Mass Heated Because Of Resistance To Flow Of Electric Current Patents (Class 60/528)
  • Patent number: 6745567
    Abstract: Systems and methods are disclosed which provide controlled positioning of a microcomponent in a plurality of directions for which control is provided independently. Preferably such controlled translation is provided by a MEMS micro-translation system having a relatively large range of motion, such as bi-directionally along an X axis, which is adapted for production using monolithic manufacturing processes without requiring post-process manufacturing steps. Preferred embodiments provide independent microcomponent translation along multiple axes, e.g., provide translation along an X axis, a Y axis, and/or a rotational axis.
    Type: Grant
    Filed: December 28, 2001
    Date of Patent: June 8, 2004
    Assignee: Zyvex Corporation
    Inventor: Andre L. Mercanzini
  • Patent number: 6744344
    Abstract: A disconnect switch for the load circuit of a vehicle battery, includes a movable contact element (81) and a stationary contact element (64) that are linked with a locking mechanism. For releasing the locking mechanism a shape-memory alloy release element (4) is used that contracts when heated. For closing the locking mechanism a shape-memory alloy spring element (110) is provided that induces closure of the mechanism by expansion.
    Type: Grant
    Filed: November 20, 2002
    Date of Patent: June 1, 2004
    Assignee: Siemens Aktiengesellschaft
    Inventors: Markus Geuder, Stefan Kautz, Matthias Marondel
  • Patent number: 6739132
    Abstract: A thermal microactuator is provided that can be deflected in multiple positions. The actuator has a hot arm and a cold arm coupled together at their distal ends suspended above a reference plane of a substrate. A potential difference is applied across the hot arm so that a current circulates through the hot arm but not the cold arm.
    Type: Grant
    Filed: April 30, 2002
    Date of Patent: May 25, 2004
    Assignee: ADC Telecommunications, Inc.
    Inventors: Susan C. Bromley, Bradley J. Nelson, Karl Vollmers, Arunkumar Subramanian, Eniko Enikov, Kamal Deep Mothilal
  • Patent number: 6732516
    Abstract: An actuator device comprises a flexible cable (2) and opposite ends (4, 5), one of which is connected to a control member and the other to a controlled member. At least one portion of the flexible cable (2) is made of a shape-memory material in such a way that the device can be used both as a mechanical element of flexible transmission between the control member and the controlled member, and as a shape-memory actuator, designed to operate the controlled member following upon a variation in length of said shape-memory portion.
    Type: Grant
    Filed: February 20, 2003
    Date of Patent: May 11, 2004
    Assignee: C.R.F. Societa Consortile Per Azioni
    Inventors: Francesco Butera, Marco Biasiotto, Stefano Alacqua
  • Patent number: 6718764
    Abstract: A system and method of adjusting the power off positioning of a microactuator is disclosed. The microactuator has a first power off position and comprises a bimorph component. The bimorph comprises at least two materials, wherein the materials have different thermal expansion characteristics. When heated, the bimorph component of the microactuator bends due to asymmetric thermal expansion of the materials. If one of said materials is forced beyond a yield point, then when cooled, the actuator assumes a second power off position. The microactuator maintains the second power off position due to stress in the bimorph, which is induced by forcing the material beyond its yield point.
    Type: Grant
    Filed: June 28, 2002
    Date of Patent: April 13, 2004
    Assignee: Zyvex Corporation
    Inventors: Niladri Sarkar, Aaron Geisberger
  • Patent number: 6715286
    Abstract: A radiation apparatus is disclosed. The radiation apparatus completely adheres to a central processing unit for absorbing thermal energy generated by the central processing unit. When disassociating the radiation apparatus from the central processing unit, the radiation apparatus presses the central processing unit by a disassociating flake. Thus the radiation apparatus moves for disassociating from the central processing unit, to achieve the purpose of completely disassociating the radiation apparatus from the central processing unit.
    Type: Grant
    Filed: December 31, 2002
    Date of Patent: April 6, 2004
    Assignee: Inventec Corporation
    Inventor: Frank Wang
  • Publication number: 20040055294
    Abstract: An integrated circuit device includes a substrate. Drive circuitry is arranged on the substrate. A plurality of micro-electromechanical devices is positioned on the substrate. Each device includes an elongate electrothermal actuator having a fixed end that is fast with the substrate so that the actuator is connected to the drive circuitry and a free end that is displaceable along a path relative to the substrate to perform work when the actuator receives an electrical signal from the drive circuitry. A heat sink is positioned intermediate ends of the actuator to disperse excessive heat build-up in the actuator.
    Type: Application
    Filed: September 22, 2003
    Publication date: March 25, 2004
    Inventor: Kia Silverbrook
  • Publication number: 20040055295
    Abstract: An integrated circuit device includes a substrate. Drive circuitry is arranged on the substrate. A plurality of micro-electromechanical devices is positioned on the substrate. Each device includes an elongate actuator having a fixed end that is fast with the substrate so that the actuator is connected to the drive circuitry and a free end that is displaceable along a path relative to the substrate to perform work. The actuator includes a pair of elongate arms that are spaced relative to each other along the path and are connected to each other at each end, with one of the arms being connected to the drive circuitry to define a heating circuit and being of a material that is capable of expansion when heated, such that, when the heating circuit receives an electrical signal from the drive circuitry, that arm expands relative to the other to deform the actuator and thus displace said free end along said path.
    Type: Application
    Filed: September 22, 2003
    Publication date: March 25, 2004
    Inventor: Kia Silverbrook
  • Patent number: 6708492
    Abstract: An out-of-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material (e.g., silicon). The actuator includes first and second anchors secured to the substrate and multiple elongated thermal buckle beams that are secured between the anchors. The buckle beams are formed of semiconductor material, such as polysilicon. In one implementation, the buckling beams are coupled together by a pivot frame that includes a frame base secured to each buckle beam and at least one pivot arm that is coupled to the frame base at one end and includes a free end that pivots out-of-plane when the actuator is activated. A cyclic current source directs cyclic electrical current through the thermal buckle beams via the anchors to impart thermal expansion of the buckle beams and hence a cyclic buckling motion of them out of the plane (i.e., away from) the substrate.
    Type: Grant
    Filed: January 17, 2002
    Date of Patent: March 23, 2004
    Assignee: Microsoft Corporation
    Inventor: Michael J. Sinclair
  • Patent number: 6708491
    Abstract: A micrometer sized, single-stage, vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. A member mechanically and electrically couples the free ends of the hot and cold arms such that the member moves away from the substrate when current is applied to at least the hot arm. The hot arm can optionally include a grounding tab to minimize thermal expansion of the cold arm.
    Type: Grant
    Filed: September 12, 2000
    Date of Patent: March 23, 2004
    Assignee: 3M Innovative Properties Company
    Inventors: Billy L. Weaver, Douglas P. Goetz, Kathy L. Hagen, Mike E. Hamerly, Robert G. Smith, Silva K. Theiss
  • Patent number: 6703916
    Abstract: The invention relates to a microswitch containing conductors located on a first level and conductors located on a second level, where the conductors on the first level are supported by a deformable element which can switch by means of an actuator with a bimetallic effect, and where the effect of this switching is that the gap between the conductors on the first level and the conductors on the second level is modified, characterised in that the actuator with a bimetallic effect consists of resistors in close and localised contact with the deformable element, and in that the resistors are capable, when traversed by an electric control current, of expanding sufficiently under the effect of the heat produced by the passage of the electric command current to cause, by the bimetallic effect, the deformable element to trigger before the heat produced in the resistors has been able to propagate into the deformable element.
    Type: Grant
    Filed: December 17, 2001
    Date of Patent: March 9, 2004
    Assignee: Commissariat a L'Energie Atomique
    Inventors: Pierre-Louis Charvet, Michel Dufour
  • Patent number: 6698201
    Abstract: Linear bimorph actuators are cascaded together in serpentine array structures to achieve large angle rotary displacements. Bimorph units contain single material beams that remain straight when heated coupled with substantially parallel bilayer beams that deflect when heated, due to differential thermal expansion of the layers. For a bilayer beam, advantageous materials are gold on top of polysilicon. The angular deflection is amplified by cascading to achieve cumulative rotational displacements up to greater than 90 degrees. Successive beams can be connected electrically in series to provide a continuous current path for resistive joule heating. In various embodiments, the actuator is fully permanently anchored or releasably attached to a substrate, or at least a segment of the substrate is removed from beneath the actuator to prevent mechanical interference.
    Type: Grant
    Filed: June 5, 2002
    Date of Patent: March 2, 2004
    Assignee: Zyvex Corporation
    Inventors: Niladri Sarkar, Aaron Geisberger
  • Publication number: 20040035108
    Abstract: An apparatus for two degree of freedom positioning a moveable structure relative to a support structure is provided. The apparatus includes a moveable structure, a support structure, a compliant support disposed between the moveable structure and the support structure. The compliant support biases the moveable structure away from the support structure. In addition, three shape memory alloy actuators are provided between the structures and symmetrically arranged about the compliant support. The shape memory alloy actuators are selectively activated to provide two degrees of freedom of movement for the moveable structure relative to the support structure.
    Type: Application
    Filed: May 6, 2003
    Publication date: February 26, 2004
    Inventor: Andrei Szilagyi
  • Patent number: 6695061
    Abstract: An actuator uses a gas absorptive material to produce displacement of a member of the actuator. In a described embodiment, an actuator includes a metal hydride powder. When the powder absorbs hydrogen gas, it expands and displaces a piston. When the powder discharges hydrogen gas, the powder contracts, displacing the piston in an opposite direction. Various methods of controlling gas absorption and discharge are provided.
    Type: Grant
    Filed: February 27, 2002
    Date of Patent: February 24, 2004
    Assignee: Halliburton Energy Services, Inc.
    Inventors: Michael L. Fripp, Neal G. Skinner, Roger L. Schultz
  • Patent number: 6691513
    Abstract: A system and method for providing an improved micro-electro-mechanical (MEMS) electrothermal actuator is disclosed. In prior art electrothermal actuators an electric current passes through a narrow arm and returns through a wide arm. The larger current density in the narrow arm heats the narrow arm so that it expands more than the wide arm. The differential expansion of the hot narrow arm and the cold wide arm deflects the end of the cold wide arm. The present invention provides an additional hot arm to provide a return path for the electric current so that the cold arm does not conduct electric current. The present invention optimizes power consumption, tip deflection and generated force. A bidirectional thermal beam actuator is also disclosed.
    Type: Grant
    Filed: August 16, 2002
    Date of Patent: February 17, 2004
    Assignee: PC Lens Corporation
    Inventor: Edward S. Kolesar
  • Patent number: 6684638
    Abstract: The invention relates to a micro reactor arrangement, particularly for a micro relay. It comprises a substrate (1) with two thermomechanical micro actuators (3, 4). In response to thermal stimulation, the first micro actuator (3) performs a movement in parallel with the substrate surface (2), while the second micro actuator moves in a direction orthogonal on the substrate surface (2). Both thermomechanical micro actuators are so disposed relative to each other that the first micro actuator (3), in the extended state, reaches under the second micro actuator (4). With these provisions, the first micro actuator (3) can be maintained in this position without supply of power when the second micro actuator (4) is de-energized. With the present micro actuator arrangement, one can achieve the advantages of a high activation force and long positioning travels of thermomechanical micro actuators for micro relays, without the necessity to supply energy for maintaining the individual switching states.
    Type: Grant
    Filed: September 27, 2002
    Date of Patent: February 3, 2004
    Assignee: Fraunhofer Gesellschaft zur angewandten Forderung der Forschung e.V.
    Inventors: Hans Joachim Quenzer, Bernd Wagner
  • Patent number: 6685303
    Abstract: An apparatus for a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element extending from the base element and normally residing at a first position before activation. The cantilevered element includes a first layer constructed of an electrically resistive material, such as titanium aluminide, patterned to have a first resistor segment and a second resistor segment each extending from the base element; a coupling device that conducts electrical current serially between the first and second resistor segments; and a second layer constructed of a dielectric material having a low coefficient of thermal expansion and attached to the first layer.
    Type: Grant
    Filed: August 14, 2002
    Date of Patent: February 3, 2004
    Assignee: Eastman Kodak Company
    Inventors: David P. Trauernicht, Edward P. Furlani, John A. Lebens
  • Patent number: 6679055
    Abstract: In a microactuator having substantially parallel beams, the free ends of the beams are detached from the substrate and rigidly interconnected with one another. Differential thermal expansion of the beams causes deflection of the free ends as a unit laterally away from the thermally expanded beam. Depending on the choice of thermally expanded beam, the deflection can be either in or out of the plane parallel to the substrate. Selective heating is achieved for example by passing electric current through a pair of beams in series. Each beam has an independent electrical contact pad at the base end, and all beams are connected together electrically at the free end. A voltage is applied across the selected beam pads, whereas the non-selected beam pads are disconnected. Multiple microactuators can be combined cooperatively, e.g., to move a stage in a plurality of directions.
    Type: Grant
    Filed: January 31, 2002
    Date of Patent: January 20, 2004
    Assignee: Zyvex Corporation
    Inventor: Matthew D. Ellis
  • Patent number: 6675578
    Abstract: An in-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material, for example. The actuator includes first and second anchors secured to the substrate and a floating center beam positioned between the first and second anchors and movable relative to the substrate. Symmetric first and second sets of elongated thermal half-beams are secured between opposite sides of the floating center beam and the respective first and second anchors. The half-beams are formed of semiconductor material, such as polysilicon. A current source directs electrical current through the thermal half beams via the anchors to impart thermal expansion of the thermal half-beams and hence linear motion of the floating center beam generally parallel to the substrate. In one implementation, the half-beams are configured at a bias angle to give the floating beam an affinity for in-plane motion.
    Type: Grant
    Filed: May 22, 2000
    Date of Patent: January 13, 2004
    Assignee: Microsoft Corporation
    Inventor: Michael J. Sinclair
  • Patent number: 6668550
    Abstract: A method for converting low temperature dissipated heat to other useful energy and apparatus therefor. Heat energy is transferred to a shape memory alloy using natural conduction of the heat. The kinetic energy of the shape memory alloy resulting from cyclic temperature variations is transferred to another type of energy such as electrical energy.
    Type: Grant
    Filed: November 26, 2001
    Date of Patent: December 30, 2003
    Assignee: Sony Corporation
    Inventors: Kazuaki Yazawa, Avram Bar-Cohen
  • Patent number: 6664885
    Abstract: A device is described for latching an actuator to a substrate where the substrate includes a thermally activated material located on the substrate and a heater capable of heating the thermally activated material until it softens. The actuator includes a contact area that is spaced above the thermally activated material in a non-contact position. The actuator is movable from the non-contact position to a contact position where the contact area contacts the thermally activated material of the substrate. A method of latching actuator is also provided including heating the thermally activated material until it softens and moving an actuator into the contact position.
    Type: Grant
    Filed: August 31, 2001
    Date of Patent: December 16, 2003
    Assignee: ADC Telecommunications, Inc.
    Inventors: Susan Bromley, Karl Vollmers, Bradley J. Nelson, Kamal Mothilal, Kevin Roberts
  • Patent number: 6612110
    Abstract: A mechanical actuator for micro mechanical or micro electro mechanical devices, the actuator comprising a supporting substrate, an actuation portion, a first arm attached at a first end thereof to the substrate and at a second end to the actuation portion, the first arm being arranged, in use, to be conducively heatable, a second arm attached at a first end to the supporting substrate and at a second end to the actuation portion, the second arm being spaced apart from the first arm, whereby the first and second arm define a gap between them, at least one rigid member interconnecting the first and second arms between the first and second ends thereof, and wherein, in use, the first arm is arranged to undergo expansion, thereby causing the actuator to apply a force to the actuation portion.
    Type: Grant
    Filed: February 15, 2000
    Date of Patent: September 2, 2003
    Assignee: Silverbrook Research Pty. Ltd
    Inventor: Kia Silverbrook
  • Patent number: 6594994
    Abstract: Micromechanical actuation apparatus includes a substrate with an actuator mounted on the substrate and a micro-transmission mounted on the substrate coupled to the electrothermal actuator. The actuator, such as an electrothermal actuator, is responsive to electrical power to drive two output beams inwardly or outwardly in opposite directions. The micro-transmission couples the force from the two output beams and transmits the displacement of the output beams to an output node of the micro-transmission. The amplification of the micro-transmission provides a much larger displacement of a beam connected to the output node than the displacement of the output beams of the actuator.
    Type: Grant
    Filed: June 1, 2001
    Date of Patent: July 22, 2003
    Assignee: Wisconsin Alumni Research Foundation
    Inventors: Yogesh B. Gianchandani, Joel A. Hetrick, Larry Li-Yang Chu
  • Patent number: 6588208
    Abstract: The present invention is a method and apparatus for achieving high work output per unit volume in micro-robotic actuators, and in particular TiNi actuators. Such actuators are attractive as a means of powering nano-robotic movement, and are being developed for manipulation of structures at near the molecular scale. In these very small devices (one micron scale), one means of delivery of energy is by electron beams. Movement of mechanical structures a few microns in extent has been demonstrated in a scanning electron microscope. Results of these and subsequent experiments will be described, with a description of potential structures for fabricating moving a microscopic x-y stage.
    Type: Grant
    Filed: January 28, 2002
    Date of Patent: July 8, 2003
    Assignees: Technology Innovations, LLC, Ken Clements
    Inventor: Ken Clements
  • Publication number: 20030121260
    Abstract: A unilateral in-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material, for example. The actuator includes first and second anchors secured to the substrate and a floating shuttle positioned movable parallel to the substrate. Symmetric first and second sets of elongated thermal half-beams are secured between the floating shuttle and the respective first and second anchors. The first and second anchors and the first and second sets of thermal half-beams are positioned along one side of the floating shuttle. The half-beams are formed of semiconductor material, such as polysilicon. A current source directs electrical current through the thermal half beams via the anchors to impart thermal expansion of the thermal half-beams and hence linear motion of the floating center beam generally parallel to the substrate.
    Type: Application
    Filed: December 31, 2001
    Publication date: July 3, 2003
    Inventor: Michael J. Sinclair
  • Patent number: 6574958
    Abstract: This invention provides stroke-multiplying shape memory alloy actuators and other actuators using electromechanically active materials [collectively referred to in this application as SMA actuators] providing stroke multiplication without significant force reduction, that are readily miniaturizable and fast acting, and their design and use; economical and efficient control and sensing mechanisms for shape memory alloy actuators (including conventional shape memory alloy actuators as well as the stroke-multiplying SMA actuators of this invention) for low power consumption, resistance/obstacle/load sensing, and accurate positional control; and devices containing these actuators and control and sensing mechanisms.
    Type: Grant
    Filed: August 11, 2000
    Date of Patent: June 10, 2003
    Assignee: NanoMuscle, Inc.
    Inventor: Roderick MacGregor
  • Publication number: 20030101721
    Abstract: A MEMS actuator 1 comprising an actuator member 2 operably engaged by at least one actuator beam 4 and heating means 12 for heating the or each beam 4. The heating may cause expansion of the or each beam4, wherein the or each beam 4 has two ends A, A′ and the or each beam 4 is fixed at only one end A and wherein the expansion effects movement of the actuator member 2. The heating may cause thermal expansion of the beam 4 in one direction and longitudinal displacement of the beam 4 in the direction of thermal expansion, which longitudinal displacement effects movement of the actuator member 2. The beam 4 may act on the member 2 at a position in relation to a pivot point P so as to produce a torque which effects pivoting of the member 2 about the pivot point P. The actuator may have at least two actuator beams 4 and heating the at least two beams 4 may cause simultaneous expansion of the at least two beams 4, which simultaneous expansion effects movement of the actuator member 2.
    Type: Application
    Filed: November 30, 2001
    Publication date: June 5, 2003
    Inventors: Adrian P. Janssen, Martin Paul Rees, Mark R. Pollard
  • Publication number: 20030079472
    Abstract: Two shape memory alloy members d7 and d8 are connected to a movable member. Continuously, one and then the other of the shape memory alloy members d7 is heated alternately by application of a voltage or current thereto so that, by the generated force exerted by one shape memory alloy member d7 deformed by being heated, the other shape memory alloy member d8 is deformed and the movable member is moved. The shape memory alloy members d7 and d8 are made of a Ti—Ni—Cu alloy subjected to heat treatment at 300° C. or higher, and has an operating temperature of 70° C. or higher.
    Type: Application
    Filed: October 1, 2002
    Publication date: May 1, 2003
    Inventors: Yoshihiro Hara, Junichi Tanii
  • Patent number: 6543224
    Abstract: A system and method of controlling a shape memory alloy (SMA) actuator comprises supplying maximum control voltage to an SMA actuator where an object having a position to be controlled by the SMA actuator were to move toward a target position upon supply of non-zero control voltage, and the instantaneous actual position of the object is at a distance above a predetermined threshold from the target position. A variably controlled voltage is supplied to the SMA actuator between the maximum voltage and about zero voltage where the object to be controlled were to move toward the target position upon supply of the variably controlled voltage, and the instantaneous actual position of the object is at a distance below the predetermined threshold from the target position.
    Type: Grant
    Filed: January 29, 2002
    Date of Patent: April 8, 2003
    Assignee: United Technologies Corporation
    Inventor: Prabir Barooah
  • Patent number: 6531947
    Abstract: A micrometer sized, single-stage, vertical thermal actuator with controlled bending capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. The cold arm is adapted to provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that the actuator bends generally at the flexure so that the member moves away from the substrate when current is applied to at least the hot arm.
    Type: Grant
    Filed: September 12, 2000
    Date of Patent: March 11, 2003
    Assignee: 3M Innovative Properties Company
    Inventors: Billy L. Weaver, Douglas P. Goetz, Kathy L. Hagen, Mike E. Hamerly, Robert G. Smith, Silva K. Theiss
  • Patent number: 6516146
    Abstract: An actuator using a novel shape memory alloy which, even when there is a large difference between a transformation start temperature of the shape memory alloy and a heating start temperature, can diminish a time lag based on the temperature difference from the time when an operation start command signal is outputted until the start of movement of an actuating member, thereby causing, the actuating member to start deformation quickly and permitting a driven member to be actuated quickly. When the driven member is moved from an initial position to a reference position in operation, if the amount of movement of the driven member is larger than a normal amount of movement, an electric current larger than an electric current value calculated from the amount of movement is fed to the actuating member which is constructed of the shape memory,alloy, thereby causing the actuating member to be displaced quickly to actuate the driven member quickly.
    Type: Grant
    Filed: November 16, 2000
    Date of Patent: February 4, 2003
    Assignee: Minolta Co., Ltd.
    Inventor: Akira Kosaka
  • Publication number: 20030019210
    Abstract: A linear actuator includes a plurality of sub-modules disposed in adjacent array and adapted to translate reciprocally parallel to a common axis. A plurality of shape memory alloy wires extend generally linearly and parallel to the axis, and are each connected from one end of a sub-module to the opposed end of an adjacent sub-module. The SMA wires are connected in a circuit for ohmic heating that contracts the SMA wires between the sub-modules. The sub-modules are linked by the SMA wires in a serial mechanical connection that combines the constriction stroke displacement of the SMA wires in additive fashion to achieve a long output stroke. Moreover, the sub-modules are assembled in a small volume, resulting in an actuator of minimal size and maximum stroke displacement.
    Type: Application
    Filed: December 3, 2001
    Publication date: January 30, 2003
    Inventors: Mark A. Gummin, William Donakowski
  • Publication number: 20020170290
    Abstract: A multi-dimensional, micro-electromechanical assembly and the method of fabricating same. The invention enables an assembly of three-dimensional (3D) microelectromechanical systems (MEMS) using surface tension or shrinkage self assembly. That is, the invention provides a surface tension self assembly technique for rotating a MEMS element with a controlled amount of deformation to a selected angle out of the plane of a substrate. In accordance with the inventive method, multi-dimensional, micro-electromechanical assemblies are fabricated by providing a phase change material on at least one substantially planar structure mounted in a first orientation. A phase change is induced in the phase change material whereby the phase change material changes from a first state, in which the structure is disposed in the first orientation, to a second state, in which the structure is disposed in a second orientation. The MEMS elements may be fabricated using conventional surface micromachining techniques.
    Type: Application
    Filed: May 3, 2002
    Publication date: November 21, 2002
    Inventors: Victor Bright, Kevin Harsh, Paul Kladitis, Yc Lee, Wenge Zhang, Martin L. Dunn, Yanhang Zhang
  • Patent number: 6483419
    Abstract: A micrometer sized, single-stage, horizontal and vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The horizontal and vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above and laterally offset from the hot arm relative to the surface. The cold arm is adapted to provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that the actuator exhibits horizontal and vertical displacement when current is applied to at least the hot arm.
    Type: Grant
    Filed: September 12, 2000
    Date of Patent: November 19, 2002
    Assignee: 3M Innovative Properties Company
    Inventors: Billy L. Weaver, Douglas P. Goetz, Kathy L. Hagen, Mike E. Hamerly, Robert G. Smith, Silva K. Theiss
  • Patent number: 6474065
    Abstract: A multijunction thermoelectric actuator comprising a composite of a plurality of serially connected alternating electrically conducting material strips, P and N type semiconductors, for example, which actuator is operated by the passage of an electrical current across the composite and the connections or junctions of such strips. Depending upon the direction of flow of the current, a cooling effect takes place on one side of the composite or the other, and simultaneously a heating effect takes place on the other side causing the composite to bend toward the heated side. The strips can be constructed so as to overlap the adjacent strips and a programmable power supply can be used to provide different levels of electrical power at various positions along the composite yielding complex and controllable bending patterns of the actuator.
    Type: Grant
    Filed: September 24, 2001
    Date of Patent: November 5, 2002
    Inventor: Gregory R. Brotz
  • Patent number: 6453669
    Abstract: A system for quasi-statically correcting tracking of rotor blades of a helicopter rotor during operation includes a trim tab mounted on each rotor blade and deflectable relative to the rotor blade so as to change a tracking path of the rotor blade, and a rotor track and balance analyzer that includes sensors for acquiring rotor tracking and balance information and is operable to process the rotor tracking and balance information so as to predetermine a new tab position to which the trim tab should be deflected for bringing the tracking path of a mistracking rotor blade into alignment with a reference path. The trim tab is deflected by an actuator mounted to the rotor blade, the actuator having an actuating element coupled with the trim tab and formed of a smart material such that the actuating element deforms proportional to a stimulus applied to the actuating element.
    Type: Grant
    Filed: September 19, 2001
    Date of Patent: September 24, 2002
    Assignee: The Boeing Company
    Inventors: Dennis K. Kennedy, Friedrich K. Straub, Ahmed A. Hassan
  • Patent number: 6443174
    Abstract: A fluid mass flow control apparatus, particularly adapted for use in controlling fluid flow to semiconductor fabrication processes, comprises a tubular body part having inlet and outlet fittings and a bore extending therethrough and supporting a valve seat in the bore. A closure member is connected to an arm which extends laterally through a tubular spigot portion of the body part. The body part has a reduced thickness wall at the spigot portion to allow elastic deflection of the wall and movement of the arm to control the position of the closure member. An elongated tube or rod actuator on which a resistance heating coil is supported is operably connected to a control system for heating the actuator to move the arm to control flow of fluid through the apparatus. A flow restrictor is mounted upstream of the valve seat and a mass flow sensor is in communication with the passage to provide a mass flow rate signal to the control system.
    Type: Grant
    Filed: July 6, 2001
    Date of Patent: September 3, 2002
    Inventor: Daniel T. Mudd
  • Publication number: 20020113499
    Abstract: A SMA actuator having rigid members and SMA wires, in which improved temperature control of the SMA wires of the actuator is provided by a heat sink, which may be the rigid members themselves, in close proximity to at least a central portion of the wires. Optionally, the heat sink is sized and placed such that the end portions of the wires where they are attached to the rigid members are not in close proximity to the heat sink. Where the heat sink is external, it optionally has a cooling element that acts passively as a heat sink during the heating cycle of the actuator and that acts as an active cooling element during the cooling cycle of the actuator. An SMA actuator having a desired contraction limit and a power supply circuit has a switch in the power supply circuit that is normally closed when the actuator is contracted to less than the desired contraction limit and is opened by the actuator reaching the desired contraction limit.
    Type: Application
    Filed: February 21, 2002
    Publication date: August 22, 2002
    Inventors: Peter E. von Behrens, Dylan M. Fairbanks
  • Patent number: 6434932
    Abstract: A controller in which an actuator has a shape memory alloy (SMA), for controlling a position of a member driven by the actuator. The controller includes the SMA, a spring coil connected to the SMA, an operation device for calculating a voltage to be supplied to the SMA on the basis of information upon a target position and an actual position of the member, a voltage supplying device for supplying the voltage to the shape memory alloy on a basis of a result of operation performed by the operation device, only when the member is moved in a direction in which the SMA returns to a predetermined length that is memorized by itself.
    Type: Grant
    Filed: March 22, 2001
    Date of Patent: August 20, 2002
    Assignee: Minolta Co., Ltd.
    Inventors: Yoshihiro Hara, Junichi Tanii, Shigeru Wada, Akira Kosaka
  • Patent number: 6422010
    Abstract: The invention includes processes and products made by the processes. The processes include making forms and parts by friable mold casting or die casting using molten Nitinol poured or injected into the mold or die. After the Nitinol has cooled to a solid state, it is removed from the mold by disintegrating the friable material of the mold and is heated to an elevated temperature under high pressure to consolidate the Nitinol and remove any internal voids. The parts and forms are then heat treated to reduce brittleness and improve toughness and impact strength. The part may be hot machined to reduce it to near net size, and may be ground to reduce the part to the exact specified part size. For example, cylindrical parts can be centerless ground; balls can be ground in a conventional ball grinder; flat stock can be surface ground. For parts requiring a smooth surface finish, polishing or lapping provides the specified surface finish on the part, down to 0.5 microinch RMS or finer.
    Type: Grant
    Filed: June 11, 2001
    Date of Patent: July 23, 2002
    Assignee: Nitinol Technologies, Inc.
    Inventor: Gerald J. Julien
  • Patent number: 6422011
    Abstract: An out-of-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material (e.g., silicon). The actuator includes first and second anchors secured to the substrate and multiple elongated thermal buckle beams that are secured between the anchors. The buckle beams are formed of semiconductor material, such as polysilicon. In one implementation, the buckling beams are coupled together by a pivot frame that includes a frame base secured to each buckle beam and at least one pivot arm that is coupled to the frame base at one end and includes a free end that pivots out-of-plane when the actuator is activated. A current source directs electrical current through the thermal buckle beams via the anchors to impart thermal expansion of the buckle beams and hence a buckling motion of them out of the plane (i.e., away from) the substrate.
    Type: Grant
    Filed: October 31, 2000
    Date of Patent: July 23, 2002
    Assignee: Microsoft Corporation
    Inventor: Michael J. Sinclair
  • Patent number: 6422012
    Abstract: A positioning device (19) or actuator assembly comprises an actuator (2) constructed from a shape-memory effect (SME) alloy which has a pre-set memorised shape such that, from another shape, the actuator (2) generates a first force when heated above a transition temperature, heat supply means (4, 12) connected to the actuator (2), urging means (24) arranged to exert a second force acting in a direction opposite to the first force, a positionable member (20) moveable between first and second positions under the influence of the first and second forces, and sensing means (53, 54) for detecting the position of the positionable member (20) relative to a reference point. Control means (44) are operably connected with the heat supply means (4, 12) and the sensing means (53, 54) for controlling of the temperature of the actuator (2).
    Type: Grant
    Filed: March 8, 2001
    Date of Patent: July 23, 2002
    Assignee: Rigibore Limited
    Inventor: Roger Bassett
  • Publication number: 20020092299
    Abstract: Shape memory alloy actuators for aircraft landing gear are provided. In one embodiment a retractable aircraft landing gear system is provided. This embodiment includes a shape memory spring strut having a first end and a second end wherein the shape memory spring strut is extendable from a first length to a second length and the shape memory spring strut contains a shape memory alloy. This embodiment also includes a shape memory spring strut activation line connected to the shape memory spring strut wherein the shape memory spring strut activation line may be configured to activate the shape memory spring strut and a longitudinal connecting member having a first segment and a second segment wherein the first segment is in pivotal contact with the first end of the shape memory spring strut and the second segment supports a wheel rotatably mounted on a pin. The connecting member may be moveable along a line of travel from an extended position to a retracted position in this embodiment.
    Type: Application
    Filed: February 11, 2002
    Publication date: July 18, 2002
    Inventor: Iskender Kutlucinar
  • Publication number: 20020088224
    Abstract: An out-of-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material (e.g., silicon). The actuator includes first and second anchors secured to the substrate and multiple elongated thermal buckle beams that are secured between the anchors. The buckle beams are formed of semiconductor material, such as polysilicon. In one implementation, the buckling beams are coupled together by a pivot frame that includes a frame base secured to each buckle beam and at least one pivot arm that is coupled to the frame base at one end and includes a free end that pivots out-of-plane when the actuator is activated. A cyclic current source directs cyclic electrical current through the thermal buckle beams via the anchors to impart thermal expansion of the buckle beams and hence a cyclic buckling motion of them out of the plane (i.e., away from) the substrate.
    Type: Application
    Filed: January 17, 2002
    Publication date: July 11, 2002
    Inventor: Michael J. Sinclair
  • Patent number: 6374608
    Abstract: A shape memory alloy wire actuator includes a first body member, a second body member and a strand of shape memory alloy wire. The first body member and the second body member extend along a longitudinal axis and are slidably engageable with one another along the longitudinal axis. The first and second body members move in a linear, coaxial fashion relative to one another between an extended state and a contracted state. The first and second body members are resiliently biased away from one another by a spring. The strand of shape memory alloy wire interconnects the first and second body members in a serpentine manner. When the shape memory alloy wire is energized, such as by an electrical current, the shape memory alloy wire shortens causing the first body member and the second body member to move from the extended state to the contracted state. When the shape memory alloy wire is de-energized, i.e.
    Type: Grant
    Filed: March 6, 2001
    Date of Patent: April 23, 2002
    Inventors: Charles James Corris, Daniel Keith Dyess
  • Patent number: 6371165
    Abstract: A dynamic alloy wire valve for a multimedia linked scent delivery system consists of a hollow body with one flapper valve inlet which comes directly from a compressor and multiple flapper outlets, each of which feeds a separate fragrance air inlet. Inside the hollow body there is gang of flapper valves, which are arranged radially around a center spindle. At the other end of the flapper valve is valve tip, which fits snugly into a flapper valve seat. The flat metal leaf that forms the body of this flapper valve has an inherent spring tension much like a leaf spring. This spring tension normally keeps the valve tip pressed snugly against the valve seat, in the normally closed position. On the other side of the valve tip, there is attached a valve opener made from a dynamic alloy wire.
    Type: Grant
    Filed: October 11, 2000
    Date of Patent: April 16, 2002
    Inventor: Joseph S. Manne
  • Patent number: 6367253
    Abstract: Shape memory alloy actuators for aircraft landing gear are provided. In one embodiment a retractable aircraft landing gear system is provided. This embodiment includes a shape memory spring strut having a first end and a second end wherein the shape memory spring strut is extendable from a first length to a second length and the shape memory spring strut contains a shape memory alloy. This embodiment also includes a shape memory spring strut activation line connected to the shape memory spring strut wherein the shape memory spring strut activation line may be configured to activate the shape memory spring strut and a longitudinal connecting member having a first segment and a second segment wherein the first segment is in pivotal contact with the first end of the shape memory spring strut and the second segment supports a wheel rotatably mounted on a pin. The connecting member may be moveable along a line of travel from an extended position to a retracted position in this embodiment.
    Type: Grant
    Filed: January 19, 2001
    Date of Patent: April 9, 2002
    Assignee: LAS, L.L.C.
    Inventor: Iskender Kutlucinar
  • Patent number: 6367252
    Abstract: In embodiments of the present invention, a microelectromechanical actuator includes a beam having respective first and second ends attached to a substrate and a body disposed between the first and second ends having a sinuous shape. The body includes a portion operative to engage a object of actuation and apply a force thereto in a direction perpendicular to the beam responsive to at least one of a compressive force and a tensile force on the beam. The sinuous shape may be sinusoidal, e.g., a shape approximating a single period of a cosine curve or a single period of a sine curve. The beam may be thermally actuated or driven by another actuator. In other embodiments, a rotary actuator includes first and second beams, a respective one of which has first and second ends attached to a substrate and a body disposed between the first and second ends. Each body includes first and second oppositely inflected portions.
    Type: Grant
    Filed: July 5, 2000
    Date of Patent: April 9, 2002
    Assignee: JDS Uniphase Corporation
    Inventors: Edward A. Hill, Vijayakumar Rudrappa Dhuler, Allen Cowen, Ramaswamy Mahadevan, Robert L. Wood
  • Patent number: 6367251
    Abstract: Lockable microelectromechanical actuators include a microelectromechanical actuator, a thermoplastic material that is coupled to the microelectromechanical actuator to lock the microelectromechanical actuator, and a heater that melts the thermoplastic material to allow movement of the microelectromechanical actuator. When the thermoplastic material solidifies, movement of the microelectromechanical actuator can be locked, without the need to maintain power, in the form of electrical, magnetic and/or electrostatic energy, to the microelectromechanical actuator, and without the need to rely on mechanical friction to hold the microelectromechanical actuator in place. Thus, the thermoplastic material can act as a glue to hold structures in a particular position without the need for continuous power application. Moreover, it has been found unexpectedly, that the thermoplastic material can solidify rapidly enough to lock the microelectromechanical actuator at or near its most recent position.
    Type: Grant
    Filed: April 5, 2000
    Date of Patent: April 9, 2002
    Assignee: JDS Uniphase Corporation
    Inventor: Robert L. Wood
  • Patent number: 6360539
    Abstract: Microelectromechanical actuators include a substrate, spaced apart supports on the substrate and a thermal arched beam that extends between the spaced apart supports and that further arches upon heating thereof, for movement along the substrate. One or more driven arched beams are coupled to the thermal arched beam. The end portions of the driven arched beams move relative to one another to change the arching of the driven arched beams in response to the further arching of the thermal arched beam, for movement of the driven arched beams. A driven arched beam also includes an actuated element at an intermediate portion thereof between the end portions, wherein a respective actuated element is mechanically coupled to the associated driven arched beam for movement therewith, and is mechanically decoupled from the remaining driven arched beams for movement independent thereof.
    Type: Grant
    Filed: April 5, 2000
    Date of Patent: March 26, 2002
    Assignee: JDS Uniphase Corporation
    Inventors: Edward A. Hill, Vijayakumar R. Dhuler, Allen B. Cowen, Ramaswamy Mahadevan, Robert L. Wood