Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

Abstract: The present invention relates to a dopant gas generating device for supplying the dopant gas to the ion mobility spectrometry instrument, comprising: a doping container; an air inlet having an inlet end connecting with an upstream side of a carrier gas passage and an outlet end connecting with the doping container; an air outlet having an entrance end connecting with the doping container and an exit end connecting with an downstream side of the carrier gas passage; a dopant gas generating unit for releasing the dopant gas, wherein the dopant gas generating unit is disposed within the doping container. Through disposing the dopant gas generating unit, which is used for releasing the dopant gas, within the doping container, the dopant gas in the present invention is applicable with not only a solid state dopant, but also a liquid state dopant.

Abstract: The helium sensor comprises a housing that encloses a detection chamber. A side of the housing is closed by a permeable wall that is selective for helium. In the detection chamber, there is located an ion getter pump comprising an anode, a cathode and a magnetic field. The cathode, or a cathode leg is made of beryllium. Beryllium has a low atomic mass, whereby the likewise light-weight helium ions can be better incorporated into the cathode material.

Abstract: A detector system with a portal including a plurality of output ports that direct a plurality of output airstreams in an essentially horizontal direction, and a plurality of intake ports that pull in air. The system also includes at least one concentrator coupled to at least one of the intake ports, and a detector coupled to the concentrator. The horizontally oriented output airstreams and multiple intake ports provide a system that can rapidly screen multiple people for explosives and other substances.

Abstract: A vacuum ionization gauge includes a cold cathode, a shield electrode, an anode ring, and a collector. The shield electrode includes a receiving space. The anode ring is located in the receiving space of the shield electrode. The cold cathode includes a field emission unit and a grid electrode corresponding to the field emission unit. The field emission unit includes at least one emitter. Each of the at least one emitter includes a carbon nanotube pipe. The carbon nanotube pipe has a first end, a second end, and a main body connecting to the first end and the second end. The second end has a plurality of carbon nanotube peaks.

Abstract: A testing device includes a pressure vessel, a mounting stand disposed in an internal space of the pressure vessel, on which a device to be tested is mounted, test electrodes, disposed in the internal space of the pressure vessel, that supply a test voltage to the device to be tested mounted on the mounting stand, and a pressurization unit that raises the pressure of the internal space of the pressure vessel. The test voltage is supplied from the test electrodes to the device to be tested mounted on the mounting stand, and testing of the device to be tested is carried out, in a condition that the pressure of the internal space of the pressure vessel is raised by the pressurization unit.

Abstract: A method for maintaining one or more operating conditions within a battery operated flame ionization detector (BOFID). The method includes receiving one or more desired values that correspond to the operating conditions and receiving one or more measured values from one or more sensors configured to monitor the operating conditions. After receiving the desired values and the measured values, the method sends one or more commands to a controller disposed inside the BOFID to achieve the desired values based on the measured values.

Abstract: A technique for a nanodevice is provided. A reservoir is separated into two parts by a membrane. A nanopore is formed through the membrane, and the nanopore connects the two parts of the reservoir. The nanopore and the two parts of the reservoir are filled with ionic buffer. The membrane includes a graphene layer and insulating layers. The graphene layer is wired to first and second metal pads to form a graphene transistor in which transistor current flowing through the graphene transistor is modulated by charges or dipoles passing through the nanopore.

Abstract: A beam profile measurement detector is a tool to efficiently verify dose distributions created with active methods of a clinical proton beam delivery. A Multi-Pad Ionization Chamber (MPIC) has 128 ionization chambers arranged in one plane and measure lateral profiles in fields up to 38 cm in diameter. The MPIC pads have a 5 mm pitch for fields up to 20 cm in diameter and a 7 mm pitch for larger fields, providing an accuracy of field size determination of about 0.5 mm. The Multi-Layer Ionization Chamber (MLIC) detector contains 122 small-volume ionization chambers stacked at a 1.82 mm step (water-equivalent) for depth-dose profile measurements. The MLIC detector can measure profiles up to 20 cm in depth, and determine the 80% distal dose fall-off with about 0.1 mm precision. Both detectors can be connected to the same set of electronics modules, which form the detectors' data acquisition system.

Abstract: An arrangement for measuring process parameters within a processing chamber is provided. The arrangement includes a probe arrangement disposed in an opening of an upper electrode. Probe arrangement includes a probe head, which includes a head portion and a flange portion. The arrangement also includes an o-ring disposed between the upper electrode and the flange portion. The arrangement further includes a spacer made of an electrically insulative material positioned between the head portion and the opening of the upper electrode to prevent the probe arrangement from touching the upper electrode. The spacer includes a disk portion configured for supporting an underside of the flange portion. The spacer also includes a hollow cylindrical portion configured to encircle the head portion. The spacer forms a right-angled path between the o-ring and an opening to the processing chamber to prevent direct line-of-sight path between the o-ring and the opening to the processing chamber.

Abstract: Methods and systems for detecting and/or collecting particles are disclosed. At least some of the particles are electrically charged by a charger (122). At least some of the charged particles are collected by a collector (140). Information indicating the number of the detected/collected particles based on measured electrical charges of the charged particles is obtained by a processor (170).

Abstract: A detection method of detecting a target substance, the method includes exciting the target substance by irradiating an atmosphere of a detection space with light having a first wavelength that excites the target substance from a ground state to an excited state on the basis of the energy level structure of the target substance; ionizing the target substance by irradiating the atmosphere of the detection space with light having a second wavelength that excites the target substance from the excited state to an energy state substantially equal to or higher than a vacuum level; making the ionized target substance adsorb to a detector by electric field acceleration; and detecting the amount of adsorption of the target substance.

Abstract: A discharge ionization current detector is provided with a dielectric tube through which plasma generating gas flows, a plasma generating unit formed from one section of the dielectric tube in a flow direction of the plasma generating gas, a casing connected to a lower end portion, in the flow direction of the plasma generating gas, of the dielectric tube, a sample ionization unit provided inside the casing, and an ion current detection unit for detecting a sample component ionized by the sample ionization unit. The lower end, in the flow direction of the plasma generating gas, of the dielectric tube protrudes into the space inside the casing.

Abstract: Embodiments of the invention relate to device, method, and system for separation and/or detection of biological cells and biomolecules using micro-channels, magnetic interactions, and magnetic tunnel junctions. The micro-channels can be integrated into a microfluidic device that may be part of an integrated circuit. Magnetic interactions used for the separation are created, in part, by magnetic stripes associated with the micro-channels. Detection of biological cells and biomolecules is effectuated by a magnetic tunnel junction sensor that comprises two ferromagnetic layers separated by a thin insulating layer. The magnetic tunnel junction sensor can be integrated into a silicon based device, such a microfluidic device, an integrated circuit, or a microarray to achieve rapid and specific separation and/or detection of biomolecules and cells.

Abstract: A discharge ionization current detector that is durable and produced at a low cost is provided. An electrode structure of a dielectric-coated metal tube, with an insulator-coated metal wire included therein, is inserted from above into a first gas passage including a dielectric tube. The metal tube is connected to the ground on the upstream side of the first gas passage. One end of the metal wire is extracted from the upstream side of the first gas passage to the outside and connected to a bias power source. An area is not covered with the insulator is provided at the other end of the wire. This area is arranged in a second gas passage, which extends from the downstream end of the first gas passage. A metal electrode consisting of a flanged metal tube is placed in the second gas passage and connected to an ionization current detecting circuit 34.

Abstract: A smoke detection sensor ion chamber has a capacitance and a change in the permittivity of that capacitance dielectric (ionized air in the chamber) may be used to detect the presence of smoke therein. Smoke from typical fires is mainly composed of unburned carbon that has diffused in the surrounding air and rises with the heat of the fire. The permittivity of the carbon particles is about 10 to 15 times the permittivity of clean air. The addition of the carbon particles into the air in the ion chamber changes in the permittivity thereof that is large enough to measure by measuring a change in capacitance of the ion chamber.

Abstract: A detection circuit arrangement in a plasma processing chamber having movable lower electrode is provided. The arrangement includes flexible connector having a first flexible connector end, a second flexible connector end and at least a slit. At least portion of the slit is disposed in a direction parallel to a line drawn between two flexible connector ends. One end is coupled to the movable lower electrode and another end is coupled to a component of the plasma processing chamber. Flexible connector provides low impedance current path between the movable lower electrode and the component of the plasma processing chamber. The arrangement also includes means for detecting current flow through conductor material disposed on one side of the slit. The means for detecting includes at least a coil wound around the conductor material and a detector circuit coupled to the coil for detecting the current flow interruption due to a tear.

Abstract: A self charging ion current sensing circuit is provided. The self charging ion current sensing circuit is coupled to spark generation circuitry, and utilizes the spark plug electrodes as the ion current sensing electrodes. The self charging is achieved by utilizing the spark current during an ignition event to charge an ion bias capacitor. After the ignition event, the charge voltage build up on the ion bias capacitor is used to provide an ion current across the spark plug gap. The ion current is passed through an offset stage that translates the ion current sense voltage to a voltage that can be buffered and amplified from a single power source available in automotive and vehicular applications. The output of the circuit provides tri-state information, including spark current, null current, and linear representation of ion sense current.

Abstract: A method and apparatus for producing particle density map images of fluidised particles by electrical capacitance tomography (ECT) in a fluidized bed apparatus allows for measuring online the liquid content of fluidized particles during the fluidization process and for recalibration of the fluidized particle permittivity during fluidization, allowing for online recalibration of an ECT system when the liquid content of particles changes, such as for fluidized bed drying or granulation processes. Recalibration measurements are made using reference electrodes positioned to measure the capacitance of the densely fluidized particles near the side walls of the fluidized bed. The electrodes of an ECT sensor array may be used to make the recalibration measurements which can be used to provide online liquid content measurement, such as moisture content, for the fluidized particles without stopping out stopping fluidization. The liquid content information may be used for process control.

Abstract: An atomic flux measurement device for measuring the amount of dissociated atomic flux produced by discharge and emitted from a plasma generation cell into a vacuum camber. The atomic flux measurement device includes a counter electrode body including a pair of first and second sheet-like electrodes that are arranged substantially parallel to each other with a predetermined spacing between them, a direct-current power supply configured to maintain the first sheet-like electrode at a negative potential so that atoms attached to the inner surface of the sheet-like electrode undergo self-ionization and to apply a direct-current voltage between the first and second sheet-like electrodes so that a current flows between the first and second sheet-like electrodes, and a direct-current ammeter configured to measure a current flowing due to electrons emitted by the self-ionization of the dissociated atoms attached to the inner surface of the first sheet-like electrode.

Abstract: A plasma monitoring method measures in-situ a resistance of and a current flowing in a side wall. A monitoring system has two sensors in a plasma chamber, each having upper and lower electrodes. An external resistance element is connected only to one of the two sensors, in parallel to the wires extending from the upper and lower electrodes of the sensor concerned. Consequently, a resistance between the upper and lower electrodes is different in the two sensors, and two different values of potential difference between the upper and lower electrodes are obtained in-situ. Because a resistance value of the external resistance element is known, a resistance value of a side wall of a contact hole per one contact hole is obtained in-situ, and consequently an electric current flowing in the side wall of the contact hole per one contact hole can be obtained.

Abstract: A low-frequency high AC voltage from an excitation voltage power source (14) is applied between one electrode (8) and two other electrodes (9A and 9B) to generate a low-frequency AC-excited dielectric barrier discharge within a gas passage (3), thereby creating atmospheric pressure non-equilibrium micro-plasma. A sample gas is mixed with hydrogen inside the passage of a nozzle (51), and further mixed with air outside an exit port (53) to burn, forming a hydrogen flame (57). Then, the sample gas reaches an ionization area (56), where the sample components are ionized due to the effect of light emitted from the plasma. Meanwhile, water molecules generated in the hydrogen flame (57) are supplied into the ionization area (56), whereby some of the sample-molecule ions are hydrated while the others undergo a reaction to form a hydroxonium ion.

Abstract: A product ion spectrum is created on the basis of MS2 analysis data respectively obtained for a parent compound and a metabolite (S1 and S2). Additionally, a neutral loss spectrum, in which the mass of each product ion is replaced with a mass difference between the mass of the product ion and that of a precursor ion, is created (S3). Then, a common peak having the same mass in both the parent compound and the metabolite is extracted (S4), and a complementary peak appearing at a position corresponding to the difference between the mass of the common peak and that of the precursor ion is extracted (S5); the complementary peak corresponding to a common peak located on the product ion spectrum appears on the neutral loss spectrum, while the complementary peak corresponding to a common peak located on the neutral loss spectrum appears on the product ion spectrum.

Abstract: A detection membrane is joined to a first surface of an electrolyte membrane. After the detection membrane is hydrogenated, oxygen is supplied to a space facing a second surface of the electrolyte membrane. If the electrolyte membrane has a defect, oxygen leaks to the first surface, resulting in a change in resistance of the detection membrane owing to dehydrogenation of the detection membrane. The defect is recognized by this change. An air electrode is joined to the second surface, and an electric circuit is connected between the detection membrane and the air electrode. After hydrogenating the detection membrane and ionizing oxygen supplied to a space facing the air electrode, oxygen ions permeate through the electrolyte membrane and dehydrogenate the detection membrane. Uniformity of the oxygen ion conductivity is examined by measuring resistance of the detection membrane, which varies depending on the amount of oxygen ions, for each region.

Abstract: The invention relates to a device for testing an integrated circuit. The device comprises a plate for receiving and subjecting the integrated circuit to a test. The plate comprises a component for powering and operating the integrated circuit and another component for measuring the operation of the integrated circuit during the test. The device also comprises an irradiation device for subjecting the circuit to a proton bombardment and a mask with a variable thickness provided between a bombardment access region on the integrated circuit and an established zone of the integrated circuit.

Abstract: An automatic variable gain amplifier is provided. The automatic variable gain amplifier automatically adjusts the amplification of a signal, and in one embodiment, an ion signal, based on the amplitude of the peaks of the signal. The automatic variable gain amplifier detects the peaks of the signal, compares them to a threshold value, and, based on this comparison, varies the amount by which the signal is amplified. The automatic variable gain amplifier produces a composite output waveform for an input waveform with an amplitude that may vary over a plurality of orders of magnitude.

Abstract: A particulate matter detection device including a first electrode having one surface covered with a dielectric material; a second electrode which is disposed on the side of the one surface of the first electrode via a space where a gas including particulate matter flows and which performs one or both of the formation of a discharge and an electric field by a voltage applied between the first electrode and the second electrode; a pair of measurement electrodes disposed on the surface of the dielectric material so as to face each other; and a protective film disposed on the surfaces of the pair of measurement electrodes and having a volume resistivity of 10 ?cm to 1012 ?cm, where the variate of the electric properties between the pair of measurement electrodes is measured, and the amount of the collected particulate matter can be obtained.

Abstract: The flame ionization detector, which comprises a supply and an ignition device (7) for the combustible gas, a supply for the sample gas, a combustion chamber (4) in which the sample gas is ionized by the flame, and electrodes (8, 1) to which a voltage is applied in order to generate and measure the ion current, is distinguished in that it is constructed as an integrated planar system of at least three parallel platelet-like substrates (1, 2, 3) which are connected to one another and are processed by microsystem technology methods, with a central substrate (1) comprising nozzles (5, 6) for the gases and the ignition device (7) and a recess which forms a part of the combustion chamber (4), is completed by recesses in the neighboring substrates (2, 3) and is essentially closed together with the nozzle region by these substrates (2, 3), and the neighboring substrates (2, 3) comprise supply channels (10, 11) for the gases.

Abstract: There is provided a fine particle detection system with a fine particle sensor, a cable and a sensor drive control device. The fine particle sensor has an ion source unit with first and second electrodes, a particle charging unit and inner and outer sensor casings. The cable has a power supply wiring line connected to the second electrode, an inner shield line electrically continuous with the inner sensor casing and an outer shield line electrically continuous with the outer sensor casing. The sensor drive control device has an ion-source power supply circuit, a signal current detection circuit, an inner circuit casing electrically continuous with a first output terminal of the ion-source power supply circuit and surrounding the ion-source power supply circuit and an outer circuit casing connected to the ground potential and shielding the ion-source power supply circuit, the signal current detection circuit and the inner circuit casing.

Abstract: A monitor that can detect at least one molecule. The monitor includes a housing with a passage that can receive a sample, and a photocathode that is located within the housing. The monitor also includes a first ultraviolet light source that can direct ultraviolet light onto the photocathode to create electrons that ionize molecules within the sample, and a detector that is coupled to the housing to detect at least one ionized molecule. The monitor enables electron ionization (EI) of a sample for chemical analysis without the disadvantages of current methods that use a hot filament or other thermal cathode devices.

Abstract: An oxygen detection method, includes: preparing a grid, an ion collector, and a filament in which an oxide are formed on a surface of metal; controlling a filament current flowing to the filament so that an emission current becomes constant; discharging thermionic electrons which are caused by heat generation by applying the filament current, and generating ions by ionizing a gas; capturing the ions with the ion collector; and detecting oxygen being present in a vacuum processing chamber by measuring a filament current value.

Abstract: In a particle beam therapy system which scans a particle beam and irradiates the particle beam to an irradiation position of an irradiation subject and has a dose monitoring device for measuring a dose of the particle beam and an ionization chamber smaller than the dose monitoring device, the ionization chamber measuring a dose of a particle beam passing through the dose monitoring device, the dose of the particle beam irradiated by the dose monitoring device is measured; the dose of the particle beam passing through the dose monitoring device is measured by the small ionization chamber; and a correction coefficient of the dose measured by the dose monitoring device corresponding to the irradiation position is found based on the dose of the particle beam measured by the small ionization chamber.

Abstract: A measuring device for carrying out purity measurements in a media circuit of a power station with an ion exchanger device and a measuring means for measuring a parameter of a media current flowing through the ion exchanger device is described. In order to obtain measurements in a rapid and reliable manner at the start up of the ion exchanger device, for example during the start-up phase of the power station, it is suggested that the ion exchanger device has two flow paths for two different operating modes of the power station.

Abstract: The invention relates to a device used to measure exhaust gas having ionised particles in a motor vehicle. The device comprises an ionising device which includes an electrode arrangement and a charge measuring device. The electrode arrangement comprises at least one pair of electrodes including at least one electrode and at least one counter electrode. A dielectric is arranged between the electrode and the counter electrode in order to generate a dielectrically impeded discharge. The invention also relates to a corresponding method.

Abstract: In various embodiments of the invention, a cargo container can be monitored at appropriate time intervals to determine that no controlled substances have been shipped with the cargo in the container. The monitoring utilizes reactive species produced from an atmospheric analyzer to ionize analyte molecules present in the container which are then analyzed by an appropriate spectroscopy system. In an embodiment of the invention, a sorbent surface can be used to absorb, adsorb or condense analyte molecules within the container whereafter the sorbent surface can be interrogated with the reactive species to generate analyte species characteristic of the contents of the container.

Abstract: A photo ionization detector (PID) is provided for selectively determining various compounds or gases present in a breath sample. The PID, comprises a substrate comprising a gas ionization chamber, at least one pair of ion sensing electrodes, and at least one amplifying circuit; and an ultraviolet (UV) ionization source to transmit a UV light beam into the gas ionization chamber. A system comprises the PID is also provided. A method of detecting a response pattern for various compounds or gases in breath using PID is also provided.

Abstract: An ionization vacuum gauge includes a cathode, an anode and an ion collector. The anode is surrounding the cathode. The ion collector is surrounding the anode. The cathode, the anode and the ion collector are concentrically aligned and arranged in that order. The anode comprises a carbon nanotube structure including a plurality of carbon nanotubes.

Abstract: An example embodiment relates to a plasma diagnostic apparatus that exists outside of a plasma generation chamber. The plasma diagnostic apparatus is configured to recognize and/or diagnose a state of plasma using a signal flowing from a floated electrode of a plasma generation apparatus to determine a diagnostic factor of the plasma.

Abstract: The presently disclosed embodiments are directed to the detection and monitoring of corona effluent. The present embodiments pertain to a corona sensing device that employs a film of organic charge transporting material, as the active component in a corona effluent sensing device, that is disposed onto a patterned electrode bearing support member.

Abstract: Disclosed are a method and system for measuring the electron energy distribution function (EEDF) in a plasma which has a pronounced drifting Maxwellian component of the EEDF. The method comprises fitting an acquired unfiltered electron current vs. bias voltage curve to a functional form which assumes an EEDF comprising at least one stationary Maxwellian component and at least one drifting Maxwellian component. The method and system allow more accurate characterization of plasmas with electron components with pronounced drift, such as plasmas in microwave surface wave plasma (SWP) sources.

Abstract: A gas ionization sensor is disclosed. In one aspect, the sensor includes at least one sensing element on a substrate. The sensing element includes: at least one nanowire and a counter electrode which surrounds the nanowire, the surrounding electrode being electrically isolated from the nanowire and being at a predetermined gap from the nanowire, the gap allowing penetration of a gas or a gas mixture between the nanowire and the surrounding electrode. The sensing element also includes a voltage source electrically connected between the nanowire and the surrounding electrode for providing a voltage difference between the nanowire and the surrounding electrode, and measurement circuitry for measuring a breakdown voltage and/or an electrical discharge current and/or a prebreakdown current through the gap.

Abstract: The invention is comprised, in part, of a surface that contains more than one component or construct. Such heterogenous surface compositions and configurations, related systems and methods for sensing particle or analyte interaction therewith can selectively and/or differentially interact with a range of particles/analytes, in lieu of specific molecular sensor-analyte interactions for each particle. These interactions of various analytes or particles can differ sufficiently in strength and range between multiple analyte types or particles to effect a separation of analytes or particles mixtures, in a way that requires no sensing or detection. With incorporation of a sensing mechanism, discrimination/detection of different compounds within an analyte mixture can be accomplished.

Abstract: A technique for reducing an electromagnetic noise entering an electrode or a drift of a signal due to a fluctuation in the ambient temperature is provided to improve the S/N ratio of a signal originating from a component of interest. A dummy electrode 11 having the same structure as an ion-collecting electrode 10 is provided within a lower gas passage 14 at a position where dilution gas with no sample gas mixed therein flows. A differential amplifier 14 is provided to perform differential detection between output A of a current amplifier 21 connected to the ion-collecting electrode 10 and output B of a current amplifier 22 connected to the dummy electrode 11. The differential signal is free from a common mode noise or drift and hence accurately reflects the amount of the component of interest.

Abstract: A discharge ionization current detector using a low-frequency barrier discharge is provided to improve the linearity of detection sensitivity with respect to a sample introduction amount. From a lower end of a lower gas passage 10 connected to a lower end of an upper gas passage 4, a dilution gas is supplied upward against a downward flow of a plasma gas. A gas discharge passage 15 for discharging a plasma gas, the dilution gas and a sample gas is arranged between an ion-collecting electrode 11 and a bias voltage application electrode 12. The sample gas introduced through a capillary tube 16 is mixed with the plasma gas and the dilution gas due to a disturbed flow generated by collision of the plasma gas and the dilution gas. The sample component is efficiently ionized by light from the plasma without undergoing light-shielding effect of concentrated sample components.

Abstract: A sensor on a semiconductor wafer is used as a process monitor and a capacitor is employed as a power supply for the sensor. The capacitor can be formed by stacking a poly-silicon layer and a silicon nitride layer on the wafer. A timer can be used to specify an operation time or an operation timing, etc. Furthermore, unauthorized use is prevented by storing a keyword in an ROM of the process monitor.

Abstract: A plasma processing apparatus includes a radio frequency generator capable of adjusting a target output power level based on the set power level and the offset level to output radio frequency power; a chamber in which a plasma process is performed; and a power detection unit for measuring radio frequency power level fed to the matching unit. The plasma processing apparatus further includes a generator control unit for controlling the radio frequency power such that the radio frequency power level fed to the matching unit reaches the set power level by calculating the offset level based on the difference between the set power level and the power level measured by the power detection unit and transmitting the set power level and the offset level in digital form to the data input terminal of the radio frequency generator.

Abstract: The measurement is carried out by a device of two non- dissociable measurement chains resulting in a continuous measurement which is representative of the total concentration of tars (even as traces) of a hot gas. It involves coupling of methods including one, SPME/GC/MS/PID, which is discontinuous and a priori partial, the other, PID, which is continuous but difficult to interpret alone. It is based on on-line processing of the elements transmitted by each of the measurement methods used. A tar generator (28) allows calibration of the apparatuses and calculation of the different coefficients required.

Abstract: Provided is an excellent residual gas analyzer, which can perform measurements while being suitably arranged even in small areas, such as those in semiconductor equipments, and can perform measurements for display of measurement results without an external personal computer. The analyzer is provided with a sensor unit having a sensor section for detecting a residual gas; an operating section for receiving operation for controlling the sensor section; a residual gas analysis processing section for processing analysis of the residual gas based on the output from the sensor section; and an analysis processing result screen display section for displaying on a screen the analysis processing results obtained from the residual gas analysis processing section. The analyzer is also provided with a device main body which can be in a mounted status wherein the sensor unit is mounted or in a removed status wherein the sensor unit is removed.

Abstract: A discharge ionization current detector using a low-frequency dielectric barrier discharge with an improved S/N ratio is provided. A current detector 20 is disposed between an excitation high-voltage power source 8 and a discharge electrode 5 to detect a discharge current flowing in pulses due to plasma generation. The detection signal of the current detector 20 and an output signal from a current amplifier 18 for amplifying an ion current are inputted into an output extraction unit 21. The output extraction unit 21 detects a precipitous-rise portion of the discharge current detection signal and generates a trigger signal, and then extracts an ion current signal for a predetermined time period from the trigger signal. This can remove an influence of a noise appearing in a signal during a time period where no plasma emission is generated, thereby improving the S/N ratio of the detection signal.

Abstract: A planar type frequency shift probe that utilizes resonance of electromagnetic waves and includes a main body with a conductor plate and a coaxial cable. The main body includes a long narrow space, which has predetermined width and length and has an opening on the periphery of the main body, as well as the first surface part and the second surface part. The surface conductor of the coaxial cable is connected to the first surface part while the core conductor of the coaxial cable is connected to the second surface part via a lead wire.