Abstract: An apparatus and process for abating at least one acid or hydride gas component or by-product thereof, from an effluent stream deriving from a semiconductor manufacturing process, comprising, a first sorbent bed material having a high capacity sorbent affinity for the acid or hydride gas component, a second and discreet sorbent bed material having a high capture rate sorbent affinity for the same gas component, and a flow path joining the process in gas flow communication with the sorbent bed materials such that effluent is flowed through the sorbent beds, to reduce the acid or hydride gas component. The first sorbent bed material preferably comprises basic copper carbonate and the second sorbent bed preferably comprises at least one of, CuO, AgO, CoO, Co3O4, ZnO, MnO2 and mixtures thereof.

Abstract: The present invention provides compact adsorption systems that are capable of rapid temperature swings and rapid cycling. Novel methods of thermal swing adsorption and thermally-enhanced pressure swing adsorption are also described. In some aspects of the invention, a gas is passed through the adsorbent thus allowing heat exchangers to be very close to all portions of the adsorbent and utilize less space. In another aspect, the adsorption media is selectively heated, thus reducing energy costs. Methods and systems for gas adsorption/desorption having improved energy efficiency with capability of short cycle times are also described. In another aspect, the apparatus or methods utilize heat exchange channels of varying lengths that have volumes controlled to provide equal heat fluxes. Methods of fuel cell startup are also described. Advantages of the invention include the ability to use (typically) 30-100 times less adsorbent compared to conventional systems.

Abstract: The present invention provides a gas purification system with improved efficiency, simpler construction, cost reduction, form factor improvements, and increased durability. The present invention provides cost and form factor improvements through fewer components overall and through utilizing multiple integrated components. Prior art gas purification system are more bulky and complicated. The present invention achieves increased thermal efficiency through utilization of a regenerative heat exchanger to recapture a portion of the heat energy transferred to the gas during the purification process. Prior art purifiers lacked a regenerative heat exchanger. The present invention integrates the two components into one integrated heater and purification vessel assembly. The present invention integrates the two discrete components into one integrated hydrogen sorption and particle filter assembly. The integrated hydrogen sorption and particle filter assembly is also capable of operating at higher temperatures.

Abstract: An ion exchange scrubber has a housing, and a partition plate installed within the housing. The partition plate partitions an inner space of the housing in longitudinal direction into two chambers that are filled with a predetermined amount of aqueous solution. The upper end portions of the two partitioned chambers communicate with each other. At least one cartridge is installed at the upper portion and has an ion exchange resin. The ion exchange resin removes a harmful substance contained in the gas. By repeatedly pumping the aqueous solution from one side chamber to the other side chamber, and immersing and cleaning the contaminated ion exchange resin in the aqueous solution, the contaminated gas can be effectively processed even with a small amount of water.

Abstract: A description is given of a method as well as a plant for reducing the SOx emission from a plant for manufacturing cement clinker by which cement raw meal is preheated and burned in a plant comprising a cyclone preheater (1) and a kiln (7). The method is peculiar in that a catalyst in the form of a chloride compound and/or a mixture of several chloride compounds is introduced into the preheater (1) at its uppermost or next-to-uppermost cyclone stage (2, 3), that the catalyst is directed down through the preheater (1) to the kiln (7), that a partial amount of the kiln exhaust gas stream containing the catalyst in vaporized form is extracted from the kiln (7), that the extracted exhaust gas stream is cooled off so that the catalyst is present in solid form, that solid matter is separated from the cooled exhaust gas stream and that at least some of the separated solid matter containing the catalyst is recirculated for renewed introduction into the preheater (1).

Abstract: Product gas (Gpro) is separated from material gas (Gmat) by a PSA process utilizing a plurality of adsorption towers (A-C) each loaded with an adsorbent. The separation of the product gas (Gpro) is performed by repeating a cycle comprising an adsorption step, a decompression step, a desorption step, a cleaning step and a pressurization step. In the decompression step, remaining gas (Grem) as cleaning gas is introduced from one adsorption tower (C) to another adsorption tower (B). The amount of the remaining gas (Grem) introduced is 2 to 7 times the volume of the adsorbent loaded in the adsorption tower (B) as converted into volume at common temperature and under atmospheric pressure. To remove both of carbon monoxide and carbon dioxide from the material gas (Gmat) by a single kind of adsorbent, use is made of zeolite having a faujasite structure with a Si/Al ratio lying in a range of 1 to 1.5 and a lithium-exchange ratio of no less than 95%.

Abstract: The present invention is to provide a method for regenerating inorganic porous particles, a method for purifying water and a continuous water purification device, which can be easily applied as a recycling system of water in special environments such as space environment, by safely removing impurities contained in water and water vapor with a usage of a compact facility without using any chemicals. The method for regenerating inorganic porous particles is characterized in that adsorbed products such as ammonia and/or amines, are reduced by heating to 100-200° C. under a reduced pressure of 10 Pa or less. The method for purifying water and the continuous water purification device are characterized in that a dense membrane having cationic groups and/or a composite membrane in which a hydrophilic membrane is layered on a surface of a hydrophobic porous membrane is used as a permeable membrane are used as a permeable membrane.

Abstract: This invention relates to a process for separating a fluid component from a fluid mixture comprising the fluid component, the process comprising: (A) flowing the fluid mixture into a microchannel separator; the microchannel separator comprising a plurality of process microchannels containing a sorption medium, a header and a footer, the combined internal volume of the header and the footer being up to about 40% of the internal volume of the process microchannels; the fluid mixture being maintained in the microchannel separator until at least part of the fluid component is sorbed by the sorption medium; purging the microchannel separator to displace non-sorbed parts of the fluid mixture from the microchannel separator; and (B) desorbing the fluid component from the sorption medium and flowing a flush fluid through the microchannel separator to displace the desorbed fluid component from the microchannel separator. The process is suitable for purifying oxygen as well as effecting other fluid separations.

Abstract: Devices and methods for storing hydrogen fuels or other gaseous fuels. One embodiment of a container for storing gaseous fuels in accordance with an aspect of the invention comprises a high-pressure vessel configured to contain the gas in a high-pressure zone at a pressure significantly above atmospheric pressure. The container can also include a storing medium in the vessel and an inlet/outlet line extending through the vessel. The storing medium can have a plurality of storage spaces configured to physically bind molecules of the gas to the storing medium, and the inlet/outlet line can be a tube extending through the vessel in fluid communication with the storing medium. In operation, the high-pressure vessel is pressurized with a gaseous fuel (e.g., hydrogen) to a pressure significantly above atmospheric pressure (e.g., approximately 3,000-10,000 psi).

Abstract: A process is provided for the transport and storage of hydrogen by reversible sorption and containment within carbon-metal hybrid materials. The process comprises contacting a carbon-metal hybrid composition with a hydrogen-containing gas at conditions of temperature and pressure whereby the carbon-metal hybrid composition sorbs the hydrogen gas. The hydrogen that is sorbed in the carbon-metal composition is subsequently released by lowering the H2 pressure and/or increasing the temperature to levels which cause desorption of the hydrogen gas.

Abstract: Carbon monoxide (CO) is removed from a nitrogen and CO containing gas stream such as feed air to an air separation process for recovery of a nitrogen product gas stream or a nitrogen product gas stream from an air separation process by adsorbing CO from said gas stream before or after separation of oxygen from said gas stream to produce a product gas stream containing less than 5 ppb of CO by contacting said gas stream With a solid adsorbent such as a Mn, Fe, Ni, Cu, Ag, Pd, Co, Pt or Au exchanged zeolite and periodically regenerating the adsorbent by desorption of CO therefrom under a flow of regenerating gas, and, if said gas stream is said feed air, separating oxygen therefrom to produce said nitrogen product.

Abstract: A process for removing trace amounts of moisture and/or one or more impurities from contaminated hydride, inert and non-reactive gases, thus decreasing the concentration of the impurities to parts-per-billion (ppb) or parts-per-trillion (ppt) levels. The gas purifier materials of this invention include thermally activated aluminas, said aluminas including organic alumina materials, modified organic alumina materials, and modified inorganic aluminas. The thermally activated alumina materials of this invention are activated by heating the alumina material at a temperature between about 50° C.-1000° C. in an inert or non-inert atmosphere or in a vacuum and maintaining the activated material in the inert or non-inert atmosphere or in a vacuum atmosphere subsequent to said activation but prior to use.

Abstract: A gas separation apparatus and process has a first pressure swing adsorption (PSA) unit (110) receiving feed gas (112), which comprises a first and a second component. First PSA unit (110) produces first product gas (114) pre-dominantly containing the first component, and first off gas (116) containing at least some of the first component and second component. Compressor (120) is coupled to first PSA unit (110) to compress first off gas (116) to form compressed off gas (126), which is passed downstream to absorber unit (130), which employs a solvent to remove at least part of the second component from compressed off gas (126), forming an enriched compressed off gas (136B). Second PSA unit (140) receives enriched compressed off gas (136B) and produces second product gas (142) which predominantly contains the first component and a second off gas that is sent to waste or reformer burner (150).

Abstract: An ion implantation process system, including an ion implanter apparatus for carrying out an ion implantation process. A supply of source gas for the ion implantation process is arranged to flow to the ion implanter apparatus, which discharges an effluent gas stream including ionization products of the source gas during the ion implantation process. The system includes an effluent abatement apparatus for removing hazardous effluent species from the effluent gas stream. The source gas may be furnished from a low pressure gas source in which the source gas is sorptively retained in a vessel on a sorbent medium having affinity for the source gas, and desorbed for dispensing to the process system. A novel scrubbing composition may be employed for effluent treatment, and the scrubbing composition breakthrough of scrubbable component may be monitored with a device such as a quartz microbalance monitor.

Abstract: The present invention provides apparatus and methods for separating fluid components. In preferred embodiments, the apparatus and methods utilize microchannel devices with small distances for heat and mass transfer to achieve rapid cycle times and surprisingly large volumes of fluid components separated in short times using relatively compact hardware.

Abstract: The present invention provides apparatus and methods for separating hydrogen. In preferred embodiments, the apparatus and methods utilize microchannel devices with small distances for heat and mass transfer to achieve rapid cycle times and surprisingly large volumes of hydrogen separated in short times using relatively compact hardware.

Abstract: The present invention provides a carbon molecular sieve prepared by forming carbon nanorods or carbon nanotubes with a uniform diameter inside pores of siliceous mesoporous molecular sieve and a process for preparing the same. The process for preparing a carbon molecular sieve of the present invention comprises the steps of; adsorbing a mixture of an aqueous carbohydrate solution and an acid or a precursor of carbon polymer into pores of mesoporous silica molecular sieve template, and polymerizing; heating the mesoporous molecular sieve including polymeric material at 400 to 1400° C. under vacuum condition or without oxygen to accomplish thermal decomposition of the polymeric material included in the pores; and, reacting the heated mesoporous molecular sieve with hydrofluoric acid or aqueous sodium hydroxide solution and removing the template to obtain a carbon molecular sieve.

Abstract: The present invention provides for methods and compositions for gas separation and purification utilizing a metallo-organic polymer adsorbent in processes for separating carbon dioxide, water, nitrogen oxides and hydrocarbons from gas streams.

Abstract: A gas containment assembly including a containment enclosure defining an enclosed interior volume, with an exhaust inlet and an exhaust outlet for flow of exhaust gas into the enclosed interior volume through the exhaust inlet and flow from the containment enclosure through the exhaust outlet. A gas supply vessel and/or gas flow circuitry is provided in the interior volume of the containment enclosure. A back-migration scrubber unit overlies and is sealed to the exhaust inlet so that back-flow migration of gas from the gas supply vessel and/or gas flow circuitry in the interior volume of the containment enclosure is sorptively taken up by sorbent material in the scrubber unit and prevented from passing into an ambient environment in which said gas containment assembly is deployed. This arrangement permits significant reduction in the flow rate of exhaust gas through the gas containment enclosure without compromising the safety of the gas containment assembly.

Abstract: Pressure swing adsorption process for the recovery of high purity oxygen from a feed gas comprising oxygen, nitrogen, and argon. The process includes a forward flow stage which comprises (a) passing the feed gas into a first adsorption zone containing an adsorbent selective for the adsorption of nitrogen over oxygen and argon, and withdrawing therefrom a nitrogen-depleted intermediate gas; (b) passing the nitrogen-depleted intermediate gas into a second adsorption zone containing an adsorbent which is selective for the adsorption of nitrogen over argon and selective for the adsorption of argon over oxygen; (c) withdrawing an oxygen-enriched product gas from the second adsorption zone; and (d) terminating the passing of feed gas into the first adsorption zone and withdrawing an oxygen-enriched depressurization gas from the second adsorption zone in the same flow direction as (c).

Abstract: The invention provides an efficient process by which trace impurities are removed from matrix hydride, inert gases and non-reactive gases, thus decreasing the concentration of the trace gases by a factor of 100-to-10,000, and more specifically to part-per-billion (ppb) or part-per-trillion (ppt) levels. Hydride gases such as ammonia, phosphine and arsine, and inert gases such as nitrogen, helium, hydrogen, and argon are purified by removing trace contaminants such as silane (SiH4), hydrogen sulfide (H2S) and germane (GeH4), along with traces of moisture. The gas purifier materials of this invention include thermally activated aluminas from organic sources, thermally activated modified organic alumina materials, and thermally activated modified aluminas from an inorganic source. The thermally activated alumina materials of this invention are activated by heating the alumina material at a temperature between about 200-1000° C.

Abstract: A raw gas containing a gas component A with low affinity with an adsorbent and a gas component C with high affinity with the adsorbent are sequentially supplied to at least three adsorption columns, while a desorption gas containing a gas component D which differs from the gas components A and C is supplied to each of the adsorption columns other than the one to which the raw gas is being supplied. When the raw gas is supplied to the adsorption columns, the gas component A having lower affinity with the adsorbent exits the adsorption columns earlier than the gas component C having higher affinity. The gas components A and C can thus be separated from each other. When a gas including an enriched gas component A is discharged from the outlet of each adsorption column, the full amount is extracted out of the system. When a gas including an enriched gas component C is discharged from the outlet of each adsorption column, the full amount is extracted out of the system.

Abstract: A method and composition for the removal of contaminants in a gas stream used in the contamination sensitive processes of photolithography and metrology are described. The synergistic effect of a combination of an electropositive metal component, a high silica zeolite, and a late transition metal compound effects removal or reduction of the contaminates in the gas which interfere with light transmittance to the ppb or ppt levels necessary for the gas to be suitable for these uses. The removal of neutral polar molecules, neutral polar aprotic molecules, protic and aprotic alkaline molecules, acidic polar species, and neutral non-polar aprotic molecules is accomplished with the claimed composition. Depending on the type of contaminant, the composition components are each varied from 10 to 80 parts by volume, with the total composition limited to 100 parts by volume.

Abstract: A cleaning agent and a cleaning process for cleaning a harmful gas containing, as a harmful component, an organometallic compound represented by the general formula: Rm—M—Hn wherein R is alkyl; M is As, P, S, Se or Te; and m and n are each positive integer satisfying the relation: m+n=valence of M are described. The cleaning agent contains, as an effective component, copper (II) oxide or a mixture of copper (II) oxide and manganese dioxide. The copper (II) oxide has a BET specific surface area of 10 m2/g or greater which is extremely larger than that of copper (II) oxide conventionally used as the effective component of known cleaning agents. With such an extremely large BET specific surface area, the cleaning agent strongly and stably adsorbs the harmful organometallic compound, thereby efficiently cleaning the harmful gas without causing desorption of the adsorbed organometallic compound.

Abstract: A process for purifying methylsilane is described. Methylsilane containing impurities such as carbon dioxide, chlorosilane and atmospheric gases is fed from a source container unit to an adsorption unit at −40° C. The adsorption unit is connected to a collection unit at −190° C. where the purified methylsilane is transported and can be stored.

Abstract: An AgX-type zeolite having a silver exchange level of 20-70% and a Ar/O2 Henry's law selectivity ratio at 23° C. of 1.05 or greater has an optimum combination of selectivity for argon over oxygen at lower cost than higher silver exchange levels. This material can be used in oxygen VSA/PSA processes to produce oxygen at purities above 97%.

Abstract: The invention provides an efficient process by which trace impurities are removed from matrix hydride, inert gases and non-reactive gases, thus decreasing the concentration of the trace gases by a factor of 100-to-10,000, and more specifically to part-per-billion (ppb) or part-per-trillion (ppt) levels. Hydride gases such as ammonia, phosphine and arsine, and inert gases such as nitrogen, helium, hydrogen, and argon are purified by removing trace contaminants such as silane (SiH4), hydrogen sulfide (H2S) and germane (GeH4), along with traces of moisture. The gas purifier materials of this invention include thermally activated aluminas from organic sources, thermally activated modified organic alumina materials, and thermally activated modified aluminas from an inorganic source. The thermally activated alumina materials of this invention are activated by heating the alumina material at a temperature between about 200-1000°C.

Abstract: A process is provided for the transport and storage of hydrogen by reversible sorption and containment within carbon-metal hybrid materials. The process comprises contacting a carbon-metal hybrid composition with a hydrogen-containing gas at conditions of temperature and pressure whereby the carbon-metal hybrid composition sorbs the hydrogen gas. The hydrogen that is sorbed in the carbon-metal composition is subsequently released by lowering the H2 pressure and/or increasing the temperature to levels which cause desorption of the hydrogen gas.

Abstract: A semiconductor manufacturing system includes a getter-based gas purifier coupled in flow communication with a gas distribution network for a semiconductor fabrication facility. The gas distribution network supplies purified gas to at least one wafer processing chamber in the semiconductor fabrication facility. The gas purifier includes a getter column having a metallic vessel with an inlet, an outlet, and a containment wall extending between the inlet and the outlet. Getter material which purifies gas flowing therethrough by sorbing impurities therefrom is disposed in the vessel. A first temperature sensor is disposed in a top portion of the getter material. The first temperature sensor is located in a melt zone to detect rapidly the onset of an exothermic reaction which indicates the presence of excess impurities in the incoming gas to be purified. A second temperature sensor is disposed in a bottom portion of the getter material.

Abstract: In order to increase the long-term stability of the exhaust catalyst of an internal combustion engine, the exhaust gas is purified with respect to volatile phosphorus compounds before entering the catalyst.

Abstract: An aqueous solution with a pH of greater than 5, preferably of at least 6.5, can be used in an ion-exchange process, in particular a process for the manufacture of a zeolite. This aqueous solution comprises metal cations, such as zinc, and an agent for complexing the metal cations, such as citric acid or a salt of this acid. The proportion of free cations in solution represents from 0.1% to 99%, preferably from 1 to 30%, of the total amount of the metal in the solution. The invention also relates to a process for the manufacture of zeolites X or A employing such an aqueous solution and the use of the zeolites thus obtained for separating, purifying or converting one or more constituents of a gas stream, such as air, synthesis gases or hydrocarbons, in particular olefins, by employing an adsorption process, in particular a PSA, VSA or TSA.

Abstract: A method and composition for the removal of contaminants in a gas stream used in the contamination sensitive processes of photolithography and metrology are described. The synergistic effect of a combination of an electropositive metal component, a high silica zeolite, and a late transition metal compound effects removal or reduction of the contaminates in the gas which interfere with light transmittance to the ppb or ppt levels necessary for the gas to be suitable for these uses. The removal of neutral polar molecules, neutral polar aprotic molecules, protic and aprotic alkaline molecules, acidic polar species, and neutral non-polar aprotic molecules is accomplished with the claimed composition. Depending on the type of contaminant, the composition components are each varied from 10 to 80 parts by volume, with the total composition limited to 100 parts by volume.

Abstract: A monolithic hygroscopic material shaped to facilitate a circulation flow of ambient air. The hygroscopic material may be used to remove various compounds from an ambient gas and may be reactivated to restore its drying capacity. The tendency of the material to seek equilibrium may be utilized to achieve dehumidification or humidification.

Abstract: The invention relates to an improved apparatus for thermal management in a gas purification process. As known in the prior art, a gas purification apparatus includes a two-section unitary vessel, wherein the primary section includes an impure gas inlet and a heating assembly and the secondary section includes a cooling device and an outlet for purified gas. Within the primary and secondary sections of the vessels are gas sorbing materials such as getters for removing impurities from the gas to be purified. A feature of the present invention is the continuous, serpentine shape of the gas purification vessel which allows for a longer residence time of the gas and a more efficient purification process. Another feature of the invention is a Joule-Thomson cooling device which divides the primary section of the vessel from the secondary section. The Joule-Thomson cooling device cools the secondary section of the vessel and the gas contained within it.

Abstract: Porous, preferably dimensionally stable material and a method for using for the removal of gaseous impurities from a gas mixture, such as H2S, COS, CH2, and SO2, into the pores of which there is incorporated a secondary amine which chemically bonds with the constituents to be removed, with the material including a hydrophobic polymer with pores having an average diameter in the range of from 0.1 to 50 &mgr;m and a secondary amine having hydrophobic properties which optionally is incorporated into a hydrophobic liquid is disclosed. Favorable results have been attained using polypropylene as the hydrophobic polymer and ditridecyl amine as the secondary amine, with a tertiary amine, such as C12 to C14-alkyl diethanol amine, being part of the hydrophobic liquid.

Abstract: Phosphine, stilbene, and arsine are removed from silane to ultra-trace levels by passing raw silane gas through a bed of a transition element modified potassium zeolite adsorbent at a temperature above the critical temperature of silane and at a pressure of at least about 150 psi. This purification system can be incorporated into existing silane production plants to augment bulk purification methods. The system also can be located at a site where silane is to be used, to assure that delivered silane gas remains of superior quality.

Abstract: A method for producing high capacity gas-storage microporous sorbents involves precursor carbonization under relatively severe heat-treatment conditions, normally followed by activation using a cyclic chemisorption-desorption process.

Abstract: A monolithic hygroscopic material shaped to facilitate a circulation flow of ambient air. The hygroscopic material may be used to remove various compounds from an ambient gas and may be reactivated to restore its drying capacity. The tendency of the material to seek equilibrium may be utilized to achieve dehumidification or humidification.

Abstract: Purification of a hydrogen-based gas mixture containing impurities such as carbon monoxide, nitrogen and methane is effected by contacting the gaseous mixture with a zeolite adsorbent which is a shaped product comprised of at least 95%, as determined on the basis of the moistute equilibrium adsorption value, of a low-silica type X zeolite having an SiO2/Al2O3 molar ratio of 1.9 to 2.1. The zeolite adsorbent is preferably ion-exchanged with lithium and/or calcium. The zeolite adsorbent is preferably prepared by a process including a step of contacting with a caustic solution a calcined product of a mixture of a low-silica type X zeolite and kaolin clay whereby the kaolin clay is converted to a low-silica type X zeolite.

Abstract: A gas accumulator for storing pressurized gases, in particular gaseous fuels such as hydrogen or the like, which gas accumulator has a sealed vessel which is provided with a valve-actuated feed line and outlet line for the pressurized gas and with a solid packing of carbon nanostructures. To increase the storage capacity of a gas accumulator of this type significantly, the particles of the carbon nanostructures are compacted to form larger coherent conglomerates having an apparent density which is increased in comparison with the apparent density of the originally loose particles. The compaction can be carried out, for example, by ordering the carbon nanostructures in their orientation to one another, or else by forming the conglomerates by pressing non-ordered carbon nanostructures.

Abstract: A method of separating and selectively removing hydrogen contaminant from hydrogen-containing product and by-product process streams is disclosed. Separation and removal occur when certain Cd containing zeolite, silica, alumina, carbon or clay compositions are placed in contact with a hydrogen-containing process stream. A hydrogen-encapsulated composition is formed by practice of the method. Also disclosed is a reversible storage method for hydrogen using the above-described compositions.

Abstract: A hydrogen storage unit is provided with a hydrogen storage container containing a hydrogen absorption material, and a filter portion for eliminating impurities contained in stored hydrogen gas. Thereby, the impurities are eliminated from the stored hydrogen gas in the hydrogen storage container, and the hydrogen absorption material is prevented from being poisoned by the impurities. The filter portion can be provided either inside or outside the hydrogen storage container. An adsorbent for adsorbing the impurities can be used in the filter portion. The filter portion is provided with a heating means for enhancing the elimination of the impurities adsorbed in the filter portion, and can be recovered during operation.

Abstract: A process for purifying anhydrous HF by contacting anhydrous HF containing phosphate impurities with an effective amount of activated carbon so that the phosphate impurities are adsorbed on the activated carbon, and anhydrous hydrogen fluoride having a reduced phosphate impurity content is obtained.

Abstract: In a method for storing hydrogen in a carbon material containing microstructures in the form of cones with cone angles being multiples of 60°, the carbon material is introduced in a reaction vessel which is evacuated while the carbon material is kept at a temperature of 295-800 K, after which pure hydrogen gas is introduced in the reaction vessel, the carbon material being exposed to a hydrogen gas pressure in the range of 300-7600 torr such that the hydrogen gas is absorbed in the carbon material, and after which the reaction vessel is left at the ambient temperature with the carbon material under a fixed hydrogen gas pressure. For use the hydrogen is released in the form of a gas from the carbon material either at ambient temperature or by heating the carbon material in the reaction vessel.

Abstract: A hygroscopic material having at least one passageway or channel therethrough. In a dehumidifier embodiment, the material is shaped to provide a surface area to facilitate gas flow, and drying of an ambient gas by creating a chimney effect which facilitates mixing of the gas. This causes the heavier water vapor or other compound containing gas to contact adsorbent material adjacent to the passageway or channel, adsorb at least some of the compound, and cause the lighter gas to exit the passageway or channel. The dehumidifier may have various shapes and sizes and can be reactivated to restore its drying capacity. When utilized as a humidifier, the material desorbs or adds the constituent (such as water vapor) to the gas and a downdraft rather than a chimney effect is achieved.

Abstract: A method for delivering a gas having a proton affinity of less than 866 kJ/mol is disclosed. A support including at least one polymer sufficiently acidic to protonate the gas is contacted with the gas to protonate the gas. The protonated gas condenses to form a solid salt which is sorbed by the support. The gas is dispensed by deprotonating the sorbed solid salt to regenerate said gas. The at least one polymer of the support has a first Hammett acidity value greater than a second Hammett acidity value of a conjugate acid of the gas. Also provided is an apparatus for performing the method. The invention is especially useful for storing, transporting and delivering hazardous gases, such as arsine and phosphine. The polymer can be polymeric sulfonic acids, polymeric perfluoroalkylsulfonic acids, fluorinated sulfonic acid polymers, cross-linked sulfonated polystyrene-divinylbenzene macroreticular copolymers, carboxylic acid polymers, halogenated carboxylic acid functionalized polymers and mixtures thereof.

Abstract: A process and apparatus for the decontamination of gaseous contaminants (especially oxygen, carbon dioxide and water vapor) from hydride gases (including their lower alkyl analogs) down to ≦100 ppb contaminant concentration are described. The critical component is a high surface area metal oxide substrate with reduced metal active sites, which in various physical forms is capable of decontaminating such gases to ≦100 ppb, ≦50 ppb or ≦10 ppb level without being detrimentally affected by the hydride gases. The surface area of the substrate will be ≧100 m2/g, and preferably 200-800 m2/g. Oxides of various metals, especially manganese or molybdenum, can be used, and mixtures of integrated oxides, or one type of oxide coated on another, may be used. The substrate is preferably retained in a hydride-gas-resistant container which is installed in a gas supply line, such as to a gas- or vapor-deposition manufacturing unit.

Abstract: A sorber heat exchanger is provided with a substrate material incorporating a sorbent for reacting with a polar gas refrigerant or hydrogen. A preferred sorbent is a metal salt capable of reacting with the polar gas refrigerant to form a complex compound. The sorbent incorporating substrate is loaded into the reactor space between the heat transfer surfaces. Incorporating the sorbent into the substrate reduces sorbent migration thereby improving performance and life expectancy of the heat exchanger.

Abstract: A process for separation of a gas mixture by pressure swing adsorption, in which a pressure swing cycle comprising a sequence of steps which define adsorption, decompression/regeneration and pressure rise phases is employed for the or each adsorber. The cycle furthermore comprises at least temporarily at least one step of isolating the adsorber (II; IV) during which the pressure variation in the isolated adsorber is recorded.

Abstract: Pressure swing adsorption (PSA) separation of a gas mixture is performed in an apparatus with a plurality of adsorbent beds. The invention provides rotary multiport distributor valves to control the timing sequence of the PSA cycle steps between the beds, with flow controls cooperating with the rotary distributor valves to control the volume rates of gas flows to and from the adsorbent beds in blowdown, purge, equalization and repressurization steps.