Abstract: A machining apparatus, in which a plurality of user set programs in relation to one axis is written and the amount of the infeed motion of the grinding wheel is increased to restrain the change of the load of the grinding wheel, improves a machining accuracy and achieve a longer life of the grinding wheel.

Abstract: A method of making a facing for a dental restoration. The method comprises the step of providing a facing precursor from which the facing is obtainable, and wherein the facing precursor is comprised of an open-celled material. The method provides for efficient manufacturing of dental restorations with optimized characteristics.

Abstract: Disclosed are a machine with a grinding wheel and a dressing surface and related method. The dressing surface is movable in at least two axes of translation relative to the grinding wheel. The rotational speed of the grinding wheel and dressing surface preferably are under the control of a computer control system, whereby the speed of rotation of the dressing surface may be adjusted as the diameter of the dressing wheel and as the diameter of the grinding wheel is decreased during use. The machine may be used in continuous or intermittent dressing operations.

Abstract: A process and an apparatus for generating control data for controlling a tool on a machine tool comprising at least 5 axes for the production of a predetermined finished part having a base body and at least one flank section protruding from the base body, finished part geometry data of the predetermined finished part geometry of the finished part being generated by means of fundamental geometry parameters and path data being generated by means of the finished part geometry data, the path data indicating the tool path along the surface of the flank section over which the tool has to travel with what tool orientation relative to the workpiece to remove material from the workpiece, the tool orientation of the tool corresponding to an orientation of a axis of rotation of the tool and the tool rotating about the axis of rotation of the tool to remove material from the workpiece.

Abstract: A detection signal representing changes of an object observed can be easily transmitted to any desirable site, without performing complex adjustment to use the signal. An AE sensor is provided on an appropriate part of the circumferential surface of a rotating-side chuck which holds a workpiece. A signal-transmitting unit is provided in a space made in the rotating-side chuck. A signal-receiving unit is mounted on an appropriate part of a main section on which the rotating-side chuck is provided. The signal-transmitting unit transmits by radio a detection signal generated by the AE sensor. The signal-receiving unit receives and demodulates the detection signal, generating a signal that will be processed in signal processing.

Abstract: In one embodiment, a computer implemented system and method for selecting dimensions of a die is disclosed. The method may include prompting a user to select a coating uniformity required to produce a particular coated product with the die. The user may also be prompted to select a slot height of the die. In some embodiments, the user may specify a value for one or more dimensions of the die. The method may then determine the total indicated run-out (TIR) of the coated product as a function of the dimensions of the die not having a user specified value. In certain embodiments, the method provides a thermal treatment process for reducing the number of finishing (e.g., grinding) cycles needed to produce a desired die flatness. In another embodiment, a computer implemented method for designing a coating die to achieve a desired coating uniformity with a particular coating fluid having a specified rheological characteristic is disclosed.

Abstract: A computer numerically controlled apparatus is provided for rifling a gun barrel. The apparatus automates the known method of rifling a gun barrel. The apparatus includes a frame, a rod, a cutting tool, a rod holder, and a system of servos to move the rod holder and to rotate the rod. The apparatus includes a CPU runs a program which controls the servos based on operating parameters entered by the operator. The operating parameters are entered through a graphical user interface which also allows the operator to monitor the status of the rifling process. The operator can calibrate the system and enter the twist rate, number of grooves, cut degree, cutting speed, return speed, and number of passes to complete. The apparatus includes a puck which engages the end of the rod and is adapted to index the rod and change the cutting depth of the cutting tool.

Abstract: In an eyeglass lens processing apparatus for beveling a peripheral edge of an eyeglass lens, if the high curve lens processing mode is selected by the mode selector, a computing unit acquires a high curve bevel path for locating the bevel apex on a front surface curve of the eyeglass lens or for locating the bevel apex at a position shifted by a predetermined quantity from the front surface curve toward the rear side on the basis of the edge position information acquired by the edge position detector, thereby providing high curve beveling data for the rear surface beveling grindstone, or for the front surface and rear surface beveling grindstones; and a beveling controller bevels the peripheral edge of the eyeglass lens by the rear surface beveling grindstone, or by the front surface and rear surface beveling grindstones on the basis of the high curve beveling data.

Abstract: A polishing method enables to initiation a second polishing step of a workpiece with an optimal thickness of an uppermost-layer film to be polished. The polishing method comprises: measuring a thickness of an uppermost-layer film, and then carrying out a first polishing step to polish the uppermost-layer film partway and a second polishing step to polish the remaining uppermost-layer film and a next-layer film; determining the polishing rates of the uppermost-layer film in the first and second polishing steps; and measuring a thickness of an uppermost-layer film of a predetermined nth workpiece and setting a processing time for the first polishing step of the nth workpiece or a next predetermined nth workpiece.

Abstract: In an eyeglass lens processing apparatus for beveling a peripheral edge of an eyeglass lens, if the high curve lens processing mode is selected by a mode selector, a computing unit acquires a high curve bevel path for locating the bevel apex on a front surface curve of the eyeglass lens or for locating the bevel apex at a position shifted by a predetermined quantity from the front surface curve toward the rear side on the basis of the edge position information acquired by the edge position detector, thereby providing high curve beveling data for the rear surface beveling grindstone, or for the front surface and rear surface beveling grindstones; and a beveling controller bevels the peripheral edge of the eyeglass lens by the rear surface beveling grindstone, or by the front surface and rear surface beveling grindstones on the basis of the high curve beveling data.

Abstract: A method for estimating a process variable associated with a series of operations of a manufacturing process includes deriving a model that represents a given operation of the manufacturing process. The operation has first, second, and third process variables associated therewith. The model includes the first, second, and third process variables. Variations in the first and second process variables during each of the operations are substantially immeasurable. The method further includes measuring the first process variable after a first one of the operations and measuring the third process variable during a second one of the operations using a sensing device. The method further includes estimating at least one of the first and second process variables during the second one of the operations using the measured first process variable, the measured third process variable, and the model.

Abstract: An electric control device in an engraving machine with a USB interface is provided, in which the engraving machine is provided with a platform. A cutting tool positioning mechanism is on the platform. A cutting tool is arranged in the cutting tool positioning mechanism and provided with a motor driving the cutting tool to revolve to engrave. An electric control device is further provided in the platform of engraving machine. The electric control device is powered and driven by a power supply unit and comprises a USB data access unit with a USB port, a control unit connected to the data access unit to drive the cutting tool positioning mechanism, a display unit driven by the control unit to show various messages, and a setting unit connected to the control unit and allowing settings and command input. Programming data portability and storage capability increases for achievement of convenience in use.

Abstract: A polishing apparatus is provided for polishing wafers at a high yield rate even if roll-off exists. The polishing apparatus polishes a wafer W by applying a pressure between a polishing member (polishing pad) 201 and the wafer W held by a holding member (top ring) 52 and relatively moving the polishing member 201 to the wafer W. The polishing apparatus comprises a top ring 52 for holding the wafer W, a pressure adjusting mechanism 206 for adjusting a supporting pressure with which the wafer W is supported on a supporting surface by a retainer ring 203, and a control unit 208 for controlling the pressure adjusting mechanism 206 to bring the supporting pressure to a desired pressure based on a roll off quantity of the wafer W. The top ring 52 comprises an air bag 202 for pressing the wafer W against the polishing pad 201, a retainer ring 203 which surrounds the wafer W, and an air bag 204 for pressing the retainer ring 203.

Abstract: The invention relates to a method of calibrating an ophthalmic-lens-piercing machine, a device used to implement one such method and a ophthalmic-lens-machining apparatus comprising one such device. The inventive method applies to a machine including a piercing tool, a lens support which is associated with a first reference mark (O1, X1, Y1), and programmable tool-control means which are associated with a second reference mark expressing set co-ordinates which define a target piercing point (M). A template is placed on the support, and the template includes pre-applied markings defining a third reference mark (O3, X3, Y3), such that the third reference mark in essentially in line with the first reference mark. The template is pierced at a pre-determined point corresponding to a target point, and an image of the template this point position, and a correction is applied to the set co-ordinates that can compensate for the misalignment.

Abstract: Provided is a surface treatment method for performing machining such as cutting work, grinding, and electrical discharging to a plate-like material with two- or three-dimensional deformation to realize a uniform thickness. This method includes the steps of mounting the plate-like material on a surface plate, setting a coordinate axis in a plane direction of the plate-like material to be X, Y and setting a coordinate axis in a height direction of the plate-like material to be Z, virtualizing a surface containing an origin of the measured Z direction, measuring a height Z1-n from the origin in an arbitrary plane position, and inclining and cutting the plate-like material so that an absolute value of a difference between a maximum value Zmax and a minimum value Zmin of the obtained height data will be minimum.

Abstract: The present invention is directed to a machine programmed to edge an ophthalmic lens blank. The machine includes an edger device for forming a bevel in a peripheral edge of the lens blank, a central processing unit operably associated with the edger device for controlling operation thereof, and a computer program stored on a medium in communication with the central processing unit. The computer program includes a first instruction set operably causing the edger device to form a bevel in a peripheral edge of a lens blank. A second instruction set operably causes the edger device to form a step in the peripheral edge intermediate an apex of the bevel and an interface between the peripheral edge and a major surface of the lens blank. A method of controlling an edger device for edging an ophthalmic lens blank and a computer program are also disclosed.

Abstract: A method relating to near-net-shape machining of curved contours such as those occurring, for example, in the fabrication of blades for propulsion engines and the like is described. Accordingly, the shape error in curve grinding is minimized by suitable compensation functions, in particular by interpolating and approximating cubic splines. The present method minimizes the number of tests required to set up a grinding machining operation and thus the number of semifinished products required to do so. At the same time, rejects in fabrication of curved workpieces are reduced by increasing the machining quality. The use of complex chucking devices is avoided and cutting performance is maximized.

Abstract: The machining of drills (1) includes an operation for chamfering the cutting edges (8) performed in two steps. In the first step the rotating grindstone (15) is directed to various locations of the cutting edge (8) and the point of contact is detected by an electronic appliance (17) whereof the electronic module (19) controls the stoppage of the grindstone, its return to the starting position and the recording of the position of the grindstone at the time of contact. In the second step the grindstone (15) is controlled to follow the left line obtained by connecting the points registered during the first step.

Abstract: A method and system of optimizing a complex manufacturing process performed by an apparatus on a subject to achieve at least one processing objective. The system includes a graphical user interface, a process module, and an optimization module. The process module includes a training module, an empirical relationships database, an analytical equations database, a heuristic knowledge database, and a process models database. The graphical user interface is used to input at least one processing variable and constraints for the processing objective of the complex manufacturing process. The training module generates empirical relationships from the processing variable and empirical data obtained from the complex manufacturing process.

Abstract: The invention relates to a grinding machine in which the axis control command for the axis drive unit allocated to the axis is not calculated offline, and therefore beforehand outside of the grinding machine, as is common with the present state of technology, but rather online, in other words, in real time. A transformation model is provided to make this possible. Vectors with five components in the tool coordination system (WKS) can be converted into motion control commands (arrows 16,18,20,22,24) of the axis (X1,Z1,C1,B1,A1).

Abstract: Disclosed are a computer numerically controlled machine and methods for forming, grinding, or dressing cutting tools in a computer numerically controlled machine. In some embodiments, the computer numerically controlled machine is provided with a cutting tool and an abrasive surface. The abrasive surface is brought into contact with the cutting tool to abrade material from the cutting tool in a grinding or dressing operation. In certain embodiments, it is not necessary to remove the cutting tool from the computer numerically controlled machine for dressing. In some non-mutually-exclusive embodiments, the machine is provided with tool blanks, from which cutting tools are prepared using an abrasive surface in the machine.

Abstract: Provided is a surface machining method for performing machining such as cutting, grinding, electrical discharging or the like to obtain a planar material of a uniform thickness.

Abstract: The present invention is directed to a method of controlling an edger device, and a machine programmed to edge a lens blank. A lens blank and an edger are provided. The edger device is capable of forming a groove in a peripheral edge of the lens, and forming at least one hole extending from a first major surface of the lens to a second major surface. A CPU is provided, which is operably associated with the edger device for controlling operation of the edger device. Processing instructions are transmitted from the central processing unit to the edger device. The processing instructions comprise: forming a groove in a peripheral edge of a lens blank; and forming at least one hole in the lens blank extending from the first major surface to the second major surface.

Abstract: A balanced rotating assembly with a spindle automatically provides balancer limits, which achieves a balancing state while substantially minimizing short term vibration increases and which provides for multi-plane balancer dithering.

Abstract: The present invention is directed to a machine programmed to edge an ophthalmic lens blank. The machine includes an edger device for forming a bevel in a peripheral edge of the lens blank, a central processing unit operably associated with the edger device for controlling operation thereof, and a computer program stored on a medium in communication with the central processing unit. The computer program includes a first instruction set operably causing the edger device to form a bevel in a peripheral edge of a lens blank. A second instruction set operably causes the edger device to form a step in the peripheral edge intermediate an apex of the bevel and an interface between the peripheral edge and a major surface of the lens blank. A method of controlling an edger device for edging an ophthalmic lens blank and a computer program are also disclosed.

Abstract: The invention describes a flexible process optimizer for recording and analyzing various parameters to improve the efficiency of a production process. The flexible process optimizer acquires and conditions signals from a variety of transducers mounted on a production machine. Through qualitative and quantitative data analysis, specific aspects of the production process which need improvement are identified. The qualitative evaluation looks at the presence, absence, level, rate of change or duration of certain features of the production cycle as revealed by the sensor data. The quantitative evaluation of data involves the computation of certain data attributes. By providing useful data acquisition and data analysis tools, necessary adjustments are made to the required parameters of the production process to provide improved efficiency. The results of the changes are immediately verifiable on the display of the flexible process optimizer.

Abstract: To eliminate the unevenness of the film thickness of the wafers, and increase the polishing efficiency, reduce the running cost and enhance the production yield. A CMP apparatus 1 includes a film thickness measuring means 6 that measures the film thickness of the wafers before polishing, a polishing recipe preparing means 7 that prepares polishing conditions so that the polishing conditions such as polishing speed, polishing pressure, and the like for the wafers become optimal, a polishing time forecasting means that forecasts the polishing time of the wafer on the basis of the optimal polishing condition and the measured value, a polishing time measuring means that measures the actual polishing time of the wafer, and a computer 9 that controls the polishing condition on the basis of the measured value and the like of the polishing time.

Abstract: A system for chemical mechanical polishing (CMP) is disclosed which includes a polishing apparatus for polishing a surface of a substrate and a sensor for determining zone-specific substrate data respectively related to at least two zones of the substrate. A controller is provided for generating, in response to the zone-specific substrate data, at least one set-point value, e.g., a set-point window of values for at least one operating parameter of the polishing apparatus in a subsequent CMP process. The set-point value/set-point window of values may be displayed on a display device or automatically taken into account by the controller for controlling subsequent CMP processes.

Abstract: Methods of determining a polishing endpoint are described using spectra obtained during a polishing sequence. In particular, techniques for using only desired spectra, faster searching methods and more robust rate determination methods are described.

Abstract: It is one object of the present invention to provide a program writing method of numerical controller, a numerical controller and a cutting machine controlled thereby achieving to write a plurality of programs relating to one axis to perform a high efficiency in the small lot of productions. A next or later user-set-program controlling a duplicated axis controlled by plural user set programs identifies a virtual axis virtually controlled by own user set program, a program is written to replace the duplicated axis to the virtual axis. A control amount calculated by the user set program identifying the virtual axis is added to a control amount input to a correspondent axis driving program as a control amount of duplicated axis before replacing to the virtual axis.

Abstract: The present invention relates to a method of controlling an ophthalmic edger device, and a machine programmed to edge and ophthalmic lens blank. A lens blank and an edger device for forming a groove in a peripheral edge of the lens blank are provided. A central processing unit is provided, which is operably associated with the edger device for controlling operation of the edger device. Processing instructions are transmitted from the central processing unit to the edger device, wherein the processing instructions comprise forming a groove in a peripheral edge of a lens blank, and removing lens material debris from the formed groove.

Abstract: The spacing between an abrasive type surface polishing tool and the surface of the work piece that is being polished is controlled dynamically so that variations in the area of the abrasive pad in contact with the surface of the work piece compensated, thereby eliminating size variations in this contact area and the accompanying variations in material removal that produce surface height fluctuations.

Abstract: Methods of refining using a plurality of refining elements are discussed. A refining apparatus having refining elements that can be smaller than the workpiece being refined are disclosed. New refining methods, refining apparatus, and refining elements disclosed. Methods of refining using frictional refining, chemical refining, tribochemical refining, and electrochemical refining and combinations thereof are disclosed. A refining apparatus having magnetically responsive refining elements that can be smaller than the workpiece being refined are disclosed. The refining apparatus can supply a parallel refining motion to the refining element(s) for example through magnetic coupling forces. The refining apparatus can supply multiple different parallel refining motions to multiple different refining elements for example solely through magnetic coupling forces to improve refining quality and versatility. A refining chamber can be used. New methods of control are refining disclosed.

Abstract: In a grinding method and apparatus, a machining portion of a workpiece is ground with a grinding wheel on a trial, and shape errors in respective rotational phases of the machining portion are measured after the trial grinding. Based on the shape errors, control data defining workpiece rotational speeds for respective rotational phases of the workpiece is prepared so that the workpiece rotational speed is made to be slow for a rotational phase in which the machining portion is undercut, but to be fast for another rotational phase in which the machining portion is overcut, and the machining portion of the workpiece is ground as the rotational speed of the workpiece is controlled in accordance with the control data.

Abstract: A polishing method can automatically reset polishing conditions according to a state of a polishing member based on data on a polishing profile changing with time, thereby extending life of the polishing member and obtaining flatness of a polished surface with higher accuracy. The polishing method, includes steps of: independently applying a desired pressure by each of pressing portions of a top ring on a polishing object; estimating a polishing profile of the polishing object based on set pressure values, and calculating a recommended polishing pressure value so that a difference between the polishing profile of the polishing object after it is polished under certain polishing conditions and a desired polishing profile becomes smaller; and polishing the polishing object with the recommended polishing pressure value.

Abstract: A method for analyzing polishing frequency and number of polishing times for chemical planarization polishing wafer with different polishing pad profiles is disclosed. First, drawings of a wafer and a polishing pad are provided and then are converted into pixel arrays. Pixel arrays are processed to be black/white images. The black/white images are converted into binary matrices. The effective polishing frequencies of all points in the binary matrix are calculated. Following the calculated polishing frequencies, the coordinates of all binary matrices are redefined according to a displacement condition, and then new coordinates of all points and corresponding effective numbers of polishing times for a time increment are calculated so as to form an effective polishing times matrix for the time increment. Further, all effective numbers of polishing times within a total polishing time interval are added together.

Abstract: A control device 40 controls the grinding processing at a processing portion of a work W so as to shift to the last precision grinding step from a rough grinding step through a middle grinding step and a finishing grinding step. When the grinding in each step is carried out, two processing portions are measured, and then, it is determined whether or not one or both measurement values attain to a predetermined value that has been determined in advance when each step is finished. When a processing time difference t is generated between the processing portions, by increasing or decreasing the feeding amount per unit time in a next step, the processing time difference is eliminated. Thereby, the finishing grinding step just before the last steps of the both processing portions are simultaneously finished.

Abstract: A polishing method can automatically reset polishing conditions according to a state of a polishing member based on data on a polishing profile changing with time, thereby extending life of the polishing member and obtaining flatness of a polished surface with higher accuracy. The polishing method, includes steps of: independently applying a desired pressure by each of pressing portions of a top ring on a polishing object; estimating a polishing profile of the polishing object based on set pressure values, and calculating a recommended polishing pressure value so that a difference between the polishing profile of the polishing object after it is polished under certain polishing conditions and a desired polishing profile becomes smaller; and polishing the polishing object with the recommended polishing pressure value.

Abstract: Molds and processes that permit high-speed, mass production of retaining wall blocks having patterned or other processed front faces, as well as retaining wall blocks formed by such processes. The invention permits the front face of the block to be impressed with a pattern or otherwise directly processed, to allow the formation of pre-determined block front faces, while at the same time facilitating high-speed, high-volume production of blocks. A mirror image of the desired pattern can be created on a stripper shoe by selecting a desired three-dimensional surface from a naturally occurring or man made object and digitally scanning the selected three-dimensional pattern to create scanned data. The scanned data can then be used to machine a face of the stripper shoe that is the mirror image of the selected pattern.

Abstract: The invention relates to a method for estimating the angular offset between a rotating radial axis linked to a glass which is to be ground and a reference rotating radial axis which can be applied to a grinding machine for ophthalmic glasses. Said method comprises the following steps: a glass-calibrator is ground, whereby a radial axis linked to the glass is previously made by tracing according to a control rule corresponding to the form of the theoretical finished glass-calibrator whereby the theoretical inclination thereof is known for a reference part of the contour thereof in relation to said radial reference axis; said image (31AI, YI) is analyzed in order to measure the real inclination (I) of the image (33AI) of the reference part (33A) in relation to the image (YI) of the pattern; the angular offset is calculated. The invention also relates to the use of said estimation method in order to calibrate the grinder. and to a device for carrying out said calibration method.

Abstract: The invention relates to a program-controlled NC data generating method for controlling a CNC wet-grinding machine for machining workpieces made of optical materials to produce aspherical forms, the data of the aspherical forms to be ground being overlaid with correction data.

Abstract: A balancer assembly 10 which automatically provides balancer limits, which achieves a balancing state while substantially minimizing short term vibration increases and which provides for multi-plane balancer dithering.

Abstract: A polishing method can automatically reset polishing conditions according to a state of a polishing member based on data on a polishing profile changing with time, thereby extending life of the polishing member and obtaining flatness of a polished surface with higher accuracy. The polishing method, includes steps of: independently applying a desired pressure by each of pressing portions of a top ring on a polishing object; estimating a polishing profile of the polishing object based on set pressure values, and calculating a recommended polishing pressure value so that a difference between the polishing profile of the polishing object after it is polished under certain polishing conditions and a desired polishing profile becomes smaller; and polishing the polishing object with the recommended polishing pressure value.

Abstract: This invention relates to a method of producing designs on terracotta containers, the surfaces of which have been at least partly covered with a glaze. In the method, the glaze is cut through and is cut, grinded, or etched away with glass cutting tools to expose the terracotta surface beneath. The glaze is removed to produce a design or pattern on the surface of the container to enhance the visual appeal and aesthetics of the container. Portions of the terracotta material may also be removed during the cutting process to produce a grooved design in the surface of the container.

Abstract: A method for calibration of grinding and/or erosion machines assumes an initial calibration process and corresponding re-calibration processes. Calibration of the machine is performed with a reference piece and a reference tracer in an initial calibration process. Grinding tests follow the first tracing process from all directions during which tests deviations are determined and made ineffective with the iterative procedure. The machine-internal measuring system is calibrated immediately after performing the machining tests and thereby immediately after the initial referencing of the machining apparatus whereby the machine tracer and a test piece is traced from all coordinate directions and the resulting position values are stored. Subsequent re-calibrations supply measured values, which are compared to the stored values whereby correction values are determined then from the deviations for additional machining of workpieces.

Abstract: Systems and methods control abrading operations of an abrading machine by sensing characteristics of an abrading article installed on the abrading machine. When a problem is discovered by sensing the article, appropriate actions may be taken. As one example, the abrading article may be sensed to determine whether the abrading article has been installed with an abrasive side facing the wrong direction. An alert allows an operator to reinstall the article. As another example, the abrading article may be sensed to determine whether splicing tape is present to hold two pieces of abrading tape together. The article may be advanced until the splicing tape is beyond an abrading zone. As another example, the abrading article may be sensed to determine whether the abrading article has stopped moving while the article drive is advancing because the article has broken. An alert allows an operator to repair the break.

Abstract: In general, techniques are described that allow an abrasive manufacturing process to achieve a controlled performance parameter, e.g., an amount of material removal, without requiring the use of feedback controls within the abrasive manufacturing process. For example, a system includes a machine to abrade a workpiece with an abrasive article, and a controller to control the application of the abrasive article to the workpiece by the machine to achieve a substantially constant cut rate for the abrasive article. The controller controls one or more process variables in accordance with an open-loop mathematical model that relates the cut rate of the abrasive article to an application force of the abrasive article to achieve controlled material removal. For example, a constant rate of cut can be achieved or a fixed amount of material can be removed while abrading one or more workpiece in accordance with the model.

Abstract: The invention relates to a method for controlling an industrial process for manufacturing or processing a product, in particular for controlling the cooling line of a hot-rolling mill, said cooling line being simulated by a physical model. To optimize the cooling process, a correction factor is determined in a simple manner, whereby the product data records are saved with the correction factors that have been determined previously. For a new strip to be cooled, the saved product data records are compared with the product data of the new strip and similar data records are extracted. A new correction factor is then determined, e.g. by means of linear regression, from the correction factors of the similar product data records.

Abstract: A method of determining remaining film thickness in polishing process provides a technology for controlling a polishing amount of CMP in a device isolating process with satisfactory accuracy regardless of the ratio between the area of each of device forming regions and that of each of trench regions, the type of abrasive, etc.

Abstract: Methods and apparatus for feedback controlled polishing. A computer program product for generating feedback for chemical mechanical polishing. The product includes instructions operable to cause a processor to receive monitoring information during a current polishing cycle in which a first polishing process is performed on a substrate that includes a metal layer. The first polishing process clears the metal layer from the substrate during the current polishing cycle. The product includes instructions to calculate a representation of a clearing profile of the first polishing process. The calculation is based on the monitoring information received during the current polishing cycle. The product includes instructions to detect non-uniformity in the representation. The product includes instructions to generate, from the non-uniformity detected, feedback information for improving the uniformity of a clearing profile of the first polishing process for a subsequent polishing cycle.