Abstract: A pressure sensor has a substrate having a diaphragm, a cavity portion that is positioned on one side of the diaphragm, and a ceiling portion that is disposed opposite to the diaphragm via the cavity portion, and unevenness is formed on a surface of the substrate facing the cavity portion. In addition, the unevenness has a plurality of recessed portions.

Abstract: A method for manufacturing a micromechanical component having a substrate and having a cap connected to the substrate and enclosing with the substrate a first cavity is provided, a first pressure existing, and a first gas mixture having a first chemical composition being enclosed, in the first cavity, in a first method step an access opening that connects the first cavity to an environment of the micromechanical component being constituted in the substrate or in the cap, in a second method step the first pressure and/or the first chemical composition being established in the first cavity, in a third method step the access opening being sealed with the aid of a laser by the introduction of energy or heat into an absorbing portion of the substrate or of the cap, the introduction of energy or heat being controlled by spatial displacement of a laser beam along a path proceeding substantially parallel to a surface, facing away from the first cavity, of the substrate or of the cap.

Abstract: A microelectromechanical pressure sensor structure that comprises a planar base, a side wall layer and a diaphragm plate. The side wall layer forms side walls that extend away from the planar base into contact with the diaphragm plate. The side wall layer is formed of at least three layers, a first layer and a second layer of insulating material and a third layer of conductive material, wherein the third layer is between the first layer and the second layer. The conducting layer provides a shield electrode within the isolating side wall layer. This shield electrode is adapted to reduce undesired effects to the capacitive measurement results.

Abstract: A differential pressure sensor includes: a sensor module including: a sensor case including a port through which a target fluid is to be introduced and a base attached with the port; a sensor configured to detect a physical quantity of the target fluid; a sensor substrate attached with the sensor, the sensor substrate having an outer circumferential surface facing an inner circumferential surface of the base; and a cover configured to press the sensor substrate against the base; and a case body including an electric circuit that is housed therein and electrically connectable to the sensor module, the case body having an open end to which the sensor module is externally attached, in which a sensor module clearance is defined between the outer circumferential surface of the sensor substrate and an inner circumferential surface of the sensor case.

Abstract: A coplanar process fluid pressure sensor module is provided. The module includes a coplanar base and a housing body. The coplanar base has a pair of process fluid pressure inlets, each having an isolator diaphragm. The housing body is coupled to the coplanar base at an interface between the coplanar base and the housing body. A differential pressure sensor is operably coupled to the pair of process fluid pressure inlets, and is disposed proximate the coplanar base within the housing body.

Abstract: Provided are a MEMS pressure sensor and a method for forming the MEMS pressure sensor. The method includes: preparing a first substrate, where the first substrate includes a first surface and a second surface opposite to the first surface; preparing a second substrate, where the second substrate includes a third surface and a fourth surface opposite to the third surface, the second substrate includes a pressure sensing region; bonding the first surface of the first substrate and the third surface of the second substrate with each other; forming a cavity between the first substrate and the pressure sensing region of the second substrate; removing the second base to form a fifth surface opposite to the third surface of the second substrate; and forming a first conductive plug passing through the second substrate from the side of the fifth surface of the second substrate to the at least one conductive layer.

Abstract: A MEMS capacitive pressure sensor is provided. The MEMS capacitive pressure sensor includes a substrate having a first region and a second region, and a first dielectric layer formed on the substrate. The capacitive pressure sensor also includes a second dielectric layer having a step surface profile formed on the first dielectric layer, and a first electrode layer having a step surface profile formed on the second dielectric layer. Further, the MEMS capacitive pressure sensor includes an insulation layer formed on the first electrode layer, and a second electrode layer having a step surface profile with a portion formed on the insulation layer in the peripheral region and the rest suspended over the first electrode layer in the device region. Further, the MEMS capacitive pressure sensor also includes a chamber having a step surface profile formed between the first electrode layer and the second electrode layer.

Abstract: The invention describes a pressure transducer having a pressure measuring cell, a position sensor, and an analysis device which has at least one signal processing device and a position correction device for the purpose of determining a position error, wherein the at least one position sensor is arranged in a stationary position relative to the pressure measuring cell, and the position sensor is electrically connected to the position correction device, wherein a first signal is provided by the signal processing device, said signal being determined from a signal provided by the pressure measuring cell, wherein a second signal is provided by the position sensor, and wherein an output signal is provided by the position correction device, determined from the first and the second signals.

Abstract: A micromechanical sensor device includes: an ASIC substrate having a first front side and a first rear side; a rewiring element formed on the first front side and including multiple stacked conductor levels and insulating layers; a MEMS substrate having a second front side and a second rear side; a first micromechanical functional layer formed on top of the second front side; and a second micromechanical functional layer formed on top of the first micromechanical functional layer and connected to the rewiring element. In the second micromechanical functional layer, a movable sensor structure is anchored on one side via a first anchoring area, and an electrical connecting element formed in a second anchoring area is anchored on one side on the ASIC, and the first and second anchoring areas are elastically connected to one another via a spring element.

Abstract: A differential pressure sensor comprises a cavity having a base including a base electrode and a membrane suspended above the base which includes a membrane electrode, wherein the first membrane is sealed with the cavity defined beneath the first membrane. A first pressure input port is coupled to the space above the sealed first membrane. A capacitive read out system is used to measure the capacitance between the base electrode and membrane electrode. An interconnecting channel is between the cavity and a second pressure input port, so that the sensor is responsive to the differential pressure applied to opposite sides of the membrane by the two input ports.

Abstract: A pressure difference sensor includes a pressure difference measuring cell, which has a measuring cell platform with pressure contactable measuring chambers in its interior, a first mounting surface and a second mounting surface. The mounting surfaces have a variable separation under pressure loading of the measuring chambers. A first reinforcement element with a first planar reinforcement area and a second reinforcement element with a second planar reinforcement area.

Abstract: In various embodiments, a sensor structure is provided. The sensor structure may include a first conductive layer; an electrode element; and a second conductive layer arranged on an opposite side of the electrode element from the first conductive layer. The first conductive layer and the second conductive layer may form a chamber. The pressure in the chamber may be lower than the pressure outside of the chamber.

Abstract: A pressure sensor module is described for determining the pressure of a measurement medium, and includes a sensor chip, a housing having a pressure connector, and a plug part for the electrical connection of the pressure sensor module. In addition, plug contacts that are electrically connected to the sensor chip are provided in the plug part. In addition, in the provided pressure sensor module it is provided that the sensor chip is capable of being loaded with the measurement medium through the pressure connector, and the pressure connector is made at least partly of a light metal.

Abstract: A pressure sensor for sensing pressure of a fluid includes a diaphragm separator having a protrusion. The pressure sensor further includes a resonator, where the protrusion is in contact with the resonator on a first side of the resonator. The protrusion is positioned to exert an imparted force onto the resonator. The pressure sensor also includes a backing diaphragm positioned on a second side of the resonator. The backing diaphragm exerts a counter force onto the resonator in response to the imparted force.

Abstract: Featured are systems and methods for measuring differential and absolute pressure of a flowing fluid/gas in a fluid system. In such a method the fluid system is configured with first and second pressure taps that are spaced from each so the second pressure tap is downstream of the first pressure tap in a direction of flow. An absolute pressure sense element and a differential pressure sense element are provided, where the absolute pressure sense element is first fluidly coupled to one of the first or second pressure tap to measure an absolute pressure representative of the flowing fluid/gas. The differential pressure sense element is second fluidly coupled to each of the first and second pressure taps so as to measure a differential pressure of the flowing fluid/gas between the first and second pressure taps.

Abstract: A micro electro-mechanical system (MEMS) device is provided. The MEMS device includes: a first substrate having a first surface and a second surface, and a port disposed through the first substrate, wherein the port is configured to receive acoustic waves and wherein the first surface is exposed to an environment outside the MEMS device; and a diaphragm coupled to and facing the second surface and configured to deflect in response to pressure differential at the diaphragm in response to the received acoustic waves. The MEMS device also includes a second substrate coupled to and facing the diaphragm, and including circuitry, wherein the second substrate includes a recess region forming an integrated back cavity in the MEMS device. The MEMS device also includes an electrical connection electrically coupling the first substrate and the second substrate and configured to transmit an electrical signal indicative of the deflection of the diaphragm.

Abstract: A method is described for producing a micromechanical component. The method includes providing a first substrate, providing a second substrate, developing a projecting patterned element on the second substrate, and connecting the first and the second substrate via the projecting patterned element. The method provides that the connecting of the first and the second substrate includes eutectic bonding. Also described is a micromechanical component, in which a first and a second substrate are connected to each other.

Abstract: A diaphragm-type pressure gauge which is attached to a vessel to be measured and measures a pressure by introducing a gas inside the vessel includes a housing into which the gas is introduced, and a sensor unit which is arranged in the housing, and includes a diaphragm electrode, a measurement surface of which is arranged parallel to an introduction direction of the gas. When the housing is attached to the vessel, the measurement surface of the diaphragm electrode is arranged parallel to a direction of gravitational force.

Abstract: A pressure sensor device which uses appropriate passivation materials/patterns to make the device more robust and resistant to a hot and humid environment. The pressure sensor device uses moisture resistant passivation material(s) covering exposed glass areas, including sidewalls, and bonding interfaces to avoid the glass and bonding interfaces absorbing and reacting with moisture, thus maintaining the integrity of the device output after exposure in a humid/hot environment. These passivation materials/patterns used for the MEMS devices described may be applied to any MEMS based sensors and actuators using glass as one type of material for fabrication. The pressure sensor devices may be front side absolute pressure sensors, differential pressure sensors, or back side absolute pressure sensors.

Abstract: The disclosed embodiments include a combination absolute pressure and differential pressure transducer that includes at least a first cavity and a second cavity, at least a first pressure port and a second pressure port, a first isolation membrane exposing the first cavity to a first fluid pressure applied to the first pressure port, a second isolation membrane exposing the second cavity to a second fluid pressure applied to the second pressure port, at least one absolute pressure sense element exposed to absolute pressure in one of the first cavity and the second cavity, and at least one differential pressure sense element exposed to differential pressure between two of the first cavity and the second cavity.

Abstract: Techniques are described herein that perform pressure sensing using pressure sensor(s) that include deformable pressure vessel(s). A pressure vessel is an object that has a cross section that defines a void. A deformable pressure vessel is a pressure vessel that has at least one curved portion that is configured to structurally deform (e.g., bend, shear, elongate, etc.) based on a pressure difference between a cavity pressure in a cavity in which at least a portion of the pressure vessel is suspended and a vessel pressure in the pressure vessel.

Abstract: A sensor element with air pressure measurement includes a layer stack from a plurality of layers arranged one on top of the other. At least one first layer contains a measurement sensor device for measuring a measurement parameter different from an ambient pressure of the sensor. The first or at least one second layer contains a pressure measurement device for measuring the air pressure in an environment on one side of the sensor element, or a channel for coupling a pressure measurement device to an environment on one side of the sensor element.

Abstract: A capacitive pressure sensor includes a substrate wafer and a diaphragm wafer. The substrate wafer defines a substrate recess with a first recess. The diaphragm wafer defines a diaphragm recess with a second recess. The diaphragm wafer is bonded to the substrate wafer such that the substrate and diaphragm recesses form a height differentiated pressure chamber.

Abstract: A capacitive sensor for detecting relative movement of adjacent bodies includes a first electrode on a first electrode supporting body, and a second electrode opposite the first electrode on a second electrode supporting body. The second electrode supporting body is a resilient film element supported on the first electrode supporting body by spaced-apart support sections. A pressure body includes two pressure projections that rest, in the region between the support sections, against the side of the second electrode supporting body facing away from the second electrode and that press against the second electrode supporting body while bending it when there is a relative movement between the first electrode supporting body and the second pressure body. The second electrode is secured to the second electrode supporting body only in a securing section substantially in the center between pressure regions at which the pressure projections rest against the second electrode supporting body.

Abstract: A non-aqueous photocurable composition contains dispersed carbon-coated metal particles in an organic diluent in an amount of at least 10 weight %. The dispersed carbon-coated metal particles have a median diameter equal to or less than 0.6 ?m, and are dispersed using a particle dispersing agent that has a weight average molecular weight (Mw) of at least 2,000 and up to and including 100,000 and comprises nitrogen-containing units. The median diameter of the dispersed particles is determined using a dynamic light scattering method. Moreover, when the non-aqueous composition contains up to and including 25 weight % of the dispersed carbon-coated metal particles, it exhibits no visual settling when subjected to a settling test of at least 24 hours at 20° C. Such non-aqueous photocurable compositions include photocurable components and are useful to prepare photocurable and photocured electrically-conductive patterns and layers in various articles, including touch screen devices having touch screen displays.

Abstract: Generally, the present disclosure is directed to gas monitoring systems that use inductive power transfer to safely power an electrically passive device included within a nuclear material storage container. In particular, the electrically passive device can include an inductive power receiver for receiving inductive power transfer through a wall of the nuclear material storage container. The power received by the inductive power receiver can be used to power one or more sensors included in the device. Thus, the device is not required to include active power generation components such as, for example, a battery, that increase the risk of a spark igniting flammable gases within the container.

Abstract: The present disclosure is directed to an acoustic transducer configured to detect a sound wave according to changes in capacitances between a vibrating electrode and a fixed electrode. At least one of the vibrating electrode and the fixed electrode being divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting electrical signals. The disclosure includes a digital interface circuit coupled to the divided electrodes. The circuit includes a recombination stage, which supplies a mixed signal by combining the first digital processed signal and the second digital processed signal with a respective weight that is a function of a first level value of the first processed signal. An output stage is included, which supplies, selectively and alternatively, a first processed signal, a second processed signal, or a mixed signal.

Abstract: Techniques are described herein that perform capacitance-based pressure sensing using pressure vessel(s). A pressure vessel is an object that has a cross section that defines a void. The void has a shape that is configured to change based on a change of pressure difference between a cavity pressure in a cavity in which at least a portion of the pressure vessel is suspended and a vessel pressure in the pressure vessel. The pressure vessel may be formed in the shape of an enclosed loop (e.g., along a path that is perpendicular to the cross section), resulting in a looped pressure vessel. For instance, an end of the pressure vessel may be connected to another end of the pressure vessel to form the enclosed loop.

Abstract: The invention describes a pressure transducer having a pressure measuring cell, a position sensor, and an analysis device which has at least one signal processing device and a position correction device for the purpose of determining a position error, wherein the at least one position sensor is arranged in a stationary position relative to the pressure measuring cell, and the position sensor is electrically connected to the position correction device, wherein a first signal is provided by the signal processing device, said signal being determined from a signal provided by the pressure measuring cell, wherein a second signal is provided by the position sensor, and wherein an output signal is provided by the position correction device, determined from the first and the second signals.

Abstract: According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a first and second MEMS elements on the substrate. Each of the first and second MEMS elements includes a fixed electrode on the substrate, a movable electrode above the fixed electrode, a first insulating film, the first insulating film and the substrate defining a cavity in which the fixed and movable electrodes are contained, and a first anchor on a surface of the first insulating film inside the cavity and configured to connect the movable electrode to the first insulating film. The cavity of the first MEMS element is closed. The cavity of the second MEMS element is opened by a through hole.

Abstract: Touch and hover switching is disclosed. A touch and hover sensing device can switch between a touch mode and a hover mode. During a touch mode, the device can be switched to sense one or more objects touching the device. During a hover mode, the device can be switched to sense one or more objects hovering over the device. The device can include a panel having multiple sensors for sensing a touching object and/or a hovering object and a touch and hover control system for switching the device between the touch and hover modes. The device's touch and hover control system can include a touch sensing circuit for coupling to the sensors to measure a capacitance indicative of a touching object during the touch mode, a hover sensing circuit for coupling to the sensors to measure a capacitance indicative of a hovering object during the hover mode, and a switching mechanism for switching the sensors to couple to either the touch sensing circuit or the hover sensing circuit.

Abstract: A process variable transmitter includes a process variable sensor having a process variable sensor output related to a sensed process variable. Analog compensation circuitry is configured to receive the process variable sensor output and responsively provide a compensated process variable sensor output based upon a compensation function which is responsive to a control input. Output circuitry provides an output based upon the compensated process variable. Digital control circuitry is coupled to the analog compensation circuitry providing a control output which is applied to the control input of the analog compensation circuitry to thereby control the compensation function.

Abstract: Capacitive micromachined ultrasonic transducers (CMUTs) in permanent contact mode are provided. Such a CMUT always has its plate in contact with the substrate, even for zero applied electrical bias. This contact is provided by the pressure difference between the environment, and the pressure of the evacuated region between the CMUT plate and substrate. Due to this permanent contact, the electric field in the gap for a given DC bias voltage will be larger, which provides improved coupling efficiency at lower DC bias voltages. Furthermore, in an environment with high and varying pressure, the plate will not shift between the conventional mode and the collapsed mode, but will only be pushed down with varying contact radius. In some embodiments, an electrode shaped as an annulus is employed, so that only the active vibrating part of the CMUT plate sees the applied DC and AC voltages.

Abstract: System, apparatus and method for capacitive sensing, where a sensor includes an upper and lower housing, each respectively equipped with upper and lower pressure ports. The lower housing is electrically coupled to an active shield. An insulating material is provided on or near a conductive diaphragm for insulating the conductive diaphragm from the lower housing. The insulating material may be an insulator or a dielectric material, where a sensing electrode is positioned such that the sensing electrode extends laterally across at least a portion of the insulating material, and is separated from the insulating material by a predetermined distance to form an air gap.

Abstract: Provided is an electromechanical transducer device including a substrate that is conductive, and a plurality of electromechanical transducer elements disposed on a first surface of the substrate. A groove that electrically isolates the plurality of electromechanical transducer elements from each other is formed in the substrate, the groove extending from a second surface side of the substrate toward the first surface side of the substrate, the second surface being opposite the first surface. The width of the groove on the first surface side of the substrate is smaller than the width of the groove on the second surface side of the substrate.

Abstract: A wearable device includes a capacitive sensor and capacitance sensing and calibration logic operative to determine that component drift for a capacitive sensor cannot be determined based on a capacitance sensed by the capacitive sensor. The capacitance sensing and calibration logic deactivates a drift calibration operation for the capacitive sensor while the capacitive sensor senses the capacitance. The capacitance sensing and calibration logic is further operative to determine that the capacitance sensed by the capacitive sensor is within a detection threshold that indicates that a conductive surface is within proximity of the capacitive sensor. The capacitance sensing and calibration logic can also determine that a wearable device, that includes the capacitive sensor, is in motion based on sensed intermittent changes in the capacitance. Various other methods of operation are disclosed.

Abstract: Various embodiments relate to a pressure sensor and related methods of manufacturing and use. A pressure sensor may include an electrical contact included in a flexible membrane that deflects in response to a measured ambient pressure. The electrical contact may be separated from a signal path through a cavity formed using a sacrificial layer and PVD plugs. At one or more defined touch-point pressure thresholds, the membrane of the pressure sensor may deflect so that the state of contact between an electrical contact and one or more sections of a signal path may change. In some embodiments, the change of state may cause the pressure sensor to trigger an alarm in the electrical circuit. Various embodiments also enable the operation of the electrical circuit for testing and calibration through the use of one or more actuation electrode layers.

Abstract: Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor may include: a tubular probe body; a capacitive sensor disposed at the distal end of the probe body; a lead electrically coupled to the sensor extending along an interior space of the probe body; and at least one support formed of a material having a relatively low dielectric constant disposed within the probe body to support the lead and space the lead away from an inner wall of the probe body. This may help to minimize shunt capacitance and changes in shunt capacitance due to radial movement of the lead. In other embodiments, a pressure sensor may include a channel formed in a wall of the probe body, a temperature sensor disposed at a distal end of the probe body, and a temperature sensor lead disposed in the channel and connected to the temperature sensor.

Abstract: A capacitor for use in sensors includes opposed first and second capacitor plates, wherein the second capacitor plate is mounted to the first capacitor plate by a flexible attachment. The flexible attachment is configured and adapted so that flexure of the attachment causes a change in the spacing between the first and second capacitor plates to cause a change in the capacitance thereacross.

Abstract: Methods for fabricating crack resistant Microelectromechanical (MEMS) devices are provided, as are MEMS devices produced pursuant to such methods. In one embodiment, the method includes forming a sacrificial body over a substrate, producing a multi-layer membrane structure on the substrate, and removing at least a portion of the sacrificial body to form an inner cavity within the multi-layer membrane structure. The multi-layer membrane structure is produced by first forming a base membrane layer over and around the sacrificial body such that the base membrane layer has a non-planar upper surface. A predetermined thickness of the base membrane layer is then removed to impart the base membrane layer with a planar upper surface. A cap membrane layer is formed over the planar upper surface of the base membrane layer. The cap membrane layer is composed of a material having a substantially parallel grain orientation.

Abstract: A capacitive pressure measuring cell, including a ceramic platform and a ceramic measuring membrane, which are connected pressure tightly along a joint to form a reference pressure chamber between them. The measuring membrane has a first electrode facing the platform, and the platform has at least a second electrode facing the measuring membrane. The capacitance between the first and second electrodes depends on the difference between a pressure externally acting on the measuring membrane and a pressure reigning in the reference pressure chamber, wherein the joint has a thickness d, which defines an equilibrium distance between the measuring membrane and the front side of the platform. On the front side of the platform, a support layer is arranged, which comprises an inorganic insulator, wherein the support layer has a thickness of at least 0.2, and wherein the second electrode is arranged on the support layer.

Abstract: A closed loop pressure management system for an exhaust regeneration system is provided with a first tube capable of retaining a first fluid and extending between a proximal end and a distal end, a first fitting coupled between the distal end of the first tube and an exhaust conduit for receiving an exhaust fluid, and a pressure sensor manifold. The first fitting may include a diaphragm configured to provide a sealed interface between the first fluid of the first tube and the exhaust fluid of the exhaust conduit, and communicate the exhaust fluid pressure through the first fluid pressure. The pressure sensor manifold may include at least a first inlet coupled to the proximal end of the first tube and a pressure sensor configured to determine the exhaust fluid pressure based at least partially on the first fluid pressure at the first inlet.

Abstract: In order to mitigate the negative effects of a change in atmospheric pressure, an improved capacitance diaphragm gauge (CDG) sensor incorporates an independent ambient atmospheric pressure sensor near the CDG sensor body. The ambient atmospheric sensor is located outside the CDG sensor body to sense the ambient atmospheric pressure surrounding the CDG sensor body. The ambient atmospheric sensor provides an output that represents the ambient atmospheric pressure. A sensor output processing circuit receives the output of the ambient atmospheric sensor as well as the output of the CDG sensor. The processing circuit utilizes the output from the ambient atmospheric pressure sensor to fine tune the CDG measurement of pressure by executing an in situ, real time, automatic calibration adjustment of the CDG.

Abstract: A sensor including a buffer material layer configured to at least partially deflect when a force or pressure is imparted on the buffer material layer; and an electroactive polymer (EAP) cartridge in operative contact with the buffer material layer, wherein the EAP cartridge is configured to generate an output signal that corresponds to an amount of strain imparted on the EAP cartridge. The EAP cartridge may be used in a variety of sensing applications including as a pressure sensor integrated into a fluid connector. One aspect of the invention provides for selection of a buffer material layer based upon a desired pressure range.

Abstract: Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor includes a pressure deflectable diaphragm end formed of a first material with a first coefficient of thermal expansion, and a relatively non-deformable component formed of a second material having a second coefficient of thermal expansion. The pressure deflectable diaphragm end and the non-deformable component form a first and a second portion of a capacitor. An intermediate component separates, or is disposed between, the pressure deflectable diaphragm end and the relatively non-deformable component. The intermediate component is formed of a material with a coefficient of thermal expansion that is less than the first coefficient of thermal expansion which may help minimize changes in span with temperature. In other embodiments, a pressure sensor includes an intermediate circuit located between a distal end of the pressure sensor and a remotely located circuit enclosure including a main circuit.

Abstract: According to one embodiment, a MEMS element comprises a first electrode that is fixed on a substrate and has plate shape, a second electrode that is disposed above the first electrode while facing the first electrode, the second electrode being movable in a vertical direction and having plate shape, and a first film that includes a first cavity in which the second electrode is accommodated on the substrate. The second electrode is connected to an anchor portion connected to the substrate via a spring portion. An upper surface of the second electrode is connected to the first film.

Abstract: A capacitive pressure sensor includes a stator which encircles a portion of a cylindrical diaphragm. This encircling forms a circumferential gap between the sidewalls of the stator and the diaphragm. Therefore, a greater area “A” can be achieved in smaller diameter sensor footprint than prior art designs and yet still detect relatively small changes in capacitance. Additionally, the width “g1” of the gap can be wider than prior art designs without negatively affecting capacitance detection. A bonding agent which has a melting temperature of about half that of bonding agents used in prior art designs, secures the stator to the diaphragm and reduces oxidation issues during assembly, thereby decreasing manufacturing time and cost. To ensure proper side-to-side alignment of the stator relative to the diaphragm, a centering sleeve, which is removed after bonding, is placed over as stub at the upper end of the diaphragm.

Abstract: A differential pressure sensor comprises a cavity having a base including a base electrode and a membrane suspended above the base which includes a membrane electrode, wherein the first membrane is sealed with the cavity defined beneath the first membrane. A first pressure input port is coupled to the space above the sealed first membrane. A capacitive read out system is used to measure the capacitance between the base electrode and membrane electrode. An interconnecting channel is between the cavity and a second pressure input port, so that the sensor is responsive to the differential pressure applied to opposite sides of the membrane by the two input ports.

Abstract: A vacuum sensor for sensing vacuum in a sealed enclosure is provided. The sealed enclosure includes active MEMS devices desired to be maintained in vacuum conditions. The vacuum sensor includes a motion beam anchored to an internal surface in the sealed enclosure. A driving electrode is disposed beneath the motion beam and a bias is supplied to cause the motion beam to deflect through electromotive force. A sensing electrode is also provided and detects capacitance between the sensing electrode disposed on the internal surface, and the motion beam. Capacitance changes as the gap between the motion beam and the sensing electrode changes. The amount of deflection is determined by the vacuum level in the sealed enclosure. The vacuum level in the sealed enclosure is thereby sensed by the sensing electrode.

Abstract: Disclosed is an electromechanical transducer, including: a cell including a substrate, a vibration film, and a supporting portion of the vibration film configured to support the vibration film so that a gap is formed between the substrate and the vibration film; and a lead wire that is placed on the substrate with an insulator interposed therebetween and extends to the cell, wherein the insulator has a thickness greater than the thickness of the supporting portion. The electromechanical transducer can reduce parasitic capacitance to prevent an increase in noise, a reduction in bandwidth, and a reduction in sensitivity.