Abstract: To provide a control device for a machine tool capable of performing thread cutting while reducing the load on the machine tool from the oscillating operation, without extending the cycle time, and capable of reliably shredding chips in a case of performing the non-oscillating operation in the present pass after the oscillating operation in the previous pass. A control device for a machine tool includes: an oscillating operation execution determination unit that determines whether to execute an oscillating operation that causes the cutting tool to oscillate in the radial direction of the workpiece; an oscillation command generation unit that generates an oscillation command of the oscillating operation based on a determination result; a control unit that superimposes the oscillation command on a position command of the feed axis to generate a drive command.

Abstract: A thermal displacement compensator measures a temperature of an environment in which a machine is installed and a temperature of each part of the machine, and calculates a temperature difference between at least two temperatures among measured temperatures. Furthermore, the thermal displacement amount of the machine is acquired. Then, based on teacher data using the measured temperatures and the calculated temperature difference as input data and using the acquired thermal displacement amount as output data, a thermal displacement compensation model that estimates the output data from the input data is created by machine learning.

Abstract: There is provided a configuration at least including a screen control part configured to display on a display part a maintenance component management screen displaying a component, a mechanism, or both, as a maintenance component, a collection part configured to collect component data related to the maintenance component, a determination part configured to compare a cumulative value of the component data with a predetermined threshold value to determine the cumulative value exceeding the threshold value, a calculation part configured to calculate a replacement time, and an operation part configured to calculate replacement times based on an average value of the component data and a cumulative value of the component data for each predetermined cycle, display the maintenance component sequentially from the maintenance component reaching the earliest replacement time, and display the maintenance component on the display part in a state where the component data is updated for the predetermined cycle.

Abstract: A process for operating a virtual sensor for determining the condition of a tool holder on a tool machine, such as a spindle, and the condition of a tool machine which has at least one tool holder and at least one tool, attached or attachable to the tool holder, which allows a workpiece to be processed by running a machine program, and which has at least one control unit comprising at least one sensor.

Abstract: A method and system for replicating file system entities in a manner that preserves block-level access and file system efficiency mechanisms such as deduplication are disclosed. In an embodiment, a replication engine receives a stream of file system entities that include a file system inodes and file system data blocks. The replication engine generates object-based storage (OBS) objects based on data and reference information specified by the file system entities. As part of generating the OBS objects, the replication engine generates at least one inode file object that associates file block numbers of a file system inode file and the inode numbers. The replication engine uses inode information to generate reference objects that logically associate file block numbers with data block numbers in per inode manner. The replication engine further generates data objects that contains the file system data blocks and that associates the data blocks with corresponding data block numbers.

Abstract: The present invention relates to an apparatus and a method of automatically converting thermal displacement compensation parameters of a machine tool, which automatically convert a compensation parameter of a thermal displacement compensation equation of a machine tool so that the compensation parameter is optimized to a current thermal displacement state of the machine tool in real time based on Z-directional or Y-directional displacement data of a tool tip end of a reference tool measured by a tool measuring unit according to an operation state of the machine tool or various kinds of machine tools or thermal displacement data of the machine tool calculated by measuring a processed portion of a processed material, and temperature data measured by a temperature measuring unit, to minimize a processing error according to thermal displacement and improve processing accuracy of the machine tool.

Abstract: In one embodiment, a remote monitoring system for a fluid applicator system is disclosed. The fluid applicator system is disposed to heat and pump spray fluid, and to transmit reports including sensed temperatures, pressures, and other operational parameters of the fluid applicator system via a wireless network. The remote monitoring system comprises a data storage server, and an end user interface. The data storage server is configured to receive and archive the reports. The end user interface is configured to provide a graphical user interface based on the reports. The graphical user interface illustrates a status of the fluid handling system, sensed and commanded temperatures of the fluid handling system, sensed and commanded pressures of the fluid handling system, and usage statistics of the fluid handling system.

Abstract: The safety attachment provides preferably 4 video cameras mounted around a bandsaw blade and looking parallel to the blade direction. Each camera CCD sensor is partly scanned in mode 1. In mode 1 an axis corner of each scanned area is aligned with the camera axis, produced to the table, defining a corner of a parallel-sided protected volume including the entire exposed blade. The blade is rapidly braked when the attachment detects a glove intrusion. In the alternative fully scanned mode 2 the protected area extends outside the mode 1 area and a warning only is emitted on intrusion.

Abstract: Systems and methods use for improving process safety. In one implementation, a system may determine least one characteristic of a task scheduled to take place in an industrial environment. The system may use first synergy data from at least three types of safety-related information and the at least one characteristic of the task to determine that a predicted risk score of the scheduled task is below a first threshold. Thereafter, the system may obtain real-time information indicative of the integrity of an industrial apparatus. The system may use second synergy data indicative of a change in the integrity of industrial apparatus and real-time information to determine that an actual risk score of the task has changed from the predicted risk score. When the actual risk score of the task is above a second threshold, the system may initiate a remedial action to manage a hazard associated with process safety.

Abstract: A numerical controller outputs a feature amount of time-series data generated in relation to machining. The numerical controller is provided with a data acquisition unit configured to acquire the time-series data from a sensor, a feature amount calculation unit configured to sort the time-series data by their values, extract a set of the time-series data with variations of the values not higher than a predetermined threshold, and calculate the feature amount representative of the set, and a feature amount output unit configured to output the feature amount.

Abstract: A system and method of configuring monitor blocks and effect blocks associated with a process control system for a process plant includes causing a display device to display a graphical user interface, the graphical user interface indicating a first monitor block, a second monitor block, and an effect block. The system and method further includes enabling a user to input configuration data via the input device, including: (i) configuring one of the outputs of the first monitor block to serve as one of the inputs of the second monitor block, (ii) configuring an additional one of the outputs of the first monitor block and one of the outputs of the second monitor block to serve as inputs to the effect block, and (iii) designating at least one of the plurality of cells of each of the first monitor block, the second monitor block, and the effect block as a trigger associated with the respective input/output pair for the respective cell and corresponding to a condition in the process plant.

Abstract: There is provided a failure mode specifying system or the like that suitably specifies a failure mode of an apparatus. A failure mode specifying system 10 includes a communication portion 11 that obtains data including a detection value of a sensor 22 which is installed in an apparatus 20, an apparatus structural parameter estimating portion 14 that estimates a predetermined apparatus structural parameter based on a structure and properties of the apparatus 20, based on the data which is obtained by the communication portion 11, a failure mode specifying portion 16 that specifies a failure mode indicating a kind of failure or failure sign of the apparatus 20, based on the apparatus structural parameter, and an input-output portion 18 that presents the failure mode which is specified by the failure mode specifying portion 16.

Abstract: A machine-tool-state determination system configured to determine a state associated with a machine tool including a rotation mechanism for processing a member, the system including: a sensor configured to acquire a state value from the machine tool; and an analysis device, in which the analysis device: performs spectral analysis with time series data of the state value, to extract a rotational frequency of the rotation mechanism and a harmonic wave to the rotational frequency; calculates a ratio of an amplitude of the rotational frequency to an amplitude of the harmonic wave; generates feature-amount data including the state value and the ratio as feature amounts; performs clustering with the feature-amount data; and determines a state associated with the machine tool, based on a result of the clustering.

Abstract: Systems, devices, and methods for detecting and addressing a kick on a drilling rig are provided. A controller on the drilling rig may receive measurements from one or more sensor systems on the drilling rig and determine a severity index value corresponding to the likelihood of a kick. If the severity index level is determined to reach a specified threshold, an operator may be prompted to perform a flow check and/or activate a blow-out preventer.

Abstract: An information processing apparatus includes a display controller configured to output display information to be displayed on a display apparatus, and an analysis unit. The display apparatus includes an operation display area displaying an operation of a robotic system based on robot control data and an information display area displaying information related to an operation parameter of the robotic system in a time-series manner based on the robot control data. The analysis unit is configured to analyze the operation parameter to specify a warning event. The display controller displays the wanting event specified by the analysis unit in the operation display area and the information display area in association with each other.

Abstract: A method of cyber protection of a machine based on acquiring acoustic signals from a vicinity of the machine, while the machine is operative. The method includes analyzing the acquired acoustic signals to determine whether the machine or a controller of the machine is operating suspiciously and initiating a cyber measure on the controller of the machine, responsive to a determination based on the acquired acoustic signals that the machine or the controller is operating suspiciously.

Abstract: A visual guidance device including: an image data acquisition unit which acquires image data when a machine is seen from a predetermined position and image data when the machine is seen from a different position from the predetermined position; an image conversion unit which produces image data by converting, with one or more aspect ratios, the image data when the machine is imaged from the predetermined position; and a guidance display control unit which sequentially displays, on a display unit, the image data when the machine is imaged from the predetermined position, the image data produced by the image conversion unit and the image data when the machine is imaged from the different position so as to guide a movement from the predetermined position to the different position.

Abstract: A processing unit for measuring and controlling a rotary-driven tool, wherein the processing unit is connectable to a light barrier arrangement, which comprises a light-transmitting unit and a light-receiving unit, wherein the processing unit is configured to receive from the light-receiving unit signals that are at least approximately proportional to shading generated by the rotary-driven tool and/or at least one cutting edge of the rotary-driven tool at a first measuring position. The processing unit is further configured to evaluate the signals received and to transmit control signals to the light barrier arrangement, wherein the evaluation of the signals received by the processing unit comprises the following steps: determination of an interference signal component and/or a useful signal component of the received signal; and provision of information about the useful signal component, the interference signal component and/or the received signal for forwarding to a numerical controller of a machine tool.

Abstract: The present disclosure is directed toward a diagnostic method for a spindle arm of a machine. The method includes rotating the spindle arm of the machine at a first rotational speed, and acquiring, from an accelerometer, data indicative of a vibrational response of the spindle arm operating at the first rotational speed. The accelerometer is disposed along the spindle arm. The method further includes converting the vibrational response to a frequency based response to obtain a first frequency response, determining whether an amplitude of the first frequency response exceeds a diagnostic threshold, and performing a designated correction on the machine in response to the frequency response exceeding the diagnostic threshold.

Abstract: An electronically controlled substrate working apparatus, such as a CNC controlled milling machine, drill press or lathe. The apparatus comprises a tool configured to remove material from the substrate, a spindle motor coupled to the tool, a feed motor configured to cause relative movement between the tool and the substrate along a feed path, a controller configured to control the spindle motor and the feed motor and a tool load measurement structure configured to provide a tool load value to the controller. The controller is configured to compare the load on the tool with stored or calculated first compliance values for a first location along the feed path and second compliance values for a second location along the feed path.

Abstract: A coordinate information conversion device includes: calculation means for acquiring a plurality of pieces of image data obtained by capturing a set of positions including a position of a fixed object and a position of a movable part of a machine tool and calculating values of undefined numbers included in a predetermined conversion equation on the basis of the acquired plurality of pieces of image data; and first conversion means for converting a coordinate value in a first coordinate system which is a coordinate system for controlling driving of the movable part to a coordinate value in a second coordinate system which is a coordinate system for representing virtual information and is a coordinate system based on the position of the fixed object on the basis of the predetermined conversion equation of which the values of the undefined numbers are calculated by the calculation means.

Abstract: An alarm trigger communicating system and methods of using the same are provided. The alarm trigger communicating system can receive data characterizing an operational state of a machine and a timing information associated with the operational state. The system can access, based on the operational state, an alarm trigger of a plurality of alarm triggers, the alarm trigger can include predefined properties including an alarm threshold. The system can also display a graphical object representing the alarm trigger, the graphical object displayed in a graphical display space can have a first axis and a second axis for displaying a plot over time of operational parameter associated with the machine. The graphical object having a first visual characteristic can indicate the alarm threshold.

Abstract: A system for controlling automation includes a machine which collects data generated by performance of an operation by the machine. A user device displays a machine control interface (MCI) corresponding to the machine. The MCI displays the collected data to a touch interface of the user device, and defines at least one touch activated user interface element (UIE) for manipulating the data. The user device can be enabled as an automation human machine interface (HMI) device for controlling an operation performed by the machine, such that a touch action applied to a UIE of the MCI controls the operation. A prerequisite condition to enabling the user device as an automation HMI device can include activation of an enabling switch selectively connected to the user device. The MCI can be stored in a memory of the enabling switch and retrieved from the enabling switch by the user device.

Abstract: Upon performing diagnosis of a machine tool, etc., data suited to diagnosis is acquired while also reducing the burden on the user. A diagnostic data acquisition system that acquires diagnostic data for diagnosing a machine tool includes: a control unit that controls driving of a mobile part of the machine tool based on control data; a timing generation unit that generates an acquisition timing for the diagnostic data based on the control data; and a diagnostic data acquisition unit that acquires data which varies accompanying driving of the mobile part according to control by the control unit, as the diagnostic data.

Abstract: A failure diagnostic device for performing a failure diagnosis on a multi-axis robot includes a position detector that detects a movement position of each of joint shafts included in the multi-axis robot, a torque detector that detects a disturbance torque applied to the joint shaft, a routine-operation determination circuit that determines whether or not the multi-axis robot is executing a predefined routine operation, from the movement position detected by the position detector, a reference-value calculation circuit that calculates a disturbance-torque reference value from the disturbance torque detected during execution of the routine operation, a torque correction circuit that corrects the disturbance torque detected while the multi-axis robot executes an operation different from the routine operation by using the disturbance-torque reference value, calculated by the reference-value calculation circuit, to thereby acquire a corrected disturbance torque, and a failure diagnostic circuit that performs a fai

Abstract: A machine learning device that can optimize an equation for estimating a thermal displacement amount of a machine element based on the operating state of the machine element. The device acquires operating state data of the machine element, acquires a measured value for the thermal displacement amount, stores the operating state data and measured values for the thermal displacement amount of the machine element as training data associated together as a label, sets an equation for calculation the thermal displacement amount based on the operating state data, calculates an estimated value for the thermal displacement amount by substituting the operating state data into this equation, determines whether a difference between the estimated value for the thermal displacement amount and the measured value for the thermal displacement amount is no more than a predetermined threshold.

Abstract: A system is provided that facilitates communication of haptic notification messages. The system receives a haptic notification message from a tool within a network, where the haptic notification message indicates that the tool has detected an event. The system further determines whether the haptic notification message is a haptic notification message that is required to be transmitted to at least one haptic notification device within the network. The system further transmits the haptic notification message to the at least one haptic notification device using the network in response to a determination that the haptic notification message is a haptic notification message that is required to be transmitted to at least one haptic notification device, where the at least one haptic notification device generates a haptic notification in response to receiving the haptic notification message.

Abstract: A method and apparatus for assessing a calibration of a multi-axis ultrasonic scanner, the method comprising: providing a calibration verification tool (100), comprising a plurality of mutually oblique plates (110-140) defining surfaces at predefined angles with respect to one another; providing a digital model of the tool; registering, by the ultrasonic scanner, the tool (100) within the reference frame; controlling the ultrasonic scanner to measure a plate (110-140) to determine a reference signal; measuring each plate (110-140); using the reference signal and the plate measurements, determining an orientation of the ultrasonic scanner when each plate was measured; and, using the determined orientations, verifying whether or not the ultrasonic scanner calibration.

Abstract: A monitoring system for monitoring a plurality of components is provided. The monitoring system includes a plurality of client systems. The plurality of client systems is configured to generate a plurality of component status reports. The plurality of component status reports is associated with the plurality of components. The monitoring system also includes a component wear monitoring (CWM) computer device configured to receive the plurality of component status reports from the plurality of client systems, generate component status information based on a plurality of component status reports, aggregate the component status information to identify a plurality of images associated with a first component, and compare the plurality of images associated with the first component. The plurality of images represents the first component at different points in time. The CWM computer device is also configured to determine a state of the first component based on the comparison.

Abstract: An alarm trigger communicating system and methods of using the same are provided. The alarm trigger communicating system can receive data characterizing an operational state of a machine and a timing information associated with the operational state. The system can access, based on the operational state, an alarm trigger of a plurality of alarm triggers, the alarm trigger can include predefined properties including an alarm threshold. The system can also display a graphical object representing the alarm trigger, the graphical object displayed in a graphical display space can have a first axis and a second axis for displaying a plot over time of operational parameter associated with the machine. The graphical object having a first visual characteristic can indicate the alarm threshold.

Abstract: A method for analyzing streaming data includes providing a streaming accumulator comprising an addition module and two multiplexers, receiving one or more data streams, continuously calculating a set of basic statistical elements, receiving a request to calculate a set of statistical descriptors, calculating the set of statistical descriptors, and providing the set of statistical descriptors. An apparatus for analyzing streaming data includes a first multiplexer configured to receive a first summation, a second summation, and a current data item, and forward the first summation on cycles 1 and 3, forward the second summation on cycle 4, and forward the current data item on cycle 2, a second multiplexer configured to receiver the second summation, a third summation, and a previous data item, and forward the previous data item on cycles 1 and 3, forward the second summation on cycle 4, and forward the third summation on cycle 2.

Abstract: A method for analyzing streaming data includes providing a streaming accumulator comprising an addition module and two multiplexers, receiving one or more data streams, continuously calculating a set of basic statistical elements, receiving a request to calculate a set of statistical descriptors, calculating the set of statistical descriptors, and providing the set of statistical descriptors. An apparatus for analyzing streaming data includes a first multiplexer configured to receive a first summation, a second summation, and a current data item, and forward the first summation on cycles 1 and 3, forward the second summation on cycle 4, and forward the current data item on cycle 2, a second multiplexer configured to receiver the second summation, a third summation, and a previous data item, and forward the previous data item on cycles 1 and 3, forward the second summation on cycle 4, and forward the third summation on cycle 2.

Abstract: To provide a machining program processing apparatus capable of preventing an increase in the program correction time or does not let the program correction time go to waste. A machining program processing apparatus includes: a grammar checking unit executing grammar check of a machining program; a transmission processing unit transmitting the machining program to an external device; and a deletion processing unit deleting the machining program, wherein, when a transmission request of the machining program including a grammar error is received, the transmission processing unit confirms whether the transmission is to be permitted or not.

Abstract: Provided is a thermal displacement correction device for a working machine that includes a thermal displacement correction amount calculation unit for calculating a thermal displacement correction amount and configured to correct a thermal displacement amount caused by heat generated and radiated from the working machine and changing with time by the thermal displacement correction amount, the thermal displacement correction device for the working machine including: a correction error coefficient storage memory; a correction precision calculation unit configured to calculate the correction precision of the thermal displacement correction amount based on the thermal displacement correction amount and the correction error coefficient; and a correction precision degradation notification unit.

Abstract: A tool abnormality determination system is provided. The tool abnormality determination system includes: a tool that machines a workpiece; a control device that includes a storage portion in which a monitoring range is stored and an arithmetic portion for comparing the monitoring range to a load of the tool during machining; and an interface device that can notify, when the load of the tool exceeds the monitoring range, an operator of a question regarding whether or not the tool is in an abnormal condition other than abrasion.

Abstract: A graphics processing unit (GPU) may allocate a shared data channel in on-chip graphics memory of the GPU that is shared by at least two stages of a graphics processing pipeline. Shader units in the GPU may execute the at least two stages of the graphics processing pipeline. The GPU may store, in the shared data channel in on-chip graphics memory, data produced by each of the at least two stages of the graphics processing pipeline executing on the shader units.

Abstract: A wireless communication system is a wireless communication system including a slave device, and a master device wirelessly connected to the slave device, and the master device includes a master device wireless communicator that performs wireless communication with the slave device, a master device power supply that supplies power to each unit of the master device, a master device interrupt detector that detects various interrupts, and a master device controller that controls the entire master device, the master device interrupt detector supplies power from the master device power supply to each unit of the master device when detecting the interrupt, and the master device controller performs control to continuously transmit a capture signal to the slave device that waits for reception at a reception timing of a predetermined interval, via the master device wireless communicator for time longer than the predetermined interval.

Abstract: Provided is a management system, comprising an interface, a processor and a storage device, wherein the interface has coupled thereto at least one maintenance target machine to be a target of a maintenance operation, which is identified by one piece of identification information, and wherein the management system is configured to: store information indicating a scheduled start time and scheduled finish time of the maintenance operation; determine, based on the scheduled start time, the scheduled finish time, and a login and logout for the maintenance operation on the at least one maintenance target machine detected by the management system, whether or not the maintenance operation is in execution on the at least one maintenance target machine; and determine, based on a result of the determination, whether or not to execute predetermined processing associated with an event transmitted from the at least one maintenance target machine.

Abstract: A system is provided. The system includes an industrial controller configured to control and obtain current parameter data from one or more components of an industrial system. Further, a storage is included and is configured to store historical data comprising parameter data from the one or more components. The system also includes a prediction controller configured to receive the current parameter data from the industrial controller, receive the historical data from the storage, and to generate an overall predictive score based at least in part upon the current parameter data and the historical data. The overall predictive score represents a likelihood of a fault within the industrial process control system.

Abstract: A method for navigating information includes identifying a value for a property of a first object associated with one or more devices managed by a management system. The method includes displaying a first plurality of tiles for a plurality of objects, including the first object. A first of the tiles is associated with the first object and includes a display of a graphic associated with the object and the identified value for the property. The method includes identifying a plurality of related objects that are related to the first object and displaying a second plurality of tiles for the related objects in response to receiving a selection of the first tile for the first object. Additionally, the method includes displaying, in response to receiving a selection of a second tile in the second plurality of tiles for one of the related objects, information about the one related object.

Abstract: A five-axis control machine tool stores rotation-axis data indicating the inclination or runouts of each of a rotation axis A of a tilting table and a rotation axis C of a rotating table in association with rotation angles determined based on NC data, and calculates a correction rotation angle of each of the rotation angles A and C to correct the erroneous attitude of a tool. Five-axis control is performed based on the NC data by rotating the tilting table and the rotating table about the rotation axes A and C at the correction rotation angles, so that a workpiece is machined while eliminating the erroneous attitude of the tool.

Abstract: A numerical controller controls a three-axis machine tool that machines a workpiece, mounted on a table, with at least three linear axes. The numerical controller includes a workpiece mounting error compensation unit that compensates a mounting error caused when the workpiece is mounted. The workpiece mounting error compensation unit performs an error compensation with respect to an instructed linear-axis position with amounting error which is set beforehand, in order to keep a position with respect to the workpiece at a tool center point position, based on the instructed linear-axis position of the three linear axes to obtain a compensated linear-axis position. The three linear axes are driven based on the obtained compensated linear-axis position.

Abstract: A utilization rate calculation method is disclosed. The utilization rate calculation method comprises steps as follows: scanning an operation signal of I/O ports via a I/O port capturing module; continuously receiving the operation signal via the I/O port capturing module; determining whether a machine tool is running according to the operation signal and a processing machine operation rule via a utilization rate calculation system; if the machine tool is running, recording a processing time data of the machine tool; generating a utilization rate according to the processing-time data and time data to be processed, wherein the processing-machine operation rule is a record for at least one I/O port stand for running corresponding to the machine tool which is running, and the I/O port stand for running is one of the I/O ports.

Abstract: The relationship between polishing conditions constituting elements and the worked shape (amount of polishing) obtained by means of these polishing conditions is input beforehand into polishing condition determining means along with the type of the object of polishing, and polishing conditions (invariable polishing conditions) that are used in common for the polishing of this object of polishing. The polishing condition determining means determine the polishing conditions on the basis of these conditions. Specifically, the above-mentioned polishing conditions constituting elements are given in a time series, or combinations of the above-mentioned polishing conditions constituting elements are converted into variations in the swinging velocity of the polishing body, and the swinging velocity corresponding to the swinging position is determined.

Abstract: A trace correlation system includes a data source, a controller, a probe component, and a tool. The data source is configured to provide raw data. The controller is configured to receive the raw data and generate trace information in response to the raw data. The probe component is configured to generate a data record from the raw data. The tool is configured to link the data record with the trace information.

Abstract: This invention provides a system and method of Advanced Process Control for optimal operation of multi-unit plants in large scale processing and power generation industries. The invention framework includes the following components: continuous real time dynamic process simulation, automatic coefficient adjustment of dynamic and static process models, automatic construction of transfer functions, determination of globally optimal operating point specific to current conditions, provision of additional optimal operating scenarios through a variety of unit combinations, and calculation of operational forecasts in accordance with planned production.

Abstract: The present invention provides a method and the like that are capable of calculating a correction value for a rotational axis and make it possible to correct an error in position or position and posture of a tool, which results from a geometric error, correct an error in posture of the tool, and also enhance the accuracy in machining by preventing a translational axis from operating in an infinitesimal manner due to a correction command. In a machine tool having two or more translational axes and one or more rotational axes, a correction value for each of the translational axes is calculated using a command position of each of the rotational axes, a coordinate value of a correction reference point as one point designated in advance in a command position space of each of the translational axes, and a geometric parameter representing the geometrical error.

Abstract: In an error correction amount creating device that creates an error correction amount for a five-axis machine controlled by a numerical controller and having three linear axes and two rotation axes, the translation error correction amount and the rotation error correction amount for each lattice point of a lattice region into which a two-dimensional coordinate system space with the rotation axes is divided is obtained from data measured for each position of division of the respective axes and given to the numerical controller.

Abstract: In polishing a substrate having a layer of GST disposed over an underlying layer, during polishing, a non-polarized light beam is directed onto the layer of GST. The non-polarized light beam reflects from the first substrate to generate a reflected light beam having an infra-red component. A sequence of measurements of intensity of the infra-red component of the reflected light beam are generated, and, in a processor, a time at which the sequence of measurements exhibits a predefined feature is determined.

Abstract: Provided are a control system and a control method by which a part of a continuously written machining program can be easily executed by a machine tool, and operation and the like of the machine tool can be checked. The control apparatus has an input device 102 which inputs a start instruction of a specific section of a machining program, and a partial executing device between the inputted start instruction of the specific section, and an end instruction that corresponds to the start instruction, to an operation executing device (101).