Abstract: A pressure sensing unit is provided. The pressure sensing unit includes a membrane and a pressure sensing pad group. The membrane has a first surface and a second surface. The pressure sensing pad group includes a first pressure sensing pad, a second pressure sensing pad, and a ground pad that are spaced apart from one another. The ground pad and one among the first pressure sensing pad and the second pressure sensing pad are located at the first surface of the membrane, another one among the first pressure sensing pad and the second pressure sensing pad is located at the second surface of the membrane, and an orthographic projection of the ground pad projected onto a reference plane is located between orthographic projections of the first pressure sensing pad and the second pressure sensing pad that are projected onto the reference plane. Therefore, a signal-to-noise ratio can be increased and an erroneous detection can be prevented.

Abstract: A measuring device 1 according to the present disclosure measures a state of a solution L. The measuring device 1 includes a measuring unit 10 that outputs a measurement signal associated with the state of the solution L, a protection unit 20 attached to the measuring unit 10, and a controller 40 that obtains the information on the state of the solution L on the basis of a measurement signal output from the measuring unit 10. The measuring unit 10 has a first part P1 in a usable state that contributes to output of the measurement signal by coming into contact with the solution L, and a second part that is isolated from the solution L by the protection unit 20 and is in a standby state for measurement.

Abstract: An electronic device is provided. The electronic device includes a housing, a flexible display configured to move relative to at least a portion of the housing, and at least one noise detection circuitry disposed in the housing. The at least one noise detection circuitry may include a substrate, a microphone circuitry disposed on the substrate, a vibration detection sensor disposed on the substrate, a shielding member disposed on the substrate and surrounding at least a portion of the vibration detection sensor, and a waterproofing member disposed on the shielding member and covering the vibration detection sensor.

Abstract: Pressure sensors include stacking of sensor capacitors on top of reference capacitors. A pressure cavity may be extended below a bottom electrode. The pressure sensors may include a mechanical link of a top membrane with the bottom electrode in order to form a dual membrane, or a mechanical link of the top membrane, the bottom electrode and an intermediate electrode within a cavity. A pressure sensor includes a first and second pressure sensing portions, each including a first and second rigid electrodes, and a deflectable membrane structure. The second rigid electrode is between the first rigid electrode and the deflectable membrane structure arranged in a vertical configuration. The first and second rigid electrodes of the first and second pressure sensing portions form respective reference capacitors, and the second rigid electrodes and the deflectable membrane structures form respective sensing capacitors.

Abstract: A sensor device includes an electrically conductive body adapted to accommodate a first printed circuit board (PCB) and a second PCB, a flexible electrically conductive device connecting the first PCB and the second PCB, and an electrically conductive spring held between the first PCB and the second PCB by a snap-fit, a form-fit or a press-fit connection. A first portion of the electrically conductive spring is pressed against one of the first PCB and the second PCB and a second portion of the electrically conductive spring is pressed against the electrically conductive body to maintain an electrical connection between the electrically conductive body, the first PCB, and the second PCB.

Abstract: A pressure detector is provided that includes a case connectable to a flow route for liquid, and a membrane member attached inside the case and with which a liquid-phase portion to be supplied with the liquid in the flow route and a gas-phase portion to be supplied with gas are separated from each other, the membrane member being displaceable in accordance with a pressure of the liquid supplied to the liquid-phase portion, the pressure detector detecting the pressure of the liquid in the flow route by detecting a pressure in the gas-phase portion with a pressure detection sensor. The pressure detector includes a hydrophobic portion that allows gas to pass through but blocks liquid from passing through, the hydrophobic portion being provided between the gas-phase portion and the pressure detection sensor.

Abstract: A pressure/force sensor comprises a diaphragm structure including a sensing element and a lead structure extending from the diaphragm structure and including first and second traces electrically coupled to the sensing element. The diaphragm structure and the lead structure include a circuit assembly comprising a common insulating layer and a common conductor layer on the insulating layer. The conductor layer includes at least a portion of the sensing element and at least the first trace.

Abstract: Provided is a particle trapping apparatus for preventing an error of a pressure measurement. A particle trapping apparatus for preventing an error of a pressure measurement includes a pressure-measuring means; a measuring pipe for connecting the pressure-measuring means to a processing chamber; and a trapping means for capturing particles in a gas flowing through the measuring pipe, wherein the trapping means is coupled to the measuring pipe or is a portion of the measuring pipe.

Abstract: Provided are a pressure difference sensor, and a manufacturing method and an application thereof. A manner of bonding three layers of wafers is adopted, and the sensor includes an upper structure, an intermediate structure and a lower structure. Each of the upper structure and the intermediate structure is manufactured by a silicon-on-insulator (SOI) wafer, the lower structure is manufactured by patterned doped intrinsic silicon; and a lead pad of each of the upper electrode, and the intermediate electrode and the lower electrode is located on a corresponding one of three-stepped steps at a side of the pressure difference sensor. Annular through holes are formed around the upper electrode and the lower electrode. A constant capacitance of a capacitance signal outputted by an upper capacitor of the sensor by extending an electric field line path of the constant capacitor part.

Abstract: A diameter measurement device for measuring the diameter of a wireline cable dynamically during moving in and out of a borehole. The measurement device has a first pair of opposed shafts, a rotating roller on each shaft of said first pair of opposed shafts, a first resilient member mounted to urge at least one of the shafts of said first pair of opposed shafts toward the wireline cable to be measured, and a first intrinsic measuring unit operatively associated with the first resilient member to measure the displacement thereof.

Abstract: A filter element sensor module having a housing, a sidewall of the housing including a recessed portion. The sensor module including a sensor assembly being provided within the housing about a sensor port interface being provided at one end of the housing. The sensor module also including processing circuitry being configured to receive signals from the sensor assembly and communication module, the communication module being configured to transmit one or more sensed parameters from the sensor assembly.

Abstract: A pressure sensor includes a base, a membrane disposed at a distance from the base, a first fixed electrode provided on the base so as to be opposite to the membrane and including a dielectric layer, and a second fixed electrode provided on the base so as to be opposite to the membrane. When pressure that acts on the membrane increases to cause the membrane to sag toward the base, the membrane comes in contact with the dielectric layer of the first fixed electrode before a distance between the membrane and the second fixed electrode becomes constant.

Abstract: A pressure sensor device for a pressure sensor, in particular a capacitive pressure sensor, having a pressure chamber bounded by a movable sensing membrane and a stationary counterelectrode of the pressure sensor device. The sensing membrane and the counterelectrode each run in the longitudinal direction and the transverse direction of the pressure sensor device. The sensing membrane is directly or indirectly spring-mounted, in particular spring-mounted in two-dimensional fashion, in the pressure chamber relative to the counterelectrode by at least one micromechanical spring element, in particular a plurality of micromechanical spring elements.

Abstract: A motor casing and a combination of a motor casing and a plug connection, the motor casing being designed for a drive of movable components of a vehicle, in particular sunroofs, blinds or roofs of convertible. A plug is inserted in the motor casing and a gap is provided between the motor casing and the plug connection. According to the disclosure, at least one projection is provided in the area of the gap and avoids play between the motor casing and the plug connection.

Abstract: According to one aspect of the present disclosure, an electronic device may include: a communication interface configured to receive, from a touch pen, force information about a force of the touch pen exerted onto an object when the object is in contact with the touch pen; a pulse wave measurer configured to measure a pulse wave of the object when the object is brought into contact with the electronic device by the force of the touch pen; and a processor configured to estimate a blood pressure of the object based on the force information and the pulse wave.

Abstract: A pressure sensor includes a sensor chip. The sensor chip has two diaphragms, recessed portions that serve as first pressure inlet chambers disposed so as to respectively adjoin top surfaces of the diaphragms, and recessed portions that serve as second pressure inlet chambers disposed so as to respectively adjoin bottom surfaces of the diaphragms. A cavity is provided in the sensor chip such that, when a difference between pressures respectively applied to a top surface and bottom surface of the diaphragm is zero, an output voltage of a Wheatstone bridge circuit made up of strain gauges provided in the diaphragm is zero.

Abstract: A capacitive measurement device for indicating when two surfaces moving relative to each other are spaced less than a predetermined distance apart. The device comprises a probe having an elongated conductor, an insulating core, a conducting inner guard, an insulating interlayer, and a conducting sheath. A portion of the conductor, insulating core and conducting inner guard form a probe tip which extends beyond the insulating interlayer and conducting sheath by a predetermined offset. The probe is configured to extend from a first surface by a predetermined distance and to generate a signal when the tip is contacted by a second surface.

Abstract: The device comprises a case body comprising a base body provided with a chamber for measuring the fluid and an electrical connector body, assembled to delimit together a housing internal to the case body, a detection element, an intermediate part for positioning the detection element including a transverse space for receiving the detection element and an environment gasket for sealing the internal housing with respect to the external environment. The part and the connector are shaped to cooperate by nesting in order to ensure a relative positioning of the part relative to the connector body and in a nested position, the part and the connector delimit together an external peripheral groove configured to receive the environment gasket.

Abstract: A Parametric Disturbance Sensor is provided. The parametric disturbance sensor has a stripline enclosure having an internal chamber; a stripline sensor core positioned within the internal chamber; a fill material filling the internal chamber so that the stripline sensor is not in direct contact with the stripline sensor core enclosure; and a cable-end connector connected to the stripline sensor core for connecting the stripline sensor core to a processing unit.

Abstract: A sensor element includes: a supporting body; and a sensor body, the sensor body being planar in shape, being made of an elastic material, and having a first surface and a second surface coated so as to be electrically conductive. The sensor body includes a measuring segment and a fastening segment. A layer thickness of the fastening segment is greater than a layer thickness of the measuring segment.

Abstract: An inertial sensor includes a substrate, a first detection element that is provided on a first surface of the substrate and includes a first movable portion displaceable with respect to the substrate and a first fixed portion connected to the first movable portion and fixed to the substrate, and a second detection element that is provided on a second surface in a front-back relationship with the first surface and includes a second movable portion displaceable with respect to the substrate and a second fixed portion connected to the second movable portion and fixed to the substrate.

Abstract: An industrial process temperature transmitter for measuring a temperature of a process medium includes a temperature sensing unit, a compensation circuit, an output circuit and a housing. The temperature sensing unit includes a process temperature sensor and a secondary temperature sensor. A temperature signal that is indicative of the temperature of the process medium is produced based on a process temperature signal output from the process temperature sensor and a secondary temperature signal output from the secondary temperature sensor. The compensation circuit compensates the temperature signal for a response time of the temperature measurement to a change in the temperature of the process medium, and outputs a compensated temperature signal. The output circuit produces a temperature output as a function of the compensated temperature signal. The housing is attached to an exterior of the process vessel and contains the secondary temperature sensor.

Abstract: A battery system for an electric vehicle includes at least one battery module and a management module. The battery module includes a plurality of battery cells, and an outer casing which defines therein an accommodation space for accommodation of the battery cells, and which is configured to permit a thermal management fluid to flow through the accommodation space to thereby provide thermal management to the battery cells. The management module includes at least one sensing unit and is coupled to the battery module to permit the sensing unit to be submerged in the thermal management fluid for collecting information of the battery cells and the thermal management fluid.

Abstract: MEMS based sensors, particularly capacitive sensors, potentially can address critical considerations for users including accuracy, repeatability, long-term stability, ease of calibration, resistance to chemical and physical contaminants, size, packaging, and cost effectiveness. Accordingly, it would be beneficial to exploit MEMS processes that allow for manufacturability and integration of resonator elements into cavities within the MEMS sensor that are at low pressure allowing high quality factor resonators and absolute pressure sensors to be implemented. Embodiments of the invention provide capacitive sensors and MEMS elements that can be implemented directly above silicon CMOS electronics.

Abstract: A device comprising a micro-electro-mechanical system (MEMS) substrate with protrusions of different heights that has been integrated with a complementary metal-oxide-semiconductor (CMOS) substrate is presented herein. The MEMS substrate comprises defined protrusions of respective distinct heights from a surface of the MEMS substrate, and the MEMS substrate is bonded to the CMOS substrate. In an aspect, the defined protrusions can be formed from the MEMS substrate. In another aspect, the defined protrusions can be deposited on, or attached to, the MEMS substrate. In yet another aspect, the MEMS substrate comprises monocrystalline silicon and/or polysilicon. In yet even another aspect, the defined protrusions comprise respective electrodes of sensors of the device.

Abstract: A filter element sensor module having a housing, a sidewall of the housing including a recessed portion. The sensor module including a sensor assembly being provided within the housing about a sensor port interface being provided at one end of the housing. The sensor module also including processing circuitry being configured to receive signals from the sensor assembly and communication module, the communication module being configured to transmit one or more sensed parameters from the sensor assembly.

Abstract: A method for certifying and deploying instruction code includes communicating, from a developer system, a first record to a decentralized database that indicates an availability of the instruction code. A second record is received by the developer system from the decentralized database and indicates a request to certify the instruction code, the second request having been communicated by a certification system. In response to receipt of the second record the developer system communicates a third record to the decentralized database that authorizes the certification system to retrieve the instruction code from the developer system. The developer system subsequently communicates the instruction code to the certification system. Communication of the instruction code facilitates execution of the instruction code on the certification system to thereby certify functionality of the instruction code.

Abstract: A sealed force-sensitive resistor is provided. The sealed force-sensitive resistor includes: a bottom layer; a first conductive element attached to the bottom layer and a top layer. The top layer is sealed to the bottom layer in an airtight manner. The force-sensitive resistor further comprises a spacer ring surrounding the first conductive element and a flexible top sensor layer. The top sensor layer is attached across the spacer ring and comprises a second conductive element facing the first conductive element. The flexible top sensor layer is moveable in use in relation to the flexible bottom layer to vary the resistance of the force sensitive resistor. The force-sensitive resistor further comprises an air permeable spacer material between the top and bottom layer.

Abstract: The present disclosure provides a semiconductor structure including a first chip having a first dielectric surface, a second chip having a second dielectric surface facing the first dielectric surface and maintaining a distance thereto, and an air gap between the second dielectric surface and the first dielectric surface. The first chip includes a plurality of first conductive lines in proximity to the first dielectric surface and parallel to each other, two adjacent first conductive lines each having a sidewall partially exposed from the first dielectric surface. The present disclosure further provides a method for manufacturing the semiconductor structure described herein.

Abstract: A pressure sensor comprises a first substrate and a cap attached to the first substrate. The cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit. The cap is attached to the first substrate such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port. The first substrate comprises a support portion the cap is attached to, a contact portion for electrically connecting the pressure sensor to an external device, and one or more suspension elements for suspending the support portion from the contact portion.

Abstract: A method for manufacturing a micromechanical component including a substrate and a cap which is joined to the substrate, and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. In a first step, an access opening connecting the first cavity to surroundings of the micromechanical component being formed in the substrate or in the cap. In a second step, the first pressure and/or the first chemical composition in the first cavity being set. In a third step, the access opening being sealed by introducing energy or heat into an absorbing portion of the substrate or the cap with the aid of a laser, a reversible getter for further setting the first pressure and/or the first chemical composition being introduced into the first cavity chronologically prior to the third step.

Abstract: MEMS device, in which a body made of semiconductor material contains a chamber, and a first column inside the chamber. A cap of semiconductor material is attached to the body and forms a first membrane, a first cavity and a first channel. The chamber is closed on the side of the cap. The first membrane, the first cavity, the first channel and the first column form a capacitive pressure sensor structure. The first membrane is arranged between the first cavity and the second face, the first channel extends between the first cavity and the first face or between the first cavity and the second face and the first column extends towards the first membrane and forms, along with the first membrane, plates of a first capacitor element.

Abstract: A station for compliance testing of unmanned vehicles comprises a dedicated area for acceptance of an unmanned vehicle. The dedicated area is configured for permitting the unmanned vehicle to be in a first inspection position. The station further comprises a transmitter. The transmitter is directed towards the dedicated area. The transmitter is configured to instruct the unmanned vehicle to perform a behavior. The station further comprises a sensor. The sensor is directed towards the dedicated area. The sensor is configured to detect a non-compliance of the unmanned vehicle. The detected non-compliance is in response to the instructed performed behavior of the unmanned vehicle.

Abstract: In some examples, a method of fabricating a transducer includes disposing a plurality of anchors on a substrate and disposing a sealing material and a device layer over the anchors and the substrate to form a cavity, the sealing material sealing the cavity. The method may further include forming, in the device layer, a plate and at least one spring member. The at least one spring member may be supported by at least one anchor of the plurality of anchors, and the at least one spring member may support the plate to allow relative movement between the plate and the substrate.

Abstract: A micromechanical component including a mounting including a spanned diaphragm, which is warpable via a pressure difference between a first diaphragm side and a second diaphragm side against a diaphragm counter force according to a diaphragm spring constant of the diaphragm, and at least one actuator electrode, which is connected to the diaphragm and adjustable against a spring force according to at least one spring constant of at least one spring with the aid of a warping of the diaphragm, an overall system spring constant being definable as the sum of a diaphragm spring constant of the diaphragm and the spring constant of the single spring, or an overall spring constant of all springs, via which the at least one actuator electrode is connected to the mounting, and the spring constant of the single spring or of all springs being at least 5% of the overall system spring constant.

Abstract: A flange-set for a pressure difference measuring transducer with two flanges mountable on external sides of a measuring mechanism of the pressure difference measuring transducer lying opposite one another and containing membranes to be loaded with pressures, as well as a pressure difference measuring transducer equipped with the flange-set. Each of the flanges comprises: a wall, which in the mounted state covers one of the two membranes of the measuring mechanism and encloses a pressure chamber bordering on such membrane. Arranged on a first side of the wall is a first process connection, which includes a pressure duct connection region, in which opens a pressure duct extending through the flange to the pressure chamber.

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to pressure sensors and methods of manufacture. The structure includes: a top membrane of semiconductor material having edges defined by epitaxial material and a liner material; a back gate under the top membrane; and a cavity defined between the top membrane and the back gate.

Abstract: The present disclosure relates to a capacitive force sensor. The capacitive force sensor includes a planar base body, a supported membrane body, two spacers disposed spaced apart to each other, where the membrane body abuts the planar base body via the spacers, and wherein a cavity is formed between the membrane body and the planar base body to allow displacement or deflection of the membrane body under a force onto the membrane body in the area between the spacers. The membrane body forms a first electrode and, a second electrode is provided on the planar base body, wherein the first and second electrode define a first precision capacitor with changing measuring capacity depending on the force. An electrical bracket extends from each of the spacers for electrically contacting the first electrode and forms a bend between each of the associated spacer and a bottom of the base body.

Abstract: A pressure sensor device which uses appropriate passivation materials/patterns to make the device more robust and resistant to a hot and humid environment. The pressure sensor device uses moisture resistant passivation material(s) covering exposed glass areas, including sidewalls, and bonding interfaces to avoid the glass and bonding interfaces absorbing and reacting with moisture, thus maintaining the integrity of the device output after exposure in a humid/hot environment. These passivation materials/patterns used for the MEMS devices described may be applied to any MEMS based sensors and actuators using glass as one type of material for fabrication. The pressure sensor devices may be front side absolute pressure sensors, differential pressure sensors, or back side absolute pressure sensors.

Abstract: A Microelectromechanical system (MEMS) microphone comprises a base unit and a driving system disposed on the base unit. The driving system comprises a first diaphragm, a second diaphragm spaced apart from the first diaphragm, and a comb finger counter electrode assembly comprising a moving electrode member, the counter electrode assembly is mechanically coupled to the first and second diaphragms. The driving system further comprises a side wall mechanically coupled the first diaphragm to the second diaphragm defining a sealed electrode region and the sealed electrode region having an encapsulated gas pressure and the comb finger counter electrode assembly is disposed within the sealed electrode region.

Abstract: A capacitive sensor includes a sensor sheet having a central electrode layer and a measuring instrument. A first dielectric layer is laminated on the upper surface of the central electrode layer. A second dielectric layer is laminated on the lower surface of the central electrode layer. A first outer electrode layer is formed on the surface of the first dielectric layer. A second outer electrode layer is formed on the surface of the second dielectric layer. The central electrode layer and the first outer electrode layer face each other at a first detection portion. The central electrode layer and the second outer electrode layer face each other at a second detection portion. Capacitances of the detection portions change with deformation. The state of deformation of the sensor sheet is measured on the basis of the total capacitance by adding the capacitances of the first detection portion and the second detection portion.

Abstract: A micromechanical component having a substrate, a membrane that covers an opening structured into the substrate from a first side of the substrate and that can be warped by a pressure difference between the first side of the substrate and a second side, oriented away from the first side, of the substrate, and having at least one actuator electrode that is connected at least to the membrane in such a way that the at least one actuator electrode can be displaced relative to the substrate by a warping of the membrane, the at least one actuator electrode being capable of being displaced relative to the substrate by the warping of the membrane, in each case along a displacement axis oriented parallel to the second side of the substrate. A production method for a micromechanical component is also described.

Abstract: Embodiments of the present invention provide a display substrate, a display device, a pressure detection system and a detection method thereof, which relate to the field of display technologies and is able to integrate the ambient pressure testing function in the display substrate for the convenience of being carried by people when going out, wherein the display substrate comprises a base substrate and a pressure sensing structure located on the base substrate configured to test the ambient pressure. The pressure sensing structure comprises a first pressure sensitive electrode and a second pressure sensitive electrode arranged opposite to each other, and a plurality of insulating pillars arranged at intervals between the first pressure sensitive electrode and the second pressure sensitive electrode, wherein the first pressure sensitive electrode is in contact with the base substrate.

Abstract: A pressure sensor is disclosed. The pressure sensor has a sensor module having a strain gauge measuring a pressure of a gas flowing into a passage of the sensor module, a substrate electrically connected to the strain gauge, a frame covering a portion of the sensor module and supporting the substrate, a terminal electrically connected to the substrate and contacting a contact point of an external device, a terminal holder supporting the terminal, and a housing having an end connected to the sensor module and covering a portion of the terminal holder.

Abstract: A capacitance-detection pressure switch and pressure sensor that, in the connection between a diaphragm used as one electrode and a signal line for detecting a signal from the diaphragm, can ensure stable conduction without exerting an influence on operating characteristics of the diaphragm. A capacitance-detection type pressure switch of the present invention includes a metallic diaphragm that is displaced in response to a change in pressure of an operating medium supplied from a conduit, a movable electrode connected electrically to the diaphragm, a fixed electrode provided at an atmospheric pressure side of the diaphragm opposing the conduit, and an insulating film ensuring insulation between the fixed electrode and the diaphragm, wherein an electrode contact portion for connection to the movable electrode is formed as at least one projection extending toward an exterior on a part of the outer periphery of the diaphragm.

Abstract: A capacitive force sensor 101 of the present invention includes a plurality of cells each including a lower electrode 104, a movable member that includes an upper electrode 107 and has flexibility, and a support 105b arranged to movably support the movable member and to form a gap 106 between the upper and the lower electrodes. The plural cells are grouped into elements each including one or more of the cells, and the one or more cells in a same element are electrically connected to each other.

Abstract: A physical quantity measuring sensor includes: a joint having a projection; a ceramic sensor module including a diaphragm and a cylindrical portion integrated with the diaphragm and provided to the projection; and an O-ring interposed between a sensor-module flat portion extending in a direction orthogonal to an axial direction of the cylindrical portion and a joint flat portion extending in a direction orthogonal to an axial direction of the projection.

Abstract: A differential pressure sensor comprises a measuring diaphragm made of an electrically conductive material, two electrically insulating mating bodies, and at least one capacitive transducer. The measuring diaphragm is connected to the mating bodies in a pressure-tight manner with the formation of a measuring chamber in each case along a circumferential edge. The mating bodies each have a diaphragm bed which is concave in the center, wherein the mating bodies each have a pressure channel which extends through the mating body into the measuring chamber. The capacitive transducer has at least one mating body electrode which is formed by a metallic coating of the surface of the mating body in the region of the diaphragm bed and with which contact can be made by a metallic coating of the wall of the pressure channel.

Abstract: A method for operating a pressure transducer which transducer includes a pressure sensor having a measurement membrane and a base body, between which a cavity is enclosed with a reference pressure, wherein utilizing a control and calculation unit in a pressure measuring mode, the capacitance of a measuring capacitor and a reference capacitor are determined, and a measured value of the media pressure is calculated as a function thereof, where during a diagnostics mode, the capacitance is determined and evaluated for a diagnostics capacitor formed by one measuring capacitor electrode and one reference capacitor electrode arranged on the same surface such that changes in the relative humidity in the cavity and/or process medium penetrating through a tear can be detected with via the diagnostic capacitor, and a warning signal regarding an impending malfunction can thus be generated and output to a service device in a timely manner.

Abstract: A fluid flow velocity sensor using a differential pressure measurement includes a stack having a tip pointing in a first direction, the stack including first and second plates arranged in parallel one another along the first direction; and a pressure-sensitive diaphragm arranged between the first and second plates along the first direction, the pressure-sensitive diaphragm being spaced apart from the first plate by a first cavity and from the second plate by a second cavity. The first cavity is entirely sealed, except at the tip of the stack, so as to be under a stagnation pressure during operation of the fluid flow velocity sensor. The second cavity is opened so as to be under a reference pressure during operation of the fluid flow velocity sensor. The fluid flow velocity sensor includes a detector to measure a parameter representative of the differential pressure between the first and the second cavities.