Transistor (epo) Patents (Class 257/E21.37)
  • Patent number: 8481373
    Abstract: A method for manufacturing a thin film transistor substrate includes a step of forming a gate electrode (11a) and a first interconnect on a substrate (10), a step of forming a gate insulating film (12a) having a contact hole at a position overlapping the first interconnect, a step of forming a source electrode (13a) and a drain electrode (13b) overlapping the gate electrode (11a) and separated apart from each other, and a second interconnect connected via the contact hole to the first interconnect, a step of successively forming an oxide semiconductor film (14) and a second insulating film (15), and thereafter, patterning the second insulating film (15) to form an interlayer insulating film (15a), and a step of reducing the resistance of the oxide semiconductor film (14) exposed through the interlayer insulating film (15a) to form a pixel electrode (14b).
    Type: Grant
    Filed: March 16, 2010
    Date of Patent: July 9, 2013
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Tohru Okabe, Hirohiko Nishiki, Yoshimasa Chikama, Takeshi Hara
  • Publication number: 20130168732
    Abstract: An electrostatic discharge (ESD) protection device includes a well region formed from semiconductor material with a first doping type and a floating base formed from semiconductor material with a second doping type. The floating base is disposed vertically above the well region. The ESD also includes a first terminal receiving region formed from semiconductor material with a third doping type. The first terminal receiving region is disposed vertically above the floating base. The ESD further includes a second terminal receiving region. The second terminal receiving region is laterally spaced apart from the first terminal receiving region by silicon trench isolation (STI) region. In some embodiments, the second terminal receiving region is formed from semiconductor material with the third doping type to form a bipolar junction transmitter (BJT) or with a fourth doping type to form a silicon controlled rectifier (SCR).
    Type: Application
    Filed: December 28, 2011
    Publication date: July 4, 2013
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng
  • Patent number: 8476121
    Abstract: The present invention provides a method of manufacturing an organic thin film transistor (TFT), comprising: providing a substrate layer; providing a gate electrode layer; providing a dielectric material layer; providing an organic semiconductor (OSC) material layer; providing a source and drain electrode layer; and wherein one or more of the layers is deposited using a laser induced thermal imaging (LITI) process. Preferably the organic TFT is a bottom gate device and the source and drain electrodes are deposited on an organic semiconductor layer, or over a dielectric material layer using LITI. Further preferably a dopant material may be provided between the OSC material and the source and drain electrode layer, wherein the dopant material may also be deposited using LITI. Also preferably, wherein the dopant may be a charge neutral dopant such as substituted TCNQ or F4TCNQ.
    Type: Grant
    Filed: August 5, 2009
    Date of Patent: July 2, 2013
    Assignee: Cambridge Display Technology Limited
    Inventors: Jeremy Burroughes, Julian Carter, Euan Smith, Jonathan Halls, Thomas Kugler, Christopher Newsome
  • Publication number: 20130146894
    Abstract: The present disclosure relates to a bipolar junction transistor (BJT) structure that significantly reduces current crowding while improving the current gain relative to conventional BJTs. The BJT includes a collector, a base region, and an emitter. The base region is formed over the collector and includes at least one extrinsic base region and an intrinsic base region that extends above the at least one extrinsic base region to provide a mesa. The emitter is formed over the mesa. The BJT may be formed from various material systems, such as the silicon carbide (SiC) material system. In one embodiment, the emitter is formed over the mesa such that essentially none of the emitter is formed over the extrinsic base regions. Typically, but not necessarily, the intrinsic base region is directly laterally adjacent the at least one extrinsic base region.
    Type: Application
    Filed: December 12, 2011
    Publication date: June 13, 2013
    Applicant: CREE, INC.
    Inventors: Lin Cheng, Anant K. Agarwal, Sei-Hyung Ryu
  • Patent number: 8461010
    Abstract: In conventional processes, a recombination rate of minority carrier accumulated between a diffusion layer of an anode and a diffusion layer of a cathode cannot be enhanced. An interlayer insulating film 20 is formed on a semiconductor substrate 10. An opening 22 (first opening), an opening 24 (second opening) and an opening 26 are formed in the interlayer insulating film 20. The opening 22 and the opening 26 are formed above respective the p-type diffusion layer 16 and the n-type diffusion layer 18. The opening 24 is formed above the gap region that is a region between the p-type diffusion layer 16 and the n-type diffusion layer 18. A contact plug 32, a contact plug 34 and a contact plug 36 are embedded in the opening 22, the opening 24 and the opening 26 respectively. Both regions of the semiconductor substrate 10 located under the opening 22 among and located under the opening 24 are doped with an impurity.
    Type: Grant
    Filed: July 25, 2007
    Date of Patent: June 11, 2013
    Assignee: Renesas Electronics Corporation
    Inventor: Masaharu Sato
  • Patent number: 8455314
    Abstract: In sophisticated semiconductor devices, replacement gate approaches may be applied in combination with a process strategy for implementing a strain-inducing semiconductor material, wherein superior proximity of the strain-inducing semiconductor material and/or superior robustness of the replacement gate approach may be achieved by forming the initial gate electrode structures with superior uniformity and providing at least one cavity for implementing the strained channel regions in a very advanced manufacturing stage, i.e., after completing the basic transistor configuration.
    Type: Grant
    Filed: May 27, 2011
    Date of Patent: June 4, 2013
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Uwe Griebenow, Jan Hoentschel, Thilo Scheiper, Sven Beyer
  • Patent number: 8455981
    Abstract: A graphene substrate is doped with one or more functional groups to form an electronic device.
    Type: Grant
    Filed: May 7, 2010
    Date of Patent: June 4, 2013
    Assignee: The Invention Science Fund I, LLC
    Inventors: Jeffrey A. Bowers, Roderick A. Hyde, Muriel Y. Ishikawa, Jordin T. Kare, Clarence T. Tegreene, Tatsushi Toyokuni, Richard N. Zare
  • Publication number: 20130134483
    Abstract: Disclosed are a transistor and a method of forming the transistor with a raised collector pedestal in reduced dimension for reduced base-collector junction capacitance. The raised collector pedestal is on the top surface of a substrate, extends vertically through dielectric layer(s), is un-doped or low-doped, is aligned above a sub-collector region contained within the substrate and is narrower than that sub-collector region. An intrinsic base layer is above the raised collector pedestal and the dielectric layer(s). An extrinsic base layer is above the intrinsic base layer. Thus, the space between the extrinsic base layer and the sub-collector region is increased. This increased space is filled by dielectric material and the electrical connection between the intrinsic base layer and the sub-collector region is provided by the relatively narrow, un-doped or low-doped, raised collector pedestal.
    Type: Application
    Filed: November 30, 2011
    Publication date: May 30, 2013
    Applicant: International Business Machines Corporation
    Inventors: James W. Adkisson, John J. Ellis-Monaghan, David L. Harame, Qizhi Liu, John J. Pekarik
  • Publication number: 20130119508
    Abstract: Methods for fabricating bipolar junction transistors, bipolar junction transistors, and design structures for a bipolar junction transistor. The bipolar junction transistor may include a plurality of emitters that are arranged in distinct emitter fingers. A silicide layer is formed that covers an extrinsic base layer of the bipolar junction transistor and that fills the gaps between adjacent emitters. Non-conductive spacers on the emitter sidewalls electrically insulate the emitters from the silicide layer. The emitters extend through the extrinsic base layer and the silicide layer to contact the intrinsic base layer. The emitters may be formed using sacrificial emitter pedestals in a replacement-type process.
    Type: Application
    Filed: November 11, 2011
    Publication date: May 16, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Renata Camillo-Castillo, David L. Harame, Qizhi Liu, Ramana M. Malladi, John J. Pekarik
  • Patent number: 8431966
    Abstract: Methods for manufacturing a bipolar transistor semiconductor device are described, along with devices fabricated in accordance with the methods. The methods include the steps of forming a stack of layers over a semiconductor body comprising a window definition layer (18,38), a layer (20) of semiconductor material, a first insulating layer (22), and a second insulating layer (24) which is selectively etchable with respect to the first insulating layer. A trench (26) is then etched into the stack down to the window definition layer. The portion of the trench extending through the second insulating layer is widened to form a wider trench portion (28) therethrough. A window (36) is defined in the window definition layer which is aligned with the wider trench portion, and serves to define the base-collector or base-emitter junction in the finished device.
    Type: Grant
    Filed: May 11, 2009
    Date of Patent: April 30, 2013
    Assignee: NXP B.V.
    Inventors: Philippe Meunier-Beillard, Erwin Hijzen, Johannes J. T. M. Donkers
  • Publication number: 20130099351
    Abstract: A bipolar transistor is disclosed, which includes a collector region, a base region, an emitter region and field plates. Each field plate is present in a structure of a flat sidewall covering one side face of the active region so that it also covers the collector region from one side. The field plate has its surface parallel to the side face of the active region and is isolated from the side face of the active region by a pad oxide layer. The field plate has its top lower than the surface of the active region. The bipolar transistor is capable of improving the breakdown voltage of the device without increasing the collector resistance or deteriorating the frequency characteristic. A method of manufacturing bipolar transistor is also disclosed.
    Type: Application
    Filed: October 23, 2012
    Publication date: April 25, 2013
    Applicant: SHANGHAI HUA HONG NEC ELECTRONICS CO., LTD
    Inventor: SHANGHAI HUA HONG NEC ELECTRONICS CO., LTD
  • Patent number: 8426258
    Abstract: A vertical semiconductor device (e.g. a vertical power device, an IGBT device, a vertical bipolar transistor, a UMOS device or a GTO thyristor) is formed with an active semiconductor region, within which a plurality of semiconductor structures have been fabricated to form an active device, and below which at least a portion of a substrate material has been removed to isolate the active device, to expose at least one of the semiconductor structures for bottom side electrical connection and to enhance thermal dissipation. At least one of the semiconductor structures is preferably contacted by an electrode at the bottom side of the active semiconductor region.
    Type: Grant
    Filed: October 11, 2011
    Date of Patent: April 23, 2013
    Assignee: IO Semiconductor, Inc.
    Inventors: Stuart B. Molin, Michael A. Stuber
  • Patent number: 8426888
    Abstract: A vertical semiconductor device (e.g. a vertical power device, an IGBT device, a vertical bipolar transistor, a UMOS device or a GTO thyristor) is formed with an active semiconductor region, within which a plurality of semiconductor structures have been fabricated to form an active device, and below which at least a portion of a substrate material has been removed to isolate the active device, to expose at least one of the semiconductor structures for bottom side electrical connection and to enhance thermal dissipation. At least one of the semiconductor structures is preferably contacted by an electrode at the bottom side of the active semiconductor region.
    Type: Grant
    Filed: October 11, 2011
    Date of Patent: April 23, 2013
    Assignee: IO Semiconductor, Inc.
    Inventors: Stuart B. Molin, Michael A. Stuber
  • Publication number: 20130092977
    Abstract: A power semiconductor diode is provided. The power semiconductor diode includes a semiconductor substrate having a first emitter region of a first conductivity type, a second emitter region of a second conductivity type, and a drift region of the first conductivity type arranged between the first emitter region and the second emitter region. The drift region forms a pn-junction with the second emitter region. A first emitter metallization is in contact with the first emitter region. The first emitter region includes a first doping region of the first conductivity type and a second doping region of the first conductivity type. The first doping region forms an ohmic contact with the first emitter metallization, and the second doping region forms a non-ohmic contact with the first emitter metallization. A second emitter metallization is in contact with the second emitter region.
    Type: Application
    Filed: October 17, 2011
    Publication date: April 18, 2013
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Holger Huesken, Anton Mauder, Hans-Joachim Schulze, Wolfgang Roesner
  • Patent number: 8410002
    Abstract: An object is to provide a semiconductor device with a novel structure and favorable characteristics. A semiconductor device includes an oxide semiconductor layer, a source electrode and a drain electrode electrically connected to the oxide semiconductor layer, a gate insulating layer covering the oxide semiconductor layer, the source electrode, and the drain electrode, and a gate electrode over the gate insulating layer. The source electrode and the drain electrode include an oxide region formed by oxidizing a side surface thereof. Note that the oxide region of the source electrode and the drain electrode is preferably formed by plasma treatment with a high frequency power of 300 MHz to 300 GHz and a mixed gas of oxygen and argon.
    Type: Grant
    Filed: November 12, 2010
    Date of Patent: April 2, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Jun Koyama
  • Publication number: 20130075730
    Abstract: A vertical PNP device in a silicon-germanium (SiGe) BiCMOS process is disclosed. The device is formed in a deep N-well and includes a collector region, a base region and an emitter region. The collector region has a two-dimensional L-shaped structure composed of a lightly doped first P-type ion implantation region and a heavily doped second P-type ion implantation region. The collector region is picked up by P-type pseudo buried layers formed at bottom of the shallow trench field oxide regions. A manufacturing method of vertical PNP device in a SiGe BiCMOS process is also disclosed. The method is compatible with the manufacturing processes of a SiGe heterojunction bipolar transistor in the SiGe BiCMOS process.
    Type: Application
    Filed: September 10, 2012
    Publication date: March 28, 2013
    Applicant: SHANGHAI HUA HONG NEC ELECTRONICS CO., LTD.
    Inventor: Wensheng Qian
  • Publication number: 20130075729
    Abstract: According to one exemplary embodiment, a fin-based bipolar junction transistor (BJT) includes a wide collector situated in a semiconductor substrate. A fin base is disposed over the wide collector. Further, a fin emitter and an epi emitter are disposed over the fin base. A narrow base-emitter junction of the fin-based BJT is formed by the fin base and the fin emitter and the epi emitter provides increased current conduction and reduced resistance for the fin-based BJT. The epi emitter can be epitaxially formed on the fin emitter and can comprise polysilicon. Furthermore, the fin base and the fin emitter can each comprise single crystal silicon.
    Type: Application
    Filed: September 27, 2011
    Publication date: March 28, 2013
    Applicant: BROADCOM CORPORATION
    Inventors: Wei Xia, Xiangdong Chen
  • Patent number: 8405186
    Abstract: Disclosed are embodiments of an improved transistor structure (e.g., a bipolar transistor (BT) structure or heterojunction bipolar transistor (HBT) structure) and a method of forming the transistor structure. The structure embodiments can incorporate a dielectric layer sandwiched between an intrinsic base layer and a raised extrinsic base layer to reduce collector-base capacitance Ccb, a sidewall-defined conductive strap for an intrinsic base layer to extrinsic base layer link-up region to reduce base resistance Rb and a dielectric spacer between the extrinsic base layer and an emitter layer to reduce base-emitter Cbe capacitance. The method embodiments allow for self-aligning of the emitter to base regions and further allow the geometries of different features (e.g., the thickness of the dielectric layer, the width of the conductive strap, the width of the dielectric spacer and the width of the emitter layer) to be selectively adjusted in order to optimize transistor performance.
    Type: Grant
    Filed: June 17, 2010
    Date of Patent: March 26, 2013
    Assignee: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Mattias E. Dahlstrom, Peter B. Gray, David L. Harame, Russell T. Herrin, Alvin J. Joseph, Andreas D. Stricker
  • Publication number: 20130065374
    Abstract: A method of fabricating an integrated circuit including bipolar transistors that reduces the effects of transistor performance degradation and transistor mismatch caused by charging during plasma etch, and the integrated circuit so formed. A fluorine implant is performed at those locations at which isolation dielectric structures between base and emitter are to be formed, prior to formation of the isolation dielectric. The isolation dielectric structures may be formed by either shallow trench isolation, in which the fluorine implant is performed after trench etch, or LOCOS oxidation, in which the fluorine implant is performed prior to thermal oxidation. The fluorine implant may be normal to the device surface or at an angle from the normal. Completion of the integrated circuit is then carried out, including the use of relatively thick copper metallization requiring plasma etch.
    Type: Application
    Filed: April 19, 2012
    Publication date: March 14, 2013
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Weidong Tian, Ming-Yeh Chuang, Rajni J. Aggarwal
  • Publication number: 20130056855
    Abstract: Disclosed is an integrated circuit and a method of manufacturing an integrated circuit comprising a bipolar transistor, the method comprising providing a substrate comprising a pair of isolation regions separated by an active region comprising a collector; forming a base layer stack over said substrate; forming a migration layer having a first migration temperature and an etch stop layer; forming a base contact layer having a second migration temperature; etching an emitter window in the base contact layer, thereby forming cavities extending from the emitter window; and exposing the resultant structure to the first migration temperature in a hydrogen atmosphere, thereby filling the cavities with the migration layer material.
    Type: Application
    Filed: August 30, 2012
    Publication date: March 7, 2013
    Applicant: NXP B.V.
    Inventors: Johannes Josephus Theodorus Marinus DONKERS, Petrus Hubertus Cornelis MAGNEE, Blandine DURIEZ, Evelyne GRIDELET, Hans MERTENS, Tony VANHOUCKE
  • Patent number: 8389417
    Abstract: An object is to provide a semiconductor device with a novel structure. A semiconductor device includes a first transistor, which includes a channel formation region provided in a substrate including a semiconductor material, impurity regions, a first gate insulating layer, a first gate electrode, and a first source electrode and a first drain electrode, and a second transistor, which includes an oxide semiconductor layer over the substrate including the semiconductor material, a second source electrode and a second drain electrode, a second gate insulating layer, and a second gate electrode. The second source electrode and the second drain electrode include an oxide region formed by oxidizing a side surface thereof, and at least one of the first gate electrode, the first source electrode, and the first drain electrode is electrically connected to at least one of the second gate electrode, the second source electrode, and the second drain electrode.
    Type: Grant
    Filed: November 12, 2010
    Date of Patent: March 5, 2013
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Jun Koyama
  • Publication number: 20130049169
    Abstract: A bipolar junction transistor includes a first trench element isolation film, a second trench element isolation film, a first base region, a second base region, a collector region, a first well, a second well, an emitter, a collector, and bases. The second well is formed by implanting an n-type impurity into the semiconductor substrate, and the emitter is formed by implanting the n-type impurity into the emitter region between the first trench element isolation film and the second well. The collector is formed by implanting the n-type impurity into the collector region between the first well and the second trench element isolation film, and the bases are formed by implanting the p-type impurity into the first base region and into the second base region between the emitter region and the second well.
    Type: Application
    Filed: January 9, 2012
    Publication date: February 28, 2013
    Inventors: JAE HYUN YOO, Jong Min Kim
  • Publication number: 20130049067
    Abstract: A semiconductor structure and manufacturing method for the same, and an ESD circuit are provided. The semiconductor structure comprises a first doped region, a second doped region, a third doped region and a resistor. The first doped region has a first type conductivity. The second doped region has a second type conductivity opposite to the first type conductivity. The third doped region has the first type conductivity. The first doped region and the third doped region are separated by the second doped region. The resistor is coupled between the second doped region and the third doped region. An anode is coupled to the first doped region. A cathode is coupled to the third doped region.
    Type: Application
    Filed: August 31, 2011
    Publication date: February 28, 2013
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Hsin-Liang Chen, Wing-Chor Chan, Shyi-Yuan Wu
  • Patent number: 8377760
    Abstract: A TFT including a gate, a gate insulation layer, an oxide semiconductor layer, a translucent layer, a source, and a drain. The gate insulation layer covers the gate. The oxide semiconductor layer is disposed on the gate insulation layer and located above the gate. The oxide semiconductor layer includes an oxide channel layer and two ohmic contact layers. The ohmic contact layers are respectively located beside the oxide channel layer and connected with the oxide channel layer. The translucent layer is located above the oxide channel layer. The source and the drain are disposed on the gate insulation layer and the ohmic contact layers. The source and the drain are electrically insulated from each other.
    Type: Grant
    Filed: December 28, 2011
    Date of Patent: February 19, 2013
    Assignee: Au Optronics Corporation
    Inventors: Wu-Hsiung Lin, Ming-Wei Sun
  • Publication number: 20130037914
    Abstract: A bipolar junction transistor and a manufacturing method for the same are provided. The bipolar junction transistor includes a well region, an emitter electrode, a base electrode, a collector electrode, and a conductive layer. The emitter electrode, the base electrode and the collector electrode are separated from each other by the well region. The conductive layer is on the well region between the base electrode and the collector electrode.
    Type: Application
    Filed: August 8, 2011
    Publication date: February 14, 2013
    Applicant: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Chin-Wei Chang, Ching-Lin Chan, Chin-Shien Lu, Ming-Tung Lee, Shuo-Lun Tu
  • Publication number: 20130032891
    Abstract: A method of manufacturing an integrated circuit comprising bipolar transistors including first and second type bipolar transistors, the method comprising providing a substrate comprising first isolation regions each separated from a second isolation region by an active region comprising a collector impurity of one of the bipolar transistors; forming a base layer stack over the substrate; forming a first emitter cap layer of a first effective thickness over the base layer stack in the areas of the first type bipolar transistor; forming a second emitter cap layer of a second effective thickness different from the first effective thickness over the base layer stack in the areas of the second type bipolar transistor; and forming an emitter over the emitter cap layer of each of the bipolar transistors. An IC in accordance with this method.
    Type: Application
    Filed: July 27, 2012
    Publication date: February 7, 2013
    Applicant: NXP B.V.
    Inventors: Hans Mertens, Johannes Theodorus Marinus Donkers, Evelyne Gridelet, Tony Vanhoucke, Petrus Hubertus Cornelis Magnee
  • Patent number: 8354323
    Abstract: A graphene substrate is doped with one or more functional groups to form an electronic device.
    Type: Grant
    Filed: May 7, 2010
    Date of Patent: January 15, 2013
    Assignee: Searete LLC
    Inventors: Jeffrey A. Bowers, Roderick A. Hyde, Muriel Y. Ishikawa, Jordin T. Kare, Clarence T. Tegreene, Tatsushi Toyokuni, Richard N. Zare
  • Publication number: 20130009280
    Abstract: Methods for fabricating bipolar junction transistors, bipolar junction transistors made by the methods, and design structures for a bipolar junction transistor. The bipolar junction transistor includes a dielectric layer on an intrinsic base and an extrinsic base at least partially separated from the intrinsic base by the dielectric layer. An emitter opening extends through the extrinsic base and the dielectric layer. The dielectric layer is recessed laterally relative to the emitter opening to define a cavity between the intrinsic base and the extrinsic base. The cavity is filled with a semiconductor layer that physically links the extrinsic base and the intrinsic base together.
    Type: Application
    Filed: July 6, 2011
    Publication date: January 10, 2013
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Renata Camillo-Castillo, Peter B. Gray, David L. Harame, Alvin J. Joseph, Marwan H. Khater, Qizhi Liu
  • Publication number: 20130009252
    Abstract: A bipolar transistor structure includes an epitaxial layer on a semiconductor substrate, a bipolar transistor device formed in the epitaxial layer and a trench structure formed in the epitaxial layer adjacent at least two opposing lateral sides of the bipolar transistor device. The trench structure includes a field plate spaced apart from the epitaxial layer by an insulating material. The bipolar transistor structure further includes a base contact connected to a base of the bipolar transistor device, an emitter contact connected to an emitter of the bipolar transistor device and isolated from the base contact and an electrical connection between the emitter contact and the field plate.
    Type: Application
    Filed: September 14, 2012
    Publication date: January 10, 2013
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Christoph Kadow, Thorsten Meyer, Norbert Krischke
  • Publication number: 20130001747
    Abstract: A method for manufacturing a bipolar transistor includes forming a first epitaxial layer on a semiconductor substrate, forming a second epitaxial layer on the first epitaxial layer, forming an oxide layer on the second epitaxial layer, etching the oxide layer to form an opening in which the second epitaxial layer is exposed, and forming a third epitaxial layer in the opening. The first and third epitaxial layers have a first-type conductivity, and the second epitaxial layer has a second-type conductivity.
    Type: Application
    Filed: December 2, 2010
    Publication date: January 3, 2013
    Applicants: CSMC TECHNOLOGIES FAB2 CO., LTD., CSMC TECHNOLOGIES FAB1 CO., LTD.
    Inventors: Le Wang, Linchun Gui, Kongwei Zhu, Zhiyong Zhao
  • Publication number: 20120319137
    Abstract: An electrostatic discharge (ESD) protection element includes a collector area, a first barrier area, a semiconductor area, a second barrier area and an emitter area. The collector area has a first conductivity type. The first barrier area borders on the collector area and has a second conductivity type. The semiconductor area borders on the first barrier area and is an intrinsic semiconductor area, or has the first or second conductivity type and a dopant concentration which is lower than a dopant concentration of the first barrier area. The second barrier area borders on the semiconductor area and has the second conductivity type and a higher dopant concentration than the semiconductor area. The emitter area borders on the second barrier area and has the first conductivity type.
    Type: Application
    Filed: August 30, 2012
    Publication date: December 20, 2012
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Wolfgang Klein, Hans Taddiken, Winfried Bakalski
  • Publication number: 20120322219
    Abstract: In one embodiment, a method includes forming a base region for a transistor using a base mask and forming a contact region to the base region. The contact region is formed in an area that is at least partially outside of the base mask. The method then forms an emitter region in a diffused base region. The base region diffuses outwardly to be formed under the contact region.
    Type: Application
    Filed: December 19, 2011
    Publication date: December 20, 2012
    Applicant: DIODES ZETEX SEMICONDUCTORS LIMITED
    Inventor: David Neil Casey
  • Publication number: 20120313146
    Abstract: Disclosed is a transistor structure, having a completely silicided extrinsic base for reduced base resistance Rb. Specifically, a metal silicide layer covers the extrinsic base, including the portion of the extrinsic base that extends below the upper portion of a T-shaped emitter. One exemplary technique for ensuring that the metal silicide layer covers this portion of the extrinsic base requires tapering the upper portion of the emitter. Such tapering allows a sacrificial layer below the upper portion of the emitter to be completely removed during processing, thereby exposing the extrinsic base below and allowing the metal layer required for silicidation to be deposited thereon. This metal layer can be deposited, for example, using a high pressure sputtering technique to ensure that all exposed surfaces of the extrinsic base, even those below the upper portion of the emitter, are covered.
    Type: Application
    Filed: June 8, 2011
    Publication date: December 13, 2012
    Applicant: International Business Machines Corporation
    Inventors: Marc W. Cantell, Thai Doan, Jessica A. Levy, Qizhi Liu, William J. Murphy, Christa R. Willets
  • Patent number: 8324119
    Abstract: When forming sophisticated gate electrode structures requiring a threshold adjusting semiconductor alloy for one type of transistor, a recess is formed in the corresponding active region, thereby providing superior process uniformity during the deposition of the semiconductor material. Due to the recess, any exposed sidewall surface areas of the active region may be avoided during the selective epitaxial growth process, thereby significantly contributing to enhanced threshold stability of the resulting transistor including the high-k metal gate stack.
    Type: Grant
    Filed: May 7, 2010
    Date of Patent: December 4, 2012
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Carsten Reichel, Thorsten Kammler, Annekathrin Zeun, Stephan Kronholz
  • Patent number: 8319282
    Abstract: A bipolar transistor structure includes an epitaxial layer on a semiconductor substrate, a bipolar transistor device formed in the epitaxial layer and a trench structure formed in the epitaxial layer adjacent at least two opposing lateral sides of the bipolar transistor device. The trench structure includes a field plate spaced apart from the epitaxial layer by an insulating material. The bipolar transistor structure further includes a base contact connected to a base of the bipolar transistor device, an emitter contact connected to an emitter of the bipolar transistor device and isolated from the base contact and an electrical connection between the emitter contact and the field plate.
    Type: Grant
    Filed: July 9, 2010
    Date of Patent: November 27, 2012
    Assignee: Infineon Technologies Austria AG
    Inventors: Christoph Kadow, Thorsten Meyer, Norbert Krischke
  • Publication number: 20120289003
    Abstract: A method for forming a semiconductor device is provided. The method includes providing a wafer-stack having a main horizontal surface, an opposite surface, a buried dielectric layer, a semiconductor wafer extending from the buried dielectric layer to the main horizontal surface, and a handling wafer extending from the buried dielectric layer to the opposite surface; etching a deep vertical trench into the semiconductor wafer at least up to the buried dielectric layer, wherein the buried dielectric layer is used as an etch stop; forming a vertical transistor structure comprising forming a first doped region in the semiconductor wafer; forming a first metallization on the main horizontal surface in ohmic contact with the first doped region; removing the handling wafer to expose the buried dielectric layer; and masked etching of the buried dielectric layer to partly expose the semiconductor wafer on a back surface opposite to the main horizontal surface.
    Type: Application
    Filed: July 12, 2012
    Publication date: November 15, 2012
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Franz Hirler, Andreas Meiser
  • Publication number: 20120273760
    Abstract: A bipolar transistor includes a substrate of semiconductor material, a high-mobility layer in the substrate, and a donor layer adjacent to the high-mobility layer. An emitter terminal forms an emitter contact on the donor layer, and a collector terminal forms a collector contact on the donor layer. A base terminal is electrically conductively connected with the high-mobility layer. The transistor can be produced in a HEMT technology or BiFET technology in GaAs.
    Type: Application
    Filed: May 17, 2012
    Publication date: November 1, 2012
    Applicant: EPCOS AG
    Inventors: Lcon C.M. van den Oever, Ray J.E. Hueting
  • Publication number: 20120264270
    Abstract: Embodiments for forming improved bipolar transistors are provided, manufacturable by a CMOS IC process. The improved transistor comprises an emitter having first and second portions of different depths, a base underlying the emitter having a central portion of a first base width underlying the first portion of the emitter, a peripheral portion having a second base width larger than the first base width partly underlying the second portion of the emitter, and a transition zone of a third base width and lateral extent lying laterally between the first and second portions of the base, and a collector underlying the base. The gain of the transistor is larger than a conventional bipolar transistor made using the same CMOS process. By adjusting the lateral extent of the transition zone, the properties of the improved transistor can be tailored to suit different applications without modifying the underlying CMOS IC process.
    Type: Application
    Filed: June 27, 2012
    Publication date: October 18, 2012
    Applicant: Freescale Semiconductor, Inc.
    Inventors: XIN LIN, Daniel J. Blomberg, Jiang-Kai Zou
  • Patent number: 8288217
    Abstract: A field effect transistor device includes a gate stack portion disposed on a substrate, and a channel region in the substrate having a depth partially defined by the gate stack portion and a silicon region of the substrate, the silicon region having a sloped profile such that a distal regions of the channel region have greater depth than a medial region of the channel region.
    Type: Grant
    Filed: November 12, 2010
    Date of Patent: October 16, 2012
    Assignee: International Business Machines Corporation
    Inventors: Dechao Guo, Pranita Kulkarni, Philip J. Oldiges, Alexander Reznicek, Keith Kwong Hon Wong
  • Publication number: 20120248575
    Abstract: The present invention provides a semiconductor with a multilayered contact structure. The multilayered structure includes a metal contact placed on an active region of a semiconductor and a metal contact extension placed on the metal contact.
    Type: Application
    Filed: December 21, 2009
    Publication date: October 4, 2012
    Applicant: NXP B.V.
    Inventors: Soenke Habenicht, Detief Oelgeschlaeger, Olrik Schumacher, Stefan Bengt Berglund
  • Publication number: 20120228611
    Abstract: Methods for fabricating bipolar junction transistors with self-aligned emitter and extrinsic base, bipolar junction transistors made by the methods, and design structures for a BiCMOS integrated circuit. The bipolar junction transistor is fabricated using a sacrificial emitter pedestal that provides a sacrificial mandrel promoting self-alignment between the emitter and the extrinsic base. The sacrificial emitter pedestal is subsequently removed to open an emitter window extending to the intrinsic base. An emitter is formed in the emitter window that lands on the intrinsic base.
    Type: Application
    Filed: March 8, 2011
    Publication date: September 13, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kevin K. Chan, Erik M. Dahlstrom, Peter B. Gray, David L. Harame, Qizhi Liu
  • Publication number: 20120231587
    Abstract: Embodiments include methods for forming an electrostatic discharge (ESD) protection device coupled across input-output (I/O) and common terminals of a core circuit, where the ESD protection device includes first and second merged bipolar transistors. A base of the first transistor serves as collector of the second transistor and the base of the second transistor serves as collector of the first transistor, the bases having, respectively, first and second widths. A first resistance is coupled between an emitter and base of the first transistor and a second resistance is coupled between an emitter and base of the second transistor. ESD trigger voltage Vt1 and holding voltage Vh can be independently optimized by choosing appropriate base widths and resistances. By increasing Vh to approximately equal Vt1, the ESD protection is more robust, especially for applications with narrow design windows, for example, with operating voltage close to the degradation voltage.
    Type: Application
    Filed: May 25, 2012
    Publication date: September 13, 2012
    Applicant: FREESCALE SEMICONDUCOTR, INC.
    Inventors: AMAURY GENDRON, Chai Ean Gill, Rouying Zhan
  • Publication number: 20120223369
    Abstract: Some embodiments include gated bipolar junction transistors. The transistors may include a base region between a collector region and an emitter region; with a B-C junction being at an interface of the base region and the collector region, and with a B-E junction being at an interface of the base region and the emitter region. The transistors may include material having a bandgap of at least 1.2 eV within one or more of the base, emitter and collector regions. The gated transistors may include a gate along the base region and spaced from the base region by dielectric material, with the gate not overlapping either the B-C junction or the B-E junction. Some embodiments include memory arrays containing gated bipolar junction transistors. Some embodiments include methods of forming gated bipolar junction transistors.
    Type: Application
    Filed: March 1, 2011
    Publication date: September 6, 2012
    Applicant: Micron Technology, Inc.
    Inventors: Rajesh N. Gupta, Farid Nemati, Scott T. Robins
  • Publication number: 20120218671
    Abstract: A semiconductor device includes an SCR ESD device region disposed within a semiconductor body, and a plurality of first device regions of the first conductivity type disposed on a second device region of the second conductivity type, where the second conductivity type is opposite the first conductivity type. Also included is a plurality of third device regions having a sub-region of the first conductivity type and a sub-region of the second conductivity type disposed on the second device region. The first regions and second regions are distributed such that the third regions are not directly adjacent to each other. A fourth device region of the first conductivity type adjacent to the second device region and a fifth device region of the second conductivity type disposed within the fourth device region are also included.
    Type: Application
    Filed: May 4, 2012
    Publication date: August 30, 2012
    Applicant: Infineon Technologies AG
    Inventors: Krzysztof Domanski, Cornelius Christian Russ, Kai Esmark
  • Publication number: 20120199881
    Abstract: High frequency performance of (e.g., silicon) bipolar devices (100) is improved by reducing the extrinsic base resistance Rbx. Emitter (160), intrinsic base (161, 163) and collector (190) are formed in a semiconductor body (115). An emitter contact (154) has a region (1541) that overlaps a portion (1293, 1293?) of an extrinsic base contact (129). A sidewall (1294) is formed in the extrinsic base contact (129) proximate a lateral edge (1543) of the overlap region (1541) of the emitter contact (154). The sidewall (1294) is amorphized during or after formation so that when the emitter contact (154) and the extrinsic base contact (129) are, e.g., silicided, some of the metal atoms forming the silicide penetrate into the sidewall (1294) so that part (183) of the highly conductive silicided extrinsic base contact (182, 183) extends under the edge (1543) of the overlap region (1541) of the emitter contact (154) closer to the intrinsic base (161, 163), thereby reducing Rbx.
    Type: Application
    Filed: February 9, 2011
    Publication date: August 9, 2012
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Jay P. John, James A. Kirchgessner, Vishal P. Trivedi
  • Publication number: 20120202332
    Abstract: A method for producing a semiconductor component structure in a semiconductor body. In one embodiment, the method includes producing two differently doped semiconductor zones of the same conduction type, and carrying out a first implantation, implanting dopant atoms of a first conduction type into the semiconductor body via one of the sides over the whole area. A mask is produced on the one side, partly leaving free the one side. A second implantation is carried out, implanting dopant atoms of the first conduction type into the region left free by the mask proceeding from the one of the sides.
    Type: Application
    Filed: April 17, 2012
    Publication date: August 9, 2012
    Applicant: Infineon Technologies Austria AG
    Inventors: Hans-Joachim Schulze, Manfred Pfaffenlehner
  • Publication number: 20120187538
    Abstract: Insufficient gain in bipolar transistors (20) is improved by providing an alloyed (e.g., silicided) emitter contact (452) smaller than the overall emitter (42) area. The improved emitter (42) has a first emitter (FE) portion (42-1) of a first dopant concentration CFE, and a second emitter (SE) portion (42-2) of a second dopant concentration CSE. Preferably CSE?CFE. The SE portion (42-2) desirably comprises multiple sub-regions (45i, 45j, 45k) mixed with multiple sub-regions (47m, 47n, 47p) of the FE portion (42-1). A semiconductor-metal alloy or compound (e.g., a silicide) is desirably used for Ohmic contact (452) to the SE portion (42-2) but substantially not to the FE portion (42-1). Including the FE portion (42-1) electrically coupled to the SE portion (42-2) but not substantially contacting the emitter contact (452) on the SE portion (42-2) provides gain increases of as much as ˜278.
    Type: Application
    Filed: January 26, 2011
    Publication date: July 26, 2012
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Xin Lin, Daniel J. Blomberg, Jiang-Kai Zuo
  • Publication number: 20120168909
    Abstract: A method for integrating a bipolar injunction transistor in a semiconductor chip includes the steps of forming an intrinsic base region of a second type of conductivity extending in the collector region from a main surface through an intrinsic base window of the sacrificial insulating layer, forming an emitter region of the first type of conductivity extending in the intrinsic base region from the main surface through an emitter window of the sacrificial insulating layer, removing the sacrificial insulating layer, forming an intermediate insulating layer on the main surface, and forming an extrinsic base region of the second type of conductivity extending in the intrinsic base region from the main surface through an extrinsic base window of the intermediate insulating layer
    Type: Application
    Filed: December 22, 2011
    Publication date: July 5, 2012
    Applicants: STMicroelectronics Asia Pacific Pte. Ltd., STMicroelectronics S.r.l.
    Inventors: Alfonso Patti, Antonino Schillaci, Bartolome Marrone, Gianleonardo Grasso, Rajesh Kumar
  • Patent number: 8198192
    Abstract: Sophisticated gate electrode structures may be formed by providing a cap layer including a desired species that may diffuse into the gate dielectric material prior to performing a treatment for stabilizing the sensitive gate dielectric material. In this manner, complex high-k metal gate electrode structures may be formed on the basis of reduced temperatures and doses for a threshold adjusting species compared to conventional strategies. Moreover, a single metal-containing electrode material may be deposited for both types of transistors.
    Type: Grant
    Filed: May 7, 2010
    Date of Patent: June 12, 2012
    Assignee: GlobalFoundries Inc.
    Inventors: Richard Carter, Martin Trentzsch, Sven Beyer, Rohit Pal
  • Publication number: 20120133024
    Abstract: According to an embodiment, a method for manufacturing a semiconductor device is provided. The method includes providing a mask layer which is used as an implantation mask when forming a doping region and which is used as an etching mask when forming an opening and a contact element formed in the opening. The contact element is in contact with the doping region.
    Type: Application
    Filed: November 29, 2010
    Publication date: May 31, 2012
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Gerhard Prechtl, Andreas Peter Meiser, Thomas Ostermann