Coating, Forming Or Etching By Sputtering Patents (Class 204/192.1)
  • Publication number: 20140367246
    Abstract: A thin film sensor, such as a glucose sensor, is provided for transcutaneous placement at a selected site within the body of a patient. The sensor includes several sensor layers that include conductive layers and includes a proximal segment defining conductive contacts adapted for electrical connection to a suitable monitor, and a distal segment with sensor electrodes for transcutaneous placement. The sensor electrode layers are disposed generally above each other, for example with the reference electrode above the working electrode and the working electrode above the counter electrode. The electrode layers are separated by dielectric layer.
    Type: Application
    Filed: August 27, 2014
    Publication date: December 18, 2014
    Inventors: RAJIV SHAH, Rebecca K. Gottlieb
  • Patent number: 8911867
    Abstract: The invention relates to a protective coating, having the chemical composition CaSibBdNeOgHlMem, wherein Me is at least one metal of the group consisting of {Al, Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W, Y, Sc, La, Ce, Nd, Pm, Sm, Pr, Mg, Ni, Co, Fe, Mn}, with a+b+d+e+g+l+m=1. According to the invention, the following conditions are satisfied: 0.45?a?0.98, 0.01?b?0.40, 0.01?d?0.30, 0?e?0.35, 0?g?0.20, 0?l?0.35, 0?m?0.20. The invention relates also to a coated member having a protective coating, as well as to a method for producing a protective coating, in particular a multilayer film for a member.
    Type: Grant
    Filed: June 18, 2009
    Date of Patent: December 16, 2014
    Assignee: Oerlikon Metaplas GmbH
    Inventor: Jörg Vetter
  • Publication number: 20140363685
    Abstract: To provide a production process to produce a laminate having excellent moisture resistance and abrasion resistance, and a laminate. The process for producing a laminate 1 comprises a first step of forming a dielectric layer 121, a metal layer 122 and a dielectric layer 121 in this order on a transparent substrate, and a second step of, after the first step, forming a tin zinc oxide layer 13 containing an oxide of tin and zinc as the main component. Formation of the tin zinc oxide layer 13 in the second step is carried out by sputtering using a metal target containing tin and zinc as the main component in a gas atmosphere in which a gas containing carbon atoms substantially functions as an oxidizing gas. Formation of the dielectric layer 121 in the first step is carried out in a gas atmosphere in which a gas containing no carbon atom substantially functions as an oxidizing gas.
    Type: Application
    Filed: August 28, 2014
    Publication date: December 11, 2014
    Applicant: ASAHI GLASS COMPANY, LIMITED
    Inventors: Jun OKAWA, Kazuya Yaoita
  • Patent number: 8906206
    Abstract: The invention provides a coater, and methods of using the coater, for depositing thin films onto generally-opposed major surfaces of a sheet-like substrate. The coater has a substrate transport system adapted for supporting the substrate in a vertical-offset configuration wherein the substrate is not in a perfectly vertical position but rather is offset from vertical by an acute angle. The transport system defines a path of substrate travel extending through the coater. The transport system is adapted for conveying the substrate along the path of substrate travel. Preferably, the transport system includes a side support for supporting a rear major surface of the substrate. The preferred side support bounds at least one passage through which coating material passes when such coating material is deposited onto the substrate's rear major surface. Preferably, the coater includes at least one coating apparatus (e.g.
    Type: Grant
    Filed: February 26, 2010
    Date of Patent: December 9, 2014
    Assignee: Cardinal CG Company
    Inventor: Klaus Hartig
  • Publication number: 20140353019
    Abstract: Embodiments of the present disclosure are directed towards techniques and configurations for formation of a dielectric with a smooth surface. In one embodiment, a method includes providing a dielectric with first and second surfaces, a conductive feature formed on the first surface, and a laminate applied to the second surface, curing the second surface while the laminate remains applied, and removing the laminate. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: May 30, 2013
    Publication date: December 4, 2014
    Inventors: Deepak Arora, Daniel N. Sobieski, Dilan Seneviratne, Ebrahim Andideh, James C. Meyer
  • Publication number: 20140356411
    Abstract: The present invention includes nanotubes or rods, methods and arrays using plasmonic-magnetic bifunctional nanotubes or rods comprising: one or more silica nanotubes or rods; one or more nanomagnets embedded in a portion of the silica nanotubes or rods; and plasmonic metal nanoparticles uniformly coating in or on at least a portion of the surface of the nanomagnets and the silica nanotubes surface-coated.
    Type: Application
    Filed: June 4, 2014
    Publication date: December 4, 2014
    Inventors: Donglei Fan, Xiaobin Xu
  • Publication number: 20140355639
    Abstract: Techniques described herein are generally related to metamaterial structures for Q-switching in laser systems. The various described techniques may be applied to methods, systems, devices or combinations thereof. Sonic described metamaterial structures may include a substrate and a first conductive layer disposed on a first surface of the substrate. A dielectric layer may be disposed on a first surface of the first conductive layer and a second conductive layer having a substantially symmetric geometric shape may be disposed on a first surface of the dielectric layer. The second conductive layer may cover a portion of the first surface of the dielectric layer.
    Type: Application
    Filed: April 17, 2013
    Publication date: December 4, 2014
    Inventors: Ramakrishna Subramaniam Anantha, Govind Dayal Singh
  • Patent number: 8900418
    Abstract: This disclosure provides (a) methods of making an oxide layer (e.g., a dielectric layer) based on yttrium and titanium, to have a high dielectric constant and low leakage characteristic and (b) related devices and structures. An oxide layer having both yttrium and titanium may be fabricated either as an amorphous oxide or as an alternating series of monolayers. In several embodiments, the oxide is characterized by a yttrium contribution to total metal that is specifically controlled. The oxide layer can be produced as the result of a reactive process, if desired, via either a PVD process or, alternatively, via an atomic layer deposition process that employs specific precursor materials to allow for a common process temperature window for both titanium and yttrium reactions.
    Type: Grant
    Filed: November 14, 2012
    Date of Patent: December 2, 2014
    Assignees: Intermolecular, Inc., Elpida Memory, Inc.
    Inventors: Imran Hashim, Hanhong Chen, Tony Chiang, Indranil De, Nobi Fuchigami, Edward Haywood, Pragati Kumar, Sandra Malhotra, Sunil Shanker
  • Patent number: 8900419
    Abstract: In a method of switching magnet flux distribution, a magnet is arranged on a rear side of a backing plate with respect to a target holding side thereof in a magnetron sputtering cathode, and placing an article that exhibits ferromagnetism at room temperature on the target holding side of the backing plate or removing the article therefrom so that the magnet flux distribution is switched between a balanced distribution of the magnetic flux and unbalanced distribution of the magnetic flux.
    Type: Grant
    Filed: March 8, 2013
    Date of Patent: December 2, 2014
    Assignee: National Institute for Materials Science
    Inventors: Masayuki Kamei, Takamasa Ishigaki
  • Publication number: 20140349070
    Abstract: Provided is a method for making a reflective anode electrode for use in an organic electroluminescent display, comprising the steps of: sputtering a reflective Ag layer on a substrate in the presence of the inert gas in a first chamber; sputtering a transparent oxide conductive buffer layer on said Ag layer in the presence of the inert gas in a second chamber; and sputtering a transparent oxide conductive contact layer on said buffer layer in the presence of both inert gas and oxygen in the second chamber, to obtain the resulted reflective anode electrode. Also provided is a reflective anode electrode made by above method. The reflective anode electrode according to the present invention has higher reflectance and transmittance, due to the presence of the transparent conductive oxide buffer layer therein, which leads to the oxidation of the reflective layer minimized and the total transmittance substantially not affected.
    Type: Application
    Filed: August 6, 2013
    Publication date: November 27, 2014
    Applicant: EverDisplay Optronics (Shanghai) Limited
    Inventor: Peiming Chu
  • Patent number: 8894824
    Abstract: A medical implant has a microscopically rough outer coating that serves to bond the implant to animal tissue. The coating is applied to the implant by physical vapor deposition. The coating preferable is applied via a generally oblique coating flux or a low energy coating flux. In some embodiments, the coating has pores. The pores can contain a drug, which can diffuse over a period of time. The coating may be partially nonporous to protect the implant from corrosion. The coating can have an outer porous layer that can bond with animal tissue easily.
    Type: Grant
    Filed: June 28, 2005
    Date of Patent: November 25, 2014
    Assignee: Isoflux, Inc.
    Inventors: David A. Glocker, Mark M. Romach
  • Patent number: 8895150
    Abstract: A substrate having a coating is disclosed. The coating is formed of a plurality of layers. At least one of the layers includes a super alloy and at least two additional layers including silver. A coating for a substrate is also disclosed. A method of applying a coating to a substrate is further disclosed.
    Type: Grant
    Filed: September 24, 2013
    Date of Patent: November 25, 2014
    Assignee: Apogee Enterprises, Inc.
    Inventor: Randy Leland Stull
  • Publication number: 20140342497
    Abstract: A method for producing a metal article may include: Producing a supply of a composite metal powder by: providing a supply of molybdenum metal powder; providing a supply of a sodium compound; combining the molybdenum metal powder and the sodium compound with a liquid to form a slurry; feeding the slurry into a stream of hot gas; and recovering the composite metal powder; and consolidating the composite metal powder to form the metal article, the metal article comprising a sodium/molybdenum metal matrix. Also disclosed is a metal article produced accordance with this method.
    Type: Application
    Filed: August 1, 2014
    Publication date: November 20, 2014
    Inventors: Naresh Goel, Carl Cox, David Honecker, Eric Smith, Christopher Michaluk, Adam DeBoskey, Sunil Chandra Jha
  • Publication number: 20140335349
    Abstract: A coated glass ceramic cooking plate is provided, which has a multilayer coating on its lower surface. The multilayer coating includes a metallic layer of an alloy including components chromium, iron, nickel, and silicon. The silicon content of the alloy is at least 2 atomic percent. This metallic layer is covered by a barrier layer in form of an oxide of an alloy including components chromium, iron, nickel, and silicon, also with a silicon content of at least 2 atomic percent. The molar content of oxygen of the barrier layer is greater by at least a factor of 10 than that of the metallic layer.
    Type: Application
    Filed: May 7, 2014
    Publication date: November 13, 2014
    Applicant: SCHOTT AG
    Inventors: Christian Henn, Eveline Rudiger-Voigt, Stephanie Mangold, Tanja Woywod
  • Publication number: 20140331861
    Abstract: A method of preparing or operating a mass spectrometer vacuum interface comprising a skimmer apparatus having a skimmer aperture and an internal surface of the skimmer apparatus, comprising disposing an adsorbent or getter material on the internal surface. The internal surface has a deposition region where matter from plasma flows may be deposited and the material is disposed on part or all of the deposition region. The disposing step may be performed before a first use and/or intermittently, especially to refresh a previously disposed material. Providing such material serves to trap or collect deposition matter which might anyway be deposited but in such a way that subsequent liberation of that matter is prevented or at least reduced.
    Type: Application
    Filed: December 12, 2012
    Publication date: November 13, 2014
    Inventors: Alexander Alekseevich Makarov, Lothar Rottmann
  • Publication number: 20140332369
    Abstract: A cathode assembly for a sputter deposition apparatus and a method for coating a substrate is provided. The cathode assembly has a coating side for coating on a substrate. Further, the cathode assembly includes a rotary target assembly adapted for rotating a target material around a rotary axis; at least a first magnet having an inner magnet pole and at least one outer magnet poles and being adapted for generating one or more plasma regions. The cathode assembly has a first angular coordinate for a magnet pole, the magnet pole being provided for the coating side, and a second angular coordinate for a further magnet pole, the magnet pole being provided for the coating side; wherein the first angular coordinate and the second angular coordinate define an angle a larger than about 20 degrees and smaller than about 160 degrees.
    Type: Application
    Filed: October 11, 2011
    Publication date: November 13, 2014
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Evelyn Scheer, Markus Hanika, Ralph Lindenberg, Marcus Bender, Andreas Lopp, Konrad Schwanitz, Fabio Pieralisi, Jian Liu
  • Publication number: 20140335320
    Abstract: The present invention relates to a high glossy molding sheet and a method for manufacturing the same that may realize a same outer appearance with an actual metal surface by forming a reverse pattern with an opposite shape to an original pattern of a metal board using a transfer of an ultraviolet curable resin layer, and forming a metal deposition layer on the top and laminating on a board.
    Type: Application
    Filed: September 12, 2012
    Publication date: November 13, 2014
    Inventors: Jun Beom Shin, Jae Gwang Nam, Min Ho Lee, Jung Eun Ha
  • Publication number: 20140335363
    Abstract: The present invention relates to an indium oxide film formed by chemical vapor deposition or atomic layer deposition, or to an oxide film containing indium, and to a method for forming same. By chemical vapor deposition or atomic layer deposition, wherein an indium material that is a liquid at room temperature is used, an oxide film containing indium can be formed on a substrate having a large area, and particularly a substrate for manufacturing a display device.
    Type: Application
    Filed: July 24, 2014
    Publication date: November 13, 2014
    Inventors: Wonyong Koh, Byungsoo Kim, Dong Hwan Ma
  • Publication number: 20140324156
    Abstract: A deformable implantable medical device such as a stent comprising metallic, polymer and/or composite substrate having a columnar structured plasma polymer surface capable of binding functional biological molecules. The polymer surface can be bound to the substrate through a mixed or graded interface formed by a co-deposition process where a substrate material is deposited with carbon containing species while gradually reducing the substrate material proportion and increasing the carbon containing species proportion. The device is able to undergo deformation without substantial delamination of the plasma polymer surface.
    Type: Application
    Filed: June 21, 2012
    Publication date: October 30, 2014
    Applicant: THE UNIVERSITY OF SYDNEY
    Inventors: Yongbai Yin, Marcela Bilek, David McKenzie
  • Patent number: 8871064
    Abstract: A multi-step process performed in a plasma sputter chamber including sputter deposition from the target and argon sputter etching of the substrate. The chamber includes a quadruple electromagnetic coil array coaxially arranged in a rectangular array about a chamber axis outside the sidewalls of a plasma sputter reactor in back of an RF coil within the chamber. The coil currents can be separately controlled to produce different magnetic field distributions, for example, between a sputter deposition mode in which the sputter target is powered to sputter target material onto a wafer and a sputter etch mode in which the RF coil supports the argon sputtering plasma. A TaN/Ta barrier is first sputter deposited with high target power and wafer bias. Argon etching is performed with even higher wafer bias. A flash step is applied with reduced target power and wafer bias.
    Type: Grant
    Filed: January 28, 2010
    Date of Patent: October 28, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Tza-Jing Gung, Xinyu Fu, Arvind Sundarrajan, Edward P. Hammond, IV, Praburam Gopalraja, John C. Forster, Mark A. Perrin, Andrew S. Gillard
  • Publication number: 20140314947
    Abstract: The present disclosure provides, among other things, scale-coated surfaces, vessels with controlled deposits of scale, and associated methods for enhanced boiling heat transfer. It is presently found that creating and/or maintaining a scale deposit at a controlled thickness actually enhances a type of boiling called nucleate boiling, which improves heat transfer.
    Type: Application
    Filed: August 22, 2013
    Publication date: October 23, 2014
    Applicant: Massachusetts Institute of Technology
    Inventors: Kripa K. Varanasi, Christopher Jameson Love
  • Publication number: 20140314964
    Abstract: Various embodiments provide a method and apparatus for forming a three-dimensional article through successive fusion of parts of at least one layer of a powder bed provided on a work table in an additive manufacturing machine, which parts corresponds to successive cross sections of the three-dimensional article. The method comprises the steps of: applying a layer of predetermined thickness of powder particles on the work table, applying a coating on at least a portion of the powder particles, which coating is at least partially covering the powder particles, and fusing the powder particles on the work table with an electron beam.
    Type: Application
    Filed: March 31, 2014
    Publication date: October 23, 2014
    Applicant: ARCAM AB
    Inventor: Ulf Ackelid
  • Publication number: 20140311323
    Abstract: A high traction synthetic rope comprising a braided sheath (8) adhered to a synthetic strength member (7) by means of a first synthetic portion (9) and portions of material (23) adhered to the outside surface of the braided sheath by means of a second synthetic portion (21), where the portions of material (23) are formed of a substance that differs from a substance mainly forming the second synthetic portion (21) and exhibits greater friction when wet or with greasy conditions and measured on an iron surface than does the substance mainly forming the second synthetic portion. Also methods of manufacturing such a high traction synthetic rope are disclosed. The rope shows reliable traction on driven rotating elements during wet/greasy conditions.
    Type: Application
    Filed: November 16, 2012
    Publication date: October 23, 2014
    Inventor: Hjortur Erlendsson
  • Patent number: 8864954
    Abstract: A method of depositing lithium-containing films on a battery substrate in a sputtering chamber is provided. At least one pair of sputtering targets that each comprise a lithium-containing sputtering member is provided in the sputtering chamber, the sputtering targets selected to each have a conductivity of at least about 5×10?6 S·cm?1. A substrate carrier holding at least one battery substrate is placed in the sputtering chamber. A pressure of sputtering gas is maintained in the sputtering chamber. The sputtering gas is energized by applying to the pair of sputtering targets, an electrical power at a frequency of from about 10 to about 100 kHz.
    Type: Grant
    Filed: December 23, 2011
    Date of Patent: October 21, 2014
    Assignee: Front Edge Technology Inc.
    Inventors: Kai Wei Nieh, Jiuh-Ming Liang, Victor Krasnov
  • Patent number: 8864861
    Abstract: A cutting tool insert for machining by chip removal includes a body of polycrystalline cubic boron nitride compact (PCBN), either as a solid insert or attached to a backing body, onto which a hard and wear resistant PVD coating is deposited. The coating includes a polycrystalline nanolaminated structure of alternating A and B layers, where layer A is (Ti,Al,Me1)N and Me1 is one or more of the metal elements from group 3, 4, 5 or 6 in the periodic table, layer B is (Ti,Si,Me2)N and Me2 is one or more of the metal elements from group 3, 4, 5 or 6 in the periodic table including Al with a thickness between 0.5 and 10 ?m. The insert is particularly useful in metal cutting applications generating high temperatures, e.g., high speed machining of steels, cast irons, super alloys and hardened steels.
    Type: Grant
    Filed: May 28, 2010
    Date of Patent: October 21, 2014
    Assignee: Seco Tools AB
    Inventors: Jon Andersson, Rachid M'Saoubi, Tommy Larsson, Mats Johansson, Per Alm
  • Patent number: 8864956
    Abstract: Ion-enhanced physical vapor deposition is augmented by sputtering to deposit multi-component materials. The process may be used to deposit coatings and repair material on Ti alloy turbine engine parts. The physical vapor deposition may be ion-enhanced electron beam physical vapor deposition.
    Type: Grant
    Filed: October 20, 2009
    Date of Patent: October 21, 2014
    Assignee: United Technologies Corporation
    Inventors: Igor V. Belousov, Anatoly I. Kuzmichev, Vladimir Biber, Robert L. Memmen
  • Patent number: 8865314
    Abstract: A press molding glass material including: a core portion composed of optical glass; and a surface layer covering the core portion, wherein the surface layer includes an outermost layer contacting with a molding surface of a molding die in press molding and an intermediate layer adjacent to the outermost layer, the outermost layer is a silicon oxide film having a surface free energy measured by a three-solution method of equal to or less than 75 mJ/m2 and having a film thickness of less than 15 nm, and the intermediate layer is a film composed of a film material having a bond-radius difference from a silicon oxide based on a stoichiometric composition of more than 0.10 ?, wherein, in a case in which the bond-radius difference is more than 0.10 ? and equal to or less than 0.40 ?, a film thickness of the intermediate layer is equal to or less than 5 nm.
    Type: Grant
    Filed: June 26, 2012
    Date of Patent: October 21, 2014
    Assignee: Hoya Corporation
    Inventors: Takashi Igari, Kenya Abiko
  • Patent number: 8864959
    Abstract: Planetary carriers (22) for workpieces mounted on a carousel (19) are provided within a vacuum chamber. A source (24) for a cloud comprising ions (CL) is provided so that a central axis (ACL) of the cloud intercepts the rotary axis (A20) of the carousel (19). The cloud (CL) has an ion density profile at the moving path (T) of planetary axes (A22) which drops to 50% of the maximum ion density at a distance from the addressed center axis (ACL) which is at most half the diameter of the planetary carriers (22). When workpieces upon the planetary carriers (22) are etched by the cloud comprising ions material which is etched off is substantially not redeposited on neighboring planetary carriers but rather ejected towards the wall of the vacuum chamber.
    Type: Grant
    Filed: April 21, 2009
    Date of Patent: October 21, 2014
    Assignee: Oerlikon Trading AG, Truebbach
    Inventors: Siegfried Krassnitzer, Oliver Gstoehl, Markus Esselbach
  • Patent number: 8859114
    Abstract: In one aspect, coated cutting tools are described herein which, in some embodiments, can demonstrate improved wear resistance in one or more cutting applications. In some embodiments, a coated cutting tool described herein comprises a substrate and a coating adhered to the substrate, the coating comprising an inner layer deposited by physical vapor deposition and an outer deposited by physical vapor deposition over the inner layer.
    Type: Grant
    Filed: April 10, 2013
    Date of Patent: October 14, 2014
    Assignee: Kennametal Inc.
    Inventors: Aharon Inspektor, Nicholas F Waggle, Jr., Michael F Beblo, Mark J Rowe, Zhigang Ban
  • Patent number: 8858766
    Abstract: A system and method for combinatorial processing of substrates in a processing chamber. The system includes a plurality of generators for supplying power into the processing chamber. A plurality of sputter guns provides power to different regions of a substrate. A switchbox switches power from a generator to a sputter gun via a plurality of coaxial switches. A controller positioned within the switchbox automatically distributes power from a specific generator to a specific sputter gun under programmable logic control.
    Type: Grant
    Filed: December 27, 2011
    Date of Patent: October 14, 2014
    Assignee: Intermolecular, Inc.
    Inventors: Brian K. Hatcher, Kent Riley Child
  • Patent number: 8852305
    Abstract: A cutting tool insert for machining by chip removal includes a body of a hard alloy of cemented carbide, cermet, ceramics, cubic boron nitride based material or high speed steel, onto which a hard and wear resistant coating is deposited by physical vapor deposition. The coating includes a polycrystalline nanolaminated structure of alternating layers A and B where layer A is (Ti,Al,Me1)N and Me1 is optionally one or more of the metal elements from group 3, 4, 5 or 6 in the periodic table, layer B is (Ti,Si,Me2)N and Me2 is optionally one or more of the metal elements from group 3, 4, 5 or 6 in the periodic table including Al with a thickness between 0.5 and 20 ?m and method of making the same. This insert is particularly useful in metal cutting applications generating high temperatures with improved edge integrity, machining of super alloys, stainless and hardened steels.
    Type: Grant
    Filed: May 28, 2010
    Date of Patent: October 7, 2014
    Assignee: Seco Tools AB
    Inventors: Jon Andersson, Rachid M'Saoubi, Hindrik Engstrom, Mats Johansson
  • Patent number: 8852406
    Abstract: A method for producing a cubic boron nitride (cBN) thin film includes depositing cBN onto nanocrystalline diamond having controlled surface irregularity characteristics to improve the adhesion at the interface of cBN/nanocrystalline diamond, while incorporating hydrogen to a reaction gas upon the synthesis of cBN and controlling the feed time of hydrogen, so that harmful reactions occurring on a surface of nanocrystalline diamond and residual stress applied to cBN may be inhibited. Also, a cBN thin film structure is obtained by the method. The cBN thin film is formed on the nanocrystalline diamond thin film by using a physical vapor deposition process, wherein a reaction gas supplied when the deposition of a thin film occurs is a mixed gas of argon (Ar) with nitrogen (N2), and hydrogen (H2) is added to the reaction gas at a time after the deposition of a thin film occurs.
    Type: Grant
    Filed: January 18, 2013
    Date of Patent: October 7, 2014
    Assignee: Korea Institute of Science and Technology
    Inventors: Young Joon Baik, Jong Keuk Park, Wook Seong Lee
  • Publication number: 20140295322
    Abstract: A material for fuel cell separator, wherein a surface layer 6 containing Au and Cr is formed on a surface of a Ti base 2, and an intermediate layer 2a containing Ti, O, Cr, and less than 20 atomic % of Au is present between the Ti base and the surface layer, a thickness of an area containing 65 atomic % or more of Au being 1.5 nm or more, a maximum concentration of Au being 80 atomic % or more, a coating amount of Au being 9000 to 40000 ng/cm2, a ratio represented by (Au coating amount)/(Cr coating amount) being 10 or more, a coating amount of Cr being 200 ng/cm2 or more, and in the intermediate layer having an area containing 10% or more of Ti, 10% or more of O and 20% or more of Cr being 1 nm or more.
    Type: Application
    Filed: August 9, 2011
    Publication date: October 2, 2014
    Applicant: JX Nippon Mining & Metals Corporation
    Inventor: Yoshitaka Shibuya
  • Patent number: 8845866
    Abstract: A method and system for DC magnetron sputtering deposition of films on plastic substrates. The method includes using a shield to block deposition in a spatial region corresponding to a plasma region formed during magnetron sputtering. An optoelectronic device including an amorphous electrode film is also disclosed.
    Type: Grant
    Filed: December 22, 2005
    Date of Patent: September 30, 2014
    Assignee: General Electric Company
    Inventors: Min Yan, Ahmet Gun Erlat, Jie Liu
  • Patent number: 8841027
    Abstract: A power storage device with favorable battery characteristics and a manufacturing method thereof are provided. The power storage device includes at least a positive electrode and a negative electrode provided so as to face the positive electrode with an electrolyte provided therebetween. The positive electrode includes a collector and a film containing an active material over the collector. The film containing the active material contains LieFefPgOh satisfying relations 3.5?h/g?4.5, 0.6?g/f?1.1, and 0?e/f?1.3 and LiaFebPcOd satisfying relations 3.5?d/c?4.5, 0.6?c/b?1.8, and 0.7?a/b?2.8. The film containing the active material contains the LiaFebPcOd satisfying the relations 3.5?d/c?4.5, 0.6?c/b?1.8, and 0.7?a/b?2.8 in a region which is in contact with the electrolyte.
    Type: Grant
    Filed: March 16, 2011
    Date of Patent: September 23, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Mikio Yukawa, Tamae Moriwaka
  • Publication number: 20140272454
    Abstract: Provided is High Productivity Combinatorial (HPC) testing methodology of semiconductor substrates, each including multiple site isolated regions. The site isolated regions are used for testing different compositions and/or structures of barrier layers disposed over silver reflectors. The tested barrier layers may include all or at least two of nickel, chromium, titanium, and aluminum. In some embodiments, the barrier layers include oxygen. This combination allows using relative thin barrier layers (e.g., 5-30 Angstroms thick) that have high transparency yet provide sufficient protection to the silver reflector. The amount of nickel in a barrier layer may be 5-10% by weight, chromium—25-30%, titanium and aluminum—30%-35% each. The barrier layer may be co-sputtered in a reactive or inert-environment using one or more targets that include all four metals. An article may include multiple silver reflectors, each having its own barrier layer.
    Type: Application
    Filed: March 13, 2013
    Publication date: September 18, 2014
    Applicant: INTERMOLECULAR INC.
    Inventors: Guizhen Zhang, Jeremy Cheng, Guowen Ding, Minh Huu Le, Daniel Schweigert, Yu Wang
  • Publication number: 20140268317
    Abstract: Embodiments provided herein describe low-e panels and methods for forming low-e panels. A transparent substrate is provided. A reflective layer is formed above the transparent substrate. An over-coating layer is formed above the reflective layer. The over-coating layer includes first, second, and third sub-layers.
    Type: Application
    Filed: March 13, 2013
    Publication date: September 18, 2014
    Applicant: INTERMOLECULAR INC.
    Inventors: Guowen Ding, Jeremy Cheng, Minh Huu Le, Daniel Schweigert, Zhi-Wen Wen Sun, Guizhen Zhang
  • Publication number: 20140272290
    Abstract: Embodiments provided herein describe anti-glare coatings and panels and methods for forming anti-glare coatings and panels. A transparent substrate is provided. A polymer is sputtered onto the transparent substrate to form an anti-glare coating on the transparent substrate.
    Type: Application
    Filed: March 15, 2013
    Publication date: September 18, 2014
    Applicant: INTERMOLECULAR INC.
    Inventors: Scott Jewhurst, Nikhil Kalyankar, Minh Huu Le
  • Publication number: 20140272353
    Abstract: Low emissivity panels can include a protection layer of silicon nitride on a layer of ZnO on a layer of Zn2SnOx. The low emissivity panels can also include NiNbTiOx as a barrier layer. The low emissivity panels have high light to solar gain, color neutral, together with similar observable color and light transmission before and after a heat treatment process.
    Type: Application
    Filed: March 13, 2013
    Publication date: September 18, 2014
    Applicant: INTERMOLECULAR INC.
    Inventors: Guowen Ding, Jeremy Cheng, Tong Ju, Minh Huu Le, Daniel Schweigert, Guizhen Zhang
  • Publication number: 20140264321
    Abstract: In some embodiments, oxidants such as ozone (O3) and/or nitrous oxide (N2O) are used during the reactive sputtering of metal-based semiconductor layers used in TFT devices. The O3 and N2O gases are stronger oxidants and result in a decrease in the concentration of oxygen vacancies within the metal-based semiconductor layer. The decrease in the concentration of oxygen vacancies may result in improved stability under conditions of negative bias illumination stress (NBIS).
    Type: Application
    Filed: December 20, 2013
    Publication date: September 18, 2014
    Applicant: Intermolecular, Inc.
    Inventors: Haifan Liang, Charlene Chen, Sang Lee, Minh Huu Le, Jeroen Van Duren
  • Publication number: 20140272254
    Abstract: A patterned multilayered barrier film for protecting devices from permeation of moisture and gases includes a substrate, a first layer on the substrate acting as a barrier layer, a second layer on the first layer and acting as a decoupling or planarization layer, and a third layer on the second layer, and acting as a barrier layer. Each of the first and third layers has an area greater than an area of the second layer such that the second layer is completely enclosed between the first and third layers defining an edge perimeter surrounding the second layer that is completely sealed between the first and third layers. The patterned multilayered barrier film may be cut into individual barrier units between portions of the second layer such that portions of the second layer of each individual barrier unit are completely edge-sealed between the first and third layers.
    Type: Application
    Filed: February 7, 2014
    Publication date: September 18, 2014
    Applicant: CHEIL INDUSTRIES INC.
    Inventors: Damien S. Boesch, Lorenza Moro
  • Publication number: 20140251205
    Abstract: A system for depositing a film on a substrate comprises a lateral control shutter disposed between the substrate and a material source. The lateral control shutter is configured to block some predetermined portion of source material to prevent deposition of source material onto undesirable portion of the substrate. One of the lateral control shutter or the substrate moves with respect to the other to facilitate moving a lateral growth boundary originating from one or more seed crystals. A lateral epitaxial deposition across the substrate ensues, by having an advancing growth front that expands grain size and forms a single crystal film on the surface of the substrate.
    Type: Application
    Filed: March 11, 2013
    Publication date: September 11, 2014
    Applicant: Tivra Corporation
    Inventor: Indranil De
  • Patent number: 8828562
    Abstract: The present invention provides hard coating film which excels conventional surface coating layer in wear resistance, has lower frictional coefficient and better slideability, a material coated with the hard coating film, a die for cold plastic working, and a method for forming the hard coating film. The hard coating film according to the present invention is a hard coating film comprising (NbxM1?x)y(BaCbN1?a?b)1?y, where 0.2?x?1.0??Equation (1) 0?a?0.3??Equation (2) 0?1?a?b?0.5??Equation (3) 0.5?b=1??Equation (4) 0.4?1?y?0.9??Equation (5) [however, M denotes at least one species of elements belonging to Groups 4a, 5a, and 6a and Si and Al; x, 1?x, a, b, and 1?a?b represent respectively the atomic ratio of Nb, M, B, C and N; and y and 1?y represent respectively the ratio of (NbxM1?x) and (BaCbN1?a?b).
    Type: Grant
    Filed: September 9, 2013
    Date of Patent: September 9, 2014
    Assignee: Kobe Steel, Ltd.
    Inventor: Kenji Yamamoto
  • Patent number: 8822027
    Abstract: A mold for plastic forming having excellent seizure resistance controlled by adjusting its surface properties. In addition, a process producing the mold, that includes: roughening a surface of a base material by a shot blast method to adjust its arithmetic averaged roughness Ra: higher than 1 ?m but 2 ?m or lower; polishing the surface of the base material to adjust its skewness Rsk to 0 or lower while retaining Ra: 0.3 ?m or higher; and forming a hard film on the surface of the base material where the surface of the hard film has an arithmetic averaged roughness Ra: 0.3 ?m or higher but 2 ?m or lower and skewness Rsk: 0 or lower. Adjusting the surface of the mold to have a non-concave-biased configuration, limits the capacity for concaves to accumulate lubricant, such that the lubricant is sufficiently deposited on the surfaces of the convexes.
    Type: Grant
    Filed: October 4, 2011
    Date of Patent: September 2, 2014
    Assignee: Kobe Steel, Ltd.
    Inventor: Kenji Yamamoto
  • Publication number: 20140241978
    Abstract: A method for manufacturing a sputtering target with which an oxide semiconductor film with a small amount of defects can be formed is provided. Alternatively, an oxide semiconductor film with a small amount of defects is formed. A method for manufacturing a sputtering target is provided, which includes the steps of: forming a polycrystalline In-M-Zn oxide (M represents a metal chosen among aluminum, titanium, gallium, yttrium, zirconium, lanthanum, cesium, neodymium, and hafnium) powder by mixing, sintering, and grinding indium oxide, an oxide of the metal, and zinc oxide; forming a mixture by mixing the polycrystalline In-M-Zn oxide powder and a zinc oxide powder; forming a compact by compacting the mixture; and sintering the compact.
    Type: Application
    Filed: February 24, 2014
    Publication date: August 28, 2014
    Applicant: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei YAMAZAKI, Masashi TSUBUKU, Masashi OOTA, Yoichi KUROSAWA, Noritaka ISHIHARA
  • Patent number: 8815059
    Abstract: Certain example embodiments relate to systems and/or methods for preferentially and selectively heat treating conductive coatings such as ITO using specifically tuned near infrared-short wave infrared (NIR-SWIR) radiation. In certain example embodiments, the coating is preferentially heated, thereby improving its properties while at the underlying substrate is kept at low temperatures. Such techniques are advantageous for applications on glass and/or other substrates, e.g., where elevated substrate temperatures can lead to stress changes that adversely effect downstream processing (such as, for example, cutting, grinding, etc.) and may sometimes even result in substrate breakage or deformation. Selective heating of the coating may in certain example embodiments be obtained by using IR emitters with peak outputs over spectral wavelengths where the conductive coating (or the conductive layer(s) in the conductive coating) is significantly absorbing but where the substrate has reduced or minimal absorption.
    Type: Grant
    Filed: August 31, 2010
    Date of Patent: August 26, 2014
    Assignee: Guardian Industries Corp.
    Inventors: David D. McLean, Richard Blacker
  • Publication number: 20140232951
    Abstract: The substrate with a transparent electrode includes a first dielectric material layer mainly composed of SiOx, a second dielectric material layer mainly composed of a metal oxide, a third dielectric material layer mainly composed of SiOy, and a transparent electrode layer, in this order on a transparent film substrate. The transparent electrode layer is patterned to have an electrode layer-formed part and an electrode layer non-formed part. The transparent electrode layer is a layer mainly composed of an indium-tin composite oxide and having a thickness of 20 nm to 35 nm. The refractive index n1 of the first dielectric material layer, the refractive index n2 of the second dielectric material layer, and the refractive index n3 of the third dielectric material layer satisfy n3<n1<n2. The first dielectric material layer, the second dielectric material layer and the third dielectric material layer each have specific thicknesses.
    Type: Application
    Filed: November 11, 2011
    Publication date: August 21, 2014
    Applicant: KANEKA CORPORATION
    Inventors: Hiroaki Ueda, Takahisa Fujimoto, Kozo Kondo, Kenji Yamamoto
  • Publication number: 20140216925
    Abstract: A method of forming a CZT(S,Se) thin film from a quaternary target involves sputtering a quaternary target onto a substrate, wherein the quaternary target comprises (a) copper, (b) zinc, (c) tin, and (d) selenium and/or sulfur, wherein each component (a) through (d) is present in the quaternary target within ±50% of a 2:1:1:4 molar ratio, respectively, thereby forming a CZT(S,Se) thin film on the substrate, wherein the CZT(S,Se) thin film has a kesterite crystalline phase and a band gap of about 1.0 to 1.5 eV. In an embodiment, a ternary target is employed.
    Type: Application
    Filed: February 1, 2013
    Publication date: August 7, 2014
    Inventors: Jason D. Myers, Jesse A. Frantz, Robel Y. Bekele, Jasbinder S. Sanghera, Vinh Q. Nguyen
  • Publication number: 20140216921
    Abstract: A system that incorporates teachings of the subject disclosure may include, for example, a method in which a selection is made for a first major constituent, a second major constituent and a minor constituent for forming a desired material. The method can include mixing the first major constituent, the second major constituent and the minor constituent in a single mixing step to provide a mixture of constituents. The method can include drying the mixture of constituents to provide a dried mixture of constituents and calcining the dried mixture of constituents to provide a calcinated mixture of constituents. The method can include processing the calcinated mixture of constituents to provide a powder of constituents. Other embodiments are disclosed.
    Type: Application
    Filed: February 4, 2013
    Publication date: August 7, 2014
    Applicant: Research In Motion RF, Inc.
    Inventors: Marina Zelner, Andrew Vladimir-Claude Cervin
  • Patent number: 8795895
    Abstract: A power storage device with favorable battery characteristics and a manufacturing method thereof are provided. The power storage device includes at least a positive electrode and a negative electrode provided so as to face the positive electrode with an electrolyte provided therebetween. The positive electrode includes a collector and a film containing an active material over the collector. The film containing the active material contains LieFefPgOh satisfying relations 3.5?h/g?4.5, 0.6?g/f?1.1, and 0?e/f?1.3 and LiaFebPcOd satisfying relations 3.5?d/c?4.5, 0.6?c/b?1.8, and 0.7?a/b?2.8. The film containing the active material contains the LiaFebPcOd satisfying the relations 3.5?d/c?4.5, 0.6?c/b?1.8, and 0.7?a/b?2.8 in a region which is in contact with the electrolyte.
    Type: Grant
    Filed: March 16, 2011
    Date of Patent: August 5, 2014
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Mikio Yukawa, Tamae Moriwaka