Abstract: A robot is provided with: a base section; three motors set on the base section; a support so set that an axial centerline is perpendicular to a surface of the base section; pulleys; three wires into which nonlinear springs are incorporated; an output shaft connected to a load; a differential mechanism having a pinion gear connected to the output shaft and also having an affixation member disposed at the upper end of the support; a universal joint disposed at the ring of the differential mechanism; and a wire guide disposed at the affixation member of the differential mechanism. Two side gears of the differential mechanism and two motors are connected in one-to-one correspondence by means of two wires through the pulleys, and the remaining motor and the universal joint are connected by means of the remaining wire which is passed through the wire guide.

Abstract: Methods, systems and apparatuses for high throughput substrate transfer are provided. According to various embodiments, the methods and systems described use robots having dedicated end effectors for hot and cold wafers or other substrates). Throughput is increased by optimizing the transfer of both the hot and the cold wafers. Also described are wafer transfer apparatuses having end effectors configured for supporting either hot or cold wafers. In certain embodiments, dual arm robots having dedicated hot and cold wafer arms are provided. Also provided are methods of transferring substrates that to improve overall throughput. The methods involve transferring hot and cold substrates at different accelerations.

Abstract: A motor control device controls a motor using an angle data signal and a rotational speed signal output from a rotation detector detecting a rotation state of a rotating shaft of the motor. The motor control device includes a speed control unit that outputs a torque instruction signal corresponding to a difference between the rotational speed of the rotating shaft and a speed instruction using the speed instruction of the rotating shaft and the rotational speed signal, a limit value setting unit that sets a torque limit value indicating the maximum value of the torque applied to the rotating shaft, and a torque limit control unit that limits the torque of the rotating shaft driven by the torque instruction signal to the torque limit value or less.

Abstract: A method for reloading workpieces includes providing a manipulator having a connecting base and a plurality of grasping assemblies arranged on the connecting base, providing a plurality of original workpieces and a plurality of machined workpieces positioned in a plurality of machining positions, grasping the original workpieces by at least one grasping assembly, with at least one grasping assembly vacant, grasping one machined workpiece by one vacant grasping assembly, rotating the connecting base, so that one original workpiece is placed in one machining position by one grasping assembly, further rotating the connecting base until another vacant grasping assembly is opposite to another machining position, and repeating grasping the machined workpieces from the machining positions and placing the original workpieces on the machining positions until a last original workpiece is placed on one machining position. The manipulator used in the present method for reloading workpieces is also provided.

Abstract: Disclosed is a modular semiconductor substrate processing system (1), including a plurality of independently operable substrate processing units (100). Each unit (100) comprises a reactor module (104) and a substrate transfer module (102). Within the system (1), the substrate transfer modules (102) of the different units (100) are serially interconnected such that substrates (116) may be exchanged between them. Exchange of substrates (116) between neighboring processing units (100) is facilitated by a shared substrate hand-off station (130) that is associated with each pair of neighboring processing units. The actual transfer of substrates is performed by a substrate handling robot (122), which may preferably be of the SCARA-type.

Abstract: The systems and methods disclosed herein generally involve a robotically-assisted surgical system in which a platform for supporting a patient is physically and operatively coupled to a surgical robot and an associated controller. As a result, the position of the patient can be controlled remotely using the robot, and the controller can have an awareness of the position and orientation of the patient with respect to the operating room and with respect to various components of the robot. Such systems can thus maintain a fixed frame of reference between the patient and one or more end effectors of the surgical robot, eliminating the need for recalibration of the system due to patient movement.

Abstract: A vertical storage rack system includes a vertically moveable transport conveyor and one or more vertical feed conveyors that vertically extend between the various rack levels so that items can be loaded and/or unloaded at any of the levels without the need for the vertically moveable transport to return to a loading/unloading level. This vertical rack system can be used to load and unload items from the racks as well as rearrange items in the racks. This system and technique allows items to be continuously moved in a vertical direction as well as sorts or merges the items at high speeds. In other words, this arrangement minimizes the vertical positioning of the vertically moveable transport conveyor, such as a cross-belt conveyor, before it can discharge (and/or load) items, thereby improving throughput.

Abstract: The present teachings provide a method of controlling a remote vehicle having an end effector and an image sensing device. The method includes obtaining an image of an object with the image sensing device, determining a ray from a focal point of the image to the object based on the obtained image, positioning the end effector of the remote vehicle to align with the determined ray, and moving the end effector along the determined ray to approach the object.

Abstract: Methods of correction of rotational and linear misalignment in multi-link robots are provided. The method allows for precise orientation of an end effector to put or pick substrates at a target destination by correcting for both positional and rotational orientation errors. The method rotates a boom linkage to a position adjacent to the target destination, corrects for linear and rotational error by rotating a boom linkage as well as an upper arm link as well as extending or retracting a wrist member. Systems including long boom linkages are disclosed. Numerous other aspects are provided.

Abstract: A robot includes a rotating electrical machine and a brake. The brake is configured to restrict rotation of the rotating electrical machine. The brake includes a brake plate, a plurality of pressing members, at least one biasing member, and an electromagnetic coil. The brake plate is configured to rotate integrally with a shaft of the rotating electrical machine. The plurality of pressing members are movable toward the brake plate and include a first pressing member and a second pressing member. The at least one biasing member is configured to bias the first pressing member and the second pressing member toward the brake plate using mutually different biasing forces. The electromagnetic coil is configured to, when current is on, electromagnetically attract the first pressing member and the second pressing member against the biasing forces of the at least one biasing member.

Abstract: A robot includes an actuator assembly, first and second parallel telescoping lead screw assemblies cantilevered from the actuator assembly, and an end effector supported by ends of the lead screw assemblies. The actuator assembly causes each lead screw assembly to independently deploy and retract.

Abstract: A robotic system includes a humanoid robot having a plurality of joints adapted for force control with respect to an object acted upon by the robot, a graphical user interface (GUI) for receiving an input signal from a user, and a controller. The GUI provides the user with intuitive programming access to the controller. The controller controls the joints using an impedance-based control framework, which provides object level, end-effector level, and/or joint space-level control of the robot in response to the input signal. A method for controlling the robotic system includes receiving the input signal via the GUI, e.g., a desired force, and then processing the input signal using a host machine to control the joints via an impedance-based control framework. The framework provides object level, end-effector level, and/or joint space-level control of the robot, and allows for functional-based GUI to simplify implementation of a myriad of operating modes.

Abstract: In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker.

Abstract: A grasping method of a multi-finger hand including calculating positions of tips of plural actual fingers; calculating positions of tips of plural virtual fingers using the calculated positions of the tips of the plural actual fingers; judging that a central position among the calculated positions of the tips of the plural virtual fingers is a central position of a virtual object based on the calculated positions of the tips of the plural virtual fingers; and controlling joint torques of the respective actual fingers corresponding to the tips of the virtual fingers such that motions of the tips of the plural virtual fingers are carried out while uniformly maintaining the relative positional relationships of the tips of the plural virtual fingers based on the central position of the virtual object.

Abstract: An automated ply layup system uses a robot and an end effector for selecting plies from a kit and placing the plies at predetermined locations on a tool.

Abstract: The invention relates to an industrial robot, comprising a movable carriage (2, 22, 42, 52-1, 52-2), on which a working device (3.1, 23.1, 43.1) is vertically movably supported and can be lowered from a first area above a safety plane to a second area below the safety plane. A protection device is arranged in the safety plane and, in a first position, prevents the working device (3.1, 23.1, 43.1) from lowering from the first area to the second area. In a second position of the protection device, the working device (3.1, 23.1, 43.1) is able to lower to the second area. The protection device is attached to the movable carriage (2, 22, 42, 52-I, 52-2) and associated with the working device (3.1, 23.1, 43.1) such that the protection of persons and machines is ensured using a simple design.

Abstract: Provided is a manipulator with at least one camera capable of observing an end effector from a direction suitable for work. A rotating portion rotatable coaxially with the end effector is provided to a link adjacent to a link located at a manipulator tip end. At least one camera for recognizing a work piece as a object is arranged on the rotating portion through a camera platform. An actuator for controlling a rotation angle of the rotating portion is driven according to a rotation angle of the link located at the manipulator tip end, and thus the camera is arranged in a direction perpendicular to a plane where end effector can move when the end effector performs a grip work. In an assembly work, the rotating portion is rotated such that the camera is arranged in a direction parallel to the plane where end effector can move.

Abstract: A picking system includes a conveyer, a robot, and a control device. The conveyer conveys workpieces. The robot includes a plurality of holding parts and a supporting part. The holding parts hold the workpieces. The supporting part is rotatably provided against an arm to support the plurality of holding parts. Then, the control device instructs the robot to rotate the supporting part by a predetermined amount in such a manner that the direction of the workpiece becomes a predetermined direction for each the workpiece held by the holding parts and then to place the workpiece on a predetermined place.

Abstract: A surgical device including first and second joint parts that are connected in series is provided. The surgical device includes a plurality of link arms that pass through an inner portion of the first joint part so as to drive the second joint part. The link arms are serially connected so as to rotate with respect to each other, and are rotatably connected to a driving unit for driving the plurality of link arms.

Abstract: A wafer-processing apparatus includes: eight or ten reactors with identical capacity for processing wafers on the same plane, constituting four or five discrete units, each unit having two reactors arranged side by side with their fronts aligned in a line; a wafer-handling chamber including two wafer-handling robot arms each having at least two end-effectors; a load lock chamber; and a sequencer for performing, using the two wafer-handling robot arms, steps of unloading/loading processed/unprocessed wafers from/to any one of the units, and steps of unloading/loading processed/unprocessed wafers from/to all the other respective units in sequence while the wafers are in the one of the units.

Abstract: Embodiments of the present invention generally provide an apparatus and method for transferring substrates in a processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint when compared to conventional techniques.

Abstract: A robotic retail wall is presented allowing for the dispensing of merchandise within a retail location. The robotic wall includes commodity products and robotics that pick and deliver products to consumers in response to input at a kiosk. The robotics and products are separated from a retail space by a transparent barrier, allowing consumers in the retail space to view the actions of the robotics in retrieving a product. Behind the robotic wall is a product stocking area, where commodity products can be added to the robotic wall with assistance from the robotics.

Abstract: The present invention generally provides an apparatus and a method for automatically calibrating the placement of fragile substrates into a substrate carrier. Embodiments of the present invention also provide an apparatus and a method for inspecting the fragile substrates prior to processing to prevent damaged substrates from being further processed or broken in subsequent transferring steps. Embodiments of the invention also generally provide an apparatus and a method for determining the alignment and orientation substrates that are to be delivered into or removed from a substrate carrier. Embodiments of the invention further provide an apparatus and method for accurately positioning the substrate carrier for substrate loading. The substrate carriers are generally used to support a batch of substrates that are to be processed in a batch processing chamber.

Abstract: A medical robotic system comprises a drive track unit being operable for moving the medical robotic system along a floor. An upper torso unit is joined to the drive track unit. The upper torso unit comprises at least one actuator assembly. At least one bimanual dexterous manipulator is joined to the actuator assembly in which the actuator assembly imparts torque and movement to the bimanual dexterous manipulator for lifting an object. The bimanual dexterous manipulator comprises a pair of dexterous manipulators. Each of the dexterous manipulators comprises a length being configured to support lifting an adult patient, and an end comprising a planar structure being configured for placing between the adult patient and a patient platform. The drive track unit is operable for moving the medical robotic system to the patient platform and the bimanual dexterous manipulator is operable for lifting the adult patient from the patient platform.

Abstract: A reconfigurable end-effector attachable to a robotic arm, includes a master boom, a first branch assembly and a second branch assembly, a dual articulation mechanism. The dual articulation mechanism includes a first clutch attached to the first branch assembly and is configured to articulate the first branch assembly relative to the second branch assembly. The dual articulation mechanism further includes a second clutch attached to the master boom, the second branch assembly and the first clutch and is configured to simultaneously articulate the first and second branch assemblies relative to the master boom. The first and second branch assemblies each have limbs connected to branches supporting a plurality of tool modules. Each tool module includes an end element configurable to interact with a workpiece.

Abstract: The present embodiments relate to an arrangement with a robot having a robot arm formed from arm members. The robot arm carries a device fed by at least one electrical supply line. The arrangement has at least one guide element fixed to one of the arm members for guidance of the at least one electrical supply line on the robot arm. The at least one guide element is arranged rotatably about a longitudinal axis of the one arm member.

Abstract: This machine generally is an apparatus for preparing rolls of previously wound material for an unwinding machine. More particularly industrial robots are used to improve the apparatus onto which rolls of sheet form material and the like can be loaded in preparation for unwinding and then, when a previously loaded roll has been unwound, disposing of the remaining core. The robots are programmable robots including a means for engaging the transfer plug and placing the plug into the tubular core of a large roll.

Abstract: A substrate handling robot includes an arm section and a wrist portion connected to the arm section. An end effector is connected to the wrist portion and is configured to support a substrate. A housing is arranged adjacent to the end effector and includes a gas outlet that directs gas onto an exposed surface of the substrate during transport.

Abstract: An integrated robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly can comprise a multiple end effector for moving a plurality of workpieces, a single end effector for moving a single workpiece, a rotation chuck incorporated on the robot body to provide alignment capability, and an optional identification subsystem for identify the object during transport. The present invention robot assembly can be used in a sorter or stocker equipment, in processing equipment, and a transfer system.

Abstract: Individual items or multiple items are stored on vertical stacks (or racks) of conveyors. The stacks of conveyors are located on both sides of a vertical transport on which cartons, totes, and/or pallets are loaded. The vertical transport is able to be vertically lifted in a fashion similar to an elevator so that the totes on the conveyor can receive items from the various levels of the storage rack conveyors. To speed up the loading process, items can be loaded in the containers simultaneously from both sides of the container and/or sequentially. In one form, a cross-belt conveyor is used to load the items. Alternatively or additionally, robotic arms can be used to load the items. One or more conveyor drivers can be used to power multiple conveyors in order to index items to a loading position on the conveyors.

Abstract: The invention relates to a method for operating a robot (R), and a correspondingly set-up robot. The robot (R) has a robot arm (M) having a plurality of members (1) following sequentially, an attaching device (3) for attaching an end effector (4, 46), and drives for moving the members (1), and a control device (S) connected to the drives. Stored in the control device (S) is a hierarchical regulating and control strategy having a plurality of differently prioritized regulating and control functionalities, and the method has the following process step: during the movement of the robot arm (M), switching over to a higher-prioritized regulating and control functionality, as soon as stable movement of the robot arm (M) by means of the higher-prioritized regulating and control functionality is possible, and an execution condition independent of the higher-prioritized regulating and control functionality is fulfilled.

Abstract: An adhesive application valve comprising an applicator, a Z-axis actuator operably connected to the applicator, wherein the Z-axis actuator and the rotation device are each capable of moving independently of each other to position the applicator in a position to apply an amount of adhesive to a top substrate prior to bonding with a bottom substrate is provided. Furthermore, a machine comprising an end effector, and an adhesive application valve configured to apply an amount of adhesive onto the top substrate, the end effector configured to place the top substrate into a position of engagement with the adhesive application valve, and place the top substrate onto the bottom substrate to facilitate initial contact between the adhesive applied to the top substrate and a fill material applied to the bottom substrate is also provided. A method of optical bonding is further provided.

Abstract: Provided are atomic layer deposition apparatus and methods including multiple gas distribution plates including stages for moving substrates between the gas distribution plates.

Abstract: In a substrate transfer robot, an end effector includes a wrist plate, a first blade movably connected to the wrist plate in a vertical direction to support a first substrate, and a second blade connected to the wrist plate to support a second substrate, wherein the second blade is adjacent to the first blade. An elevating unit moves the first blade upward to allow the first blade to support the first substrate and moves the first blade downward to allow the second blade to support the second substrate.

Abstract: A position detection device for a horizontal articulated robot includes a camera for imaging the robot or a work as an imaging object, a control section for calculating a location of the imaging object from an image, an acquisition section (I/O) for obtaining the drive amounts of first and second electric motors of the robot, and a storage section for storing the calculated location of the imaging object and the drive amounts so as to correspond to each other. A common trigger signal for detecting the location of the imaging object is input to the camera and the I/O. The camera starts to image the imaging object in response to the input of the trigger signal. The I/O starts to obtain the drive amounts in response to the input of the trigger signal.

Abstract: A robotic system includes a humanoid robot with robotic joints each moveable using an actuator(s), and a distributed controller for controlling the movement of each of the robotic joints. The controller includes a visual perception module (VPM) for visually identifying and tracking an object in the field of view of the robot under threshold lighting conditions. The VPM includes optical devices for collecting an image of the object, a positional extraction device, and a host machine having an algorithm for processing the image and positional information. The algorithm visually identifies and tracks the object, and automatically adapts an exposure time of the optical devices to prevent feature data loss of the image under the threshold lighting conditions. A method of identifying and tracking the object includes collecting the image, extracting positional information of the object, and automatically adapting the exposure time to thereby prevent feature data loss of the image.

Abstract: A robot teach tool is provided that enables automatic teaching of pick and place positions for a robot. The automated robot teach tool obviates the need for manual operation of the robot during the teaching. The result is an automated process that is much faster, more accurate, more repeatable and less taxing on a robot operator.

Abstract: A composite layup method is described in which strips of fibrous material are deposited progressively on a mould surface. The method involves feeding a strip of fibrous material to a placement device for placing the strip progressively on the mould surface, and imparting a shape to the strip upstream of the placement device. In this way, shape is imparted to the strip prior to the strip reaching the placement device. The shape imparted to the strip corresponds at least partially to a shape of the mould surface. This prevents or reduces air from becoming trapped between the strip and the mould surface as the strip is deposited in the mould. An end effector assembly suitable for use in the composite layup method is also disclosed.

Abstract: Actuator elements such as cables or push rods in an instrument are used for manipulating an end effector or distal end of the instrument. Each actuator element extends within a tubular housing and either the tubular housing is axially rotated about the actuator element or the actuator element is axially rotated within the tubular housing to reduce at least one force opposing an axial force exerted through or movement of the actuator element.

Abstract: Apparatus is provided for use with a steerable catheter that includes a thumb control adapted to control a deflection of a distal tip of the catheter. The apparatus includes a robot, including an end-effector, adapted to be coupled to the thumb control, and a controller, adapted to drive the end-effector to deflect the distal tip by manipulating the thumb control.

Abstract: An exemplary system for sensing the state and position of a robot is provided. The system measures the acceleration and angular velocity of the robot and calculates a velocity, and a displacement of the robot. The state of the robot according to the acceleration and the velocity vector, of the robot, is determined. The system includes an alarm that activates according to the state of the robot. The system also compensates for any inaccuracy of the measured displacements.

Abstract: An embodiment of a haptic gripper system includes a slave gripper device, a master gripper device, and a gripper motor controller. The gripper motor controller includes a slave encoder loop, a master encoder loop, and a haptic loop. The haptic loop is configured to receive a slave motor encoder loop output signal and a master motor encoder loop output signal, determine a difference signal between the slave motor encoder loop output signal and the master motor encoder loop output signal representative of a difference between a first relative angular position of a slave gripper motor and a second relative angular position of a master gripper motor, and provide a slave motor control signal to a slave motor control signal input, and provide a master motor control signal to the master motor control signal input.

Abstract: A robot hand converts the longitudinal extending and retracting motion of an actuating rod of a linear actuator into opening and closing motion of left and right first links via a link mechanism. The link mechanism includes left and right middle links composed of coil springs. When the left and right first links come in contact with an object to be gripped, the middle links elastically deform and expand, and the force gripping the object gradually increases due to the elastic deformation of the middle links. It is possible to prevent a large gripping force from acting suddenly on the object and to prevent the object from being deformed, damaged, or otherwise suffering harmful effects.

Abstract: The solar energy and solar farms are used to generate energy and reduce dependence on oil (or for environmental purposes). The maintenance and repairs in big farms become very difficult, expensive, and inefficient, using human technicians. Thus, here, we teach using the robots with various functions and components, in various settings, for various purposes, to improve operations in big (or hard-to-access) farms, to automate, save money, reduce human mistakes, increase efficiency, or scale the solutions to very large scales or areas.

Abstract: A method for verifying completion of a task is provided. In various embodiments, the method includes obtaining location coordinates of at least one location sensor within a work cell. The at least one sensor is affixed to a tool used to operate on a feature of a structure to be assembled, fabricated or inspected. The method additionally includes, generating a virtual object locus based on the location coordinates of the at least one location sensor. The virtual object locus corresponds to a computerized schematic of the structure to be assembled and represents of all possible locations of an object end of the tool within the work cell. The method further includes, identifying one of a plurality of candidate features as the most likely to be the feature operated on by the tool. The identification is based on a probability calculation for each of the candidate features that each respective candidate feature is the feature operated on by the tool.

Abstract: A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.

Abstract: The present invention discloses a robotic arm including a supporting member, a cavity body and a telescopic member. The cavity body includes a gate. The cavity body accommodates the supporting member. The telescopic member is connected with the supporting member for driving the supporting member to extend out of or back to the cavity body through the gate. The present invention discloses a transporting device with the robotic arm. The robotic arm and the transporting device with the robotic arm utilizes the structure of the cavity body to maintain the cleanliness during transporting plates.

Abstract: The compact resin molding machine is capable of efficiently performing a sequence of molding actions from feeding a work and resin to accommodating the molded work. The resin molding machine comprises: a work conveying mechanism including a robot, which has a robot hand for holding the work and which is capable of rotating and linearly moving; a work feeding section for feeding the work; a resin feeding section for feeding the resin; a press section including a molding die set, in which the work is resin-molded; a work accommodating section for accommodating the molded work; and a control section controlling the entire resin molding machine. The work feeding section, the resin feeding section, the press section and the work accommodating section are located to enclose a moving area of the robot of the work conveying mechanism.

Abstract: An apparatus includes a robot arm, and a plurality of guide pins mounted on the robot arm.

Abstract: The invention relates to a method for grouping together products that arrive in line and are spaced apart from each other on an infeed conveyor (2), consisting of: collecting the products on the fly by means of a pair of collectors (4) that move transversely relative to the products on said conveyor (2); moving the products collected by collector (4A) to a removal station (11) and, at the same time, replacing said collector (4A) with the second collector (4B) that, in turn, collects the products; and dropping off the products from collector (4A) to the removal station (11) and bringing said collector (4A) back to a collecting position while intersecting collector (4B).