Abstract: A first MISFET is formed on a semiconductor layer of an SOI substrate in a circuit region and a second MISFET composing a TEG for VC inspection is formed on the semiconductor layer of the SOI substrate in a TEG region. An interlayer insulating film is formed, contact holes are formed in the interlayer insulating film, and plugs are formed in the contact holes, respectively. In the TEG region, the plugs include a plug electrically connected to both the semiconductor substrate composing the SOI substrate and the semiconductor layer composing the SOI substrate.

Abstract: An inspection method includes the following steps: identifying a plurality of patterns within an image; and comparing the plurality of patterns with each other for measurement values thereof. The above-mentioned inspection method uses the pattern within the image as a basis for comparison; therefore, measurement values of the plurality of pixels constructing the pattern can be processed with statistical methods and then compared, and the false rate caused by variation of a few pixels is decreased significantly. An inspection system implementing the above-mentioned method is also disclosed.

Abstract: A system using images of a subject to assist in visualization of hidden portions of the subject is disclosed. The system may illustrate the images with a wearable display. The images may be displayed in an augmented or mixed reality manner.

Abstract: Provided is a charged particle beam apparatus capable of analyzing foreign matters generated when a sample is transported or observed. The charged particle beam apparatus includes a sample stage on which a measurement sample is provided, a charged particle beam source that irradiates the measurement sample with a charged particle beam, and a detector that detects charged particles emitted by irradiation with the charged particle beam, and includes a foreign matter observation sample held on the sample stage together with the measurement sample and a foreign matter observation unit that causes a foreign matter to be observed on the foreign matter observation sample.

Abstract: A probe-based bidirectional electrophoretic force optical trap loading method includes steps of (1) detaching target particles from an upper electrode plate and capturing the target particles by a micro-scale probe based on a bidirectional electrophoretic force; (2) moving the probe with the target particles over an optical trap, applying a reverse electric field between the probe and the upper substrate electrode plate which is applied during a polar relaxation time of the target particles, and desorbing the target particles from the probe; and (3) turning on the optical trap, applying an electric field between the lower electrode plate and the upper electrode plate, adjusting the speed of the desorbed target particles through the electric field at which the optical trap is able to capture the desorbed target particles and the desorbed target particles moving to the effective capture range of the optical trap.

Abstract: A system and method for using a microscope to at least haptically observe a specimen in a fluid is provided. In one embodiment of the present invention, an audio frequency modulation sensing (AFMS) device is used to convert an optical signal from the specimen into an electrical signal. A haptic feedback device is then used to convert the electrical signal in at least vibrations, thereby providing a user with haptic feedback associated with the optical signal from the specimen. In another embodiment, a second electrical signal can be provided to a second haptic feedback (e.g., shaker, piezo electric, electric current inducing, etc.) device in the fluid, thereby allowing for bidirectional haptic feedback between the user and the specimen. In other embodiments, aural data can be extracted from the electrical signal and presented to the user either alone in in synchronization with video data (e.g., from a video camera).

Abstract: Method and system for processing digital works, the method comprising the steps of identifying terms within each digital work of a plurality of digital works, wherein the terms are words and/or phrases. Determining a number of times that the identified terms occur within each digital work of the plurality of digital works. Generating a fingerprint for each digital work of the plurality of digital works, the generated fingerprint based on the identified terms and the number of times that the identified terms occur within each digital work. Using a neural network to find an encoding function, g, that encodes a higher dimensionality space, x, of each fingerprint into a lower dimensionality space, y. Applying the encoding function to each fingerprint of the plurality of digital works to reduce their dimensionality. Determining a similarity between a first fingerprint and one or more dimensionality reduced fingerprints.

Abstract: A method of evaluating a region of a sample, the method comprising: positioning a sample within a vacuum chamber; generating an electron beam with a scanning electron microscope (SEM) column that includes an electron gun at one end of the column and a column cap at an opposite end of the column; focusing the electron beam on the sample and scanning the focused electron beam across the region of the sample, while the SEM column is operated in tilted mode, thereby generating secondary electrons and backscattered electrons from within the region; and during the scanning, collecting backscattered electrons with one or more detectors while applying a negative bias voltage to the column cap to alter a trajectory of the secondary electrons preventing the secondary electrons from reaching the one or more detectors.

Abstract: The present invention relates to an apparatus for examining and/or processing a sample, said apparatus comprising: (a) a scanning particle microscope for providing a beam of charged particles, which can be directed on a surface of the sample; and (b) a scanning probe microscope with a deflectable probe; (c) wherein a detection structure is attached to the deflectable probe.

Abstract: A device for mounting an object holder on a carrier that can be inserted into a cryostat includes at least one clamping element may be provided for non-positive connection of the object holder with the carrier. The at least one clamping element is arranged to enable damage-free mounting of the object holder on the carrier even in the case of large temperature changes, so that reproducible measuring conditions are created at large temperature changes. The at least one clamping element may be drive-connected via a lever to a piezoelectric element, which may be subjected to voltage by a control device as a function of temperature and of a bearing specification and is supported against the object holder or the carrier.

Abstract: The present invention relates to a robust method for optical recognition of markers in an outdoor environment. In this context, the present invention provides a method for optical recognition of optical markers comprising the steps of: acquiring an image; identifying regions of contiguous colours in the image by flood filling; extracting data and parameters of the contiguous regions; and detecting an optical marker by means of a convex hull algorithm and prediction of position of squares based on the data and parameters extracted from the contiguous Thus, the method of the present invention allows identification of markers, such as chequerboards and targets, unequivocally and with enough robustness as regards partial occlusions and variations of illumination.

Abstract: To implement a calibration sample by which an incident angle can be measured with high accuracy, an electron beam adjustment method, and an electron beam apparatus using the calibration sample.

Abstract: A microscope apparatus includes: a sample setting unit in which a sample is set; an imaging unit configured to image the sample set in the sample setting unit; a housing unit on which the sample setting unit is arranged, and which is configured to internally accommodate the imaging unit; a first light source configured to irradiate light for fluorescence excitation on the sample in the sample setting unit; a first cover configured to be movable to a first position that covers the sample setting unit and a second position that opens the sample setting unit; and a second cover configured to be movable within the first cover; and a second light source arranged in a space covered with the second cover and configured to irradiate light on the sample in the sample setting unit.

Abstract: In a measurement device 1, a reception sensitivity test control unit 18 includes test condition setting means 18b for setting a predetermined error tolerance level EL, throughput measurement means 18c for measuring a throughput related to reception capacity of the mobile terminal for each transmission and reception, output level setting means 18d for setting an output level of the test signal to be different from a previous output level according to a comparison result between a measurement result of the throughput and a predetermined threshold value set in advance, and measurement result output means 18e for continuing the transmission and reception in a case where a fluctuation range with respect to the previous output level exceeds the error tolerance level, and outputting a test result in a case where the fluctuation range with respect to the previous output level is in a range of the error tolerance level.

Abstract: When a high-performance retarding voltage applying power supply cannot be employed in terms of costs or device miniaturization, it is difficult to sufficiently adjust focus in a high acceleration region within a range of changing an applied voltage, and identify a point at which a focus evaluation value is maximum. To address the above problems, the invention is directed to a scanning electron microscope including: an objective lens configured to converge an electron beam emitted from an electron source; a current source configured to supply an excitation current to the objective lens; a negative-voltage applying power supply configured to form a decelerating electric field of the electron beam on a sample; a detector configured to detect charged particles generated when the electron beam is emitted to the sample; and a control device configured to calculate a focus evaluation value from an image formed according to an output of the detector.

Abstract: An image forming device is provided that is capable of forming a proper integrated signal even when an image or a signal waveform is acquired from a pattern having the possibility of preventing proper matching, such as a repetition pattern, a shrinking pattern, and the like. In particular, the image forming device forms an integrated image by integrating a plurality of image signals and is provided with: a matching processing section that performs a matching process between the plurality of image signals; an image integration section that integrates the plurality of image signals for which positioning has been performed by the matching processing section; and a periodicity determination section that determines a periodicity of a pattern contained in the image signals. The matching processing section varies a size of an image signal area for the matching in accordance with a determination by the periodicity determination section.

Abstract: Disclosed is a method of acquiring the rock component content in a stratum, the method comprising: on the basis of acquired element capture spectroscopy logging data, performing normalization processing on each element yield in the stratum rock components; on the basis of an element yield curve obtained from the normalization processing and a pre-established stratum rock interpretation model, establishing a logging curve response equation set; and utilizing the established logging curve response equation set and an optimization algorithm, calculating the content of a rock component in a stratum. The method and device can directly process element yield data of element capture spectroscopy logging, and can improve the accuracy of calculating the rock component in a stratum.

Abstract: An object of the invention is to provide a charged particle beam apparatus which improves an efficiency of a beam scan at the time of performing a focus adjustment and a measurement or an inspection based on a signal obtained by the beam scan. In order to achieve the object described above, there is proposed a charged particle beam apparatus including a lens which focuses a charged particle beam on a sample, wherein focus evaluation values of a plurality of images are calculated which are obtained under different focus conditions by the lens, the images which are obtained by beam radiation with different focus conditions and in which a predetermined condition is satisfied are subject to a processing according to the focus evaluation values, and an integrated image is generated by integrating the processed images subject to the processing according to the focus evaluation values.

Abstract: An inspection apparatus includes an optical system, which has a radiation beam delivery system for delivering radiation to a target, and a radiation beam collection system for collecting radiation after scattering from the target. Both the delivery system and the collection system comprise optical components that control the characteristics of the radiation and the collected radiation. By controlling the characteristics of one or both of the radiation and collected radiation, the depth of focus of the optical system may be increased.

Abstract: The present invention provides a measurement apparatus which includes a probe having a leading edge portion configured to come into contact with a surface to be measured and a holding portion configured to hold the leading edge portion, and measures a shape of the surface by scanning the probe relative to the surface in a state in which the leading edge portion and the surface are in contact, comprising a processing unit configured to correct measurement data at a measurement point on the surface based on data of a scanning distance of the probe and information about abrasion of the leading edge portion caused by scanning of the probe.

Abstract: A semi-automated method for atomic force microscopy (“AFM”) scanning of a sample is disclosed. The method can include manually teaching a sample and AFM tip relative location on an AFM tool; then scanning, via a predefined program, on the same sample or other sample with same pattern to produce more images automatically.

Abstract: Determining the composition of a mineral sample entails comparing measurements of a sample to mineral definitions and determining a similarity metric. The mineral definition includes a subspace of compositional values defined by end members. The similarity metric is related to a projection of the measured data point onto the subspace or onto an extension of the subspace.

Abstract: An information processing apparatus includes an acquisition section and a correction section. The acquisition section acquires information of lightness distribution of a first image captured by an imaging section capable of capturing an image of an observed area provided on an optical path of an optical system of an optical microscope, the image of the observed area being obtained by the optical microscope, the first image being an image of the observed area in a state where no sample is placed therein, the lightness distribution resulting from the optical system of the optical microscope. The correction section corrects, based on the information of lightness distribution acquired by the acquisition section, lightness unevenness of a second image captured by the imaging section, the second image being an image of the observed area in a state where the sample is placed therein.

Abstract: Determination of non-linearity of a positioning scanner of a measurement tool is disclosed. In one embodiment, a method may include providing a probe of a measurement tool coupled to a positioning scanner; scanning a surface of a first sample with the surface at a first angle relative to the probe to attain a first profile; scanning the surface of the first sample with the surface at a second angle relative to the probe that is different than the first angle to attain a second profile; repeating the scannings to attain a plurality of first profiles and a plurality of second profiles; and determining a non-linearity of the positioning scanner using the different scanning angles to cancel out measurements corresponding to imperfections due to the surface of the sample. The non-linearity may be used to calibrate the positioning scanner.

Abstract: A frequency measuring and control apparatus includes a plurality of synchronized oscillators integrated in parallel into one programmable logic device.

Abstract: A probe alignment tool (10) for scanning probe microscopes utilizes an attached relay optics to view the scanning probe microscope probe tip (40) and align its image in the center of the field of view of an optical microscope (36). Adjustments to optical microscope motorized stages (50) and (60) along with adjustments of scanning probe microscope stages (44), (46) and (58) allow determination of a path and distance from the center of the field of view to the probe tip (40). From such determination a target area to be examined by the scanning probe microscope may be positioned precisely and accurately under the probe tip (40). Replacement of a scanning probe microscope probe tip (40) in an atomic force microscope unit (42) may be accomplished without the loss of alignment measurements.

Abstract: A method of measuring a step height of a device using a scanning electron microscope (SEM), the method may include providing a device which comprises a first region and a second region, wherein a step is formed between the first region and the second region, obtaining a SEM image of the device by photographing the device using a SEM, wherein the SEM image comprises a first SEM image region for the first region and a second SEM image region for the second region, converting the SEM image into a gray-level histogram and calculating a first peak value related to the first SEM image region and a second peak value related to the second SEM image region, wherein the first peak value and the second peak value are repeatedly calculated by varying a focal length of the SEM, and determining a height of the step by analyzing a trend of changes in the first peak value according to changes in the focal length and a trend of changes in the second peak value according to the changes in the focal length.

Abstract: A control system 32, 75 is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system 34 that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.

Abstract: A method of determining an applicable threshold for determining the critical dimension of a category of patterns imaged by atomic force scanning electron microscopy is presented. The method includes acquiring, from a plurality of patterns, a pair of images for each pattern; for each pair of images determining a reference critical dimension via an image obtained by a reference instrumentation and determining an empirical threshold applicable to an image obtained by a CD-SEM instrumentation such that the empirical threshold substantially corresponds to the reference critical dimension; determining a threshold applicable to a category of patterns, the threshold being determined from a plurality of empirical thresholds.

Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

Abstract: The method relates to a method of scanning a sample. Scanning a sample is typically done by scanning the sample with a probe along a multitude of parallel lines. In prior art scan methods a sample is scanned multiple times with a nominally identical scan pattern. The invention is based on the insight that the coherence between adjacent points in a direction along the scan direction is much better than the coherence of adjacent points perpendicular to the scan direction. By combining two images that are scanned perpendicular to each other, it should thus be possible to form an image making use of the improved coherence (due to shorter temporal distance) in both directions. The method thus involves scanning the sample with two scan patterns, the lines of one scan pattern preferably perpendicular to the lines of the other scan pattern. Hereby it is possible to use the temporal coherence of scan points on a line of one scan pattern to align the lines of the other scan pattern, and vice versa.

Abstract: A method and apparatus are provided of characterizing a re-entrant SPM probe tip (30) through a single scan of a characterizer, thus dramatically increasing throughput, accuracy, and repeatability when compared to prior known tip characterization techniques. The characterizer also preferably is one whose dimensions can be known with a high level of certainty in order to maximize characterization accuracy. These dimensions are also preferably very stable or, if unstable, change catastrophically rather than in a manner that is difficult or impossible to detect. A carbon nanotube (CNT), preferably a single walled carbon nanotube (SWCNT), has been found to be well-suited for this purpose. Multi-walled carbon nanotubes (MWCNTs) (130) and other structures may also suffice for this purpose. Also provided are a method and apparatus for monitoring the integrity of a CNT.

Abstract: Provided is a method of evaluating a probe tip shape in a scanning probe microscope, including: measuring the probe tip shape by a probe shape test sample having a needle-like structure; determining radii of cross-sections at a plurality of distances from the apex; and calculating, based on the distances and the radii, a radius of curvature when the probe tip shape is approximated by a circle.

Abstract: A method of measuring vibration characteristics of a cantilever in a scanning probe microscope (SPM). An excitation signal is generated by a forward and backward frequency sweep signal in a frequency range including a resonance frequency of the cantilever. The cantilever is vibrated by supplying the excitation signal to a vibrating portion of the cantilever. The largest amplitude of a displacement of the cantilever in a forward path and in a backward path is directly measured, and an intermediate value of a frequency between frequencies measured on the basis of the directly measured largest amplitude of the displacement of the cantilever is detected as the resonance frequency of the cantilever.

Abstract: An optimal input design method and apparatus to achieve rapid broadband nanomechanical measurements of soft materials using the indentation-based method for the investigation of fast evolving phenomenon, such as the crystallization process of polymers, the nanomechanical measurement of live cell during cell movement, and force volume mapping of nonhomogeneous materials, are presented. The indentation-based nanomechanical measurement provides unique quantification of material properties at specified locations. Particularly, an input force profile with discrete spectrum is optimized to maximize the Fisher information matrix of the linear compliance model of the soft material.

Abstract: The present invention relates to a beam optical component including a charged particle lens for focusing a charged particle beam, the charged particle lens comprising a first element having a first opening for focusing the charged particle beam; a second element having a second opening for focusing the charged particle beam and first driving means connected with at least one of the first element and the second element for aligning the first opening with respect to the second opening. With the first driving means, the first opening and the second opening can be aligned with respect to each other during beam operation to provide a superior alignment of the beam optical component for a better beam focusing. The present invention also relates to a charged particle beam device that uses said beam optical component for focusing the charged particle beam, and a method to align first opening and second opening with respect to each other.

Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

Abstract: The present invention relates to a method for investigating a sample using scanning probe photon microscopy or optical force microscopy, and to an apparatus which is designed accordingly. The method or the apparatus provides for two optical traps which can be moved in a local region of the sample, wherein in at least one of the two traps a probe is held. The sample is scanned using the two traps and the measured data from the two traps are captured separately and evaluated by correlation. In particular interference signals resulting from an interaction between sample and light trap can be eliminated by the method.

Abstract: A control system 32, 75 is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system 34 that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.

Abstract: To date, the probes of scanning near-field optical microscopes were aimed at creating electromagnetic field characteristics that are maximally localized near a nano-sized point (miniature apertures and tips, fluorescent nano-particles and molecules, dielectric and metal corners). Alternatively, the probe field, which is distributed within a larger area, can ensure the super-resolution as well. For this purpose, the field spectrum should be enriched with high spatial frequencies corresponding to small sample dimensions. As examples of such near-field probes, we propose and theoretically study the models of optical fibers with end-faces containing sharp linear edges and randomly distributed nanoparticles. These probes are more robust than the conventional probes and their fabrication is not concerned with nanoscale precision. The probes enable waveguiding of light to and from the sample with marginal losses distributing and utilizing the incident light more completely.

Abstract: It is difficult for a scanning probe microscope according to the conventional technology to operate a probe for scanning and positioning in a wide range and for high-precision scanning in a narrow range. A scanning probe microscope according to the invention uses probe driving actuators for coarse adjustment and fine adjustment. For scanning and positioning in a wide range, the coarse adjustment actuator is switched to fast responsiveness. For scanning in a narrow range, the coarse adjustment actuator is switched to slow responsiveness. Instead, positional noise is reduced and the fine adjustment actuator is mainly used for scanning in a narrow range. The probe is capable of not only scanning and positioning in a wide range but also high-precision scanning in a narrow range.

Abstract: The scanning probe microscope has a primary control loop (7, 11, 12) for keeping the phase and/or amplitude of deflection at constant values as well as a secondary control loop (9) that e.g. keeps the frequency of the cantilever oscillation constant by applying a suitable DC voltage to the probe while, at the same time, a conservative AC excitation is applied thereto. By actively controlling the frequency with the first control loop (7, 11, 12) and subsequently controlling the DC voltage in order to keep the frequency constant, a fast system is created that allows to determine the contact potential difference or a related property of the sample (3) quickly.

Abstract: A control system (32, 75) is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system (34) that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.

Abstract: A microscope, in particular a scanning probe microscope, comprising a programmable logic device.

Abstract: A tomographic atom probe uses electrical pulses applied to an electrode in order to carry out evaporation of the sample being analyzed. In order to produce these electrical pulses, the tomographic atom probe comprises a high-voltage generator connected to an electrode by an electrical connection comprising a chip of semiconductor material. The probe also comprises a light source which can be controlled in order to generate light pulses which are applied to the semiconductor chip. Throughout the illumination, the chip is rendered conductive, which puts the high-voltage generator and the electrode in electrical contact so that a potential step is applied to the latter. The probe also comprises means for applying a voltage step of opposite amplitude to the previous step at the end of a time interval ?t0, so that the electrode finally receives a voltage pulse of duration ?t0.

Abstract: Faster and better methods for leveling arrays including software and user interface for instruments. A method comprising: (i) providing at least one array of cantilevers supported by at least one support structure, (ii) providing at least one substrate, (iii) providing at least one instrument to control the position of the array with respect to the substrate, (iv) leveling the array with respect to the substrate, wherein the leveling is performed via a user interface on the instrument which is adapted to have the user input positional information from the motors and piezoelectric extender when at least one cantilever deflects from the substrate. Uniform z-displacements can be achieved.

Abstract: The scanning probe microscope applies a sum of an AC voltage (Uac) and a DC voltage (Udc) to its probe. The frequency of the AC voltage (Uac) substantially corresponds to the mechanical oscillation frequency of the probe, but its phase in respect to the mechanical oscillation varies periodically. The phase modulation has a frequency fmod. The microscope measures the frequency (f) or the amplitude (K) of a master signal (S) applied to the probe's actuator, or it measures the phase of the mechanical oscillation of the cantilever in respect to the master signal (S). The spectral component at frequency fmod of the measured signal is fed to a feedback loop controller, which strives to keep it zero by adjusting the DC voltage (Udc), thereby keeping the DC voltage at the contact voltage potential.

Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

Abstract: The invention describes a procedure for the examination of objects by the means of ultrasound waves whereby a volume-of-interest is scanned by a 3D-ultrasound-probe by moving a transmitter/receiver beam in a scan plane within selectable limits. This B-mode scan plane is also simultaneously moved in a direction across to this scan plane. The transmitting of sound pulses and acquiring the echo-signals is done more or less continuously during the movement in B-plane and across to it The echo-signals are stored in a volume memory on addresses which correspond to the spatial position of the echo-generating structure inside the object. These stored data-sets are evaluated by a 3D-processor and are represented on at least one display unit by different algorithms with selectable parameters. Important is that the acquisition and the representation is done continuously.