Abstract: A micro-fabricated double condenser method and apparatus for the measurement of number-size distribution of airborne nanoparticles is provided. The invention is an instrument which can measure particle size under 100 nanometers in-situ. The present invention includes features such as a small nanoparticle airborne particulate analyzer, with a voltage-stable and feedback-controlled instrument package. The invention features also include a micro-fabricated nanoparticle charging and sorting device (NCaS). The present invention provides a portable, lightweight, and efficacious particle-sizing instrument that is able to effectively count and size nanoparticles over a wide range of operating conditions.

Abstract: A detection method of detecting a target substance, the method includes exciting the target substance by irradiating an atmosphere of a detection space with light having a first wavelength that excites the target substance from a ground state to an excited state on the basis of the energy level structure of the target substance; ionizing the target substance by irradiating the atmosphere of the detection space with light having a second wavelength that excites the target substance from the excited state to an energy state substantially equal to or higher than a vacuum level; making the ionized target substance adsorb to a detector by electric field acceleration; and detecting the amount of adsorption of the target substance.

Abstract: The present invention refers to a surface ionization detector comprises an emitter, a heating rod, a collecting electrode, a reducing liner and a housing. The emitter is made of molybdenum, platinum or alloy, and in the form of cylinder or a wire spiral. The heating rod heats and supports the metal emitter. When the heating rod is heated to 300-500° C., organic amine compounds collide with the surface of the emitter, generating positive ions through surface thermal ionization and thus are detected. The lowest detecting limit value of tertiary amine by the detector in the present invention can achieve to 10?14 g/s. The response to other hydrocarbons, ketones, etc., is 5-6 orders of magnitude lower than that of organic amines. The detector can selectively detect amines, hydrazines and their derivatives, and so on. The detector can be used as a detector for a gas chromatography system adopting capillary column or packed column, or alternatively be used alone as a sensor.

Abstract: A vacuum pressure measuring device with an electron source has a reaction zone for forming ions by impact ionization, wherein the electron source communicates with the reaction zone via a passage for the electrons. The electron source is surrounded by an insulating housing with a vacuum chamber, and a partition part is designed as a membrane carrier, carrying a nanomembrane at least in one section, the membrane separating the vacuum chamber from the outer region in a gastight manner and being at least partially designed to be electron-permeable. The vacuum chamber has a cathode for the emission of electrons. In the region of and/or on the nanomembrane, an anode arrangement is provided such that electrons are conducted against the nanomembrane and at least partially through it. The nanomembrane abuts the vacuum chamber of the vacuum pressure measuring device.

Abstract: An RF power delivery diagnostic system is provided herein. The system comprises an RF power source (303), an impedance matching network (305), a plasma reactor (307) in electrical contact with the RF power source by way of the impedance matching network, a first RF sensor (309) adapted to measure at least one attribute of the RF power input to the impedance matching network, and a second RF sensor (311) adapted to measure at least one attribute of the RF power output by the impedance matching network.

Abstract: Methods using a probe apparatus configured to measure a set of electrical characteristics in a plasma include providing a chamber wall including at least a set of plasma chamber surfaces configured to be exposed to a plasma, the plasma having a set of electrical characteristics. The method includes installing a collection disk structure configured to be exposed to the plasma, wherein the collection disk structure having at least a body disposed within the chamber wall and a collection disk structure surface that is either coplanar or recessed with at least one of the set of plasma chamber surfaces and providing a conductive path configured to transmit the set of electrical characteristics from the collection disk structure to a set of transducers.

Abstract: A discharge ionization current detector capable of supplying plasma gas in large quantity to stabilize plasma simultaneously with lowering the sample dilution ratio to improve detection sensitivity is provided. A gas supply pipe 7 for supplying a plasma gas, which also functions as a dilution gas, is connected to a point near the connecting section of a first gas passage 3 having electrodes 4-6 for plasma generation and a second gas passage having electrodes 16 and 17 for ion detection. A first gas discharge pipe 8 is connected to the other end of the first gas passage 3, and a second gas discharge pipe 13 is connected to the other end of the second gas passage 11. Flow controllers 9 and 14 are provided in the gas discharge pipes 8 and 13, respectively. The flow rate of the gas passing through a plasma generation area and that of the gas passing through an ion current detection area can be independently regulated.

Abstract: To reduce the cost of a high-voltage power supply unit by reducing the discharge starting voltage for a low-frequency dielectric barrier discharge. Means for Solution: Light from light source unit 20 located externally to cylindrical tube 2 through which a plasma gas (He) flows is irradiated through the wall surface of the cylindrical tube 2 onto a plasma generation region (the region between plasma generation electrodes 6 and 7) located in gas flow path 4. The light energy excites the He molecules or the minute quantities of impurity gas molecules present in the He gas, causing photo-ionization. This causes a discharge to start, and a plasma to be formed, when a low-frequency voltage of a voltage that is less than the usual discharge starting voltage is applied across electrode 5 and electrodes 6, 7. Once the discharge starts, the discharge is sustained when the usual discharge sustaining voltage is applied across electrode 5 and electrodes 6, 7.

Abstract: Methods and systems for detecting a change in the state of plasma confinement within a capacitively coupled RF driven plasma processing chamber are disclosed. In one or more embodiments, the plasma unconfinement detection methods employ an analog or digital circuit that can actively poll the RF voltage at the powered electrode in the form of an Electrostatic Chuck (ESC) as well as the open loop response of the power supply (PSU) responsible for chucking a wafer to ESC. The circuit provides a means detecting both a change in RF voltage delivered to the ESC as well as a change in the open loop response of the PSU. By simultaneously monitoring these electrical signals, the disclosed algorithm can detect when plasma changes from a confined to an unconfined state.

Abstract: The invention relates to a device and to a method for determining the proportion of fuel in a combustion engine lubricating oil. The device according to the invention comprises a column (12) with at least 22000 theoretical plates and a steady state phase capable of separating the fuel, the oil, the internal standard contained in the oil and the solvent, in which the oil and the internal standard are diluted, and a heating module (120) capable of causing an increase in the temperature of the column (12) at a rate of at least 350° C./min. In the method according to the invention, the column (12) is subjected to determined cycles during which the pressure of the carrier gas and the temperature are varied.

Abstract: The invention provides methods and apparatuses that utilize mass spectrometry for preparation of a surface to have catalytic activity through molecular soft-landing of mass selected ions. Mass spectrometry is used to generate combinations of atoms in a particular geometrical arrangement, and ion soft-landing selects this molecular entity or combination of entities and gently deposits the entity or combination intact onto a surface.

Abstract: A supersonic gas jet having gas molecules with substantially equal velocities is formed by directing the gas through a Laval nozzle into an evacuated chamber. A field barrier having a substantially constant height across a cross-section of the supersonic gas jet is formed by respectively applying potentials U2, U3 and U4 to an arrangement of three apertured diaphragms R2, R3 and R4, which are respectively separated by distances d2 and d3, where (U4?U3)/(U3?U2)=d3/d2. The ions in the supersonic gas jet are directed against the field barrier, where ions with a mobility below a mobility threshold are pushed over the field barrier, and where ions with a mobility higher than the mobility threshold are held back by the field barrier.

Abstract: The invention relates to anion gauge10 for determining a total integrated concentration of a substance having a molecular weight falling into a pre-determined range of molecular weights in a gas sample, comprising an ionization region in a vicinity of the ionization source 1; an accelerator 2, 3, 4 for generating a flow of said ionized molecules I; a mass filter 8 for intercepting said flow for separating ions having the molecular weight falling into said range from said ionized molecules and a detector 7 for generating a signal representative of the total integrated concentration of such ions present in the gas sample. The invention further relates to a lithographic apparatus and a method for determining a total integrated concentration of a substance having a molecular weight falling into a pre-determined range of molecular weights in a gas sample.

Abstract: A process for measuring particle concentrations in a gas using an ejector for producing an essentially constant sample flow and for efficient mixing of the particle-containing sample and and essentially clean, ionized gas. The invention also relates to an apparatus implementing such process. The process and the apparatus can be utilized for example in measuring particle concentrations in an exhaust system of a combustion engine.

Abstract: The helium sensor comprises a housing that encloses a detection chamber. A side of the housing is closed by a permeable wall that is selective for helium. In the detection chamber, there is located an ion getter pump comprising an anode, a cathode and a magnetic field. The cathode, or a cathode leg is made of beryllium. Beryllium has a low atomic mass, whereby the likewise light-weight helium ions can be better incorporated into the cathode material.

Abstract: A low-frequency high AC voltage from an excitation voltage power source (14) is applied between one electrode (8) and two other electrodes (9A and 9B) to generate a low-frequency AC-excited dielectric barrier discharge within a gas passage (3), thereby creating atmospheric pressure non-equilibrium micro-plasma. A sample gas is mixed with hydrogen inside the passage of a nozzle (51), and further mixed with air outside an exit port (53) to burn, forming a hydrogen flame (57). Then, the sample gas reaches an ionization area (56), where the sample components are ionized due to the effect of light emitted from the plasma. Meanwhile, water molecules generated in the hydrogen flame (57) are supplied into the ionization area (56), whereby some of the sample-molecule ions are hydrated while the others undergo a reaction to form a hydroxonium ion.

Abstract: Described herein is a method and apparatus for diagnosing processing equipment with a multi-diagnostic device. In one embodiment, a multi-diagnostic device is located in a plasma processing environment and includes an electronic circuitry. The device includes a first array of sensors and a second array of sensors. The circuitry is used to simultaneously (or nearly simultaneously) measure the distributions of ion saturation current and the potential at the device using the first array of sensors and to measure resistances of the second array of sensors to determine the distribution of the temperature at the surface of the device.

Abstract: According to one aspect, the disclosure is directed to an example embodiment in which a circuit-based arrangement includes a circuit-based substrate securing a channel, with an effective width that is not limited by the Debye screening length, along a surface of the substrate. A pair of reservoirs are included in or on the substrate and configured for containing and presenting a sample having bio-molecules for delivery in the channel. A pair of electrodes electrically couple a charge in the sample to enhance ionic current flow therein (e.g., to overcome the electrolyte screening), and a sense electrode is located along the channel for sensing a characteristic of the biological sample by using the electrostatic interaction between the enhanced ionic current flow of the sample and the sense electrode. Actual detection occurs by using a charge-signal processing circuit to process the sensed charge signal and, therefrom, provide an output indicative of a signature for the bio-molecules delivered in the channel.

Abstract: Provided is a technique capable of ascertaining the process condition of the boundary between electrically positive and negative plasma regions. In a vacuum chamber, one of the parameters of process conditions is stepwisely changed to generate a plasma under at least three process conditions. The parameters include a flow rate ratio between an electrically negative gas and an electrically positive gas, a pressure in the vacuum chamber and the magnitude of an energy supplied to the gases. Next, a voltage is applied to a Langmuir probe positioned in that plasma, and a current-voltage curve indicating the relationship between the applied voltage and the electric current to flow through the probe is acquired for each of the process conditions. On the basis of the current-voltage curve group acquired, the process conditions are determined for the boundary between the electrically positive and negative plasma regions.

Abstract: The flame ionization detector, which comprises a supply and an ignition device (7) for the combustible gas, a supply for the sample gas, a combustion chamber (4) in which the sample gas is ionized by the flame, and electrodes (8, 1) to which a voltage is applied in order to generate and measure the ion current, is distinguished in that it is constructed as an integrated planar system of at least three parallel platelet-like substrates (1, 2, 3) which are connected to one another and are processed by microsystem technology methods, with a central substrate (1) comprising nozzles (5, 6) for the gases and the ignition device (7) and a recess which forms a part of the combustion chamber (4), is completed by recesses in the neighboring substrates (2, 3) and is essentially closed together with the nozzle region by these substrates (2, 3), and the neighboring substrates (2, 3) comprise supply channels (10, 11) for the gases.

Abstract: An electrochemical gas sensor is provided. The gas sensor includes a first electrode and a second electrode wherein the two electrodes are connected via an ion-conducting material. The first electrode is covered, at least in part, by a first catalytically active material. This top layer permits the catalytic reaction of gases. Thermally and chemically stable catalysts such as SCR or NOx storage catalysts or zeoliths are used as the top layer.

Abstract: A system and method for ionization detection in electrically enhanced air filtration systems is described. One embodiment includes a system for electrically enhanced air filtration, the system including an electrically enhanced filter having a filter and an ionizing electrode disposed on an upstream side of the filter; a control device connected to the electrically enhanced filter, wherein the control device can control the electrically enhanced filter; and an ionization detector, wherein the ionization detector is adjacent to the electrically enhanced filter and wherein the ionization detector is connected to the control device.

Abstract: It is intended to realize measuring of trace organic components and to render qualitative procedure efficient through imparting of selectivity. Penning gas and dopant gas are ionized in a space isolated from discharge part with the use of metastable helium obtained by direct-current glow discharge, and with the use of thus obtained plasma, the efficiency of ionization of components to be measured is enhanced, so that intensified ion current can be obtained. Further, through selection of dopant gas and Penning gas, selectivity can be imparted. Thus, not only can measuring of trace organic components be performed but also selectivity can be imparted.

Abstract: This invention provides a sensor having such a structure that the area in which a sensor electrode comes into contact with a liquid, a mist or a gas containing an analyte has been previously specified. The sensor comprises at least an electroconductive first electrode, an electroconductive second electrode, electroconductive first and second wirings connected to the first and second electrodes, and an insulating part for insulating the first and second wirings from each other and from a liquid, a mist or a gas containing the analyte. The insulating part is formed of an organic material. In the first and second electrodes, at least the surface, which comes into contact with a liquid, a mist or a gas containing the analyte, is formed of a material which is insoluble in a liquid or a mist containing the analyte, or is not attacked by a gas containing the analyte.

Abstract: The presently disclosed embodiments are directed to the detection and monitoring of corona effluent. The present embodiments pertain to a corona sensing device that employs a film of organic charge transporting material, as the active component in a corona effluent sensing device, that is disposed onto a patterned electrode bearing support member.

Abstract: A method for controlling air intake into an air conditioned enclosure includes generating a plurality of sensor output voltages using a NOx sensor. A NOx voltage ratio is calculated from the sensor output voltages. A determination is made when the NOx voltage ratio one of equals and exceeds a NOx threshold. The NOx voltage ratio is reset to a unitary value for a predetermined length of time.

Abstract: A selective gas sensor is for determining the presence of a test gas, for example, helium includes an evacuated housing, sealed by a selectively gas-permeable membrane. The membrane is part of a sight glass, whereby the glass pane is provided with a hole, sealed by the membrane made from a silicon material. The frame of the membrane wall is connected to the housing by means of a high-vacuum soft-metal seal. The housing can also form one of the electrodes of the gas pressure sensor.

Abstract: A cold cathode pressure sensor has gastight housing, an anode and a cathode arranged in the housing, and a radiation source directed to the cathode for igniting a cold cathode discharge. The housing has a test gas inlet and is at least partly made of glass. The radiation source is arranged outside the housing and irradiates the cathode through the housing glass. The radiation source substantially emits a radiation of a wavelength of more than 400 nm and less than 1,400 nm.

Abstract: A surface comprises a surface member and a plurality of components thereon. Such heterogenous surface compositions and configurations, related systems and methods for sensing particle or analyte interaction therewith can selectively and/or differentially interact with a range of particles/analytes, in lieu of specific molecular sensor-analyte interactions for each particle.

Abstract: A beam profile measurement detector is a tool to efficiently verify dose distributions created with active methods of a clinical proton beam delivery. A Multi-Pad Ionization Chamber (MPIC) has 128 ionization chambers arranged in one plane and measure lateral profiles in fields up to 38 cm in diameter. The MPIC pads have a 5 mm pitch for fields up to 20 cm in diameter and a 7 mm pitch for larger fields, providing an accuracy of field size determination of about 0.5 mm. The Multi-Layer Ionization Chamber (MLIC) detector contains 122 small-volume ionization chambers stacked at a 1.82 mm step (water-equivalent) for depth-dose profile measurements. The MLIC detector can measure profiles up to 20 cm in depth, and determine the 80% distal dose fall-off with about 0.1 mm precision. Both detectors can be connected to the same set of electronics modules, which form the detectors' data acquisition system.

Abstract: An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel (4) connected in communication with a vacuum apparatus, oscillates electrons emitted front the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with a heating device for heating the ion collector.

Abstract: A method inspects a process performance of a capacitively coupled plasma processing apparatus which generates a plasma for a plasma processing by applying a radio frequency power between a first electrode and a second electrode disposed in a processing vessel to face the first electrode in parallel. The method includes measuring an impedance of a radio frequency transmission path ranging from a rear surface of the first electrode to a ground potential part and sweeping a frequency to thereby obtain a frequency characteristic of a real resistance component of the impedance; reading a specific property value of a horn-like peak which appears from the frequency characteristic of the real resistance component; and determining efficaciousness or inferiority of the process performance of the plasma processing apparatus based on the peak property value.

Abstract: Detecting air ingredients is obtained, a heater and gas sensitive acting layers are arranged on a substrate, which are connectable to an analyzing unit. Electrical resistances of n acting layers are connected in series; heater is a temperature sensor connected in parallel with this series connection, electrical resistance of heater is smaller than the sum of electrical resistances of acting layers and resistances are connected with a total of n+1 electrical terminals via electrodes so that heater is connected with two terminals and n?1 other terminals are connected with a respective junction that interconnects two acting layers. Heater is intermittently heated so that a predefined constant temperature of acting layers is achieved, temperature of acting layers is acquired by determining electrical resistance of heater; voltages in the series connection of acting layers are analyzed and a concentration of gases are determined from electrical resistances of acting layers.

Abstract: Provided is an excellent residual gas analyzer, which can perform measurement by being suitably arranged even in small areas, such as those in semiconductor equipments, and can perform measurement to display of measurement results without an external personal computer. The analyzer is provided with a sensor unit (1) having a sensor section (11) for detecting a residual gas; an operating section for receiving operation for controlling the sensor section (11); a residual gas analysis processing section for processing analysis of the residual gas based on the output from the sensor section (11); and an analysis processing result screen display section for displaying on a screen the analysis processing results obtained from the residual gas analysis processing section. The analyzer is also provided with a device main body (2) which can be in a mounted status (P1) wherein the sensor unit (1) is mounted or in a removed status (P2) wherein the sensor unit is removed.

Abstract: An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.

Abstract: A plasma processing chamber with a probe apparatus configured to measure a set of electrical characteristics in a plasma is disclosed. The plasma processing chamber includes a set of plasma chamber surfaces configured to be exposed to the plasma. The probe apparatus includes a collection disk structure configured to be exposed to the plasma, whereby the collection disk structure is coplanar with at least one of the set of plasma chamber surfaces. The probe apparatus also includes a conductive path configured to transmit the set of electrical characteristics from the collection disk structure to a set of transducers.

Abstract: A system for measuring gas density in a vacuum includes a gauge, a housing for containing the gauge, and a magnet secured to an exterior surface of the housing. The magnet is a flexible magnetic strips, and positioned around the exterior surface of the housing. The gauge includes grid insulator posts extending longitudinally along a tubular section of the housing, and the magnet is secured to the exterior surface of the housing adjacent to the grid insulator posts, and oriented transversely to the grid insulator posts. The magnet is a flexible magnetic strip, and a clamp secures the magnet to the exterior surface of the housing.

Abstract: Provided is a plasma diagnostic apparatus having a probe unit, which is inserted into a plasma or disposed at boundary of a plasma, the apparatus including: a signal supplying unit having a signal supplying source; a current detecting/voltage converting unit for applying a periodic voltage signal applied from the signal supplying unit to the probe unit, detecting the magnitude of the current flowing through the probe unit, and converting the detected current into a voltage; and a by-frequency measurement unit for computing the magnitude and phase of individual frequency components of the current flowing through the probe unit by receiving the voltage output from the current detecting/voltage converting unit as an input.

Abstract: An apparatus includes semiconductor processing equipment. A particle detecting integrated circuit is positioned in a vacuum environment, the particle detecting integrated circuit containing a device having a pair of conductive lines exposed to the vacuum environment. The pair of conductive lines is spaced at a critical pitch corresponding to diameters of particles of interest. A computer system is linked to the particle detecting integrated circuit to detect a change in an electrical property of the conductive lines when a particle becomes lodged between or on the lines.

Abstract: A method for automatically characterizing plasma during substrate processing is provided. The method includes collecting a set of process data, which includes at least data about current and voltage. The method also includes identifying a relevancy range for the set of process data, wherein the relevancy range includes a subset of the set of process data. The method further includes determining a set of seed values. The method yet also includes employing the relevancy range and the set of seed values to perform curve-fitting, wherein the curve-fitting enables the plasma to be automatically characterized.

Abstract: An electrostatic particle sensor for sensing particles in exhaust gases includes: a lateral surface electrode having an effective flow volume, a gas flow to be tested flowing through it; an inner electrode situated inside the lateral surface electrode; and a voltage source which is in an electrically conducting connection with both electrodes. A potential which is dependent on the gas flow rate per time unit through the effective flow volume is impressed upon the voltage source.

Abstract: Embodiments of the present invention pertain to an electronic portion of a MEMs ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement and a method for forming an electronic portion of a MEMs ion gauge with ion collectors bowed out of plane to form a three dimensional arrangement. In one embodiment, an ion gauge substrate is formed. The electronic portion of the MEMs ion gauge is assembled by coupling a plurality of ion collectors with the ion gauge substrate, wherein the coupling of the plurality of ion collectors with the ion gauge substrate further comprises performing an operation that causes the plurality of ion collectors to be bowed out of plane to form a three dimensional arrangement.

Abstract: A planar type frequency shift probe that utilizes resonance of electromagnetic waves and includes a main body with a conductor plate and a coaxial cable. The main body includes a long narrow space, which has predetermined width and length and has an opening on the periphery of the main body, as well as the first surface part and the second surface part. The surface conductor of the coaxial cable is connected to the first surface part while the core conductor of the coaxial cable is connected to the second surface part via a lead wire.

Abstract: An apparatus includes semiconductor processing equipment. A particle detecting integrated circuit is positioned in a vacuum environment, the particle detecting integrated circuit containing a device having a pair of conductive lines exposed to the vacuum environment. The pair of conductive lines is spaced at a critical pitch corresponding to diameters of particles of interest. A computer system is linked to the particle detecting integrated circuit to detect a change in an electrical property of the conductive lines when a particle becomes lodged between or on the lines.

Abstract: Methods and apparatus for measuring the dielectric relaxation properties of a sample are disclosed. Methods are disclosed for amplifying or controlling the dielectric relaxation properties of a sample by adding particles, such as functionally coated particles. In certain methods, the particles amplify or control the dielectric relaxation properties of the sample by interacting with counter ions in the sample. In some embodiments, the methods use a dielectric relaxation spectroscopy apparatus with remote electrodes.

Abstract: Method and apparatus for detecting or suppressing electrical arcing or other abnormal change in the electrical impedance of a load connected to a power source. Preferably the load is a plasma chamber used for manufacturing electronic components such as semiconductors and flat panel displays. Arcing is detected by monitoring one or more sensors. Each sensor either responds to a characteristic of the electrical power being supplied by an electrical power source to the plasma or is coupled to the plasma chamber so as to respond to an electromagnetic condition within the chamber. Arcing is suppressed by reducing the power output for a brief period. Then the power source increases its power output, preferably to its original value. If the arcing resumes, the power source repeats the steps of reducing and then restoring the power output.

Abstract: A plasma monitoring method using a sensor, the sensor having a substrate; a first electrode, the first electrode being a conductive electrode and formed on the substrate while being isolated from the substrate; an insulating film formed on the first electrode; a contact hole formed in the insulating film and having a depth from a surface of the insulating film to the first electrode; and a second electrode, the second electrode being a conductive electrode, formed on the surface of the insulating film, and faced to plasma during a plasma process, the plasma monitoring method including measuring and monitoring potentials of the first electrode and the second electrode or a potential difference between the first electrode and the second electrode during the plasma process is disclosed. A plasma monitoring system carrying out the plasma monitoring method is also disclosed.

Abstract: A method of nondestructive noncontact tightness testing of inner structure of articles based on gas discharge visualization includes the steps of providing a film for imaging on a dielectric plate and an electrode, the dielectric plate disposed on the electrode, and polarizing the dielectric plate by applying a series of high voltages pulses across the dielectric to provide a preliminary polarized dielectric plate. After the polarizing step, an article to be tested which has a multi-layer casing including an outer metallic layer is arranged on the film. The article is then subjected to a high voltage pulsed electric field by applying a high voltage electrical pulse between the electrode and the outer metallic layer and the electrode, wherein the pulsed electric field is combined with an electric field associated with the preliminary polarized dielectric plate triggers a gas discharge process. An image of the film is obtained on the film of an inner structure of the article based on the gas discharge process.

Abstract: An apparatus and method for detecting the presence of high conductivity or permittivity conditions in electrically insulating materials, including a first electrode and a second electrode for being placed in spaced-apart relation on an insulator to be tested for a high conductivity or permittivity condition, and a high voltage source for energizing the first electrode and second electrode at different potentials. At least one gas gap is positioned between the first electrode and the second electrode and proximate a surface of the insulator; and a detector determines the level of ionization of the at least one gas gap while the electrodes are energized.

Abstract: Disclosed herein are an apparatus for and method of measuring the composition and the pressure of the discharged gas from an ion gauge by using a residual gas analyzer. In this regard, there are provided a vacuum container 200 divided into a pressure container 210 and a discharge container 220 by means of a partition 235 having an orifice 230 formed thereon; an ion gauge 100 mounted at the pressure container 210 side of the vacuum container 200 for discharging the gas at the time of vacuum formation; a residual gas analyzer 240 mounted at the pressure container 210 side of the vacuum container 200 for measuring the composition and the pressure of the residual gas; pump means disposed at one side of the discharge container 220 of the vacuum container 200 for discharging the inside gas; and heating means disposed at the vacuum container 200 for heating the vacuum container 200 to a predetermined temperature.