Abstract: In example implementations, a method for producing a thin film coating is provided. The method includes pre-treating a substrate, placing the substrate in a bath comprising at least phosphoric acid and sulphuric acid to produce a thin anodized layer, rinsing the thin anodized layer in a solution, plating a surface of the thin anodized layer in an electro deposition bath following a plating current profile for a predetermined period, and increasing the plating current to the recommended bath plating current to produce the thin film coating having a desired initial coating thickness.

Abstract: A method for forming a semiconductor device structure is provided. The method includes disposing a semiconductor substrate in a physical vapor deposition (PVD) chamber. The method also includes introducing a plasma-forming gas into the PVD chamber, and the plasma-forming gas contains an oxygen-containing gas. The method further includes applying a radio frequency (RF) power to a metal target in the PVD chamber to excite the plasma-forming gas to generate plasma. In addition, the method includes directing the plasma towards the metal target positioned in the PVD chamber such that an etch stop layer is formed over the semiconductor substrate.

Abstract: An apparatus for plating Nd—Fe—B magnet includes a cathode and a target source holder defining a predetermined distance of 5 mm to 200 mm therebetween. A pulse bias power supply having a first positive terminal connected to an anode and a first negative terminal connected to the cathode. A DC bias power supply having a second positive terminal connected to the anode and a second negative terminal connected to the target source holder. The anode is connected to the earth ground. A method for plating the Nd—Fe—B magnet includes steps of maintaining the predetermined distance of 5 mm to 200 mm between the cleaned Nd—Fe—B magnet and the target source material, increasing a first electric potential to the cathode and a second electric potential to the target source holder with the second electric potential greater than the first electric potential, and maintaining a potential differential of 0V to 500V therebetween.

Abstract: Methods for detecting and monitoring changes in mechanical structures and in walls of pipes, vessels and storage tanks, using muitimode acoustic signal propagation and detection, are described. Acoustic signals having chosen amplitude-time-frequency characteristics excite multiple modes in the structure under investigation, are generated and received at a small number of accessible locations, such as the ends of pipes and the tops and bottoms of vessels and storage tanks, with the inspection region between transmit and receive transducers. Small mechanical changes lead to acoustic scattering and attenuation among the various modes, which are detectable as changes in received signal intensity. Such changes may include material loss, material conversion and material addition. Once the structure is characterized in a known condition, the present method may be used to monitor the structure at a later time to determine whether changes have taken place.

Abstract: A window assembly includes an electro-optic element which has a first substantially transparent substrate defining first and second surfaces. The second surface includes a first electrically conductive layer. A second substantially transparent substrate defines third and fourth surfaces. The third surface includes a second electrically conductive layer. A primary seal is disposed between the first and second substrates. The seal and the first and second substrates define a cavity therebetween. An electro-optic medium is disposed in the cavity. The electro-optic medium is switchable such that the electro-optic element is operable between substantially clear and darkened states. An absorptive layer is positioned on the fourth surface of the electro-optic element and a reflective layer is positioned on the absorptive layer.

Abstract: Provided is an electrochromic element, including: a pair of electrodes; and an electrochromic layer disposed between the pair of electrodes and containing a plurality of kinds of organic electrochromic compounds, in which: at least one kind of the plurality of kinds of organic electrochromic compounds includes an organic electrochromic compound having an absorption peak in a wavelength region of 700 nm or more during coloring thereof; and when an optical density in a decolored state thereof is defined as 0, a fluctuation ratio of a transmittance in a wavelength region of from 650 nm or more to 700 nm or less with respect to a central transmittance is within ±15% at an optical density of 0.3.

Abstract: Provided herein is a tobacco packaging material, comprising a paper material coated with at least one polymer layer. The polymer layer comprises at least one repulpable polymer, and wherein the tobacco packaging material has a water vapor transmission rate (WVTR) that is at least 90% lower than the paper material. Further provided is a tobacco package comprising the tobacco packaging material, wherein the tobacco package is substantially free of any foil inner liner or polypropylene film. Further described is a method for making the tobacco packaging material, comprising extrusion coating at least one repulpable polymer onto a paper material to form a polymer layer, and optionally further depositing at least one atomic layer deposition (ALD) layer that comprises a metal oxide.

Abstract: A lubricant free firing weapon is provided having amorphous, solid, diamond-like carbon coating (DLC) containing sp3, sp2 carbons and hydrogen bonded to the metallic operating parts. Such firing weapons may further include physical modifications to the bolt carrier rails to enhance the expulsion of sand/dust on the bolt carrier under extreme environments. Also provided herein are plasma enhanced chemical vapor deposition processes for producing such lubricant free weapons having coat thicknesses of 1 ?m-25 ?m which allows for reliable operation under all environmental conditions including extreme environments such as hot/cold and sand/dust without the need for lubrication.

Abstract: A method of forming an oxide semiconductor includes a step of depositing an oxide semiconductor layer over a substrate by using a sputtering apparatus in which in a target containing indium, an element M (aluminum, gallium, yttrium, or tin), zinc, and oxygen, the substrate which faces a surface of the target, and a magnet unit comprising a first magnet and a second magnet on a rear surface side of the target are provided. In the method, deposition is performed under a condition that a maximum intensity of a horizontal magnetic field is greater than or equal to 350 G and less than or equal to 2000 G in a plane where a vertical distance toward the substrate from a surface of the magnet unit is 10 mm.

Abstract: Methods for depositing a low resistivity nickel silicide layer used in forming an interconnect and electronic devices formed using the methods are described herein. In one embodiment, a method for depositing a layer includes positioning a substrate on a substrate support in a processing chamber, the processing chamber having a nickel target and a silicon target disposed therein, the substrate facing portions of the nickel target and the silicon target each having an angle of between about 10 degrees and about 50 degrees from the target facing surface of the substrate, flowing a gas into the processing chamber, applying an RF power to the nickel target and concurrently applying a DC power to the silicon target, concurrently sputtering silicon and nickel from the silicon and nickel targets, respectively, and depositing a NixSi1-x layer on the substrate, where x is between about 0.01 and about 0.99.

Abstract: The present invention provides a textile metallized on at least one of its faces comprising a textile layer of inorganic fibers and a metallic layer, the textile being characterized in that the connection between the textile layer and the metallic layer is provided by a polymeric intermediate layer formed by a matrix having at least one coupling polymer in which at least one flame retardant agent is distributed, said coupling polymer being bonded by chemical bonds firstly to the textile layer and secondly to the metallic layer. The present invention also provides the method of fabricating this metallized textile.

Abstract: A system and method for single magnetron sputtering are described. One example includes a system having a power supply, a plasma chamber enclosing a substrate, an anode, and a target for depositing a thin film material on the substrate. This example also has a datastore with uncoated anode characterization data and an anode sputtering adjustment system including an anode analysis component to generate a first health value. The first health value is indicative of whether the anode is coated with a dielectric material. This example also has an anode power controller to receive the first health value and provide an anode-energy-control signal to the pulse controller of the pulsed DC power supply to adjust a second anode sputtering energy relative to a first anode sputtering energy to eject at least a portion of the dielectric material from the anode.

Abstract: A window assembly includes an electro-optic element which has a first substantially transparent substrate defining first and second surfaces. The second surface includes a first electrically conductive layer. A second substantially transparent substrate defines third and fourth surfaces. The third surface includes a second electrically conductive layer. A primary seal is disposed between the first and second substrates. The seal and the first and second substrates define a cavity therebetween. An electro-optic medium is disposed in the cavity. The electro-optic medium is switchable such that the electro-optic element is operable between substantially clear and darkened states. An absorptive layer is positioned on the fourth surface of the electro-optic element and a reflective layer is positioned on the absorptive layer.

Abstract: The described embodiments relate generally to methods to form magnetic assemblies. In particular, extreme cold work (aka cold spray) is used to enhance magnetic properties of a steel alloy (most notably 316L stainless steel and others) that can then be formed into useful shapes and embedded within a substrate without undue machining operations.

Abstract: A sputtering system and method are disclosed. The system has at least one dual magnetron pair having a first magnetron and a second magnetron, each magnetron configured to support target material. The system also has a DMS component having a DC power source in connection with switching components and voltage sensors. The DMS component is configured to independently control an application of power to each of the magnetrons, and to provide measurements of voltages at each of the magnetrons. The system also has one or more actuators configured to control the voltages at each of the magnetrons using the measurements provided by the DMS component. The DMS component and the one or more actuators are configured to balance the consumption of the target material by controlling the power and the voltage applied to each of the magnetrons, in response to the measurements of voltages at each of the magnetrons.

Abstract: A ruthenium sputtering target, wherein a Si content is 10 to 100 wtppm, a total content of unavoidable impurities excluding gas components is 50 wtppm or less, and a remainder is Ru. By suppressing the crystal growth of ruthenium or a ruthenium alloy and reducing the generation of coarse crystal grains, arcing that occurs during sputtering is minimized, particle generation is reduced, and yield is improved.

Abstract: A triple ring flame burner composed of a central burner and a toroidal burner that are coupled by a bridge, the central burner comprises a Venturi tube, a mixture chamber, a distribution channel with the toroidal burner composed of a second Venturi tube, a second mixture chamber, a second distribution channel, a stability and flame transfer chamber with a pair of radial walls which divide the distribution channel from the inner crenellated wall to the outer crenellated wall, said radial walls present a plurality of combustion ports that transfer the flame inserted within said radial walls, the inner of the radial walls is in connection with a peripheral crenel for inner stability and transfer and the outer end of the radial walls is in connection with at least one peripheral crenel for outer stability and transfer.

Abstract: A process system includes a substrate, first wafers, second wafers, and a roller. The first wafers are arranged at predetermined intervals along a first column which is parallel to an edge of the substrate, wherein each of the first wafers includes first chips. The second wafers are arranged at the predetermined intervals and at an offset from the first wafers, along a second column which is parallel to the first column, wherein each of the second wafers includes second chips. The roller is configured to roll in a first direction to pick up the plurality of first chips, roll in a second direction opposite to the first direction while suspended from the first wafers, pick up the second chips included in the wafers by rolling in the first direction, and transport the first chips and the second chips to the substrate.

Abstract: The present invention relates to an implant having a surface comprising a coating on at least a portion of the surface of the implant, wherein the coating comprises at least two coating layers of bioactive compounds adjacent to each other, obtainable in a process comprising the following steps: providing an implant with a surface, providing a first suspension comprising at least one first bioactive compound in a first solvent, wherein the first bioactive compound is non-soluble or partially soluble in the first solvent, applying said first suspension comprising the at least one first bioactive compound onto at least a part of the implant surface forming a first coating layer; drying the first coating layer, providing a second solution comprising at least one second bioactive compound in a second solvent, wherein the second bioactive compound is soluble or readily soluble in the second solvent; applying said second solution comprising the at least one second bioactive compound onto the first coating layer form

Abstract: The thermal barrier coating system comprises a matrix of a first chemistry with multiple embedded second phases of a second chemistry. The matrix comprises a stabilized zirconia. The second regions comprise at least 40 mole percent of oxides having the formula Ln2O3, where Ln is selected from the lanthanides La through Lu, Y, Sc, In, Ca, and Mg with the balance zirconia (ZrO2), hafnia (HfO2), titania (TiO2), or mixtures thereof. The second phases have a characteristic thickness (T6) of less than 2.0 micrometers (?m). The spacing between second phases has a characteristic thickness (T5) of less than 8.0 micrometers (?m).

Abstract: Provided is a light modulating device including a light modulating unit provided on a substrate, a driving unit electrically connected to the light modulating unit and configured to drive the light modulating unit, and a cover disposed on the light modulating unit and configured to seal the light modulating unit, wherein the light modulating unit comprises an electrochromic device.

Abstract: Techniques and systems for 3D printing using mirrors that are oriented at about 45 degrees from an X-axis and Y-axis are described. A technique includes receiving an object model; rotating the object model about 45 degrees around the Z-axis; generating cross-sectional images of the rotated object model; mapping pixels of the cross-sectional images to corresponding mirrors of a digital micromirror device of an additive manufacturing apparatus to form additive-manufacturing images, wherein edges of the mirrors are oriented about 45 degrees from the X-axis of the digital micromirror device and about 45 degrees from the Y-axis of the digital micromirror; and providing the additive manufacturing images to generate a build piece corresponding to the object model. Other implementations can include corresponding systems, apparatus, and computer program products.

Abstract: Methods for depositing a metal-containing layer atop a substrate disposed in a PVD chamber are provided herein. In some embodiments, such a method includes: providing a plasma forming gas to a processing region of the PVD chamber; providing a first amount of RF power to a target assembly disposed opposite the substrate to form a plasma within the processing region of the PVD chamber; sputtering source material from the target assembly to deposit a metal-containing layer onto the substrate, wherein the source material is at a first erosion state; and increasing the first amount of RF power provided to the target assembly by a predetermined amount while sputtering the source material, wherein the predetermined amount is determined by a second amount of RF power provided to the target assembly to maintain a desired ionization rate of source material at a second erosion state.

Abstract: The present invention provides a gallium nitride sintered body and a gallium nitride molded article which have high density and low oxygen content without using a special apparatus. According to the first embodiment, a gallium nitride sintered body, which is characterized by having density of 2.5 g/cm3 to less than 5.0 g/cm3 and an intensity ratio of the gallium oxide peak of the (002) plane to the gallium nitride peak of the (002) plane of less than 3%, which is determined by X-ray diffraction analysis, can be obtained. According to the second embodiment, a metal gallium-impregnated gallium nitride molded article, which is characterized by comprising a gallium nitride phase and a metal gallium phase that exist as separate phases and having a molar ratio, Ga/(Ga+N), of 55% to 80%, can be obtained.

Abstract: A series of solid-state lithium ion composite electrolytes is described. The composite materials have lithium ions in an anionic framework wherein the anionic framework has lithium ion vacancies or interstitial Li+ sites. The anionic framework lattice is isostructural to a Laves Mg2Cu lattice and the lithium ion (Li+) conductivity of the solid state lithium ion electrolyte is at least 10?4 S/cm. The activation energy for lithium ion migration in the solid state lithium ion electrolyte is 0.36 sV or less. Composites of specific formulae are provided.

Abstract: The present invention provides anode materials, methods of producing them, anodes, methods of producing them, electrochemical cells, and lithium-ion batteries, where the anode material comprises a silicon monoxide nanoparticle. In certain embodiments, the silicon monoxide is porous or mesoporous. In certain embodiments, the porous or mesoporous silicon additionally comprises other materials within its pores, such as lithium.

Abstract: Low-emissivity coatings that are highly reflective to infrared-radiation. The coating includes three infrared-reflection film regions, which may each include silver.

Abstract: A virtual cathode deposition apparatus utilises virtual plasma cathode for generation of high density electron beam to ablate a solid target. A high voltage electrical pulse ionizes gas to produce a plasma which temporarily appears in front of the target and serves as the virtual plasma cathode at the vicinity of target. This plasma then disappears allowing the ablated target material in a form of a plasma plume to propagate toward the substrate. Several virtual cathodes operating in parallel provide plumes that merge into a uniform plasma which when condensing on a nearby substrate leads to wide area deposition of a uniform thickness thin film.

Abstract: A gas sensor is provided which constitutes a pump cell 3 and a sensor cell 5 using a single solid electrolyte body 2, a pump electrode 30, a sensor electrode 50, and a reference electrode 80 and is designed to decrease power consumed by a heater and permit a size thereof to be reduced. A ratio of a minimum distance L2 between the pump electrode 30 and the sensor electrode 50 to a thickness d of the solid electrolyte body 2 is set to be three or more, thereby enabling the gas sensor 1 to make the pump cell 3 and the sensor cell 5 using the single solid electrolyte body 2, the pump electrode 30, the sensor electrode 50, and the reference electrode 80. Only either of the gas chamber or the reference gas chamber is, therefore, located between the solid electrolyte body and the heater, thereby decreasing distances of the pump cell and the sensor cell to the heater. This facilitates the ease with which the heater heats up the pump cell and the sensor cell.

Abstract: Sputter tools are described. In one embodiment, an apparatus to support a wafer includes a pallet having a depression to receive the wafer. The pallet includes an opening below the depression, and an edge in the depression is to support the wafer over the opening. A cover at least partially covers the opening. In one example, the cover may be a plate with one or more holes, and a pipe may be located below each of the holes in the cover. In one embodiment, a wafer-processing system includes a processing chamber and a pallet with a depression to receive a wafer. The pallet has an opening below the depression, and an edge in the depression supports the wafer over the opening. In one such embodiment, a cover at least partially covers the opening. According to one embodiment, an energy-absorbing material is disposed below the opening in the pallet.

Abstract: The present invention provides an electrochromic device including a pair of electrodes and an electrochromic layer disposed between the pair of electrodes and containing different electrochromic materials having the same polarity, wherein in the case where two materials are selected from the different electrochromic materials having the same polarity in descending order of maximum absorbance in a color-display mode of the electrochromic layer and where the diffusion coefficients of the molecules of the two materials are compared with each other in the color-display mode, a smaller diffusion coefficient D2min, a larger diffusion coefficient D2max, and maximum absorbance H2 of the molecules of the electrochromic material having the diffusion coefficient D2max in the color-display mode satisfy Formula (5). 1?D2max/D2min?(1+0.

Abstract: Methods of depositing tungsten into high aspect ratio features using a dep-etch-dep process integrating various deposition techniques with alternating pulses of surface modification and removal during etch are provided herein.

Abstract: The invention relates to a solar protection glazing comprising, on at least one of the faces of a glass substrate, a multi-layer stack comprising at least one layer absorbing solar radiation of at least 3 nm and dielectric coatings surrounding said solar radiation absorbing layer. According to the invention, the light reflection of the glass substrate coated with the multi-layer stack, measured on the substrate side, is at least 20% and is at least two times the light reflection of the glass substrate coated with the multi-layer stack measured on the stack side, and the reflection color on the substrate side has a colorimetric coordinate value a* of less than 2 and a colorimetric coordinate value b* of less than 5. The invention is particularly useful as an automobile glazing, in particular on the roof thereof, as a building glazing or as a household oven.

Abstract: A coated article includes a low-emissivity (low-E) coating supported by a substrate (e.g., glass substrate) for use in a window, where the low-E coating is exposed to ultraviolet (UV) radiation in order to improve the coating's and thus the coated article's electrical, optical and/or thermal blocking properties. Exposing the low-E coating to UV radiation, e.g., emitted from a UV lamp(s) and/or UV laser(s), allows for selective heating of a contact/seed layer which transfers energy to the adjacent IR reflecting layer.

Abstract: Methods of forming two-dimensional transition metal dichalcogenide sheets are provided. The methods include adding a cross-linking agent to an activating agent to form a solution and mixing a two-dimensional transition metal dichalcogenide with the solution to form a mixture. The methods also include adding a cleaving agent to the mixture to form one or more contiguous sheets of transition metal dichalcogenide.

Abstract: This disclosure describes systems and methods for regulating the density and kinetic energy of ions in a sputtering deposition chamber. A pulsed DC waveform with a modulated RF signal is generated and applied to the sputtering chamber. Upon termination of a cycle of the pulsed DC waveform, a reverse voltage spike is generated. This reverse voltage spike reverses the polarity of the cathode and anode of the sputtering chamber for some period of time. A reverse voltage limiting circuit is provided so as to limit the reverse voltage spike to a selected reverse voltage threshold. A controller may be employed to control the timing and duration of the application of the DC waveform, the timing and duration of the RF waveform, and the engagement of the reverse limiting circuit.

Abstract: Provided are a conductive film which is excellent in hygrothermal characteristics and has excellent bending performance, and an electronic device having such a conductive film. A conductive film is obtained by forming, on one surface or both surfaces of a substrate, a zinc tin oxide (ZTO) layer and a transparent conductive film that is formed of zinc oxide other than zinc tin oxide sequentially from the substrate side, in which a thickness of the zinc tin oxide layer is 5 to 500 nm, a thickness of the zinc oxide-based transparent conductive film is 5 to 1000 nm, and a water-vapor transmittance rate of the zinc tin oxide (ZTO) layer is 0.1 g/(m2·day) or less.

Abstract: A detection module and a method for operating the same are revealed. A nano-scale iridium oxide membrane is used as a detection film. After being in contact with different concentrations of hydrogen peroxide, the iridium oxide membrane is oxidized or reduced to generate iridium (III) ions (Ir3+) or iridium (IV) ions (Ir4+). Thus a voltage shift is generated. Whether hydrogen peroxide is contained in the sample can be checked by detection of changes in the voltage. A sample is formed by mixing serum and benzylamine. When the serum in the sample contains LOXL2 enzyme associated with breast cancer, the LOXL2 enzyme reacts with benzylamine to get hydrogen peroxide which is used as a detection medium.

Abstract: A method for manufacturing a semiconductor device includes the steps of forming a first insulating film over a first gate electrode over a substrate while heated at a temperature higher than or equal to 450° C. and lower than the strain point of the substrate, forming a first oxide semiconductor film over the first insulating film, adding oxygen to the first oxide semiconductor film and then forming a second oxide semiconductor film over the first oxide semiconductor film, and performing heat treatment so that part of oxygen contained in the first oxide semiconductor film is transferred to the second oxide semiconductor film.

Abstract: A magnetic field forming apparatus includes a support member having a first side and a second side coupling a first end to a second end and an axis of rotation between the first end and the second end; a first body coupled to the first end of the support member and extending away from the first side of the support member, wherein the first body has a plurality of first magnets coupled to a bottom of the first body; a second body rotatably coupled to the second end of the support member and extending away from the second side of the support member, wherein the second body has a plurality of second magnets coupled to a bottom of the second body, wherein the plurality of the first magnets are disposed about 180 degrees from the plurality of second magnets with respect to the axis of rotation of the support member.

Abstract: A heat-assisted magnetic recording (HAMR) medium has a multilayered or laminated heat-sink structure. The laminated heat-sink structure includes a first heat-sink layer and a RuAl—X thermal barrier layer between the medium substrate and the first heat-sink layer. The laminated heat-sink structure may include a second heat-sink layer may between the substrate and the RuAl—X thermal barrier layer. In the RuAl—X thermal barrier layer, X is selected from C and one or more oxides of Si, Ti, W, Zr and Hf. The HAMR medium with the laminated heat-sink structure reduces the amount of required laser current as compared to a similar HAMR medium with a conventional single heat-sink layer of the same thickness, while also slightly improving magnetic properties and recording performance.

Abstract: Methods and systems for performing ionization, including applying radio frequency energy to a chemical compound so that at least one ion of the compound or of a compound fragment is generated, and detecting at least one such ion.

Abstract: Disclosed is a touch panel. The touch panel includes a cover substrate including an active area and an inactive area; a first printing layer on the inactive area; and first and second conductive layers on the first printing layer, wherein the first and second conductive layers extend from a side surface of the first printing layer along a top surface of the first printing layer.

Abstract: In various embodiments, a sputtering target initially formed by ingot metallurgy or powder metallurgy and rejuvenated by, e.g., cold spray, is utilized in sputtering processes to produce metallic thin films.

Abstract: A touch panel includes a cover substrate having an active area and an unactive area. A printing layer is provided on the unactive area while forming a step difference from the cover substrate. An insulating layer is provided on the printing layer, and the insulating layer has average surface roughness in a range of 0.2 ?m to 0.4 ?m.

Abstract: A thermal insulator includes a plurality of layers. At least some of the layers include phononic crystals having a phononic bandgap, wherein heat transporting phonons within a selected range of frequencies are substantially blocked by each phononic crystal layer. The plurality of layers thermally isolate a first region from a second region, wherein the first region is at one end of the plurality of layers and the second region is at the other end of the plurality of layers.

Abstract: A method for the carburization of a deep-drawn article or a stamped-bent article made of austenitic rustproof stainless steel includes inserting the article into an oven in a first process step and heating the article to a first temperature, wherein an oxygen containing standard atmosphere that is present in the oven is replaced by a first gas mixture, and in which the article is heated up to a second temperature in a second process step, wherein the first gas mixture is replaced by a second gas mixture, and in which the article is maintained on the second temperature in a third process step, wherein the second gas mixture is replaced by a third gas mixture, and in which the article is cooled down to a third temperature in a fourth process step, wherein the third gas mixture is replaced by a fourth gas mixture.

Abstract: A sputtering chamber includes at least two sputtering targets, one of the at least two targets disposed on a first side a substrate conveyor extending within the chamber, and another of the at least two targets disposed on a second side of the conveyor. The at least two targets may be independently operable, and at least one of the targets, if inactivated, may be protected by a shielding apparatus. Both of the at least two targets may be mounted to a first wall of a plurality of walls enclosing the sputtering chamber.

Abstract: A stack includes a substrate, a magnetic recording layer having a columnar structure, and an interlayer disposed between the substrate and the magnetic recording layer. The columnar structure includes magnetic grains separated by a crystalline segregant or a combination of crystalline and amorphous segregants.

Abstract: Provided are a method of manufacturing a nano gap sensor and a nano gap sensor manufactured by the method. According to the method of manufacturing the nano gap sensor, fine cracks are formed in a substrate including a silicon wafer, etc. in order to form the nano gap with simplified processes and low manufacturing costs, and after that, a metal catalyst layer is stacked on the nano gap to manufacture a sensor capable of selectively detecting a certain material or a gas such as hydrogen. In particular, when palladium or a palladium alloy is used as the metal catalyst layer, highly sensitive hydrogen sensors capable of responding various concentrations of hydrogen may be produced in large quantities.