Multiple And/or Differential Patents (Class 73/716)
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Patent number: 12146456Abstract: The fuel vapor treatment apparatus includes a fuel tank, a canister, a vapor passage, a purge passage, a sealing valve, a purge valve, an outside air introduction passage, a switching valve, and a differential pressure detector. A processing device of the fuel vapor treatment apparatus includes a purge control unit and a purge diagnosis unit. The purge control unit performs a purge process by opening the purge valve in a state where the purge valve and the sealing valve are closed and the switching valve is opened. The purge diagnosis unit diagnoses whether or not the purge process is normal based on the amount of change in the differential pressure between before and after the opening of the purge valve.Type: GrantFiled: September 12, 2023Date of Patent: November 19, 2024Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHAInventors: Yuusaku Nishimura, Hideki Miyahara, Keita Fukui
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Patent number: 12139161Abstract: Systems and methods are provided for determining whether a vehicle is located in an enclosed space based on the barometric pressure. Systems and methods may include taking pressure measurements and determining that a threshold pressure difference has been exceeded, which may suggest that the vehicle is in an enclosed space.Type: GrantFiled: May 12, 2022Date of Patent: November 12, 2024Assignees: TOYOTA MOTOR NORTH AMERICA, INC., TOYOTA JIDOSHA KABUSHIKI KAISHAInventor: Michael R. Kushnerik
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Patent number: 11953391Abstract: Various embodiments are directed to a pressure sensor and method of using the same. A pressure sensor may comprise a substrate having a substrate thickness extending between a first substrate surface and a second substrate surface, wherein the first substrate surface and the second substrate surface define opposing ends of the substrate thickness; a first pressure sensing assembly attached to the first substrate surface and configured to detect a first pressure force associated with a first fluid volume, wherein a portion of the first substrate surface adjacent the first pressure sensing assembly is fluidly isolated from the first volume of fluid; and a second pressure sensing assembly attached to the second substrate surface and configured to detect a second pressure force associated with a second volume of fluid, wherein a portion of the second substrate surface adjacent the second pressure sensing assembly is fluidly isolated from the second fluid volume.Type: GrantFiled: October 20, 2022Date of Patent: April 9, 2024Assignee: Honeywell International Inc.Inventors: Sathish Vadlamudi, Manjesh Kumar B, Sudheer Beligere Sreeramu
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Patent number: 11883608Abstract: A catheter system may include a catheter adapter, which may include a distal end, a proximal end, and a lumen extending through the distal end of the catheter adapter and the proximal end of the catheter adapter. The catheter system may include a concertinaed tube, which may include a distal end coupled to the proximal end of the catheter adapter. The concertinaed tube may be disposed in a collapsed position and movable between the collapsed position and an expanded position. The catheter system may include a luer connector, which may be coupled to a proximal end of the concertinaed tube. The catheter system may include a needle assembly, which may include a needle hub and an introducer needle extending distally from the needle hub. The concertinaed tube and the luer connector may be disposed within the needle hub.Type: GrantFiled: March 19, 2021Date of Patent: January 30, 2024Assignee: Becton, Dickinson and CompanyInventor: Pravin Bhagavant K. Gavade
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Patent number: 11821757Abstract: The invention relates to an explosion-protected housing for means for transmitting and/or receiving electromagnetic radiation (2, 2a, 2b). The housing comprises a housing body (1) that is configured to receive such transmission and/or reception means (2, 2a, 2b) and a window element (5) having a first side (7) that faces the housing interior and an opposite second side (6) that faces away from the housing interior, wherein the window element (5) transmits electromagnetic radiation. The housing body (1) has a flanging (11) on the second side (6) of the window element (5), said flanging pressing the window element (5) in the direction of a seat (13) that is formed in the interior of the housing such that the housing is formed as a pressure-resistant housing and/or as a dust-tight housing.Type: GrantFiled: November 25, 2016Date of Patent: November 21, 2023Assignee: Minimax GmbHInventors: Bernd Ziems, Hauke Dittmer, Dirk Siemer, Axel Grothoff, Peter Zülzer, Arne Stamer, Pawel Wisniewski, Timo Ziegenbein
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Patent number: 11680862Abstract: A gauge pressure transducer assembly having anti-icing features to allow for easy drainage of fluids to prevent pooling and icing. The assembly can include a header having one or more atmospheric ports extending therethrough, a differential sensing element mounted to the header, a header cap attached to at least a portion of the header, a gauge adapter attached to the header and in communication with the one or more atmospheric ports of the header, an elongated tube attached to the header cap, and a front port attached to the elongated tube. The gauge adapter includes a plurality of through-holes to facilitate drainage and de-icing, which is an improvement over conventional transducers that can trap water within the ports that can freeze and cause damage. The header and the gauge adapter of the gauge pressure transducer assembly can reduce or eliminate regions where water can pool and freeze.Type: GrantFiled: November 11, 2021Date of Patent: June 20, 2023Assignee: KULITE SEMICONDUCTOR PRODUCTS, INC.Inventors: Louis DeRosa, Robert Gardner
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Patent number: 11506557Abstract: Various embodiments are directed to a pressure sensor and method of using the same. A pressure sensor may comprise a substrate having a substrate thickness extending between a first substrate surface and a second substrate surface, wherein the first substrate surface and the second substrate surface define opposing ends of the substrate thickness; a first pressure sensing assembly attached to the first substrate surface and configured to detect a first pressure force associated with a first fluid volume, wherein a portion of the first substrate surface adjacent the first pressure sensing assembly is fluidly isolated from the first volume of fluid; and a second pressure sensing assembly attached to the second substrate surface and configured to detect a second pressure force associated with a second volume of fluid, wherein a portion of the second substrate surface adjacent the second pressure sensing assembly is fluidly isolated from the second fluid volume.Type: GrantFiled: October 7, 2020Date of Patent: November 22, 2022Assignee: HONYWELL INTERNATIONAL INC.Inventors: Sathish Vadlamudi, Manjesh Kumar B, Sudheer Beligere Sreeramu
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Patent number: 11402235Abstract: A system and method for managing sensors including determining health operation states of the sensors correlative with sensor accuracy, classifying the sensors by their respective health operation state, and teaming two sensors each having a health operation state that is intermediate to give a team having a health operation state that is healthy. The sampling frequency of the sensors to determine sensor accuracy may be dynamic.Type: GrantFiled: January 3, 2017Date of Patent: August 2, 2022Assignee: Intel CorporationInventors: Kshitij A. Doshi, Tao Zhong, Gang Deng, Zhongyan Lu
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Patent number: 11366032Abstract: A sensor element includes a sensor chip and a diaphragm base joined to a surface of the sensor chip. The sensor chip includes a first diaphragm for measuring differential pressure between a first pressure and a second pressure and a second diaphragm for measuring absolute pressure or gage pressure of the second pressure. The diaphragm base includes a third diaphragm to directly receive a fluid that is a measurement target and has the first pressure, and a fourth diaphragm to directly receive a fluid that is a measurement target and having the second pressure. The sensor element has a liquid amount adjustment chamber to make an amount of a first pressure transmission medium filled in a first pressure introduction path and an amount of a second pressure transmission medium filled in a second pressure introduction path to be equal to each other.Type: GrantFiled: October 7, 2020Date of Patent: June 21, 2022Assignee: AZBIL CORPORATIONInventors: Tomohisa Tokuda, Masayuki Yoneda, Hirofumi Tojo, Ayumi Tsushima, Nozomi Kida
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Patent number: 11307109Abstract: A differential pressure gauge of the invention contains: a diaphragm layer disposed between first and second parts; and a wall between a first region on a pressure-receiving portion side and a second region on a first through-hole side within a second pressure chamber. The diaphragm layer covers the pressure-receiving portion over a first pressure chamber and has the first through-hole with one end disposed in the second pressure chamber away from the pressure-receiving portion. The wall is disposed with gaps formed from inner walls of the second pressure chamber. The first pressure chamber is formed through the first part, the second pressure chamber has an opening facing the diaphragm layer, the first part has a second through-hole continuing to the first through-hole, and a base has a third through-hole with one end disposed in the first pressure chamber and a fourth through-hole continuing to the second through-hole.Type: GrantFiled: December 4, 2020Date of Patent: April 19, 2022Assignee: AZBIL CORPORATIONInventors: Hirofumi Tojo, Tomohisa Tokuda, Nozomi Kida
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Patent number: 11085844Abstract: A pressure transmitter is disclosed. In an embodiment a pressure transmitter includes a housing including a housing wall, a sensor element arranged inside the housing, a ceramic substrate acting as a carrier of the sensor element and of its electrical connection arranged inside the housing and a first heating element arranged inside the housing or the housing wall, wherein the pressure transmitter is configured to determine differential, relative or absolute pressure.Type: GrantFiled: September 27, 2018Date of Patent: August 10, 2021Assignee: TDK ELECTRONICS AGInventors: Benjamin Bohl, Jan Ihle, Bert Hundertmark, Bernd Polder, Christian Wohlgemuth
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Patent number: 11041775Abstract: An apparatus is described and in one embodiment includes a first portion comprising an inner diameter, a first outer diameter, and a first length and a second portion, wherein the first portion and the second portion are integrally connected together, the second portion comprising the inner diameter, at least one second outer diameter, and a second length. The embodiment further includes a flange comprising a contact surface, wherein the inner diameter of the first portion and the second portion provides a hollow pathway through the apparatus.Type: GrantFiled: December 18, 2018Date of Patent: June 22, 2021Assignee: BELL HELICOPTER TEXTRON INC.Inventors: Francois Landry, Martin Landry, Francis Beaucaire, Kevin Donald Morris
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Patent number: 10837275Abstract: An isolation valve for use with a tubular string includes a tubular housing for connection with the tubular string; a first closure member disposed in the housing and movable between an open position and a closed position; a second closure member disposed in the housing and movable between an open position and a closed position; a chamber formed between the first closure member and the second closure member when the first and second closure members are in the closed position; and a leak detection device configured to measure a fluid flow into the chamber.Type: GrantFiled: February 6, 2017Date of Patent: November 17, 2020Assignee: WEATHERFORD TECHNOLOGY HOLDINGS, LLCInventor: Joe Noske
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Patent number: 10798508Abstract: The present invention provides a process of fabricating a capacitive microphone such as a MEMS microphone. In the process, one electrically conductive layer is deposited on a removable layer, and then divided or cut into two divided layers, both of which remain in contact with the removable layer as they were. One of the two divided layers will become or include a movable or deflectable membrane/diaphragm that moves in a lateral manner relative to another layer, instead of moving toward/from another layer. A motional sensor is optionally fabricated within the microphone to estimate the noise introduced from acceleration or vibration of the microphone for the purpose of compensating the microphone output through a signal subtraction operation.Type: GrantFiled: October 12, 2017Date of Patent: October 6, 2020Assignee: GMEMS TECH SHENZHEN LIMITEDInventors: Guanghua Wu, Xingshuo Lan
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Patent number: 10730741Abstract: A MEMS sensor with improved overload resistance for metrological registering of a measured variable comprises a plurality of layers, especially silicon layers, arranged on one another. The layers include at least one inner layer, which is arranged between a first layer and a second layer, and in the inner layer there is provided extending perpendicularly to the plane of the inner layer through the inner layer at least one cavity, on which borders externally at least sectionally and forming a connecting element, a region of the inner layer, which is connected with the first layer and the second layer. A lateral surface of the connecting element externally at least sectionally bordering the cavity has in an end region facing the first layer a rounding decreasing the cross sectional area of the cavity in the direction of the first layer, and has in an end region facing the second layer a rounding decreasing the cross sectional area of the cavity in the direction of the second layer.Type: GrantFiled: March 4, 2016Date of Patent: August 4, 2020Assignee: ENDRESS + HAUSER SE + CO.KGInventors: Rafael Teipen, Benjamin Lemke
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Patent number: 10648398Abstract: In an intake structure of an internal combustion engine, on an intake upstream side from a valve seat of an intake port, a convex portion is provided which protrudes to an inside of the intake port in a place near an outer circumferential portion of a cylinder chamber when viewed from an upper side of the cylinder chamber. The convex portion includes an upstream guide surface extending from an apex of the convex portion to the intake upstream side, and a downstream guide surface extending from the apex to an intake downstream side and including a curved surface recessed inside the convex portion at a middle portion thereof.Type: GrantFiled: December 18, 2018Date of Patent: May 12, 2020Assignee: MITSUBISHI JIDOSHA KOGYO KABUSHIKI KAISHAInventors: Akira Yoshihara, Koichi Matsumoto, Shigeki Nabetani, Kazuaki Koyama, Yuya Okamoto
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Patent number: 10648878Abstract: According to one aspect of the present invention, there is provided an oil pressure sensor attachment structure including: the oil path body; the sensor case; and a fixing member which fixes the sensor case to the oil path body. The sensor case has a columnar portion which is disposed along a central axis extending in an up and down direction, and a flange portion which protrudes from the columnar portion to an outside in a radial direction. The fixing member has a fixing portion which comes into contact with the oil path body and is fixed thereto, and a pressing portion which comes into contact with the upper surface of the flange portion and presses the flanges portion against the oil path body. The fixing portion and the pressing portion are disposed with an interval therebetween.Type: GrantFiled: March 16, 2018Date of Patent: May 12, 2020Assignee: NIDEC TOSOK CORPORATIONInventors: Tomoka Osawa, Hiroshi Shirai, Toshiaki Nakamura
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Patent number: 10605636Abstract: A flowmeter including a sensor passage disposed with a sensor chip for measuring a flow rate and an orifice passage as a bypass passage placed with respect to the sensor passage is provided. The orifice passage has a passage diameter which is smaller than a passage diameter of an inflow passage, a distribution orifice is placed on an inlet side of the sensor passage, and the orifice passage and the distribution orifice are configured such that changing trends in an effective sectional area becomes same in a graph including a vertical axis indicating the effective sectional area and a lateral axis indicating a fluid pressure of a fluid.Type: GrantFiled: June 13, 2018Date of Patent: March 31, 2020Assignee: CKD CORPORATIONInventors: Ryo Eguchi, Naotsugu Seko, Kazutoshi Ito
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Patent number: 10570800Abstract: An exhaust system having a differential pressure sensor may include an intake pipe that houses fresh air from the outside to supply the fresh air to a turbocharger; an exhaust pipe that supplies an EGR gas, having passed through a Diesel Particulate Filter (DPF) to upstream of the turbocharger to mix with the fresh air; and a differential pressure sensor that measures a pressure difference between the front end portion and the rear end portion of the DPF, wherein the differential pressure sensor is directly mounted in the exhaust pipe that is disposed at the rear end portion of the DPF.Type: GrantFiled: December 13, 2016Date of Patent: February 25, 2020Assignee: Hyundai Motor CompanyInventor: Sang Bong Han
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Patent number: 10405534Abstract: An agricultural product application implement includes a system and method for indicating an amount of fluid stored. A pressure transducer installed at the sump of a fluid tank may electronically measure and display a fluid depth. Instrumentation, such as the instrument cluster unit for the implement, can be programmed via software to convert the voltage output of the pressure transducer to a volume measurement to be displayed in the operator's line of sight. Software may be provided within an instrument cluster unit for self-calibrating to account for varying densities of different chemical solutions. The pressure transducer may be used in conjunction with a transfer medium to prevent corrosive chemical solutions from contacting the pressure transducer.Type: GrantFiled: December 2, 2014Date of Patent: September 10, 2019Assignee: CNH Industrial America LLCInventors: Aaron Tollefsrud, Bruce Bastin
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Patent number: 10395087Abstract: A biometric sensing chip includes a biometric sensing die including a memory circuit for saving data and an electrostatic conductor set above the memory circuit for discharging static electricity. An electronic device includes the biometric sensing chip described above is also provided.Type: GrantFiled: January 15, 2018Date of Patent: August 27, 2019Assignee: SHENZHEN XINWEI TECHNOLOGY CO, LTD.Inventor: Wenjie Li
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Patent number: 10362377Abstract: A MEMS microphone package includes a substrate including a sound hole, a first conduction part and a second conduction part, a sidewall connected with one end thereof to the substrate and having a conducting line electrically connected to the second conduction part, a cover plate connected to an opposite end of the sidewall and defining a chamber therein and having a solder pad and a fifth contact in conduction with the solder pad and electrically connected to the conducting line, a processor chip mounted on the substrate inside the chamber and electrically connected to the first conduction part and the second conduction part, and a acoustic wave sensor mounted on the substrate inside the chamber to face toward the sound hole and electrically connected to the first conduction part using flip-chip technology.Type: GrantFiled: October 26, 2016Date of Patent: July 23, 2019Assignee: LINGSEN PRECISION INDUSTRIES, LTD.Inventors: Hsien-Ken Liao, Ming-Te Tu, Jyong-Yue Tian, Yao-Ting Yeh
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Patent number: 10247631Abstract: A differential pressure measuring cell comprises a measuring membrane; two opposing bodies; and one converter. The measuring membrane is arranged between the opposing bodies and is connected in a pressure-tight manner to the two opposing bodies, forming in each case one measuring chamber. The opposing bodies each have a pressure duct through which a pressure can be made to act upon the respective measuring chamber. The converter is provided in order to convert a deformation of the measuring membrane, which deformation is dependent upon a difference between the pressures, into an electrical signal; wherein the opposing bodies each have a chamber section oriented toward the measuring membrane and a rear wall section oriented away from the measuring membrane with, between these, a decoupling chamber.Type: GrantFiled: June 8, 2015Date of Patent: April 2, 2019Assignee: ENDRESS+HAUSER SE+CO.KGInventors: Ulfert Drewes, Michael Hugel, Nils Ponath, Andreas Rossberg, Elke Schmidt, Thomas Uehlin
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Patent number: 10227142Abstract: A vehicle, includes a vehicle and a strain gauge. The vehicle includes a vehicle body component exposed to an exterior of the vehicle. The strain gauge is coupled with the vehicle body component.Type: GrantFiled: September 13, 2017Date of Patent: March 12, 2019Assignee: The Boeing CompanyInventors: Nils Kneuper, Ralf Rene Shu-Zhong Cabos
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Patent number: 10126195Abstract: Aspects of the present disclosure relate to a pressure sensor header for use with a pressure-sensing device. The pressure sensor header can be used in high-temperature environments. A pressure sensor header of the present disclosure can include a header shell, a sealing header glass that is sealed to the header shell, one or more electrical connections electrically isolated from the header shell by the sealing header glass, and a plate for sealing to a pressure-sensing device to be incorporated onto the pressure sensor header. The plate may include one or more ribs that allow for sealing of the plate to the header shell. The pressure sensor header may include a ribbed insert for sealing to the header shell and plate.Type: GrantFiled: July 18, 2016Date of Patent: November 13, 2018Inventors: Alexander A. Ned, Sorin Stefanescu
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Patent number: 10041852Abstract: A device is provided for sensing a pressure of a fluid medium, having a pressure-sensing element disposed in a sensor housing, the sensor housing having a first housing part provided with a pressure connector in the form of a metallic threaded part, and a second housing part provided with an electrical connection, the first housing part at least sectionally having an outer case formed as an external drive. The first housing part is injection-molded as a plastic injection-molded part onto the pressure connector.Type: GrantFiled: June 14, 2017Date of Patent: August 7, 2018Assignee: ROBERT BOSCH GMBHInventors: Bernhard Panhoelzl, Daniel Etter
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Patent number: 9791329Abstract: Certain embodiments of the disclosed technology provide systems and methods for an improved header and corresponding port associated with a transducer assembly. The header and port define mating threaded portions, thread stop portions, and a weld gap region. The thread stop portions are configured to mate and maintain a pre-loading tension between the threaded portions during and after applying a weld in the weld gap region. The weld gap region is configured to have a predetermined gap distance such that the weld seals the transducer without stress in the weld. The mating of the first and second thread stops are configured to maintain at least a portion of the pre-loading tension.Type: GrantFiled: March 22, 2016Date of Patent: October 17, 2017Assignee: Kulite Semiconductor Products, Inc.Inventors: Dominic Catalano, Sergio Radossi, Robert Gardner
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Patent number: 9648745Abstract: Systems and method for mounting the printed wiring assembly to the header assembly of a pressure sensor are provided. In at least one embodiment, the pressure sensor comprises: a header assembly; a printed wiring assembly having a pressure sensor mounted thereon; and, at least one substantially cylindrical member that mechanically couples the printed wiring assembly to the header assembly. The substantially cylindrical member has a substantially hollow core, a substantially circular first end attached to the header assembly, a substantially circular second end opposite the substantially circular first end, and at least one side extending from the substantially circular first end to the substantially circular second end of the cylindrical member. Furthermore, the substantially circular second end or the at least one side or both are attached to the printed wiring assembly.Type: GrantFiled: October 22, 2014Date of Patent: May 9, 2017Assignee: Honeywell International Inc.Inventors: Gregory C. Brown, Thomas J. Rolfer, Peter J. Dukich
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Patent number: 9631991Abstract: A device includes: a sensor module; a housing that houses the sensor module; a connector provided to the housing; a terminal provided to the connector; and an elastic electrically conductive member provided in a space between the sensor module and the connector and interposed between the terminal and a pad. The sensor module includes: a ceramic module body including a diaphragm and a cylindrical portion integral with a periphery of the diaphragm; a detector provided on a flat surface of the diaphragm; and the pad and an electronic component provided on a flat surface of the cylindrical portion radially outwardly adjacent to the flat surface of the diaphragm. The pad is electrically connected to the electrically conductive member.Type: GrantFiled: September 25, 2015Date of Patent: April 25, 2017Assignee: NAGANO KEIKI CO., LTD.Inventors: Shuji Tohyama, Nobutaka Yamagishi, Naoki Yamashita, Yusuke Midorikawa
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Patent number: 9581516Abstract: A differential pressure sensor has a sensor chip that is, between a first inner wall surface and a second inner wall surface of a sensor chamber, joined by a first adhesive agent layer between one face of the sensor chip and the first inner wall surface of the sensor chamber and joined through a second adhesive agent layer between other face of the sensor chip and the second inner wall surface of the sensor chamber. The first adhesive agent layer is an adhesive agent layer that has a Young's modulus that is smaller than the Young's modulus of a material that structures a sensor diaphragm. The second adhesive agent layer is an adhesive agent layer that has a Young's modulus that is smaller than the Young's modulus of the material that structures the sensor diaphragm and larger than the Young's modulus of the first adhesive agent layer.Type: GrantFiled: May 15, 2015Date of Patent: February 28, 2017Assignee: AZBIL CORPORATIONInventor: Ayumi Tsushima
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Patent number: 9581427Abstract: A mechanical quantity measuring device (semiconductor strain sensor) has a semiconductor chip including a plurality of piezoresistive elements formed on a front surface of a semiconductor substrate, a lead wire unit electrically connected to a plurality of electrodes of the semiconductor chip, and a plate member joined to a rear surface of the semiconductor chip. Further, the plate member includes a first region facing the rear surface of the semiconductor chip and a second region provided adjacent to the first region, and a thickness of the plate member in the first region is made larger than a thickness in the second region.Type: GrantFiled: December 6, 2011Date of Patent: February 28, 2017Assignee: Hitachi, Ltd.Inventors: Kisho Ashida, Hiroyuki Ohta
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Patent number: 9459161Abstract: The various technologies presented herein relate to a sensor for measurement of high forces and/or high load shock rate(s), whereby the sensor utilizes silicon as the sensing element. A plate of Si can have a thinned region formed therein on which can be formed a number of traces operating as a Wheatstone bridge. The brittle Si can be incorporated into a layered structure comprising ductile and/or compliant materials. The sensor can have a washer-like configuration which can be incorporated into a nut and bolt configuration, whereby tightening of the nut and bolt can facilitate application of a compressive preload upon the sensor. Upon application of an impact load on the bolt, the compressive load on the sensor can be reduced (e.g., moves towards zero-load), however the magnitude of the preload can be such that the load on the sensor does not translate to tensile stress being applied to the sensor.Type: GrantFiled: June 1, 2016Date of Patent: October 4, 2016Assignee: Sandia CorporationInventors: Paul C. Galambos, Thomas B. Crenshaw, Erik E. Nishida, Damon J. Burnett, Jeffrey W. Lantz
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Patent number: 9423315Abstract: A transducer baseplate includes a base, a protrusion extending from the base along a longitudinal axis, a pair of opposed transducer receptacles defined within the protrusion, and respective pressure plena. The pressure plena are separated by a plenum wall, each plenum being in fluid connection with an area external to the protrusion through a respective pressure line. The pressure lines provide a direct fluid path to their respective receptacles.Type: GrantFiled: February 25, 2014Date of Patent: August 23, 2016Assignee: Rosemount Aerospace Inc.Inventors: Saeed Fahimi, Odd H. Eriksen, Charles Little
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Patent number: 9116057Abstract: An integrated reference vacuum pressure sensor with an atomic layer deposition (ALD) coated input port comprises a housing with an port for a media to enter the housing; a substrate and stress isolation member in the housing; wherein a channel extends through the substrate and the stress isolation member, wherein a trace is embedded within the stress isolation member, wherein stress isolation member and substrate surfaces exposed to the channel are coated with an ALD; a sensor die bonded to the stress isolation member, the sensor die comprising a diaphragm having circuitry, wherein a side of the diaphragm is exposed to the channel and the circuitry is mounted to another side of the diaphragm; a via extending through the sensing die electrically connecting the circuitry to the trace; and a cover bonded to the stress isolation member, the cover having a recess, the sensor die in the recess.Type: GrantFiled: February 27, 2013Date of Patent: August 25, 2015Assignee: Honeywell International Inc.Inventor: Gregory C. Brown
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Patent number: 9080927Abstract: A pressure transducer assembly that uses static pressure compensation to capture low-level dynamic pressures in high temperature environments. In one embodiment, a method comprises receiving, at a first tube, a pressure, wherein the pressure includes a static pressure component and a dynamic pressure component; receiving, at a micro-filter, the pressure; filtering, by the micro-filter, at least a portion of the dynamic pressure component of the pressure; outputting, from the micro-filter, a filtered pressure; receiving, at a first surface of a first sensing element, the pressure; receiving, at a second surface of the first sensing element, the filtered pressure; measuring, by the first sensing element, a difference between the pressure and the filtered pressure, wherein the difference is associated with the dynamic pressure component of the pressure; and outputting, from the first sensing element, a first pressure signal associated with the dynamic pressure component of the pressure.Type: GrantFiled: November 1, 2013Date of Patent: July 14, 2015Assignee: KULITE SEMICONDUCTOR PRODUCTS, INC.Inventors: Adam Hurst, Alexander A. Ned, Joseph R. VanDeWeert
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Patent number: 9052245Abstract: A differential pressure and pressure transmitting device includes a pressure detecting portion and a rupture state detecting portion. The pressure detecting portion includes a first diaphragm that receives indirectly a pressure of a process fluid and that transmits a pressure, a second diaphragm that receives directly a pressure of a process fluid, and an insulating fluid-filled portion positioned between the first and second diaphragms and filled with an insulating fluid, and provided with a pair of electrodes on a periphery thereof. The rupture state detecting portion applies an electropotential to the electrodes to measure the electrical conductivity of the insulating fluid and to monitor for a rupture of a diaphragm.Type: GrantFiled: June 28, 2013Date of Patent: June 9, 2015Assignee: Azbil CorporationInventor: Keisuke Kihara
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Publication number: 20150135842Abstract: In a pressure and pressure difference transmitter that seals a sealing liquid for transmitting the pressure inside a pressure leading passage, the pressure and pressure difference transmitter forming a space between a diaphragm and a main body side wall surface, including the pressure leading passage connected to the main body side wall surface, and transmitting the pressure received by the diaphragm to a sensor through the sealing liquid sealed in the space and the pressure leading passage, a hydrogen occluding material for occluding hydrogen atoms of the sealing liquid is disposed at least in the sealing liquid, the main body side wall surface, or a part of a portion from the main body side wall surface to the sensor, with the hydrogen occluding material being formed with an uneven shape on the surface or being attached with a granular hydrogen occluding material.Type: ApplicationFiled: November 4, 2014Publication date: May 21, 2015Inventors: Ryo KUWANA, Atsushi FUSHIMI, Daisuke SHINMA, Hideki HANAMI, Isao HARA
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Patent number: 9027407Abstract: A pressure and temperature sensor comprising comprises at least a first resonator of the SAW type comprising a piezoelectric substrate, thinned at least locally, of the membrane type, a second resonator of the SAW type comprising a piezoelectric substrate and a third resonator of the SAW type comprising a piezoelectric substrate, characterized in that the first, the second and the third resonators are respectively on the surface of first, second and third individual piezoelectric substrates, each of the individual substrates being positioned on the surface of a common base section, locally machined away under said first resonator in such a manner as to liberate the substrate from said resonator so as to render it operational for the measurement of pressure. A method of fabrication for such a sensor is also provided.Type: GrantFiled: September 19, 2011Date of Patent: May 12, 2015Assignee: SenseorInventors: Luc Chommeloux, Philippe Menage
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Patent number: 9027409Abstract: Exemplary embodiments of the present invention provide a differential pressure transducer that comprises first and second diaphragms of different configurations, i.e., different diameters and/or thicknesses. The pressure transducer provides more versatility over prior art designs as the diaphragms can be of different configurations yet still maintain substantially similar back pressures. Therefore, the errors commonly associated with back pressures are eliminated because the back pressures from the diaphragms ultimately cancel out in the sensor's differential pressure measurement.Type: GrantFiled: December 19, 2012Date of Patent: May 12, 2015Assignee: Kulite Semiconductor Products, Inc.Inventors: Anthony D. Kurtz, Lou DeRosa, Robert Gardner
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Patent number: 9021885Abstract: A pressure sensor chip includes a sensor diaphragm that outputs a signal in accordance with a pressure differential, and first and second holding members that face, on peripheral edge portions thereof, one face and another face of a sensor diaphragm, and are in contact therewith. In the peripheral edge portion of the first holding member, in a region that faces the one face of the sensor diaphragm, a region on an outer peripheral side is a region that is bonded to the one face of the sensor diaphragm, and a region on an inner peripheral side is a region that is not bonded to the one face of the sensor diaphragm.Type: GrantFiled: March 13, 2013Date of Patent: May 5, 2015Assignee: Azbil CorporationInventors: Yuuki Seto, Tomohisa Tokuda
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Patent number: 9010191Abstract: A co-planar differential pressure sensor module is provided. The module includes a base having a pair of recesses. A pair of pedestals is also provided where each pedestal is disposed in a respective recess and is coupled to a respective isolation diaphragm. A differential pressure sensor has a sensing diaphragm and a pair of pressure sensing ports. Each port of the differential pressure sensor is fluidically coupled to a respective isolation diaphragm by a fill fluid. The module also includes circuitry coupled to the differential pressure sensor to measure an electrical characteristic of the sensor that varies with differential pressure. The base is constructed from a material that is suitable for submersion in seawater. A method of constructing a co-planar differential pressure sensor module is also provided. In another embodiment, a pressure sensor module is provided. The pressure sensor module includes a base having a recess. A pedestal is disposed in the recess and is coupled to an isolation diaphragm.Type: GrantFiled: September 28, 2012Date of Patent: April 21, 2015Assignee: Rosemount Inc.Inventors: David Strei, David Broden, Ivar Breen
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Publication number: 20150101414Abstract: A transducer baseplate includes a base, a protrusion extending from the base along a longitudinal axis, a pair of opposed transducer receptacles defined within the protrusion, and respective pressure plena. The pressure plena are separated by a plenum wall, each plenum being in fluid connection with an area external to the protrusion through a respective pressure line. The pressure lines provide a direct fluid path to their respective receptacles.Type: ApplicationFiled: February 25, 2014Publication date: April 16, 2015Applicant: ROSEMOUNT AEROSPACE INC.Inventors: Saeed Fahimi, Odd H. Eriksen, Charles Little
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Patent number: 8984950Abstract: A capacitor for use in sensors includes opposed first and second capacitor plates, wherein the second capacitor plate is mounted to the first capacitor plate by a flexible attachment. The flexible attachment is configured and adapted so that flexure of the attachment causes a change in the spacing between the first and second capacitor plates to cause a change in the capacitance thereacross.Type: GrantFiled: May 10, 2012Date of Patent: March 24, 2015Assignee: Rosemount Aerospace Inc.Inventor: David P. Potasek
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Publication number: 20150047435Abstract: A micromechanical measuring element has a sensitive element that comprises a diaphragm with an underside and an upper side. The micromechanical measuring element also has a cap, which is connected directly to the sensitive element. The sensitive element and the cap form a first chamber, which has a first opening.Type: ApplicationFiled: February 8, 2013Publication date: February 19, 2015Inventors: Bernhard Ostrick, Michael Schiffer
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Publication number: 20150025817Abstract: There is provided a method of monitoring a change in height of a device, the device comprising a sensor for measuring the air pressure at the device, the method comprising determining a pressure change threshold from a pre-determined height change and an estimate or measurement of air pressure; obtaining a plurality of measurements of the air pressure at the device; determining a change in the air pressure from two or more of the measurements; and determining if the height of the device has changed by more than the pre-determined height change using the determined change in the air pressure and the determined pressure change threshold.Type: ApplicationFiled: March 11, 2013Publication date: January 22, 2015Applicant: Koninklijke Philips N.V.Inventor: Warner Rudolph Theophile Ten Kate
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Publication number: 20140360501Abstract: The invention relates to a gas pressure measurement system comprising at least one gas circuit and at least one pressure sensor (6) arranged so as to be able to measure the pressure of the gas in at least part of the gas circuit, said at least one pressure sensor being protected by a protective membrane permeable to gas, arranged between said at least one pressure sensor and the gas circuit. It further comprises a flexible intermediate piece formed by an elastically deformable material arranged between said at least one pressure sensor and the protective membrane, said flexible intermediate piece comprising an internal passage putting the protective membrane and said at least one pressure sensor in fluid communication. Patient ventilation apparatus comprising a gas circuit able to convey gas between a gas source and a patient, as well as such a gas pressure measurement system.Type: ApplicationFiled: June 6, 2014Publication date: December 11, 2014Inventors: Hadrien GUIDUCCI, Damien Germani
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Patent number: 8904875Abstract: A pressure sensor including: a casing fluid-tightly divided into a first and a second chamber by a deformable membrane and means for connecting the first chamber to the environment and the second chamber to a tank for an operative fluid of an electric household appliance for detecting the level thereof according to a deformation of the membrane upon the establishment of a differential pressure in the two chambers; wherein the membrane carries toward the first chamber a rigid disc operatively associated with a switch carried by the casing to either close or open the switch upon the deformation of the membrane beyond a predetermined entity.Type: GrantFiled: August 6, 2010Date of Patent: December 9, 2014Assignee: Illinois Tool Works Inc.Inventors: Zvonko Lesjak, Boris Velikonja
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Patent number: 8887573Abstract: A vacuum sensor for sensing vacuum in a sealed enclosure is provided. The sealed enclosure includes active MEMS devices desired to be maintained in vacuum conditions. The vacuum sensor includes a motion beam anchored to an internal surface in the sealed enclosure. A driving electrode is disposed beneath the motion beam and a bias is supplied to cause the motion beam to deflect through electromotive force. A sensing electrode is also provided and detects capacitance between the sensing electrode disposed on the internal surface, and the motion beam. Capacitance changes as the gap between the motion beam and the sensing electrode changes. The amount of deflection is determined by the vacuum level in the sealed enclosure. The vacuum level in the sealed enclosure is thereby sensed by the sensing electrode.Type: GrantFiled: February 21, 2012Date of Patent: November 18, 2014Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tung-Tsun Chen, Jui-Cheng Huang, Chung-Hsien Lin
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Publication number: 20140298914Abstract: The present invention relates to a retrievable pressure sensor for in situ measurement of pressure in a process fluid in a pipe/chamber. The pressure sensor comprising a pressure-transferring device and an outer sensor part having a pressure sensing element attached at a distance from the pipe/chamber where the pressure is to be measured. The pressure-transferring device comprises a first device for sealing attachment in an opening in a wall of the pipe/chamber where the pressure is to be measured, and has a first separation diaphragm for separating between the process fluid and the pressure-transferring fluid. The pressure-transferring device further comprises a second device for attachment at a distance from the pipe/chamber where the pressure is to be measured. The pressure-transferring device comprises a first cavity with a pressure-transferring fluid, wherein the first cavity comprising a capillary tube for pressure transferring connection between the first device and the second device.Type: ApplicationFiled: September 7, 2012Publication date: October 9, 2014Inventors: Paal Martin Vagle, Bjørn Erik Seeberg
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Publication number: 20140251019Abstract: A coplanar process fluid pressure sensor module is provided. The module includes a coplanar base and a housing body. The coplanar base has a pair of process fluid pressure inlets, each having an isolator diaphragm. The housing body is coupled to the coplanar base at an interface between the coplanar base and the housing body. A differential pressure sensor is operably coupled to the pair of process fluid pressure inlets, and is disposed proximate the coplanar base within the housing body.Type: ApplicationFiled: May 20, 2014Publication date: September 11, 2014Applicant: Rosemount Inc.Inventors: Robert C. Hedtke, David A. Broden