Abstract: It is an object of the present invention to realize, in a coating and developing apparatus including an inspection section, reduction in the startup time, cost reduction, and an improved operating rate of the inspection section. In the present invention, a control program of the coating and developing apparatus is set such that a processing flow and an inspection flow can be independently executed, the processing flow being a flow in which a substrate is carried to a processing station from a cassette station to be processed in the processing station and an aligner and thereafter is returned to the cassette station, and the inspection flow being a flow in which the substrate is carried from the cassette station to an inspection station to be inspected there, and is thereafter returned to the cassette station.

Abstract: A system and method of operation for a lithographic system having multiple exposure stations sharing one or more post-expose bake station and a centralized control system that schedules work through the expose station to the post-expose bake station while taking into consideration the patterning time for work pieces to be scheduled as well as the amount of post-expose delay allowable for the exposed work pieces.

Abstract: In order to increase the efficiency of a production process a new method is presented. Thereby a flow of items is generated in a production system. Electronic devices that are attachable to the items are used for tracking the items. An identification of a first electronic device attached to a first item is read out. The identification is forwarded to a computer system that steers the flow of items. Due to a reception of the identification by the computer system, a transport status indicating authorization or prohibition to process the second item is set. The transport status is then transmitted to a second electronic device with an authorizing signal that is sent from the computer system to the second electronic device. The second electronic device contains a signal receiver circuit for receiving the authorizing signal and the second electronic device is attached to the second item.

Abstract: Methods and apparatus are provided for managing movement of small lots between processing tools within an electronic device manufacturing facility. In some embodiments, a number of priority lots to be processed is determined and an equivalent number of carrier storage locations are reserved at a substrate loading station of a processing tool. The number of reserved carrier storage locations are made available either by processing and advancing occupying non-priority lots and/or moving unprocessed occupying non-priority lots from the substrate loading station. Priority lots are then transferred to the reserved carrier storage locations. Other embodiments are provided.

Abstract: An integrated high speed robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly typically comprises an end effector for moving the object in and out of a chamber, a rotation chuck incorporated on the robot body to provide centering and theta alignment capability, and an optional identification subsystem for identifying the object during transport. The present invention also discloses a transfer robot system, employing a plurality of integrated robot assemblies; a transfer system where a transfer robot system can service a plurality of connected chambers such as FOUP or FOSB; a front end module (FEM); or a sorter system. Through the use of these incorporated capabilities into the moving robot, single object transfer operations can exceed 500 parts per hour.

Abstract: A processing system 10 applies an etching process on a wafer W in a PM1 or PM2. An EC 200 includes functions of a transfer/process control unit 250, a communication unit 255, a log management unit 260, and a backup unit 265, and controls the processing system 10. The transfer/process control unit 250 controls wafer transfer and the etching process. The communication unit 255 transmits to or receives data from each MC 300 and the like. The log management unit 260 registers log information generated at times of the wafer process and transfer, data communication, and the like in log files (in predetermined storage areas of an HDD 215). The backup unit 265 collectively saves the log information stored in the log files in backup files (in other storage areas of the HDD 215), in response to a timing when an unexpected alarm has been generated.

Abstract: The present invention generally comprises a method for achieving fault tolerance in a PV FAB. A plurality of processing tools may be coupled together along a processing line, and a plurality of substantially identical processing lines may be arranged within the FAB. Whenever a processing tool within any processing line is shut-down, rather than shut-down the entire processing line containing the shut-down processing tool, work-pieces may be routed around the shut-down processing tool by transferring the work-pieces to an adjacent processing line within the FAB. At a location after the shut-down processing tool, the work-pieces may be transferred back to the processing line containing the shut-down processing tool. During the time period that the processing tool is shut-down, the other processing lines within the FAB may increase their throughput in order to maintain a substantially constant optimum throughput for the FAB over a given period of time.

Abstract: By determining a metric for tool utilization in a manufacturing environment on the basis of tool-specific characteristics and a probability distribution for the transport capability of an automated material handling system, the influence of the transport system on the tool performance may be effectively determined. For this purpose, an average delay caused by the automated material handling system may be iteratively calculated on the basis of a respective required carrier exchange time, which depends on tool- and process-specific characteristics. From the corresponding average delay, an appropriate metric, such as a utilization loss factor, may be determined.

Abstract: In a flexible manufacturing system (FMS), a shelving module of a work cell is fitted with a dedicated lift conveying mechanism so that work materials of desired sizes may be retrieved individually from different shelves of the shelving module for conveyance to the machine of the work cell. By having its own dedicated lift conveying mechanism that operates independently from the transport system that transports raw materials to the wok cells of the FMS, the operation of each cell becomes unaffected by the transport system. As such, materials may be fed to the machine in each cell for fabrication, piece by piece if so desired, by the lift conveying mechanism while the various shelves of the shelving module continue to be stocked by the transport system. Any remnants that prior to the instant invention would have been wasted may be returned to the appropriate shelves of the shelving module for future use by the lift conveying mechanism.

Abstract: Electronic device manufacturing systems and methods are provided. In some aspects, a system having a dual-mode robot is provided which is disposed within a system component (e.g., a factory interface or transfer chamber) and adapted to operate in a first mode and a second mode. In the first mode, the robot may transfer a substrate between components of the system (e.g., between a carrier and a process chamber or chamber to chamber) and in the second mode, the robot may execute a process motion profile (e.g., metrology).

Abstract: A modular transfer system for workpieces. Workpiece carriers are positioned in a manufacturing module with the same CNC (x-y) axis systems and the same servo drives the workpiece carrier and transfers such between modules. A separate conveyor belt is thus not required for the transfer.

Abstract: Methods, systems, and apparatus are provided that include determining a number of storage locations corresponding to busy chambers of an electronic device manufacturing tool; based on the number of storage locations corresponding to busy chambers, determining whether the electronic device manufacturing tool may accommodate a substrate; and of the electronic device manufacturing tool may accommodate a substrate, receiving a substrate in the electronic device manufacturing tool. Numerous other aspects are provided.

Abstract: The present invention provides methods and apparatus capable of routine placement and replacement of fabricator tools in a designated tool location. The tool location can be selected from multiple tool locations arranged in a matrix with horizontal and vertical designations. In another aspect, the fabricator tool placement and replacement can be accomplished while maintaining a clean space environment about the fabricator tool.

Abstract: The present invention relates to conveyance method for transporting a plurality of unprocessed/processed objects between an automatic transporting device (AGV) and a semiconductor manufacturing device (prober). The prober has a load port to/from which the objects are delivered from/to the AGV. The method comprises the steps of: making a communication between the AGV and the prober to decide respective timings of deliveries of the objects to/from the load port; and transporting the objects between the AGV and the prober via the load port, with the timings of the deliveries of the objects to/from the load port shifted from each other by using a holding site for provisionally holding the object. The holding site is at least one of components of the AGV and the prober other than the load port.

Abstract: In one aspect a factory automation system for a wafer fab is provided. The factory automation system is adapted to facilitate cross-AMHS transfers of wafer lots within a semiconductor foundry. The factory automation system may include a first MCS and an associated first AMHS; a second MCS and an associated second AMHS; and a third MCS and an associated third AMHS. The system may also include a first bridge connecting the first AMHS and the second AMHS to allow a FOUP to travel between the first AMHS and the second AMHS. The system may also include a second bridge connecting the second AMHS and the third AMHS to allow a FOUP to travel between the second AMHS and the third AMHS. The system also includes a unified control unit in communication with the first, second, and third MCSs, the unified control unit for coordinating transfers of FOUPs between the first, second, and third AMHSs.

Abstract: According to the present invention, techniques for controlling copying of logical volumes within a computer storage system are provided. A representative embodiment includes a plurality of storage devices controlled by a control unit, one or more processors, and a buffer memory for temporarily storing data read from the storage devices within the control unit. The storage devices can be addressed as logical volumes.

Abstract: A substrate processing system of the present invention includes a transfer-in/out section for transferring-in/out a substrate and a processing section for performing a plurality of processing and treatments on the substrate, in which a throughput of substrate processing at a pre-stage performed from when the substrate is transferred in from the transfer-in/out section to when the substrate is transferred out to the external apparatus is set higher than a throughput of substrate processing at a post-stage performed from when the substrate is returned from the external apparatus into the processing section to when the substrate is returned into the transfer-in/out section.

Abstract: A system and method of transferring wafers by the lot to a vertical furnace are disclosed. The method includes receiving batch information related to a track-in operation and storing the batch information in a memory associated with the vertical furnace, wherein the batch information identifies a plurality of lots, sequentially transferring a plurality of carriers associated with the plurality of lots from an 1/0 port of the vertical furnace to a carrier stocker, transferring at least one of the plurality of carriers from the stock carrier to a wafer transfer stage before the carrier stocker receives all of the carriers in the plurality of carriers, and transferring wafers from at least one of the plurality of carriers from the wafer transfer stage to wafer boat.

Abstract: Disclosed is a system which makes it possible to determine whether or not a new operation recipe is applicable to a substrate processing apparatus, the apparatus including plural functional components which operate to perform predetermined tasks to a substrate, and a controller comprising a computer which controls operations of the plural functional components based on an operation recipe including a plurality of operation parameters. An electronic medium storing a new operation recipe and a judgment program is connected to the computer of the substrate processing apparatus. The new operation recipe is retrieved from the electronic medium by means of the computer. The computer executes the judgment program to determine, by using the judgment program, whether or not the new operation recipe can be executed by the functional components.

Abstract: A fabricating method for a system that includes a plurality of processing apparatuses connected to each other by an inter-apparatus transporter and a computer storing managing information of processing and transporting of semiconductor wafers. The processing apparatuses have an interface for loading and unloading a plurality of the semiconductor wafers that are contained in a carrier. The semiconductor waters are processed in processing chambers of the processing apparatuses and the result of processing is monitored. In the processing, a first carrier containing the plurality of the semiconductor wafers having been processed in the first processing apparatus is transported toward the second processing apparatus by the inter-apparatus transporter prior to unloading of a second carrier containing semiconductor wafers processed in the second processing apparatus, according to the managing information.

Abstract: A method for transport system (TS) integration. A request comprising information regarding a manufacturing object is received. A TS server is determined among multiple TS servers contingent upon information regarding which TS server governs the manufacturing object. A command corresponding to the received request is generated. The generated command is issued to the determined TS server.

Abstract: A control system includes at least one part mounter installing parts on a printed circuit board and a control device integrally controlling the operation of the at least one part mounter. The control device controls the part mounter using information about the printed circuit board and information on a production process flow of the printed circuit board. The control device integrally controls the operations of the part mounters, including receiving and storing information on parts that the part mounters install, information on a feeder that supplies the parts, and information on arrangement of the parts on the printed circuit board, receiving and displaying operation information and operation situations from the part mounters, and controlling operations of the part mounters using the stored information and displayed information.

Abstract: A method of weigh batching for batch formulae using a number of ingredients conveyed to a weigh hopper by a number of different conveyers. Free fall weights and conveyor delivery speeds for each of the ingredients and each of the conveyors used to convey each ingredient are stored in a control system memory. The stored information is used to prepare batches of various formulated products optimizing both the weigh up time and the ingredient weight accuracy.

Abstract: An integrated additive manufacturing cell (IAMC) that combines conventional manufacturing technologies with additive manufacturing processes is disclosed. Individual IAMCs may be configured and optimized for specific part families of complex components, or other industrial applications. The IAMCs incorporate features that reduce hardware cost and time and allow for local alloy tailoring for material properties optimization in complex components.

Abstract: Efficient manufacturing automation system and methods are described. The automation system controls movement of materials for processing by tools in a manufacturing facility. The system and methods include pre-emptive dispatching for transferring of materials. With the pre-emptive dispatching, the next destination and next lot to be processed is determined prior to a first lot being converted to a ready to unload state. This reduces wait time or idle time to improve tool utilization.

Abstract: A dummy substrate (17) differs from a substrate to be processed in having a first guide (G1) for assisting centering, however, it can be handled as a substitute of the substrate to be processed. In a process chamber (2), a second guide (G2) is arranged to assist the dummy substrate (17) to center. To detect a transfer shift of a transfer mechanism (TRM), at first, the dummy substrate (17) is centered to a placing table (14) on the placing table (14) or at an upper position thereof by engagement of the first and the second guides (G1, G2). The dummy substrate (17) centered in such a manner is received by the transfer mechanism (TRM) and transferred to a detector (11). Then, a detection value of a decentering quantity and that in a decentering direction of the dummy substrate (17) are obtained by the detector (11), and a transfer shift of the transfer mechanism (TRM) is obtained based on the detection values.

Abstract: Material handling systems that enable enhanced data consistency, and methods thereof, are disclosed. Behavior and life cycle of a semiconductor product for a material handling system are modeled in a set of finite states and trigger paths. A trigger event corresponding to a second finite state is generated when a transfer state of the product changes from a first finite state to a second finite state along trigger paths. Next, it is determined whether the trigger event complies with a predetermined control rule. Transport data between manufacturing execution and material handling systems is synchronized by message exchange.

Abstract: A transport apparatus including: a travel route having a plurality of retrieval locations continuous with the route; a plurality of article transporting vehicles that move along the route; control means for managing the vehicles; connecting means that can connect one of the vehicles to a fixed portion provided near each of the retrieval locations, and is provided with connection detection means that detects whether one of the vehicles and the fixed portion are connected. Each vehicle is provided with connected members that are capable of connecting to the connecting means; vehicle-side communication means for communicating with control-side communication means provided in the control means; a detachable member that can be attached to and detached from each vehicle; and a coupled portion that can be coupled with the detachable member of another vehicle, and is provided with coupling detection means that detects whether or not the detachable member of another vehicle has been coupled thereto.

Abstract: There is provided an article management system having a previous process and a next process successively connected, which is provided with a product data creation unit to create product data corresponding to products of the previous process, a part data creation unit to create part data corresponding to parts in the next process, an identification assigning unit to assign virtual identification information to a group of management targets, and a management data creation unit to create management data formed of a single file. The identification assigning unit assigns same identification information to a same group of management articles. The management data creation unit passes, to the next process, the management data having link information when products manufactured in the previous process reach the next process; and passes the management data having link information to update corresponding management data.

Abstract: To control a saddle stitcher, an inserting machine or the like, a data processing network (1) is provided in accordance with the present invention, whose nodes are formed by the motor control units (31, 32, 33, . . . , 3n-1, 3n). A coordinating node (2) provided in the network (1) sends out data frames serving for control purposes and receives data frames presenting status messages from the motor control units, on the basis of which it makes control decisions.

Abstract: Disclosed is (i) an overmolding system, (ii) a method of an overmolding system, (iii) an article of manufacture for directing a data processing system to control a molding system, and (iv) an article manufactured by an overmolding system.

Abstract: Depending on the degree of microfabrication requested for each wafer lot, transfer of wafers is controlled. A substrate processing apparatus includes a plurality of PMs 400 and an LLM 500 and is controlled by an EC 200. The EC 200 includes a selection unit 255 and a transfer control unit 260. The unit 255 selects the PM to which the next wafer is to be transferred, and selects, for each lot, whether the wafers are transferred to the same PM in one-lot units or in one-substrate units depending on the degree of the microfabrication requested for each lot. When the wafer transfer in lot units is selected, the unit 260 sequentially transfers the wafers included in the lot to the selected PM. Otherwise the unit 260 sequentially OR transfers the wafers included in the lot from the selected PM to a different PM one by one.

Abstract: In a coating and developing apparatus that forms a resist film on substrates such as semiconductor wafers, and develops substrates exposed by an aligner, times after the aligner unloads substrates until heating units (PEB) start heating the substrates are kept uniform. Exposed wafers are prevented from being left stagnant in an interface portion disposed between a region in which resist is coated and developed and the aligner. In the region in which resist is coated and developed, a first transferring means that successively executes transportation cycles to transfer substrates from upstream side modules to downstream side modules in a flow of processes of substrates. N heating units (PEB) are disposed (n is for example 5). Exposed wafers loaded into the heating units (PEB) are unloaded by the first transferring means after (n?1) cycles including the transferring cycle of the first transferring means have elapsed.

Abstract: In one aspect a factory automation system for a wafer fab is provided. The factory automation system comprises: a manufacturing execution system (“MES”) for providing lot information; a material control system (“MCS”) for providing dynamic traffic information; an automated material handling system (“AMHS”) for providing static route information; and a real-time dispatching (“RTD”) system to select a destination and a route for a wafer carrier in response to a transfer request. In another aspect a method of transferring a wafer lot within a wafer fabrication facility (“fab”) using a factory automation system is provided. The method comprises: receiving a transfer request to move the wafer lot from a first position to a second position within the fab; obtaining lot information, dynamic traffic information, and static traffic information; using the information to select a route between the first position and the second position; and executing the transfer using the selected route.

Abstract: The invention provides a semiconductor processing apparatus having a high throughput capable of appropriately coping with the positional displacement that may occur during transfer of the wafer after correcting the position thereof, without slowing down the transfer speed of the wafer. A position correction quantity of the wafer with respect to a vacuum robot is computed based on the outputs of a ? axis sensor for detecting the interception angle of the wafer during rotation of the vacuum robot and an R axis sensor for detecting the interception distance of the wafer during expansion and contraction of the vacuum robot. If the position correction quantity exceeds a predetermined standard value, an operation to change the position data is performed, and if the distance data obtained based on the outputs from the ? axis sensor and the R axis sensor exceeds a predetermined permissible value, it is determined that a displacement error has occurred and the operation is stopped.

Abstract: A controlling system for a cardboard-sheet manufacturing apparatus includes an FF/FB controlling unit, a PID controller, and a knowledge database. The FF/FB controlling unit differentiates between compensation for a dynamic characteristic and that for a static characteristic based on the knowledge database, and switches between FF control and FB control. The PID controller operates based on a two-degree-of-freedom PID algorithm. The FF/FB controlling unit adjusts a feedback gain based on information stored in the knowledge database.

Abstract: A product processing system applicable to a production process for producing an electronic device is disclosed.

Abstract: A system (20) for conveying semifinished products during the manufacturing of liquid crystal displays, includes a first processing station (21); a second processing station (22) proximate to the first processing station; a shortcut conveyor interconnecting the first processing station and the second processing station; a stocking conveyor interconnecting the first processing station and the second processing station, a conveyance route of the stocking conveyor being shortcut by the shortcut conveyor; a data reader (27) for judging if a to-be-processed semifinished product coming from the first processing station is instructed to be conveyed to the stocking conveyor; a sensor (29) for judging if the shortcut conveyor is fully loaded; and a controller for controlling the shortcut conveyor and the stocking conveyor to convey the semifinished product to the second processing station according to judging results of the date reader and the sensor.

Abstract: In a system for an exchange of information between a machine tool (1) and a transfer device (11) for feeding blank or pre-machined work pieces or tools to the machine tool (1) or removing machined products or tools from the machine tool (1), the machine tool (1) comprises a control unit (3) and an interface (4), whereby the control unit (3) monitors and controls machining states of the machine tool (1) and transmits information regarding the machining states of the machine tool (1) via the interface (4) to the transfer device (11) to activate the transfer device (11). The transfer device (11) receives the information via an interface (14) assigned to it, processes the information by means of a control unit (13) assigned to it and reacts in response to the information, whereby a printer interface is used as the interface (4) of the machine tool (1).

Abstract: A substrate processing apparatus includes a plurality of cells each including a predetermined processing unit, a transport mechanism, and a cell controller. The cell controller independently controls operations in each cell in accordance with transport setting and processing condition setting for each cell described in recipe data determined for each substrate unit to be processed. Because the processing and transport are performed independently of the operations of adjacent cells, substrates belonging to different substrate units are received through a feed inlet or the sane substrate inlet, are processed while being present in the same cell, and are transported to a feed outlet and a return outlet which are different substrate outlets. This allows the presence of different process flows in parallel.

Abstract: A fabricating method for a system including a plurality of processing apparatuses connected to each other by an inter-apparatus transporter. The semiconductor waters are processed in the processing apparatuses and are transported to specified processing apparatuses in different time interval that are set to N times a unit time interval. Since the fabricating system includes processing apparatuses and an inter-apparatus transporter that are periodically controlled at time intervals related to a unit time, intervals related to a unit time, the scheduling of a plurality of works can be made efficiently to enhance the level of optimization, thus improving the productivity.

Abstract: Shock waves occurring when opening a gate valve between two vacuum chambers and peeling of particles by a viscous force taking place when a gas is supplied into a vacuum chamber are necessary to be suppressed by the apparatus and method of the invention, whereby contamination of a substrate by particles is suppressed. If one vacuum chamber is a substrate processing chamber for performing a vacuum process on the substrate and the other chamber is a transfer chamber having a substrate transfer device therein, the gate valve is opened when inner pressures of both the vacuum chambers are less than 66.5 Pa and higher one thereof is less than twice a lower one thereof. Preferably, a purge gas for peeling of particles is supplied, before supplying the purge gas for pressure control, into the substrate processing chamber with a flow rate greater than that of the purge gas for pressure control.

Abstract: A variety of maintenance work is performed for each of operation units in a substrate processing apparatus. Doors are provided at given positions on sides of an apparatus space, each of which is provided with an interlock switch. An interlock release unit is provided near each of the doors for disabling the function by the interlock switch, and for placing a specific operation unit of the operation units in the apparatus space in an off state, while holding the other operation units in an on state. Re-operation instruction units are provided at given positions on the sides of the apparatus space for placing the specific operation unit in an on state that has been placed in an off state by the manipulation of the interlock release unit.

Abstract: An efficient manufacturing automation system and method is described. The system and method include bays, with each bay having a group of tools. Temporary storage locations are provided. A transport system facilitates movement of materials from the tools. The system and method enable direct transfer of materials from a first tool to a second tool or transfer of materials from a first tool to a temporary storage location when a second tool is unavailable.

Abstract: A complete Direct Digital Numerical Control (DDNC) automation system for a practical measurement system for a manufacturing process where a given slide or ram is moved under power by input of GO-TO location commands to cause a cascade of motion events to an approximate position, then relax, as a low-cost precision lock system completes the power move into exact absolute final position. This low-cost system uses simple switches & drive systems to operate without computer micro-processor (CNC) or program-logic-controllers (PLC), yet provide accurate final positioning. Position commands are simple real number digits meaningful to the Operator in work-station terms. Add-on Digital Readout Displays (DRO) are optional, as is remote input by other digital programs to augment the simple manual control panel GO-TO commands. This system is engineered for small shops in rural communities; for affordable automation of tiny devices; machines; & even provide numerical control (DDNC) for monster-machines.

Abstract: A server includes a communication section which receives event information from an event detection device which detects a plurality of types of events occurring in a plurality of temporary storage devices provided at different locations, and transmits transportation load display information to a PC, a storage section which stores lot state data indicating states of lots and storage state data indicating states of the temporary storage devices, an update section which updates the lot state data and the storage state data based on the event information, and an information generation section which generates transportation load display information for notifying a lot transportation state to the user based on the lot state data and the storage state data.

Abstract: In a first aspect, a computer program product is provided. The computer program product includes a medium readable by a computer. The computer readable medium has computer program code adapted to (1) create a band map that indicates an expected status of one or more positions along a band of a continuously moving conveyor system, each position adapted to receive a carrier support adapted to transport at least one substrate carrier around an electronic device manufacturing facility; (2) monitor status of the one or more positions included in the continuously moving conveyor system; and (3) control operation of the continuously moving conveyor system based on the status of the one or more positions. Numerous other aspects are provided.

Abstract: A substrate processing apparatus, which includes a plurality of process chambers for processing a substrate and a transfer part for carrying in and carrying out the substrate to and from the plurality of process chambers, includes a transfer history recording part, a process history recording part, and an alarm history recording part. The transfer history recording part relates history information concerning a transfer of the substrate by the transfer part to each substrate, and records the history information as first history information. The process history recording part relates history information concerning a process state of the substrate in each of the plurality of process chambers to each substrate subject to be processed, and records the history information as second history information.

Abstract: A method and apparatus for tracking a load on a conveyor system using the trailing edge of the load. The method includes the steps of sensing the trailing edge of the load with a first sensor and updating a load record for the load in response to sensing the trailing edge of the load with the first sensor. The apparatus may include a conveyor, a controller, and a sensor in communication with the controller for sensing the trailing edge of a load on the conveyor.

Abstract: In the case of transporting an article to a load port which is occupied by another article, at the time of generating a transportation command, estimated arrival time T1 when the article arrives at the load port and estimated removal time T2 when the article which occupies the load port is removed are compared with each other. If the time T2 is earlier than the time T1, a transportation command for transporting the article to the load port is assigned. If the time t2 is later than the time T1, a transportation command for transporting the article to a buffer on the upstream side of the load port is assigned.