent: November 12, 2013
    Assignee: Liebert Corporation
    Inventors: John F. Stack, Stephen A. Mowrer
  • Patent number: 8568501
    Abstract: A transportable field containment system with transparent hood. The transportable field containment system being easily and rapidly deployable and transportable by virtue of its relatively small size and light weight, a collapsible transparent hood that covers the containment area over a work site on the ground, the hood including detachable or folding side panels and removable door panels. The system preferably includes an exhaust component that creates negative air pressure in the containment area under the hood, thereby drawing air that contains hazardous substances, that may be released while the work is being conducted, through one or more off-gas filters.
    Type: Grant
    Filed: April 8, 2011
    Date of Patent: October 29, 2013
    Assignee: Parsons Corporation
    Inventor: William J. Kelso
  • Patent number: 8545296
    Abstract: A dust-exhaust acceleration face of a dust-exhaust assistant member is disposed so as to face a top face of a heat radiating member of a production facility or the like so that a gap between the top face of the heat radiating member and the dust-exhaust acceleration face of the dust-exhaust assistant member is occupied by ascending air flows, each having a falling velocity (terminal velocity) that is not accelerated beyond a fixed velocity, to form a balanced state between the size of an object, such as a dust particulate or a chemical substance particulate, and air resistance when the object is freely falling in the air; thus, the object, such as a dust particulate and a chemical substance particulate, is prevented from falling onto the heat radiating member.
    Type: Grant
    Filed: October 20, 2008
    Date of Patent: October 1, 2013
    Assignee: Panasonic Corporation
    Inventors: Katsuhito Uematsu, Naoko Matsuda, Hiroyuki Naka
  • Publication number: 20130252533
    Abstract: The present teachings relate to various embodiments of an hermetically-sealed gas enclosure assembly and system that can be readily transportable and assemblable and provide for maintaining a minimum inert gas volume and maximal access to various devices and apparatuses enclosed therein. Various embodiments of an hermetically-sealed gas enclosure assembly and system of the present teachings can have a gas enclosure assembly constructed in a fashion that minimizes the internal volume of a gas enclosure assembly, and at the same time optimizes the working space to accommodate a variety of footprints of various OLED printing systems. Various embodiments of a gas enclosure assembly so constructed additionally provide ready access to the interior of a gas enclosure assembly from the exterior during processing and readily access to the interior for maintenance, while minimizing downtime.
    Type: Application
    Filed: December 19, 2012
    Publication date: September 26, 2013
    Applicant: Kateeva, Inc.
    Inventors: JUSTIN MAUCK, ALEXANDER SOU-KANG KO, ELIYAHU VRONSKY, SHANDON ALDERSON
  • Publication number: 20130237139
    Abstract: The invention relates to a method for testing and/or monitoring the air quality in an operating room (100) with an operating table (110) arranged in it. In order to achieve conclusions about the air quality with simple measures it is suggested that at least one measured value recorder (118, 120, 122, 123) is arranged in, on and/or in the range of the operating table by means of which the air quality of the air is measured in the area of the operating table and during the activities.
    Type: Application
    Filed: February 28, 2013
    Publication date: September 12, 2013
    Inventor: Rupert MACK
  • Patent number: 8523644
    Abstract: An operation unit, comprising a wall and an air flow unit, said air flow unit being provided with means for filtering said air, said wall being provided with at least one opening and a cover, covering at least part of said opening, said air flow unit comprising at least one air outlet opening for directing air from said air flow unit over said cover, air inlet means preferably being provided for retracting air to said air flow unit.
    Type: Grant
    Filed: March 25, 2004
    Date of Patent: September 3, 2013
    Assignee: Medical Technology Transfer Holding B.V.
    Inventor: Gerrit Reinold J. Melles
  • Patent number: 8488311
    Abstract: A container data center includes a mobile container and a number of servers. The mobile container includes a main room receiving the servers, and an air shower room isolated from the main room. The air shower room includes an outer door, an inner door, a blower, and a dust absorber. The outer door connects the air shower room and is used to separate the air shower room from the outer environment. The inner door connects the air shower room and is used to separate the air shower room from the main room. The blower and the dust absorber are secured on two opposite walls of the air shower room respectively, the blower being configured for blowing air towards the dust absorber.
    Type: Grant
    Filed: August 11, 2011
    Date of Patent: July 16, 2013
    Assignee: Hon Hai Precision Industry Co., Ltd.
    Inventor: Ming-Shang Tsai
  • Patent number: 8469782
    Abstract: Described herein is an air handling unit for use in an integrated data center that provides for efficient cooling.
    Type: Grant
    Filed: March 30, 2009
    Date of Patent: June 25, 2013
    Assignee: Switch Communications Group, LLC
    Inventor: Rob Roy
  • Patent number: 8438753
    Abstract: An application for a shower drying system that directs air downwardly onto the walls, surfaces and/or shower curtain of a shower enclosure. In one embodiment, the air is heated. The movement of the air in the downward direction helps urge droplets of water on the shower surface towards a drain at the lower level of the shower enclosure. Remaining water on the surfaces is evaporated into water vapor that is exhausted from above the shower enclosure, thereby reducing mold and mildew.
    Type: Grant
    Filed: August 17, 2010
    Date of Patent: May 14, 2013
    Inventor: Josh Martin
  • Publication number: 20130109291
    Abstract: Biosafety units, methods of making and sealing the same are disclosed herein. The present invention includes a unitary structure able to be validated for pharmaceutical manufacturing comprising: at least one controlled air, sealable, sterilizable cleanroom; a mechanical system room adjacent to and separate from the cleanroom comprising: one or more air handling units that provide conditioned air to the cleanroom; and one or more power busses that provide power to electrical outlets in the cleanroom from two sources, wherein the at least two power supplies are connectable to one or more external electrical power sources; an integrated fire suppression system integral to the cleanroom; and one or more corridor connectors, wherein a corridor can be attached at the corridor connector.
    Type: Application
    Filed: November 6, 2012
    Publication date: May 2, 2013
    Applicant: G-CON, LLC
    Inventor: G-Con, LLC
  • Patent number: 8419837
    Abstract: An air filtration system includes a housing that is interchangeably positioned within a plenum that is in fluid communication between the housing and a room. A fan is positioned within the housing and configured to draw contaminated air from the plenum. At least one filter member is positioned within the housing and configured to filter the contaminated air. A flexible duct is configured to channel filtered air from the housing to the room. The flexible duct is configured to enable the interchangeability of the housing.
    Type: Grant
    Filed: January 25, 2011
    Date of Patent: April 16, 2013
    Assignee: Huntair, Inc.
    Inventor: Kevin J. Schreiber
  • Patent number: 8394156
    Abstract: In one embodiment, an air filtration system includes a first ventilation path connected between at least one external air supply and a clean room. The first ventilation path is configured to direct air from the at least one external air supply to the clean room. A second ventilation path is connected to the clean room. The second ventilation path is configured to recirculate air in the clean room. A third ventilation path, separate from the first path, is connected between the at least one external air supply and a tool environment disposed within the clean room. The third ventilation path includes an ultra-pure air filtration unit disposed between the outdoor air supply and the tool environment. The ultra-pure air filtration unit includes a compressor and a dryer.
    Type: Grant
    Filed: April 30, 2008
    Date of Patent: March 12, 2013
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tzu-Sou Chuang, James Jeng-Jyi Hwang
  • Patent number: 8388715
    Abstract: A modular apparatus for processing air for classified environments and processes for preparing foods in general is constituted by a recovery air and outside air suction section with an optional free cooling fan; an air mixing section; a filtering section; a cold and hot battery section; a spacing section between the batteries of the cold and hot battery section; an air delivery ventilating section; an optional absolute filtering section; and an air delivery section.
    Type: Grant
    Filed: March 4, 2010
    Date of Patent: March 5, 2013
    Assignee: Sinteco Impianti S.R.L.
    Inventor: Adam Franck
  • Patent number: 8376821
    Abstract: A work cabinet with a work chamber that contains, on a temporary basis, a material being worked upon has a transfer opening connecting the work chamber with an ambient space of the cabinet. The transfer opening permits access to the worked material and gives access to the work chamber. A connected ventilating device provides a lower-than-ambient pressure in the work chamber. The work cabinet further has a printer transfer opening for connecting the work chamber to the delivery outlet for the printed output of a printer that is set up in the vicinity of the work cabinet. The delivery outlet for the printer output may reach through the printer transfer opening into the work chamber or it may merely adjoin the printer transfer opening.
    Type: Grant
    Filed: January 9, 2009
    Date of Patent: February 19, 2013
    Assignee: Mettler-Toledo AG
    Inventor: Bruno Nufer
  • Patent number: 8371912
    Abstract: A unit type clean room has a wide operation space while providing a high air cleaning effect, is unitized and can be easily installed. The unit type clean room is characterized by including: a machine room unit; a front room unit; and a clean room unit, wherein an air conditioner and a fixed air volume device are installed in the machine room unit, the air conditioner is connected to two HEPA filter units installed in the clean room unit via an air duct, the fixed air volume device is connected to a return air chamber installed in the clean room unit via a return air duct to circulate purified air, purified air is always retained in the clean room, and a front room and an air shower are placed in the front room unit.
    Type: Grant
    Filed: December 23, 2009
    Date of Patent: February 12, 2013
    Assignee: Unitec Inc.
    Inventor: Kazuhiro Ozeki
  • Patent number: 8354057
    Abstract: A method of sterilizing a closed environment is provided in which a disinfection apparatus is placed into the closed environment; it then generates ozone to a predetermined ozone concentration, following which the humidity of the closed environment is rapidly increased. A catalytic converter then reduces the ozone concentration to safe levels. When the ozone concentration is reduced to a predetermined safe level, the disinfection apparatus signals.
    Type: Grant
    Filed: June 17, 2008
    Date of Patent: January 15, 2013
    Inventors: Doug Heselton, Nigel Boast, Jim Hudson, Gordon Esplin
  • Patent number: 8337751
    Abstract: A systematic decontamination and containment method for decontaminating personnel is disclosed. This method includes providing a plurality of components positionable on a selected location for establishment of a multi-station decontamination and containment facility to decontaminate personnel and to contain contaminants collected during the decontamination process. The components can include a plurality of collapsible frame and roof assemblies, wall and roof covers, a weapons clearing assembly, a weapons storage locker, a hanging bar, a signage assembly, collapsible containment hamper assemblies, a covered dispensing assembly, a shuffle box, a multi-wipe dispensing assembly, and a transportable containment enclosure. The enclosure is shaped and sized to removably retain the system's components for transportation or the like.
    Type: Grant
    Filed: April 26, 2010
    Date of Patent: December 25, 2012
    Inventors: Ricky William Stewart, Lee Walker Brillhart, III
  • Publication number: 20120298995
    Abstract: Provided is a silicon wafer which is stabilized in quality exerting no adverse influence on device characteristics and manufactured by restricting a boron contamination from the environment, and a manufacturing process therefor. Concretely, the silicon wafer is characterized by an attached boron amount thereon being 1×1010 atoms/cm2 or less. In order to manufacture such a wafer as contains a small amount of boron attached on the wafer surface, the wafer is treated in an atmosphere of boron concentration of 15 ng/m3 or less. Boron-less filters and boron adsorbing filters are used as filters in a clean room and the like so as to lower the boron concentration in the atmosphere.
    Type: Application
    Filed: August 2, 2012
    Publication date: November 29, 2012
    Applicant: SHIN-ETSU HANDOTAI CO., LTD.
    Inventors: Fumiaki Maruyama, Naoki Naito, Atsuo Uchiyama
  • Publication number: 20120295530
    Abstract: The present invention is to provide a backflow prevention apparatus of a clean room for solving a negative pressure point in the clean room so as to prevent a backflow from underfloor of the clean room. An intake port for suctioning the air of an underfloor chamber, a fan for supplying the air to an upper part in the apparatus, and a blowoff port installed on a side surface of an upper-floor part of the apparatus for supplying the air into the clean room are provided. By supplying the air of the underfloor chamber into the clean room, the backflow from the underfloor chamber into the clean room is prevented.
    Type: Application
    Filed: February 28, 2012
    Publication date: November 22, 2012
    Inventors: Naoya IKENO, Yousuke Okui
  • Publication number: 20120295531
    Abstract: A method for operating the arrangement for a laboratory room confined by a floor, a ceiling and walls connecting the floor with the ceiling, including inducing an air flow from an air inlet through a platform to an air outlet in a substantially laminar fashion. The arrangement includes a main base suspended on the floor; a tool base arranged on the main base; a platform arranged around the tool base, wherein the platform is permeable for air, and the platform is suspended at the walls; the air inlet arranged below the platform; the air outlet arranged above the tool base; and air guides for directing an air flow upwards.
    Type: Application
    Filed: June 7, 2012
    Publication date: November 22, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Urs T. Duerig, Bernd W. Gotsmann, Emanuel Loertscher, Daniel Widmer
  • Patent number: 8308536
    Abstract: The present invention relates to a ventilating device for providing a zone (1) of clean air between the ventilating device and a workplace region (2), which ventilating device comprises air supply units (3) adapted to generating laminar air flows intended to constitute said clean air zone. The ventilating device comprises at least three air supply units (3) disposed in a closed pattern and air stop and guide units (4) which prevent or hinder air with bacteria-bearing and other pollutant particles which surrounds the clean air zone (1) from being drawn in between the air supply units and into the clean air zone.
    Type: Grant
    Filed: April 28, 2008
    Date of Patent: November 13, 2012
    Assignee: Airsonett Operating Room Innovation AB
    Inventors: Dan Allan Robert Kristensson, Jan â„«ke Allan Kristensson, PÃ¥l Martin Svensson
  • Publication number: 20120276835
    Abstract: An isolation booth for creating a locally isolated space, includes: a top portion; a bottom portion; a curtain rail that is provided on at least one of the top portion and the bottom portion; and a curtain member that is in an endless belt shape and has a ring shape when viewed from above, is supported by the curtain rail in a manner so as to be able to be moved along the curtain rail, and is provided so as to create the space between the top portion and the bottom portion, the curtain member including a glove member that bulges out toward an inside of the space.
    Type: Application
    Filed: April 23, 2012
    Publication date: November 1, 2012
    Inventor: Yoshihito FUKUDA
  • Patent number: 8298054
    Abstract: Embodiments of the present invention are directed to a customizable bio-manufacturing system which includes a manufacturing space having a first air handling system for providing supply air and a second air handling system for handling exhaust air, the supply air system being optionally provided with at least one of filtration, heating, cooling and or humidity control and a plurality of portable modules provided within the manufacturing space. At least one module having an interior capable of being interconnected with another module interior and each module's interior includes one or more components to perform at least one specific task of a biological, chemical, and/or pharmaceutical manufacturing process. At least one module includes an on-board environmental control system for controlling an environment within the module and a connection means for interconnecting the module interior with another module interior.
    Type: Grant
    Filed: February 3, 2005
    Date of Patent: October 30, 2012
    Assignee: Xcellerex, Inc.
    Inventors: Geoffrey Hodge, Parrish Galliher, Michael Fisher
  • Patent number: 8282698
    Abstract: In various exemplary embodiments described herein, a system and related method to reduce particle contamination on substrates is disclosed. The system includes a substrate traverser mechanism having tracks to transport substrate carriers with one or more traverser ducts arranged to surround, at least partially, the tracks. The one or more ducts have slits along at least a substantial portion of a length of the tracks. A traverser exhaust fan is coupled to one end of each of the one or more traverser ducts. The fan provides sufficient volumetric airflow such that a velocity of the volumetric airflow through the slits is greater than a terminal settling velocity of a predetermined particle size. The fan draws particles less than approximately the predetermined particle size generated by the substrate traverser mechanism into the one or more traverser ducts.
    Type: Grant
    Filed: March 24, 2010
    Date of Patent: October 9, 2012
    Assignee: Lam Research Corporation
    Inventor: Eric H. Lenz
  • Patent number: 8262988
    Abstract: An antigen supply device 1 according to the present invention is mainly configured by a cylindrical member 3 extending in the vertical direction. An air suction port 5 for sucking the air in the antigen exposure chamber is provided at a lower end of the cylindrical member. An axial fan 6 that generates a flow of the air flowing upward in an axial direction of the cylindrical member is attached above the air suction port of the cylindrical member. Moreover, a supply port 4 through which high-concentration antigens are jetted from a dust feeder on the outside of the antigen exposure chamber is provided above the axial fan of the cylindrical member.
    Type: Grant
    Filed: September 28, 2005
    Date of Patent: September 11, 2012
    Assignee: Shinryo Corporation
    Inventors: Huaipeng Tang, Akihiro Seta, Minoru Okuda, Kazuhiro Hashigucci, Kimihiro Okubo
  • Patent number: 8257649
    Abstract: Superior hydroxyls are provided which have effects on organic and inorganic compounds and/or pollutants over substantial periods of time and/or at substantial distances from where the superior hydroxyls are generated. Also provided is a hydroxyl generator, in which UV-lamps are positioned such that the coronas which they produce when emitting UV-radiation fill substantially all of the interior space of the hydroxyl generator. The coronas overlap each other by a maximum amount of between 5% and 25% of the radius of each corona.
    Type: Grant
    Filed: April 27, 2009
    Date of Patent: September 4, 2012
    Assignee: HGI Industries, Inc.
    Inventor: Guy J. E. Morneault
  • Publication number: 20120214396
    Abstract: The present invention provides various aspects of support for a fabrication facility capable of routine placement and replacement of processing tools in at least a vertical dimension relative to each other.
    Type: Application
    Filed: February 16, 2012
    Publication date: August 23, 2012
    Inventor: Frederick A. Flitsch
  • Patent number: 8246703
    Abstract: An air filter system and an air filter therefor are provided for use in a building with first and second zones separated by a wall-door system having a wall with a door therein. Weatherstripping is mounted between side and upper edges of the door and a door frame in the wall and between the lower edge of the door and the threshold region of the floor to substantially seal against air flow between the door edges and the door frame and floor when the door is closed. An air flow permitting opening is provided in the wall-door system, sized to permit a controlled amount of airflow between the first and second zones when there is a pre-determined pressure differential between said zones. An air filter is mounted in such opening.
    Type: Grant
    Filed: February 18, 2010
    Date of Patent: August 21, 2012
    Assignee: Bordin Racing Limited
    Inventor: Andrew Bordin
  • Publication number: 20120190287
    Abstract: A clean room air handling system is disclosed. The system includes an air handler adapted to receive an air flow, the air handler further provided with a cooling apparatus, and at least one supply fan downstream of the at least one air handler, each supply fan not having an assoiciated cooling unit or filter structure and capable of providing an air velocity of greater than 1600 feet per minute, and modulation means for operating said system.
    Type: Application
    Filed: March 30, 2012
    Publication date: July 26, 2012
    Inventor: Ray Ghattas
  • Patent number: 8202337
    Abstract: Embodiments of the invention generally provide a containment system having integrated bubble tight-dampers. In another embodiment, the containment system includes an integral auto-scan mechanism disposed in the housing of the containment system so that a filter element, disposed in the housing, may be leak tested without accessing the interior of the housing. In yet another embodiment, a method for testing a filter disposed in a containment system includes challenging an upstream side of a filter element disposed in a housing of the containment system with a test aerosol, and automatically moving a probe disposed within the housing to obtain samples for leak testing.
    Type: Grant
    Filed: September 19, 2011
    Date of Patent: June 19, 2012
    Assignee: Camfil Farr, Inc.
    Inventors: Thomas C. Morse, Mark Huza
  • Patent number: 8202146
    Abstract: A packaged system for selectively (a) exhausting moist air from a shower stall while the shower stall is in use, and (b) drying the ceiling, walls, and floor of the shower stall after use. The system reduces the build-up of mold, mildew, and soap scum in the shower stall, and also reduces excess moisture in the building. A blower moves air through passages opened and closed by dampers driven by an electric damper actuator through a linkage of crank arms and connecting rods. The positioning of the dampers determines the air flow direction, and thereby the operating mode. A control switch starts and stops the system and also selects the damper position. A diffuser, connected to a duct, receives air from the shower stall in the exhaust mode, and alternatively directs drying air from a room air intake onto the surfaces of the shower stall in the drying mode.
    Type: Grant
    Filed: September 7, 2007
    Date of Patent: June 19, 2012
    Inventors: Russell Lowell Johnson, Surinder Amarjit Kang
  • Patent number: 8188874
    Abstract: A sampling system for quantifying the amount of contaminants in a controlled environment within a facility. The system has an air sampling devices each associated with a respective flow switch module, both within the controlled environment, and a first and second controller located outside the controlled environment. The first controller is in flow communication with the air sampling devices. The first controller is also in flow communication with the flow switch modules and controls a vacuum source to draw a predetermined volume of air through the at least one air sampling device via the at least one flow switch module at a desired flow rate. The flow switch module detects when the actual flow rate falls below or above a predetermined value, and generates an alarm.
    Type: Grant
    Filed: March 12, 2009
    Date of Patent: May 29, 2012
    Assignee: Veltek Associates, Inc.
    Inventor: Rosario S. Calio
  • Patent number: 8175753
    Abstract: Methods of managing computer equipment: the methods may comprise receiving data indicating a power dissipated by computer equipment in a portion of the server room and receiving data indicating an actual airflow through the portion of the server room. The methods may also comprise calculating a target airflow in the portion of the server room considering the power dissipated by computer equipment in the portion of the server room and an expected difference in temperature between at least one hot aisle and at least one cold aisle in the portion of the server room, and calculating a recommended action for reaching the target airflow. The recommended action may be selected from the group consisting of: changing a static pressure generated by at least one cooling unit servicing the portion of the server room; changing a number of perforated tiles present in the portion of the server room; and changing the type of one or more perforated tiles present in the portion of the server room.
    Type: Grant
    Filed: February 13, 2009
    Date of Patent: May 8, 2012
    Assignee: The PNC Financial Services Group, Inc.
    Inventors: Stephen D. Sawczak, Todd Komlenic, Michael Adams