Abstract: In a probe apparatus that intermittently irradiates a sample with excitation light to observe the sample while subjecting a cantilever including a probe arranged to face a surface of the sample to self-excited vibration at a predetermined frequency, the sample is irradiated with the excitation light at a predetermined timing when a distance between the probe and the sample is not greater than a predetermined distance.

Abstract: A surface texture measuring instrument includes a force sensor (1), an actuator (11) and a detector (12).

Abstract: There is provided a sample operation apparatus in which, by a static electricity force acting between a probe and a sample, an accurate position is gripped without the sample being moved, and the sample can be operated by the probe for an observation, a grip, a release, or the like. In a casing body capable of being sealed, there are installed a sample operation tweezers comprising an observation probe and a grip probe, and a sample base fixing a substrate on which the sample is mounted. By the facts that a surface of the substrate is treated such that its hydrophilic nature is higher than the sample operation tweezers, and that a humidity in the casing body is controlled by a humidity control device, there is made such that an actuation of a grip, a movement, a separation or the like of the sample is performed under a state in which water films are formed on the sample, the substrate and a surface of the sample operation tweezers.

Abstract: A probe arrangement with a probe for local electrophysiological analysis of cells (4) such as patch-clamp techniques for use with atomic force microscopy, has a probe with a cantilever arm (2) connected to a probe holder (3). The probe has a probe tip (4) at a probing end (5) of the cantilever arm (2) and a fluid channel (6) in the cantilever arm (2) connecting a probe tip aperture (7) with a fluid reservoir (8) via a duct (9). The fluid channel (6), the duct (9) and the fluid reservoir (8) are adapted to be filled with a fluid solution (10) enabling ion transport for electrophysiological analysis. A first electrode (15) for electrophysiological analysis is placed in the fluid reservoir (8) and/or in the duct (9) and/or in the fluid channel (6).

Abstract: An electric potential difference detection method detects an electric potential difference between a surface of a sample and a probe of a cantilever in a scanning probe microscope. An AC voltage having a frequency that is ½ of a resonance frequency of the cantilever is applied between the sample and the cantilever, and a magnitude of an amplitude of vibration of the cantilever is detected. On the basis of the detection, a determination is made as to whether an electric potential difference exists or does not exist between the surface of the sample and the cantilever probe. A determination that an electric potential difference between the surface of the sample and the cantilever probe does not exist is made in a case where the cantilever is resonating and the detected magnitude of the amplitude of vibration of the cantilever is greater than a predetermined magnitude.

Abstract: In a tapping mode Atomic Force Microscope (AFM) system, a probe is excited at an excitation frequency other than the probe's first natural frequency to produce a response signal manifesting a grazing bifurcation between “non-collision” and “collision” states of the AFM system, so that an additional characteristic frequency component is generated in the “collision” state. The magnitude of the additional characteristic frequency component is monitored in real time, and the probe-sample separation is adjusted to maintain the monitored magnitude at an optimal value to operate the AFM system at near-grazing conditions.

Abstract: The vibration characteristic of a dynamic AFM probe is simulated. For a given operation parameter (for example, the displacement u0 of the probe, the spring constant k of the cantilever, or the radius of curvature of the probe R1), the plate-spring cantilever to which the probe is attached is vertically moved while being mechanically resonated, and the vibration characteristic of the probe of the dynamic mode atomic force microscope (AFM) for observing the structure of the sample surface is simulated. The vibration information on the probe in the steady state at each initial position u0 (displacement u?time ?) (S103, S104) is recorded, and the movement of the probe is visualized by GUI on the basis of the recorded vibration information.

Abstract: We have invented a method of sensing a surface by driving a resonator with two or more frequencies and exploiting the nonlinear phenomenon of intermodulation. When a resonator (for example an oscillating cantilever) with a sharp tip is brought close to a surface, the non-linear tip-surface interaction generates intermodulation response of the resonator. The measured frequency spectrum of intermodulation response contains much information about the material composition of the surface. When the resonator is scanned over the surface, the intermodulation spectrum can be used to make an image of the surface with enhanced contrast for different materials on the surface, or it can be used to extract the tip-surface interaction at every point on the surface.

Abstract: A scanning probe microscope and methodology called resonant difference-frequency atomic force ultrasonic microscopy (RDF-AFUM), employs an ultrasonic wave launched from the bottom of a sample while the cantilever of an atomic force microscope, driven at a frequency differing from the ultrasonic frequency by one of the contact resonance frequencies of the cantilever, engages the sample top surface. The nonlinear mixing of the oscillating cantilever and the ultrasonic wave in the region defined by the cantilever tip-sample surface interaction force generates difference-frequency oscillations at the cantilever contact resonance. The resonance-enhanced difference-frequency signals are used to create images of nanoscale near-surface and subsurface features.

Abstract: A scanning probe microscope and method for using the same are disclosed. The Scanning probe microscope includes a probe mount for connecting a cantilever arm and a probe signal generator. The probe position signal generator generates a position signal indicative of a position of the probe relative to one end of the cantilever arm. The probe position signal generator includes a first light source that directs a light beam at a first reflector positioned on the cantilever arm and a detector that detects a position of the light beam after the light beam has been reflected from the first reflector. A second reflector reflects the light beam after the light beam is reflected from the first reflector and before the light beam enters the detector, the second reflector passing light from a second light source that illuminates the sample.

Abstract: A phase feedback AFM (atomic force microscope) and method for the phase feedback AFM. A cantilever is driven to oscillate at a constant frequency close to the resonance frequency of the cantilever by a driving signal. The distance between the probe and the sample is controlled such that the phase difference between the driving signal and a cantilever deflection signal indicating deflections of the cantilever is kept constant. The phase feedback AFM has an amplifier-controller for receiving the cantilever deflection signal, the output from an oscillator for driving the cantilever into oscillation, and a signal representing a reference amplitude of oscillation of the cantilever. The phase feedback AFM further includes a feedback circuit which receives the output from the amplifier-controller which controls the cantilever deflection signal to a preset amplitude.

Abstract: A method for measuring surface profile of a sample, wherein jumping of a probe can be constrained without applying strong force to the sample, and an apparatus employing such a method. Control operation consists of detection of displacement in a probe in the vertical direction on the top surface of a sample being measured by means of a sensor, calculation of velocity and acceleration of the probe in accordance with detection of the displacement in the probe, detection of jumping of the probe through real-time monitoring of at least either velocity or acceleration of the probe, and a control of the current delivered to a stylus pressure generator for the probe. Such a control operation is performed in a small amount of time, and a stylus pressure applied to the probe is increased only while the probe is in the air, while the stylus pressure applied to the probe is returned to an original pressure before the probe touches the sample again.

Abstract: In a roughness scanner comprising a scanning arm with a scanning needle mounted at one end thereof, a skid carrier having an end supporting a skid with the scanning arm extending along the skid carrier in spaced relationship therefrom, the skid has at one side a guide late including an opening through which the scanning needle extends and a space formed above the guide plate which space is open at least at one side thereof down to the guide plate, so that any liquid collected by the needle and moving upward into the space above the guide late can flow again out of that space.

Abstract: A cantilever includes: a lever portion; a holder portion supporting the proximal end of the lever portion; a probe portion arranged at the distal end of the lever portion and having a spherical surface to face a sample; and a retaining portion fixed to the distal end of the lever portion and retaining the probe portion to surround a periphery of the probe portion. There is provided a cantilever allowing mounting of a probe portion with little effect in a short time without using any adhesive.

Abstract: A surface texture measuring instrument includes a force sensor (1), an actuator (11) and a detector (12).

Abstract: Disclosed are methods and devices for patterning micro- and/or nano-sized pattern elements on a substrate using field emitted electrons from an element. Disclosed methods and devices can also be utilized to form nano- and micron-sized depressions in a substrate according to a more economical process than as has been utilized in the past. Methods include single-step methods by which structures can be simultaneously created and located at desired locations on a substrate. Methods include the application of a bias voltage between a probe tip and a substrate held at a relatively close gap distance. The applied voltage can promote current flow between the probe and the substrate via field emissions. During a voltage pulse, and within predetermined energy levels and tip-to-surface gap distances, three dimensional formations can be developed on the substrate surface.

Abstract: The present invention provides a method for evaluating nanotopography of a surface of a semiconductor wafer sliced from a semiconductor ingot, the method being conducted prior to polishing of the surface, the method at least comprising: measuring a surface profile of the wafer in the direction that the wafer is sliced; determining a maximum inclination value of warp change of the wafer surface in a sectional profile in the direction that the wafer is sliced of the measured surface profile; and estimating nanotopography of the wafer surface after being polished based on the determined maximum value. As a result, there are provided a method and an apparatus for evaluating nanotopography of a surface of a semiconductor wafer, and a method for manufacturing a semiconductor wafer exhibiting good nanotopography level on the surface.

Abstract: The invention relates to a method of determining material properties of a contact formed between a measurement tip of a microscopic probe and a sample surface of a sample material. According to the method, a distance modulation is applied for modulating a distance between a support of the microscopic probe end the sample surface in a direction essentially normal to the sample surface and wherein a normal force signal indicative of a normal force is measured and demodulated. In the method it is proposed that the material properties be determined using measurement data comprised in the demodulated normal force signal and related to a (concave) buckling deformation of the microscopic probe relative to and away from the sample surface.

Abstract: Excitation light ?ex is two-dimensionally scanned onto the living body tissue in the form of condensed light using an x-axis scanning mirror, a y-axis scanning mirror, and a condenser lens, whereby the excitation light ?ex is cast onto the living body tissue. This allows fluorescence observation with a relatively low output intensity of a laser light source. Furthermore, a white light image is generated by scanning the white light in the same way, thereby enabling fluorescence observation in the same observation region and at the same timing as with normal observation. This enables fluorescence observation of a sufficient area which allows the user to distinguish living body tissues in an endoscope observation image while suppressing deterioration in the laser light source.

Abstract: Measuring surface profiles of structures on integrated circuits is difficult when feature sizes are less than 100 nanometers. Atomic force microscopy provides surface profile measurement capability on flat horizontal surfaces, but has difficulty with three-dimensional structures such as MOS transistor gates, contact and via holes, interconnect trenches and photoresist patterns. An atomic force microscopy probe with two atomically sharp tips configured to facilitate measurements of three-dimensional structures is disclosed. A method of making such measurements using the disclosed probe and a method of fabricating an IC encompassing the method are also claimed.

Abstract: An approach controller (234) of a coordinate measuring instrument enables a position control loop (RP) and drives an actuator (133) so that a force sensor (1) is brought to a close position under a position control. When recognizing that the force sensor (1) reaches the close position, a contact controller (235) controls a switch (227) to enable a force control loop (RF) and drives the actuator (133) to bring the force sensor (1) into contact with a workpiece under a force control.

Abstract: Contours of a surface of a bearing which extends about an axis are displayed on a grid. To visualize the contours, points on the surface are measured at a plurality of angular positions to determine the corresponding measured values. The measured values at each angular position are normalized to determine a normalized measurement datum corresponding to each angular position. The normalized measurement datum is subtracted from each of the measured values to determine a plurality of deviations of the corresponding points. Shades are assigned that correspond to a range of possible deviations. Each of the deviations are displayed as a data segment on a grid that represents the shape of the surface of the bearing. Each data segment is shaded on the grid to the corresponding shade to provide a topographical representation of the contours of the surface of the bearing.

Abstract: An apparatus (402) and method for measuring a surface energy of a test surface (12), which includes a viscoelastic polymer layer (20), disposed on a moveable component (34), that is compressed against the test surface (12) with a compressive force. The moveable component (34) is then moved relative to the test surface (12) at a predetermined velocity, and a drive force applied to the moveable component (34) is measured. The surface energy of the test surface (12) is then determined based at least in part on the compressive force, the predetermined velocity, and the measured drive force.

Abstract: A method of forming a microchannel as well as a thin film structure including same is made by forming a first thin film on a side of a substrate, forming a fugitive second thin film on the first thin film such that the second thin film defines a precursor of the elongated microchannel and a plurality of extensions connected to and extending transversely relative to the precursor along a length thereof A third thin film is formed on the first thin film and the fugitive second thin film such that the second thin film resides between the first thin film and the third thin film. A respective access site is formed in a region of the third thin film residing on a respective extension and penetrating to the fugitive second thin film. The fugitive second thin film forming the precursor is selectively removed from between the first thin film and the third thin film using an etching medium introduced through the access sites, thereby forming the microchannel between the first thin film and the third thin film.

Abstract: The present invention provides methods and apparatus for forming an array of multiple nanotube tips that can be utilized with AFM technology. The multiprobe tips may be independently modified or specifically left unmodified. Software can generate a composite image of data collected from two or more of the independently modified and unmodified tips.

Abstract: Methods and apparatus are described for scanning probe microscopy. A method includes generating a band excitation (BE) signal having finite and predefined amplitude and phase spectrum in at least a first predefined frequency band; exciting a probe using the band excitation signal; obtaining data by measuring a response of the probe in at least a second predefined frequency band; and extracting at least one relevant dynamic parameter of the response of the probe in a predefined range including analyzing the obtained data. The BE signal can be synthesized prior to imaging (static band excitation), or adjusted at each pixel or spectroscopy step to accommodate changes in sample properties (adaptive band excitation).

Abstract: A sensing device includes an elongated whisker element having a flexible cantilever region and a base region where a change in moment or curvature is generated by bending of the cantilever region when it contacts an object. One or more sensor elements cooperatively associated with the whisker element provide one or more output signals that is/are representative of two orthogonal components of change in moment or curvature at the whisker base region to permit determination of object distance, fluid velocity profile, or object contour (shape) with accounting for lateral slip of the whisker element and frictional characteristics of the object. Multiple sensing devices can be arranged in arrays in a manner to sense object contour without or with adjustment for lateral slip.

Abstract: There is provided a sample operation apparatus in which, by a static electricity force acting between a probe and a sample, an accurate position is gripped without the sample being moved, and the sample can be operated by the probe for an observation, a grip, a release, or the like.

Abstract: A method and apparatus of scanning a sample with a scanning probe microscope including scanning a surface of the sample according to at least one scan parameter to obtain data corresponding to the surface, and substantially automatically identifying a transition in the surface. Based on the identified transition, the sample is re-scanned. Preferably, the resultant data is amended with data obtained by re-scanning the transition.

Abstract: Adhesive compositions and a method for selecting adhesive compositions are disclosed herein. Preferred adhesives generally have small domains and/or a homogeneous domain distribution. The method of selecting adhesives is based on size and distribution of the domains.

Abstract: A method for determining interfacial information and critical dimensions of a sample using atomic force microscopy. Tip-specimen deconvolution is performed on the scan lines before the critical dimension information processing. Local maxima and minima or local slope change of each scan line are found on a plurality of scan lines. A best fit line is then found for the plurality of maxim and minima or slope change points. Two best fit lines may be found using a plurality of maxima or minima or slope change points. An intersection of the two best fit lines can be used to determine a critical dimension such as a transition point. Such a method may be used to determine a track width of a trapezoidal magnetic write head or may be used to determine the location of a flare point on a magnetic write head.

Abstract: A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a memory for storing characteristic information of the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.

Abstract: The optical detection system typically used in micromechanical cantilever-based instruments, e.g. scanning probe microscopes, chemical or biological sensing probes like “artificial noses”, or molecular force probe instruments, can hardly cope when measuring samples immersed in a fluid, i.e. a gas, gel, or liquid having another refractive index than the environment. Optical readout or detection becomes problematic as soon as the refractive index of the fluid changes, because signals can shift significantly. The invention provides an improved optical means at the interface between the fluid and the environment, avoiding signal shifts, and thus avoiding time-consuming and difficult re-calibration or re-adjustment of the microscope or other cantilever-based instrument.

Abstract: The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc., between a probe of the SPM and a sample at a separation controlled by the torsional resonance mode. Preferably, the measuring step is performed while using torsional resonance feedback to maintain a set-point of SPM operation.

Abstract: A sensor for detecting mechanical perturbations represented by a change in an electrical signal includes a structure such as a cantilever, membrane, etc. and a field effect transistor such as a MOSFET embedded in the structure. The drain current of the embedded transistor changes with mechanical perturbations in the structure caused, for example, by a biochemical interaction being sensed. A scanning probe microscope utilizes the embedded MOSFET with a BiMOS actuator.

Abstract: The invention relates to scanning magnetic microscope which has a photoluminescent nanoprobe implanted in the tip apex of an atomic force microscope (AFM), a scanning tunneling microscope (STM) or a near-field scanning optical microscope (NSOM) and exhibits optically detected magnetic resonance (ODMR) in the vicinity of unpaired electron spins or nuclear magnetic moments in the sample material. The described spin microscope has demonstrated nanoscale lateral resolution and single spin sensitivity for the AFM and STM embodiments.

Abstract: A method for determining the roughness of a tyre rolling surface by the steps of providing a first signal representative of the motion of at least one point of the tyre during rolling of the surface and processing the first signal for providing an output indicative of the roughness of the rolling surface of the tyre.

Abstract: An atomic force microscope sensing structure includes a substrate, a flexible membrane and an actuating element. The flexible membrane has a first end that is clamped to the substrate and an opposite second end that is clamped to the substrate. A central portion of the membrane and the substrate define a first gap width therebetween. A peripheral portion of the membrane and the substrate define a second gap width therebetween. The first gap width is different from the second gap width. The actuating element is disposed at least adjacent to the first end and the second end and is configured to displace the membrane relative to the substrate.

Abstract: An active vibration insulator includes an electromagnetic actuator, a controller, and a bad-roads processor. The electromagnetic actuator generates vibrating forces depending on electric-current supplies. The controller carries out vibrating-forces generation control. In the vibrating-forces generation control, the electric-current supplies are made variable so as to actively inhibit vibrations generated by an on-vehicle vibration generating source of a vehicle from transmitting to a specific part of the vehicle based on cyclic pulsating signals output from the on-vehicle vibration generating source. Thus, the controller lets the electromagnetic actuator generate the vibrating forces. The bad-roads processor stops the vibrating-forces generation control effected by the controller when the vehicle travels on bad roads.

Abstract: A molecule measuring apparatus capable of controlling the drawing directions of molecules always in a uniaxial direction in a measurement performed by extending and retracting the molecules on a substrate. In the apparatus, a cantilever (200) lifts one end of a molecule (900) on the substrate (100), and a control section controls the peeling point of the molecules, which is a boundary between the portion of the molecule (900) in contact with the substrate (100) and the portion of the molecule (900) separated from the substrate (100) by the lifting, and the position of the cantilever (200) so that the peeling point and the position of the cantilever (200) are positioned vertical to the substrate (100).

Abstract: A drive actuator for a measurement instrument having a probe, the drive actuator including a heating element in a thermally conductive relationship with the probe such that application of electric current to the heating element modifies a characteristic of the probe. The probe device includes a probe including a cantilever having a lever made of a material having a selected thermal expansivity and a drive actuator in operable cooperation with the cantilever lever made of a material having a thermal expansivity different than the thermal expansivity of the material of which the cantilever lever is made.

Abstract: An imaging device using an array of active pixels, with a readout control for outputting from selected regions of interest is disclosed. When used to detect the positions of optically trapped objects, the fast readout rate enables fine control of the optical traps to stabilize the objects. Multiple objects can be controlled while being moved relative to each other.

Abstract: A method and system for determining the contact potential difference of a wafer surface using a non-vibrating contact potential difference probe and a vibrating contact potential difference probe. The method and system involves scanning the wafer surface with a non-vibrating contact potential difference sensor, integrating and scaling the resulting data, and applying offsets to individual tracks of data to match the integrated scaled data to measurements made using a vibrating contact potential difference sensor.

Abstract: The invention relates to scanning magnetic microscope which has a photoluminescent nanoprobe implanted in the tip apex of an atomic force microscope (AFM), a scanning tunneling microscope (STM) or a near-field scanning optical microscope (NSOM) and exhibits optically detected magnetic resonance (ODMR) in the vicinity of unpaired electron spins or nuclear magnetic moments in the sample material. The described spin microscope has demonstrated nanoscale lateral resolution and single spin sensitivity for the AFM and STM embodiments.

Abstract: Determining a repairing form of a defect at or close to an edge of a substrate. The defect may be scanned with a scanning probe microscope to determine a three-dimensional contour of the defect. The defect may be scanned with a scanning particle microscope to determine the shape of the at least one edge of the substrate. The repairing form of the defect may be determined from a combination of the three-dimensional contour and the shape of the at least one edge.

Abstract: The present invention provides a self-sensing tweezer device for micro and nano-scale manipulation, assembly, and surface modification, including: one or more elongated beams disposed in a first configuration; one or more oscillators coupled to the one or more elongated beams, wherein the one or more oscillators are operable for selectively oscillating the one or more elongated beams to form one or more “virtual” probe tips; and an actuator coupled to the one or more elongated beams, wherein the actuator is operable for selectively actuating the one or more elongated beams from the first configuration to a second configuration.

Abstract: A rough road detection system for a vehicle comprises a first acceleration sensor that measures vertical acceleration of a component of the vehicle. An adaptive acceleration limits module determines a first acceleration limit based upon a speed of the vehicle. A limit comparison module generates a rough road signal based on a comparison of the first acceleration limit from the adaptive acceleration limits module and the measured acceleration from the first acceleration sensor.

Abstract: An SPM cantilever of the present invention including: a support portion (1) fabricated by processing a single crystal silicon wafer; a lever portion (2) formed in a manner extended from the support portion; a probe (3) disposed at a free end side of the lever portion; a coating of graphite film (5) covering all over the side on which the probe is formed and the entire probe; and a piece of thin line (6) consisting of a carbon nanofiber (CNF) or carbon nanotube (CNT) or graphite nanofiber (GNF) grown/formed from the graphite film at a probe terminal end portion (3a).

Abstract: A nanorobot module with a measurement device for the measurement of spatial surface properties with a measurement range in the centimetre range and a resolution in the nanometre range, that can be arranged in a vacuum chamber, for example the vacuum chamber of a microscope. Along with this integration of the nanorobot module into a vacuum chamber, the disclosure further relates to the automation of the module in the chamber system, in particular the connection of the controller of the nanorobot system and the chamber system by the provision of an interface between both systems. Finally, the disclosure relates to a mechatronic exchange adapter for the flexible securing of nanorobot modules within a vacuum chamber, in particular the disclosure relates to an exchange adapter, which preferably in one process electrically connects a nanorobot module and mechanically secures it so that it is guided with high precision and without play.

Abstract: A mechanically stable and oriented scanning probe tip comprising a carbon nanotube having a base with gradually decreasing diameter, with a sharp tip at the probe tip. Such a tip or an array of tips is produced by depositing a catalyst metal film on a substrate (10 & 12 in FIG. 1(a)), depositing a carbon dot (14 in FIG. 1(b)) on the catalyst metal film, etching away the catalyst metal film (FIG. 1(c)) not masked by the carbon dot, removing the carbon dot from the catalyst metal film to expose the catalyst metal film (FIG. 1(d)), and growing a carbon nanotube probe tip on the catalyst film (16 in FIG. 1(e)). The carbon probe tips can be straight, angled, or sharply bent and have various technical applications.