Electrode plate for plasma processing apparatus
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The broken lines shown represent portions of the electrode plate for plasma processing apparatus that form no part of the claimed design. Where the dot-dash broken lines abut the shaded surface it is understood that those broken lines represent an unclaimed boundary between claimed and unclaimed surfaces. None of the broken lines form any part of the claimed design.
Claims
The ornamental design for an electrode plate for plasma processing apparatus, as shown and described.
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Type: Grant
Filed: Feb 16, 2016
Date of Patent: Mar 3, 2020
Assignee: TOKYO ELECTRON LIMITED (Minato-Ku, Tokyo)
Inventors: Shinichi Kozuka (Miyagi), Ryosuke Niitsuma (Miyagi), Manabu Ishikawa (Miyagi)
Primary Examiner: Derrick E Holland
Assistant Examiner: Jennifer O King
Application Number: 29/554,794