Electrostatic chuck for semiconductor manufacturing equipment
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The features shown in broken lines depict environmental subject matter only and form no part of the claimed design.
The alternate long and short dash lines are merely the boundary lines between the claimed parts and the non-claimed parts.
In the
Claims
The ornamental design for an electrostatic chuck for semiconductor manufacturing equipment, as shown and described.
3078565 | February 1963 | Sanders |
D363464 | October 24, 1995 | Fukasawa |
D404372 | January 19, 1999 | Ishii |
6028762 | February 22, 2000 | Kamitani |
D425919 | May 30, 2000 | Burkhart |
6721162 | April 13, 2004 | Kumar |
D489739 | May 11, 2004 | Okugawa |
D490096 | May 18, 2004 | Okugawa |
6815352 | November 9, 2004 | Tamura |
D546784 | July 17, 2007 | Hayashi |
D548200 | August 7, 2007 | Hayashi |
D548705 | August 14, 2007 | Hayashi |
D552565 | October 9, 2007 | Nakamura |
D553104 | October 16, 2007 | Oohashi |
D557226 | December 11, 2007 | Uchino |
D559993 | January 15, 2008 | Nagakubo |
D559994 | January 15, 2008 | Nagakubo |
D587222 | February 24, 2009 | Sasaki |
D609655 | February 9, 2010 | Sugimoto |
D614593 | April 27, 2010 | Lee |
D699200 | February 11, 2014 | Nagakubo |
D709536 | July 22, 2014 | Yoshimura |
D709537 | July 22, 2014 | Kuwabara |
D709538 | July 22, 2014 | Mizukami |
D709539 | July 22, 2014 | Kuwabara |
D716742 | November 4, 2014 | Jang |
D723077 | February 24, 2015 | Sakata |
D724553 | March 17, 2015 | Choi |
D743357 | November 17, 2015 | Vyne |
D770992 | November 8, 2016 | Tauchi |
20020027762 | March 7, 2002 | Yamaguchi |
20020159217 | October 31, 2002 | Tsuruta |
20040179323 | September 16, 2004 | Litman |
20040218339 | November 4, 2004 | Nakamura |
20060002053 | January 5, 2006 | Brown |
20060221539 | October 5, 2006 | Morita |
20070146961 | June 28, 2007 | Morioka |
20080037194 | February 14, 2008 | Kamitani |
20080144251 | June 19, 2008 | Tao |
Type: Grant
Filed: Feb 1, 2016
Date of Patent: Aug 22, 2017
Assignee: TOKYO ELECTRON LIMITED (Minato-Ku, Tokyo)
Inventors: Yasuharu Sasaki (Miyagi), Tomoyuki Takahashi (Miyagi)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/553,359