By Probe (e.g., Contact) Patents (Class 702/168)
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Patent number: 12066917Abstract: Techniques described herein can monitor various data metrics. The auto-insight techniques can further detect and rank data segments that contributed to, or counteracted, shifts in data and detect when such shifts occurred. Thus, the techniques described herein can detect and identify root causes in shifts in different metrics. The techniques include pruning and ranking causes to identify the root causes and identify non-relevant factors, as well.Type: GrantFiled: May 16, 2023Date of Patent: August 20, 2024Assignee: Snowflake Inc.Inventors: Christian Kleinerman, Christopher F. Pouliot, Jacobus J. P. Van Ryswyck
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Patent number: 11965736Abstract: A method measures a given object using a coordinate measuring machine (CMM) having a measurement space. As such, the method determines one or more portions of the given object to be measured and then forms a virtual 3D movement model representing CMM movement required to measure the one or more portions. The method then uses the 3D movement model to virtually position and orient the given object within the CMM measurement space.Type: GrantFiled: August 28, 2020Date of Patent: April 23, 2024Assignee: Hexagon Metrology, Inc.Inventors: Michael Mariani, Milan Kocic
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Patent number: 11687436Abstract: Techniques described herein can monitor various data metrics. The auto-insight techniques can further detect and rank data segments that contributed to, or counteracted, shifts in data and detect when such shifts occurred. Thus, the techniques described herein can detect and identify root causes in shifts in different metrics. The techniques include pruning and ranking causes to identify the root causes and identify non-relevant factors, as well.Type: GrantFiled: March 25, 2022Date of Patent: June 27, 2023Assignee: Snowflake Inc.Inventors: Christian Kleinerman, Christopher F. Pouliot, Jacobus J. P. Van Ryswyck
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Patent number: 11630426Abstract: A measurement sensor is integrated with a control object so that a position separated from a processing object by the control object along a target trajectory is a measurement point. A control device includes: a first generator that generates a first command position of the control object on a plane; a first control part that generates a first operation amount using a model predictive control; a second generator that generates a second command position of the control object on an orthogonal axis that is orthogonal to the plane; and a second control part that generates a second operation amount using the model predictive control. The second generator generates the second command position so that the distance between the control object and the surface of an object is constant, based on the measurement result of the measurement sensor and the first command position.Type: GrantFiled: March 6, 2020Date of Patent: April 18, 2023Assignee: OMRON CorporationInventor: Masaki Namie
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Patent number: 11321212Abstract: Techniques described herein can monitor various data metrics. The auto-insight techniques can further detect and rank data segments that contributed to, or counteracted, shifts in data and detect when such shifts occurred. Thus, the techniques described herein can detect and identify root causes in shifts in different metrics. The techniques include pruning and ranking causes to identify the root causes and identify non-relevant factors, as well.Type: GrantFiled: August 20, 2021Date of Patent: May 3, 2022Assignee: Snowflake Inc.Inventors: Christian Kleinerman, Christopher F. Pouliot, Jacobus J. P. Van Ryswyck
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Patent number: 11009485Abstract: A distance sensor unit is also provided. The distance sensor unit includes an array of distance sensors configured to identify surface irregularities deviating from an expected nominal geometry of a surface as the distance sensor unit is moved along the surface and a handheld housing configured for being gripped by an operator. The array of distance sensors is connected to the handheld housing. The distance sensor unit also includes at least one surface irregularity indicator configured for providing an alert to the operator as the distance sensor unit moves over one of the surface irregularities deviating from the expected nominal geometry of the surface.Type: GrantFiled: September 12, 2018Date of Patent: May 18, 2021Assignee: Framatome Inc.Inventors: Mark W. Lowry, Nghiep K. Du
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Patent number: 11002525Abstract: A gear inspection apparatus includes: a measurement unit which has a probe installed to be movable forward and rearward relative to a work gear rotatably mounted on a frame, and measures a dimension of the work gear, which rotates, by a measurement ball provided at a tip of the probe; a drive unit which is installed on the frame so as to be connected to the measurement unit and moves the probe forward and rearward; and a controller which receives a displacement measurement value related to a position of the probe which is measured by the measurement unit, and converts the displacement measurement value into a digital value.Type: GrantFiled: December 5, 2018Date of Patent: May 11, 2021Assignees: HYUNDAI MOTOR COMPANY, KIA MOTORS CORPORATION, SIGNALLINK CO., LTD.Inventors: Sang Jong Shin, Hyun Choi
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Patent number: 10890443Abstract: A rotary table including a placement surface with an object; a rotary base rotating the rotary table; a detector detecting displacement of a peripheral surface of the object; an angle adjustment mechanism adjusting an inclination angle of the rotary table; a position adjustment mechanism adjusting a position of the rotary table; a video acquisition unit acquiring a video of the rotary base; a display unit displaying an image based on the video; a position recognition unit recognizing images of the rotary table, rotary base, and object on the display unit and recognizing positions of the rotary table, rotary base, and object in a display space of the images; and a display control unit performing control of displaying a guide in a superimposing manner on the image on the display unit on a basis of the positions of the rotary table, rotary base, and object recognized by the position recognition unit.Type: GrantFiled: June 12, 2019Date of Patent: January 12, 2021Assignee: MITUTOYO CORPORATIONInventors: Shinsaku Abe, Hideyuki Kusanagi
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Patent number: 10816315Abstract: A check method of worm gears includes the following steps: identification of a real profile (PR) of a worm gear to be checked; scanning of the real profile (PR) in such a way to obtain a measured profile (PM), filtering of the measured profile (PM) with a low pass filter in such a way to obtain a primary profile (PP), filtering of the primary profile (PP) with a high pass filter in such a way to obtain a surface analysis profile (SA), calculation of three parameters (SAa; SAq; SAp) from said surface analysis profile (SA) and comparison of the three parameters (SAa; SAq; SAp) with preset threshold values (TSa; TSq; TSp) in such a way to reject the worm gear when at least one of the parameters exceeds the corresponding threshold value.Type: GrantFiled: May 24, 2018Date of Patent: October 27, 2020Assignee: TORNERIA FERRERO S.P.A.Inventor: Ruggero Chiminello
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Patent number: 10529444Abstract: System that generates the solvent-excluded surface (SES) of a molecule using a parallel algorithm that may execute on a GPU. Parallel execution allows a SES to be created in seconds even for a large protein, or to be recreated rapidly when exploring modifications to molecular structure. The algorithm calculates a spatial field that represents a signed distance between an atom-facing surface of a probe and each point in 3D grid. Spatial field calculations for different grid points may be performed in parallel. The SES is then obtained as the zero isosurface of the spatial field, using for example marching cubes. Atoms and probes may be placed into spatial buckets and indexed by bucket to improve efficiency by limiting calculations to atoms and probes in the proximity of a point.Type: GrantFiled: February 6, 2019Date of Patent: January 7, 2020Assignee: Nanome Inc.Inventors: Yang Zhou, Vincent Brunet, Kai Wang, Steven McCloskey
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Patent number: 10401163Abstract: The present invention provides a calculation method of calculating a shape of a surface to be measured, including a step of, based on an inclination angle of the surface in a scan direction of a probe, determining a first correction parameter used to correct a measurement error caused by scanning the probe in the first direction and a second correction parameter used to correct a measurement error caused by scanning the probe in the second direction.Type: GrantFiled: September 21, 2015Date of Patent: September 3, 2019Assignee: CANON KABUSHIKI KAISHAInventor: Tetsuji Oota
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Patent number: 10312611Abstract: A floating connector assembly device is provided. An electronic component is mounted directly or indirectly to a chassis of an electronic device. At least one conductive contact spring is mounted to the electronic component and configured to electrically couple to the electronic component. A printed circuit board having a fixed end and a free end with an electrical contact positioned between the two ends is positioned against the conductive contact spring, the contact spring being biased so that a contacting portion of the contact spring contacts the electrical contact to form an electrical connection. The electrical connection is maintained during relative movement of the conductive contact spring and the electrical contact of the printed circuit board by a bias force of the conductive contact spring.Type: GrantFiled: May 22, 2017Date of Patent: June 4, 2019Assignee: MICROSOFT TECHNOLOGY LICENSING, LLCInventors: Akash Atul Shah, Kurt David Wrisley, Hua Wang, Todd David Pleake
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Patent number: 9995574Abstract: A method is provided to assist adjustment for a movement path of a probe. A coordinate measuring machine includes a probe having a tip for detecting a surface of an object, and a movement mechanism for moving the probe, and measures a shape of the object by allowing the probe tip to scan the surface. A controller controls operation of the coordinate measuring machine by calculating a scanning path for allowing the probe tip to perform scanning movement and the movement path followed by the probe when the probe tip moves along the scanning path, setting control points on a line connecting each position of the probe tip and each corresponding position of the probe accepting a change in position of the control points by a user, and changing the movement path accordingly. An adjustment guide unit in the controller allows the control points to move collectively.Type: GrantFiled: February 3, 2012Date of Patent: June 12, 2018Assignee: MITUTOYO CORPORATIONInventor: Liming Li
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Patent number: 9982993Abstract: The present invention provides a measurement apparatus for measuring a shape of a surface of an object, including a probe configured to be scanned on the surface of the object, a plurality of reference members configured to be arranged in a scanning direction of the probe, a plurality of detection units configured to be provided at different positions of the probe in the scanning direction and each configured to detect a distance from a reference member which has been selected from the plurality of reference members in accordance with a position of the probe in the scanning direction, and a processing unit configured to obtain shape information of the surface of the object by obtaining position information of the probe based on at least one of detection results of the plurality of detection units while scanning the probe.Type: GrantFiled: November 29, 2016Date of Patent: May 29, 2018Assignee: CANON KABUSHIKI KAISHAInventor: Tetsuji Oota
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Patent number: 9689655Abstract: This invention relates to a method for measuring a feature of an object that comprises obtaining a representation of at least the feature on the object by acquiring multiple data points via surface measurement of at least the feature. A model substantially replicating at least the feature of the object is fitted to the representation. The model comprises parameters defining at least two independently alterable portions that are linked at a common point. The fitting comprises changing the form of the model by altering at least one of the at least two independently alterable portions. The method also comprises obtaining information regarding at least the feature from the fitted model.Type: GrantFiled: October 29, 2009Date of Patent: June 27, 2017Assignee: RENISHAW PLCInventor: Jean-Louis Grzesiak
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Patent number: 9677879Abstract: A tire appearance inspection apparatus and method employing image processing is capable of performing tire appearance inspection with great accuracy. The tire appearance inspection apparatus includes a sectional shape acquiring device for acquiring cross-sectional shapes of a tire in the radial direction along the circumference of the tire, an arc fitting device for fitting an arc to each of the cross-sectional shapes, an arc center position calculating device for calculating the center positions of the arcs, and a sectional shape aligning device for aligning the cross-sectional shapes using the center positions of the arcs for the cross-sectional shapes.Type: GrantFiled: May 24, 2011Date of Patent: June 13, 2017Assignee: KABUSHIKI KAISHA BRIDGESTONEInventors: Akinobu Mizutani, Tomoyuki Kaneko
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Patent number: 9390202Abstract: Coordinate measurement data such as point cloud data associated with coordinate measurement machine data is reduced in a strategic and systematic manner by segmenting and/or reducing data based on nominal geometric information contained in an electronic file such as a CAD model or a coordinate measurement machine inspection plan. For example, in one embodiment, a software application is used to identify geometric features and tolerances within a CAD model of an object, and to segment coordinate measurement data of a physical object based on the identified geometric features and tolerances from the CAD model. The various segments of coordinate measurement data may be assigned different data requirements, and the data may be reduced in different manners on a feature-by-feature basis.Type: GrantFiled: July 27, 2012Date of Patent: July 12, 2016Assignee: Hexagon Metrology, Inc.Inventor: Jonathan J. O'Hare
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Patent number: 9310177Abstract: A method according to the invention includes measuring respective geometric errors that occur in a three-dimensional movement mechanism when different weights are applied to a ram, storing in a storage section respective correction parameters for correcting the respective geometric errors measured for the different weights, inputting weight information of a probe attached to the ram, reading from the storage section one of the correction parameters that corresponds to the inputted weight information, and correcting measurement data with the read correction parameter.Type: GrantFiled: September 14, 2011Date of Patent: April 12, 2016Assignee: MITUTOYO CORPORATIONInventors: Mitsuru Fukuda, Kazumi Mizukami, Masao Suzuki, Takahiro Morosawa
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Patent number: 9298178Abstract: A shape measuring apparatus includes: a probe having a stylus tip; a movable mechanism configured to move the stylus tip; an information acquiring unit configured to acquire design information of a workpiece; a path setting unit configured to set a path of the stylus tip; a path component calculating section configured to calculate a path velocity vector; a push direction component calculating section configured to detect a deflection, and calculate a push correction vector; a locus correction component calculating section configured to detect an amount and a direction of locus deviation of the probe from the path, and calculate a locus correction vector; a velocity synthesizing section configured to calculate a velocity synthesis vector by combining the path velocity vector, the push correction vector, and the locus correction vector; and a drive control unit configured to move the probe according to the velocity synthesis vector.Type: GrantFiled: May 14, 2013Date of Patent: March 29, 2016Assignee: MITUTOYO CORPORATIONInventors: Takashi Noda, Hiromi Deguchi
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Patent number: 9188422Abstract: According to the invention, a set of sensors (4a) is placed on this shape (curve or surface), each sensor outputting signals representative of the orientation of the curve or the surface at the location of this sensor; a model of the curve or the surface is chosen; model parameters are determined from the signals; and the spatial distribution of the points on the geometric shape are determined using these parameters. The invention particularly applies to machining, joinery, masonry, and building domains.Type: GrantFiled: March 6, 2006Date of Patent: November 17, 2015Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUEInventors: Dominique David, Nathalie Sprynski
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Publication number: 20150112635Abstract: A method of establishing a datum reference frame for a manufactured detail part used in an assembly comprises establishing a primary datum reference plane, identifying first and second mating surfaces of the part, identifying first and second functional features of size on the first and second mating surfaces, using a coordinate measuring machine (CMM) probe to identify a first point at an intersection of a centerline of the first feature and the first surface, using the CMM probe to identify a second point at an intersection of the centerline of the second feature and the second surface; and establishing a secondary compound datum reference plane through the intersection points and perpendicular to the primary datum reference plane.Type: ApplicationFiled: October 18, 2013Publication date: April 23, 2015Applicant: The Boeing CompanyInventors: John P. Scheibel, Neel P. Patel
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Patent number: 8954937Abstract: An image detection program creating system comprise a parameter setting module, an image loading module, a programming module, and a program conversion module. The parameter setting module sets parameters of a Dimensional Measuring Interface Specification (DMIS). The image loading module loads a 3D image. The programming module programs the DMIS program according to the parameters of the DMIS and the 3D image. The program conversion module converts the compiled DMIS into an image detection program.Type: GrantFiled: November 30, 2012Date of Patent: February 10, 2015Assignees: Hong Fu Jin Precision Industry (ShenZhen) Co., Ltd., Hon Hai Precision Industry Co., Ltd.Inventors: Ming-Shan Cao, Kuei-Yang Lin, Wei Xu, Yuan-Ke Li
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Patent number: 8949071Abstract: According to the present invention, a center deviation amount, which is an amount of deviation (distance) between the center line of a reference measurement target and the detection point is calculated using the reference measurement target having a known diameter, and a measurement value of a diameter of an arbitrary measurement target is corrected using the center deviation amount. Therefore, an accurate diameter value can be calculated even in the case of a measurement target having a diameter value different from the diameter value of the reference measurement target.Type: GrantFiled: January 12, 2012Date of Patent: February 3, 2015Assignee: Tokyo Seimitsu Co., Ltd.Inventor: Ryo Takanashi
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Publication number: 20150025845Abstract: A stylus is deflected as a tip of the stylus follows surface variations along a measurement path on a surface of a workpiece. A transducer provides measurement data in a measurement coordinate system. A data processor is configured to: determine a relationship between the data in the measurement coordinate system and nominal surface data representing the expected surface characteristic of the workpiece in a workpiece coordinate system; simulate a measurement data set for the nominal surface using the nominal surface data and the determined relationship; if a simulated range of the simulated data set does not meet a given criterion, adjust a selected measurement data value for a selected point and repeat the simulation to determine an adjusted data value for which the simulated range meets the criterion; and determine start conditions required for a measurement procedure to provide the adjusted data value for the selected measurement point.Type: ApplicationFiled: February 27, 2013Publication date: January 22, 2015Applicant: Taylor Hobson LimitedInventor: Daniel Ian Mansfield
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Publication number: 20150012245Abstract: A computer implemented method of determining the surface shape of an aspheric object using a metrological apparatus includes positioning the object on a support surface of a turntable so that an axis of the object is tilted with respect to the axis of rotation of the turntable; using a measurement probe to make a first measurement of the object; rotating the turntable; after rotation of the turntable, using a measurement probe to make a second measurement of the object, diametrically opposite the first measurement, estimating a first angle based on fitting the first measurement data using a surface model including: a dependency on the axis tilt angle and a dependency on the radius of the base of the object; estimating a second angle based on fitting the second measurement data to the surface model; and determining the tilt angle based on the first angle and the second angle.Type: ApplicationFiled: February 13, 2013Publication date: January 8, 2015Applicant: Taylor Hobson LimitedInventor: Shaojun Xiao
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Publication number: 20140324383Abstract: A surface profiler comprises at least one front support wheel and at least one rear support wheel for travelling along the surface of a profile to be measured, the rotational axes of said wheels being longitudinally spaced, and the wheels contacting the surface being profiled in a collinear manner. A frame carried on the wheels carries at least one inclinometer and at least two vertical distance measuring apparatus such as lasers, and may also carry an optical encoder. The lasers are collinear with each other and with the wheels. Incremental to measurements of inclination angles provided by the inclinometer, together with incremental measurements of distance to the surface being measured provided by the lasers, produce a continuous, high resolution mathematical series of elevations representing the surface profile, including reproduction of surface features that are smaller than the distance between the wheels.Type: ApplicationFiled: April 25, 2013Publication date: October 30, 2014Inventor: Paul Toom
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Publication number: 20140278232Abstract: Described herein are methods, systems and devices for image-guided, computer-assisted surgical procedures, in particular for intra-operative registration of anatomical structures. Embodiments of the invention may enable a user to register the surface of an anatomical structure intra-operatively in an interactive, computer-guided process. The user may send information about acquired data points to the computer, and the computer may evaluate the aggregate of data points, optionally provide instructions to the user for acquisition of additional data points, and signal to the user when sufficient data points have been acquired for registration of the surface of the anatomical structure.Type: ApplicationFiled: March 11, 2014Publication date: September 18, 2014Inventors: Denise A. Miller, Rose A. Cipriano, Li Lu
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Publication number: 20140249775Abstract: A workpiece contour (13) at least first and second contour geometries (K1-K2) adjoining one another tangentially at a first transition point (U1). Measurement points (M) are recorded along the geometries (K1-K2). Using some measurement points within the first geometry (K1), a first replacement element (01) is determined and assigned to the first geometry (K1). Analogously, using some measurement points (M) of the second geometry (K2) a second geometry element (G2) assigned to the latter is determined. The size and/or the position of the second geometry element (G2) are calculated under the boundary condition that the second replacement element (G2) adjoins the first replacement element (G1) tangentially. The tangential transition point between the two replacement elements (G1), (G2) forms the first transition point (U1). This method can be iterated using additional or other measurement points (M), until the first transition point (U1) is determined with sufficient accuracy.Type: ApplicationFiled: July 4, 2012Publication date: September 4, 2014Applicant: Carl Mahr Holding GmbHInventor: Hero Weber
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Patent number: 8701298Abstract: Coordinate positioning machine or coordinate measuring machine (CMM), with a microprocessor control unit arranged to drive individual axis driver and a proxy module allowing the connection of external devices on a TCP/IP interface. The external devices are used for User interaction, by means of an http server embedded in the microprocessor control unit, or for advanced tasks including tuning and calibration of the dynamic parameters.Type: GrantFiled: May 31, 2012Date of Patent: April 22, 2014Assignee: Tesa SAInventors: Pascal Jordil, Benjamin Vullioud
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Publication number: 20140025336Abstract: A control method of a shape measuring apparatus divides a curve indicating a movement path of a probe into a plurality of sections. A measurement target section is selected from the plurality of sections sequentially from a starting point side of the curve indicating the movement path of the probe. A first curvature radius is calculated from a curvature of the measurement target section. A second curvature radius is calculated according to an angle between a first straight line connecting a starting point to an ending point of the measurement target section and a second straight line connecting a starting point to an ending point of a section next to the measurement target section. A smaller value from among the first curvature radius and the second curvature radius is set as an effective radius. A maximum speed of probe movement increasing according to an increase in the effective radius is calculated for the measurement target section.Type: ApplicationFiled: July 15, 2013Publication date: January 23, 2014Inventors: Takashi NODA, Hiromi DEGUCHI
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Patent number: 8635600Abstract: Embodiments of the invention broadly contemplate systems, methods, apparatuses and program products providing a mechanism in a run-time environment or Virtual Machine (VM) which enables a user to specify the combination of method(s) and thread(s) the user wants to collect traces for, without having to make any modifications to the application source code.Type: GrantFiled: November 24, 2009Date of Patent: January 21, 2014Assignee: International Business Machines CorporationInventors: Venkataraghavan Lakshminarayanachar, Prashanth K. Nageshappa
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Patent number: 8620471Abstract: A system for controlling a numerical control machine tool with movable component parts carrying tools (5) and/or mechanical component parts to be checked includes a control unit (7) and a sensor device (9) having an associated interface unit (15). A digital channel (20), through which there are transmitted measuring signals from the interface unit to the control unit, is used, at different moments and as an alternative to the measuring process, for transmitting confirmation pulse signals (ACK) consequent to request/instruction messages that the control unit sends to the interface unit. A method for controlling the machine tool includes the sending of request/instruction messages (M) from the control unit to the interface unit, for example for checking the efficiency and the operativeness of the measuring chain, and the reception of confirmation pulse signals through the transmission channel which is a component part of the measuring chain.Type: GrantFiled: December 16, 2008Date of Patent: December 31, 2013Assignee: Marposs Societa' per AzioniInventor: Andrea Turrini
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Patent number: 8554502Abstract: A measurement program is created for measurement performed by moving X- and Z-axes so that a central axis of a probe is perpendicular to the surface of a reference sphere, and errors are obtained between original probe position data and probe position data obtained by measurement performed at two different angles ?1 and ?2 of a rotary axis according to the created measurement program. Position coordinates of a tip end of the probe at the two different angles ?1 and ?2 of the rotary axis are corrected so that the errors are zero. Then, the X- and Z-axis coordinates are corrected based on a positive or negative phased shift amount, and measurement errors are obtained by calculation. A real probe tip position is defined by the X- and Z-axis coordinates corrected by a correction amount with which the obtained measurement errors become minimum.Type: GrantFiled: February 12, 2011Date of Patent: October 8, 2013Assignee: Fanuc CorporationInventors: Yonpyo Hon, Kenzo Ebihara, Masayuki Hamura
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Publication number: 20130238281Abstract: A surface texture measurement device capable of resolving errors for each entire display range, a controller for the surface texture measurement device, and a method for controlling the surface texture measurement device that includes selecting any one of the display ranges as a reference range and defining a calibration measurement value for each display range; sequentially inputting the calibration measurement values in place of the measurement values to the range amplifier corresponding to the reference range to obtain a reference display value rDATAi; inputting the calibration measurement values to the range amplifiers corresponding to each display range, then obtaining an AD-converted value ADi and a display value DATAi; computing a gain error rate ki=rDATAi/DATAi, a display resolution DIVi=DATAi/ADi, and a corrected display resolution cDIVi=DIVi×ki; and displaying the corrected display value cDIVi=DIVi×ki.Type: ApplicationFiled: March 1, 2013Publication date: September 12, 2013Applicant: MITUTOYO CORPORATIONInventors: Toshihiro KANEMATSU, Hiroomi HONDA
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Patent number: 8478564Abstract: A 3D measuring apparatus includes a probe that has a spherical gauge head for measuring a measured object; a motion mechanism that holds and moves the probe; and a motion controller that controls the motion mechanism. The controller includes a contact point obtainer that obtains a contact point location of a surface of the measured object and the gauge head based on a central location of the gauge head; a radius of the gauge head; and a swing amount of the gauge head. The controller also includes a motion commander that calculates a location command value causing the motion mechanism to move the probe, based on the contact point location obtained by the contact point obtainer.Type: GrantFiled: September 9, 2010Date of Patent: July 2, 2013Assignee: Mitutoyo CorporationInventors: Takashi Noda, Kenji Ueda
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Patent number: 8447561Abstract: Coordinate transformation parameters are adopted at the time of synthetically combining partial measurement data so as to eliminate the setting error that can get in when a workpiece is set in position on a measuring machine. Then, a shape parameter is adopted to estimate the approximate error shape of the entire workpiece and the approximate error shape is removed from the measurement data. As a result, the residuals are reduced if the measurement data are those of three-dimensional sequences of points. Differences are small when small residuals are compared so that the mismatch is reduced. According to the present invention, the entire measurement data can be synthetically combined without using the conventional concept of overlap.Type: GrantFiled: June 2, 2009Date of Patent: May 21, 2013Assignee: Canon Kabushiki KaishaInventor: Mahito Negishi
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Patent number: 8445295Abstract: An electrical characteristics test for a semiconductor integrated circuit using a Kelvin contact method can be conducted in a pre-process without obstructing the reduction in size of a semiconductor chip or without complicating the circuit design. A probe card in a testing apparatus includes probes for Kelvin contact, the probes for Kelvin contact including a coil probe and a POGO pin probe disposed inside the coil probe, and a probe for two-terminal measurement. Electrode pads formed in each chip area over a wafer are in a relation of A=B<2A, given that the area of one of the electrode pads with which the probe for Kelvin contact comes into contact is B and the area of the other electrode pad with which the probe for two-terminal measurement comes into contact is A.Type: GrantFiled: July 12, 2010Date of Patent: May 21, 2013Assignee: Renesas Electronics CorporationInventors: Akio Shibuya, Katsuyoshi Tsuchiya, Akira Imaizumi, Hiroshi Matsumoto, Shoji Tsuchioka
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Patent number: 8436626Abstract: An embodiment is a method for de-embedding. The method comprises forming a primary structure in a semiconductor chip and forming an auxiliary structure in the semiconductor chip. The auxiliary structure replicates a first portion of the primary structure. The method further comprises determining a transmission matrix for each of the primary structure and the auxiliary structure based on measurements and extracting a transmission matrix of a first component of the primary structure by determining a product of the transmission matrix of the primary structure and an inverse of the transmission matrix of the auxiliary structure.Type: GrantFiled: December 17, 2009Date of Patent: May 7, 2013Assignee: Taiwan Semiconductor Manfacturing Company, Ltd.Inventor: Hsiu-Ying Cho
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Publication number: 20130054194Abstract: A method of calibrating a surface measurement instrument includes rotating a work piece having an undulating surface on a turntable of a metrological apparatus; measuring the surface of the work piece at a plurality of rotational positions; analysing the results of the measurement to determine parameters describing an error causing characteristic of the metrological apparatus; and using the determined parameters to correct measurement data for the error causing characteristic of the metrological apparatus.Type: ApplicationFiled: March 1, 2011Publication date: February 28, 2013Applicant: Taylor Hobson LimitedInventor: Paul J. Scott
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Publication number: 20130041624Abstract: A method is provided to assist adjustment for a movement path of a probe. A coordinate measuring machine includes a probe having a tip for detecting a surface of an object, and a movement mechanism for moving the probe, and measures a shape of the object by allowing the probe tip to scan the surface. A controller controls operation of the coordinate measuring machine by calculating a scanning path for allowing the probe tip to perform scanning movement and the movement path followed by the probe when the probe tip moves along the scanning path, setting control points on a line connecting each position of the probe tip and each corresponding position of the probe accepting a change in position of the control points by a user, and changing the movement path accordingly. An adjustment guide unit in the controller allows the control points to move collectively.Type: ApplicationFiled: February 3, 2012Publication date: February 14, 2013Inventor: Liming LI
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Patent number: 8374803Abstract: A damage detection apparatus and method which detect a damage occurring in a specimen include energizing an inspection area on a specimen into a predetermined energized condition, measuring a potential difference at predetermined intervals in the inspection area, and analyzing an existence or otherwise of a damage, and a shape thereof, based on a plurality of items of potential difference data. Parameters specifying a hypothetical damage are hypothesized in advance and, based on the potential difference data, calculation is executed using a maximum likelihood estimation method on a double body in which hypothetical specimens are doubled by bringing together their front surfaces, and furthermore on a quadruple body quadrupled by bringing rear surfaces of hypothetical specimens together, a maximum likelihood estimation value of the parameters is calculated.Type: GrantFiled: January 31, 2007Date of Patent: February 12, 2013Assignee: National University Corporation Okayama UniversityInventor: Naoya Tada
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Publication number: 20130006579Abstract: A circular shape characteristic measuring device includes a shape measuring device that obtains measured data by measuring a profile shape of a circular cross-section of an object to be measured having the circular cross-section, and a computation device that calculates a circular shape characteristic of the circular cross-section. The computation device includes: an input device configured to input one of three parameters including a cutoff value of the filtering process, a minimum number of samples, and a ratio of a radius of the circular cross-section to a radius of a gauge head; a parameter table that stores a relationship between the three parameters, and based on the input parameter, determines the other two parameters; and a sampler configured to perform sampling of the measured data based on the minimum number of samples.Type: ApplicationFiled: June 20, 2012Publication date: January 3, 2013Applicant: MITUTOYO CORPORATIONInventors: Junji SAKURADA, Tsukasa KOJIMA
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Publication number: 20120303320Abstract: A cross-sectional profile measuring method of measuring cross-sectional profiles of an object at plural measurement sections of the object with a contact probe, includes: circularly moving the probe along a route around a circumference of the object at one of the measurement sections, a distance of the moving being longer than a measurement range corresponding to the circumference of the object by a predetermined overlapping range consisting of an acceleration range and a deceleration range; and moving the probe to next one of the measurement sections through a transfer range in a movement direction oblique to a continuous direction in which the cross-sectional profiles are adjacent to one another to offset a distance corresponding to the overlapping range.Type: ApplicationFiled: May 25, 2012Publication date: November 29, 2012Applicant: MITUTOYO CORPORATIONInventor: Hirokazu Michiwaki
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Patent number: 8296098Abstract: A metrological instrument determines a surface profile or form of a surface (61) of a workpiece (60) by effecting relative movement between a probe (11, 12) and the surface (61) so that the probe follows and is displaced by changes in the surface topography. A measure of the displacement of the probe as it follows the surface is obtained by a displacement provider which may be an interferometric gauge (35). Instead of making a measurement along a single measurement path over the surface (61), respective measurements are made on sections (61d and 61e or 61g and 61h) of that measurement path to obtain corresponding measurement data sets and these measurement data sets are independently positioned or aligned to a reference data set. The reference data set may be obtained by a measurement made on another section (61c) of the measurement path (61), on another measurement path (61f) over another surface (62a and 62b) of the component or on another measurement path over a surface on which the component is located.Type: GrantFiled: January 25, 2006Date of Patent: October 23, 2012Assignee: Taylor Hobson LimitedInventor: Michael Mills
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Publication number: 20120265487Abstract: An improved apparatus and method for the analysis of surface data collected using a sub-micron scale metrology instrument which provides a persistent user experience by allocating set portions of the display to major functional regions thereby allowing a quick to learn and easy to user interface for the setup, analysis, and display of microscopic 3D surface data measurements and resulting analytic data with a variety of 3D surface scanners.Type: ApplicationFiled: May 19, 2011Publication date: October 18, 2012Inventors: Emilio Yanine, Paul R. Unruh, Jon D. Herron, JR., Michael B. Krell, Son H. Bui, Joseph P. Moore, Dmitriy K. Kiselev, Ross O. Smith
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Patent number: 8290740Abstract: Form measuring instrument includes: first measuring means which moves contact piece from first position in parallel with second axis to trace surface of workpiece, measure amount of displacement of contact piece, to obtain first profile; second placing means which rotates workpiece about first axis by 90 degrees to place workpiece at second position from first position; second measuring means which moves contact piece from second position in parallel with second axis to trace surface of workpiece, measure amount of displacement of contact piece, to obtain second profile; extremum position calculating means which fits circles to first and second profiles and calculate positions, in direction parallel with second axis, of first and second extremums indicating circles' extremums; and moving means which moves workpiece in direction parallel with second axis and direction parallel with third axis such that positions, in direction parallel with second axis, of first and second extremums become 0.Type: GrantFiled: April 26, 2010Date of Patent: October 16, 2012Assignee: Mitutoyo CorporationInventors: Toshiyuki Tamai, Tomonori Goto
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Patent number: 8290739Abstract: A method for determining a mobility of an object includes the steps of measuring at least a portion of a shape of an object under an initial increment of a weight load of a plurality of increments of a total weight load using a device and measuring at least a portion of the shape of the object under a next increment of a total weight load of a plurality of increments of a weight load using the device. Repeating the measurements until a total weight load is achieved and comparing the measurements from the device under the plurality of incremental weight loads, thereby determining a mobility of at least the portion of said object under the plurality of increments of weight loads. The method further includes adjusting the elevation and angular orientation of a support surface for the object to achieve further measurements and a device for obtaining such measurements. The method further includes comparing the mobility of a present object to a normal-object to determine a deviation.Type: GrantFiled: September 2, 2009Date of Patent: October 16, 2012Assignee: Amfit, Inc.Inventors: Tony Tadin, Arjen Sundman
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Patent number: 8271228Abstract: In a trajectory information processing device (201) for acquiring from a trajectory of a spiral-shaped graphic easy for a person to enter the input information intended by the person, an input receiving unit (202) receives input of coordinate information of a trajectory, a closed curve acquisition unit (203) repeatedly acquires a closed curve wherein the trajectory crosses over the trajectory for the first time after the starting point and removes from the trajectory the closed curve and the curve preceding thereto for the coordinate information of a trajectory whose input was received, and a vortex information outputting unit (204) outputs changes in the time interval at which closed curves are acquired as information indicating the intensity of the vortex motion of the trajectory.Type: GrantFiled: February 13, 2007Date of Patent: September 18, 2012Assignee: Konami Digital Entertainment Co. Ltd.Inventor: Yasuhiro Kawabata
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Publication number: 20120185210Abstract: According to the present invention, a center deviation amount, which is an amount of deviation (distance) between the center line of a reference measurement target and the detection point is calculated using the reference measurement target having a known diameter, and a measurement value of a diameter of an arbitrary measurement target is corrected using the center deviation amount. Therefore, an accurate diameter value can be calculated even in the case of a measurement target having a diameter value different from the diameter value of the reference measurement target.Type: ApplicationFiled: January 12, 2012Publication date: July 19, 2012Applicant: TOKYO SEIMITSU CO., LTD.Inventor: Ryo TAKANASHI
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Patent number: RE44440Abstract: A system and method is disclosed for minimizing power consumption of a sensor unit that is capable of detecting an object. Main circuitry operates the sensor unit in a high power mode of operation when the sensor unit detects an object. Low power control circuitry operates the sensor unit in a low power mode of operation when the sensor unit does not detect an object within a pre-determined period of time. The low power control circuitry also comprises a counter to periodically determine when to restore the sensor unit to a high power mode of operation. One advantageous embodiment of the sensor unit is a fingerprint sensor unit for detecting a finger to obtain fingerprint information.Type: GrantFiled: January 5, 2012Date of Patent: August 13, 2013Assignees: Validity Sensors, Inc., National Semiconductor CorporationInventors: Lawrence Getzin, Richard B. Nelson, Jaswinder S. Jandu, Richard Alexander Erhart