With Electrical Readout Patents (Class 73/717)
  • Patent number: 11543317
    Abstract: A metallic pressure measuring cell having a base body, a metallic membrane situated and a pressure sensor situated in a sensor chamber of the base body, wherein the pressure on the membrane is transmitted to the pressure sensor by a connecting channel formed between a membrane chamber and a sensor chamber, wherein the chambers and connecting channel are filled with a pressure transmitting medium.
    Type: Grant
    Filed: June 21, 2021
    Date of Patent: January 3, 2023
    Assignee: VEGA GRIESHABER KG
    Inventors: Jochen Huber, Julian Epting
  • Patent number: 11519804
    Abstract: A pressure and temperature measuring device with improved compact design and installation having a base (1) with an elongated geometry, arranged according to the longitudinal axis (A) inside the casing (16) and having a partition (5), a back (18), a platform (19) and a plinth (10); the partition (5) has an inner plane (5?) oriented towards the back (18) and parallel to the longitudinal axis (A) and an outer plane (5?) that forms an acute angle with the inner plane (5?), the back (18), the platform (19) and the inner plane (5?) of the partition (5) define a slot (17) and receives the electronic circuit board (3), the outer plane (5?) of the partition (5) defines a support surface to support together with the plinth (10) for the pressure-sensitive element (2), the outer surface (5?) of the partition (5) having an opening (7) that gives way to the conduit (8).
    Type: Grant
    Filed: June 11, 2021
    Date of Patent: December 6, 2022
    Assignee: CEBI ELECTROMECHANICAL COMPONENTS SPAIN, S.A.
    Inventors: Lesmes Nicolas Haro, Javier Garcia Izaguirre, Sergio Diez Garcia
  • Patent number: 11441962
    Abstract: The invention includes differential pressure transducer assembly systems and methods in which headers are configured with header pins that extend perpendicular with respect to an axis of the assembly and through header sidewalls, enabling a compact configuration, ease of assembly, enhanced reliability and/or redundancy. Channels and ports defined in a housing portion of the assembly are configured to enable the use of substantially straight tubing sections for routing main and/or reference pressures to one or more differential sensing elements mounted on the headers. Two or more headers with associated sensing elements can be stacked to provide redundant differential pressure sensing.
    Type: Grant
    Filed: November 10, 2020
    Date of Patent: September 13, 2022
    Assignee: KULITE SEMICONDUCTOR PRODUCTS, INC.
    Inventors: Robert Gardner, Louis DeRosa
  • Patent number: 11088313
    Abstract: A layered body includes: a polymer film (A), the polymer film (A) including an organic piezoelectric material having a weight average molecular weight of from 50,000 to 1,000,000, having a standardized molecular orientation MORc at a reference thickness of 50 ?m of from 1.0 to 15.0 as measured by a microwave transmission molecular orientation analyzer, having a degree of crystallinity of from 20% to 80% as measured by a DSC method, and having an internal haze of 50% or less with respect to visible light; and a peelable protective film (B) that contacts one main face of the polymer film (A). The maximum indentation depth h max on a face of the protective film (B) that contacts the polymer film (A) is from 53 nm to 100 nm as measured by a nanoindentation method.
    Type: Grant
    Filed: March 8, 2017
    Date of Patent: August 10, 2021
    Assignee: MITSUI CHEMICALS, INC.
    Inventors: Kazuhiro Tanimoto, Hiroyuki Sekino, Masaki Amano
  • Patent number: 10890508
    Abstract: The invention provides a large-amplitude vertical-torsional coupled free vibration device, which belongs to the technical field of vertical-torsional coupled free vibration device for wind tunnel test. The gear blocks are consolidated at both ends of the beam. The screws, beam, and the gear blocks are fixed on the model, and they can fulfil the vertical-torsional coupled free vibration. The toothed plate is attached to the sliding block that iteratively moving along the vertical guide rail which is fixed to the ground. The vertical springs attached to the sliding blocks provide both vertical and torsional linear stiffness for the suspension vibration system. The springs only have vertical linear tensile deformations without any lateral tilt, which ensures the linear vertical and torsional stiffness of the model, and the lateral freedom is effectively restrained.
    Type: Grant
    Filed: August 28, 2017
    Date of Patent: January 12, 2021
    Assignee: DALIAN UNIVERSITY OF TECHNOLOGY
    Inventors: Fuyou Xu, Donglei Zeng, Jing Yang
  • Patent number: 9310229
    Abstract: A sensor system having a sensor element, a housing in which sensor element is situated and which seals the sensor element from the outside world, at least one first electrical contact element which is electrically coupled with the sensor element; a plug connector, which has at least one second electrical contact element, and at least one spring element which is coupled between the at least one second electrical contact element and the at least one first electrical contact element for electrical contacting, so that the sensor element is electrically connected to the second electrical contact element of the plug connector.
    Type: Grant
    Filed: February 1, 2013
    Date of Patent: April 12, 2016
    Assignee: ROBERT BOSCH GMBH
    Inventors: Hans-Juergen Herderich, Hans-Martin Irslinger, Juergen Kurle, Florian Guffarth
  • Patent number: 9221171
    Abstract: A complex device includes: a substrate having a thick portion, a cavity and a membrane for bridging the cavity; and multiple piezoelectric elements having a lower electrode, a piezoelectric film and an upper electrode. A part of the piezoelectric elements has a projecting portion arranged on the upper electrode. The part of piezoelectric elements (30) provides a vertical pressure detection element. The piezoelectric elements further have an ultrasonic element other than the vertical pressure detection element. The ultrasonic element is arranged over at least the cavity of the substrate in a horizontal direction.
    Type: Grant
    Filed: August 28, 2012
    Date of Patent: December 29, 2015
    Assignee: DENSO CORPORATION
    Inventors: Makiko Sugiura, Hirofumi Higuchi
  • Publication number: 20150101414
    Abstract: A transducer baseplate includes a base, a protrusion extending from the base along a longitudinal axis, a pair of opposed transducer receptacles defined within the protrusion, and respective pressure plena. The pressure plena are separated by a plenum wall, each plenum being in fluid connection with an area external to the protrusion through a respective pressure line. The pressure lines provide a direct fluid path to their respective receptacles.
    Type: Application
    Filed: February 25, 2014
    Publication date: April 16, 2015
    Applicant: ROSEMOUNT AEROSPACE INC.
    Inventors: Saeed Fahimi, Odd H. Eriksen, Charles Little
  • Patent number: 8984950
    Abstract: A capacitor for use in sensors includes opposed first and second capacitor plates, wherein the second capacitor plate is mounted to the first capacitor plate by a flexible attachment. The flexible attachment is configured and adapted so that flexure of the attachment causes a change in the spacing between the first and second capacitor plates to cause a change in the capacitance thereacross.
    Type: Grant
    Filed: May 10, 2012
    Date of Patent: March 24, 2015
    Assignee: Rosemount Aerospace Inc.
    Inventor: David P. Potasek
  • Publication number: 20150000416
    Abstract: A fluidic chip device configured for processing a fluid, wherein the fluidic chip device comprises a plurality of layers laminated to one another, wherein at least a part of the layers comprises a patterned section of an alternating sequence of bars and fluidic channels for conducting the fluid under pressure, the patterned section being configured for being displaceable in response to the pressure, and a pressure detector responding to the displacement of the patterned section by generating a detector signal being indicative of a value of the pressure.
    Type: Application
    Filed: September 15, 2011
    Publication date: January 1, 2015
    Applicant: Agilent Technologies, Inc.
    Inventors: Martin Baeuerle, Konstantin Choikhet
  • Publication number: 20140352445
    Abstract: A microelectromechanical pressure sensor structure comprises a planar base, side walls and a diaphragm plate, attached to each other to form a hermetically closed gap that provides a reference pressure. The diaphragm plate extends along a planar inner surface on top of the side walls, and has an outer surface on the opposite side of the diaphragm plate. At least part of the outer surface of the diaphragm plate forms a planar part that includes a recess, a depth of which extends parallel to the side walls and is less than the nominal thickness of the diaphragm. A large part of reasons causing the different bending of the diaphragm and the underlying structures can be eliminated with one or more recesses arranged to the pressure sensor structure.
    Type: Application
    Filed: May 23, 2014
    Publication date: December 4, 2014
    Applicant: MURATA MANUFACTURING CO., LTD.
    Inventor: Heikki KUISMA
  • Patent number: 8893555
    Abstract: A pressure sensor (40) useful as a vacuum manometer. A reference pressure cavity (50) of the sensor is evacuated through an evacuation opening (72) located behind a plate portion (54) of the sensor electrode (52) having a non-planar surface for supporting the diaphragm (44) during an overpressure event. The electrode is hermetically sealed to the body (42) of the sensor by a brazed joint with a ceramic seal member (60) disposed there between. The brazed joint may include a layer of buffer material (79) which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry (84) by a wire having a spring section (53), thereby providing a stress free interconnection.
    Type: Grant
    Filed: June 8, 2012
    Date of Patent: November 25, 2014
    Assignee: Setra Systems, Inc.
    Inventors: Kevin M. Bourbeau, Eric C. Beishline, Michael J. Amirto, Gino A. Pinto, Benjamin F. Fontaine
  • Publication number: 20140290487
    Abstract: A device for filtering untreated air in an air supply of a clean room of a beverage treatment system, having more than one filter element and a pressure differential measuring assembly, in which the filter elements are connected to the pressure differential measuring assembly for pressure measurement such that a respective first pressure pick-up is arranged upstream of the respective filter element and a second pressure pick-up.
    Type: Application
    Filed: June 28, 2012
    Publication date: October 2, 2014
    Applicant: KRONES AG
    Inventors: Franz Braun, Juergen Soellner, Josef Doblinger
  • Publication number: 20140290375
    Abstract: The invention relates to a micromechanical structure for measuring or detecting a mechanical quantity or a dynamic quantity, including a deformable membrane (20) and a supporting substrate (10), the membrane (20) including a first portion (20a) and a second portion (20b) surrounded by the first portion (20a), the second portion (20b) having a thickness that is less than the thickness of the first portion (20a), the membrane (20) being suspended above the supporting substrate (10) and thus defining a free space (30), said micromechanical structure comprising in addition a lower abutment (21) for limiting the deformations of the membrane (20), said lower abutment (21) being arranged above the supporting substrate (10) and extending into the free space (30) from said supporting substrate (10) toward the membrane (20), characterized in that the lower abutment (21) comprises islets (101-108) that extend into the free space (30) toward the membrane (20) from a flat surface of the lower abutment (21), the islets (10
    Type: Application
    Filed: October 24, 2012
    Publication date: October 2, 2014
    Applicant: AUXITROL S.A.
    Inventor: Sebastiano Brida
  • Patent number: 8841735
    Abstract: A capacitive pressure sensing semiconductor device is provided, which has pressure resistance against pressure applied by a pressing member and can detect the pressure surely and efficiently. The pressure sensing semiconductor device includes a pressure detecting part, which detects pressure as a change in capacitance, and a package that receives the pressure detecting part within. The pressure detecting part includes a first electrode and a second electrode disposed to oppose the first electrode, with a determined distance therebetween. Capacitance is formed between the first electrode and the second electrode, and changes according to a change in said distance caused by pressure transmitted to the first electrode by a pressing member. The package also includes a pressure transmitting member that transmits, to the first electrode of the pressure detecting part, the pressure applied by the pressing member.
    Type: Grant
    Filed: December 27, 2012
    Date of Patent: September 23, 2014
    Assignee: Wacom Co., Ltd.
    Inventors: Toshihiko Horie, Hidetaka Takiguchi
  • Publication number: 20140260645
    Abstract: An example embodiment of the present invention provides a differential piezoresistive sensor assembly and method of manufacturing and using the same, such that a first and second pressure are applied from a single side there enabling easier installation in many pressure assemblies.
    Type: Application
    Filed: June 25, 2013
    Publication date: September 18, 2014
    Applicant: Kulite Semiconductor Products, Inc.
    Inventors: Scott Goodman, Joseph R. VandeWeert, Alexander A. Ned
  • Publication number: 20140251019
    Abstract: A coplanar process fluid pressure sensor module is provided. The module includes a coplanar base and a housing body. The coplanar base has a pair of process fluid pressure inlets, each having an isolator diaphragm. The housing body is coupled to the coplanar base at an interface between the coplanar base and the housing body. A differential pressure sensor is operably coupled to the pair of process fluid pressure inlets, and is disposed proximate the coplanar base within the housing body.
    Type: Application
    Filed: May 20, 2014
    Publication date: September 11, 2014
    Applicant: Rosemount Inc.
    Inventors: Robert C. Hedtke, David A. Broden
  • Publication number: 20140238103
    Abstract: A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid.
    Type: Application
    Filed: November 5, 2013
    Publication date: August 28, 2014
    Applicant: MKS INSTRUMENTS, INC.
    Inventors: Lei Gu, Paul D. Lucas, Stephen F. Bart, Phillip W. Sullivan
  • Patent number: 8794076
    Abstract: Systems and methods of signal transmission and measuring for sensors employing a transmission medium are provided. In one embodiment, a method may comprise measuring a first monitored condition to generate a first monitored condition signal; converting the first monitored condition signal to a first frequency modulated signal having a first frequency; generating a second frequency modulated signal having a reference frequency; transmitting the first frequency modulated signal and the second frequency modulated signal using time division multiplexing; and wherein a first ratio of the first frequency and the reference frequency is associated with the first pressure.
    Type: Grant
    Filed: November 18, 2013
    Date of Patent: August 5, 2014
    Assignee: Kulite Semiconductor Products, Inc.
    Inventor: Wolf S. Landmann
  • Publication number: 20140196545
    Abstract: There is provided a pressure measuring instrument including: a detecting unit including the reference pressure chamber therein and formed in a cylindrical shape, the diaphragm being disposed inside the detecting unit; a communicating unit for providing communication between the diaphragm and the measurement pressure chamber, and formed in a circular tube shape having an inner diameter smaller than an inner diameter of the detecting unit; and an annular flow-path forming unit disposed between the detecting unit and the communicating unit, and configured to form a substantially annular path. The communicating unit introduces a gas of the measurement pressure chamber into the substantially annular path. The annular flow-path forming unit allows the gas introduced from the communicating unit to pass through the substantially annular path and to supply the passing gas to a side surface of the diaphragm.
    Type: Application
    Filed: January 8, 2014
    Publication date: July 17, 2014
    Applicant: TOKYO ELECTRON LIMITED
    Inventor: Satoru KOIKE
  • Patent number: 8776608
    Abstract: A coplanar process fluid pressure sensor module is provided. The module includes a coplanar base and a housing body. The coplanar base has a pair of process fluid pressure inlets, each having an isolator diaphragm. The housing body is coupled to the coplanar base at an interface between the coplanar base and the housing body. A differential pressure sensor is operably coupled to the pair of process fluid pressure inlets, and is disposed proximate the coplanar base within the housing body.
    Type: Grant
    Filed: October 31, 2011
    Date of Patent: July 15, 2014
    Assignee: Rosemount Inc.
    Inventors: Robert C. Hedtke, David A. Broden
  • Publication number: 20140165734
    Abstract: An amplifier-embedded pressure sensor includes: a pressure-detecting element which detects the differential pressure between the fluid and the space where the pipe including a fluid passage of the fluid is installed, and outputs the pressure signal; an amplifier circuit board having an amplifier circuit for amplifying the pressure signal; a housing to which the pressure-detecting element is fixed; and a separation part which is fixed to the housing and separates a space inside the housing into a first space where the pressure-detecting element is disposed and a second space where the amplifier circuit board is disposed. The housing includes an inflow port for letting cooling gas for cooling the amplifier circuit board flow into the second space and a discharge port for discharging the cooling gas from the second space.
    Type: Application
    Filed: November 26, 2013
    Publication date: June 19, 2014
    Inventor: Toshiyuki TAKANOHASHI
  • Patent number: 8726735
    Abstract: A pressure difference measurement transmitter comprising: a pressure difference sensor; a first process connection flange; and a second process connection flange. The pressure difference sensor is clamped between the first process connection flange and the second process connection flange, and between a first and a second seal. The pressure difference sensor is contactable by a first media pressure via the first process connection flange and by a second media pressure via the second process connection flange; and a housing, which contains an electronic evaluating circuit. The housing has an input opening, through which the evaluating circuit is connected to the pressure difference sensor; and wherein the housing has at least one appendage, which extends between the first and the second process connection flanges; wherein the appendage is clamped in parallel with the pressure difference sensor between the flanges, so that the housing is held by the clamped appendage.
    Type: Grant
    Filed: November 23, 2009
    Date of Patent: May 20, 2014
    Assignee: Endress + Hauser GmbH + Co. KG
    Inventors: Axel Humpert, Jurgen Tanner
  • Publication number: 20140053652
    Abstract: A method, device and system for a gage pressure transducer including the making thereof are provided. In one embodiment, a method comprises receiving, at a first diaphragm, a first pressure, wherein the first diaphragm is composed of metal; transferring, from the first diaphragm, to a first sensor, the first pressure using a first oil region, wherein the first oil region is disposed between the first diaphragm and the first sensor; receiving, at the first sensor, the first pressure; measuring, by the first sensor, the first pressure to generate a first pressure signal; and outputting, from the first sensor, to a first header pin, the first pressure signal, wherein the first header pin is electrically coupled to the first sensor using a first conductive glass frit.
    Type: Application
    Filed: November 1, 2013
    Publication date: February 27, 2014
    Inventor: Nora Kurtz
  • Patent number: 8656786
    Abstract: The present disclosure relates to sensors including pressure sensors, humidity sensors, flow sensors, etc. In some cases, a sensor unit subassembly for installation in or use with a pressure sensor housing may include at least one pressure sensor signal output terminal supported by a printed circuit board, a pressure input port, and a pressure sense element secured relative to one or more printed circuit boards. The printed circuit board(s) may include circuitry configured to format pressure output signals provided by the pressure sense element into a particularly chosen output format, and may provide the formatted pressure output signal(s) to an attached electrical connector of the pressure sensor housing. In some cases, the sensor unit subassemblies can be mixed with a multitude of different electrical connectors and/or with a multitude of different port connections to from a wide array of pressure sensor assemblies.
    Type: Grant
    Filed: August 1, 2011
    Date of Patent: February 25, 2014
    Assignee: Honeywell International Inc.
    Inventors: Ryan Jones, Todd Eckhardt, Jim Machir, Richard Wade
  • Publication number: 20140020472
    Abstract: A differential pressure and pressure transmitting device includes a pressure detecting portion and a rupture state detecting portion. The pressure detecting portion includes a first diaphragm that receives indirectly a pressure of a process fluid and that transmits a pressure, a second diaphragm that receives directly a pressure of a process fluid, and an insulating fluid-filled portion positioned between the first and second diaphragms and filled with an insulating fluid, and provided with a pair of electrodes on a periphery thereof. The rupture state detecting portion applies an electropotential to the electrodes to measure the electrical conductivity of the insulating fluid and to monitor for a rupture of a diaphragm.
    Type: Application
    Filed: June 28, 2013
    Publication date: January 23, 2014
    Inventor: Keisuke KIHARA
  • Publication number: 20130333440
    Abstract: A process variable transmitter for measuring a pressure of a process fluid includes a first inlet configured to couple to a first process pressure and a second inlet configured to couple to a second process pressure. A differential pressure sensor couples to the first and second inlets and provides an output related to a differential pressure between the first pressure and the second pressure. A first pressure sensor couples to the first inlet and provides an output related to the first pressure. Transmitter circuitry provides a transmitter output based upon the output from the differential pressure sensor and further provides enhanced functionality based upon the output from the first pressure sensor.
    Type: Application
    Filed: June 19, 2012
    Publication date: December 19, 2013
    Inventor: Robert C. Hedtke
  • Patent number: 8584527
    Abstract: A single wire interface for a transducer transmits the transducer output as a frequency modulated signal over one single wire during one interval. During a second interval a reference signal is transmitted as a frequency modulated signal. Both the transducer output and the reference signal output are processed by the same circuitry during the respective intervals to provide both frequency modulated signals. The frequencies of the two signals are measured and then the ratio of the two periods which is the reciprocal of the two frequencies is calculated. This ratio is the direct measure of the output of the transducer and when provided eliminates sources of errors.
    Type: Grant
    Filed: October 4, 2011
    Date of Patent: November 19, 2013
    Assignee: Kulite Semiconductor Products, Inc.
    Inventor: Wolf S. Landmann
  • Publication number: 20130283912
    Abstract: Apparatus and related fabrication methods are provided for a sensor device. An exemplary sensor device includes a first structure including a first sensing arrangement and a second sensing arrangement formed therein and a second structure affixed to the first structure. The second structure includes a cavity aligned with the first sensing arrangement to provide a first reference pressure on a first side of the first sensing arrangement and an opening aligned with the second sensing arrangement to expose the first side of the second sensing arrangement to an ambient pressure.
    Type: Application
    Filed: April 27, 2012
    Publication date: October 31, 2013
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventor: Yizhen Lin
  • Publication number: 20130247677
    Abstract: A pressure sensor includes a detecting circuit configured to detect the difference between outputs from a first pressure variation sensor and a second pressure variation sensor. The first pressure variation sensor and the second pressure variation sensor have the same distance of a gap, and have frequency characteristics different from each other, that is, cutoff frequencies different from each other by setting the value of a capacity of the cavity of the first pressure variation sensor to be larger than the value of a capacity of the cavity of the second pressure variation sensor.
    Type: Application
    Filed: February 28, 2013
    Publication date: September 26, 2013
    Applicant: SEIKO INSTRUMENTS INC.
    Inventors: Takeshi UCHIYAMA, Masataka SHINOGI
  • Publication number: 20130247676
    Abstract: A pressure sensor includes a detecting circuit configured to detect the difference between outputs from a first pressure variation sensor and a second pressure variation sensor. The first pressure variation sensor and the second pressure variation sensor have a lower limit frequency which provides sensitivity equal to or higher than a predetermined value as the effectively same frequency characteristics in accordance at least with a capacity of a cavity or a distance of a gap. The gap of the first pressure variation sensor communicates the exterior of the pressure sensor and the interior of the cavity of the first pressure variation sensor, and the gap of the second pressure variation sensor communicates the interior of the cavity of the first pressure variation sensor and the interior of the cavity of the second pressure variation sensor.
    Type: Application
    Filed: February 28, 2013
    Publication date: September 26, 2013
    Applicant: SEIKO INSTRUMENTS INC.
    Inventors: Takeshi UCHIYAMA, Masataka SHINOGI
  • Patent number: 8539839
    Abstract: A pressure sensor includes: a supporting body which has an opening; a pressure detecting portion which includes a supporting film provided on the supporting body and having a diaphragm portion closing the opening, and a piezoelectric body provided on the diaphragm portion and deflecting to output an electric signal; a frame body which has, on the pressure detecting portion, a cylindrical cavity along a film thickness direction of the supporting film, and is formed, in plan view when viewed from the film thickness direction of the supporting film, at a position where a cylindrical inner peripheral wall of the cavity overlaps with the opening, or outside of the opening; a sealing film which closes the frame body; and a silicone oil which is filled in an inner space formed of the cylindrical inner peripheral wall of the cavity, the sealing film, and the pressure detecting portion.
    Type: Grant
    Filed: May 11, 2011
    Date of Patent: September 24, 2013
    Assignee: Seiko Epson Corporation
    Inventor: Hironori Suzuki
  • Patent number: 8499641
    Abstract: An apparatus for determining and/or monitoring pressure. The apparatus comprises at least one pressure transducer, which transduces pressure into an electrical signal. The invention includes the features that at least one acoustic sensor is provided, that the acoustic sensor registers acoustic signals and transduces such into electrical signals, and that the acoustic sensor is mechanically and/or acoustically coupled with the pressure transducer.
    Type: Grant
    Filed: October 27, 2009
    Date of Patent: August 6, 2013
    Assignee: Endress + Hauser GmbH + Co. KG
    Inventors: Udo Grittke, Sergej Lopatin, Andreas Roβberg, Thomas Uhlin, Axel Humpert, Andreas Spitz, Peter Selders
  • Patent number: 8501026
    Abstract: A method for determining a minimum tension compensation stress which will have a membrane of a thickness of less than or equal to one micrometer, secured to a frame, having, in the absence of any external stress, a desired deflection. The membrane can be made as planar as possible in absence of any external stress, and its thickness can be less than or equal to one micrometer.
    Type: Grant
    Filed: June 17, 2010
    Date of Patent: August 6, 2013
    Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
    Inventors: Christophe Constancias, Bernard Dalzotto, Frank Fournel, Philippe Michallon, Hubert Moriceau, Valerie Pouteau
  • Patent number: 8499642
    Abstract: The invention relates to a fluid pressure sensing device comprising a pressure sensing transducer having a support structure and a diaphragm attached to said support structure, the diaphragm having a fluid facing side. A housing has a transducer receiving cavity defined by a bottom wall and a housing sidewall extending upwardly from the bottom wall. The bottom wall is formed with a fluid pressure receiving recess. A fluid pressure port is formed in the housing in communication with the recess. The diaphragm is positioned between the support structure and the fluid pressure receiving recess and a seal material around a support structure sidewall fixes the pressure sensing transducer in the housing and provides a hermetic seal.
    Type: Grant
    Filed: April 29, 2011
    Date of Patent: August 6, 2013
    Assignee: Sensata Technologies, Inc.
    Inventors: Wico Hopman, Robert Zwijze, Paul Gennissen, Maarten van Noorden, George van der Donk, Jans Kruise
  • Patent number: 8479581
    Abstract: A device for measuring fluid pressure, includes at least one flexible layer having a first surface adapted for fixing the layer to a structure, and having a second surface having at least one recess; at least one pressure sensor, provided in the at least one recess; and at least two wires connected to the at least one pressure sensor for connecting the at least one pressure sensor to a signal receiving unit. Further, a method for measuring fluid pressure is provided.
    Type: Grant
    Filed: May 3, 2011
    Date of Patent: July 9, 2013
    Assignee: General Electric Company
    Inventors: Andreas Herrig, Klaus Ulrich Koegler
  • Patent number: 8448519
    Abstract: A process transmitter for measuring a process variable comprises a sensor module and a static pressure coupling. The sensor module comprises a sensor for measuring a process variable of an industrial process and for generating a sensor signal. The sensor includes a hydraulic fluid inlet within the module. The static pressure coupling is connected to the sensor module and comprises a isolator fitting, a process fluid coupling and an isolation diaphragm. The isolator fitting is inserted into the sensor module and connected to the hydraulic fluid inlet. The process fluid coupling is joined to the isolator fitting. The isolation diaphragm is positioned between the isolator fitting and the process fluid coupling outside of the sensor module.
    Type: Grant
    Filed: October 5, 2010
    Date of Patent: May 28, 2013
    Assignee: Rosemount Inc.
    Inventors: David Andrew Broden, David Anthony Horkey
  • Publication number: 20130118264
    Abstract: A pressure measuring cell for detecting the pressure prevailing in an adjoining medium, comprising an elastic membrane on which a first electromechanical transducer is arranged, which supplies a first pressure-dependent output signal is provided. According to the invention, a second electromechanical transducer, which supplies a second pressure-dependent output signal, is arranged on the membrane wherein the two transducers are arranged such that with an elastically reversible deformation of the membrane the output signals have a first pressure characteristic, and after an irreversible deformation of the membrane due to an increased pressure load same have a significantly different second pressure characteristic.
    Type: Application
    Filed: August 30, 2011
    Publication date: May 16, 2013
    Applicant: IFM ELECTRONIC GMBH
    Inventors: Heinz Walter, Oliver Blankenhorn, Jochen Forster
  • Publication number: 20130104663
    Abstract: A coplanar process fluid pressure sensor module is provided. The module includes a coplanar base and a housing body. The coplanar base has a pair of process fluid pressure inlets, each having an isolator diaphragm. The housing body is coupled to the coplanar base at an interface between the coplanar base and the housing body. A differential pressure sensor is operably coupled to the pair of process fluid pressure inlets, and is disposed proximate the coplanar base within the housing body.
    Type: Application
    Filed: October 31, 2011
    Publication date: May 2, 2013
    Inventors: Robert C. Hedtke, David A. Broden
  • Publication number: 20130055820
    Abstract: A pressure sensor (40) useful as a vacuum manometer. A reference pressure cavity (50) of the sensor is evacuated through an evacuation opening (72) located behind a plate portion (54) of the sensor electrode (52) having a non-planar surface for supporting the diaphragm (44) during an overpressure event. The electrode is hermetically sealed to the body (42) of the sensor by a brazed joint with a ceramic seal member (60) disposed there between. The brazed joint may include a layer of buffer material (79) which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry (84) by a wire having a spring section (53), thereby providing a stress free interconnection.
    Type: Application
    Filed: June 8, 2012
    Publication date: March 7, 2013
    Inventors: Kevin M. Bourbeau, Eric C. Beishline, Michael J. Amirto, Gino A. Pinto, Benjamin F. Fontaine
  • Publication number: 20130031984
    Abstract: The present disclosure relates to sensors including pressure sensors, humidity sensors, flow sensors, etc. In some cases, a sensor unit subassembly for installation in or use with a pressure sensor housing may include at least one pressure sensor signal output terminal supported by a printed circuit board, a pressure input port, and a pressure sense element secured relative to one or more printed circuit boards. The printed circuit board(s) may include circuitry configured to format pressure output signals provided by the pressure sense element into a particularly chosen output format, and may provide the formatted pressure output signal(s) to an attached electrical connector of the pressure sensor housing. In some cases, the sensor unit subassemblies can be mixed with a multitude of different electrical connectors and/or with a multitude of different port connections to from a wide array of pressure sensor assemblies.
    Type: Application
    Filed: August 1, 2011
    Publication date: February 7, 2013
    Applicant: HONEYWELL INTERNATIONAL INC.
    Inventors: Ryan Jones, Todd Eckhardt, Jim Machir, Richard Wade
  • Publication number: 20130019688
    Abstract: A measurement system for measuring a pressure of a fluid is provided. The measurement system includes a sensing module and a liquid electrical circuit. The sensing module includes a flexible film and a liquid electronic device. The flexible film has a first side and a second side opposite to the first side. The fluid is disposed on the first side of the flexible film, and the liquid electronic device is disposed on the second side of the flexible film. The flexible film converts the pressure of the fluid into a parameter of the liquid electronic device. The liquid electrical circuit is electrically coupled to the liquid electronic device. The liquid electronic device and the liquid electrical circuit output a measurement signal corresponding to the parameter in response to an applied electrical energy. A manufacture method of a measurement system is also provided.
    Type: Application
    Filed: December 8, 2011
    Publication date: January 24, 2013
    Inventors: Yi-Chung TUNG, Chueh-Yu Wu, Wei-Hao Liao
  • Patent number: 8347725
    Abstract: An oil pressure includes a housing, a pressure sensing unit mounted in the housing and a first signal generator. Because the pressure sensing unit is provided with a pusher and an elastic piece that is able to uniformly receive a force exerted from the pusher such that the pusher can uniformly drive a swing member of the first signal generator, the oil pressure sensor can output an accurate oil pressure signal.
    Type: Grant
    Filed: February 8, 2011
    Date of Patent: January 8, 2013
    Assignee: Cub Elecparts Inc.
    Inventors: San-Chuan Yu, Yu-Shun Lin, Chih-Wei Yen
  • Publication number: 20120297884
    Abstract: A device for measuring environmental forces, and a method for fabricating the same, is disclosed that comprises a device wafer, the device wafer comprising a first device layer separated from a second device layer by a first insulation layer. The first device wafer is bonded to an etched substrate wafer to create a suspended diaphragm and boss, the flexure of which is determined by an embedded sensing element.
    Type: Application
    Filed: May 23, 2011
    Publication date: November 29, 2012
    Applicant: General Electric Company
    Inventors: Sisira Kankanam Gamage, Naresh Venkata Mantravadi
  • Patent number: 8312775
    Abstract: A diaphragm for a pressure sensor includes: a central section serving as a diaphragm body, the central section including: an external surface deformed upon receipt of an external pressure; and an internal surface transmitting a force to a pressure sensitive element inside a housing of the pressure sensor; a peripheral section that is an exterior of the central section and welded to an outer circumference of a pressure input orifice that is provided to the housing; and a step wall provided between the central section and the peripheral section. The central section and the peripheral section are integrally and concentrically provided. The diaphragm seals the pressure input orifice.
    Type: Grant
    Filed: June 10, 2009
    Date of Patent: November 20, 2012
    Assignee: Seiko Epson Corporation
    Inventor: Hisao Motoyama
  • Publication number: 20120279310
    Abstract: The pressure sensor of the invention includes at least one platform, at least one measuring membrane 30, and a transducer, wherein the measuring membrane comprises a semiconductor material, wherein the measuring membrane, enclosing a pressure chamber, is secured on the platform, wherein the measuring membrane is contactable with at least one pressure and is elastically deformable in a pressure-dependent manner, wherein the transducer provides an electrical signal dependent on deformation of the measuring membrane, wherein the platform has a membrane bed, on which the measuring membrane lies in the case of overload, in order to support the measuring membrane, wherein the membrane bed 21 has a glass layer 20, whose surface faces the measuring membrane and forms a wall of the pressure chamber, wherein the surface of the glass layer has a contour, which is suitable for supporting the measuring membrane 30 in the case of overload, characterized in that the contour of the membrane bed 21 is obtainable by a sagging
    Type: Application
    Filed: October 7, 2010
    Publication date: November 8, 2012
    Applicant: Endress + Hauser GmbH + Co. KG
    Inventors: Timo Kober, Michael Philipps, Dieter Stolze, Anh Tuan Tham, Roland Werthschutzky
  • Publication number: 20120266683
    Abstract: A sensor for measuring pressures in low-viscosity media for use in injection moulding includes a housing with an axis A, a flat end face to be exposed to a pressure space, and a diaphragm that is arranged on the end face and is permanently connected to the housing. A measuring element that can infer a pressure prevailing in the pressure space on the basis of deflection of the diaphragm is arranged behind the diaphragm. A pressure sleeve that is tightly connected to the sensor on the end face and is arranged at a distance from the housing with a gap behind this connection is arranged coaxially with the housing axis A outside the housing. The gap extends axially further across the measuring element than the region of the force path in the direction away from the pressure space.
    Type: Application
    Filed: November 18, 2010
    Publication date: October 25, 2012
    Applicant: KISTLER HOLDING AG
    Inventor: Ernst Pletscher
  • Publication number: 20120247217
    Abstract: A pressure sensor includes: a supporting body which has an opening; a pressure detecting portion which includes a supporting film provided on the supporting body and having a diaphragm portion closing the opening, and a piezoelectric body provided on the diaphragm portion and deflecting to output an electric signal; a frame body which has, on the pressure detecting portion, a cylindrical cavity along a film thickness direction of the supporting film, and is formed, in plan view when viewed from the film thickness direction of the supporting film, at a position where a cylindrical inner peripheral wall of the cavity overlaps with the opening, or outside of the opening; a sealing film which closes the frame body; and a silicone oil which is filled in an inner space formed of the cylindrical inner peripheral wall of the cavity, the sealing film, and the pressure detecting portion.
    Type: Application
    Filed: May 11, 2011
    Publication date: October 4, 2012
    Applicant: SEIKO EPSON CORPORATION
    Inventor: Hironori SUZUKI
  • Patent number: 8276456
    Abstract: A differential pressure sensor for measuring a pressure difference between two high-pressure environments is comprised of a sensor block including internal, oil-filled channels leading to an internally positioned differential pressure sensor element. Two process diaphragms are provided for transferring pressure from the high-pressure environments for isolating two distinct internal oil channels from the high-pressure environments. In order to achieve small internal oil volumes in the sensor block, additionally two separating discs, which initially separate between the two internal oil channels, are positioned in fluid communication with the high-pressure environments in order to block for the pressure from the high-pressure environments against the oil channels “from behind.” The separating discs bear against abutment faces having small openings into the internal oil channels.
    Type: Grant
    Filed: June 3, 2008
    Date of Patent: October 2, 2012
    Assignee: Presens AS
    Inventor: Bjorn Erik Seeberg
  • Patent number: 8276458
    Abstract: An industrial process transmitter includes a sensing system and transmitter electronics. The sensing system senses a process variable over a range. The transmitter electronics is connected to the sensing system and produces a scaled analog communication signal to communicate the process variable over an analog loop. The range is disproportionately distributed over the scale by the transmitter electronics.
    Type: Grant
    Filed: July 12, 2010
    Date of Patent: October 2, 2012
    Assignee: Rosemount Inc.
    Inventor: Robert C. Hedtke