Surface And Cutting Edge Testing Patents (Class 73/104)
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Publication number: 20090025463Abstract: A measurement system has a surface sensing device mounted on an articulating probe head, which in turn is mounted on a coordinate positioning apparatus. The surface sensing device is moved relative to a surface by driving at least one of the coordinate positioning apparatus and probe head in at least one axis to scan the surface. The surface sensing device measures its distance from the surface and the probe head is driven to rotate the surface sensing device about at least one axis in order to control the relative position of the surface sensing device from the surface to within a predetermined range in real time.Type: ApplicationFiled: April 10, 2006Publication date: January 29, 2009Applicant: RENISHAW PLCInventors: Geoffrey McFarland, Kenneth Cheng Hoe Nai, Nicholas John Weston, Ian William McLean
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Patent number: 7481098Abstract: A method of determining a depth of intergranular attack (IGA) on a surface of a metal part includes applying a replicating material on a second surface of the part that is essentially perpendicular to and intersects with the surface of interest. The replicating material is used to create an inverted replica of the microstructure of the second surface. Lengths of the cracks replicated on the replicating material are measured in order to determine the depth of intergranular attack on the surface of the part. In some embodiments, a fixture device may be temporarily attached to the metal part to maintain an edge of the second surface.Type: GrantFiled: June 18, 2007Date of Patent: January 27, 2009Assignee: United Technologies CorporationInventors: John M. Robertson, Richard B. Ringler, Stephen M. Kurpaska
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Publication number: 20080308958Abstract: A method of determining a depth of intergranular attack (IGA) on a surface of a metal part includes applying a replicating material on a second surface of the part that is essentially perpendicular to and intersects with the surface of interest. The replicating material is used to create an inverted replica of the microstructure of the second surface. Lengths of the cracks replicated on the replicating material are measured in order to determine the depth of intergranular attack on the surface of the part. In some embodiments, a fixture device may be temporarily attached to the metal part to maintain an edge of the second surface.Type: ApplicationFiled: June 18, 2007Publication date: December 18, 2008Applicant: United Technologies CorporationInventors: John M. Robertson, Richard B. Ringler, Stephen M. Kurpaska
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Patent number: 7451637Abstract: A method of evaluating contact characteristics of an object having a roughness includes setting geometric shape data for the roughness; creating a roughness model and a structure model that comes in contact with the roughness, based on the geometric shape data set; making the roughness model and the structure model come in contact with each other; acquiring a physical amount occurring at least one of a contact region of the roughness model and a contact region of the structure model; and obtaining an evaluation value for evaluating a real contact state in the contact region between the roughness model and the structure model, from the physical amount acquired.Type: GrantFiled: July 5, 2005Date of Patent: November 18, 2008Assignee: The Yokohama Rubber Co., Ltd.Inventors: Masatoshi Kuwajima, Toshihiko Okano
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Publication number: 20080259480Abstract: A glide head that can be used to certify disks of hard disk drives. The glide head includes a heater that can change the temperature of a slider surface of the head and vary the head flying height. The slider surface may induce the negative pressure so that the glide head more accurately simulates a head used in a production disk drive. A piezoelectric transducer may be coupled to the glide head so that contact between the head and a disk may be sensed and recorded in a disk certification routine.Type: ApplicationFiled: April 17, 2007Publication date: October 23, 2008Applicant: Samsung Electronics Co., Ltd.Inventors: Hoa Pham, Vinod Sharma, Sang Lee
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Publication number: 20080229811Abstract: Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.Type: ApplicationFiled: March 20, 2007Publication date: September 25, 2008Applicant: KLA-Tencor Technologies CorporationInventors: Guoheng Zhao, Alexander Belyaev, Christian H. Wolters, Paul Andrew Doyle, Howard W. Dando, Mehdi Vaez-Iravani
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Patent number: 7423264Abstract: In one embodiment, an atomic force microscope comprises a frame, a beam coupled to the frame at a first end and a second end, a probe mounted to the beam, means for inducing relative motion between the beam and an underlying surface, and means for detecting a characteristic of the beam.Type: GrantFiled: September 8, 2006Date of Patent: September 9, 2008Assignee: KLA-Tencor Technologies CorporationInventors: Christopher F. Bevis, Marco Tortonese
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Publication number: 20080184785Abstract: Provided is an apparatus for automatically inspecting a road surface pavement condition, includes: a road surface photographing unit; a road surface rutting measuring unit; a flatness measuring unit; a data analysis and storage unit; a traveling noise measuring unit; and an auxiliary unit for supplying electric power. The automatic road surface pavement condition inspection apparatus is equipped in a vehicle and thus automatically inspects a road surface pavement condition and a state of surrounding circumstances of a road, when the vehicle runs along the road, to thereby make up and offer objective data that everyone can easily grasp and thus provide a road inspector with the objective data for maintenance and repair and post-control and pre-control of the road.Type: ApplicationFiled: January 17, 2008Publication date: August 7, 2008Inventor: Seong-Dong WEE
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Publication number: 20080173078Abstract: A method of inspecting a specimen under test may comprise the step of disposing melted thermoplastic media onto a surface under test of the specimen under test, maintaining a constant temperature of the specimen under test at or about room temperature wherein the temperature of the specimen under test is initially lower than the temperature of the melted thermoplastic media, hardening the melted thermoplastic media to produce a replica with imperfections molded into a mating surface of the replica, and inspecting the mating surface of the replica for unsatisfactory or satisfactory imperfections in the specimen under test.Type: ApplicationFiled: January 18, 2007Publication date: July 24, 2008Inventors: Robert J. Christ, Jerrell A. Nardiello, John M. Papazian, John Steven Madsen
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Publication number: 20080173068Abstract: The reliability test plate for appearance treatment is used to coat with predetermined paint or material. The reliability test plate at least includes an appearance simulation area for simulating at least partial appearance of an electronic product, and at least one test plane area. The appearance simulation area and the test plane area can be coated with the predetermined paint. Then, one reliability test item can be performed at the test plane area.Type: ApplicationFiled: January 11, 2008Publication date: July 24, 2008Applicant: ASUSTEK COMPUTER INC.Inventors: Chung-Ming Wang, Yuan Yu
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Patent number: 7392692Abstract: A surface scan measuring device, a surface scan measuring method, a surface scan measuring program and a recording medium storing such a program which can appropriately adjust the scanning speed, the sampling pitch and other measurement parameters according to the surface condition of a workpiece are provided. The surface scan measuring device includes a radius of curvature computing section (543) for computing the radius of curvature of the scanning point from the measurement data acquired during the ongoing scanning operation, a moving speed deciding section (544) for deciding the moving speed of the scanning probe according to the computed radius of curvature and a sampling pitch deciding section (546) for deciding the sampling pitch according to the computed radius of curvature.Type: GrantFiled: May 26, 2005Date of Patent: July 1, 2008Assignee: Mitutoyo CorporationInventor: Takashi Noda
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Publication number: 20080134771Abstract: The invention relates to a method of determining material properties of a contact formed between a measurement tip of a microscopic probe and a sample surface of a sample material. According to the method, a distance modulation is applied for modulating a distance between a support of the microscopic probe end the sample surface in a direction essentially normal to the sample surface and wherein a normal force signal indicative of a normal force is measured and demodulated. In the method it is proposed that the material properties be determined using measurement data comprised in the demodulated normal force signal and related to a (concave) buckling deformation of the microscopic probe relative to and away from the sample surface.Type: ApplicationFiled: February 10, 2006Publication date: June 12, 2008Applicant: Universität Karlsruhe (TH) Forrchungsuniversität Gegründet 1825Inventors: Thomas Schimmel, Matthias Muller
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Patent number: 7367242Abstract: An active micro-force sensor is provided for use on a micromanipulation device. The active micro-force sensor includes a cantilever structure having an actuator layer of piezoelectric material and a sensing layer of piezoelectric material bonded together. When an external force is exerted on the sensor, the sensor deforms and an applied force signal is recorded by the sensing layer. The applied force signal is then fed back to the actuating layer of the sensor via a servoed transfer function or servo controller, so that a counteracting deformation can be generated by the bending moment from the servoed actuating layer to quickly balance the deformation caused by the external micro-force.Type: GrantFiled: February 27, 2006Date of Patent: May 6, 2008Assignee: Board of Trustees operating Michigan State UniversityInventors: Ning Xi, Yantao Shen
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Patent number: 7363802Abstract: This invention relates to a measurement device for use in an electron microscope. The device comprises a sample holder, for holding a sample to be studied, and an indentation tip, being arranged in proximity of the sample holder, whereby an interaction between the sample and the tip is arranged to be measured. The measurement device comprises a force sensor being positioned in proximity with an interaction area of the sample and the tip and is arranged to directly measure a force resulting from interaction between the sample and the tip.Type: GrantFiled: May 12, 2004Date of Patent: April 29, 2008Assignee: Nanofactory Instruments ABInventors: Håkan Olin, Krister Svensson, Fredrik Althoff, Andrey Danilov
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Patent number: 7357017Abstract: A sensor has a die (with a working portion), a cap coupled with the die to at least partially cover the working portion, and a conductive pathway extending through the cap to the working portion. The pathway provides an electrical interface to the working portion.Type: GrantFiled: August 9, 2007Date of Patent: April 15, 2008Assignee: Analog Devices, Inc.Inventors: Lawrence E. Felton, Kieran P. Harney, Carl M. Roberts
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Patent number: 7350404Abstract: The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 are used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.Type: GrantFiled: August 27, 2004Date of Patent: April 1, 2008Assignee: Hitachi Kenki Fine Tech Co., Ltd.Inventors: Tooru Kurenuma, Hiroaki Yanagimoto, Hiroshi Kuroda, Yasushi Minomoto, Shigeru Miwa, Ken Murayama, Yukio Kenbou, Yuuichi Kunitomo, Takenori Hiroki, Yoshiyuki Nagano, Takafumi Morimoto
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Patent number: 7347084Abstract: The roughness measuring instrument (1) has a receiving device (2) for a feeder device (3), which serves to drag a roughness sensor (4) over a workpiece surface. The receiving device (2) carries a testing standard (24) with a testing face (25) within range of the roughness sensor (4). Preferably, the testing standard (24) is located in a pocket affixed to the receiving device (2), and this pocket is embodied in the wall of a bore for receiving the feeder device (3). Its testing face (25) is thus located inside the receiving device (2) in a way that is protected against becoming soiled and damaged yet is readily accessible.Type: GrantFiled: July 12, 2004Date of Patent: March 25, 2008Assignee: Carl Mahr Holding GmbHInventors: Jürgen Tölzer, Reinhard Willig
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Patent number: 7339383Abstract: A fixed electrode and a movable electrode used to drive each arm are disposed at a drive unit. As a voltage is applied between the fixed electrode and the movable the electrode, a coulomb force causes the movable the electrode to move, thereby driving the arms along the closing direction. The dimensions of a sample can be measured based upon the electrostatic capacity achieved between the electrodes when the sample becomes gripped by the arms.Type: GrantFiled: July 14, 2005Date of Patent: March 4, 2008Assignees: AOI Electronics Co., Ltd., SII Nano Technology Inc.Inventors: Takashi Konno, Hiroki Hayashi, Toshihide Tani, Masamichi Oi, Masanao Munekane, Koji Iwasaki
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Publication number: 20080041142Abstract: A device for testing planeness of an electrically conductive workpiece includes a platform for supporting the workpiece, a testing box movably fixed above the platform, an indicator, and a power supply. The testing box has a contact pin fixed on a bottom surface of the testing box. The contact pin is electrically wired in series with one electrode of the power supply. The platform is electrically wired in series with the other electrode of the power supply. The indicator is electrically wired in series with a testing circuit, which is made up of the power supply, the platform, and the contact pin. The contact pin is capable of movement above the platform at a distance which is equal to the sum of a thickness of the workpiece and a desired tolerance of the planeness, wherein if the planeness of the workpiece between the contact pin and the platform is out of tolerance, the testing circuit is closed, conducting power to the indicator, which will then indicate that the workpiece is ineligible.Type: ApplicationFiled: April 10, 2007Publication date: February 21, 2008Applicant: HON HAI PRECISION INDUSTRY CO., LTD.Inventors: BING-JUN ZHANG, LIAN-ZHONG GONG
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Patent number: 7325445Abstract: A surface roughness measuring apparatus (11) has a probe (27, 41) with a smooth surface region (31, 43) contoured to conform to a surface (33) the roughness of which is to be measured, and an aperture (25, 49) located generally centrally of the smooth surface region of the probe. Illustratively, the workpiece surface is a generally flat annular surface portion of a disk brake rotor (35). The test probe surface is juxtaposed with the workpiece surface and a fluid pressure modifying mechanism such as an air vacuum pump (15) and driving motor (17), which are coupled to the probe aperture, are energized to induce a fluid pressure differential between the aperture and peripheral portions of the surface region. A fluid parameter monitoring device such as air flow meter (23) or air pressure meter (19) measures a fluid response to the induced fluid pressure differential and the roughness is inferred from the measured fluid behavior.Type: GrantFiled: November 3, 2004Date of Patent: February 5, 2008Assignee: Robert Bosch GmbHInventor: James Darwin Bowman
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Patent number: 7322229Abstract: The invention provides a surface profile measurement device for use on rigid or semi-rigid substrates, such as floors. The device includes (a) a beam; (b) at least one beam support mounted on the beam; (c) a sensor assembly slidably connected to said beam and adapted for measuring the distance to the surface; and (d) a transducer assembly adapted for measuring the position of said sensor assembly along said beam.Type: GrantFiled: December 21, 2004Date of Patent: January 29, 2008Assignee: 3M Innovative Properties CompanyInventor: Justin W. Wilhelm
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Publication number: 20080016711Abstract: A stylus includes a stem with a first end and a second end, wherein the stem includes a contact element at the first end and can be arranged with the second end in a holder, and wherein the stylus includes an RFID chip. Also, a measurement device including the stylus and a method for taking account of data characterizing the stylus in a measurement device is provided.Type: ApplicationFiled: July 13, 2007Publication date: January 24, 2008Applicant: Saphirwerk Industrieprodukte AGInventor: Jean Baebler
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Patent number: 7317992Abstract: A method and tooling for inspecting a contour of an edge of a cutout formed in a disk, each cutout fixedly receiving a turbine blade. A first device receives the disk containing the cutouts. A second device has a sensor associated with the movement of an instrument, the first device securing the disk at a predetermined orientation to the sensor. The disk is secured to the first device, the instrument being directed along the cutout defining a path substantially parallel to a surface of the contour, the instrument remaining in physical contact with the surface of the contour. The sensor transmits a signal associated with instrument movement to an algorithm to convert the signal to two-dimensional positions along the tangent path along the surface of the contour. The acceptability of the edge contour of the cutout is determined by comparing the two-dimensional positions to predetermined ranges of values.Type: GrantFiled: June 16, 2004Date of Patent: January 8, 2008Assignee: General Electric CompanyInventors: Jason Brian Fascinato, Timothy M. Martinkovic
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Patent number: 7308822Abstract: Devices are presented which allow determination of unknown surface properties through the creation of a channel capillary, comprised in part of the subject surface or surfaces, and measurement of the capillary pressure created by a test fluid within the resultant channel. In various embodiments of the invention, a channel is created in a reference material which is bonded, through some mechanism, to the test surface in order to create a narrow capillary channel. In other embodiments of the invention, the capillary channel is created with test surfaces on either side of standoff strips which space the surfaces a precise distance from one another. Methods are presented for using these capillaries through immersion, along their length, in a bath of test fluid, such that the resultant fluid level provides a measure of capillary pressure.Type: GrantFiled: April 6, 2006Date of Patent: December 18, 2007Inventor: Stephen P. Sutton
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Publication number: 20070277600Abstract: Method and apparatus of easily controlling the Z-position of the probe used in a microprobe analyzer. The apparatus has: (A) a holder, (B) a reference body having a reference surface that is at the same height as a surface of a sample, the reference body being placed on or in the holder, (C) a probe-positioning device for bringing the probe into contact with the reference surface, (D) a controller for controlling motion of the probe-positioning device in the Z-direction, (E) position-measuring apparatus for measuring the Z-coordinate of the probe at which it is in contact with the reference surface, (F) a memory for storing a positional coordinate outputted by the position-measuring apparatus, and (G) probe contact detection apparatus for detecting that the probe is in contact with the reference surface.Type: ApplicationFiled: May 4, 2007Publication date: December 6, 2007Applicant: JEOL LTD.Inventors: Takeshi Nokuo, Jun Toyaba
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Compressive fatigue and energy test apparatus and method for testing clutch plate friction materials
Patent number: 7299701Abstract: The present invention presents a means for simultaneously testing the compressive strength and measuring the thermal energy dissipated by a given friction material during slip. The testing apparatus includes a rotatable flywheel that rotates a transmission reaction plate to simulate a typical reaction plate in a vehicle transmission assembly. A plurality of test samples selectively interact with the reaction plate while being elevated by hydraulically actuated cylinders. The thermal energy dissipated between the reaction plate and each test sample is measured for each test sample. A method for accomplishing the same for a bill-of-design reference is also included.Type: GrantFiled: September 23, 2005Date of Patent: November 27, 2007Assignee: General Motors CorporationInventors: Timothy J. Reinhart, Kerry W. Stadtfeld -
Publication number: 20070245814Abstract: Acceptability of a disk is determined by passing a detection signal from a head through a low-pass filter to obtain a detection signal component corresponding to side runout of the disk due to rotation of the disk and by comparing the maximum level of the signal with a predetermined reference value. Thus, it is possible to extract unacceptable disk which causes erroneous write and/or read or clash due to surface undulation of disk, even when the disk has no protrusion having bad influence upon the disk.Type: ApplicationFiled: April 9, 2007Publication date: October 25, 2007Inventors: Kenichi Shitara, Keiichi Takamura, Takao Ishii
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Patent number: 7278299Abstract: An indentation is formed by thrusting a probe of a scanning probe microscope for processing, which has a vertical surface or a vertical ridge and is harder than sample material, into sample for measuring the indentation. A high-fidelity AFM observation is performed on the shape of the formed indentation with a thin probe with high aspect ratio, the direction of the vertical surface or the vertical ridge is inspected, and the angle error ? is stored. By rotating a sample stage by an angle corresponding to the measured mounting angle error ? of the probe, the mounting angle error of the probe is corrected in advance.Type: GrantFiled: May 23, 2005Date of Patent: October 9, 2007Assignee: SII NanoTechnology Inc.Inventors: Osamu Takaoka, Masatoshi Yasutake, Shigeru Wakiyama, Naoya Watanabe
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Patent number: 7275424Abstract: A sensor has a die (with a working portion), a cap coupled with the die to at least partially cover the working portion, and a conductive pathway extending through the cap to the working portion. The pathway provides an electrical interface to the working portion.Type: GrantFiled: March 23, 2005Date of Patent: October 2, 2007Assignee: Analog Devices, Inc.Inventors: Lawrence E. Felton, Kieran P. Harncy, Carl M. Roberts
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Patent number: 7275423Abstract: An improved surface testing apparatus, such as a scratch test apparatus, allows accurate determination of the test speed, for example using one or more magnetic sensors. An example scratch test apparatus comprises an arm assembly, and an attached blade moving over the surface during the scratch test. A pair of spaced apart reed switches are provided proximate to the arm assembly, the reed switches being successively actuated by a magnetic portion of the arm asssembly as it moves during the scratch test.Type: GrantFiled: February 10, 2005Date of Patent: October 2, 2007Assignee: Toyota Technical Center USA, Inc.Inventors: David L. Hicks, Michael J. Niel
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Publication number: 20070204680Abstract: The present invention provides an apparatus adapted to engage a surface, such as a road or racetrack. The apparatus provides an output to an operator that is representative of the current tractive condition of the surface. The indication from the measuring device may be adapted to provide a quantifiable indication to a driver or crew related to recent changes in the tractive condition of the surface. The driver or crew may in turn configure aspects of a racing vehicle, driving methodology and performance expectations based on current and measurable surface conditions.Type: ApplicationFiled: March 6, 2007Publication date: September 6, 2007Inventor: Russell Craig Holt
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Patent number: 7257992Abstract: Automated apparatus and methods for testing surface finishes. In at least one preferred embodiment, automated apparatus capable of reliably, automatically testing surface finishes in industrial environments. In at least one further preferred embodiment, an automated, robotic surface finish tester programmable to measure surface finishes of a plurality of spatially separate surfaces and simultaneously and/or thereafter displaying, transmitting, processing, and/or storing data related thereto.Type: GrantFiled: July 6, 2005Date of Patent: August 21, 2007Assignee: Cim Systems, Inc.Inventor: David J Fox
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Patent number: 7250602Abstract: A probe device comprises a cantilever comprising a probe allocated to be opposed to a surface of a sample, means for feeding back a vibration amplitude value of the cantilever, thereby self-exciting and vibrating the cantilever at a predetermined frequency, means for applying a bias to the sample or the probe, and means for measuring a frequency shift caused by a charge-transfer force which acts between the cantilever and the sample.Type: GrantFiled: February 25, 2005Date of Patent: July 31, 2007Assignee: Osaka UniversityInventors: Takuya Matsumoto, Yasuhisa Naitoh, Tomoji Kawai
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Patent number: 7213447Abstract: An apparatus and method for detecting characteristics of a microelectronic substrate. The microelectronic substrate can have a first surface with first topographical features, such as roughness elements, and a second surface facing opposite from the first surface and having second topographical features, such as protruding conductive structures. In one embodiment, the apparatus can include a support member configured to carry the microelectronic substrate with a first portion of the first surface exposed and a second portion of the second surface exposed. The apparatus can further include a topographical feature detector positioned proximate to support member and aligned with the first portion of the first surface of the microelectronic substrate to detect characteristics, such as a roughness, of the first surface while the microelectronic substrate is carried by the support member.Type: GrantFiled: June 20, 2005Date of Patent: May 8, 2007Assignee: Micron Technology, Inc.Inventors: Chee Peng Neo, Cher Khng Victor Tan, Kian Seng Ho, Hock Chuan Tan
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Patent number: 7210339Abstract: Adhesive compositions and a method for selecting adhesive compositions are disclosed herein. Preferred adhesives generally have small domains and/or a homogeneous domain distribution. The method of selecting adhesives is based on size and distribution of the domains.Type: GrantFiled: March 8, 2004Date of Patent: May 1, 2007Assignee: ExxonMobil Chemical Patents Inc.Inventors: Kenneth Lewtas, Antonie Jan Bons, Johan Stuyver
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Patent number: 7174775Abstract: In a method of evaluating surface tension of a solid body surface, selection is made of at least three liquid samples having different surface tensions, and contact angles between the respective liquid samples and the solid body surface are measured. Thereby, a correlation between cosines (Y) of the contact angles and surface tensions (X) of the liquid samples is derived as a logarithmic function. Surface tension of the solid body surface is evaluated by the use of a value of X that is calculated by substituting 1 for Y in the correlation. When evaluated by the foregoing evaluation method, a magnetic disk has a surface where the value of X, when 1 is substituted for Y, is greater than 0 and no greater than 17 mN/m.Type: GrantFiled: February 7, 2005Date of Patent: February 13, 2007Assignees: Hoya Corporation, Hoya Magnetics Singapore Pte. Ltd.Inventor: Masafumi Ishiyama
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Patent number: 7170055Abstract: Nanotubes and nanotube-based devices are implemented in a variety of applications. According to an example embodiment of the present invention, nanotube tips are coated with metal. In some applications, the metal coating facilitates the resolution of nano-scale magnetic features, such as features smaller than about 20 nanometers. In another embodiment, such metal-coated nanotubes are implemented with magnetic force microscopy (MFM) applications and adapted for implementation with structures and arrangements exhibiting a high aspect ratio, facilitating quantitative analysis of MFM data.Type: GrantFiled: August 18, 2005Date of Patent: January 30, 2007Assignee: The Board of Trustees of the Leland Stanford Junior UniversityInventors: Zhifeng Deng, Erhan Yenilmez, Kathryn Moler
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Patent number: 7159452Abstract: A touch sensor 10 having a stylus 12 with a tip 12A making contact with a test piece W has an operational control structure including an oscillator 3 which oscillates the stylus 12 in the axial direction; a detecting circuit 4 which detects changes of oscillation of the stylus 12; an adjustor unit 5 which removes noise added to an output signal from the detecting circuit 4; a fine motion mechanism controller 6 which controls the operation of a fine motion mechanism 21 in such a manner that the change of the quantity of state of the detection signal is maintained constant; and a PZT driver 7 which operates the fine motion mechanism 21. The measuring force during surface configuration measurement can be adjusted by adjusting an alternating signal to be applied to the touch sensor or by reducing the noise added to the detection signal without making modifications to a shape or structure of the touch sensor.Type: GrantFiled: September 4, 2003Date of Patent: January 9, 2007Assignee: Mitutoyo CorporationInventor: Akinori Saito
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Patent number: 7162383Abstract: In a calibration method for a surface texture measuring instrument which measures a surface of a workpiece and includes an arm that is supported to be swingable around a base point thereof and is provided with a contact point at an end for scanning the workpiece surface, the calibration method includes a measurement step for measuring a calibration gauge of which cross section contains a part of a substantially perfect circle, an assignment step for assigning the detection results, which are obtained in the measurement step, in an evaluation formula based on a circle equation in which the center coordinates of the calibration gauge are (xc, zc) and the radius is “r”, and a calibration step for calibrating each parameter based on the evaluation formula obtained in the assignment step.Type: GrantFiled: April 28, 2004Date of Patent: January 9, 2007Assignee: Mitutoyo CorporationInventor: Isamu Takemura
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Patent number: 7155963Abstract: The present invention relates to a cleaning evaluation method for evaluating a surface cleanliness of a substrate which has been cleaned after being polished. This method includes preparing a dummy substrate having a metal film formed on a surface thereof and a monitor substrate on which a cleaning evaluation is performed, and polishing the dummy substrate. After polishing the dummy substrate, the monitor substrate is polished without dressing a polishing surface of a polishing table, the monitor substrate is cleaned, and the surface cleanliness of the monitor substrate which has been cleaned is evaluated.Type: GrantFiled: September 2, 2004Date of Patent: January 2, 2007Assignee: Ebara CorporationInventors: Yukiko Nishioka, Yoshikazu Ariga
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Patent number: 7152461Abstract: The invention relates to a method for determination of the depth of depressions which are formed in a mount substrate. According to the invention, an essentially uniform layer of a wetting agent is applied, which contains depressions, on a surface of the mount substrate, a time profile of the decrease in weight of the mount substrate is recorded, and the recorded time profile of the decrease in weight of the mount substrate is evaluated. The invention also relates to a measurement apparatus.Type: GrantFiled: February 17, 2005Date of Patent: December 26, 2006Assignee: Infineon Technologies AGInventors: Dietmar Temmler, Peter Weidner
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Patent number: 7138627Abstract: A nanotube probe assembled under real-time observation inside an electron microscope, the probe including a nanotube; a holder for holding the nanotube; and a fastening means for fastening the nanotube at a base end portion thereof to the holder; and the tip end portion of the nanotube protrudes from the holder. The method for manufacturing a nanotube probe includes the steps of setting up a nanotube and a holder inside an electron microscope; allowing a base end portion of the nanotube, with a tip end portion thereof protruding, to come into contact with the holder; and irradiating electron beam to the base end portion of the nanotube to form a carbon film at the base end portion of the nanotube, or forming a fused part at the base end portion of the nanotube, thus fastening the base end portion of the nanotube to the holder by the carbon film.Type: GrantFiled: June 29, 2005Date of Patent: November 21, 2006Assignees: Daiken Chemical Co., Ltd., Yoshikazu NakayamaInventors: Yoshikazu Nakayama, Akio Harada, Seiji Akita
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Patent number: 7127799Abstract: The present invention provides a method for assembling a head gimbal assembly useful in a hard disk drive and for testing such an assembly. In a method in accord with the present invention a head/slider is mounted to a circuited gimbal in an automated assembly machine. Following this step the head/slider circuited gimbal assembly will be subjected a dynamic electrical test with those head/slider circuited gimbal assemblies not passing being sorted from the lot. Following this step the head/slider circuited assembly will be attached to a suspension.Type: GrantFiled: February 11, 2002Date of Patent: October 31, 2006Assignee: Applied Kinetics, Inc.Inventors: Mark T. Girard, Ryan A. Jurgenson, Susan June Livermore, legal representative, David R. Swift, Joseph P. Tracy, Roger R. Livermore, deceased
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Patent number: 7124625Abstract: A glide-height disk-tester operates with the test disk rotating at a predetermined constant rotational speed and uses a glide head with an electrically-resistive heater and a thermally-responsive protrusion pad located on its trailing end. The linear velocity of the disk relative to the slider maintains the slider at its nominal fly height, which is typically higher than any expected asperity. With no current applied to the heater, the protrusion pad is generally flush with the air-bearing surface of the slider. Increasing levels of current are applied to the heater, which causes movement of the protrusion pad toward the disk surface. When the pad contacts an asperity, the current level applied at the instant of asperity contact is recorded. The applied current level can be correlated to the glide height from a previous calibration process using a calibration disk with known calibration bump heights.Type: GrantFiled: May 17, 2005Date of Patent: October 24, 2006Assignee: Hitachi Global Storage Technologies Netherlands B.V.Inventors: Masayuki Kurita, Remmelt Pit, Shozo Saegusa, Toshiya Shiramatsu, Mike Suk, Hideaki Tanaka
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Apparatus and method for visually identifying micro-forces with a palette of cantilever array blocks
Patent number: 7105358Abstract: An apparatus to measure micro-forces includes a cantilever palette with a set of cantilever array blocks. Each cantilever array block includes a set of cantilevers, with each cantilever including a set of cantilever fingers surrounded by a frame with frame fingers. The cantilever fingers and the frame fingers form a diffraction grating. Each cantilever array block is configured to be responsive to a predetermined micro-force, such that cantilevers of the cantilever array block deflect in the presence of the predetermined micro-force, which causes the diffraction grating to diffract light and thereby provide a visual indication of the presence of the predetermined micro-force.Type: GrantFiled: February 13, 2002Date of Patent: September 12, 2006Assignee: The Regents of the University of CaliforniaInventors: Arunaya Majumdar, Thomas Michael Perazzo, Minyao Mao, Ohmyoung Kwon, Yang Zhao, Guanghua Wu -
Patent number: 7089674Abstract: An angle measuring guide includes a housing having a plurality of monolithically formed walls and an annular opening formed within selected ones of the walls. The rear wall has a planar surface for being directly mated with the motorcycle. A transparent lens is monolithically formed with the housing and directly connected thereto. A buoyant member is situated within the opening and the cavity. A predetermined quantity of high viscous fluid is contained within the opening and the cavity such that the fluid freely flows therebetween and supports the buoyant member at a free and suspended position during operating conditions. The buoyant member includes a stationary weight member connected to a bottom portion thereof and thereby anchors the buoyant member while allowing the buoyant member to freely rotate about one or both of the x-axis and y-axis.Type: GrantFiled: April 29, 2005Date of Patent: August 15, 2006Inventor: Burton D. Hendon
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Patent number: 7060448Abstract: The present invention is a method for selectively removing objects from a surface utilizing a probe. The probe is scanned over the surface utilizing a greater and greater relative amount of force so that a certain number of the objects are removed from the surface. The force required to remove the objects from the surface can be calculated utilizing Hook's law and the spring constant of the probe. After removal of the objects that have a relatively weaker binding affinity with the surface, the remaining objects can be harvested, characterized, and subjected to further study.Type: GrantFiled: October 4, 2004Date of Patent: June 13, 2006Assignee: BioForce Nanosciences, Inc.Inventors: Eric Henderson, Curtis Mosher
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Patent number: 7024924Abstract: A method and arrangement for determination of the sharpness of chopping blades of a field chopper during chopping includes the steps of measuring, at least at two points in time, a characteristic parameter of the operating oscillation of a component of the chopping unit. Each such measurement obtains the oscillation fractions of at least two frequency bands of the measured signal or its peak, with the ratio between the two measurements being evaluated to generate a signal, when a certain deviation is determined between the initial measurement and the current measurement, which is indicative of the need to sharpen the chopping blades and the counterblade. The sharpening process can then be automatically initiated.Type: GrantFiled: July 24, 2003Date of Patent: April 11, 2006Assignee: Deere & CompanyInventors: André Heinrich, Matthias Grimsel, Gerd Bernhardt
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Patent number: 7022976Abstract: Various probe systems and probes are provided. In one aspect, a probe is provided that includes a base and a first member coupled to the base. The first member has a first tip for probing a circuit device. A first actuator is coupled to the first member for moving the first member relative to the base. Electrical and/or topographical probing is possible.Type: GrantFiled: April 2, 2003Date of Patent: April 4, 2006Assignee: Advanced Micro Devices, Inc.Inventors: Miguel Santana, Jr., Robert Powell
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Patent number: RE39803Abstract: A non-vibrating capacitance probe for use as a non-contact sensor for tribological wear on a component. The device detects surface charge through temporal variation in the work function of a material. A reference electrode senses changing contact potential difference over the component surface, owing to compositional variation on the surface. Temporal variation in the contact potential difference induces a current through an electrical connection. This current is amplified and converted to a voltage signal by an electronic circuit with an operational amplifier.Type: GrantFiled: May 1, 2001Date of Patent: September 4, 2007Assignee: Georgia Tech Research CorporationInventors: Steven Danyluk, Anatoly Zharin, Elmer Zanoria, Lennox Reid, Kenneth Hamall