Nanotube Tips (epo) Patents (Class 850/58)
  • Patent number: 9409141
    Abstract: A method of synthesizing a metal oxide nanowire includes the steps of: combining an amount of a transition metal or a transition metal oxide with an amount of an alkali metal compound to produce a mixture; activating a plasma discharge reactor to create a plasma discharge; exposing the mixture to the plasma discharge for a first predetermined time period such that transition metal oxide nanowires are formed; contacting the transition metal oxide nanowires with an acid solution such that an alkali metal ion is exchanged for a hydrogen ion on each of the transition metal oxide nanowires; and exposing the transition metal oxide nanowires to the plasma discharge for a second predetermined time period to thermally anneal the transition metal oxide nanowires. Transition metal oxide nanowires produced using the synthesis methods described herein are also provided.
    Type: Grant
    Filed: July 14, 2011
    Date of Patent: August 9, 2016
    Assignee: University of Louisville Research Foundation
    Inventors: Mahendra Kumar Sunkara, Vivekanand Kumar, Jeong H. Kim, Ezra Lee Clark
  • Patent number: 9097664
    Abstract: Methods and systems are provided for concentrating particles (e.g., bacteria, viruses, cells, and nucleic acids) suspended in a liquid. Electric-field-induced forces urge the particles towards a first electrode immersed in the liquid. When the particles are in close proximity to (e.g., in contact with) the first electrode, the electrode is withdrawn from the liquid and capillary forces formed between the withdrawing electrode and the surface of the liquid immobilize the particles on the electrode. Upon withdrawal of the electrode from the liquid, the portion of the electrode previously immersed in the liquid has particles immobilized on its surface.
    Type: Grant
    Filed: December 13, 2013
    Date of Patent: August 4, 2015
    Assignee: University of Washington
    Inventors: Jae-Hyun Chung, Woonhong Yeo, Kyong-Hoon Lee, Jeffrey W. Chamberlain, Gareth Fotouhi, Shieng Liu, Kie Seok Oh, Daniel M. Ratner, Dayong Gao, Fong-Li Chou
  • Patent number: 9099273
    Abstract: The present invention relates to a method for manufacturing a plurality of nanostructures comprising the steps of providing a plurality of protruding base structures (104) arranged on a surface of a first substrate (102), providing a seed layer mixture, comprising a solvent/dispersant and a seed material, in contact with the protruding base structures, providing a second substrate arranged in parallel with the first substrate adjacent to the protruding base structures, thereby enclosing a majority of the seed layer mixture between the first and second substrates, evaporating the solvent, thereby forming a seed layer (110) comprising the seed material on the protruding base structures, removing the second substrate, providing a growth mixture, comprising a growth agent, in contact with the seed layer, and controlling the temperature of the growth mixture so that nanostructures (114) are formed on the seed layer via chemical reaction in presence of the growth agent.
    Type: Grant
    Filed: October 5, 2012
    Date of Patent: August 4, 2015
    Assignee: Lightlab Sweden AB
    Inventors: Qiu-Hong Hu, Shang-Ray Yang, Kjell Bohlin
  • Patent number: 9015861
    Abstract: The present invention relates to a method for covering Atomic Force Microscopy (AFM) tips by depositing a material in the form of nanoparticles with an aggregate source.
    Type: Grant
    Filed: May 4, 2011
    Date of Patent: April 21, 2015
    Assignee: Consejo Superior de Investigaciones Cientificas (CSIC)
    Inventors: Elisa Leonor Román García, Lidia Martínez Orellana, Mercedes Díaz Lagos, Yves Huttel
  • Patent number: 8898811
    Abstract: Disclosed herein describes an SERS sensing substrate comprising upright metal nanostructures made by using oblique angle deposition (OAD) collocating with self-rotation substrate, wherein said upright nanostructures include individual upright nanopillars and metal/dielectric multilayered upright nanopillar stacks. The SERS sensing substrate exhibits higher and enhanced adsorption spectra for unpolarized incident rays in the visible and infrared wavelength regimes.
    Type: Grant
    Filed: December 28, 2012
    Date of Patent: November 25, 2014
    Assignees: Phansco Corp., National Taipei University of Technology
    Inventors: Yi-Jun Jen, Ching-Wei Yu
  • Patent number: 8893310
    Abstract: A probe for scanned probe microscopy is provided. The probe includes a cantilever beam and a tip. The cantilever beam extends along a generally horizontal axis. The cantilever beam has a crystal facet surface that is oriented at a tilt angle with respect to the generally horizontal axis. The tip projects outwardly from the crystal facet surface.
    Type: Grant
    Filed: July 2, 2012
    Date of Patent: November 18, 2014
    Assignees: International Business Machines Corporation, Cornell University
    Inventors: Mark C. Reuter, Brian A. Bryce, Bojan R. Ilic, Sandip Tiwari
  • Patent number: 8726411
    Abstract: A charged probe and an electric field measuring method are provided. The probe can be charged with single electricity on single nano particle attached on the top of the probe tip being a charged probe and the probe is applicable for measuring the electric fields of object in the nano scale. The probe comprises an insulating tip base, a cantilever and a single nano-particle. The cantilever is arranged for supporting the insulating tip base and the single nano-particle is configured on the erosion plane. After conducting contact electrification method to charge the electric nano particle, the single nano-particle will be charged with fixed number of single electrical charge. Then, the amount of the fixed number of single electrical charge is calculated by the virtual image charge calculation method. The charged probe can be used to measure the electric fields distribution by tapping mode or f-d curve measurement.
    Type: Grant
    Filed: June 18, 2013
    Date of Patent: May 13, 2014
    Assignee: National Tsing Hua University
    Inventors: Fan-Gang Tseng, Joe-Ming Chang
  • Patent number: 8716938
    Abstract: A thermionic emission device includes an insulating substrate, a patterned carbon nanotube film structure, a positive electrode and a negative electrode. The insulating substrate includes a surface. The surface includes an edge. The patterned carbon nanotube film structure is partially arranged on the surface of the insulating substrate. The patterned carbon nanotube film structure includes two strip-shaped arms joined at one end to form a tip portion protruded from the edge of the surface of the insulating substrate and suspended. The patterned carbon nanotube film structure includes a number of carbon nanotubes parallel to the surface of the insulating substrate. The patterned carbon nanotube film structure is connected between the positive electrode and the negative electrode in series.
    Type: Grant
    Filed: August 23, 2012
    Date of Patent: May 6, 2014
    Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.
    Inventors: Yang Wei, Shou-Shan Fan
  • Patent number: 8689359
    Abstract: The present invention relates to an apparatus and a method for investigating surface properties of different materials, which make it possible to carry out atomic force microscopy with a simplified and faster shear force method. The apparatus according to the invention is characterized by perpendicular orientation of the measuring tip of a self-actuated cantilever with respect to the surface of the sample. A piezoresistive sensor and a bimorph actuator are preferably DC-isolated. The measuring tip is in the form of a carbon nanotube, in particular. A plurality of cantilevers can be arranged in the form of a cantilever array which is characterized by a comb-like arrangement of individual pre-bent cantilevers. The method according to the invention is distinguished by a fast feedback signal on account of the distance between the measuring tip and the surface to be investigated being regulated using the change in a DC signal which supplies the actuator.
    Type: Grant
    Filed: June 26, 2008
    Date of Patent: April 1, 2014
    Assignee: Nano Analytik GmbH
    Inventors: Ivo W. Rangelow, Tzvetan Ivanov, Burkhard Volland, Teodor Gotszalk, Miroslaw Woszczyna, Jerzy Mielczarski, Yanko Sarov
  • Patent number: 8683611
    Abstract: A high resolution AFM tip is provided which includes an AFM probe including a semiconductor cantilever having a semiconductor pyramid extending upward from a surface of the semiconductor cantilever, the semiconductor pyramid having an apex. The AFM tip also includes a single Al-doped semiconductor nanowire on the exposed apex of the semiconductor pyramid, wherein the single Al-doped semiconductor nanowire is epitaxial with respect to the apex of the semiconductor pyramid.
    Type: Grant
    Filed: September 10, 2012
    Date of Patent: March 25, 2014
    Assignees: International Business Machines Corporation, King Abdulaziz City for Science and Technology
    Inventors: Guy Cohen, Mark C. Reuter, Brent A. Wacaser, Maha M. Khayyat
  • Patent number: 8635710
    Abstract: Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
    Type: Grant
    Filed: April 13, 2012
    Date of Patent: January 21, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Toshiaki Morita, Motoyuki Hirooka
  • Patent number: 8595860
    Abstract: A method of producing a probe device for a metrology instrument such as an AFM includes providing a substrate and forming a tip stock extending upwardly from the substrate. The tip stock is preferably FIB milled to form a tip of the probe device. The tip preferably has a high aspect ratio, with a height that is at least about 1 micron for performing critical dimension (e.g., deep trench) atomic force microscopy. The stock is preferably pedestal shaped having a distal end that is substantially planar which can be machined into a tip in at least less than about 2 minutes. With the preferred embodiments, the FIB milling step can be completed in substantially fewer and less complicated steps than known techniques to produce a high aspect ratio tip suitable for DT-AFM in less than about one minute.
    Type: Grant
    Filed: December 29, 2008
    Date of Patent: November 26, 2013
    Assignee: Bruker Nano, Inc.
    Inventors: Weijie Wang, Steven Nagle
  • Patent number: 8516611
    Abstract: An atomic force microscope probe includes a carbon nanotube micro-tip structure. The carbon nanotube micro-tip structure includes an insulating substrate and a patterned carbon nanotube film structure. The insulating substrate includes a surface. The surface includes an edge. The patterned carbon nanotube film structure is partially arranged on the surface of the insulating substrate. The patterned carbon nanotube film structure includes two strip-shaped arms joined together to form a tip portion protruding and suspending from the edge of the surface of the insulating substrate. The two strip-shaped arms include a number of carbon nanotubes parallel to the surface of the insulating substrate.
    Type: Grant
    Filed: August 23, 2012
    Date of Patent: August 20, 2013
    Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.
    Inventors: Yang Wei, Shou-Shan Fan
  • Patent number: 8495760
    Abstract: Techniques for atomic force microscope manipulation of living cells include functionalizing a nanoscale tip of a microscale cantilever with a first ligand for a first receptor associated with a surface of a first type of cell. The method further comprises, controlling the cantilever to cause the first ligand on the nanoscale tip to contact the first receptor on a surface of a living cell of the first type in a particular temporal pattern to induce a target response by the living cell. Other techniques for controlling an atomic force microscope comprising a nanoscale tip include controlling the cantilever to cause the nanoscale tip to contact a living cardiomyocyte at a predetermined pressure. The cantilever is also controlled to turn off vertical deflection feedback after contacting the cardiomyocyte and collecting deflection data that indicates a time series of nanoscale vertical deflections of the microscale cantilever caused by the living cardiomyocyte.
    Type: Grant
    Filed: November 30, 2011
    Date of Patent: July 23, 2013
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Manish J Butte, Marc Amor Bruce, Jianwei Liu
  • Patent number: 8474061
    Abstract: A method of fabricating high resolution atomic force microscopy (AFM) tips including a single semiconductor nanowire grown at an apex of a semiconductor pyramid of each AFM tip is provided. The semiconductor nanowire that is grown has a controllable diameter and a high aspect ratio, without significant tapering from the tip of the semiconductor nanowire to its base. The method includes providing an AFM probe including a semiconductor cantilever having a semiconductor pyramid extending upward from a surface of said semiconductor cantilever. The semiconductor pyramid has an apex. A patterned oxide layer is formed on the AFM probe. The patterned oxide layer has an opening that exposes the apex of the semiconductor pyramid. A single semiconductor nanowire is grown on the exposed apex of the semiconductor pyramid utilizing a non-oxidized Al seed material as a catalyst for nanowire growth.
    Type: Grant
    Filed: September 10, 2012
    Date of Patent: June 25, 2013
    Assignees: International Business Machines Corporation, King Abdulaziz City for Science and Technology
    Inventors: Guy Cohen, Mark C. Reuter, Brent A. Wacaser, Maha M. Khayyat
  • Patent number: 8407811
    Abstract: In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.
    Type: Grant
    Filed: February 25, 2010
    Date of Patent: March 26, 2013
    Assignee: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Motoyuki Hirooka
  • Patent number: 8321961
    Abstract: A method of fabricating high resolution atomic force microscopy (AFM) tips including a single semiconductor nanowire grown at an apex of a semiconductor pyramid of each AFM tip is provided. The semiconductor nanowire that is grown has a controllable diameter and a high aspect ratio, without significant tapering from the tip of the semiconductor nanowire to its base. The method includes providing an AFM probe including a semiconductor cantilever having a semiconductor pyramid extending upward from a surface of said semiconductor cantilever. The semiconductor pyramid has an apex. A patterned oxide layer is formed on the AFM probe. The patterned oxide layer has an opening that exposes the apex of the semiconductor pyramid. A single semiconductor nanowire is grown on the exposed apex of the semiconductor pyramid utilizing a non-oxidized Al seed material as a catalyst for nanowire growth.
    Type: Grant
    Filed: October 7, 2010
    Date of Patent: November 27, 2012
    Assignees: International Business Machines Corporation, King Abdulazlz City for Science and Technology
    Inventors: Guy Cohen, Mark C. Reuter, Brent A. Wacaser, Maha M. Khayyat
  • Patent number: 8272068
    Abstract: In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.
    Type: Grant
    Filed: February 26, 2008
    Date of Patent: September 18, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Motoyuki Hirooka
  • Patent number: 8245318
    Abstract: Sidewall tracing nanoprobes, in which the tip shape of the nanoprobe Is altered so that the diameter or width of the very tip of the probe is wider than the diameter of the supporting stem. Such side protruding probe tips are fabricated by a subtractive method of reducing the stem diameter, an additive method of increasing the tip diameter, or sideway bending of the probe tip. These sidewall tracing nanoprobes are useful for inspection of semiconductor devices, especially to quantitatively evaluate the defects on the side wall of trenches or via holes.
    Type: Grant
    Filed: July 27, 2007
    Date of Patent: August 14, 2012
    Assignee: The Regents of the University of California
    Inventors: Sungho Jin, Li-Han Chen, Gregory Dahlen, Hao-Chih Liu
  • Patent number: 8220068
    Abstract: A scanning probe where the micromachined pyramid tip is extended by the growth of an epitaxial nanowire from the top portion of the tip is disclosed. A metallic particle, such as gold, may terminate the nanowire to realize an apertureless near-field optical microscope probe.
    Type: Grant
    Filed: July 31, 2009
    Date of Patent: July 10, 2012
    Assignee: International Business Machines Corporation
    Inventors: Guy M. Cohen, Hendrik F. Hamann
  • Patent number: 8181268
    Abstract: Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
    Type: Grant
    Filed: December 18, 2008
    Date of Patent: May 15, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Toshiaki Morita, Motoyuki Hirooka
  • Patent number: 8161568
    Abstract: A cantilever has a probe portion and a cantilever portion having a free end portion from which the probe portion extends. A displacement detecting portion detects a displacement of the cantilever portion according to an interaction between a sample and the probe portion. An electrode portion is connected to the displacement detecting portion. An insulation film is formed over at least one of the electrode portion and the displacement detecting portion. A functional coating in the form one of a conductive film, a magnetic film, and a film having a light intensity amplifying effect is disposed on the insulation film.
    Type: Grant
    Filed: November 24, 2009
    Date of Patent: April 17, 2012
    Assignee: SII NanoTechnology Inc.
    Inventors: Masato Iyoki, Naoya Watanabe
  • Patent number: 8076124
    Abstract: A method for the transient transformation of a living biological cell having an intact cell membrane defining an intracellular domain, and an apparatus for the transient transformation of biological cells. The method and apparatus include introducing a compartmentalized extracellular component fixedly attached to a cellular penetrant structure to the intracellular domain of the cell, wherein the cell is fixed in a predetermined location and wherein the component is expressed within in the cell while being retained within the compartment and wherein the compartment restricts the mobility and interactions of the component within the cell and prevents transference of the component to the cell.
    Type: Grant
    Filed: January 17, 2007
    Date of Patent: December 13, 2011
    Assignee: UT-Battelle, LLC
    Inventors: Timothy E. McKnight, Anatoli V. Melechko, Michael L. Simpson
  • Patent number: 8006316
    Abstract: A method for interrogating a surface using scanning probe microscopy comprises bringing a scanning probe into proximity with the surface and controlling the position of the probe relative to the surface to maintain a constant distance, characterized in that pressure is applied to the surface by a regulated flow of liquid through the probe, with subsequent monitoring of the position of the probe, wherein movement of the probe indicates a consequent movement of the surface.
    Type: Grant
    Filed: August 1, 2007
    Date of Patent: August 23, 2011
    Assignee: Ionscope Ltd
    Inventors: Yuri Evgenievich Korchev, Max Joseph Lab, Daniel Paulo Sànchez-Herrera
  • Publication number: 20110203021
    Abstract: The present invention relates to SPM nanoprobes and the preparation method thereof, more particularly, to SPM nanoprobes comprising a spheroid deposit capped-nanoneedle bonded to one end of a mother tip, wherein the spheroid deposit is formed by particle beam induced deposition and is characterized in that the ratio of the diameter of the spheroid deposit to that of the nanoneedle is in the range of 1.5 to 8.5. The SPM nanoprobe according to the present invention is capable of imaging or measuring an irregularly curved or complicated surface, pattern and/or a frictional or adhesive force thereof and controlling size of a spheroid deposit formed at the end portion of nanoneedle and the ratio of the diameter of the spheroid deposit to that of the nanoneedle arbitrarily.
    Type: Application
    Filed: July 31, 2009
    Publication date: August 18, 2011
    Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
    Inventors: Sang Jung An, Buong Chon Park, Yung-ho Kahng, Jin Ho Choi, Kwang Hoon Jeong
  • Patent number: 7917966
    Abstract: Techniques for fabricating carbon nanotubes aligned on a tip are provided. In one embodiment, a method for fabricating carbon nanotubes aligned on a tip includes forming nanostructures on the tip, and aligning the nanostructures on the tip using a fluid flowing on the tip.
    Type: Grant
    Filed: August 21, 2008
    Date of Patent: March 29, 2011
    Assignee: SNU R&DB Foundation
    Inventors: Yong Hyup Kim, Wal Jun Kim
  • Patent number: 7854016
    Abstract: A process manufactures a probe intended to interact with a storage medium of a probe-storage system, wherein a sacrificial layer is deposited on top of a substrate; a hole is formed in the sacrificial layer; a mold layer is deposited; the mold layer is etched via the technique for forming spacers so as to form a mold region delimiting an opening having an area decreasing towards the substrate. Then a stack of conductive layers is deposited on top of the sacrificial layer, the stack is etched so as to form a suspended structure, formed by a pair of supporting arms arranged to form a V, and an interaction tip projecting monolithically from the supporting arms. Then a stiffening structure is formed, of insulating material, and the suspended structure is fixed to a supporting wafer. The substrate, the sacrificial layer, and, last, the mold region are then removed.
    Type: Grant
    Filed: December 18, 2007
    Date of Patent: December 14, 2010
    Assignee: STMicroelectronics S.r.l.
    Inventor: Agostino Pirovano
  • Patent number: 7814565
    Abstract: Techniques for forming a nanostructure on a probe tip are provided.
    Type: Grant
    Filed: August 27, 2008
    Date of Patent: October 12, 2010
    Assignee: SNU R&DB Foundation
    Inventors: Yong Hyup Kim, Tae June Kang
  • Patent number: 7735357
    Abstract: An SPM cantilever of the present invention including: a support portion (1) fabricated by processing a single crystal silicon wafer; a lever portion (2) formed in a manner extended from the support portion; a probe (3) disposed at a free end side of the lever portion; a coating of graphite film (5) covering all over the side on which the probe is formed and the entire probe; and a piece of thin line (6) consisting of a carbon nanofiber (CNF) or carbon nanotube (CNT) or graphite nanofiber (GNF) grown/formed from the graphite film at a probe terminal end portion (3a).
    Type: Grant
    Filed: April 20, 2005
    Date of Patent: June 15, 2010
    Assignee: Olympus Corporation
    Inventors: Masashi Kitazawa, Ryo Ota, Masaki Tanemura
  • Patent number: 7735358
    Abstract: The present invention provides a self-sensing tweezer device for micro and nano-scale manipulation, assembly, and surface modification, including: one or more elongated beams disposed in a first configuration; one or more oscillators coupled to the one or more elongated beams, wherein the one or more oscillators are operable for selectively oscillating the one or more elongated beams to form one or more “virtual” probe tips; and an actuator coupled to the one or more elongated beams, wherein the actuator is operable for selectively actuating the one or more elongated beams from the first configuration to a second configuration.
    Type: Grant
    Filed: June 15, 2007
    Date of Patent: June 15, 2010
    Assignee: Insitutec, Inc.
    Inventors: Marcin B. Bauza, Shane C. Woody, Stuart T. Smith
  • Publication number: 20100132080
    Abstract: An encapsulated nanostructure fabricated using layers of polymer material and further processed for use in a micro-scale target device is presented. The fabrication includes the formation on a substrate of an array of encapsulated nanostructures. The encapsulated nanostructures each include a nanostructure and a micro-scale, multi-block structure that encapsulates the nanostructure. Each encapsulated nanostructure can be made usable by a target device by removing, e.g., by etching, one of the layers to expose a portion of the nanostructure.
    Type: Application
    Filed: November 3, 2009
    Publication date: May 27, 2010
    Applicant: Massachusetts Institute of Technology
    Inventors: Sang-Gook Kim, Soohyung Kim, Hyung Woo Lee
  • Patent number: 7703147
    Abstract: The present disclosure relates to a method for fabricating a scanning probe microscope (SPM) nanoneedle probe using an ion beam, a SPM nanoneedle probe, a method of fabricating a critical dimension scanning probe microscope (CD-SPM) nanoneedle probe using an ion beam, a CD-SPM nanoneedle probe, and uses thereof. A disclosed method can comprise: positioning the probe so that a tip of the probe on which the nanoneedle is attached faces toward a direction in which the ion beam is irradiated; and aligning the nanoneedle attached on the tip of the probe with the ion beam in parallel by irradiating the ion beam toward the tip of the probe on which the nanoneedle is attached.
    Type: Grant
    Filed: July 1, 2005
    Date of Patent: April 20, 2010
    Assignee: Korea Research Institute of Standards and Science
    Inventors: Byong-Cheon Park, Ki-Young Jung, Won-Young Song, Jae-Wan Hong, Beom-Hoan O, Sang-Jung Ahn
  • Publication number: 20100005553
    Abstract: Sidewall tracing nanoprobes, in which the tip shape of the nanoprobe Is altered so that the diameter or width of the very tip of the probe is wider than the diameter of the supporting stem. Such side protruding probe tips are fabricated by a subtractive method of reducing the stem diameter, an additive method of increasing the tip diameter, or sideway bending of the probe tip. These sidewall tracing nanoprobes are useful for inspection of semiconductor devices, especially to quantitatively evaluate the defects on the side wall of trenches or via holes.
    Type: Application
    Filed: July 27, 2007
    Publication date: January 7, 2010
    Inventors: Sungho Jin, Li-Hen Chen, Gregory Dahlen, Hao-Chih Liu
  • Patent number: 7618465
    Abstract: The invention relates to a near-field antenna comprising a dielectric shaped body having a tip. The shaped body is characterized in that at least the surface of the tip is metallized, thereby enhancing the sensitivity of devices comprising the near-field antenna, for example, spectroscopes, microscopes or read-write heads.
    Type: Grant
    Filed: November 19, 2005
    Date of Patent: November 17, 2009
    Assignee: Forschungszentrum Julich GmbH
    Inventors: Norbert Klein, Filip Kadlec, Petr Kuźel
  • Patent number: 7610797
    Abstract: A carbon nanotube detection system is disclosed. The detection system is suitable to detect carbon nanotube vibrations. Types of detection systems include but are not limited to: magnetic coupling to a magnetic particle attached at the distal end of the nanotube oscillator, current readout from the nanotube oscillator that has been exposed to electromagnetic radiation or a stress, inductive pick-up coil and corresponding tank circuit, capacitive readout element positioned next to the nanotube oscillator having a charged particle attached at its distal end, an optical beam illumination and detection of its scattering, or combination of any of the above means of detection.
    Type: Grant
    Filed: November 16, 2007
    Date of Patent: November 3, 2009
    Assignee: Xidex Corporation
    Inventor: Vladimir Mancevski
  • Patent number: 7609048
    Abstract: Provided is a probe microscope for measuring a surface potential of a sample, including a contact electrification mechanism (circuit (C)) for bringing an electroconductive probe device into contact with a surface of the sample and applying a voltage in the contact state to induce electrification on the surface of the sample, and a potential measuring mechanism (circuit (K)) for measuring the surface potential of the sample caused by the contact electrification mechanism in a non-contact state of the electroconductive probe device and the surface of the sample, wherein the electrification induced by the contact electrification mechanism and the measurement of the surface potential by the potential measuring mechanism alternate in time series while the voltage applied during the contact is gradually changed, thereby measuring a correlation between the applied voltage and the surface potential.
    Type: Grant
    Filed: May 1, 2007
    Date of Patent: October 27, 2009
    Assignee: Canon Kabushiki Kaisha
    Inventor: Takao Kusaka
  • Patent number: 7572300
    Abstract: A scanning probe where the micromachined pyramid tip is extended by the growth of an epitaxial nanowire from the top portion of the tip is disclosed. A metallic particle, such as gold, may terminate the nanowire to realize an apertureless near-field optical microscope probe.
    Type: Grant
    Filed: March 23, 2006
    Date of Patent: August 11, 2009
    Assignee: International Business Machines Corporation
    Inventors: Guy M. Cohen, Hendrik F. Hamann