Transistor (epo) Patents (Class 257/E21.37)
  • Publication number: 20120133025
    Abstract: An apparatus includes an electrostatic discharge (ESD) protection device configured to protect a circuit from ESD conditions. The protection device includes an emitter region having a first diffusion polarity; a collector region laterally spaced apart from the emitter region, and having the first diffusion polarity; and a barrier region interposed laterally between the emitter region and the collector region while contacting the emitter region. The barrier region has a second diffusion polarity opposite from the first diffusion polarity. The device can further include a base region having the second diffusion polarity, and laterally surrounding and underlying the emitter region and the barrier region. The barrier region can have a higher dopant concentration than the base region, and block a lateral current flow between the collector and emitter regions, thus forming a vertical ESD device having enhanced ESD performance.
    Type: Application
    Filed: November 29, 2010
    Publication date: May 31, 2012
    Applicant: ANALOG DEVICES, INC.
    Inventors: David Clarke, Paul Daly, Patrick McGuinness, Bernard Stenson, Anne Deignan
  • Publication number: 20120126292
    Abstract: Heterojunction bipolar transistors with reduced base resistance, as well as fabrication methods for heterojunction bipolar transistors and design structures for BiCMOS integrated circuits. The heterojunction bipolar transistor includes a conductive layer between the intrinsic base and the extrinsic base. The conductive layer is comprised of a conductive material, such as a silicide, having a lower resistivity than the materials forming the intrinsic base and the extrinsic base.
    Type: Application
    Filed: November 22, 2010
    Publication date: May 24, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Erik M. Dahlstrom, Peter B. Gray, Qizhi Liu
  • Patent number: 8183120
    Abstract: One or more embodiments relate to a method, comprising forming an implant on a substrate surface; selectively etching the wafer surface to form an elongated fin including portion of the implant; forming collector/emitter regions adjacent opposing ends of the fin; and forming a base region intermediate the collector/emitter regions.
    Type: Grant
    Filed: November 10, 2010
    Date of Patent: May 22, 2012
    Assignee: Infineon Technologies AG
    Inventors: Ronald Kakoschke, Klaus Schruefer
  • Publication number: 20120119331
    Abstract: An area-efficient, high voltage, single polarity ESD protection device (300) is provided which includes an p-type substrate (303); a first p-well (308-1) formed in the substrate and sized to contain n+ and p+ contact regions (310, 312) that are connected to a cathode terminal; a second, separate p-well (308-2) formed in the substrate and sized to contain only a p+ contact region (311) that is connected to an anode terminal; and an electrically floating n-type isolation structure (304, 306, 307-2) formed in the substrate to surround and separate the first and second semiconductor regions. When a positive voltage exceeding a triggering voltage level is applied to the cathode and anode terminals, the ESD protection device triggers an inherent thyristor into a snap-back mode to provide a low impedance path through the structure for discharging the ESD current.
    Type: Application
    Filed: November 12, 2010
    Publication date: May 17, 2012
    Inventors: Amaury Gendron, Chai Ean Gill, Vadim A. Kushner, Rouying Zhan
  • Publication number: 20120115299
    Abstract: A method for forming a germanium-enriched region in a heterojunction bipolar transistor and a heterojunction bipolar transistor comprising a germanium-enriched region. A base having a silicon-germanium portion is formed over a collector. Thermal oxidation of the base causes a germanium-enriched region to form on a surface of the silicon-germanium portion subjected to the thermal oxidation. An emitter is formed overlying the germanium-enriched portion region. The germanium-enriched region imparts advantageous operating properties to the heterojunction bipolar transistor, including improved high-frequency/high-speed operation.
    Type: Application
    Filed: January 11, 2012
    Publication date: May 10, 2012
    Inventor: Michelle D. Griglione
  • Publication number: 20120115282
    Abstract: A method for making a semiconductor device includes providing a substrate of a first conductivity type and having a surface region, forming a well region of a second conductivity type and having a first depth in the substrate, adding a gate dielectric layer overlying the surface region, adding a gate layer overlying the gate dielectric layer, forming a first LDD region of the first conductivity type and having a second depth within the well region, forming an emitter region of the second conductivity type within the first LDD region, and forming a second LDD region of the first conductivity type with the well region, a channel region separates the first and second LDD regions. The method further includes forming a source region being of the first conductivity type within the second LDD region and adding an output pad coupled to both the drain and emitter regions.
    Type: Application
    Filed: November 7, 2011
    Publication date: May 10, 2012
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: CHI KANG LIU, Ta Lee Yu, Quan Li
  • Publication number: 20120104554
    Abstract: Preferred embodiment flexible and on wafer hybrid plasma semiconductor devices have at least one active solid state semiconductor region; and a plasma generated in proximity to the active solid state semiconductor region(s). Doped solid state semiconductor regions are in a thin flexible solid state substrate, and a flexible non conducting material defining a microcavity adjacent the semiconductor regions. The flexible non conducting material is bonded to the thin flexible solid state substrate, and at least one electrode is arranged with respect to said flexible substrate to generate a plasma in said microcavity, where the plasma will influence or perform a semiconducting function in cooperation with said solid state semiconductor regions. A preferred on-wafer device is formed on a single side of a silicon on insulator wafer and defines the collector (plasma cavity), emitter and base regions on a common side, which provides a simplified and easy to manufacture structure.
    Type: Application
    Filed: July 19, 2011
    Publication date: May 3, 2012
    Applicant: The Board of Trustees of the University of Illinois
    Inventors: J. Gary Eden, Paul A. Tchertchian, Thomas J. Houlahan, Dane J. Sievers, Benben Li, Clark J. Wagner
  • Publication number: 20120098096
    Abstract: A bipolar transistor comprises at least first and second connected emitter-base (EB) junctions having, respectively, different first and second EB junction depths, and a buried layer (BL) collector having a greater third depth. The emitters and bases corresponding to the different EB junctions are provided during a chain implant. An isolation region overlies the second EB junction location thereby providing its shallower EB junction depth. The BL collector does not underlie the first EB junction and is laterally spaced therefrom by a variable amount to facilitate adjusting the transistor's properties. In other embodiments, the BL collector can underlie at least a portion of the second EB junction. Regions of opposite conductivity type over-lie and under-lie the BL collector, which is relatively lightly doped, thereby preserving the breakdown voltage. The transistor can be readily “tuned” by mask adjustments alone to meet various device requirements.
    Type: Application
    Filed: October 21, 2010
    Publication date: April 26, 2012
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Xin Lin, Bernhard H. Grote, Jiang-Kai Zuo
  • Publication number: 20120088339
    Abstract: A vertical semiconductor device (e.g. a vertical power device, an IGBT device, a vertical bipolar transistor, a UMOS device or a GTO thyristor) is formed with an active semiconductor region, within which a plurality of semiconductor structures have been fabricated to form an active device, and below which at least a portion of a substrate material has been removed to isolate the active device, to expose at least one of the semiconductor structures for bottom side electrical connection and to enhance thermal dissipation. At least one of the semiconductor structures is preferably contacted by an electrode at the bottom side of the active semiconductor region.
    Type: Application
    Filed: October 11, 2011
    Publication date: April 12, 2012
    Applicant: IO SEMICONDUCTOR, INC.
    Inventors: Stuart B. Molin, Michael A. Stuber
  • Patent number: 8148213
    Abstract: A method for manufacturing a biosensor includes forming a laminate of a first silicon oxide film and a polysilicon film on one surface of a silicon substrate; forming a second silicon oxide film on the other surface of the silicon substrate; forming a source electrode, a drain electrode, and a channel on the first silicon oxide film, the channel connecting the source electrode and the drain electrode; and removing the polysilicon film.
    Type: Grant
    Filed: February 16, 2011
    Date of Patent: April 3, 2012
    Assignee: Mitsumi Electric Co., Ltd.
    Inventors: Hiroaki Kikuchi, Tomoaki Yamabayashi, Osamu Takahashi
  • Publication number: 20120068309
    Abstract: In accordance with an embodiment of the present invention a transistor is disclosed. The transistor comprises a collector, a base and an emitter, wherein a first end width of the base is larger than a middle width of the base, wherein a first end width of the collector is larger than a middle width of the collector, or wherein a first end width of the emitter is larger than a middle width of the emitter.
    Type: Application
    Filed: September 22, 2010
    Publication date: March 22, 2012
    Inventor: Klaus Diefenbeck
  • Patent number: 8134212
    Abstract: An n-type isolation structure is disclosed which includes an n-type BISO layer in combination with a shallow n-well, in an IC. The n-type BISO layer is formed by implanting n-type dopants into a p-type IC substrate in addition to a conventional n-type buried layer (NBL), prior to growth of a p-type epitaxial layer. The n-type dopants in the BISO implanted layer diffuse upward from the p-type substrate to between one-third and two-thirds of the thickness of the p-type epitaxial layer. The shallow n-type well extends from a top surface of the p-type epitaxial layer to the n-type BISO layer, forming a continuous n-type isolation structure from the top surface of the p-type epitaxial layer to the p-type substrate. The width of the n-type BISO layer may be less than the thickness of the epitaxial layer, and may be used alone or with the NBL to isolate components in the IC.
    Type: Grant
    Filed: August 10, 2009
    Date of Patent: March 13, 2012
    Assignee: Texas Instruments Incorporated
    Inventors: Pinghai Hao, Seetharaman Sridhar, James Robert Todd
  • Publication number: 20120056305
    Abstract: The present disclosure provides a bipolar junction transistor (BJT) device and methods for manufacturing the BJT device. In an embodiment, the BJT device includes: a semiconductor substrate having a collector region, and a material layer disposed over the semiconductor layer. The material layer has a trench therein that exposes a portion of the collector region. A base structure, spacers, and emitter structure are disposed within the trench of the material layer. Each spacer has a top width and a bottom width, the top width being substantially equal to the bottom width.
    Type: Application
    Filed: September 2, 2010
    Publication date: March 8, 2012
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Tsung Kuo, Shih-Chang Liu, Chia-Shiung Tsai
  • Publication number: 20120049326
    Abstract: In the case of adjacent high voltage nodes in which one node is protected by a lateral BJT clamp, the irreversible burnout due to transient latch-up between the two adjacent high voltage pins of the structure is avoided by increasing the base contact region by including a sinker connected to the base.
    Type: Application
    Filed: August 27, 2010
    Publication date: March 1, 2012
    Inventor: Vladislav Vashchenko
  • Publication number: 20120049319
    Abstract: A parasitic PIN device in a BiCMOS process is disclosed. The device is formed on a silicon substrate, in which an active region is isolated by shallow trenches. The device includes: an N-type region, consisting of N-type pseudo buried layers respectively formed at the bottom of shallow trench isolation oxide layers and extending into the active region; an I-type region, consisting of an N-type collector implantation region formed in the active region and contacting with the N-type region; a P-type region, consisting of a P-doped intrinsic base epitaxial layer on a surface of the active region and contacting with the I-type region. The device of the present invention has a low insertion loss and a high isolation. A manufacturing method of parasitic PIN device in compatible with existing BiCMOS process is also disclosed.
    Type: Application
    Filed: August 25, 2011
    Publication date: March 1, 2012
    Inventors: Wensheng Qian, Ju Hu
  • Patent number: 8119465
    Abstract: A method of fabricating a thin film transistor including: forming a gate on a substrate; forming a gate insulation layer on the substrate to cover the gate; forming an oxide semiconductor layer on the gate insulation layer; forming a translucent layer on a partial region of the oxide semiconductor layer; performing an optical annealing process to transform the oxide semiconductor layer into an oxide channel layer and two ohmic contact layers by using the translucent layer as a mask, where the oxide channel layer is located under the translucent layer, and the ohmic contact layers are respectively located beside the oxide channel layer and are connected with the oxide channel layer; and forming a source and a drain electrically insulated from each other on the gate insulation layer and the ohmic contact layers.
    Type: Grant
    Filed: March 7, 2011
    Date of Patent: February 21, 2012
    Assignee: Au Optronics Corporation
    Inventors: Wu-Hsiung Lin, Ming-Wei Sun
  • Publication number: 20120028432
    Abstract: A bipolar transistor, comprising a collector, a base and an emitter, in which the collector comprises a relatively heavily doped region, and a relatively lightly doped region adjacent the base, and in which the relatively heavily doped region is substantially omitted from an intrinsic region of the transistor.
    Type: Application
    Filed: October 6, 2011
    Publication date: February 2, 2012
    Applicant: Analog Devices, Inc.
    Inventors: Bernard Patrick Stenson, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuiness, William Allan Lane
  • Publication number: 20120018738
    Abstract: Electronic device structures including semiconductor ledge layers for surface passivation and methods of manufacturing the same are disclosed. In one embodiment, the electronic device includes a number of semiconductor layers of a desired semiconductor material having alternating doping types. The semiconductor layers include a base layer of a first doping type that includes a highly doped well forming a first contact region of the electronic device and one or more contact layers of a second doping type on the base layer that have been etched to form a second contact region of the electronic device. The etching of the one or more contact layers causes substantial crystalline damage, and thus interface charge, on the surface of the base layer. In order to passivate the surface of the base layer, a semiconductor ledge layer of the semiconductor material is epitaxially grown on at least the surface of the base layer.
    Type: Application
    Filed: July 26, 2010
    Publication date: January 26, 2012
    Applicant: CREE, INC.
    Inventors: Qingchun Zhang, Anant Agarwal
  • Publication number: 20120007176
    Abstract: A bipolar transistor structure includes an epitaxial layer on a semiconductor substrate, a bipolar transistor device formed in the epitaxial layer and a trench structure formed in the epitaxial layer adjacent at least two opposing lateral sides of the bipolar transistor device. The trench structure includes a field plate spaced apart from the epitaxial layer by an insulating material. The bipolar transistor structure further includes a base contact connected to a base of the bipolar transistor device, an emitter contact connected to an emitter of the bipolar transistor device and isolated from the base contact and an electrical connection between the emitter contact and the field plate.
    Type: Application
    Filed: July 9, 2010
    Publication date: January 12, 2012
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Christoph KADOW, Thorsten MEYER, Norbert KRISCHKE
  • Patent number: 8084307
    Abstract: A method for manufacturing a thin film transistor containing an channel layer 11 having indium oxide, including forming an indium oxide film as an channel layer and subjecting the formed indium oxide film to an annealing in an oxidizing atmosphere.
    Type: Grant
    Filed: November 9, 2007
    Date of Patent: December 27, 2011
    Assignee: Canon Kabushiki Kaisha
    Inventors: Naho Itagaki, Tatsuya Iwasaki, Toru Den
  • Patent number: 8084312
    Abstract: A transistor is fabricated upon a semiconductor substrate, where the yield strength or elasticity of the substrate is enhanced or otherwise adapted. A strain inducing layer is formed over the transistor to apply a strain thereto to alter transistor operating characteristics, and more particularly to enhance the mobility of carriers within the transistor. Enhancing carrier mobility allows transistor dimensions to be reduced while also allowing the transistor to operate as desired. However, high strain and temperature associated with fabricating the transistor result in deleterious plastic deformation. The yield strength of the silicon substrate is therefore adapted by incorporating nitrogen into the substrate, and more particularly into source/drain extension regions and/or source/drain regions of the transistor. The nitrogen can be readily incorporated during transistor fabrication by adding it as part of source/drain extension region formation and/or source/drain region formation.
    Type: Grant
    Filed: January 15, 2010
    Date of Patent: December 27, 2011
    Assignee: Texas Instruments Incorporated
    Inventors: Srinivasan Chakravarthi, P R Chidambaram, Rajesh Khamankar, Haowen Bu, Douglas T. Grider
  • Publication number: 20110312146
    Abstract: This disclosure, in one aspect, provides a method of manufacturing a semiconductor device that includes forming a collector for a bipolar transistor within a semiconductor substrate, forming a base within the collector, forming a patterned isolation layer over the collector and base, forming an emitter layer over the patterned isolation layer, forming an isolation layer over the emitter layer, patterning the patterned isolation layer, the emitter layer and the isolation layer to form at least one emitter structure having an isolation region located on a sidewall thereof, and forming a buried contact in the collector to a depth sufficient to adequately contact the collector.
    Type: Application
    Filed: August 31, 2011
    Publication date: December 22, 2011
    Inventors: Mark Dyson, Daniel C. Kerr, Nace M. Rossi
  • Publication number: 20110312147
    Abstract: Disclosed are embodiments of a bipolar or heterojunction bipolar transistor and a method of forming the transistor. The transistor can incorporate a dielectric layer sandwiched between an intrinsic base layer and a raised extrinsic base layer to reduce collector-base capacitance Ccb, a sidewall-defined conductive strap for an intrinsic base layer to extrinsic base layer link-up region to reduce base resistance Rb and a dielectric spacer between the extrinsic base layer and an emitter layer to reduce base-emitter Cbe capacitance. The method allows for self-aligning of the emitter to base regions and incorporates the use of a sacrificial dielectric layer, which must be thick enough to withstand etch and cleaning processes and still remain intact to function as an etch stop layer when the conductive strap is subsequently formed. A chemically enhanced high pressure, low temperature oxidation (HIPOX) process can be used to form such a sacrificial dielectric layer.
    Type: Application
    Filed: December 14, 2010
    Publication date: December 22, 2011
    Applicant: International Business Machines Corporation
    Inventors: David L. Harame, Russell T. Herrin, Qizhi Liu
  • Publication number: 20110309471
    Abstract: Disclosed are embodiments of an improved transistor structure (e.g., a bipolar transistor (BT) structure or heterojunction bipolar transistor (HBT) structure) and a method of forming the transistor structure. The structure embodiments can incorporate a dielectric layer sandwiched between an intrinsic base layer and a raised extrinsic base layer to reduce collector-base capacitance Ccb, a sidewall-defined conductive strap for an intrinsic base layer to extrinsic base layer link-up region to reduce base resistance Rb and a dielectric spacer between the extrinsic base layer and an emitter layer to reduce base-emitter Cbe capacitance. The method embodiments allow for self-aligning of the emitter to base regions and further allow the geometries of different features (e.g., the thickness of the dielectric layer, the width of the conductive strap, the width of the dielectric spacer and the width of the emitter layer) to be selectively adjusted in order to optimize transistor performance.
    Type: Application
    Filed: June 17, 2010
    Publication date: December 22, 2011
    Applicant: International Business Machines Corporation
    Inventors: Renata Camillo-Castillo, Mattias E. Dahlstrom, Peter B. Gray, David L. Harame, Russell T. Herrin, Alvin J. Joseph, Andreas D. Stricker
  • Publication number: 20110278570
    Abstract: Bipolar transistor structures, methods of designing and fabricating bipolar transistors, methods of designing circuits having bipolar transistors. The method of designing the bipolar transistor includes: selecting an initial design of a bipolar transistor; scaling the initial design of the bipolar transistor to generate a scaled design of the bipolar transistor; determining if stress compensation of the scaled design of the bipolar transistor is required based on dimensions of an emitter of the bipolar transistor after the scaling; and if stress compensation of the scaled design of the bipolar transistor is required then adjusting a layout of a trench isolation layout level of the scaled design relative to a layout of an emitter layout level of the scaled design to generate a stress compensated scaled design of the bipolar transistor.
    Type: Application
    Filed: August 1, 2011
    Publication date: November 17, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Alvin Jose Joseph, Ramana Murty Malladi, James Albert Slinkman
  • Publication number: 20110269289
    Abstract: A method of manufacturing a transistor device (600), wherein the method comprises forming a trench (106) in a substrate (102), only partially filling the trench (106) with electrically insulating material (202), and implanting a collector region (304) of a bipolar transistor (608) of the transistor device (600) through the only partially filled trench (106).
    Type: Application
    Filed: July 8, 2009
    Publication date: November 3, 2011
    Applicant: NXP B.V.
    Inventors: Philippe Meunier-Beillard, Hans Mertens
  • Patent number: 8048753
    Abstract: Shallow trench isolation silicon-on-insulator (SOI) devices are formed with improved charge protection. Embodiments include an SOI film diode and a P+ substrate junction as a charging protection device. Embodiments also include a conductive path from the SOI transistor drain, through a conductive contact, a metal line, a second conductive contact, an SOI diode, isolated from the transistor, a third conductive contact, a second conductive line, and a fourth conductive contact to a P+-doped substrate contact in the bulk silicon layer of the SOI substrate.
    Type: Grant
    Filed: June 12, 2009
    Date of Patent: November 1, 2011
    Assignee: Globalfoundries Inc.
    Inventors: Jingrong Zhou, David Wu, James F. Buller
  • Publication number: 20110250728
    Abstract: According to one embodiment, a method is disclosed for manufacturing a semiconductor device. The method can include forming a base region and an emitter region in a front surface of a semiconductor layer. The method can include forming a first impurity implantation region by implanting first impurity of a first conductivity type into a back surface of the semiconductor layer. The method can include selectively forming a second impurity implantation region by selectively implanting second impurity of a second conductivity type into the first impurity implantation region. In addition, the method can include irradiating the first impurity implantation region and the second impurity implantation region with laser light. A peak of impurity concentration profile in a depth direction of at least one of the first impurity implantation region and the second impurity implantation region before irradiation with the laser light is adjusted to a depth of 0.05 ?m or more and 0.
    Type: Application
    Filed: March 21, 2011
    Publication date: October 13, 2011
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Daisuke Yamashita, Etsuo Hamada, Hideki Nozaki, Hironobu Shibata
  • Publication number: 20110233607
    Abstract: According to one embodiment, a semiconductor device includes a first semiconductor layer of a first conductivity type, a first semiconductor region of a second conductivity type, a second semiconductor region of the first conductivity type, a third semiconductor region of the first conductivity type, a fourth semiconductor region of the second conductivity type, and a control electrode. The first semiconductor region is provided selectively on a first major surface of the first semiconductor layer. The second semiconductor region is provided selectively on the first major surface in contact with the first semiconductor region. The third semiconductor region is provided selectively on a surface of the first semiconductor region. The fourth semiconductor region is provided to face a projecting surface between a side surface and a bottom surface of the first semiconductor region with the second semiconductor region interposed.
    Type: Application
    Filed: March 17, 2011
    Publication date: September 29, 2011
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Satoshi Yanagisawa, Shuji Kamata
  • Patent number: 8026575
    Abstract: The present invention provides a technology that makes it possible to enhance the gain and the efficiency of an RF bipolar transistor. Device isolation is given between a p+ type isolation region and an n+ type collector embedded region and between a p+ type isolation region and an n type collector region (an n+ type collector extraction region) with an isolation section that surrounds the collector extraction region in a plan view and is formed by embedding a dielectric film in a groove penetrating an isolation section, a collector region, and a collector embedded region and reaching a substrate. Further, a current route is formed between an emitter wiring (a wiring) and the substrate with an electrically conductive layer formed by embedding the electrically conductive layer in a groove penetrating a dielectric film, silicon oxide films, a semiconductor region, and the isolation regions and reaching the substrate, and thereby the impedance between the emitter wiring and the substrate is reduced.
    Type: Grant
    Filed: May 5, 2009
    Date of Patent: September 27, 2011
    Assignee: Renesas Electronics Corporation
    Inventor: Hisashi Toyoda
  • Patent number: 8022450
    Abstract: Disclosed are an image sensor and a method for manufacturing the same. The image sensor includes a first pixel having a first photodiode and a first readout circuit and a second pixel having a second photodiode and a second readout circuit. The second pixel is aligned at one side of the first pixel, and a light receiving area of the first photodiode is different from a light receiving area of the second photodiode.
    Type: Grant
    Filed: September 21, 2009
    Date of Patent: September 20, 2011
    Assignee: LG Innotek Co., Ltd.
    Inventor: Gun Hyuk Lim
  • Patent number: 8003477
    Abstract: A method is described for monolithically forming a first memory level above a substrate, the method including: (a) forming a plurality of first substantially parallel, substantially coplanar conductors above the substrate, the first conductors extending in a first direction; (b) forming a plurality of vertically oriented contiguous p-i-n diodes above the first conductors, the contiguous p-in diode comprising semiconductor material crystallized in contact with a silicide, silicide-germanide, or germanide layer; (c) forming a plurality of second substantially parallel, substantially coplanar conductors, the second conductors above the contiguous p-i-n diodes, the second conductors extending in a second direction different from the first direction, each contiguous p-i-n diode vertically disposed between one of the first conductors and one of the second conductors; (d) and forming a plurality of dielectric rupture antifuses, each dielectric rupture antifuse disposed between one of the contiguous p-i-n diodes and
    Type: Grant
    Filed: February 2, 2010
    Date of Patent: August 23, 2011
    Assignee: SanDisk 3D LLC
    Inventor: Scott Brad Herner
  • Patent number: 7998844
    Abstract: A process for fabricating a highly stable and reliable semiconductor, comprising: coating the surface of an amorphous silicon film with a solution containing a catalyst element capable of accelerating the crystallization of the amorphous silicon film, and heat treating the amorphous silicon film thereafter to crystallize the film.
    Type: Grant
    Filed: July 15, 2008
    Date of Patent: August 16, 2011
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Hisashi Ohtani, Akiharu Miyanaga, Takeshi Fukunaga, Hongyong Zhang
  • Publication number: 20110176244
    Abstract: An electrostatic discharge (ESD) protection clamp (21, 21?, 70, 700) for protecting associated devices or circuits (24), comprises a bipolar transistors (21, 21?, 70, 700) in which doping of facing base (75) and collector (86) regions is arranged so that avalanche breakdown occurs preferentially within a portion (84, 85) of the base region (74, 75) of the device (70, 700) away from the overlying dielectric-semiconductor interface (791). Maximum variations (?Vt1)MAX of ESD triggering voltage Vt1 as a function of base-collector spacing dimensions D due, for example, to different azimuthal orientations of transistors (21, 21?, 70, 700) on a semiconductor die or wafer is much reduced. Triggering voltage consistency and manufacturing yield are improved.
    Type: Application
    Filed: January 20, 2010
    Publication date: July 21, 2011
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Amaury Gendron, Chai Ean Gill, Changsoo Hong
  • Publication number: 20110175198
    Abstract: A stackable electrostatic discharge (ESD) protection clamp (21) for protecting a circuit core (24) comprises, a bipolar transistor (56, 58) having a base region (74, 51, 52, 85) with a base contact (77) therein and an emitter (78) spaced a lateral distance Lbe from the base contact (77), and a collector (80, 86, 762) proximate the base region (74, 51, 52, 85). The base region (74, 51, 52, 85) comprises a first portion (51) including the base contact (77) and emitter (78), and a second portion (52) with a lateral boundary (752) separated from the collector (86, 762) by a breakdown region (84) whose width D controls the clamp trigger voltage, the second portion (52) lying between the first portion (51) and the boundary (752). The damage-onset threshold current It2 of the ESD clamp (21) is improved by increasing the parasitic resistance Rbe of the emitter-base region (74, 51, 52, 85), by for example, increasing Lbe or decreasing the relative doping density of the first portion (51) or a combination thereof.
    Type: Application
    Filed: November 30, 2010
    Publication date: July 21, 2011
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Rouying Zhan, Amaury Gendron, Chai Ean Gill
  • Patent number: 7981734
    Abstract: A manufacturing method of a thin film transistor includes forming a pair of source/drain electrodes on a substrate, such that the source/drain electrodes define a gap therebetween; forming low resistance conductive thin films, which define a gap therebetween, on the source/drain electrodes; and forming an oxide semiconductor thin film layer on upper surface of the low resistance conductive thin films and in the gap defined between the low resistance conductive thin films so that the oxide semiconductor thin film layer functions as a channel. The low resistance conductive thin films and the oxide semiconductor thin film layer are etched so that side surfaces of the resistance conductive thin films and corresponding side surfaces of the oxide semiconductor thin film layer coincide with each other in a channel width direction of the channel. A gate electrode is mounted over the oxide semiconductor thin film layer.
    Type: Grant
    Filed: July 8, 2009
    Date of Patent: July 19, 2011
    Assignees: Kochi Industrial Promotion Center, Casio Computer Co., Ltd.
    Inventors: Mamoru Furuta, Takashi Hirao, Hiroshi Furuta, Tokiyoshi Matsuda, Takahiro Hiramatsu, Hiromitsu Ishii, Hitoshi Hokari, Motohiko Yoshida
  • Publication number: 20110169137
    Abstract: An NPN bipolar junction transistor is disclosed that exhibits a collector-to-emitter breakdown voltage greater than 10 volts and a beta greater than 300. The large value of beta is obtained by fabricating the transistor with an extra N-type layer that reduces recombination of electrons and holes.
    Type: Application
    Filed: March 15, 2010
    Publication date: July 14, 2011
    Inventors: Cheng-Chi Lin, Shuo-Lun Tu, Shih-Chin Lien
  • Publication number: 20110168981
    Abstract: Carbon nanotube (CNT)-based devices and technology for their fabrication are disclosed. The planar, multiple layer deposition technique and simple methods of change of the nanotube conductivity type during the device processing are utilized to provide a simple and cost effective technology for large scale circuit integration. Such devices as p-n diode, CMOS-like circuit, bipolar transistor, light emitting diode and laser are disclosed, all of them are expected to have superior performance then their semiconductor-based counterparts due to excellent CNT electrical and optical properties. When fabricated on semiconductor wafers, the CNT-based devices can be combined with the conventional semiconductor circuit elements, thus producing hybrid devices and circuits.
    Type: Application
    Filed: January 7, 2011
    Publication date: July 14, 2011
    Inventor: ALEXANDER KASTALSKY
  • Publication number: 20110159659
    Abstract: This invention disclosed a novel manufacturing approach of collector and buried layer of a bipolar transistor. One aspect of the invention is that an oxide-nitride-oxide (ONO) sandwich structure is employed instead of oxide-nitride dual layer structure before trench etching. Another aspect is, through the formation of silicon oxide spacer in trench sidewall and silicon oxide remaining in trench bottom in the deposition and etch back process, the new structure hard mask can effectively protect active region from impurity implanted in ion implantation process.
    Type: Application
    Filed: December 28, 2010
    Publication date: June 30, 2011
    Inventors: Tzuyin CHIU, TungYuan Chu, YungChieh Fan, Wensheng Qian, Fan Chen, Jiong Xu, Haifang Zhang
  • Publication number: 20110147892
    Abstract: A structure and fabrication method for a bipolar transistor with shallow trench isolation (STI) comprises a collector formed by implanting first electric type impurity in active area; pseudo buried layers at the bottom of STI at both sides of active area by implanting heavy dose of first electric type impurity; deep contacts through field oxide to connect to pseudo buried layers and to pick up the collector; a base, a thin film deposited on the collector and doped with second electric type impurity; an emitter, a polysilicon film doped by heavy dose implant of first electric type impurity. This transistor has smaller device area, less parasitic effect, less photo layers and lower process cost.
    Type: Application
    Filed: December 13, 2010
    Publication date: June 23, 2011
    Inventors: Tzuyin Chiu, TungYuan Chu, Wensheng Qian, YungChieh Fan
  • Publication number: 20110140069
    Abstract: A first opening and a second opening are formed at the same time over a first metal wiring and a second metal wiring, respectively which are provided as the same layer on a substrate on which a transistor for selecting a memory cell is formed. Then, a variable resistor and an upper electrode are deposited on a whole surface so as to completely fill the first opening with the upper electrode but not to completely fill the second opening with it. Thereafter, a variable resistive element is formed in the first opening and a via hole to connect to the third metal wiring (bit line), in the second opening, at the same time, by performing back-etching until a surface of the second metal wiring is exposed at a bottom of the second opening.
    Type: Application
    Filed: November 4, 2010
    Publication date: June 16, 2011
    Inventor: Yushi INOUE
  • Publication number: 20110133247
    Abstract: SCR device is modified to improve turn-on speed for CDM stress conditions. A zener diode is integrated inside SCR device to create an internal feedback and improve turn-on speed. The zener diode is designed as a p+n+ diode in the boundary of the well-substrate junction. In the preferred implementation, zener diode is integrated inside the DSCR and is called zener-triggered DSCR. Zener-triggered DSCR reduces the first breakdown voltage to provide protection for thin gate oxide during HBM stress conditions. At the same time, this device increases turn-on speed to provide protection for CDM stress conditions.
    Type: Application
    Filed: December 8, 2009
    Publication date: June 9, 2011
    Inventors: Hossein Sarbishaei, Manoj Sachdev
  • Patent number: 7955911
    Abstract: A thin film transistor liquid crystal display (TFT-LCD) pixel unit and a method for manufacturing the same. The pixel unit comprises a gate line and a gate electrode formed on a substrate and a first gate insulating layer, an active layer, and a doped layer that are sequentially formed on the gate line and the gate electrode. An intercepting trench is formed on the gate line to cut off the doped layer and the active layer on the gate line. A second insulating layer covers the intercepting trench and the substrate where the gate line and the gate electrode are not formed. A pixel electrode is formed on the second insulating layer and a part of the pixel electrode overlaps one of a source and drain electrodes.
    Type: Grant
    Filed: December 7, 2007
    Date of Patent: June 7, 2011
    Assignee: Beijing Boe Optoelectronics Technology Co., Ltd.
    Inventors: Haijun Qiu, Zhangtao Wang, Tae Yup Min, Xu Chen
  • Publication number: 20110121428
    Abstract: An improved bipolar transistor (40, 40?) is provided, manufacturable by a CMOS IC process without added steps. The improved transistor (40, 40?) comprises an emitter (48) having first (482) and second (484) portions of different depths (4821, 4841), a base (46) underlying the emitter (48) having a central portion (462) of a first base width (4623) underlying the first portion (482) of the emitter (48), a peripheral portion (464) having a second base width (4643) larger than the first base width (4623) partly underlying the second portion (484) of the emitter (48), and a transition zone (466) of a third base width (4644) and lateral extent (4661) lying laterally between the first (462) and second (464) portions of the base (46), and a collector (44) underlying the base (46). The gain of the transistor (40, 40?) is much larger than a conventional bipolar transistor (20) made using the same CMOS process.
    Type: Application
    Filed: November 20, 2009
    Publication date: May 26, 2011
    Applicant: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Xin Lin, Daniel J. Blomberg, Jiang-Kai Zuo
  • Patent number: 7948017
    Abstract: A method of forming an imaging array includes providing a single crystal silicon substrate having an internal separation layer, forming a patterned conductive layer proximate a first side of the single crystal silicon substrate, forming an electrically conductive layer on the first side of the single crystal silicon substrate and in communication with the patterned conductive layer, securing the single crystal silicon substrate having the patterned conductive layer and electrically conductive layer formed thereon to a glass substrate with the first side of the single crystal silicon substrate proximate the glass substrate, separating the single crystal silicon substrate at the internal separation layer to create an exposed surface opposite the first side of the single crystal silicon substrate and forming an array comprising a plurality of photosensitive elements and readout elements on the exposed surface.
    Type: Grant
    Filed: June 19, 2009
    Date of Patent: May 24, 2011
    Assignee: Carestream Health, Inc.
    Inventors: Timothy J. Tredwell, Jackson Lai
  • Publication number: 20110115054
    Abstract: A diode comprises a substrate formed of a first material having a first doping polarity. The substrate has a planar surface and at least one semispherical structure extending from the planar surface. The semispherical structure is formed of the first material. A layer of second material is over the semispherical structure. The second material comprises a second doping polarity opposite the first doping polarity. The layer of second material conforms to the shape of the semispherical structure. A first electrical contact is connected to the substrate, and a second electrical contact is connected to the layer of second material. Additional semiconductor structures are formed by fabricating additional layers over the original layers.
    Type: Application
    Filed: November 19, 2009
    Publication date: May 19, 2011
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kangguo Cheng, Toshiharu Furukawa, Robert R. Robison, William R. Tonti, Richard Q. Williams
  • Publication number: 20110115047
    Abstract: Methods and structures for a semiconductor device can use mask openings of varying widths to form structures of different depths, different materials, and different functionality. For example, processes and structures for forming shallow trench isolation, deep isolation, trench capacitors, base, emitter, and collector, among other structures for a lateral bipolar transistor are described.
    Type: Application
    Filed: June 4, 2010
    Publication date: May 19, 2011
    Inventors: Francois Hebert, Aaron Gibby, Stephen Joseph Gaul
  • Patent number: 7943441
    Abstract: A method of forming a thin-film transistor array substrate is provided. A first mask is used to define a source, a drain and a channel on a substrate. A dielectric layer is formed to cover the source, the drain, the channel and the substrate. A second mask is used to define a patterned photoresist and the dielectric layer. A transparent conductive layer is formed to cover the patterned photoresist and the substrate. A lift-off process is performed to remove the patterned photoresist and a portion of the transparent conductive layer disposed on the patterned photoresist. A third mask is used to define a gate disposed on the dielectric layer.
    Type: Grant
    Filed: October 18, 2009
    Date of Patent: May 17, 2011
    Assignee: Chunghwa Picture Tubes, Ltd.
    Inventors: Chan-Chang Liao, Hsien-Kun Chiu, Wei-Pang Yen, Chao-Huan Hsu, Kun-Yuan Huang
  • Publication number: 20110101444
    Abstract: An apparatus including an electrostatic discharge (ESD) protection device comprising a semiconductor having first, second and third regions arranged to form a transistor, wherein the first region is doped with a first impurity of a first conductivity type and is separated from the second region which is doped with a second impurity of a second conductivity type opposite the first type, and wherein a dimensional constraint of the regions defines an operational threshold of the ESD protection device. In one example, the separation between a collector and an emitter of a bipolar transistor defines a trigger voltage to cause the electrostatic discharge protection device to become conducting. In another example, a width of a bipolar transistor base controls a holding voltage of the electrostatic discharge protection device.
    Type: Application
    Filed: November 4, 2009
    Publication date: May 5, 2011
    Applicant: Analog Devices, Inc.
    Inventors: Edward John Coyne, Patrick Martin McGuinness, Paul Malachy Daly, Bernard Patrick Stenson, David J. Clarke, Andrew David Bain, William Allan Lane
  • Publication number: 20110101486
    Abstract: A bipolar transistor comprising an emitter region, a base region and a collector region, and a guard region spaced from and surrounding the base. The guard region can be formed in the same steps that form the base, and can serve to spread out the depletion layer in operation.
    Type: Application
    Filed: November 2, 2009
    Publication date: May 5, 2011
    Applicant: Analog Devices, Inc.
    Inventors: William Allan Lane, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuiness, Bernard Patrick Stenson