Abstract: A centralized control apparatus includes a data collecting part that gathers data at a predetermined interval from a substrate processing apparatus for each component in the substrate processing apparatus; a data processing part that determines a status of each component based on the gathered data and regulation control information including attribute information about each component, maintenance information and previously established status-determined information about each component, at a predetermined timing established for each component, and performs thinning-out-processing to the gathered data on a determination result and prepares processed data by processing data obtained by the thinning-out-processing; and a data transmitting part that sends the regulation control information including the determination result and the processed data to a terminal unit.

Abstract: Systems, processes, articles of manufacture, and techniques may be used to facilitate the machining of a surface. In particular implementations, machining a surface may include machining a first surface location with an end effector that is part of a cart movable over the surface. Machining the surface may also include measuring the position of the end effector with a laser tracking system and generating commands for an actuator that positions the end effector. The commands may be based on the position of the end effector and a stored representation of a shape to be achieved by machining.

Abstract: A method of calibrating an inspection system is provided. The method includes contacting a test part with a run-out measurement device and rotating the test part and measuring a first run-out using the run-out measurement device. The method also includes moving the run-out measurement device to a new position and repeating the steps of contacting and rotating the test part to measure a second run-out at the new position. The method further includes using the first and second run-outs to adjust measurements of the inspection system.

Abstract: A method is provided for controlling a machining operation wherein a tool performs a machining operation on a workpiece. The method includes providing a tool holder for holding a tool, a workpiece holder for holding a work piece, and a linear slide for linearly moving a linearly moving part that is either the tool or the workpiece. A rotator is provided for rotating a rotating part that is either a tool or the work piece. A modulator is provided for modulating the movement of a modulated part that is either the tool or the workpiece. A digital controller is provided for controlling the machining of the workpiece by the tool. Appropriate machining parameters are selected for enabling the tool to perform a desired machining operation on the workpiece. The step of selecting appropriate machining parameters includes the step of selecting an appropriate feed rate for the linear slide move the linear moving part. An appropriate rotational speed is selected for the rotator to rotate the rotating part.

Abstract: A device for communicating with low level controllers and sensors located on the production floor of an enterprise directly from the top level of the enterprise. The device comprises a controller which interfaces with programmable logic controllers (PLCs) via the backplane into which the PLCs are plugged. Users are able to define triggers that specify the circumstances under which data points within the PLCs are transported to the enterprise level where they may be stored in a database or sent directly to enterprise application via one of a number of possible transfer protocols. The invention also includes a software client which allows users to set up transfer triggers and view data points on the PLCs in real time.

Abstract: A motion control system comprising a machine platform, at least one event destination, and an event handler. The machine platform carries out automated tasks and generates events. The event handler is configurable to receive at least one event from the machine platform and send the at least one event to the at least one event destination.

Abstract: A machine tool device having a monitoring unit for monitoring at least one machine tool monitoring range, the monitoring unit having a control unit. The control unit is provided for carrying out a recording mode, before a workpiece machining operation, in which a feature parameter is recorded for a feature which is to be taken into account in the workpiece machining operation.

Abstract: A system and method for inspecting a machined surface. The method includes acquiring optical information of the machined surface from a predefined orientation. Further, the method includes comparing one or more parameters of the optical information with a corresponding one or more reference parameters. Furthermore, the method includes assessing a quality of the machined surface based on the comparison.

Abstract: Machine-tool controller (1) having: a drive control unit (13) controlling, based on moving-body operational commands, feed-mechanism actuation to control moving-body move-to points; a modeling data storage (15) storing moving-body and structural-element modeling data; and a screen display processor (20) for generating, based on the moving-body move-to points, data modeling the moving body having been moved into a move-to point, and for generating, and displaying on a screen display device (47) screen, image data in accordance with the modeling data generated. The screen display processor (20) generates and displays the image data in such a manner that a display-directing point, serving as a referent for displaying the moving body and being defined to be on that portion of the moving body where there is a risk of interference with the structural element, coincides with the central portion of the screen display device (47) screen.

Abstract: Computer-implemented methods, and associated computer program products and systems, are disclosed for generating electronic data for use in planning the execution of a manufacturing process. The methods, generally, are used in the structural transformation of execution-level routings for manufacturing processes into planning-level routings. The methods applies various transformation techniques when a planning-level routing includes alternative paths, and different transformation techniques when a planning-level routing includes parallel paths. Planning modes are created in the case of alternative paths, and parallel paths generally do not cause multiple modes to be created. Parallel and alternative paths in a planning-level operation also has impacts on how the a planned duration formula is determined.

Abstract: Provided is a processing method capable of accurately grasping a removal rate and coping with processing of an optical device or an optical device molding die, for which high shape accuracy is required. An ion beam as a tool is caused to scan a workpiece as a dummy work, and a dwell time of the tool at this time is changed based on a linear function with respect to a scanning position thereof and a removal rate with respect to the continuously changed dwell time is grasped based on an actually formed removal shape. The dwell time of the tool is changed based on the linear function with respect to the scanning position, and hence a removal rate based on the actual removal shape can be acquired continuously from a case where a scanning speed is fast to a case where the scanning speed is slow.

Abstract: An apparatus for testing temperature includes a plurality of thermocouples, a plurality of relays, a ground circuit, a compensation circuit, a power supply circuit, a switch circuit, and an MPU. The thermo-couples samples temperatures at different locations in a CNC machine, each thermo-couple is connected to a corresponding relay and selectively connected to the switch circuit by turning on or off the corresponding relay, the compensation circuit includes a cold junction compensator and a first relay, the ground circuit includes a ground terminal and a second relay, the power circuit includes a power supply and a third relay. The first, second, and third relays selectively turn on or off to connect the cold junction compensator, the ground terminal, or the power supply to the switch circuit.

Abstract: An electroerosion control system includes a general CNC controller being configured for controlling a general CNC machine process, a power supply for energizing a tool electrode and a workpiece to be machined, an electroerosion controller electrically connecting with the power supply for controlling an output of the power supply, and adaptively and electrically connecting with the general CNC controller for communication thereof, and a sensor sensing real-time status information of a working gap between the tool electrode and the workpiece and for sending said real-time status information to said electroerosion controller. Said electroerosion controller automatically controls the electroerosion machining process through the general CNC controller according to the real-time status information of the working gap.

Abstract: An apparatus for detecting manufacturing parameters of a machine tool is provided, which comprises at least a sensing and transmitting module, and a receiving module. The sensing and transmitting module has a sensor and a wireless transmitting module. The sensor generates a sensing signal with respect to processing parameter of the machine tool. The wireless transmitting module converts the sensing signal into a wireless signal and transmits the wireless signal to the receiving module. Then the wireless signal is decoded and sent to a processing unit for compensating the machine tool. In the present invention, it is not necessary to consider wiring arrangement so that the sensors can be disposed at positions that are close to the mechanism whose operating status could affect the machining process and the compensation, generated according to the foregoing sensing data, for machine tool will be more effective to improve the machining accuracy.

Abstract: In a two-step processing mode in which a cup for attaching a lens to a chuck axis is changed from a large diameter cup to a small diameter cup on the way of processing, a roughing path data computing unit for computing first roughing path data larger than the target lens shape data by a predetermined finishing margin, and second roughing path data having a radius vector larger by at least ?a than at least radius vector data of the large diameter cup; and a processing controller for roughing the peripheral edge of the lens based on the second roughing path data in response to a processing start signal, thereafter stopping the processing and further resuming the processing. The processing controller performs, when a processing resuming signal is inputted, processing control of either roughing and finishing, or finishing without roughing.

Abstract: A method for monitoring the quality of a machining operation, such as a friction stir welding operation, in which a tool is rotatably driven by a motor during the machining operation. The energy consumption of the motor is determined from the initiation and to the completion of the machining operation. That energy consumption is then compared against a predetermined energy threshold. In the event that the energy consumed during the machining operation is less than the predetermined threshold, an error signal is generated.

Abstract: A grinding method wherein the correlation between the amount of inertial grinding occurring in performing spark-out by a grinding unit and the maximum load current in a motor of the grinding unit is grasped, and a correction value for the amount of inertial grinding corresponding to the maximum load current is preliminarily obtained. When the wafer thickness measured by a thickness measuring gauge has reached the sum of a desired value and the correction value (=the amount of inertial grinding) corresponding to the maximum load current, the spark-out is started. Accordingly, the wafer thickness becomes the desired value after the inertial grinding in performing the spark-out.

Abstract: The disclosure relates to abrasive articles useful in chemical-mechanical polishing (CMP), the articles including a substrate with opposite major surfaces, an abrasive material overlaying at least a portion of at least one of the major surfaces, and at least one of a radio frequency identification (RFID) tag, a RFID tag reader, or a sensor for providing CMP information to a transmitter positioned near the substrate, the transmitter positioned near the substrate and adapted to wirelessly receive CMP information and wirelessly transmit the CMP information to a remote receiver. The disclosure also relates to a CMP pad conditioner for wirelessly communicating CMP information to a remote receiver, a CMP process monitoring system for wirelessly communicating CMP information to a remote receiver, and a method for conditioning a CMP pad using a CMP process monitoring system for wireless communicating CMP information to a remote receiver.

Abstract: It is an object of the present invention to provide a controller for a machine tool and a five axis simultaneous control machine tool controlled thereby which can improve machining accuracy in controlling a pivoting axis of the machine tool. The controller comprises an allowable position error setting member 101 setting an allowable position error ? between a commanded machining position P1 and an actual machining position P2, a velocity control parameter deciding member 103 deciding a velocity control parameter of the pivoting axes of the A-axis and the B-axis in accordance with the allowable position error ? being set and a distance of said actual machining position P2 from the pivoting axes of the A-axis and the B-axis, and a controlling member 104 controlling a velocity of the pivoting axes of the A-axis and the B-axis based on the velocity control parameter.

Abstract: Using parameters such as diameters of a rough cutter and a finishing cutter, a position of a tool at cutting work completion in a rough work, a finishing cutting area, specifications of a rotating tool (the number of cutting edges, a cutting force eigenvalue, a compliance transfer function), etc., a cutting force acting on a cutting edge of the rotating tool is found, and results thereof are made use of to analyze a characteristic equation being a loop transfer function of a vibration system composed of the rotating tool and a work, whereby it is possible to predict presence of generation of self-excited vibration of the finishing cutter performed after a rough work in a shoulder cutting work. Thereby, the rotating tool operates stably in a finishing work and besides shoulder cutting of a work can be performed in a high work efficiency.

Abstract: A slab shaping system includes a slab shaping device. The slab shaping device includes a cutting device and de-burring device, wherein the cutting device and the de-burring device, respectively cut and de-burr a slab. According to an embodiment, the slab shaping system may include a plurality of spaced apart slab support beams that form at least one slot therebetween. According to an embodiment, the cutting device and de-burring device may be axially-aligned. A method for operating a slab shaping system is disclosed. The method includes the steps of positioning a plurality of slab support beams on a table to form at least one slot; positioning a slab over the slab support beams; positioning a cutting device and de-burring device of a slab shaping device in axial-alignment; and cutting and de-burring the cut in the slab along a length of the at least one slot.

Abstract: A shaping machine system is presented. The shaping machine system includes a shaping device including at least one jig mount body for mounting a jig for supporting a workpiece, a shaping tool support body for supporting a shaping tool for shaping the workpiece, a first drive device for rotating the shaping tool, and a second drive device for driving at least one of the shaping tool support body, the jig mount body, or to change a posture of the shaping tool relative to the workpiece. The shaping machine system also includes a computer including an input unit for receiving a jig selection, a shaping tool selection, a shape data reading unit for reading shape data representing a shape of the workpiece after shaping, a shaping data producing unit for producing shaping data for controlling the first and the second drive devices.

Abstract: A mounter for a manufacturing management method suppresses an occurrence of inventory shortage or excess inventory as much as possible, and provides energy savings when manufacturing is not performed at full capacity. A throughput determining step acquires manufacturing information included in a manufacturing plan while manufacturing equipment is manufacturing mounted boards and determines a throughput of the manufacturing equipment for the mounted boards based on the manufacturing information while the manufacturing equipment is manufacturing a sequence of the mounted boards. A manufacturing condition determining step determines a manufacturing condition for decreasing power consumption of the manufacturing equipment within a range of throughput not lower than the determined throughput in the case where the throughput determined in the throughput determining step is equal to or lower than a current throughput of the manufacturing equipment.

Abstract: The invention relates to a method and a device for generating transformed control data for controlling a tool on a machine tool for machining a workpiece clamped in a clamping means of the machine tool, including the steps of: (1) determining control data indicating which first tool path is to be traveled by the tool of the machine tool with which first tool orientation for machining the clamped workpiece if the workpiece is clamped in the clamping means in accordance with a clamping situation target state means; (2) detecting a clamping situation current state; (3) detecting a clamping situation deviation between the clamping situation current state and the clamping situation target state; and (4) generating transformed control data by executing a transformation of a part of the determined control data in dependence of the detected clamping situation deviation.

Abstract: The object is to aim at the reduction in the influence of noises in an output of an AE sensor in a working machine. In a working system comprising a working device for working a work W by causing a tool 14 to come into contact work W, an AE sensor 21, and an AE signal processing section 22 for processing an AE signal output from the AE sensor, AE signal processing section 22 comprises an A/D converter 33 for converting an AE signal into a digital signal, a frequency analysis section 34 for calculating the frequency characteristics of a digital AE signal, storage sections 35, 37 for storing the frequency characteristics when the tool is not in contact with the work or tool dresser as non-contact frequency characteristics, and a difference calculation section 35 for calculating a difference between the frequency characteristics of the detected digital AE signal and the non-contact frequency characteristics.

Abstract: An apparatus, method, and computer program are provided for controller performance monitoring in a process control system. A level of disturbance associated with the process system is determined, and at least one value identifying a stability measure of a controller in the process system is determined using the determined level of disturbance and operating data associated with operation of the process system. The at least one value is compared to at least one threshold value, and a problem with the controller is identified based on the comparison. As an example, the process system could represent a product production system. Also, the operating data could include at least one of: measurement data from one or more sensors and control data for one or more actuators. The controller may be operable to receive the measurement data and generate the control data.

Abstract: After a thermal displacement correcting program has started, a temperature is measured with a temperature sensor in S1, then when a rotational speed of a spindle is changed during the measurement (S2), a counter starts (S3). Then in S4, from a preset relationship between the rotational speed of the spindle and a setting-equivalent heat value, a correction factor that is a difference in setting-equivalent heat value between before and after the change in rotational speed of the spindle is calculated. Subsequently, in S5, a temperature-equivalent heat value is calculated, and then in S6, a compensation amount is calculated from the correction factor and a time elapsed after the change in rotational speed of the spindle. In S7, an equivalent heat value for compensating a dead time is obtained based on the sum of them S8, an estimated calculation for thermal displacement conversion is performed, and a correction process by an NC unit is performed in S9.

Abstract: A machine controller includes a memory and a processor configured for operating a machine control for automatically controlling apparatus for performing a machining process on a workpiece at least partially as a function of data relating to a parameter of the workpiece, and a gage control for automatically controlling gaging apparatus for collecting and processing the data relating to the parameter of the workpiece and storing the data in the memory. At least a portion of the memory in which the data relating to the parameter of the workpiece is stored, is configured as a shared memory so as to allow the machine control to immediately retrieve and use the stored data relating to the parameter of the workpiece. The controller has particular utility for use in controlling a honing process and a gaging process, which can be in-process or post-process, and which can be used for bore sizing and other parameters.

Abstract: A system and method for providing online incentive programs that allows participants in the programs to access hierarchical reports detailing the current status of the incentive programs. The incentive programs include means to restrict access to the various hierarchical reports to prevent the different levels of management from accessing information relating to higher levels of management. Participants may therefore monitor their performance, as well as the performance of those individuals who are under their control.

Abstract: It is an object of the present invention to provide a machine tool which can execute to machine the workpiece more precisely. A CNC 60, a servo driver 33 and a monitoring sensor 50 are connected to same simultaneous communication network 70. One of the CNC 60, the servo driver 33 and the monitoring sensor 50 functions as a master to output a periodical reference signal, and two remaining ones of the CNC 60, the servo driver 33 and the monitoring sensor 50 function as a slave to be input the reference signal from the simultaneous communication network 70 and to execute own processes on a basis of the reference signal.

Abstract: A robot tool for machining workpieces, includes a connecting element for connection to a robot. A cutting blade is maintained in a predetermined position by a retaining element, the retaining element being connectible to the robot by a connecting element.

Abstract: A failure alarm device includes: an operation instruction capturing unit; an operation status signal capturing unit; and a timing and alarming unit for starting timing when the operation instruction capturing unit captures a start-operation instruction and the operation status signal capturing unit captures an operation status signal indicative of that the CMP apparatus is in the preset operation status, and for alarming if a duration of the operation status signal indicative times out. During operation of the CMP apparatus, when there occurs an unexpected failure in a computer or control software or the CMP apparatus is powered off, an alarm can be initiated in a timely way so as to inform an apparatus engineer to obviate the failure, and wafer rejects in the CMP apparatus can be avoided. A failure alarm method is also provided.

Abstract: A control unit for a machine tool at least one vibration detection device attached to a main shaft portion of a machine tool or a movable body; a storage device for storing a vibration signal detected by the vibration detection device being related to operation information of the machine tool; a collision judgment device for judging that a collision has occurred; and an output device for outputting the vibration signal at the time of judging the occurring of the collision. By the above constitution, the control unit is capable of grasping a specific circumstance of collision and quickly determining a cause of collision.

Abstract: A thermal error compensation method for machine tools is disclosed, which comprises the steps of: disposing at least a thermal sensor at positions neighboring to the at least one heat source of a machine tool; driving the machine tool to operate under a specific operation condition for enabling the at least one heat source to generate heat; generating a thermal signal according to the temperature detected by the at least one thermal sensor; using a heat conducting calculation unit to access the thermal signal and the information relating to the specific operation condition to be used in a calculation for obtaining and thus outputting at least a node temperature; and using an error compensation unit to access the at least one node temperature to be used in a calculation for obtaining thermal error compensation values for the machine tool.

Abstract: The invention relates to a machine tool monitoring device with an identification unit for identifying the operating situation of a machine tool. According to the invention, the identification unit is designed to identify an operating situation using at least one distance variable.

Abstract: A machine tool spindle structure capable of monitoring a working state in real time includes a spindle body, a rotating mandrel, a cutter base, and an internal inspecting device. The cutter base is combined with the rotating mandrel and rotates with the rotating mandrel. The rotating mandrel has a chamber, and the internal inspecting device is disposed in the chamber. Inspecting chips in the internal inspecting device are directly disposed on the cutter base, so as to measure working parameters during a processing process. The working parameters are transmitted to an external information device by a wireless transmission module in the internal inspecting device, thereby accurately giving a feedback of the working state of a processing cutter in real time.

Abstract: The invention concerns an industrial robot (4) comprising a machining tool (2) attached to one hand (3) of the robot, designed to perform a hydraulic-driven movement relative to the hand (3) and connected therefor to a hydraulic unit (10). The hydraulic unit (10) is placed directly on a mobile part of the robot, in particular directly on the robot hand (3). Therefore there is no more need for hydraulic supply lines along the arm of the robot. Further, when the robot hand (3) changes tool, no separation of hydraulic lines is required. The machining tool (2) is in particular a device for placing blind rivets, thereby enabling an entirely automated process for placing blind rivets.

Abstract: A system and method for monitoring a semiconductor manufacturing process is disclosed. The system communicates with one or more process tools, and monitors each tool during a predetermined process window time. Errors and warnings are provided to users, allowing corrective action to be taken. Additionally, the system of the present invention can initiate automatic adjustment of the process tools to maintain an efficient manufacturing operation.

Abstract: The invention is based on a machine-tool monitoring device. It is proposed that the machine-tool monitoring device have a signal unit (24) provided for ultra-broadband operation.

Abstract: A vibration suppressing method and a vibration suppressing device are disclosed. After a tool is attached to a main spindle, a modal parameter of the tool or a workpiece is computed. Thereafter, a relation between chatter frequency and phase difference is calculated as an approximation formula based on the obtained modal parameter and machining conditions. If chatter vibration occurs after initiation of the machining, a chatter frequency corresponding to a target phase difference is obtained using the approximation formula, and based on the obtained chatter frequency, the number of tool flutes and the main spindle rotation speed, the optimum rotation speed is calculated. The rotation speed of the main spindle is then changed in accordance with the obtained optimum rotation speed.

Abstract: The invention relates to a machine tool monitoring device having a detection unit for detecting an application in a machine tool. According to the invention, at least one component of the machine tool is used as a reflector for a transmitting and/or receiving signal of the detection unit.

Abstract: The present invention provides a system and method for tool use management wherein a CNC machine retains information identifying the tools associated with the machine as well as their current locations (if any), and executes an algorithm for determining the source tools needed by a part program and matching the source tools with the available tools.

Abstract: A machining status monitoring apparatus is provided on a machine tool, and has an actual CCD camera for imaging the tool and the workpiece and generating actual two-dimensional image data thereof, a virtual image generating section having a virtual CCD camera corresponding to the actual CCD camera, in which the tool and workpiece of three-dimensional model are imaged by the virtual CCD camera and virtual two-dimensional image data thereof are generated, and a display control section for receiving from a control device of the machine tool, information relating to the coolant supply state and checking whether coolant is being supplied to the contact portion of the tool and the workpiece, and displaying on a display device actual two-dimensional image data when coolant is not being supplied and displaying on the display device virtual two-dimensional image data when coolant is being supplied.

Abstract: A machining status monitoring apparatus is provided on a machine tool, and has a plurality of actual CCD cameras for imaging the tool and workpiece from different view points and generating actual two-dimensional image data thereof, a virtual image generating section having a plurality of virtual CCD cameras corresponding to the actual CCD cameras, in which the tool and workpiece of three-dimensional model are imaged by the virtual CCD cameras from each point and virtual two-dimensional image data thereof are generated, and a display control section for selecting one virtual CCD camera corresponding to the virtual two-dimensional image data in which the distal end of the tool is not hidden by the workpiece among the generated two-dimensional image data, and displaying the actual two-dimensional image data generated by the actual CCD camera corresponding to the selected virtual CCD camera on a display device.

Abstract: A method of precision surface re-profiling of a composite polymeric component comprising a region capable of being re-profiled, comprising the steps of locating the polymeric composite component with a formable surface relative to a supporting fixture, the thickness of component comprising the formable surface being greater than the desired final thickness in a region to be re-profiled, moving a forming head into position into contact with the formable surface of the composite component with the aid of precision location or measurement sensors, causing the formable surface of the component to flow under the tool and creating a precisely defined local thickness or profile of component under the forming tool, and moving the forming head along the region of the component to be re-profiled, while maintaining the forming tool at a predetermined height profile or while leaving the re-profiled component with a predetermined thickness profile.

Abstract: The invention relates to a machine tool monitoring device with an identification unity for identifying the operating situation of a machine tool. According to the invention, the machine tool monitoring device has at least one projection unit for defining at least one region to be monitored.

Abstract: A method for performing a machining operation on a part uses closed-loop control, based on feedback of information measured from the part, from the tools and machines, and from the environment, to modify the controlling parameters for the machining operation. By recording the information for all machining operations, statistical data can be generated, and the process control can be further improved by applying this statistical knowledge. Information relevant to each part can be stored, so that it can be passed on to subsequent operations in the manufacturing route.

Abstract: Systems and methods are employed for monitoring and controlling a can necking process in a multi-stage can necking machine. Sensors are employed that communicate with local controllers. A local controller is used at each stage of the multi-stage can necking machine. The local controllers are used to perform fast processing of information from the sensors located in the stage associated with the local controller. A main controller is then used to determine drop rates. Predefined threshold rates may be used to compare with calculated drop rates. A multi-stage can necking machine may be controlled in part based on drop rates crossing threshold rates.

Abstract: An acceleration/deceleration control method of a CNC machine tool includes receiving an acceleration/deceleration timing signal and a velocity signal. The acceleration/deceleration timing signal is calculated to acquire a plurality of different first weight values and different second weight values by a first formula and a second formula. A velocity variation of the velocity signal is determined to be zero, positive or negative. The velocity signal is acquired, if the velocity variation is zero. A plurality of acceleration signals are acquired by the velocity signal multiplying each of the first weight values, if the velocity variable is positive. A plurality of deceleration signals are acquired by the velocity signal multiplying each of the second weight values, if the velocity variation is negative. The velocity signal, the acceleration signal and the deceleration signal are converted into a first driving signal, a second driving signal and a third driving signal.

Abstract: A cutting device is provided which can simultaneously achieve a shorter machining time, lower machining resistance during cutting, and high-precision machining. To be specific, the cutting device of the present invention includes a three-axis tool unit including a first actuator operating in a u direction, a second actuator operating in a v direction orthogonal to the u direction, a third actuator operating in a w direction orthogonal to the u direction and the v direction, a tool holder disposed at the intersection of the u direction, the v direction, and the w direction, a tool mounted in the tool holder, and three sensors for measuring the displacements of the first, second, and third actuators, respectively and feeding back displacement signals representing the measured displacements, wherein the first, second, and third actuators of the three-axis tool unit vibrate so as to perform vibration cutting on a work material.