Abstract: A method of calibrating a surface measurement instrument includes rotating a work piece having an undulating surface on a turntable of a metrological apparatus; measuring the surface of the work piece at a plurality of rotational positions; analyzing the results of the measurement to determine parameters describing an error causing characteristic of the metrological apparatus; and using the determined parameters to correct measurement data for the error causing characteristic of the metrological apparatus.

Abstract: Method and system for x-ray detection of flaws in containers or their contents wherein containers are conveyed on a circular path around a central axis upon which an x-ray source is situated below the plane of the base of the containers. The x-ray source emits x-ray radiation obliquely upwards through the containers to a plurality of imaging x-ray detectors. Analysis of the images provided by these x-ray detectors determines the presence of a flaw in a container or its contents and is used to command a rejection mechanism to reject the container in question.

Abstract: A method of preparing a sample for matrix assisted laser desorption ionization mass spectrometry imaging analysis by a two-step process. Firstly, a MALDI matrix is dusted on to the sample followed by a spray of a suitable solvent onto the dusted sample. The present method has been successfully applied to the detection and mapping of several analyte classes in latent fingermarks. Using the present two-step method, fingermark enhancement, recovery and analysis from different substrate surfaces is now possible enabling visual and chemical information to be obtained simultaneously via remote testing.

Abstract: A method for measuring the cutting force on a fiber. The method includes the steps of: providing a blade having an edge; providing a fiber mount for holding the fiber; providing at least one sensor connected to the fiber mount; moving the blade toward the fiber and cutting the fiber; and measuring the cutting force on the fiber with the at least one sensor.

Abstract: An apparatus comprises an inspection vehicle, a sensor system, a positioning system, a controller, and a support system. The inspection vehicle is configured to move on a surface of an object. The sensor system is associated with the inspection vehicle and is configured to generate information about the object when the inspection vehicle is on the surface of the object. The positioning system is configured to determine a location of the inspection vehicle on the object. The controller is configured to control movement of the inspection vehicle using the positioning system and control operation of the sensor system. The support system is connected to the inspection vehicle and is configured to support the inspection vehicle in response to an undesired release of the inspection vehicle from the surface of the object.

Abstract: A surface texture measuring method includes: moving a stylus toward an origin point; and, when the stylus reaches the origin point, braking the stylus to be stopped after overrunning the origin point waiting for a measurement start command (approach section setting operation); bringing the stopped stylus into contact with a target portion of the workpiece (workpiece setting operation); moving the stopped stylus in a measurement direction reverse to the overrunning (approach operation); and, when the stylus passes the origin point in the approach operation, continuing the movement of the stylus while acquiring data detected by the detector (measurement operation).

Abstract: A surface texture measurement device capable of resolving errors for each entire display range, a controller for the surface texture measurement device, and a method for controlling the surface texture measurement device that includes selecting any one of the display ranges as a reference range and defining a calibration measurement value for each display range; sequentially inputting the calibration measurement values in place of the measurement values to the range amplifier corresponding to the reference range to obtain a reference display value rDATAi; inputting the calibration measurement values to the range amplifiers corresponding to each display range, then obtaining an AD-converted value ADi and a display value DATAi; computing a gain error rate ki=rDATAi/DATAi, a display resolution DIVi=DATAi/ADi, and a corrected display resolution cDIVi=DIVi×ki; and displaying the corrected display value cDIVi=DIVi×ki.

Abstract: An embodiment is a method for forming a microelectromechanical system (MEMS) device. The method comprises forming a MEMS structure over a first substrate, wherein the MEMS structures comprises a movable element; forming a bonding structure over the first substrate; and forming a support structure over the first substrate, wherein the support structure protrudes from the bonding structure. The method further comprises bonding the MEMS structure to a second substrate; and forming a through substrate via (TSV) on a backside of the second substrate, wherein the overlying TSV is aligned with the bonding structure and the support structure.

Abstract: A process for producing a reference body (10) provided with a slot (17) as a test crack for the nondestructive testing of materials can be used flexibly and includes the following steps: a) a reference body (10) and a mask (11) provided with a slot pattern (12) are provided; b) the mask (11) is applied to the reference body (10); c) material is removed from the reference body (10) through the mask (11) with an abrasive water jet (16); and d) the mask (11) is taken off the reference body (10).

Abstract: A testing device and method for testing scissors are disclosed. The testing device includes a mount device. The mount device includes a first mount feature for mounting a first grip end of the scissors thereon and a second mount feature movable with respect to the first mount feature for mounting a second grip end of the scissors thereon. The testing device additionally includes a feed device positioned to provide a test media between a first blade and a second blade of the scissors. The testing device further includes a position sensor associated with the mount device for measuring movement of the second grip end, and a load sensor associated with the mount device for measuring a load required for the scissors to cut the test media.

Abstract: A gear measuring method allows multi-point continuous measurement using a touch probe and is capable of reducing measuring time compared with known methods. For example, a base action for moving a sensing element of a touch probe along an ideal tooth form line of a workpiece (gear; W) or a tooth form line determined by calculation by controlling the movement of the sensing element and the rotation of the workpiece (W) and, in addition, an oscillation action for receiving first signals (ON signals or OFF signals) from the touch probe by bringing the sensing element into contact with the tooth surface of the workpiece during the base action and subsequently for receiving second signals (OFF signals or ON signals) from the touch probe by moving the touch probe in a direction along which the sensing element is separated from the tooth surface of the workpiece are continuously performed.

Abstract: A measurement system has a surface sensing device mounted on an articulating probe head, which in turn is mounted on a coordinate positioning apparatus. The surface sensing device is moved relative to a surface by driving at least one of the coordinate positioning apparatus and probe head in at least one axis to scan the surface. The surface sensing device measures its distance from the surface and the probe head is driven to rotate the surface sensing device about at least one axis in order to control the relative position of the surface sensing device from the surface to within a predetermined range in real time.

Abstract: A substrate mimicking intercellular lipids in stratum corneum consisting of a substrate and a lipid membrane formed on the substrate, wherein the lipid membrane is formed from ceramide, palmitic acid and cholesterol, and the ceramide, palmitic acid and cholesterol are present at a mass ratio of 20-70%:10-60%:20-40% (ceramide:palmitic acid:cholesterol).

Abstract: An edge sharpness measurement apparatus includes a clamp for securing a test medium against a frictional member, and an engagement mechanism for a normal force, such that the normal force directs the test medium against the frictional member with a force based on operational conditions of the test medium. A further engagement mechanism is for a tangential force, in which the engagement mechanism is adapted to increase the tangential force to identify a tangential force sufficient to dispose the frictional member across the test medium. A pivot defines an angle of application of the tangential force relative to the normal force, such that disposing the frictional member across the test medium defines a point of overcoming frictional forces between the test medium and the frictional member. A measurement device, such as a gauge or range on a spring, measures the tangential force sufficient to dispose the frictional member.

Abstract: A substrate for a magnetic recording medium having a disc shape with a central hole is provided in which the surface roughness of the principal surface of the substrate is 1 angstrom or less in terms of root mean square roughness (Rq) when a space period (L) of an undulation in the circumferential direction is in the range 10 to 1,000 ?m, and in which when a component in the vertical axis direction of a line segment Z connecting a point A with the space period (L) of 10 ?m and a point B with the space period (L) of 1,000 ?m in a curve S marked on a double logarithmic graph which is obtained by analyzing the surface roughness using a spectrum and in which the horizontal axis is set to the space period (L) (?m) and the vertical axis is set to the power spectrum density (PSD) (k·angstrom2·?m) (where k is a constant) is defined as H and a displacement at which the component in the vertical axis direction of the curve S is the maximum with respect to the line segment Z is defined as ?H, a value (P) expressed by (?

Abstract: Intrinsically calibrating friction mensuration device has a drive unit with controllable motive member, configured to receive a controllable propulsion force, and to apply tractive force to a test piece on a surface. A force engine couples to the motive member, and applies the controllable propulsion force. The device includes a controller imposing a propulsion control signal actuating the force engine to produce the propulsion force. A force sensor is between the drive unit and the test piece, producing a force signal responsive to a sensed force between the drive unit and the test piece. The drive unit can self-propelled or stationary. A method includes applying an increasing tractive force to a test piece at rest; measuring the tractive force; identifying the maximum tractive force applied at incipient motion; identifying the transition between the resting test piece and incipient motion; determining the SCOF; continuing motion; and determining the DCOF.

Abstract: A surface texture measuring apparatus includes a stylus displacement detector having a measurement arm which is able to swing, a pair of styli provided at a tip of the measurement arm, and a detection unit configured to detect swing amounts of the measurement arm, a stage configured to mount the subject of measurement thereon, and a relative movement mechanism configured to cause a relative movement between the detector and the stage. The apparatus includes a posture switching mechanism configured to switch a posture of the measurement arm between a posture in which the measurement arm is urged in one swing direction and a posture in which the measurement arm is urged in the other swing direction, and a speed control mechanism configured to control a switching speed of posture switching of the measurement arm to a preset speed when the posture of the measurement arm is switched by the posture switching mechanism.

Abstract: The present invention provides a sensor system for measuring an elastic modulus and a shear modulus and a method for using the sensor system to evaluate a tissue by determining the presence of and/or characterizing abnormal growths. The method involves applying a set of forces of different magnitudes to one or more locations of tissue, detecting the corresponding displacements due to said applied forces, determining the forces acting on those locations of tissue which are a combination of forces from the applied voltages and the countering forces from tissue deformation, obtaining the elastic modulus and/or shear modulus for a plurality of locations, and determining abnormal growth invasiveness, malignancy or the presence of a tumor from said elastic and/or shear moduli.

Abstract: A method for obtaining an edge prep profile of a cutting tool with a point sensor. The method includes: (a) scanning edge points of the cutting tool, including a target edge point on a target edge, with the point sensor, by rotating the cutting tool around its axis, to generate a first point cloud; (b) repositioning the point sensor and cutting tool relative to each other based on the location and orientation information of the target edge point, such that the sensor focus is at a region of interest containing the target edge point; and (c) scanning the region of interest using the point sensor to generate a second point cloud. The first point cloud includes location and orientation information of the target edge point. The second point cloud includes information for edge profile analysis.

Abstract: A method of operating a particle beam microscopy. A particle beam is scanned across a scanning region of a surface of the object. Particles are detected by a detector system for a plurality of impingement locations of the primary beam within the scanning region. A detector system generates detector signals which represent for each of the impingement locations an intensity of the detected particles. Material data of the interaction regions are calculated depending on the detector signals and depending on topography data, which represent a topography of the object surface in the scanning region.

Abstract: A method for operating a scanning probe microscope at elevated scan frequencies has a characterization stage of sweeping a plurality of excitation frequencies of the vertical displacement of the scanning element; measuring the value attained by the reading parameter at the excitation frequencies; and identifying plateau regions of the response spectrum of the reading parameter. The reading parameter variation is limited within a predetermined range over a predefined frequency interval, thereby defining corresponding fast scanning frequency windows in which the microscope assembly is sufficiently stable to yield a lateral resolution comparable to the one obtained during slow measurements. The measurement stage includes driving the scanning element along at least a scanning trajectory over the surface of the specimen at a frequency selected among the frequencies included in a fast scanning frequency window.

Abstract: Provided are a device and a method which determine a threshold value for detecting abnormality in a working path in which the cutting condition changes momentarily to thereby enable abnormality determination. Cutting force that becomes an abnormality determination value and threshold value information are previously calculated by cutting simulation, and a threshold value with which a comparison is to be made is determined from the position coordinates of a working machine which have been acquired during cutting and the measurement result of cutting force to thereby enable abnormality determination.

Abstract: An apparatus comprises an inspection vehicle, a sensor system, a positioning system, a controller, and a support system. The inspection vehicle is configured to move on a surface of an object. The sensor system is associated with the inspection vehicle and is configured to generate information about the object when the inspection vehicle is on the surface of the object. The positioning system is configured to determine a location of the inspection vehicle on the object. The controller is configured to control movement of the inspection vehicle using the positioning system and control operation of the sensor system. The support system is connected to the inspection vehicle and is configured to support the inspection vehicle in response to an undesired release of the inspection vehicle from the surface of the object.

Abstract: Intrinsically calibrating friction mensuration device has a drive unit with controllable motive member, configured to receive a controllable propulsion force, and to apply tractive force to a test piece on a surface. A force engine couples to the motive member, and applies the controllable propulsion force. The device includes a controller imposing a propulsion control signal actuating the force engine to produce the propulsion force. A force sensor is between the drive unit and the test piece, producing a force signal responsive to a sensed force between the drive unit and the test piece. The drive unit can self-propelled or stationary. A method includes applying an increasing tractive force to a test piece at rest; measuring the tractive force; identifying the maximum tractive force applied at incipient motion; identifying the transition between the resting test piece and incipient motion; determining the SCOF; continue motion and determine the DCOF.

Abstract: A method and system is provided to detect deformations on a sheet metal panel. The method includes swiping the sheet metal panel's surface through a screening material to screen the deformations present on the sheet metal panel's surface, thereby establishing screened deformations. Further, rubbing an area around the screened deformations through a stone material determines the size of the screened deformations. Finally, measuring the size of screened deformations according to a measuring rule establishes a nature of the screened deformation.

Abstract: Methods and apparatus are provided herein for time-resolved analysis of the effect of a perturbation (e.g., a light or voltage pulse) on a sample. By operating in the time domain, the provided method enables sub-microsecond time-resolved measurement of transient, or time-varying, forces acting on a cantilever.

Abstract: A surface texture measuring machine includes: a stage, a contact-type detector having a stylus, an image probe, a relative movement mechanism and a controller. The controller includes: a center position calculating unit that, when the image probe enters position data of at least three points on a circular contour of a circular concave portion or a circular convex portion of an object, approximates the entered position data to a circle to obtain a center position of the circle; and a stylus setting unit that, after calculating the center position, operates the relative movement mechanism to position the stylus of the contact-type detector at the center position.

Abstract: Systems and methods are disclosed that provide improved non-destructive testing of pavements and in particular non-destructive testing of pavements using rolling wheel deflectometer systems having more than four sensors. The additional sensors more accurately detect pavement deflections under load by compensating for the influence the load deflection basin can have on sensors beyond those at the wheel load. The sensors should be spaced with equal distances from the rolling weight and can have a distance between adjacent sensors that is greater than the equivalent thickness of the pavement being measured.

Abstract: The invention relates to a method for measuring and/or testing a geometric design parameter, particularly waviness, of a planar textile (10), comprising the steps: disposing the planar textile (10) in an intermediate space (26) between a support (20) and a flexible film (22), applying a differential pressure (?p) between the intermediate space (26) and the environment, so that the film (22) adapts to the planar textile (10), and capturing a surface profile (32) of the film (22).

Abstract: The present invention provides a sensor system for measuring an elastic modulus and a shear modulus and a method for using the sensor system to evaluate a tissue by determining the presence of and/or characterizing abnormal growths. The method involves applying a set of forces of different magnitudes to one or more locations of tissue, detecting the corresponding displacements due to said applied forces, determining the forces acting on those locations of tissue which are a combination of forces from the applied voltages and the countering forces from tissue deformation, obtaining the elastic modulus and/or shear modulus for a plurality of locations, and determining abnormal growth invasiveness, malignancy or the presence of a tumor from said elastic and/or shear moduli.

Abstract: A method and apparatus provide for simultaneously moving multiple semiconductor wafers in opposite directions while simultaneously performing processing operations on each of the wafers. The semiconductor wafers are orientated in coplanar fashion and are disposed on stages that simultaneously translate in opposite directions to produce a net system momentum of zero. The die of the respective semiconductor wafers are processed in the same spatial sequence with respect to a global alignment feature of the semiconductor wafer. A balance mass is not needed to counteract the motion of a stage because the opposite motions of the respective stages cancel each other.

Abstract: A system for evaluating cutting efficiency of root canal rotary instruments is provided. The system includes a root canal rotary instrument, a driving unit, a cutting object, a prestressing force providing unit and a feeding unit. The root canal rotary instrument is attached on the driving unit, and driven thereby. The cutting object is pressed by the prestressing force providing unit to contact the root canal rotary instrument. The feeding unit feeds the cutting object to the root canal rotary instrument, and the root canal rotary instrument cuts an uncut surface of the cutting object.

Abstract: Methods and apparatus relate to measuring corrosion rate. Flowing corrosive fluid contacts a metal coupon or object and results in an effluent stream. The effluent stream contains metal from the object due to reaction of constituents in the fluid with the metal. Analysis of the effluent stream measures concentration of the metal therein. Since the concentration of the metal in the effluent stream is indicative of mass loss from the object, calculations provide the corrosion rate utilizing weight of the metal that is eluted, surface area of the object and exposure time of the object with the corrosive fluid.

Abstract: A system for sulfide stress cracking testing comprises an enclosed testing chamber including a fluid bath comprising a liquid saturated with hydrogen sulfide gas. In addition, the system comprises a test fixture disposed in the testing chamber and at least partially submerged in the fluid bath. The test fixture includes a housing having an internal chamber in fluid communication with the fluid bath and a test assembly disposed in the internal chamber. The test assembly comprises a first upper support and a second upper support, a first lower support and a second lower support, and a first platen engaging each of the upper supports and adapted to transfer an applied vertical load to the upper supports. Further, the system comprises a test specimen mounted in the test assembly between the upper supports and the lower supports.

Abstract: A testing device and method for testing scissors are disclosed. The testing device includes a mount device. The mount device includes a first mount feature for mounting a first grip end of the scissors thereon and a second mount feature movable with respect to the first mount feature for mounting a second grip end of the scissors thereon. The testing device additionally includes a feed device positioned to provide a test media between a first blade and a second blade of the scissors. The testing device further includes a position sensor associated with the mount device for measuring movement of the second grip end, and a load sensor associated with the mount device for measuring a load required for the scissors to cut the test media.

Abstract: The present invention relates to a production method for producing a sensor film for measuring cracks of a material surface using the comparative vacuum measurement method. A gallery having a predetermined gallery course is milled along a surface of the sensor film using a milling apparatus. The sensor film comprises a plastic material.

Abstract: A device for oscillation excitation of a leaf spring, which is fastened on one side in an atomic force microscope (AFM) and comprises semiconductor material, which has no piezoelectric properties, a free end to which a tip is attached, which is brought into contact with a sample surface to be examined. The present invention has the leaf spring connected at least sectionally to a metal layer to form a Schottky contact, and an electrical voltage or field source is provided, which generates an electrical AC voltage a vicinity or area of the Schottky contact.

Abstract: An apparatus for measuring variations in the flatness of an Almen strip holding surface includes a gaging block having opposing parallel surfaces defining an aperture extending between said parallel surfaces and substantially conforming to the size of the holding surface. A plunger is mounted in a cross member which extends across the aperture and is moved along opposite sides thereof. A dial indicator responds to displacement of the aperture to permit detection of any variation in flatness as the plunger is moved over the holding surface and along and between the side and end edges thereof. Placement of the Almen strip holding screws is verified to be in tolerance by the gaging block in that the gaging block cannot be mounted on the holding surface if the distance between the openings is out of tolerance.

Abstract: The road surface inspection process includes acquiring, calculating, and determining. The acquiring includes acquiring a deterioration candidate position at which a deterioration candidate of a road surface is detected by a process of detecting an abnormality on the road surface of a road. The calculating includes calculating a frequency at which an acceleration outside an allowable range is measured at the deterioration candidate position by referring to an acceleration at a measurement position corresponding to the deterioration candidate position among the accelerations stored in a driving data storage. The determining includes determining, when the calculated frequency is equal to or greater than a predetermined threshold value, that the deterioration candidate position at which the frequency is calculated is a position at which the road surface is deteriorated.

Abstract: A fixture for holding a cutter for a vertical turret lathe may comprise a block with a blind hole. A cutter with an indenter on its distal end may be secured within the hole such that a portion of the indenter comprises a positive rake angle. A method for testing cutters may comprise securing a cutter on a fixture of a vertical turret lathe which has a cutting material positioned adjacent the cutter. The cutting material may be rotated around a rotational axis at a constant rotational velocity. The fixture may be urged laterally such that the cutter progressively moves towards a periphery of the cutting material. The rotational velocity may be decreased as the cutter moves laterally to maintain a relative constant linear velocity between the cutting material and the cutter.

Abstract: Surface texture measuring apparatus includes a measurement arm table storing mass of an entire measurement arm, an arm length from a supporting point to a stylus, and a horizontal and vertical barycenter of the measurement arm in a horizontal posture for each type of the measurement arm in which a second measurement arm having a different mass is attached; a measurement arm specifier; an inclination angle detector detecting an inclination angle of the detector; and a controller reading out from the measurement arm table the mass, the arm length, the horizontal barycenter, and the vertical barycenter for a specified measurement arm, calculating a difference between a measurement force of the measurement arm in the horizontal posture and a measurement force of the measurement arm in an inclined posture based on the read-out information and the inclination angle detected by the inclination angle detector, and adjusting a measurement force.

Abstract: An apparatus and associated method for topographically characterizing a workpiece. A scanning probe obtains topographical data from the workpiece. A processor controls the scanning probe to scan a reference surface of the workpiece to derive a first digital file and to scan a surface of interest that includes at least a portion of the reference surface to derive a second digital file. Correlation pattern recognition logic integrates the first and second digital files together to align the reference surface with the surface of interest.

Abstract: The invention is a novel method and apparatus for optimal placement of actuators responsible for shaping of elastically deformable structures into desired target shapes using sparse number of actuators such that the discrepancy between deformed surfaces and target shapes is minimized. The invention utilizes a computational algorithm for optimal placement of actuators using particle swarm optimization, a biologically inspired evolutionary optimization paradigm that searches for the minima (or maxima) of objective functions with possibly large number of parameters.

Abstract: An arrangement for detection of the sharpness of chopper knives that can be moved relative to a shear bar includes a sensor that detects the effective cutting forces directly or indirectly and an evaluation arrangement connected to the sensor. The evaluation arrangement integrates the measured values of the sensor over time in order to generate information concerning the sharpness of the chopper knives.

Abstract: A glide head with a slider body that has a leading edge, a trailing edge and an air bearing surface is disclosed. The glide head also has an array of thermal proximity sensing elements connected in a bridge circuit that are adjacent both the trailing edge and the air bearing surface, a heating element mounted to the glide body for elevating the temperature of the thermal proximity sensing elements in relation to the temperature of an inspected surface, and a controller coupled to the array of thermal proximity sensing elements. The controller receives signals from the thermal proximity sensing elements, and determines the existence of a surface variation in the inspected surface based upon differences in the signals received from the thermal proximity sensing elements.

Abstract: A surface texture measuring instrument includes: a measuring device that includes a detector for detecting surface texture of a workpiece and an X-axis movement mechanism for moving the detector in a measurement direction; an elevation inclination adjuster capable of adjusting an elevation position and an inclination angle of a table on which the measuring device is mounted; a stage on which the workpiece is mounted; and a controller that controls the measuring device and the elevation inclination adjuster. The controller includes: a measurement controller that controls the X-axis movement mechanism to conduct a preliminary measurement and main measurement of the workpiece; a computing unit that acquires a result of the preliminary measurement from the detector and obtains an inclination angle of the workpiece at which the workpiece is inclined to the measurement direction; and a positioning controller for adjusting the inclination angle of the table based on the obtained inclination angle.

Abstract: The present invention provides for an apparatus for testing a surface coating. An elongated tube having a first end and a second end is provided wherein said second end is open to a holding container. The first end of the elongated tube farther includes a funnel. A planar test panel is adapted to hold a variety of materials to be tested. Such materials include paint, coatings, tape, or other like materials. A separator is fluidly connected to the holding container via a first conduit. A vacuum is fluidly connected to a separator by means of a second conduit. A tester places a plurality of loose test pieces, such as metal nuts or small rocks, into the funnel and the loose test pieces fall through the elongated tube and onto the planar test panel. The loose test pieces then fall into the holding container.

Abstract: A cutting device for crop has a cutting tool which can be set into rotation, and a shear bar which can be displaced relative thereto, each of the two diametrically opposed ends of which is coupled to a control unit, thereby enabling the clearance position of the shear bar relative to the cutting tool to be changed, and a control device which activates the control units in order to change the clearance position of the shear bar, and to move the shear bar toward the cutting tool, the control device can be operated to activate the control units to each perform a working step in alternation, so that within this working step the particular activated control unit initially moves the end of the shear bar assigned thereto toward the cutting tool by a first adjusting distance, and then away from the cutting tool by a second adjusting distance, wherein the second adjusting distance is smaller than the first adjusting distance.

Abstract: An arrangement for quantifying a wafer bow. The arrangement is positioned within a plasma processing system is provided. The arrangement includes a support mechanism for holding a wafer. The arrangement also includes a first set of sensors, which is configured to collect a first set of measurement data for a plurality of data points on the wafer. The first set of measurement data indicates a minimum gap between the first set of sensors and the wafer. The first set of sensors is positioned in a first location, which is outside of a set of process modules of the plasma processing system.

Abstract: An apparatus for testing an edge of a workpiece for sharpness includes a body, a probe extending outwardly and pivotably mounted from the body, the probe is biased in a direction for placement against an edge of a workpiece with a predetermined force, a test head on a distal end of the probe for mounting test tape for physical contact with an edge as a test medium, a test point for mounting to the workpiece, and a continuity circuit mounted to the body in electrical communication with the test head and the test point for providing a predetermined electrical current between the test head and the test point through the workpiece when the test tape is cut sufficiently by the workpiece to allow the test head to touch the workpiece to form a complete circuit.