Shape Or Taper (epo) Patents (Class 850/57)
  • Patent number: 11693028
    Abstract: A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe comprises a probe body, a first cantilever extending from the probe body, and a first thermal detector extending from the probe body. The thermal detector is used to position the cantilever with respect to a test sample.
    Type: Grant
    Filed: November 15, 2018
    Date of Patent: July 4, 2023
    Assignee: KLA CORPORATION
    Inventors: Frederik Westergaard Østerberg, Dirch Hjorth Petersen, Henrik Hartmann Henrichsen, Alberto Cagliani, Ole Hansen, Peter Folmer Nielsen
  • Patent number: 11268978
    Abstract: The present disclosure provides a tip-enhanced Raman spectroscope system. The system includes a laser emitting unit, a laser excitation unit, a first dichroic beam splitter, a first Raman spectrometer, and a confocal detecting unit. The laser excitation unit includes a sample stage and a first scanning probe. The sample stage is configured to have a sample disposed thereon such that a first incident laser beam emitted from the laser emitting unit is transmitted to the sample to excite first scattered light. The first dichroic beam splitter is configured to split a first Raman scattered light from the first Rayleigh scattered light. The first Raman spectrometer is disposed on a first Raman optical path of the first Raman scattered light. The confocal detecting unit is disposed on a first Rayleigh optical path of the first Rayleigh scattered light to image the sample.
    Type: Grant
    Filed: September 26, 2019
    Date of Patent: March 8, 2022
    Assignee: NATIONAL INSTITUTE OF METROLOGY, CHINA
    Inventors: Zhen-Dong Zhu, Si-Tian Gao, Wei Li, Shi Li, Jing-Tao Xu
  • Patent number: 9202672
    Abstract: There is provided an apparatus and a method capable of preparing a standardized probe without need for working skill of probe processing.
    Type: Grant
    Filed: April 12, 2011
    Date of Patent: December 1, 2015
    Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Shinya Kitayama, Satoshi Tomimatsu, Tsuyoshi Onishi
  • Patent number: 9015861
    Abstract: The present invention relates to a method for covering Atomic Force Microscopy (AFM) tips by depositing a material in the form of nanoparticles with an aggregate source.
    Type: Grant
    Filed: May 4, 2011
    Date of Patent: April 21, 2015
    Assignee: Consejo Superior de Investigaciones Cientificas (CSIC)
    Inventors: Elisa Leonor Román García, Lidia Martínez Orellana, Mercedes Díaz Lagos, Yves Huttel
  • Patent number: 8988065
    Abstract: According to an embodiment, a microprobe includes a base and a lever. The base includes a first electrode provided on a surface thereof. The lever is supported by the base and includes a second electrode and a third electrode. The second electrode is connected between the first electrode and the third electrode. The third electrode is formed to project from the second electrode in a first direction in a main surface of the lever. A width of the third electrode in a second direction perpendicular to the first direction in the main surface defines a width of an electrical contact area when a scanning operation is performed by use of the third electrode in a third direction perpendicular to the main surface.
    Type: Grant
    Filed: February 27, 2014
    Date of Patent: March 24, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Yongfang Li, Yasushi Tomizawa
  • Patent number: 8966661
    Abstract: Disclosed is a method for fabricating a nanoscale probe. A first conductor and a second conductor are immersed into an electrolyte contained in an electrolytic tank. The first conductor and the second conductor are connected to a power source respectively. An electrolytic reaction is established when an electrical circuit is established between the first conductor and the second conductor. The second conductor is configured to output electrons. The first conductor is configured to receive electrons. Therefore, the first conductor is etched when the electrical circuit is established between the first conductor and the second conductor. A necking portion is created at the first conductor approximately near the surface of the electrolyte. A nanoscale probe is fabricated when first conductor breaks at the necking portion.
    Type: Grant
    Filed: July 23, 2013
    Date of Patent: February 24, 2015
    Assignee: Academia Sinica
    Inventors: Wei-Tse Chang, Ing-Shouh Hwang
  • Patent number: 8893310
    Abstract: A probe for scanned probe microscopy is provided. The probe includes a cantilever beam and a tip. The cantilever beam extends along a generally horizontal axis. The cantilever beam has a crystal facet surface that is oriented at a tilt angle with respect to the generally horizontal axis. The tip projects outwardly from the crystal facet surface.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: November 18, 2014
    Assignees: International Business Machines Corporation, Cornell University
    Inventors: Mark C. Reuter, Brian A. Bryce, Bojan R. Ilic, Sandip Tiwari
  • Patent number: 8819861
    Abstract: The invention provides methods for sharpening the tip of an electrical conductor. The methods of the invention are capable of producing tips with an apex radius of curvature less than 2 nm. The methods of the invention are based on simultaneous direction of ionized atoms towards the apex of a previously sharpened conducting tip and application of an electric potential difference to the tip. The sign of the charge on the ions is the same as the sign of the electric potential. The methods of the invention can be used to sharpen metal wires, metal wires tipped with conductive coatings, multi-walled carbon nanotubes, semiconducting nanowires and semiconductors in other forms.
    Type: Grant
    Filed: November 9, 2011
    Date of Patent: August 26, 2014
    Assignee: The Board of Trustees of the University of Illinois
    Inventors: Joseph W. Lyding, Scott W. Schmucker
  • Patent number: 8713711
    Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: April 29, 2014
    Assignee: Board of Regents of the Nevada System of Higher Education, on Behalf of the University of Nevada
    Inventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
  • Patent number: 8701211
    Abstract: A method of producing sharp tips useful for scanning probe microscopy and related applications is described. The tips are formed by deposition into a mold(s) formed in a sacrificial crystalline semiconductor substrate with an exposed {311} surface which has been etched with a crystallographic etchant to form a 3-sided, trihedral or trigonal pyramidal mold(s) or indentation(s). The resultant tips, when released from the sacrificial mold material or substrate, are typically formed in the shape of a trigonal pyramid or a tetrahedron. Another embodiment involves starting with a {100} surface and the formation of two tips on opposite ends of a wedge at trigonal or trihedral points of the wedge. These tips are less susceptible to the tip wedge effect typical of tips formed using known methods.
    Type: Grant
    Filed: August 25, 2010
    Date of Patent: April 15, 2014
    Assignee: Advanced Diamond Technologies, Inc.
    Inventor: Nicolae Moldovan
  • Patent number: 8695111
    Abstract: Method for producing a probe for atomic force microscopy with a silicon nitride cantilever and an integrated single crystal silicon tetrahedral tip with high resonant frequencies and low spring constants intended for high speed AFM imaging.
    Type: Grant
    Filed: October 18, 2011
    Date of Patent: April 8, 2014
    Inventor: Chung Hoon Lee
  • Patent number: 8689359
    Abstract: The present invention relates to an apparatus and a method for investigating surface properties of different materials, which make it possible to carry out atomic force microscopy with a simplified and faster shear force method. The apparatus according to the invention is characterized by perpendicular orientation of the measuring tip of a self-actuated cantilever with respect to the surface of the sample. A piezoresistive sensor and a bimorph actuator are preferably DC-isolated. The measuring tip is in the form of a carbon nanotube, in particular. A plurality of cantilevers can be arranged in the form of a cantilever array which is characterized by a comb-like arrangement of individual pre-bent cantilevers. The method according to the invention is distinguished by a fast feedback signal on account of the distance between the measuring tip and the surface to be investigated being regulated using the change in a DC signal which supplies the actuator.
    Type: Grant
    Filed: June 26, 2008
    Date of Patent: April 1, 2014
    Assignee: Nano Analytik GmbH
    Inventors: Ivo W. Rangelow, Tzvetan Ivanov, Burkhard Volland, Teodor Gotszalk, Miroslaw Woszczyna, Jerzy Mielczarski, Yanko Sarov
  • Patent number: 8683611
    Abstract: A high resolution AFM tip is provided which includes an AFM probe including a semiconductor cantilever having a semiconductor pyramid extending upward from a surface of the semiconductor cantilever, the semiconductor pyramid having an apex. The AFM tip also includes a single Al-doped semiconductor nanowire on the exposed apex of the semiconductor pyramid, wherein the single Al-doped semiconductor nanowire is epitaxial with respect to the apex of the semiconductor pyramid.
    Type: Grant
    Filed: September 10, 2012
    Date of Patent: March 25, 2014
    Assignees: International Business Machines Corporation, King Abdulaziz City for Science and Technology
    Inventors: Guy Cohen, Mark C. Reuter, Brent A. Wacaser, Maha M. Khayyat
  • Patent number: 8661561
    Abstract: A metal tip (1) for scanning probe applications is provided. The tip (1) has an axial extension (I), a radial extension (d), a pointy section (B) that extends axially from a section of maximum radial extension (5) to an atomically sharp end (9), and a blunt section (A) that extends axially from the section of maximum radial extension (5) to a blunt end (7), where the axial extension of the pointy section (B) is larger than the axial extension of the blunt section (A) The metal tip (1) has a mass of 10 ?g or less.
    Type: Grant
    Filed: August 2, 2010
    Date of Patent: February 25, 2014
    Assignee: SPECS Surface Nano Analysis GmbH
    Inventor: Erik Laegsgaard
  • Patent number: 8650661
    Abstract: A method and apparatus are provided of characterizing a re-entrant SPM probe tip (30) through a single scan of a characterizer, thus dramatically increasing throughput, accuracy, and repeatability when compared to prior known tip characterization techniques. The characterizer also preferably is one whose dimensions can be known with a high level of certainty in order to maximize characterization accuracy. These dimensions are also preferably very stable or, if unstable, change catastrophically rather than in a manner that is difficult or impossible to detect. A carbon nanotube (CNT), preferably a single walled carbon nanotube (SWCNT), has been found to be well-suited for this purpose. Multi-walled carbon nanotubes (MWCNTs) (130) and other structures may also suffice for this purpose. Also provided are a method and apparatus for monitoring the integrity of a CNT.
    Type: Grant
    Filed: February 20, 2007
    Date of Patent: February 11, 2014
    Assignee: Bruker Nano, Inc.
    Inventors: Gregory A. Dahlen, Hao-chih Liu
  • Publication number: 20140033374
    Abstract: Disclosed is a method for fabricating a nanoscale probe. A first conductor and a second conductor are immersed into an electrolyte contained in an electrolytic tank. The first conductor and the second conductor are connected to a power source respectively. An electrolytic reaction is established when an electrical circuit is established between the first conductor and the second conductor. The second conductor is configured to output electrons. The first conductor is configured to receive electrons. Therefore, the first conductor is etched when the electrical circuit is established between the first conductor and the second conductor. A necking portion is created at the first conductor approximately near the surface of the electrolyte. A nanoscale probe is fabricated when first conductor breaks at the necking portion.
    Type: Application
    Filed: July 23, 2013
    Publication date: January 30, 2014
    Applicant: ACADEMIA SINICA
    Inventors: WEI-TSE CHANG, ING-SHOUH HWANG
  • Patent number: 8621660
    Abstract: Provided is a method of evaluating a probe tip shape in a scanning probe microscope, including: measuring the probe tip shape by a probe shape test sample having a needle-like structure; determining radii of cross-sections at a plurality of distances from the apex; and calculating, based on the distances and the radii, a radius of curvature when the probe tip shape is approximated by a circle.
    Type: Grant
    Filed: January 9, 2013
    Date of Patent: December 31, 2013
    Assignee: Hitachi High-Tech Science Corporation
    Inventors: Masafumi Watanabe, Hiroumi Momota
  • Patent number: 8601610
    Abstract: An optical electric field enhancement element includes a nanorod which includes a plurality of conductive layers formed therein in a direction parallel to a longitudinal axis of the nanorod. Adjacent conductive layers are isolated from each other via an insulating layer. The nanorod exhibits an effect of enhancing an optical electric field.
    Type: Grant
    Filed: October 24, 2008
    Date of Patent: December 3, 2013
    Assignees: Japan Science and Technology Agency, National Institute for Materials Science
    Inventors: Yoshitaka Shingaya, Tomonobu Nakayama, Masakazu Aono
  • Patent number: 8584261
    Abstract: In a cantilever which is used in a scanning probe microscope or the like and has a trapezoidal cross-sectional shape formed through anisotropic etching in a silicon process, a cantilever spring constant is determined without measuring a thickness directly. A cantilever thickness is determined based on upper base and lower base lengths of the trapezoidal cross-sectional shape and geometric regularity of a surface generated by the anisotropic etching. Then, the cantilever spring constant is determined based on the cantilever thickness, a cantilever length, and a Young's modulus.
    Type: Grant
    Filed: July 10, 2012
    Date of Patent: November 12, 2013
    Assignee: SII Nanotechnology Inc.
    Inventors: Masafumi Watanabe, Hiroumi Momota
  • Publication number: 20130180019
    Abstract: Provided is a method of evaluating a probe tip shape in a scanning probe microscope, including: measuring the probe tip shape by a probe shape test sample having a needle-like structure; determining radii of cross-sections at a plurality of distances from the apex; and calculating, based on the distances and the radii, a radios of curvature when the probe tip shape is approximated by a circle.
    Type: Application
    Filed: January 9, 2013
    Publication date: July 11, 2013
    Applicant: SII NANOTECHNOLOGY INC.
    Inventor: SII NANOTECHNOLOGY INC.
  • Patent number: 8484761
    Abstract: An atomic force microscopy probe configuration and a method for manufacturing the same are disclosed. In one aspect, the probe configuration includes a cantilever, and a planar tip attached to the cantilever. The cantilever only partially overlaps the planar tip, and extends along a longitudinal direction thereof. The planar tip is of a two-dimensional geometry having at least one corner remote from the cantilever, which corner during use contacts a surface to be scanned.
    Type: Grant
    Filed: June 11, 2009
    Date of Patent: July 9, 2013
    Assignee: IMEC
    Inventors: Thomas Hantschel, Wilfried Vandervorst, Kai Arstila
  • Patent number: 8434161
    Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: April 30, 2013
    Assignee: Board of Regents of the Nevada System of Higher Education, on behalf of the University of Nevada
    Inventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
  • Patent number: 8434160
    Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: April 30, 2013
    Assignee: Board of Regents of the Nevada System of Higher Education, on behalf of the University of Nevada
    Inventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
  • Patent number: 8407811
    Abstract: In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.
    Type: Grant
    Filed: February 25, 2010
    Date of Patent: March 26, 2013
    Assignee: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Motoyuki Hirooka
  • Patent number: 8347411
    Abstract: The scanning probe microscope has a primary control loop (7, 11, 12) for keeping the phase and/or amplitude of deflection at constant values as well as a secondary control loop (9) that e.g. keeps the frequency of the cantilever oscillation constant by applying a suitable DC voltage to the probe while, at the same time, a conservative AC excitation is applied thereto. By actively controlling the frequency with the first control loop (7, 11, 12) and subsequently controlling the DC voltage in order to keep the frequency constant, a fast system is created that allows to determine the contact potential difference or a related property of the sample (3) quickly.
    Type: Grant
    Filed: July 14, 2006
    Date of Patent: January 1, 2013
    Assignee: Specs Zürich GmbH
    Inventors: Dominik Ziegler, Andreas Christian Stemmer, Jorg Rychen
  • Publication number: 20120255073
    Abstract: A scanning probe lithography (SPL) apparatus, an SPL method, and a material having a surface thickness patterned according to the SPL method. The apparatus includes: two or more probes with respective shapes, where the respective shapes are different and the respective shapes form, in operation, different patterns in a thickness of a surface of a material processed with the apparatus.
    Type: Application
    Filed: October 13, 2010
    Publication date: October 4, 2012
    Inventors: Michel Despont, Urs T. Duerig, Bernd W. Gotsmann, Armin W. Knoll, David Santos Pires, Peter Vettiger
  • Patent number: 8245318
    Abstract: Sidewall tracing nanoprobes, in which the tip shape of the nanoprobe Is altered so that the diameter or width of the very tip of the probe is wider than the diameter of the supporting stem. Such side protruding probe tips are fabricated by a subtractive method of reducing the stem diameter, an additive method of increasing the tip diameter, or sideway bending of the probe tip. These sidewall tracing nanoprobes are useful for inspection of semiconductor devices, especially to quantitatively evaluate the defects on the side wall of trenches or via holes.
    Type: Grant
    Filed: July 27, 2007
    Date of Patent: August 14, 2012
    Assignee: The Regents of the University of California
    Inventors: Sungho Jin, Li-Han Chen, Gregory Dahlen, Hao-Chih Liu
  • Patent number: 8220067
    Abstract: A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
    Type: Grant
    Filed: March 29, 2010
    Date of Patent: July 10, 2012
    Assignee: Board of Regents of the Nevada System of Higher Education
    Inventors: Jesse D. Adams, Todd A. Sulchek, Stuart C. Feigin
  • Patent number: 8220068
    Abstract: A scanning probe where the micromachined pyramid tip is extended by the growth of an epitaxial nanowire from the top portion of the tip is disclosed. A metallic particle, such as gold, may terminate the nanowire to realize an apertureless near-field optical microscope probe.
    Type: Grant
    Filed: July 31, 2009
    Date of Patent: July 10, 2012
    Assignee: International Business Machines Corporation
    Inventors: Guy M. Cohen, Hendrik F. Hamann
  • Publication number: 20120174269
    Abstract: A metal tip (1) for scanning probe applications is provided. The tip (1) has an axial extension (I), a radial extension (d), a pointy section (B) that extends axially from a section of maximum radial extension (5) to an atomically sharp end (9), and a blunt section (A) that extends axially from the section of maximum radial extension (5) to a blunt end (7), where the axial extension of the pointy section (B) is larger than the axial extension of the blunt section (A) The metal tip (1) has a mass of 10 ?g or less.
    Type: Application
    Filed: August 2, 2010
    Publication date: July 5, 2012
    Applicant: SPECS SURFACE NANO ANALYSIS GMBH
    Inventor: Erik Laegsgaard
  • Publication number: 20120159678
    Abstract: The invention provides methods for sharpening the tip of an electrical conductor. The methods of the invention are capable of producing tips with an apex radius of curvature less than 2 nm. The methods of the invention are based on simultaneous direction of ionized atoms towards the apex of a previously sharpened conducting tip and application of an electric potential difference to the tip. The sign of the charge on the ions is the same as the sign of the electric potential. The methods of the invention can be used to sharpen metal wires, metal wires tipped with conductive coatings, multi-walled carbon nanotubes, semiconducting nanowires and semiconductors in other forms.
    Type: Application
    Filed: November 9, 2011
    Publication date: June 21, 2012
    Inventors: Joseph W. LYDING, Scott W. Schmucker
  • Patent number: 8201268
    Abstract: An optical tip for a Near-field Scanning Optical Microscope (NSOM) is provided. The optical tip includes a waveguide with a semiconductor or metal core and a cladding. The refractive-index-square-ratio contrast between the core and the cladding is at least 0.3. The optical tip may also include a light detector and a light source. The waveguide, the light source and the light detector may be integrated to form a single chip.
    Type: Grant
    Filed: November 12, 2009
    Date of Patent: June 12, 2012
    Assignee: Optonet Inc.
    Inventors: Seng-Tiong Ho, Yingyan Huang
  • Patent number: 8104332
    Abstract: To provide a probe 1 for use in a cantilever 2 of an scanning probe microscope (SPM) manufacturable in a simple manufacturing process and usable while allowing full use of the properties of single-crystalline material and a cantilever 2 using that probe. A probe 1 disposed at the tip of beam part 2a of a cantilever 2 used for an SPM, wherein the probe 1 comprises a needle-like part 1a having a length of not less than 10 ?m or and a flat plate part 1b having a face contacting a beam part of the cantilever, the needle-like part 1a and the flat plate part 1b are integrally formed with a single-crystalline material, and at least one side face of the flat plate part 1b contains a flat surface 1c in order to indicate the crystal orientation of the single-crystalline material.
    Type: Grant
    Filed: July 15, 2010
    Date of Patent: January 31, 2012
    Assignee: Namiki Seimitsu Houseki Kabushiki Kaisha
    Inventors: Kouji Koyama, Toshiro Kotaki, Kazuhiko Sunagawa
  • Patent number: 8028567
    Abstract: AFM tweezers that include a first probe, including a triangular prism member having a tip of a ridge which is usable as a probe tip in a scanning probe microscope, and a second probe, including a triangular prism member provided so as to open/close with respect to the first probe, are provided. The first probe and the second probe are juxtaposed such that a predetermined peripheral surface of the triangular prism member of the first probe and a predetermined peripheral surface of the triangular prism member of the second probe face substantially in parallel to each other, and the first probe formed of a notch that prevents interference with a sample when the sample is scanned by the tip of the ridge.
    Type: Grant
    Filed: June 20, 2008
    Date of Patent: October 4, 2011
    Assignees: AOI Electronics Co., Ltd., SII Nano Technology Inc.
    Inventors: Tatsuya Kobayashi, Masato Suzuki, Masatoshi Yasutake, Takeshi Umemoto
  • Patent number: 8011016
    Abstract: An SPM probe with an elongated support element and a cantilever projecting beyond the front face of the support element and carrying a scanning tip, with the cantilever arranged at a front face side of the support element of the probe, protruding there from a front face side flank, and with the support element having an essentially trapezoidal cross-section with a longer and a shorter transverse edge at the face side flank, and also with critical corners at one of the transverse edges of the face side flank that are closest to a sample during the scanning process, wherein the support element has an elongated raised portion extending in the longitudinal direction of the support element and of the cantilever, with the raised portion having an essentially trapezoidal cross-section, and with the cantilever arranged on the face side on a narrow transverse edge of the raised portion of the support element, and with the raised portion with the cantilever arranged preferably at the longer transverse edge of the face
    Type: Grant
    Filed: March 12, 2009
    Date of Patent: August 30, 2011
    Assignee: NanoWorld AG
    Inventors: Thomas Sulzbach, Christoph Richter
  • Patent number: 7997123
    Abstract: A dispensing device has a cantilever comprising a plurality of thin films arranged relative to one another to define a microchannel in the cantilever and to define at least portions of a dispensing microtip proximate an end of the cantilever and communicated to the microchannel to receive material therefrom. The microchannel is communicated to a reservoir that supplies material to the microchannel. One or more reservoir-fed cantilevers may be formed on a semiconductor chip substrate. A sealing layer preferably is disposed on one of the first and second thin films and overlies outermost edges of the first and second thin films to seal the outermost edges against material leakage. Each cantilever includes an actuator, such as for example a piezoelectric actuator, to impart bending motion thereto. The microtip includes a pointed pyramidal or conical shaped microtip body and an annular shell spaced about the pointed microtip body to define a material-dispensing annulus thereabout.
    Type: Grant
    Filed: June 19, 2007
    Date of Patent: August 16, 2011
    Assignee: Northwestern University
    Inventors: Horacio D. Espinosa, Nicolaie A. Moldovan, Keun-Ho Kim
  • Patent number: 7945966
    Abstract: The invention relates to a nanoprobe comprising a silica fiber (2) with an end opening having a diameter of less than 100 nm, and a metallic sheath (11). The total diameter of the silica part and the metallic sheath (11) is less than 300 nm. The invention also relates to a method for producing one such nanoprobe.
    Type: Grant
    Filed: June 6, 2006
    Date of Patent: May 17, 2011
    Inventors: Tiberiu Minea, Guy Louarn, Guirec Ollivier, Marc Chaigneau
  • Patent number: 7921465
    Abstract: A system (100) for characterizing surfaces can include a nanotip microscope (104) in a first pressure envelope (102) at a first pressure with an electrically conductive nanotip (110) mounted thereon for characterizing a sample surface. The system can also include an ion imaging system (122, 124, 128) within a second pressure envelope (120) at a second pressure. The second pressure can less than or equal to the first pressure and the pressure envelopes (102, 120) can be separated by a pressure limiting aperture (PLA) (132). The system can further include gas sources (116, 118) for introducing into the first pressure envelope (102) at least one gas, and a voltage supply (114) coupled to the nanotip (110) for generating an electric field between the nanotip (114) and the PLA (132).
    Type: Grant
    Filed: August 14, 2008
    Date of Patent: April 5, 2011
    Assignee: Texas Instruments Incorporated
    Inventor: Vladimir Ukraintsev
  • Publication number: 20110055987
    Abstract: A method of producing sharp tips useful for scanning probe microscopy and related applications is described. The tips are formed by deposition into a mold(s) formed in a sacrificial crystalline semiconductor substrate with an exposed {311} surface which has been etched with a crystallographic etchant to form a 3-sided, trihedral or trigonal pyramidal mold(s) or indentation(s). The resultant tips, when released from the sacrificial mold material or substrate, are typically formed in the shape of a trigonal pyramid or a tetrahedron. Another embodiment involves starting with a {100} surface and the formation of two tips on opposite ends of a wedge at trigonal or trihedral points of the wedge. These tips are less susceptible to the tip wedge effect typical of tips formed using known methods.
    Type: Application
    Filed: August 25, 2010
    Publication date: March 3, 2011
    Inventor: Nicolae MOLDOVAN
  • Patent number: 7854016
    Abstract: A process manufactures a probe intended to interact with a storage medium of a probe-storage system, wherein a sacrificial layer is deposited on top of a substrate; a hole is formed in the sacrificial layer; a mold layer is deposited; the mold layer is etched via the technique for forming spacers so as to form a mold region delimiting an opening having an area decreasing towards the substrate. Then a stack of conductive layers is deposited on top of the sacrificial layer, the stack is etched so as to form a suspended structure, formed by a pair of supporting arms arranged to form a V, and an interaction tip projecting monolithically from the supporting arms. Then a stiffening structure is formed, of insulating material, and the suspended structure is fixed to a supporting wafer. The substrate, the sacrificial layer, and, last, the mold region are then removed.
    Type: Grant
    Filed: December 18, 2007
    Date of Patent: December 14, 2010
    Assignee: STMicroelectronics S.r.l.
    Inventor: Agostino Pirovano
  • Patent number: 7823470
    Abstract: A cantilever includes: a lever portion; a holder portion supporting the proximal end of the lever portion; a probe portion arranged at the distal end of the lever portion and having a spherical surface to face a sample; and a retaining portion fixed to the distal end of the lever portion and retaining the probe portion to surround a periphery of the probe portion. There is provided a cantilever allowing mounting of a probe portion with little effect in a short time without using any adhesive.
    Type: Grant
    Filed: February 22, 2007
    Date of Patent: November 2, 2010
    Assignee: Seiko Instruments Inc.
    Inventors: Masatsugu Shigeno, Osamu Matsuzawa, Naoya Watanabe, Amiko Nihei, Akira Inoue, Yoshiharu Shirakawabe, Hiroshi Muramatsu, Yuji Yamamoto
  • Publication number: 20100235954
    Abstract: A device comprising at least one cantilever comprising at least two tips is described, where the tips have substantially the same tip heights. Methods for making and using such a device are also provided. The height of one tip off of the surface can be more easily determined when the two tips have equal height.
    Type: Application
    Filed: May 13, 2009
    Publication date: September 16, 2010
    Inventors: Albert K. HENNING, Joseph S. Fragala, Raymond Roger Shile
  • Patent number: 7737414
    Abstract: A method for preparing an iridium tip with atomic sharpness. The method includes tapering an iridium wire to a needle shape and heating the iridium needle in an oxygen atmosphere. Also disclosed is an iridium needle having a pyramidal structure which terminates with a small number of atoms prepared by the methods.
    Type: Grant
    Filed: October 26, 2007
    Date of Patent: June 15, 2010
    Assignee: Academia Sinica
    Inventors: Hong-Shi Kuo, Ing-Shouh Hwang, Tien T. Tsong, Tsu-Yi Fu
  • Patent number: 7703147
    Abstract: The present disclosure relates to a method for fabricating a scanning probe microscope (SPM) nanoneedle probe using an ion beam, a SPM nanoneedle probe, a method of fabricating a critical dimension scanning probe microscope (CD-SPM) nanoneedle probe using an ion beam, a CD-SPM nanoneedle probe, and uses thereof. A disclosed method can comprise: positioning the probe so that a tip of the probe on which the nanoneedle is attached faces toward a direction in which the ion beam is irradiated; and aligning the nanoneedle attached on the tip of the probe with the ion beam in parallel by irradiating the ion beam toward the tip of the probe on which the nanoneedle is attached.
    Type: Grant
    Filed: July 1, 2005
    Date of Patent: April 20, 2010
    Assignee: Korea Research Institute of Standards and Science
    Inventors: Byong-Cheon Park, Ki-Young Jung, Won-Young Song, Jae-Wan Hong, Beom-Hoan O, Sang-Jung Ahn
  • Publication number: 20100071100
    Abstract: Provided herein are methods and apparatuses for analyzing molecules, particularly polymers, and molecular complexes with extended conformations. In particular, the methods and apparatuses are used to identify sequence information in molecules or molecular ensembles, which is subsequently used to determine structural information about the molecules. Further, provided herein are various methods of forming probes and films for making such probes of nanoscale dimension.
    Type: Application
    Filed: April 7, 2006
    Publication date: March 18, 2010
    Inventor: Sadeg M. Faris
  • Publication number: 20100043108
    Abstract: In a tip having a carbon nanotube tip used to a scanning probe microscope, its length of the tip is adjusted in a several order of 10 nm and the tip maintains cylindrical shape up to the extremity portion.
    Type: Application
    Filed: October 31, 2008
    Publication date: February 18, 2010
    Inventors: Motoyuki Hirooka, Makoto Okai, Takafumi Morimoto, Satoshi Sekino, Hiroki Tanaka, Masato Takashina, Yuuki Uozumi
  • Patent number: 7635392
    Abstract: The present invention provides a scanning probe microscope cantilever comprising a support portion, a lever portion extended from the support portion, and a needle projecting out of a first surface of the cantilever in the vicinity of a free end of the lever portion. From a second surface of the cantilever opposite the first surface, a bore extends through the needle to an aperture formed at a tip of the needle. To the tip of the needle, a substantially globular particle is attached. A method of scanning a sample surface comprises creating relative cantilever motion substantially toward the sample such that the particle experiences a contact force with the sample, illuminating a top surface of the cantilever with laser light such that a portion of the laser light passes through the hollow needle and is emitted from the aperture onto the particle, and detecting scattered light from the sample.
    Type: Grant
    Filed: August 14, 2007
    Date of Patent: December 22, 2009
    Assignee: Qimonda AG
    Inventors: Harald Bloess, Andreas Heidelberg, Jens-Hendrik Zollondz
  • Patent number: 7618465
    Abstract: The invention relates to a near-field antenna comprising a dielectric shaped body having a tip. The shaped body is characterized in that at least the surface of the tip is metallized, thereby enhancing the sensitivity of devices comprising the near-field antenna, for example, spectroscopes, microscopes or read-write heads.
    Type: Grant
    Filed: November 19, 2005
    Date of Patent: November 17, 2009
    Assignee: Forschungszentrum Julich GmbH
    Inventors: Norbert Klein, Filip Kadlec, Petr Kuźel
  • Patent number: 7578853
    Abstract: A scanning probe microscope system comprising a hollow probe 3, a tube 4 connected to a rear end 32 of the hollow probe 3, a support table 1 provided under the hollow probe 3, and a substrate 2 and a means 5 for washing the hollow probe 3 that are fixed to the support table 1, a sample S passing through the tube 4 and the hollow probe 3, and the substrate 2 and the washing means 5 being moved by the support table 1 such that each of them opposes the hollow probe 3.
    Type: Grant
    Filed: July 1, 2005
    Date of Patent: August 25, 2009
    Assignee: Honda Motor Co., Ltd.
    Inventors: Tatsuya Hattori, Pu Qian