Abstract: A control apparatus configured to generate correction values for compensation of disturbance signals of a sensor includes a control loop having an input to receive input values. The control loop includes circuitry configured to receive the input values and configured to produce output values based on the input values, and an evaluation device downstream from the circuitry relative to the input, which is configured to receive the output values and to convert the output values into result values. The apparatus also includes a correction device configured to receive the result values and the input values, to generate correction values based on the result values and the input values, and to provide the result values to the circuitry. The correction device includes a detection device having memory, which stores the input values in the memory based on the result values.

Abstract: A computer-implemented method for positioning a coordinate system in relation to a workpiece receives positioning elements including feature elements selected from the workpiece. A normal vector of a first axis, an origin, a normal vector of a second axis are determined according to the positioning elements. A positioned coordinate system is generated according to the normal vectors of the first axis and the second axis, and the origin, for positioning the coordinate system.

Abstract: To provide a calibration jig which can perform three-dimensional calibration of measurement errors in a spectacle frame shape measuring apparatus. The calibration jig (30) is used for calibrating measurement errors of the spectacle frame shape measuring apparatus for measuring a shape of a spectacle frame, etc. A trace groove traced by a measuring probe of the spectacle frame shape measuring apparatus is a frame groove (20) formed in an inner circumference of rims (2A and 2B) of the spectacle frame and provided for engaging with the bevel of a spectacle lens. The rims are secured to a frame body (31) having rigidity higher than that of the rim. The frame groove has a displacement r in the radial direction, a displacement ? in the rotational direction, and a displacement z in the height direction.

Abstract: A calibration device for an on-vehicle camera includes an image receiving portion receiving an image of an area around a vehicle taken by an on-vehicle camera, a viewpoint transformation portion performing a viewpoint transformation on the image to obtain a transformed image, a region setting portion setting a recognition target region on the transformed image according to coordinates of the calibration index set in accordance with vehicle models, where the recognition target region includes therein the calibration index, a calibration point detecting portion detecting a calibration point positioned within the calibration index included in the recognition target region, and a calibration calculating portion calibrating the on-vehicle camera in accordance with coordinates of the calibration point in a reference coordinate system and in accordance with coordinates of the calibration point in a camera coordinate system.

Abstract: In probing by scanning a workpiece (71) to be measured using a coordinate measuring machine a stylus tip is moved before the scanning along a scanning path (73) along an initialization path (83) or/and after the scanning path (73) along a finalization path (85). A length (Lv, Ln) of the initialization path, respectively finalization path, is chosen in dependence of parameters of a concrete measuring task, in particular in dependence of a pre-determined scanning speed, a stiffness of the stylus or a mass of the stylus.

Abstract: A method for correcting an error of the imaging system of a coordinate measuring machine is disclosed. The position of at least two different edges of at least one structure on a substrate is measured. The substrate may be automatically rotated into another orientation. Then the position of the at least two different edges of the at least one structure is measured on the rotated substrate. Based on the measurement data, a systematic error of the imaging system is eliminated.

Abstract: Targets are sensed by a first sensor in a first coordinate system and by a second sensor in a second coordinate system. Gridlock or congruence between the coordinate systems is achieved by sensing at least four targets with both sensors. Pseudomeasurements are generated in both local and external coordinate systems by taking the differences between a first target location and each of second, third, and fourth target locations. The pseudomeasurements are filtered in corresponding pairs, to thereby generate an estimated rotation matrix between the local and external coordinate systems. The estimated rotation matrix is applied to the local coordinate system. The target locations in the rotated local and external coordinate systems are filtered in corresponding pairs to generate an estimated translation vector. The rotation and translation are applied to the local coordinate system to bring it into congruence with the external coordinate system.

Abstract: The invention relates to a method of calibrating an ophthalmic-lens-piercing machine, a device used to implement one such method and a ophthalmic-lens-machining apparatus comprising one such device. The inventive method applies to a machine including a piercing tool, a lens support which is associated with a first reference mark (O1, X1, Y1), and programmable tool-control means which are associated with a second reference mark expressing set co-ordinates which define a target piercing point (M). A template is placed on the support, and the template includes pre-applied markings defining a third reference mark (O3, X3, Y3), such that the third reference mark in essentially in line with the first reference mark. The template is pierced at a pre-determined point corresponding to a target point, and an image of the template this point position, and a correction is applied to the set co-ordinates that can compensate for the misalignment.

Abstract: An interface apparatus (20) for tracking by a tracking system (40) of an object(s) in space for position and orientation and for interacting with the tracking system (40). The interface apparatus (30) comprises passive detectable devices (12,14,16,22) trackable for position by the tracking system (40). A mounting device (10,24) receives the passive detectable devices (12,14,16,22) in a known geometry, and is secured to the object(s) such that a position and orientation of the object(s) is calculable by the tracking system (40) as a function of a tracking of the known geometry of the passive detectable devices (12,14,16,22). One of the passive detectable devices (22) is displaceable with respect to the object(s). A displacement of the passive detectable device (22) with respect to the object(s) is detectable to initiate an interaction with the tracking system (40) while maintaining the tracking of the object(s).

Abstract: A metrological apparatus has a driver (33) that effects relative movement between a support (4) and a measurement probe (8) carriage (7) in a first direction (X) to cause the measurement probe (8) to traverse a measurement path along a surface of an object supported by the support. The measurement probe (8) moves in a second direction (Z) transverse to the first direction as it follows surface characteristics. Respective first and second position transducers (35, 32) provide first and second position data representing the position of the measurement probe in the first and second direction. A calibrator (300) carries out a calibration procedure using measurement data obtained on a surface of known form. The calibrator determines calibration coefficients of an expression relating corrected measurement data and the actual measurement data by using the known form of the reference surface as the corrected measurement data.

Abstract: A surface-profile measuring instrument includes a movement-estimating unit that estimates a movement state of a drive mechanism in accordance with a scanning vector command issued by a scanning vector commanding unit to calculate an estimated movement state quantity, and a correction calculating unit that corrects a detection value of a drive sensor in accordance with the estimated movement state quantity calculated by the movement-estimating unit. The movement-estimating unit has a nominal model setting unit in which a nominal model from the scanning vector commanding unit to the probe is set.

Abstract: The invention relates to a device and a method for correction of the position (x) of a field sensor (4) measured by means of a magnetic localization device. External field distortions, such as caused for example by the rotating components (1a, 1b) of a computer tomograph (1), are then determined with the help of reference sensor (3) placed at a known position. It is possible to deduce, for example, the current angle of rotation (?) of the computer tomograph (1) from the measurement signals of the reference sensor (3). Based on an empirically determined correction (?(x, ?)), the uncorrected determined positions (x) of the field sensor (4) can then be converted to corrected positions (x?) in relation to the field distortions. The field generator (2) and the reference sensor (3) are preferably fastened to the gantry in order to eliminate the dependency of the field distortions on an inclination of the gantry.

Abstract: A system and a method sense the inclination of a machine element, such as a platform, and eliminate tangential and radial acceleration errors. The platform defines orthogonal X and Y axes, and is rotatable about a Z axis. An inclinometer, mounted on the platform at a location spaced from the axis of rotation by a distance r, provides inclinometer outputs indicating acceleration in the X and Y directions, Ix and Iy, respectively. A rate gyro on the platform senses the rotational speed w of the platform. The rate gyro output w is differentiated and multiplied by r to determined tangential acceleration at the inclinometer. A circuit resolves the tangential acceleration into X axis and Y axis components, which are used to correct the inclinometer outputs Ix and Iy for errors that would otherwise result from tangential acceleration.

Abstract: A method for judging directionality of a housing having two parallel panels by a gravity sensor is disclosed. The method is used for a handheld apparatus to judge which of the panels is upward. The method first obtains a set of component quantity of gravity on three coordinate axes from a three dimensional gravity sensor. When ?0.5 g>gz??1 g and 1 g?gz>0.5 g, a first direction status and a second direction status is acquired, respectively. When 0.5 g?gz??0.5 g, the method further reposes on two parameters, polarity of gz and magnitude of the component quantity on y-axis (gy), to judge. When gz>0 and ?0.5 g>gy??1 g or when gz<0 and 1 g?gy>0.5 g, the judging result is the first direction status. When gz<0 and ?0.5 g>gy?1 g or when gz>0 and 1 g?gy>0.5 g, it is the second one. The rest will be judged to be “don't care”.

Abstract: A coordinate measuring machine compensates for hysteresis error caused by friction at the non-driven end of the bridge. The bridge may have a single drive and/or a single scale. The methods, systems, and apparatuses compensate for errors in the x-direction and/or errors in the y-direction caused by rotation of the bridge. Some embodiments compensate for hysteresis errors in the x-direction caused by a vertically-movable ram.

Abstract: A game apparatus obtains data from an input device including at least a gyroscope, and calculates a two-dimensional coordinate point corresponding to the data. The game apparatus includes orientation calculation means and coordinate calculation means. The orientation calculation means calculates an orientation of the input device in accordance with an angular rate detected by the gyroscope. The coordinate calculation means calculates the two-dimensional coordinate point, wherein the two-dimensional coordinate point represents coordinates of an intersection R between a line segment continuing from a vector VZ representing the orientation of the input device within a predetermined space and a predetermined plane within the predetermined space.

Abstract: A calibration information calculation unit (540) calculates a plurality of candidates of first coordinate transformation information using a plurality of candidates of second coordinate transformation information, a sensor measured value, and the position and orientation of a video camera (100) on the world coordinate system. The calibration information calculation unit (540) then calculates a piece of first coordinate transformation information by combining the plurality of calculated candidates. Then, the calibration information calculation unit (540) makes iterative calculations for correcting calibration information using a candidate of the second coordinate transformation information and the first coordinate transformation information as initial values of the calibration information.

Abstract: A position measurement apparatus includes a movable stage structure, a measurement unit using a laser to measure a moved position of the stage and to output a corresponding measured value, a first filter configured to attenuate a first component of a certain frequency region of the measured value outputted by the measurement unit, a second filter connected in parallel with the first filter configured to attenuate a second component other than the certain frequency region of the measured value outputted by the measurement unit, a third filter connected in series to the second filter with the series connection of the second and third filters connected in parallel with the first filter, configured to attenuate the first component of the certain frequency region of the measured value outputted by the measurement unit, and a processing unit configured to combine an output of the first filter and an output of the series connection of the second and third filters and to thereby output a first combined value.

Abstract: A system and method for tool enhancements are provided which allow users to utilize video tools in a controlled manner. The video tools balance a minimal amount of cursor positioning and “mouse clicks” against a level of video tool “customization” control desired by a user when applying the video tools. Tool construction methods using multiple mouse clicks are provided as an alternative to using drag-and-draw and one-click tools. Multi-click-plus tools give more specific information and provide a precise way to rapidly create customized tools.

Abstract: An apparatus including: an optical sensor comprising an optical transmitter and an optical receiver; and a calibration system configured to change calibration of the sensor when a measurement taken at the optical receiver, while the optical transmitter is on and the apparatus is in use, passes a test.

Abstract: A coordinate measuring machine includes: a probe provided with a measurement piece; a moving mechanism that effects a scanning movement of the probe; and a host computer for controlling the moving mechanism. The host computer includes a displacement acquiring unit for acquiring a displacement of the moving mechanism and a measurement value calculating unit for calculating a measurement value. The measurement value calculating unit includes a correction-amount calculating unit for calculating a correction amount for correcting a position error of the measurement piece and a correcting unit for correcting the position error of the measurement piece based on the displacement of the moving mechanism and the correction amount.

Abstract: The disclosure relates to a signal processing method for multi aperture sun sensor comprising the following steps: reading the information of sunspots in a row from a centroid coordinate memory, judging the absence of sunspots in that row, identifying the row and column index of the sunspots in the complete row, selecting the corresponding calibration parameter based on the row and column index, calculating attitude with the attitude calculation module the corresponding to identified sunspots, averaging the accumulated attitude of all sunspots and outputting the final attitude. At the same time, a signal processing device for multi aperture sun sensor is also presented. It is comprised of a sunspot absence judgment and an identification module and an attitude calculation module. The disclosure implements the integration of sun sensors without additional image processor or attitude processor, reduces field programmable gate array resource and improves the reliability of sun sensors.

Abstract: A measurement point is approached with a probe head arranged on a displacement mechanism having at least two supports. An actual difference value between the displacement positions of a first and a second support is determined. A static difference value representing is provided and subtracted from the actual difference, in order to obtain a dynamic difference value representing a static difference between the first and the second displacement positions is subtracted from the actual difference value in order to obtain a dynamic difference value. The space coordinate of the measurement point is determined as a function of the dynamic difference value.

Abstract: A position detecting device for a motor includes a resolver, amplifiers and a microcomputer. The microcomputer corrects an amplified sine wave signal to have the same amplitude in both positive and negative polarities, and corrects an amplified cosine wave signal to have the same amplitude in both positive and negative polarities. The microcomputer further corrects the corrected sine wave signal or the corrected cosine wave signal to have the same amplitude therebetween. The rotation position is determined accurately based on the sine wave signal and the cosine wave signal of the same amplitude, even if the amplifiers have different operation characteristics.

Abstract: For determining a space coordinate of a measurement point on a measuring object, the measurement point is approached with a probe head arranged on a displacement mechanism having at least two supports movable parallel to one another. Each support is moved by its own drive. The space coordinate of the measurement point is determined as a function of the respective displacement position of the supports. The two drives are controlled by a common regulator.

Abstract: The present invention relates to a method for determining the coordinates of an arbitrarily shaped pattern in a deflector system. The method basically comprises the steps of: moving the pattern in a first direction (X), calculating the position of the edge of the pattern by counting the number of micro sweeps, performed in a perpendicular direction (Y), until the edge is detected, determining a correction function for the surface reflecting variations in a third direction (Z) perpendicular to both the first (X) and the second (Y) directions, and determining the coordinates by relating the number of counted micro sweeps to the speed of the movement of the pattern using the correction function to compensate for variations in the third direction. The invention also relates to software implementing the method.

Abstract: A method for determining a location and characterization of an object using a magnetic gradient tensor measurement of the object is provided. The method includes determining an object magnetic field candidate predicted from one of an object measured magnetic field gradient and an assumed object magnetic moment magnitude, and determining an object vector location and an object vector magnetic moment by combining the object magnetic field candidate with an object measured magnetic field.

Abstract: A positioning device includes moving means (2) for relatively moving a positioning object (21) and length measuring means (8) for measuring the distance to the positioning object (21) in non-contact manner and outputting a detection signal if the positioning object (21) is detected only in a length measuring area within a predetermined range from any detection position, shaft control means for stopping the moving means (2) by detecting the detection signal from the length measuring means (8) and automatically correcting for an overshoot amount between the stop position and any detection position, when the moving means (2) relatively moves the positioning object (21) and the length measuring means (8), and positioning control means (11) for storing the coordinate value after the automatic correction by the shaft control means and performing the positioning based on the reference coordinate value.

Abstract: A probe apparatus includes a first stage, a second stage, a third stage and an image pickup. A Z position measuring unit measures a Z direction position of the mounting table and has a Z scale extending in the Z direction and a reading unit for reading the Z scale. A computation unit obtains a calculated contact position between the probes and the electrode pads of the substrate to be inspected based on images picked up by the image pickup with respect to a coordinate position on coordinates of a driving system which includes a Z direction position and X and Y direction positions measured by a measuring unit for measuring X and Y direction positions of the mounting table. A correcting unit corrects the Z direction position of the contact position based on the change amount thereof for a next contact operation.

Abstract: The present invention provides a surveying instrument, which comprises rotating units (3) and (4) operated rotatably, supporting units (6) and (3) to support the rotating units, a reflection mirror portion provided on one of the supporting unit or the rotating unit, tilt sensors (15) and (24) arranged on the other of the supporting unit and the rotating unit and for projecting a detecting light (36) and for detecting a relative tilting of reflection surface of said reflection mirror portion with respect to said supporting unit by receiving said detecting light reflected by the reflection mirror portion, and a control unit (26) for calculating an unsteadiness of rotation of the rotating unit based on a signal from the tilt sensor.

Abstract: A method using drive test data for propagation model calibration includes: step 1, obtaining original drive test data; step 2, selecting the data from the drive test data according to predefined conditions as effective drive test data; and step 3, extracting the effective drive test data to form a data file used for propagation model calibration. An apparatus using drive test data for propagation model calibration includes: a drive test data obtaining module, configured to obtain the drive test data in the regions to be calibrated; an effective drive test data generation module, configured to generate effective drive test data from the drive test data according to predefined conditions; and a data file generation module, configured to extract the effective drive test data to form a data file used for propagation model calibration. The present invention utilizes drive test data of existing networks to largely decrease the CW test work and reduce the network building cost.

Abstract: A single-scale, single-drive coordinate measuring machine that compensates for hysteresis error caused by friction at the non-driven end of the bridge. The coordinate measuring machine is calibrated to estimate hysteresis effects at one or more distances from the scale. Measurements of workpieces are adjusted based on the calibration data and the distances of the carriage from the scale at the point of the measurements. The scale and the drive system may be positioned on opposite guideways.

Abstract: A system and method are provided for a pixel module to determine its location in a large scale LED display. The system and method determine the pixel module's location based upon the data received by the module and the identity of the module's port via which the data was received.

Abstract: A position-measuring system is for measuring the position of an object, movable in several degrees of freedom, relative to a stationary object. The position-measuring system includes at least one measuring graduation that is joined to one of the objects, as well as a plurality of scanning units which are joined to the other object and which generate raw position signals based on the optical scanning of the measuring graduation. Moreover, a multiplexer unit is provided, the raw position signals generated by the scanning units being supplied to the multiplexer unit, and from there, the raw position signals of the various scanning units being transmitted in time multiplex operation to a downstream sequential electronics, without converting the raw position signals into position values beforehand.

Abstract: The invention relates to a method for determining the co-ordinates of a workpiece (9). According to said method: a first co-ordinate system, which has a fixed position in relation to the workpiece (9), is defined; first co-ordinates of the workpiece (9) are measured using a first co-ordinate measuring device (3); second co-ordinates of the workpiece (9) are measured using a second co-ordinate measuring device (5); and a common set of co-ordinates is generated from the first co-ordinates and the second co-ordinates in the first co-ordinate system or in a second co-ordinate system, which has a fixed position in relation to the workpiece (9). The method can be used in particular to determine co-ordinates of a plurality of workpieces (9) during and/or after the production and/or processing of the workpieces (9).

Abstract: A measuring instrument comprising a stylus displaced following a work, the instrument further comprises a corrector for correcting a displacement in the translation axis direction value according to a height detection axis direction value of the stylus position in a plane specified by the height detection axis and the translation axis, the corrector comprising a calibration measuring device that obtains the calibration measurement data including the displacement information of the translation axis direction value corresponding to the height detection axis direction value of the stylus by moving the stylus; a correction parameter setting device that determines a correction parameter best suited for correcting the measurement error due to the vertical movement error of the stylus based on the displacement information of the stylus; and a measurement data correcting device that corrects a measurement data by using the correction parameter.

Abstract: A method and system for detecting drift in calibrated tracking systems used to locate features with respect to one or more coordinate systems allows medical devices to be accurately tracked within a reference coordinate system, and facilitates detection and compensation for changes in the orientation of the tracking system with respect to the coordinate system over time.

Abstract: A method is disclosed whereby a laser-based spherical coordinate measurement system is dynamically calibrated. A mechanical oscillator, such as, but not limited to, a Foucault pendulum is used to generate periodic motions which can be fitted to Fourier series models. The residuals between the experimental measurements and the model can provide information which can be used to calibrate the instrument. The calibration information is used to augment the ASME B89.4.19-2006 standard to improve sensitivity to cyclic errors and include the servo systems.

Abstract: A method of measuring an artifact using a machine on which a measuring probe is mounted. The method has the following steps: determining the approximate position of one or more points on the surface of the artifact; using this approximate position to drive at least one of the probe and artifact to one or more desired relative positions of the probe and the surface and taking one or more surface measurements of said point on the surface of the artifact at said location, wherein there is no relative movement between the probe and the artifact whilst the one or more surface measurements are taken; and using data from the measurements to determine a position of the one or more points on the surface in which dynamic error is substantially reduced.

Abstract: A dimensional measurement probe (10) is mounted in a machine tool (48), which reorientates the probe about at least one axis A. Strain gauges (34) sense when a stylus (20) of the probe contacts a workpiece (50), to produce a trigger signal. False trigger signals may be produced when the probe is reorientated. To overcome this, the reorientation is detected by monitoring changes in the fluctuations of the strain gauge outputs, caused by vibrations of the stylus.

Abstract: A portable coordinate measurement machine for measuring the position of an object in a selected volume comprises includes an a positionable articulated arm having a plurality of jointed arm segments. The arm includes a measurement probe having an integrated line laser scanner mounted thereon. The laser may be a fiber coupled laser. Wireless data transfer and communication capability for the CMM is also possible.

Abstract: A light source emits light toward a semiconductor wafer, and a light receiving sensor detects light passing a peripheral edge of the semiconductor wafer. Each coordinates of the peripheral edge of the semiconductor wafer is obtained from a result of the detection. Further, a center of the semiconductor wafer is obtained from a group of the coordinates. Then, an illumination device emits light toward the peripheral edge of the semiconductor wafer and an optical camera detects light reflected from the peripheral edge of the semiconductor wafer. A position of a “V”-shaped notch formed on the peripheral edge of the semiconductor wafer is obtained from a result of the detection. A handling position of the semiconductor wafer is determined based on the center of the semiconductor wafer and the position of the “V”-shaped notch.

Abstract: A modular calibration method for a CMM, comprising preliminary calibration steps of several components prior to its mounting. The preliminary calibration steps yield specific mapping information for each calibrated component, which are then stored into map files generated and associated to the calibrated components. A final alignment takes place after once the CMM is mounted, which processes mapping information gathered during the preliminary calibration steps.

Abstract: A means and a method for determining the spatial position of at least one moving element (9, 20) of a coordinate measuring machine (1) are disclosed. At least one laser interferometer (24) directs a measurement beam (23) to the moving element (9, 20). At least one laser interferometer directs a further measurement beam to the moving element to determine a rotation of the moving element (9, 20) around an X-coordinate direction or around a Y-coordinate direction or around a Z-coordinate direction.

Abstract: A method for correcting the measuring errors caused by the lens distortion of an objective in a coordinate measuring machine is disclosed. For a plurality of different types of structures, the lens distortion caused by an objective is determined in an image field of the objective. The position of a type of structure is determined in the image field of the objective by a measuring window. The correction of the lens distortion required for the type of structure to be measured is retrieved from the database as a function of the type of structure to be measured.

Abstract: A method for planning the trajectory of an apparatus, such as an articulating probe head, mounted on a coordinate positioning apparatus, such as a CMM. It is determined whether for a given trajectory, the angular velocity or acceleration of the apparatus about a rotational axis of the apparatus will exceed a predetermined threshold. If so, parameters are adjusted so that the angular velocity or acceleration do not exceed the threshold.

Abstract: A roundness measuring device obtains an eccentric position of a measured object with respect to a rotation axis in measuring roundness of the measured object by rotating and driving the measured object. The roundness measuring device includes: a measurement acquisition unit obtaining, as measurements, rotation angles of the measured object and distances from the rotation axis to a surface of the measured object, the distance corresponding to the rotating angle; and an eccentricity calculation unit setting a circular correction circle with its center position provided as variable parameters, calculating the center position of the correction circle that minimizes sum of squares of distances between each of the measurements and the correction circle, in a direction from each of the measurements toward the center position of the correction circle, and determining the center position of the correction circle as the eccentric position.

Abstract: A method and a coordinate measuring machine (1) are provided, wherein the non-linearities of an interferometer (24) can be corrected. A measuring stage (20) traversable in a plane (25a) is provided for measurement. The substrate (2) is placed in a measuring stage (20); wherein the position of the measuring stage (20) along each of the motion axes is determined by at least one interferometer (24) in each case. A computer (16) is provided for compensating the non-linearity inherent in each of the interferometers (24), wherein the position of the measuring stage (20) to be determined by the interferometers (24) is arranged along a trajectory (52, 60, 67) of the measuring stage (20), which is composed at least partially of components of the axes.

Abstract: A surface texture measuring instrument includes: a movement-estimating unit for estimating a movement condition of a drive mechanism based on a scanning vector command issued by a scanning vector commander to calculate an estimated operation state quantity; and a correction-calculating unit for correcting a detection value of a drive sensor in accordance with the estimated operation state quantity calculated by the movement-estimating unit. The movement-estimating unit includes: a nominal-model setting unit in which a nominal model representing signal transfer function of the scanning vector command from the issuance of the scanning vector command to a reflection on a movement position of the scanning probe is stored.

Abstract: A substrate and mask aligning apparatus includes a controlling portion 70 for calculating moving data that are applied to eliminate a difference between a present superposed state of the through holes 52 of the mask 50, which comes into contact with the substrate 20 that is loaded on the stage 30, on the pads 22 of the substrate 20 and a scheduled superposed state on the basis of image data from the shooting section 40, 42 and then executing repeatedly an operation to move the stage 30 on the basis of the calculated moving data of the stage.