Abstract: A mechanically stable and oriented scanning probe tip comprising a carbon nanotube having a base with gradually decreasing diameter, with a sharp tip at the probe tip. Such a tip or an array of tips is produced by depositing a catalyst metal film on a substrate (10 & 12 in FIG. 1(a)), depositing a carbon dot (14 in FIG. 1(b)) on the catalyst metal film, etching away the catalyst metal film (FIG. 1(c)) not masked by the carbon dot, removing the carbon dot from the catalyst metal film to expose the catalyst metal film (FIG. 1(d)), and growing a carbon nanotube probe tip on the catalyst film (16 in FIG. 1(e)). The carbon probe tips can be straight, angled, or sharply bent and have various technical applications.

Abstract: A scanning probe microscope scans the surface of a sample while making a cantilever to which an exploratory needle is attached oscillate near its resonance point, and collects information on the surface of the sample based on the change of oscillation due to the interaction between the surface of the sample and the exploratory needle. The scanning probe microscope includes a plurality of oscillators attached to the cantilever for oscillating the cantilever, and an oscillator drive device connected to the oscillators for selectively applying an alternating voltage for excitation to the plurality of oscillators.

Abstract: A device (60) and method for measuring the roughness of a playing surface are described. The device includes a carriage (12) which can travel over the playing surface, a rotatable member (80) which can roll over the playing surface, a restraint (84) which constrains the rotatable member (80) to travel with the carriage (12) and a transducer (70) coupled to the rotatable member (80) and which can generate a signal representative of the height and/or lateral translation of the rotatable member.

Abstract: An apparatus and method for improving the precision of nanoscale force and/or displacement measurements using electro micro metrology (EMM).

Abstract: The present invention provides a method of using an accurate three-dimensional shape without damaging a sample by making a probe contact the sample only at a measuring point, lifting and retracting the probe when moving to the next measuring point and making the probe approach the sample after moving to the next measuring point, wherein high frequency/minute amplitude cantilever excitation and vibration detection are performed and further horizontal direction excitation or vertical/horizontal double direction excitation are performed to improve the sensitivity of contacting force detection on a slope of steep inclination. The method uses unit for inclining the probe in accordance with the inclination of a measurement target and a structure capable of absorbing or adjusting the orientation of the light detecting the condition of contact between the probe and sample after reflection on the cantilever, which varies a great deal depending on the inclination of the probe.

Abstract: A method and device are provided for determining, without contact, the physical and electrical properties of nanotube materials. The device includes a scanning probe configured to generate a signal of certain frequency onto the nanotube material and measure a reflected signal from the nanotube material, and a processor coupled to the scanning probe and configured to determine the physical and electrical properties of the nanotube material from the measured reflected signal. The method includes positioning a scanning probe relative to the nanotube material, generating a signal of certain frequency onto the nanotube material, and measuring a reflected signal from the nanotube material.

Abstract: A method is provided for determining the topography of an object. A micro-cantilever with a scanning tip is provided. The micro-cantilever includes a thermal sensor. A biased voltage is applied across the thermal sensor. A resistance change of the thermal sensor is then identified. The bias voltage is then modulated, based on the resistance change to enhance the bandwidth and the sensitivity of the thermal sensor. Responsive to the scanning tip traversing a topographical variation on an object, the thermal sensor is vertically displaced with respect to the object, which induces a temperature change of the thermal sensor. A subsequent electrical resistance change of the thermal sensor is then identified, the subsequent electrical resistance change corresponding to a subsequent temperature change. The position of the object relative to the thermal sensor is then identified based on a difference between the initial electrical resistance and the subsequent electrical resistance.

Abstract: Method and apparatus of easily controlling the Z-position of the probe used in a microprobe analyzer. The apparatus has: (A) a holder, (B) a reference body having a reference surface that is at the same height as a surface of a sample, the reference body being placed on or in the holder, (C) a probe-positioning device for bringing the probe into contact with the reference surface, (D) a controller for controlling motion of the probe-positioning device in the Z-direction, (E) position-measuring apparatus for measuring the Z-coordinate of the probe at which it is in contact with the reference surface, (F) a memory for storing a positional coordinate outputted by the position-measuring apparatus, and (G) probe contact detection apparatus for detecting that the probe is in contact with the reference surface.

Abstract: A displacement detector capable of making a measurement in two directions of measurement 180 degrees different from each other without the need of a switching operation has been disclosed.

Abstract: A surface texture measuring instrument includes: a movement-estimating unit for estimating a movement condition of a drive mechanism based on a scanning vector command issued by a scanning vector commander to calculate an estimated operation state quantity; and a correction-calculating unit for correcting a detection value of a drive sensor in accordance with the estimated operation state quantity calculated by the movement-estimating unit. The movement-estimating unit includes: a nominal-model setting unit in which a nominal model representing signal transfer function of the scanning vector command from the issuance of the scanning vector command to a reflection on a movement position of the scanning probe is stored.

Abstract: Modifications to the indenter probe tips and transducer, and proper selection of optics in an indentation system allow straight down or slightly angled optical viewing of the sample surface under the indentation tip by a microscope, by providing an optical path through the transducer from the sample surface under the tip to a microscope objective, thereby simplifying alignment of the tip to features on the sample.

Abstract: Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner that has a carrier holder, and changes a position of the carrier holder in a straight line; a second scanner changing a position of a sample on a plane; and a tray being able to store a spare carrier and a spare probe attached to the spare carrier. The carrier holder includes a plurality of protrusions.

Abstract: In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance over a selected portion of the gap, the change in distance at the selected portion orienting a probe tip of the force sensor for multi-directional measurement.

Abstract: The present invention provides a technique for eliminating the effect of the thermal drift and other variances and to improve the observing or manipulating accuracy of a scanning probe microscope or atom manipulator by using the technique to correct the aforementioned change in the relative position of the probe and the sample due to heat or other factors during the observation or manipulation. To obtain an image of the sample surface at the atomic level or perform a certain manipulation on an atom on the sample surface, the present invention can be applied to a probe position control method for controlling the relative position of the probe and the sample while measuring an interaction between the objective atom on the sample surface and the tip of the probe. In the present method, the relative position of the probe and the sample are changed while the probe is oscillated relative to the sample in two directions parallel to the sample surface at frequencies of f1 and f2 (S1a).

Abstract: This is a probe that can be used to measure any curl on a stack of sheets in a sheet stacking tray. In printing systems including electrophotographic systems, sheets tend to curl on edge portions. This curl can adversely affect the final copy and copies fed to finishing stations. This probe lightly contacts the upper stack surface and detects sheet curl especially on the edge portions of the stack. The probe measures deviations of the surface as compared to a starting point defined on the terminal edge of the stack. The information provided by the probe is then fed to a user or controlled for transmission to a correcting apparatus.

Abstract: A method and apparatus for measuring the polishability of a solid material such as a dental restorative material includes using a series of apparatus to perform the steps of forming the material into a desired specimen with a generally planar surface, conditioning the surface by abrasion, measuring the abraded surface with a profile determination device, optionally measuring the amount of material abraded from the surface and the gloss of the abraded surface, polishing a portion of the abraded surface with a polishing device at a controlled load for a pre-determined time and measuring the roughness and/or gloss of the polished surface followed by comparison thereof to the corresponding measurements of the unpolished, conditioned portion of the specimen surface. Polishing materials and devices may also be tested using the apparatus and method for polishing a standardized material.

Abstract: A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a drive circuit for driving the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.

Abstract: A new type of indenter is described. This device combines certain sensing and structural elements of atomic force microscopy with a module designed for the use of indentation probes, conventional diamond and otherwise, as well as unconventional designs, to produce high resolution and otherwise superior indentation measurements.

Abstract: The present invention relates to a production method for producing a sensor film for measuring cracks of a material surface using the comparative vacuum measurement method. A gallery having a predetermined gallery course is milled along a surface of the sensor film using a milling apparatus. The sensor film comprises a plastic material.

Abstract: A measuring apparatus comprising: a reference member held in fixed position and orientation with respect to a workpiece during measurement; a stylus for scanning a surface of the workpiece while being displaced upward and downward in accordance with unevenness of the surface of the workpiece; a displacement gauge for measuring a displacement of a specific part of the stylus relative to the reference member; and a scanner for causing the stylus to scan the workpiece along the surface; wherein the fixed position and orientation of the reference member with respect to the workpiece are not changed even during the operation of the scanner; the up-and-down displacement of the specific part of the stylus is measured relative to the reference member; a fine shape of the workpiece is detected in accordance with the measured displacement of the specific part of the stylus.

Abstract: A method of extracting the shape of a probe tip of a probe-based instrument from data obtained by the instrument is provided. The method employs algorithms based on the principle that no reconstructed image points can physically occupy the same region as the tip during imaging. Sequential translates of the tip shape or volume sweep out an area or volume that is an “exclusion zone” similar to morphological erosion. The embodiments of the alternative method use either the region defined by the tip boundary or simply the tip boundary.

Abstract: To eliminate or otherwise reduce unintended movement of a probe tip of a probe assembly being held by a probe arm, the probe assembly includes one or more resilient members that compensate for the contraction or expansion of the probe arm in accordance with the coefficient of thermal expansion of the material from which the probe arm is made. Thus, the probe tip can remain in contact with a sample being measured at the desired location on the sample, during an automated full or wide scale temperature range sweep.

Abstract: A method of fabricating a nanoscale cantilever probe. In one embodiment, the method includes the steps of forming a cantilever having a tip vertically extending from an end portion of the cantilever, where the tip has an apex portion having a size in a range of about 1-1000 nm, and selectively doping the cantilever with a dopant to define a first doping region in the tip and a second doping region in the rest of the cantilever, where the dopant concentration of the first doping region is substantially lower than that of the second doping region.

Abstract: A signal coupling system interposed between a scanning probe and a measurement instrument provides signal communication between the scanning probe and the measurement instrument. The signal coupling system has a pre-stressed shape when the scanning probe is in a neutral position. The pre-stressed shape is designated to provide a characteristic impedance of the signal coupling system that varies linearly as a function of displacement of the scanning probe from the neutral position when the scanning probe is displaced, relative to the neutral position, over a designated range of displacements.

Abstract: A belt (3) of a continuously variable transmission comprises a pair of endless rings (2a) and plural elements (1) held between the pair of endless rings (2a). The endless rings (2) are formed of plural laminated thin plates (2a). A prestress in a compression direction is applied beforehand to the surfaces of the thin plates (2a) by a nitriding treatment. In this process, a defect part (2b) is formed as a hollow in the thin plate (2a) due to scatter in the nitriding treatment. This invention measures the depth of the defect part (2b), and if the measured depth exceeds a predetermined tolerance value, it is determined that the prestress is insufficient. Due to this determination method, a highly precise inspection of the thin plates (2a) forming the endless rings (2) can be performed in a short time.

Abstract: A method and apparatus of engaging a probe with a sample surface including automatically reducing the spacing between a probe of a probe based instrument and a sample from an initial separation to one in which the probe is positioned for obtaining a sample surface measurement in less than ten seconds without damaging either the probe or the sample. The method includes oscillating the probe, measuring at least one parameter of probe oscillation and then engaging the probe and the sample by generally continuously controlling the reducing step based on the measuring step to reduce the separation from an initial separation to an engage position. In addition to feeding back directly on the tip-sample interaction, a direct communication line is provided between the processor used to generate control signals that govern the engage and a conventional motion controller.

Abstract: The invention relates to a dynamic-mode surface (12) scanning method in which a cantilever (10) provided with a probe (18) is non-positively coupled to the surface and is made to oscillate in a resonant fashion using positive feedback, wherein the resonant oscillation contains at least one higher harmonic whose frequency represents an integer multiple of the basic resonance frequency of the cantilever which is force-coupled to the surface. According to the invention, the amplitude or the phases of the at least one higher harmonic oscillation is determined as a control variable in order to regulate the distance between the probe (18) and the surface (14).

Abstract: A microcantilever sensor includes a supporting substrate, a cantilever spring element at least partially disposed over the support substrate, a probe layer disposed over the first side of the cantilever spring element, and a piezoresistive transducer attached to the second side of the cantilever spring element. The cantilever spring element is characterized by having a first side and a second side and comprising a polymer having a Young's modulus less than about 100 Gpa. Sensing systems that incorporate the cantilever sensor of the invention include a detector in communication with the piezoresistive transducer to provide measurements of surface strain changes in the piezoresistive transducer.

Abstract: A probe instrument having a probe that interacts with a sample surface to perform a mechanical property measurement at high speed includes a scanner producing relative motion between the sample and the probe. In addition, a probe actuator produces relative motion between the sample and the probe, in a generally vertical direction, and a controller that generates a scanner drive signal and an actuator drive signal. The probe actuator is responsive to the actuator drive signal and has an operable bandwidth of at least about 50-80 kHz to perform the fast force curve measurements. The probe actuator is preferably located at least partially on the cantilever. Moreover, feedback during normal operation may be interrupted to perform a force curve measurement with the integrated actuator.

Abstract: In accordance with the invention, a computer pointing device is interfaced with an SPM system to provide real time control of the SPM and improve the ease of use.

Abstract: A method for exciting free torsional vibrations a spring cantilever, which is clamped in on one side and has a longitudinal extension, of an atomic force microscope (AFM) is disclosed. The invention provides by the one-sidedly clamped-in spring cantilever being placed at a distance over a surface between which and the spring cantilever there is an acoustic coupling medium, by the surface being set into oscillations which are oriented laterally to the surface and are polarized linearly along an oscillation direction, and by the polarization axis given by the oscillation direction being oriented perpendicular to the longitudinal extension of the spring cantilever.

Abstract: An imaging device. In one embodiment, the imaging device includes a plurality of first electrode strips in parallel to each other along a first direction x, wherein each first electrode strip has an elongated body with a first surface and an opposite, second surface and a thickness n1. The imaging device also includes a plurality of second electrode strips in parallel to each other along a second direction y that is substantially perpendicular to the first direction x, wherein each second electrode strip has an elongated body with a first surface and an opposite, second surface and a thickness n2. The plurality of second electrode strips are positioned apart from the plurality of first electrode strips along a third direction z that is substantially perpendicular to the first direction x and the second direction y such that the plurality of first electrode strips and the plurality of second electrode strips are crossing each other accordingly to form a corresponding number of crossing points.

Abstract: Modifications to the indenter probe tips and transducer, and proper selection of optics in an indentation system allow straight down optical viewing of the sample surface under the indentation tip by a microscope, by providing an optical path through the transducer from the sample surface under the tip to a microscope objective, thereby simplifying alignment of the tip to features on the sample.

Abstract: A scanning probe system and method for using the same are disclosed. The system includes a probe that interacts with a specimen. The probe is caused to vibrate at a first frequency of the probe. A probe deflection signal indicative of an oscillation amplitude of the probe is generated and used to set the z-position probe position to maintain a property of the probe deflection signal at the first frequency at a predetermined value. A probe signal, having a DC and an AC component is applied between the specimen and the probe. The amplitude of a frequency component of the deflection signal at a mixing frequency of the first frequency and the second frequency is measured and used to generate an image or adjust the DC component.

Abstract: A force microscope for the detection of forces in the sub-micronewton range has a measurement head which is used to carry out a relative movement with respect to a sample holder and to which a carrier molecule is attached on which probe molecules are placed.

Abstract: A surface texture measuring instrument includes a contact piece to be in contact with an object, a sensor driving mechanism that moves the contact piece along the surface of the object, a controller that controls the sensor mechanism, and a force sensor that detects a measuring force exerted on the contact piece when the contact piece is brought into contact with the object. The controller includes a target value output that outputs a target value of the measuring force, a feedback controller that performs feedback control of the sensor driving mechanism based on a deviation between the measuring force and the target value, and a feedback compensator provided on the feedback controller. The feedback compensator performs feedback compensation in accordance with the measuring force.

Abstract: An apparatus for measuring surface texture causes a probe to trace a surface of a workpiece to detect contact between a tip provided on the tip of the probe and the surface of the workpiece and measures surface texture of the workpiece. The apparatus for measuring surface texture includes: a path division unit dividing a path along which the tip is moved into a plurality of sections between the starting point and the ending point of the path; a moving velocity calculation unit calculating a moving velocity of the tip in sequence from the starting point to the ending point for each of the plurality of sections, based on the path information for each of the plurality of sections; and a stylus movement control unit moving the tip in a section for which a moving velocity has been calculated at the moving velocity calculation unit.

Abstract: A method for making a specimen assembly for atom probe analysis in an energetic-beam instrument includes milling a post near a region of interest in a sample in the energetic-beam instrument, so that the post has a free end. The probe tip of a nano-manipulator probe shaft is attached to the free end of the post and the post is cut free from the sample to form a rough specimen, so that the region of interest in the rough specimen is exposed at approximately the location where the post is cut from the sample. A specimen assembly form is provided having an open area inside its perimeter. The probe shaft bearing the specimen is joined to the specimen assembly form, so that the region of interest in the rough specimen is located in the open area. Thereafter, the probe shaft can be cut off outside the perimeter of the specimen assembly form, and the specimen conveniently held and sharpened for atom probe analysis. Specimen assembly forms made by the method are also disclosed.

Abstract: A method for evaluating a performance of a substrate surface including applying a normal force with a probe to a surface of a substrate, the normal force being substantially perpendicular to the surface, and moving the probe across the surface to generate a force against and to scratch the surface, the force being substantially parallel to the surface and comprising a coaxial force along the scratch and an orthogonal force perpendicular to the scratch. The method further includes measuring a magnitude of the orthogonal force as the probe moves across the coating, and determining a fracture point of the surface by the probe based on changes in the magnitude of the orthogonal force.

Abstract: Thin and short cantilevers possess both a low force constant and a high resonance frequency, thus are highly desirable for atomic force microscope (AFM) imaging and force measurement. According to some embodiments, the invention provides small silicon (Si) cantilevers integrated with a Si tip, for example fabricated from SOI wafers that are used for reducing the variation of thickness of the cantilevers. In one example, the fabrication process provided SOI chips containing 40 silicon cantilevers integrating with an ultra-sharp Si tip. The resolution of images obtained with these tips was much higher than those obtained with the commercial tips, while the force constants were much less, that is, more suitable for imaging soft samples.

Abstract: In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance.

Abstract: A method and apparatus are provided for monitoring motion of a scanning probe microscope (SPM) actuator using an improved optical displacement sensor (ODS) including a light emitter, an intensifier, and a photodetector. One of these three devices, most preferably the intensifier, is preferably movable with the actuator and relative to the other two devices. The intensifier intensifies the light incident on the detecting face of the photodetector, increasing the sensitivity of the ODS and improving the ability of the SPM to translate the actuator in the desired manner. The photodetector preferably is a split diode or a quad diode photodetector. The light emitter includes at least a light source such as an LED and may additionally include an aperture that limits the light passing therethrough to that which contributes to the displacement signal, thereby reducing shot noise and increasing the signal-to-noise ratio.

Abstract: Parts and structures are described for micro and nano machines and the creation of macro structures with nano and micro layers of special materials to provide improved performance.

Abstract: A scanning probe apparatus for obtaining information of a sample or processing the sample with relative movement between the sample and the apparatus includes a sample stage for holding the sample, and a drive stage with a probe, a cantilever supporting the probe, a cantilever holding member for holding the cantilever, and a drive element for driving the probe in three directions perpendicular to each other. In addition, a movable portion surrounds the drive element and is positioned outside of the drive element, with the movable portion movable in a direction in which an inertial force generated during movement of the probe is canceled. The drive stage includes an optical path, through which light passes, provided inside of the drive stage.

Abstract: With a scanning probe microscope, if a plurality of sample properties are measured using a scanning scheme of allowing a probe to approach and withdraw from a sample, the sample properties need to be accurately and reliably detected in the minimum required measurement time. Further, the acting force between the probe and the sample varies depending on the type of the probe and the wear condition of a probe tip. Thus, disadvantageously, property values acquired using different probes cannot be compared with one another unless the artifactual effect of the measuring probes are eliminated. In accordance with the present invention, with a scanning probe microscope, the probe is brought into intermittent contact with the sample, while driving means repeatedly allows the probe to approach and withdraw from the sample with a variable amplitude. The sample property is thus acquired at a high speed.

Abstract: In a surface shape measurement device that measures the surface shape of a sample (W1, W2) by moving a probe (16, 26) in a sliding fashion along the surface of the sample (W1, W2) and thereby detecting the amount of displacement of the probe (16, 26) caused by irregularities on the surface, an initial amount of displacement is detected which is the amount of displacement of the probe (16, 26) when the probe is first placed in contact with a measurement start point on the surface of the sample (W1, W2), and the amount of displacement of the probe (16, 26), detected as it is moved in a sliding fashion along the surface, is compared with the initial amount of displacement to determine whether the probe (16, 26) has reached a measurement end point.

Abstract: A foreign matter or abnormal unsmoothness inspection apparatus is constituted by a detecting member for detecting a foreign matter or abnormal unsmoothness by measuring smoothness of a surface of a substrate-like measuring object, a marking device for providing an dent on the surface of the measuring object with a predetermined horizontal distance from the foreign matter or abnormal unsmoothness, and a mass spectrum measuring device for measuring a mass spectrum of secondary ion emitted from a position with a predetermined distance from the dent by detecting the dent through impact and scanning of the surface of the measuring object with a primary ion beam.

Abstract: The invention relates to deflectable micromechanical systems as well as their use in which the deflection of at least one deflectable element can be determined. In accordance with the invention, a deflectable element is held with at least one spring element and at least one unit detecting the deflection is present. It is formed as a piezoresistive sensor with contacts arranged at least at a spacing from one another and in a region deforming on deflection. The contacts are connected to an electrical voltage source. An inhomogeneous electrical field is formed perpendicular to the contact surfaces in the depth direction so that the electrical resistance between contacts varying in dependence on the deflection can be detected as a measure for the position. The deforming region is formed from electrically conductive or semiconductive material.

Abstract: An observer based Q control method for a cantilever in an atomic force microscopy is provided that provides for a “dual” Q behavior such that a particular effective Q is achieved when a sample is present and another effective Q when a sample is absent. In the control method, the transfer function from dither input to photo-diode output is independent of the observer so that the cantilever effectively behaves like a spring-mass-damper system. The effective quality factor and stiffness of the cantilever can be changed by appropriately choosing the state feedback gain. The method provides sample-imaging using transient atomic force microscopy.

Abstract: The present invention provides standing wave fluidic and biological tools, including: at least one elongated fiber that has mesoscale (i.e. milliscale), microscale, nanoscale, or picoscale dimensions, the at least one elongated fiber having a first end and a second end; and an actuator coupled to the first end of the at least one elongated fiber, wherein the actuator is operable for applying oscillation cycles to the at least one elongated fiber in one or more directions, and wherein the actuator is operable for generating a standing wave in the at least one elongated fiber. These standing wave fluidic and biological tools are selectively disposed in a fluid to provide a function such as mixing the fluid, measuring the viscosity of the fluid, attracting particles in the fluid, shepherding particles in the fluid, providing propulsive force in the fluid, pumping the fluid, dispensing the fluid, sensing particles in the fluid, and detecting particles in the fluid, among others.