With Contact Or Metallization Configuration To Reduce Parasitic Coupling (e.g., Separate Ground Pads For Different Parts Of Integrated Circuit) Patents (Class 257/503)
-
Patent number: 8405185Abstract: Integrated circuit devices include a semiconductor substrate having a plurality of trench isolation regions therein that define respective semiconductor active regions therebetween. A trench is provided in the semiconductor substrate. The trench has first and second opposing sidewalls that define opposing interfaces with a first trench isolation region and a first active region, respectively. A first electrical interconnect is provided at a bottom of the trench. An electrically insulating capping pattern is provided, which extends between the first electrical interconnect and a top of the trench. An interconnect insulating layer is also provided, which lines the first and second sidewalls and bottom of the trench. The interconnect insulating layer extends between the first electrical interconnect and the first active region. A recess is provided in the first active region. The recess has a sidewall that defines an interface with the interconnect insulating layer.Type: GrantFiled: November 12, 2010Date of Patent: March 26, 2013Assignee: Samsung Electronics, Co., Ltd.Inventors: Bong-Soo Kim, Kwang-Youl Chun, Sang-Bin Ahn
-
Patent number: 8399932Abstract: A semiconductor device includes a silicon substrate; an element isolation region; an element region including a first well; a contact region; a gate electrode extending from the element region to a sub-region of the element isolation region between the element region and the contact region; a source diffusion region; a drain diffusion region; a first insulating region contacting a lower end of the source diffusion region; a second insulating region contacting a lower end of the drain diffusion region; and a via plug configured to electrically connect the gate electrode with the contact region. The first well is disposed below the gate electrode and is electrically connected with the contact region via the silicon substrate under the sub-region. The lower end of the element isolation region except the sub-region is located lower than the lower end of the first well.Type: GrantFiled: May 31, 2011Date of Patent: March 19, 2013Assignee: Fujitsu Semiconductor LimitedInventors: Eiji Yoshida, Akihisa Yamaguchi
-
Patent number: 8390046Abstract: A semiconductor device of the present invention has a semiconductor substrate having a transistor formed thereon; a multi-layered interconnect formed on the semiconductor substrate, and having a plurality of interconnect layers, respectively composed of an interconnect and an insulating film, stacked therein; and a capacitance element having a lower electrode (lower electrode film), a capacitor insulating film, and an upper electrode (upper electrode film), all of which being embedded in the multi-layered interconnect, so as to compose a memory element, and further includes at least one layer of damascene-structured copper interconnect (second-layer interconnect) formed between the capacitance element and the transistor; the upper surface of one of the interconnects (second-layer interconnect) and the lower surface of the capacitance element are aligned nearly in the same plane; and at least one layer of copper interconnect (plate line interconnect) is formed over the capacitance element.Type: GrantFiled: November 16, 2010Date of Patent: March 5, 2013Assignee: Renesas Electronics CorporationInventors: Jun Kawahara, Yoshihiro Hayashi, Ippei Kume
-
Patent number: 8378445Abstract: A semiconductor structure includes a semiconductor substrate of a first conductivity, an epitaxial layer of a second conductivity on the substrate and a buried layer of the second conductivity interposed between the substrate and the epitaxial layer. A first trench structure extends through the epitaxial layer and the buried layer to the substrate and includes sidewall insulation and conductive material in electrical contact with the substrate at a bottom of the first trench structure. A second trench structure extends through the epitaxial layer to the buried layer and includes sidewall insulation and conductive material in electrical contact with the buried layer at a bottom of the second trench structure. A region of insulating material laterally extends from the conductive material of the first trench structure to the conductive material of the second trench structure and longitudinally extends to a substantial depth of the second trench structure.Type: GrantFiled: August 31, 2010Date of Patent: February 19, 2013Assignee: Infineon Technologies AGInventors: Brahim Elattari, Franz Hirler
-
Patent number: 8357990Abstract: A width of a region where each of the N wells is in contact with the buried P well is not more than 2 ?m. A ground voltage and a power supply voltage are applied to the P well and the N well, respectively. A decoupling capacitor is formed between the N well and the buried P well.Type: GrantFiled: July 1, 2009Date of Patent: January 22, 2013Assignee: Renesas Electronics CorporationInventors: Masayuki Furumiya, Hiroaki Ohkubo, Yasutaka Nakashiba
-
Patent number: 8344496Abstract: An integrated circuit with distributed power using through-silicon-vias (TSVs) is presented. The integrated circuit has conducting pads for providing power and ground located within the peripheral region of the top surface. A number of through-silicon-vias are distributed within the peripheral region and a set of TSVs are formed within the non-peripheral region of the integrated circuit. Conducting lines on the bottom surface are coupled between each peripheral through-silicon-via and a corresponding non-peripheral through-silicon-via. Power is distributed from the conducting pads to the TSVs within the non-peripheral region through the TSVs within the peripheral region, thus supplying power and ground to circuits located within the non-peripheral region of the integrated circuit chip.Type: GrantFiled: April 29, 2009Date of Patent: January 1, 2013Assignee: Altera CorporationInventors: Thomas Henry White, Giles V. Powell, Rakesh H. Patel
-
Publication number: 20120319228Abstract: A semiconductor device is disclosed, which includes first and second power supply pads supplied with first and second power voltages, respectively, a first protection circuit coupled between the first and second power supply pads, and an internal circuit including a first power line and a plurality of transistors electrically coupled to the first power line. The first power line includes first and second portions, and the first portion is electrically connected to the first power supply pad. The device further includes a second protection circuit coupled between the second portion of the first power line and the second power supply pad.Type: ApplicationFiled: May 17, 2012Publication date: December 20, 2012Applicant: Elpida Memory, Inc.Inventors: Takashi ISHIHARA, Hisayuki NAGAMINE
-
Publication number: 20120319229Abstract: Integrated circuits having doped bands in a substrate and beneath high-voltage semiconductor-on-insulator (SOI) devices are provided. In one embodiment, the invention provides an integrated circuit comprising: a semiconductor-on-insulator (SOI) wafer including: a substrate; a buried oxide (BOX) layer atop the substrate; and a semiconductor layer atop the BOX layer; a plurality of high voltage (HV) devices connected in series within the semiconductor layer; a doped band within the substrate and below a first of the plurality of HV devices; and a contact extending from the semiconductor layer and through the BOX layer to the doped band.Type: ApplicationFiled: August 28, 2012Publication date: December 20, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Alan B. Botula, Beth Ann Rainey, Yun Shi
-
Patent number: 8330254Abstract: A semiconductor device includes a semiconductor wafer in which semiconductor chip forming regions and a scribe region located between the semiconductor chip forming regions are formed, a plurality of semiconductor chip circuit portions provided over the semiconductor wafer, a plurality of first conductive layers, provided in each of the semiconductor chip forming regions, which is electrically connected to each of the circuit portions, and a first connecting portion that electrically connects the first conductive layers to each other across a portion of the scribe region. An external power supply or grounding pad is connected to any one of the first conductive layer and the first connecting portion. The semiconductor device includes a communication portion, connected to the circuit portion, which performs communication with the outside by capacitive coupling or inductive coupling.Type: GrantFiled: December 28, 2009Date of Patent: December 11, 2012Assignees: Renesas Electronics Corporation, NEC CorporationInventors: Masayuki Furumiya, Hiroaki Ohkubo, Fuyuki Okamoto, Masayuki Mizuno, Koichi Nose, Yoshihiro Nakagawa, Yoshio Kameda
-
Patent number: 8310023Abstract: The present invention provides an LED package and the fabrication method thereof. The present invention provides an LED package including a submount silicon substrate and insulating film and electrode patterns formed on the submount silicon substrate. The LED package also includes a spacer having a through hole, formed on the electrode patterns. The LED package further includes an LED received in the through hole, flip-chip bonded to the electrode patterns, and an optical element attached to the upper surface of the spacer.Type: GrantFiled: January 27, 2009Date of Patent: November 13, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Ho Joon Park, Woong Lin Hwang, Seog Moon Choi, Sung Jun Lee, Sang Hyun Choi, Chang Hyun Lim
-
Patent number: 8309975Abstract: In a semiconductor light emitting device, in which a light emitting layer is formed on one surface of a conductive substrate, and an n-type electrode and a p-type electrode are formed on the same side as the light emitting layer, there has been the problem that, if larger electric power is applied, heat is generated near the n-side electrode to reduce luminous efficiency. The n-side electrode has a predetermined length at a corner portion or along an edge of the substrate to disperse a current flowing from the n-side electrode into the substrate, thereby avoiding heat generation near the n-side electrode. In this type of semiconductor light emitting element, the existence of the n-side electrode reduces a light emitting area. Therefore, the length of the n-side electrode preferably ranges from 20% to 50% of the entire peripheral length of the substrate.Type: GrantFiled: October 30, 2008Date of Patent: November 13, 2012Assignee: Panasonic CorporationInventors: Atsuhiro Hori, Hidenori Kamei, Syuusaku Maeda
-
Patent number: 8304885Abstract: A semiconductor device comprises an IC chip body and a package substrate that has thereon many external electrodes arranged in a two-dimensional grid configuration. Groups of signal lines that are likely to emit noise (noisy signal lines) are separated and spaced apart from groups of signal lines that are susceptible to noise (noise susceptible signal lines). Each of the noisy signal lines and noise susceptible signal lines is connected to an associated member of an associated IC pad group separated and spaced apart from other IC pad groups. Further, each of the noisy signal lines and noise susceptible signal lines is connected to an associated member of an associated external electrode group selected from the multiplicity of external electrodes arranged in a two-dimensional grid configuration on the package substrate. Thus, groups of potentially interfering signal lines are mutually separated and spaced apart from one another, thereby suppressing the noise.Type: GrantFiled: December 28, 2010Date of Patent: November 6, 2012Assignee: Rohm Co., Ltd.Inventor: Fumihiko Terasaki
-
Publication number: 20120273917Abstract: The disclosed invention provides a structure and method for providing a high lateral voltage resistance between the electrical networks, sharing a lateral plane, of conductive elements (e.g., having different high voltage potentials) comprising a coupler. In one embodiment, an integrated coupler providing a high lateral voltage resistance comprises a primary conductive element and a secondary conductive element. An isolating material is laterally configured between the electrical network of the primary conductive element and an electrical network of the secondary conductive element. The isolating material may comprise a low-k dielectric layer and prevents any lateral barrier layers (e.g., etch stop layers, diffusion barrier layers, etc.) from extending between the first conductive element and the electrical network of the second conductive element. The structure therefore provides a galvanically isolated integrated coupler which avoids electrical shorting between circuits (e.g.Type: ApplicationFiled: June 29, 2012Publication date: November 1, 2012Applicant: Infineon Technologies Austria AGInventors: Uwe Wahl, Markus Hammer, Jens-Peer Stengl
-
Patent number: 8299561Abstract: Integrated circuits having doped bands in a substrate and beneath high-voltage semiconductor-on-insulator (SOI) devices are provided. In one embodiment, the invention provides an integrated circuit comprising: a semiconductor-on-insulator (SOI) wafer including: a substrate; a buried oxide (BOX) layer atop the substrate; and a semiconductor layer atop the BOX layer; a plurality of high voltage (HV) devices connected in series within the semiconductor layer; a doped band within the substrate and below a first of the plurality of HV devices; and a contact extending from the semiconductor layer and through the BOX layer to the doped band.Type: GrantFiled: April 21, 2010Date of Patent: October 30, 2012Assignee: International Business Machines CorporationInventors: Alan B. Botula, Beth Ann Rainey, Yun Shi
-
Publication number: 20120241900Abstract: An electrostatic discharge (ESD) protected device may include a substrate, an N-type well region disposed corresponding to a first portion of the substrate and having two N+ segments disposed at a surface thereof, an a P-type well region disposed proximate to a second portion of the substrate and having a P+ segment and an N+ segment. The two N+ segments may be spaced apart from each other and each may each be associated with an anode of the device. The N+ segment may be associated with a cathode of the device. A contact may be positioned in a space between the two N+ segments and connected to the P+ segment. The contact may form a parasitic capacitance that, in connection with a parasitic resistance formed in association with the N+ segment, provides self detection for high voltage ESD protection.Type: ApplicationFiled: March 22, 2011Publication date: September 27, 2012Inventors: Hsin-Liang Chen, Shou-Lun Tu, Wing-Chor Chan, Shyi-Yuan Wu
-
Patent number: 8258628Abstract: An integrated circuit arrangement includes a substrate with a multiplicity of integrated semiconductor components arranged therein, the substrate having a wiring interconnect near to the substrate, a middle wiring interconnect and a wiring interconnect remote from the substrate, which are arranged in this order at increasing distance from the substrate.Type: GrantFiled: September 20, 2006Date of Patent: September 4, 2012Assignee: Infineon Technologies AGInventors: Martina Hommel, Heinrich Koerner, Markus Schwerd, Martin Seck
-
Patent number: 8253198Abstract: A multi-path transistor includes an active region including a channel region and an impurity region. A gate is dielectrically separated from the channel region. A signal line is dielectrically separated from the impurity region. A conductive shield is disposed between, and dielectrically separated from, the signal line and the channel region. In some multi-path transistors, the channel region includes an extension-channel region under the conductive shield and the multi-path transistor includes different conduction paths, at least one of the different conduction paths being in the extension-channel region to conduct substantially independent of a voltage on the signal line. In other multi-path transistors, the conductive shield is operably coupled to the impurity region and the multi-path transistor includes different conduction paths, at least one of the different conduction paths being under the conductive shield to conduct substantially independent of a voltage on the signal line.Type: GrantFiled: July 30, 2009Date of Patent: August 28, 2012Assignee: Micron TechnologyInventor: Toru Tanzawa
-
Patent number: 8253217Abstract: The present disclosure provides a semiconductor device that includes a substrate having a seal ring region and a circuit region, a plurality of dummy gates disposed over the seal ring region of the substrate, and a seal ring structure disposed over the plurality of dummy gates in the seal ring region. A method of fabricating a semiconductor device is also provided, the method including providing a substrate having a seal ring region and a circuit region, forming a plurality of dummy gates over the seal ring region of the substrate, and forming a seal ring structure over the plurality of dummy gates over the seal ring region.Type: GrantFiled: June 16, 2010Date of Patent: August 28, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsien-Wei Chen, Chung-Ying Yang
-
Patent number: 8247965Abstract: An object of the invention is to provide a display device which can be manufactured with usability of a material improved and with a manufacturing step simplified and to provide a manufacturing technique thereof. One feature of a light emitting display device of the present invention is to comprise a gate electrode formed over a substrate having an insulating surface with a substance having a photocatalytic function therebetween, a gate insulating layer formed over the gate electrode, a semiconductor layer and a first electrode formed over the gate insulating layer, a wiring layer formed over the semiconductor layer, a partition wall covering an edge portion of the first electrode and the wiring layer, an electroluminescent layer over the first electrode, and a second electrode over the electroluminescent layer, wherein the wiring layer covers the edge portion of the first electrode.Type: GrantFiled: November 5, 2004Date of Patent: August 21, 2012Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Shinji Maekawa, Osamu Nakamura
-
Patent number: 8242573Abstract: There are provided a semiconductor device and a method of forming the same. The semiconductor device may include a semiconductor substrate including a digital circuit region and an analog circuit region, a device isolation layer on the boundary between the digital circuit region and the analog circuit region, a conductive region adjacent to the side surface and the bottom surface of the isolation layer, and a ground pad which is electrically connected to the conductive region and to which a ground voltage is applied.Type: GrantFiled: January 8, 2008Date of Patent: August 14, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Han-Su Kim, Jin-Sung Lim
-
Patent number: 8242601Abstract: The invention provides a semiconductor chip comprising a semiconductor substrate comprising a MOS device, an interconnecting structure over said semiconductor substrate, and a metal bump over said MOS device, wherein said metal bump has more than 50 percent by weight of gold and has a height of between 8 and 50 microns.Type: GrantFiled: May 13, 2009Date of Patent: August 14, 2012Assignee: Megica CorporationInventors: Chiu-Ming Chou, Chien-Kang Chou, Ching-San Lin, Mou-Shiung Lin
-
Patent number: 8212330Abstract: An interconnect structure of an integrated circuit having improved reliability and a method for forming the same are provided. The method includes providing a substrate, forming a dielectric layer overlying the substrate, performing a first shrinking process, wherein the dielectric layer shrinks and has a first shrinkage rate, forming a conductive feature in the dielectric layer after the step of performing the first shrinking process, and performing a second shrinking process after the step of forming the conductive feature, wherein the dielectric layer substantially shrinks and has a second shrinkage rate.Type: GrantFiled: September 10, 2010Date of Patent: July 3, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsien-Wei Chen, Jian-Hong Lin, Tzu-Li Lee
-
Patent number: 8195990Abstract: In a proximity communication system, transmit elements on one chip are aligned with receive elements on a second chip juxtaposed with the first chip. However, if the elements are misaligned, either statically or dynamically, the coupling between chips is degraded. The misalignment may be compensated by controllably degrading performance of the system. For example, the transmit signal strength may be increased. The bit period or the time period for biasing each bit may be increased, thereby decreasing the bandwidth. Multiple coupling elements, such as capacitors, may be ganged together, thereby decreasing the number of channels. The granularity of symbols, such as images, may be increased by decreasing the number of bits per symbol. Multiple coupling elements, such as capacitors, may be ganged together, thereby decreasing the number of channels.Type: GrantFiled: August 18, 2011Date of Patent: June 5, 2012Assignee: Oracle America, Inc.Inventors: Ronald Ho, Ashok V. Krishnamoorthy, John E. Cunningham, Robert J. Drost
-
Patent number: 8193087Abstract: An integrated circuit includes a semiconductor substrate, a low-k dielectric layer over the semiconductor substrate, a first opening in the low-k dielectric layer, and a first diffusion barrier layer in the first opening covering the low-k dielectric layer in the first opening, wherein the first diffusion barrier layer has a bottom portion connected to sidewall portions, and wherein the sidewall portions have top surfaces close to a top surface of the low-k dielectric layer. The integrated circuit further includes a conductive line filling the first opening wherein the conductive line has a top surface lower than the top surfaces of the sidewall portions of the diffusion barrier layer, and a metal cap on the conductive line and only within a region directly over the conductive line.Type: GrantFiled: November 28, 2006Date of Patent: June 5, 2012Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chien-Hsueh Shih, Minghsing Tsai, Chen-Hua Yu, Ming-Shih Yeh
-
Patent number: 8183691Abstract: A semiconductor device includes plural electrode pads arranged in an active region of a semiconductor chip, and wiring layers provided below the plural electrode pads wherein occupation rates of wirings arranged within the regions of the electrode pads are, respectively, made uniform for every wiring layer. To this end, in a region where an occupation rate of wiring is smaller than those in other regions, a dummy wiring is provided. On the contrary, when the occupation rate of wiring is larger than in other regions, slits are formed in the wiring to control the wiring occupation rate. In the respective wirings layers, the shapes, sizes and intervals of wirings below the respective electrode pads are made similar or equal to one another.Type: GrantFiled: June 17, 2010Date of Patent: May 22, 2012Assignees: Renesas Electronics Corporation, Hitachi ULSI System Co., Ltd.Inventors: Taku Kanaoka, Masashi Sahara, Yoshio Fukayama, Yutaro Ebata, Kazuhisa Higuchi, Koji Fujishima
-
Patent number: 8183581Abstract: An LED arrangement (light emitting diode) has a plurality of adjacent radiating LEDs that are nearly identically aligned for forming an extended area light source. The LEDs are attached to a metallic multi-film support having sandwich-like insulating intermediate layers and having at least a step-like structure with at least one step. At least one LED chip is placed on each step on a metal film and the metal layer directly above is formed of a corresponding shortening or recess for mounting an LED.Type: GrantFiled: May 11, 2009Date of Patent: May 22, 2012Assignee: Siemens AktiengesellschsftInventor: Detlef Gerhard
-
Patent number: 8183663Abstract: A circuit under pad structure includes a substrate, a pad electrode, wiring layers interlayer insulation layers alternately disposed between the pad electrode and the substrate, and at least one circuit pattern integral with the substrate, disposed beneath the lowermost wiring layer and spanned by the pad electrode. The width of each wiring layer is smaller than the width of the wiring layer beneath it, i.e., closer to the substrate. The structure is fabricated such that it resists cracking, which maximizes its production yield, and possesses a minimal footprint.Type: GrantFiled: January 6, 2011Date of Patent: May 22, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Kyounghwan Kim, Hongkook Min, Sungkyoo Park
-
Publication number: 20120112308Abstract: According to one embodiment, a semiconductor device includes a device portion, a first electrode portion, a second electrode portion and a protruding portion. The device portion is provided on a substrate. The first electrode portion is provided on the device portion and is electrically contacted with the device portion. The second electrode portion is provided on the device portion separated from the first electrode portion, and electrically contacted with the device portion. The protruding portion is provided on the device portion and protrudes outward from a peripheral portion of the first electrode portion and the second electrode portion.Type: ApplicationFiled: September 21, 2011Publication date: May 10, 2012Applicant: Kabushiki Kaisha ToshibaInventors: Tetsuo Matsuda, Tomomi Imamura
-
Publication number: 20120091455Abstract: A pad structure in a semiconductor wafer for wafer testing is described. The pad structure includes at least two metal pads connected there-between by a plurality of conductive vias in one or more insulation layers. A plurality of contact bars in contact with the bottom-most metal pad extends substantially vertically from the bottom-most metal pad into the substrate. An isolation structure substantially surrounds the plurality of contact bars to isolate the pad structure.Type: ApplicationFiled: January 5, 2011Publication date: April 19, 2012Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ying-Ju CHEN, Hsien-Wei CHEN, Hao-Yi TSAI, Mirng-Ji LII
-
Patent number: 8148797Abstract: A chip pad structure of an integrated circuit (IC) and the method of forming are disclosed. The chip pad comprises a main pad portion and a ring pad portion. During a charging process involved in forming the chip pad structure, electrical connections from the gate electrodes of MOS transistors in the IC substrate generally are made only to the ring pad portion that has an antenna-to-gate area ratio substantially below a predetermined antenna design rule ratio, and thus is resistant or immune to antenna effect. The main pad portion and the ring pad portion are coupled together through metal bridges formed in an upper interconnect metal layer or in the top conductive pad layer. The chip pad may be used as probe pads on a parametric testline or bonding pads on an IC.Type: GrantFiled: June 26, 2008Date of Patent: April 3, 2012Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wu-Te Weng, Ji-Shyang Nieh
-
Publication number: 20120061794Abstract: Methods of fabricating semiconductor structures include providing a sacrificial material within a via recess, forming a first portion of a through wafer interconnect in the semiconductor structure, and replacing the sacrificial material with conductive material to form a second portion of the through wafer interconnect. Semiconductor structures are formed by such methods. For example, a semiconductor structure may include a sacrificial material within a via recess, and a first portion of a through wafer interconnect that is aligned with the via recess. Semiconductor structures include through wafer interconnects comprising two or more portions having a boundary therebetween.Type: ApplicationFiled: September 10, 2010Publication date: March 15, 2012Applicant: S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIESInventor: Mariam Sadaka
-
Publication number: 20120049274Abstract: A semiconductor structure includes a semiconductor substrate of a first conductivity, an epitaxial layer of a second conductivity on the substrate and a buried layer of the second conductivity interposed between the substrate and the epitaxial layer. A first trench structure extends through the epitaxial layer and the buried layer to the substrate and includes sidewall insulation and conductive material in electrical contact with the substrate at a bottom of the first trench structure. A second trench structure extends through the epitaxial layer to the buried layer and includes sidewall insulation and conductive material in electrical contact with the buried layer at a bottom of the second trench structure. A region of insulating material laterally extends from the conductive material of the first trench structure to the conductive material of the second trench structure and longitudinally extends to a substantial depth of the second trench structure.Type: ApplicationFiled: August 31, 2010Publication date: March 1, 2012Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventors: Brahim Elattari, Franz Hirler
-
Publication number: 20120038020Abstract: A method includes providing a substrate having a seal ring region and a circuit region, forming a seal ring structure over the seal ring region, forming a first frontside passivation layer above the seal ring structure, etching a frontside aperture in the first frontside passivation layer adjacent to an exterior portion of the seal ring structure, forming a frontside metal pad in the frontside aperture to couple the frontside metal pad to the exterior portion of the seal ring structure, forming a first backside passivation layer below the seal ring structure, etching a backside aperture in the first backside passivation layer adjacent to the exterior portion of the seal ring structure, and forming a backside metal pad in the backside aperture to couple the backside metal pad to the exterior portion of the seal ring structure. Semiconductor devices fabricated by such a method are also provided.Type: ApplicationFiled: November 1, 2010Publication date: February 16, 2012Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Jeng-Shyan Lin, Dun-Nian Yaung, Jen-Cheng Liu, Hsin-Hui Lee, Wen-De Wang, Shu-Ting Tsai
-
Patent number: 8110879Abstract: Properties of a hard mask liner are used against the diffusion of a removal agent to prevent air cavity formation in specific areas of an interconnect stack. According to one embodiment, there is provided a method in which there is defined a portion on a surface of an IC interconnect stack as being specific to air cavity introduction, with the defined portion being smaller than the surface of the substrate. At least one metal track is produced within the interconnect stack, and there is deposited at least one interconnect layer having a sacrificial material and a permeable material within the interconnect stack. There is defined at least one trench area surrounding the defined portion and forming at least one trench, and a hard mask layer is deposited to coat the trench. At least one air cavity is formed below the defined portion of the surface by using a removal agent for removing the sacrificial material to which the permanent material is resistant.Type: GrantFiled: October 19, 2009Date of Patent: February 7, 2012Assignees: STMicroelectronics (Crolles 2) SAS, Koninklijke Philips Electronics N.V.Inventors: Joaquin Torres, Laurent-Georges Gosset
-
Publication number: 20120025345Abstract: A method, integrated circuit and design structure includes a silicon substrate layer having trench structures and an ion impurity implant. An insulator layer is positioned on and contacts the silicon substrate layer. The insulator layer fills the trench structures. A circuitry layer is positioned on and contacts the buried insulator layer. The circuitry layer comprises groups of active circuits separated by passive structures. The trench structures are positioned between the groups of active circuits when the integrated circuit structure is viewed from the top view. Thus, the trench structures are below the passive structures and are not below the groups of circuits when the integrated circuit structure is viewed from the top view.Type: ApplicationFiled: August 2, 2010Publication date: February 2, 2012Applicant: International Business Machines CorporationInventors: ALAN B. BOTULA, Alvin J. Joseph, James A. Slinkman, Randy L. Wolf
-
Patent number: 8102010Abstract: A semiconductor device exhibiting low parasitic resistance comprises a first substrate characterized by a first resistivity; a second substrate characterized by a second resistivity, a third substrate and a metal element. These substrates form a multi-layer semiconductor device where the second substrate is formed on the first substrate; the third substrate is formed on the second substrate; and the metal element is formed on the third substrate. The second substrate is electrically grounded and is highly doped with acceptor dopant as compared to the first substrate. In this way, the second resistivity is lower than the first resistivity.Type: GrantFiled: December 29, 2005Date of Patent: January 24, 2012Assignee: Broadcom CorporationInventor: Hung-Ming Chien
-
Publication number: 20120012969Abstract: In a method of forming a wiring structure for a semiconductor device, an insulation layer is formed on a semiconductor substrate on which a plurality of conductive structures is positioned. An upper surface of the insulation layer is planarized and spaces between the conductive structures are filled with the insulation layer. The insulation layer is partially removed from the substrate to form at least one opening through which the substrate is partially exposed. A residual metal layer is formed on a bottom and a lower portion of the sidewall of the at least one opening and a metal nitride layer is formed on the residual metal layer and an upper sidewall of the opening with a metal material. Accordingly, an upper portion of the barrier layer can be prevented from being removed in a planarization process for forming the metal plug.Type: ApplicationFiled: September 22, 2011Publication date: January 19, 2012Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jin-Ho Park, Gil-Heyun Choi, Sang-Woo Lee, Ho-Ki Lee
-
Publication number: 20110309466Abstract: The semiconductor device includes a first-conductivity-type region (an N-type well region, for example) and a first second-conductivity-type region (a P-type semiconductor substrate, for example) positioned to cover a lower surface of the first-conductivity-type region, a second second-conductivity-type region (a P-type well region, for example) that is positioned to surround the side faces of the first-conductivity-type region and is in contact with the first second-conductivity-type region, a guard ring that is electrically connected to the second second-conductivity-type region and is also electrically connected to a fixed potential terminal, an insulating film positioned to cover an upper surface of the first-conductivity-type region, and an analog element (a resistor element, for example) placed on the insulating film.Type: ApplicationFiled: June 21, 2011Publication date: December 22, 2011Inventor: Hiroaki NANBA
-
Publication number: 20110309465Abstract: The present disclosure provides a semiconductor device that includes a substrate having a seal ring region and a circuit region, a plurality of dummy gates disposed over the seal ring region of the substrate, and a seal ring structure disposed over the plurality of dummy gates in the seal ring region. A method of fabricating a semiconductor device is also provided, the method including providing a substrate having a seal ring region and a circuit region, forming a plurality of dummy gates over the seal ring region of the substrate, and forming a seal ring structure over the plurality of dummy gates over the seal ring region.Type: ApplicationFiled: June 16, 2010Publication date: December 22, 2011Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hsien-Wei Chen, Chung-Ying Yang
-
Patent number: 8080880Abstract: A semiconductor device and manufacturing method. One embodiment provides a device including a semiconductor chip. A first conductor line is placed over the semiconductor chip. An external contact pad is placed over the first conductor line. At least a portion of the first conductor line lies within a projection of the external contact pad on the semiconductor chip.Type: GrantFiled: March 20, 2009Date of Patent: December 20, 2011Assignee: Infineon Technologies AGInventors: Markus Brunnbauer, Jens Pohl, Thorsten Meyer
-
Publication number: 20110272776Abstract: The chip area of a semiconductor device having a plurality of standard cells is to be made smaller. A semiconductor device includes first and second standard cells. The first standard cell includes a diffusion region, a functional device region opposed to the diffusion region, and a metal layer. The second standard cell includes another diffusion region continuous with the diffusion region, another functional device region opposed to the other diffusion region, and further another diffusion region formed between the other diffusion region and the other functional device region. The metal layer and the other functional device region are coupled together electrically through the diffusion regions.Type: ApplicationFiled: May 5, 2011Publication date: November 10, 2011Inventor: Hiroshi OMURA
-
Publication number: 20110266646Abstract: A digital circuit portion (6) and an analog circuit portion (7) are formed in a surface portion of a semiconductor substrate (4). A via (20) is formed in a region between the digital circuit portion (6) and the analog circuit portion (7). The via (20) extends through the semiconductor substrate (4) from a front surface to a back surface thereof, and is made of a dielectric (2) having its surface covered by a metal (1). The metal (1) is grounded. Signal interference between the analog circuit portion (6) and the digital circuit portion (7) is reduced by the via (20).Type: ApplicationFiled: July 12, 2011Publication date: November 3, 2011Applicant: Panasonic CorporationInventors: Shinichiro UEMURA, Yukio Hiraoka, Takayuki Kai
-
Publication number: 20110260281Abstract: Integrated circuits having doped bands in a substrate and beneath high-voltage semiconductor-on-insulator (SOI) devices are provided. In one embodiment, the invention provides an integrated circuit comprising: a semiconductor-on-insulator (SOI) wafer including: a substrate; a buried oxide (BOX) layer atop the substrate; and a semiconductor layer atop the BOX layer; a plurality of high voltage (HV) devices connected in series within the semiconductor layer; a doped band within the substrate and below a first of the plurality of HV devices; and a contact extending from the semiconductor layer and through the BOX layer to the doped band.Type: ApplicationFiled: April 21, 2010Publication date: October 27, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Alan B. Botula, Beth Ann Rainey, Yun Shi
-
Patent number: 8035169Abstract: A technique that makes it possible to suppress a crystal defect produced in an active area and thereby reduce the fraction defective of semiconductor devices is provided. A first embodiment relates to the planar configuration of SRAM. One of the features of the first embodiment is as illustrated in FIG. 4. That is, on the precondition that the active areas in n-channel MISFET formation regions are all configured in the isolated structure: the width of the terminal sections is made larger than the width of the central parts of the active areas. For example, the terminal sections are formed in an L shape.Type: GrantFiled: October 31, 2008Date of Patent: October 11, 2011Assignee: Renesas Electronics CorporationInventors: Hiroshi Ishida, Atsushi Maeda, Minoru Abiko, Takehiko Kijima, Takashi Takeuchi, Shoji Yoshida, Natsuo Yamaguchi, Yasuhiro Kimura, Tetsuya Uchida, Norio Ishitsuka
-
Publication number: 20110233717Abstract: Integrated circuits with guard rings are provided. Integrated circuits may include internal circuitry that is sensitive to external noise sources. A guard ring may surround the functional circuitry to isolate the circuitry from the noise sources. The guard ring may include first, second, and third regions. The first and third regions may include p-wells. The second region may include an n-well. Stripes of diffusion regions may be formed at the surface of a substrate in the three regions. Areas in the guard ring that are not occupied by the diffusion regions are occupied by shallow trench isolation (STI) structures. Stripes of dummy structures may be formed over respective STI structures and may not overlap the diffusion regions. The diffusion regions in the first and third regions may be biased to a ground voltage. The diffusion regions in the second section may be biased to a positive power supply voltage.Type: ApplicationFiled: March 26, 2010Publication date: September 29, 2011Inventors: Bradley Jensen, Charles Y. Chu
-
Patent number: 8021973Abstract: A method and system for reducing the inductance on an integrated circuit. The method and system comprises providing a first differential line, including a first input and a first output, the first differential line including at least two bondwire traces which are coupled in parallel. The method and system also comprises providing a second differential line including a second input and a second output, the second differential line including at least two bondwire traces which are coupled in parallel, the first differential line being of opposite polarity to the second differential line. The method and system further comprises cross-coupling of the first input with the second input and the first output with the second output to reduce the inductance caused by bondwire traces. A technique in accordance with the invention uses the coupling factor K to help to further reduce the inductance.Type: GrantFiled: July 9, 2009Date of Patent: September 20, 2011Assignee: Ralink Technology (Singapore) CorporationInventor: Weijun Yao
-
Patent number: 8010927Abstract: Design structure for an electrostatic discharge (ESD) protection circuit for protecting an integrated circuit chip from an ESD event. The design structure for the ESD protection circuit includes a stack of BigFETs, a BigFET gate driver for driving the gates of the BigFETs, and a trigger for triggering the BigFET gate driver to drive the gates of the BigFETs in response to an ESD event. The BigFET gate driver includes gate pull-up circuitry for pulling up the gate of a lower one of the BigFETs. The gate pull-up circuitry is configured so as to obviate the need for a diffusion contact between the stacked BigFETs, resulting in a significant savings in terms of the chip area needed to implement the ESD protection circuit.Type: GrantFiled: May 27, 2008Date of Patent: August 30, 2011Assignee: International Business Machines CorporationInventors: Robert J. Gauthier, Jr., Junjun Li
-
Patent number: 8008712Abstract: The invention relates to a metallization for an IGBT or a diode. In the case of this metallization, a copper layer (10, 12) having a layer thickness of approximately 50 ?m is applied to the front side and/or rear side of a semiconductor body (1) directly or if need be via a diffusion barrier layer (13, 14). The layer (8, 12) has a specific heat capacity that is at least a factor of 2 higher than the specific heat capacity of the semiconductor body (1). It simultaneously serves for producing a field stop layer (5) by proton implantation through the layer (12) from the rear side and for masking a proton or helium implantation for the purpose of charge carrier lifetime reduction from the front side of the chip (1).Type: GrantFiled: March 16, 2005Date of Patent: August 30, 2011Assignee: Infineon Technologies AGInventors: Frank Hille, Hans-Joachim Schulze
-
Publication number: 20110199346Abstract: A semiconductor device includes a semiconductor substrate having a first conductivity type, at least two first well regions which have a second conductivity type and a predetermined depth in the semiconductor substrate, at least one second well region which has the first conductivity type and a predetermined depth in each of the first well regions, and a guard-ring region which has the second conductivity type and a predetermined depth and is positioned between the first well regions to be separated by a predetermined distance from the first well regions. The guard-ring region is connected to a ground voltage.Type: ApplicationFiled: February 11, 2011Publication date: August 18, 2011Inventors: Jae Hyok Ko, Han Gu Kim, Chang Su Kim, Suk-Jin Kim, Kwan Young Kim
-
Patent number: 7999349Abstract: An electronic device is proposed. The device is integrated in a chip including at least one stacked layer having a front surface and a rear surface opposite the front surface, the device including: an insulating trench insulating an active region of the chip, the insulating trench having a section across each plane parallel to the front surface extending along a longitudinal line, and a front-rear contact electrically contacting the front surface to the rear surface in the active region, wherein the section of the insulating trench has a non-uniform width along the longitudinal line, and/or the device further includes at least one further insulating trench within the active region.Type: GrantFiled: June 27, 2007Date of Patent: August 16, 2011Assignee: STMicroelectronics S.r.l.Inventors: Pietro Montanini, Fabrizio Fausto Renzo Toia, Marta Mottura