Abstract: A sensor may include a substrate that has a cavity formed in a surface thereof. A diaphragm, having a conductive portion, may be suspended over the cavity, a selective coating may be present on a face of the diaphragm outside of the cavity, and a counterelectrode may be spaced from and in opposition to the diaphragm. The diaphragm may deform upon interaction of the selective coating with an analyte and thereby alter a capacitance of the sensor in a manner indicative of a degree of interaction.

Abstract: Device for measuring pressure through the capacitive effect between two electrodes including at least one sensitive electrode spaced apart from and opposite a stationary electrode so as to define a cavity in which a reference pressure (Pref) exists. The device in accordance with the invention further includes a protective housing for insulating at least the stationary electrode from the ambient environment in which the pressure to be measured exists, the housing having at least one solid portion forming a recess for containing at least the stationary electrode, and a thinned portion forming the sensitive electrode.

Abstract: A monolithic manometer and method of sensing pressure changes may include sensing a change in parasitic capacitive coupling between multiple parasitic capacitive coupled conductive elements in response to a diaphragm disturbing the parasitic capacitive coupling between the conductive elements. A signal representative of the sensed change in parasitic capacitive coupling may be output.

Abstract: Disclosed are capacitive pressure probes or sensors for high temperature applications. The capacitive pressure sensors of the present invention include, inter alia, a sapphire diaphragm which is disposed within an interior sensing chamber of the probe housing and has a first electrode formed on a central portion thereof. The central portion of the diaphragm and the first electrode are adapted and configured to deflect in response to pressure variations encountered within an interior sensing chamber and by the pressure sensor. A sapphire substrate which has a second electrode formed thereon is fused to the sapphire diaphragm about its periphery to form a sapphire stack and to define a reference chamber therebetween. Prior to fusing the sapphire diaphragm to the sapphire substrate, all contact surfaces are chemically treated and prepared using plasma activation, so as to create a bonding layer and to reduce the temperature required for the fusion.

Abstract: A sensor assembly, which may be incorporated by a medical electrical lead, includes an insulative body, formed from a biocompatible plastic, and a sensor mounted on a mounting surface of the insulative body. The mounting surface extends distally from a proximal portion of the insulative body in which first and second conductive inserts extend, being spaced apart and isolated from one another. The sensor is coupled to each of the first and second conductive inserts, and the first conductive insert includes a conductor-coupling end extending proximally from the proximal portion of the insulative body. The sensor assembly may further include an electrode extending around the sensor and the insulative body, wherein the electrode includes an aperture approximately aligned with an active surface of the sensor to expose the active surface. A mounting platform assembly for the sensor assembly may include the conductive inserts and the insulative body.

Abstract: Silicon and glass micromachined (MEMS) acoustic sensors incorporating trapped-liquid architectures are disclosed. The trapped liquid serves as an acoustic transmission medium allowing the input port to the system to be physically separated from the sensing location. The trapped liquid interacts with a conductive, flexible sensing membrane. Sound pressure waves enter the trapped liquid through an input membrane, travel to the sensing membrane, and excite vibrations of the sensing membrane. The vibrations of the sensing membrane are measured using on-chip capacitive sensing. The capacitive sensing structure is formed by the conductive sensing membrane and a fixed conducting top electrode. As the gap between the conductive sensing membrane and the fixed top electrode varies, the capacitance varies, leading to an electrical signal which is the electrical output of the system.

Abstract: A microelectromechanical systems (MEMS) pressure sensor device (20, 62) includes a substrate structure (22, 64) having a cavity (32, 68) formed therein and a substrate structure (24) having a reference element (36) formed therein. A sense element (44) is interposed between the substrate structures (22, 24) and is spaced apart from the reference element (36). The sense element (44) is exposed to an external environment (48) via one of the cavity (68) and a plurality of openings (38) formed in the reference element (36). The sense element (44) is movable relative to the reference element (36) in response to a pressure stimulus (54) from the environment (48). Fabrication methodology (76) entails forming (78) the substrate structure (22, 64) having the cavity (32, 68), fabricating (84) the substrate structure (24) including the sense element (44), coupling (92) the substrate structures, and subsequently forming (96) the reference element (36) in the substrate structure (24).

Abstract: A capacitive differential pressure sensor is described which has a simple configuration, and which provides reliable measuring results even in corrosive measuring environments. The sensor element for capacitively measuring differential pressure includes a sensor diaphragm which is implemented in a layered configuration on a semiconductor substrate and spans a cavern. A pressure connection opens into the cavern. The sensor element also includes a measuring capacitor which has a movable electrode on the sensor diaphragm, and a stationary counter electrode which is situated on the base of the cavern, opposite from the movable electrode. According to the sensor, the cavern is filled with a dielectric fluid.

Abstract: Disclosed are capacitive pressure probes or sensors for high temperature applications. The capacitive pressure sensors of the present invention include, inter alia, a sapphire diaphragm which is disposed within an interior sensing chamber of the probe housing and has a first electrode formed on a central portion thereof. The central portion of the diaphragm and the first electrode are adapted and configured to deflect in response to pressure variations encountered within an interior sensing chamber and by the pressure sensor. A sapphire substrate which has a second electrode formed thereon is fused to the sapphire diaphragm about its periphery to form a sapphire stack and to define a reference chamber therebetween. Prior to fusing the sapphire diaphragm to the sapphire substrate, all contact surfaces are chemically treated and prepared using plasma activation, so as to create a bonding layer and to reduce the temperature required for the fusion.

Abstract: A capacitive sensor includes a substrate, at least one first electrode, at least one second electrode, a sensing device, at least one anchor base, at least one movable frame, and a plurality of spring members. The first and second electrodes are disposed on the substrate, and the anchor base surrounds the first and second electrodes and is disposed on the substrate. The movable frame surrounds the sensing device. Some of the spring members connect the movable frame and the sensing device, and the other spring members connect the movable frame and the anchor base. The sensing device and the first electrode are both sensing electrodes. The movable frame is disposed above the second electrode, and cooperates with the second electrode to act as a capacitive driver.

Abstract: A pressure sensor includes a platform and an elastic measuring membrane, which is joined with a surface of the platform to form a measuring chamber sealed closed at the edge, wherein the platform and/or the measuring membrane comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode, which faces the surface of the platform, the surface of the platform has at least a second electrode, which faces that of the measuring membrane. The capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.

Abstract: Systems and methods of measuring pressure of fluid in a disposable IV set connected to a fluid supply pump is disclosed. At least one sensing arrangement coupled to the fluid supply pump is provided. A chamber having a movable element is provided, the movable element configured to move in response to changes in fluid pressure within the disposable IV set and thereby cause a change in a sensed measurement variable associated with the sensing arrangement without contacting the sensing arrangement. A measuring signal indicative of the sensed measurement variable is generated. The fluid pressure within the disposable IV set is determined based on the measuring signal.

Abstract: Disclosed is a wireless self-powered monolithic integrated capacitive sensor, as well as methods of manufacturing same. A single monolithic chip may include various technologies, including RF MEMS, CMOS devices and related circuitry, and physical sensor MEMS. An example pressure sensor is disclosed, including a sensing capacitor and a reference capacitor that together allow the system to provide steady output in various environmental conditions. In one embodiment a pre-fabricated circuit wafer is fusion bonded to a pre-fabricated diaphragm wafer. Doped silicon may form the monolithic structure to provide the voltage necessary to run the system.

Abstract: Described herein is the sensor assembly and method for rapidly obtaining accurate readings of a variable. The sensor assembly comprises a plurality of sensors which are connected to a microcontroller that processes the signals of the individual transducers to the microcontroller. The microcontroller contains software that maximizes the refresh rate and/or minimizes the time it takes to process the outputs of each of the transducers. The microcontroller that is coupled to the sensor assembly selectively measures the outputs of each transducer so as to speed up the refresh rate of the sensor.

Abstract: In one embodiment, a pressure sensor assembly for use with an application specific integrated circuit includes a capacitive sensor, a sensor coil within a first sensor compartment and operatively connected to the capacitive sensor to form a sensor L-C tank circuit, a measuring oscillator including a measuring coil located within a second sensor compartment and spaced apart from the sensor coil and a feedback circuit configured to provide a control signal for the measuring oscillator based upon an output of the measuring oscillator, and a low frequency signal source configured to provide a low frequency signal to the measuring oscillator.

Abstract: A pressure sensor assembly for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein and first and second openings to the cavity configured to apply first and second pressures. A diaphragm in the cavity separates the first opening from the second opening and is configured to deflect in response to a differential pressure between the first pressure and the second pressure. A capacitance based deformation sensor is provided and configured to sense deformation of the sensor body in response to a line pressure applied to the sensor body.

Abstract: The disclosure is directed to a capacitive pressure sensor, and the assembly of a capacitive pressure sensor, that may be used within an implantable medical pump. In one example, a housing ferrule that encloses one capacitive plate and includes at least one protrusion for attaching a support structure of the capacitive plate. The at least one protrusion defines a smaller inner diameter as a reference point for securing the support structure while the ferrule provides a larger inner diameter to allow the support structure to tilt inside the ferrule to orient the capacitive plate into a desired plane. Despite manufacturing irregularities, the capacitive plate can be mounted in the desired plane parallel to another capacitive plate, a diaphragm, mounted to an edge of the ferrule. In another example, an assembly tool provides a stage to orient the capacitive plate and support structure within the ferrule at a desired depth.

Abstract: The disclosure is directed to a pressure sensor of an implantable medical device. The pressure sensor may utilize detect fluid pressure based on a changing capacitance between two capacitive elements. The pressure sensor may define at least a portion of a fluid enclosure of the IMD. In one example, the pressure sensor has a self-aligning housing shape that occludes an opening in the pump bulkhead of the IMD. An operative surface of the pressure and the portion of the fluid enclosure may be formed of a corrosion resistant and/or biocompatible material. A first capacitive element of the pressure sensor may be a metal alloy diaphragm that deflects in response to external fluid pressure. A second capacitive element of the pressure sensor may be a metal coating on a rigid insulator sealed from the fluid by the diaphragm and a housing of the sensor.

Abstract: A sensing device capable of detecting pressure using micro-electro-mechanical system (“MEMS”) capacitive pressure sensor with vertical electric feed-through is disclosed. The sensing device includes a first sensing element, a second sensing element, and a sensing circuit. In one embodiment, the first sensing element is disposed over a semiconductor die and is configured to generate a first sensing signal upon detecting pressure. The second sensing element is also disposed over the semiconductor die adjacent to the first sensing element, and is configured to generate a second sensing signal upon sensing ambient conditions. The sensing circuit is capable of generating a pressure sensing signal in response to the first sensing signal and the second sensing signal.

Abstract: In a data-input device an actuator element that can be manually actuated, and a sensor mechanically coupled to the actuator element. The sensor is formed in a body of semiconductor material housing a first sensitive element, which detects the actuation of the actuator element and generates electrical control signals. The first sensitive element is a microelectromechanical pressure sensor, formed by: a cavity made within the body; a diaphragm made in a surface portion of the body and suspended above the cavity; and piezoresistive transducer elements integrated in peripheral surface portions of the diaphragm in order to detect its deformations upon actuation of the actuator element.

Abstract: A pressure sensing system positions a microelectromechanical (MEMS) diaphragm of a MEMS pressure sensor die in a housing to indirectly sample pressure state of a fluid being measured. A second housing diaphragm is used to make direct contact with the fluid being measured. Pressure state of the fluid being measured is transferred from the housing diaphragm through an electrically insulating intermediary fluid to the MEMS diaphragm thereby allowing the MEMS pressure sensor die to indirectly sample pressure state of the fluid being measured. Electrically conductive support members and electrically conductive solid vias are used to electrically couple circuitry of the MEMS pressure sensor die to external wires outside the housing.

Abstract: A sensor including a carrier, a plurality of conductive bumps, a capacitive sensing element connected to the carrier through the conductive bumps, and a cover is provided. The capacitive sensing element has a membrane, and a channel is formed among the capacitive sensing element, the conductive bumps, and the carrier. The cover is disposed on the carrier for covering the capacitive sensing element. A chamber is formed between the capacitive sensing element and the cover. The chamber and the channel are respectively located at two sides of the membrane.

Abstract: Systems and methods of measuring pressure of fluid in a disposable IV set connected to a fluid supply pump is disclosed. At least one sensing arrangement coupled to the fluid supply pump is provided. A chamber having a movable element is provided, the movable element configured to move in response to changes in fluid pressure within the disposable IV set and thereby cause a change in a sensed measurement variable associated with the sensing arrangement without contacting the sensing arrangement. A measuring signal indicative of the sensed measurement variable is generated. The fluid pressure within the disposable IV set is determined based on the measuring signal.

Abstract: A sensor design, respectively a micromechanical sensor structure for capacitive relative-pressure measurement, that will allow very small pressure differentials to be reliably recorded at high absolute pressures even in harsh, particle-laden measuring environments. For that purpose, the micromechanical sensor element includes a deflectable diaphragm structure which is provided with at least one deflectable electrode, and a fixed support structure for at least one fixed counter-electrode which is located opposite the deflectable electrode. The diaphragm structure includes two mutually parallel configured diaphragms that are joined rigidly to one another via at least one connecting crosspiece, so that each application of force to one of the two diaphragms is directly transmitted to the respective other diaphragm.

Abstract: In a pressure sensor including a pressure detecting element in an intermediate portion or at a deep side of a through hole formed in a protrusion, a body portion (a base portion and the protrusion) is made of ceramic or an insulative resin material and molded into a predetermined shape, and the pressure sensor is constituted as a molded interconnect device in which a conductive pattern is formed on a surface thereof. Accordingly, a smaller pressure sensor can be obtained.

Abstract: A micromechanical capacitive pressure sensor has a layered structure, which includes at least one deflectable carrier element for at least one deflectable measuring electrode in a first layer plane and at least one stationary carrier structure for at least one counter electrode in a second layer plane parallel to the first layer plane. The carrier structure is suspended in a closed cavity of the layered structure between two diaphragms, which are oriented essentially perpendicularly to the layer planes and delimit the cavity on two opposite sides. At least one pressure connection aperture is provided, via which at least one of the two diaphragms may be subjected to a pressure being measured. The carrier element is connected to the two diaphragms in such a way that diaphragm deformations cause a parallel shift of the measuring electrode relative to the counter electrode.

Abstract: A semiconductor device includes a first sensor element in a first branch of a Wheatstone bridge and a second sensor element in a second branch of the Wheatstone bridge. The semiconductor device includes a first reference element in the first branch and a second reference element in the second branch. The semiconductor device includes a circuit configured to switch the first sensor element to the second branch and the second sensor element to the first branch.

Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.

Abstract: An implantable medical device for delivering a therapeutic substance to a delivery site in a patient. A reservoir holds a supply of the fluid therapeutic substance. A catheter has a proximal end, a delivery region and a lumen extending from the proximal end to the delivery region. The proximal end of the catheter is operatively coupled to the reservoir. The delivery region of the catheter is adapted to be placed proximate the delivery site in the patient. The therapeutic substance is adapted to be delivered through the lumen to the patient. A sensing device is operatively coupled with the lumen of the catheter being capable of detecting a pressure of the therapeutic substance in the lumen. A controller is operatively coupled to the sensing device, the controller being capable of taking an action in response to the pressure in the lumen.

Abstract: A pressure sensor includes a fill tube which is arranged to couple to a process pressure. A sensor is coupled to the fill tube and is configured to measure pressure of fluid in the fill tube as a function of a change of a physical property of the fill tube. Circuitry is provided to measure pressure using the pressure sensor, and to measure pressure based upon the change of the physical property of the fill tube.

Abstract: A microelectromechanical systems (MEMS) sensor device (20) includes a substrate (22) having sensors (24, 26) disposed on the same side (28) of the substrate (22) and laterally spaced apart from one another. The sensor (26) includes a sense element (56), and the substrate (22) includes a cavity (58) extending through the substrate (22) from the backside (30) of the substrate (22) to expose the sense element (56) to an external environment (54). The sense element (56) is movable in response to a stimulus (52) from the environment (54) due to its exposure to the environment (54) via the cavity (58). Fabrication methodology (66) entails concurrently forming the sensors (24, 26) on substrate (22) by implementing MEMS process flow, followed by creating the cavity (58) through the substrate (22) to expose the sense element (56) to the environment (54).

Abstract: The invention relates to a vacuum measuring cell device comprising a vacuum membrane measuring cell (8) having a connecting means (5, 6) arranged thereon for a communicating connection to the medium to be measured, an electronic system (34), which is electrically connected to the vacuum membrane measuring cell (8), and also comprising a heating arrangement (20, 21) for heating the vacuum membrane measuring cell (8) to a predefinable temperature value, wherein the heating arrangement (20, 21) substantially encloses the entire vacuum membrane measuring cell (8) such that said cell forms a thermal container (20). Said container constitutes a thermal body (20a) in the area of the connecting means (5, 6) and connecting means (6) are guided through it, the connecting means thereby being thermally contacted at least in some areas by the thermal body. The thermal container (20a) comprises a heating source (21) for the heating thereof.

Abstract: A sealed capacitive sensor includes a substrate having a diaphragm forming a first plate of a capacitor; a second fixed plate of the capacitor spaced from the diaphragm and defining a predetermined dielectric gap and a sealing medium connecting together the substrate and fixed plate in an integrated structure and hermetically sealing the gap.

Abstract: The present invention is a measuring cell comprising a base body. Layered upon the base body is a measurement membrane having a first measuring element, a measurement device, and an intermediate membrane. The intermediate membrane is arranged between the measurement membrane and the base body, and a second measuring element is arranged thereon. When a pressure force is applied to the cell, the measurement membrane is directed outward and undergoes deformation with respect to the intermediate membrane as well as the base body. The deformation causes the measuring capacitance formed by the measuring electrodes to change according to the pressure applied.

Abstract: A capacitative pressure sensor that has a silicon substrate, CMOS layers deposited on the silicon substrate, a conductive layer deposited on the CMOS layer and, a passivation layer on the conductive layer. A conductive membrane extends from the substrate assembly such that it is spaced from the conductive layer. The conductive layer has a plurality of apertures and the silicon substrate to define a passage for fluid communication with fluid pressure exterior to the pressure sensor and a cap extending from the substrate assembly to cover the membrane and form a chamber on one side of the conductive membrane that is sealed from the fluid pressure exterior to the pressure sensor.

Abstract: Grounded, circular movable electrode and divided electrodes, formed on a surface of a circular printed board, are opposed to each other via a double-face tape, functioning also as a spacer, with a slight gap interposed therebetween. As a pad is struck with a stick, the gap between the movable electrode and the divided electrodes changes so that capacitance between the movable electrode and the divided electrodes changes, in response to which signals are output from the divided electrodes. The divided electrodes are sandwiched between the grounded movable electrode and a grounded shielded electrode and thus are not influenced from external disturbances.

Abstract: A process transmitter for measuring a process variable in an industrial process comprises a sensor module, a heating device and transmitter circuitry. The sensor module has a sensor for sensing a process variable of an industrial process and generating a sensor signal. The heating device is connected to the sensor module for generating a heat pulse to influence generation of the sensor signal. The transmitter circuitry is connected to the sensor and the heating device. The transmitter circuitry verifies operation of the sensor by measuring a change in the sensor signal due to the heat pulse. In one embodiment of the invention, the heat pulse thermally expands a volume of a fill fluid within the process transmitter. In another embodiment, the heat pulse changes a physical property, such as dielectric, of a fill fluid within the process transmitter.

Abstract: A semiconductor device includes a diaphragm, a sensing element, and a circuit. The sensing element is configured to sense deflection of the diaphragm. The circuit is configured to heat the diaphragm to induce deflection of the diaphragm.

Abstract: A variable capacitor, a microfabricated implantable pressure sensor including a variable capacitor and an inductor, and related pressure measurement and implantation methods. The inductor may have a fixed or variable inductance. A variable capacitor and pressure sensors include a flexible member that is disposed on a substrate and defines a chamber. Capacitor elements extend indirectly from the flexible member. Sufficient fluidic pressure applied to an exterior surface of the flexible member causes the flexible member to move or deform, thus causing the capacitance and/or inductance to change. Resulting changes in resonant frequency or impedance can be detected to determine pressure, e.g., intraocular pressure.

Abstract: A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.

Abstract: A sensor including a carrier having two channels, a capacitive sensing element disposed on the carrier, and a cover is provided. The capacitive sensing element has a membrane, and a first chamber is formed between the membrane and the carrier. The cover is disposed on the carrier for covering the capacitive sensing element. A second chamber is formed between the membrane and the cover. The first chamber and the second chamber are located at two sides of the membrane, and the channels are respectively communicated with the first chamber and the second chamber.

Abstract: A pressure sensor having a substrate and a first, deformable membrane, partially supported by the substrate, which generates a first sensor reading when deformed by pressure. A second membrane is contiguous to the first membrane. When the second membrane is energized, it deforms the first membrane to alter the first sensor reading.

Abstract: An implantable pressure sensor, which may be incorporated within an implantable medical electrical lead, includes an insulative sidewall, which contains a gap capacitor and an integrated circuit. The insulative sidewall of the pressure sensor includes a pressure sensitive diaphragm portion, and the gap capacitor includes a first electrode plate, which is attached to an interior surface of the diaphragm portion of the sidewall, and a second electrode plate, which is spaced apart from the first electrode plate and coupled to the integrated circuit, which is coupled, through the sidewall, to a supply contact and a ground contact. A conductive layer extends over one of the interior surface of the diaphragm portion of the sidewall and an exterior surface of the diaphragm portion; and the conductive layer is coupled to the ground contact to either shield or ground the first electrode plate.

Abstract: A diaphragm section has a mesh-like beam section which partitions the diaphragm section into a plurality of rectangular regions, and a thin film section formed in the region partitioned by the beam section, and the thickness of the thin film section is less than that of the beam section.

Abstract: Methods for making and systems employing pressure and temperature sensors are described. Embodiments include a capacitive element including a first conductor plate and a second conductor plate. Each plate includes a conductor layer formed on a substrate. In a pressure sensor embodiment, seal is positioned at or near the edges of the conductor plates, and a gas retained in a gap defined between the plates. In a temperature sensor embodiment, the gap defined between the plates is in fluid communication with the external environment.

Abstract: A capacitance sensing circuit for a membrane pressure sensor is provided. The sensing circuit has a controller, two switches in signal communication with the controller, a charge amplifier and a charge injector. The charge amplifier is connected to the switches via a sensor capacitor Cs and a reference capacitor Cr. The sensor and reference capacitors are arranged in parallel with one another and a parasitic capacitance Cp to ground. The charge injector and amplifier are arranged in parallel connection between the capacitors and the controller. The controller is configured to determine a charge imbalance indicative of a pressure difference between membranes of the pressure sensor.

Abstract: In an electrostatic capacitance diaphragm vacuum gauge, a diaphragm and a detection electrode opposing the diaphragm are arranged in a vacuum. The electrostatic capacitance diaphragm vacuum gauge measures pressure by measuring the change degree of an electrostatic capacitance between the diaphragm and detection electrode. The electrostatic capacitance diaphragm vacuum gauge includes atmospheric pressure variation factor detection units which detect atmospheric pressure variation factors as external factors that varies the pressure of the vacuum. The pressure of the vacuum is measured by subtracting information detected by the atmospheric pressure variation factor detection units.

Abstract: A variable capacitor, a microfabricated implantable pressure sensor including a variable capacitor and an inductor, and related pressure measurement and implantation methods. The inductor may have a fixed or variable inductance. A variable capacitor and pressure sensors include a flexible member that is disposed on a substrate and defines a chamber. Capacitor elements extend indirectly from the flexible member. Sufficient fluidic pressure applied to an exterior surface of the flexible member causes the flexible member to move or deform, thus causing the capacitance and/or inductance to change. Resulting changes in resonant frequency or impedance can be detected to determine pressure, e.g., intraocular pressure.

Abstract: A pressure gauge is composed of two separate components adapted to be assembled and disassembled by hand. The one component is a pressure-motion conversion element (3, 6) for receiving a pressure and effecting a movement of a movable portion (3c, 6c) thereof in response thereto, and the other component is a force measuring element (5) for measuring a force caused due to the movement of the movable portion (3c, 6c). The pressure-motion conversion element (3, 69) is constructed as a disposable component, whereas the force measuring element (5) is intended for re-use.

Abstract: An integrated differential pressure sensor includes, in a monolithic body of semiconductor material, a first face and a second face, a cavity extending at a distance from the first face and delimited therewith by a flexible membrane formed in part by epitaxial material from the monolithic body and in part by annealed epitaxial material from the monolithic body, an access passage in fluid communication with the cavity, and in the flexible membrane at least one transduction element configured so as to convert a deformation of the flexible membrane into electrical signals. The cavity is formed in a position set at a distance from the second face and is delimited at the second face with a portion of the monolithic body.