Abstract: Disclosed is a substrate processing apparatus including first and second chambers stacked one above the other; a first opening that is provided in a wall of the first chamber that faces the second chamber, and that allows a substrate to pass through the first opening; a second opening that is provided in a wall of the second chamber that is in communication with the first opening and that allows the substrate to pass through the second opening; an opening and closing member that is provided inside the first chamber so as to move up and down and that opens and closes the first opening; a substrate mounting member that is provided closer to the second chamber than the opening and closing member, and that moves the substrate between the first and second chambers; and a substrate processing member provided in the second chamber.

Abstract: In the substrate holder, while holding a periphery portion of a semiconductor wafer, some of protruding portions having a grass shape on a pad main body hide beneath the semiconductor wafer, and the others of the protruding portions are exposed outside the semiconductor wafer. Also, the protruding portions hiding beneath the semiconductor wafer contact a rear surface of the semiconductor wafer, and sink the semiconductor wafer to a suitable depth via gravity, thereby holding the semiconductor wafer mainly in a length direction. In addition, some of protruding portions exposed near the periphery portion of the semiconductor wafer contact a side surface of the semiconductor wafer, thereby holding the semiconductor wafer mainly in a width direction.

Abstract: A rail transportation means used in bottled preparation manufacturing process is provided with a rail and a slide block slidably mounted on the rail. On the slide block are provided a first movable guideway, a second movable guideway, a position-switch device and a material loading-and-unloading mechanism. The rail transportation means is capable of automatically transporting feeding trays to and forth between the filling area and other relative equipments involved in the manufacturing process, such as the lyophilizer and the sealing device, without requiring manual intervention, thus allowing the bottled preparation manufacturing process to be carried out in a dust-free and sterile environment, increasing product yield and production efficiency.

Abstract: Provided is a transporting apparatus which suppresses wafers accommodated therein from being contaminated by particles existing inside the transporting apparatus even when wafers charged with electricity are accommodated in the accommodating apparatus. The transporting apparatus includes: a holding table including a first positioning pin that positions an article to be transported and configured to transfer an object to be processed which is accommodated in the article; an arm unit configured to grasp the article so as to dispose the article on the holding table; and a support unit configured to fix the article disposed on the holding table. In particular, at least one of the first positioning pin, the arm unit, and the support unit includes a ground element.

Abstract: An overhead-conveying transport bag for automatically unloading a loaded piece good includes a basic structure as well as a separate receiving device, which is arranged adjacent thereto. Unloading of the transport bag is performed through one of the front sides of the basic structure which is open and at least the lateral sides of the receiving device are formed such that the base is liftable into an unloading position of the transport bag, in which the base is lifted into the bottom of the basic structure.

Abstract: To reduce pumping time of a vacuum treatment chamber served by a transport arrangement in a transport chamber the vacuum treatment chamber is split into a workpiece treatment compartment and a pumping compartment in mutual free flow communication and arranged opposite each other with respect to a movement path of the transport arrangement serving the vacuum treatment chamber. The pumping compartment allows a pumping port to have a flow cross-section area that is freely selectable independently from the geometry of the treatment compartment.

Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.

Abstract: A film inspection apparatus for inspecting the state of a film includes a transfer unit that fixes the film in a flat state and that transfers the film, and includes an inspection unit that inspects the film transferred through the transfer unit. The transfer unit includes a carrier that is movable to a direction of the inspection unit, a tray in the carrier and for mounting the film thereto, and an adsorption unit that is in the carrier and that adsorbs the film to maintain the film mounted to the tray in the flat state.

Abstract: An apparatus and method for concurrent processing of several substrates. The system employs a novel architecture which, while being linear, may autonomously sequence processing and move substrates in different directions as necessary. The system moves several substrates concurrently; however, unlike the prior art it does not utilize trays.

Abstract: A system including a shuttle movable along a shuttle path, the shuttle being operable to support a sheet; a pick-up assembly including a yoke and a detection plate located above the shuttle path, the detection plate being freely supported by the yoke and movable in a vertical direction relative to the yoke with an upper limit and a lower limit defined by the yoke, wherein the yoke is operable to pick and place the sheet, and wherein the detection plate is used to detect the presence of a piece of debris on a surface of the sheet or a surface of the shuttle; and a cleaning device located adjacent to the pick-up assembly and above the shuttle path, wherein the cleaning device is operable to remove the piece of debris located on the surface of the sheet or the surface of the shuttle.

Abstract: A plate material processing system includes a plate material processing machine and a loader. The plate material processing machine holds a front end portion of an unprocessed plate material by a work holder and moves the unprocessed plate material on a table forward, backward, leftward and rightward. The loader includes: a plate material attaching unit; and a pivoting mechanism for pivoting the plate material attaching unit on a predefined arc-shaped trajectory while maintaining the plate material attaching unit in a constant orientation as viewed in a planar manner. When the plate material attaching unit is at a foremost position, the work holder is positioned to the other side of the left and right sides relative to a processing head, away from the unprocessed plate material loading position side, thereby preventing the work holder and the plate material attaching unit from interfering with each other.

Abstract: A system for storage and retrieval of items includes a shelving rack configured to store the items. The shelving rack has a plurality of vertical levels. The system includes at least one robotic carriage operable to move horizontally. The robotic carriage includes an extendable arm that extends horizontally and vertically to lift the items from an input slot and to carry and place the items on the shelving rack. The robotic carriage is also operable to lift the items from the shelving rack and to carry and place the items on a workstation. The workstation is positioned in close proximity to the shelving rack. By locating the workstation in close proximity to the shelving rack, the items may be transferred from the shelving rack to the workstation without requiring conveyors and ram drives.

Abstract: The system includes a robot body and a main robot control platform. The robot body includes a mechanical part and an electrical control part. The mechanical part includes a horizontal moving unit, an objective carrying platform unit and a bearing unit which are arranged in X, Y and Z cartesian coordinate directions. The objective carrying platform unit includes an objective carrying platform and a battery drive mechanism arranged on the objective carrying platform. A battery pushing mechanism is arranged on the battery drive mechanism. The electrical control part includes a data collection device connected with a main control computer system, a power drive mechanism, an I/O model and a wireless communication model I. The wireless communication model I, the wireless communication model II of a control backend and the wireless communication model III in the remote control device wirelessly communicate with each other.

Abstract: A tube sorter comprising: a rack stocker configured to have stocked therein a sample rack capable of holding one or more sample tubes; a transporting section configured to transport a sample rack; a tube conveyor configured to perform an unloading operation of unloading a sample tube from a sample rack that was transported by the transporting section and a loading operation of loading the sample tube onto a sample rack supplied from or stocked in the rack stocker; and a rack conveyor configured to convey an empty sample rack or a sample rack to be emptied to the rack stocker, is disclosed.

Abstract: A robot control unit that turns off a holding unit for a plate member, while the plate member is placed on an end effector, and lower the end effector, by a predetermined distance, from an initial position higher than a preset temporary placing position toward the temporary placing position. Then the robot control unit switches the holding member, from an OFF state to an ON state, while the end effector is stopped, and determines whether the plate member is held by the holding unit, with a holding-state detection unit. When the plate member is held by the holding unit, the robot control unit turns off the holding unit while further lowering the end effector by the predetermined distance. When the plate member is not held by the holding unit, the robot control unit detects a position of the end effector at this point of time, as a normal placing position.

Abstract: An article storage facility includes a transport device for transporting containers to a plurality of storage sections, an inactive gas feed section which supplies inactive gas to the interior of the container stored in the storage section, and a controller for controlling operation of the device and operation of the flow rate adjusting device of the inactive gas feed section. The controller is configured to cause a state of the inactive gas feed section associated with the storage section to be both a storage feed state and an unfeeding state depending on if the carrier is stored or not stored be. The controller is also configured to store the transporting container in the storage section after changing the state of the inactive gas feed section associated with the storage section in which the container is to be stored to a pre-storage feed state from the unfeeding state.

Abstract: An apparatus for testing a wafer includes a wafer chuck on which the wafer is loaded to perform a wafer test process. The wafer chuck is maintained at a high temperature in a predetermined temperature range. The apparatus for testing a wafer further includes a wafer handling arm supporting the wafer and transferring the wafer to the wafer chuck, and a wafer heating module coupled to the wafer handling arm, arranged parallel to the wafer, and preheating the wafer to be loaded on the wafer chuck.

Abstract: Provided is an apparatus for guiding and aligning a semiconductor chip package. The apparatus may include an insert, a plate above the insert, and an adapter. The insert may be configured to house various sizes of semiconductor chip packages. The plate may be configured to move vertically with respect to the insert. The adapter may be coupled to the plate and may be configured to guide at least one semiconductor chip package into the insert and to perform alignment of the at least one semiconductor chip package. In accordance with example embodiments, the at least one semiconductor chip package may have a size corresponding to at least one of the various sizes.

Abstract: The present disclosure provides a system and method for processing a semiconductor substrate wherein a substrate is received at a load lock interface. The substrate is transferred from the load lock interface to a process module using a first module configured for unprocessed substrates. A manufacturing process is performed on the substrate within the process module. Thereafter, the substrate is transferred from the process module to the load lock interface using a second module configured for processed substrates.

Abstract: A transport apparatus that supports and moves a substrate by using a robot hand between a plurality of chambers includes a first detection unit that detects the substrate, in a first stop position of the robot hand, using a first detection position set on one surface of the substrate supported by the robot hand, and a second detection unit that detects the substrate, in a second stop position of the robot hand, using a second detection position set on the one surface of the substrate supported by the robot hand.

Abstract: A transport and handing-over arrangement for disc shaped substrates, comprising a carrier (3) and a take-over arrangement (15). Both are moveable relative to each other. A relatively heavy substrate carrier (7) of magnetisable material is taken-over from the take-over arrangement (15) by distance control of a permanent magnet (17) at the take-over arrangement (15) or is returned therefrom to a carrier (3). The controlled drive of the permanent magnets (17) in the take-over arrangement (15) is performed by means of pneumatic piston/cylinder arrangements (19).

Abstract: A moving mechanism includes a first moving body arranged to move in a first direction relative to a support, a second moving body provided on a side of the support with the first moving body therebetween, and moves in a second direction intersecting the first direction relative to the first moving body, and a first vibrating body arranged in the support and biased to press the moving body or is arranged in the first moving body and biased to press the support. A direction in which first and second grooves face each other intersects a direction in which the support and the moving body face each other, and a biasing direction in which the first vibrating body is biased intersects the direction in which the first and second grooves face each other and the direction in which the support and the moving body face each other.

Abstract: A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The transport vehicle is located in the first chamber and is movably supported from the first chamber for moving linearly relative to the first chamber. The transport vehicle includes a base, and an integral semiconductor workpiece transfer arm movably mounted to the base and capable of multi-access movement relative to the base. The other chamber is communicably connected to the first chamber via a closable opening of the first chamber. The opening is sized to allow the transport vehicle to transit between the first chamber and the other chamber through the opening.

Abstract: An interface apparatus between a pneumatic mail system and a feeding system of biological products to a laboratory automation system is described, the apparatus comprising a capsule suitable for being conveyed in a pneumatic mail system which accommodates therein one or more biological material containers, said capsule opening and connecting to a device for transferring said biological material containers contained in said capsule into at least one recruiting device of said biological product containers, said at least one recruiting device being used to load said containers of biological products into a positioning device interfaced with a gripping device of said biological product container for transferring said biological product container on an automatic conveyor belonging to a laboratory automation system. Said capsule has an inner chamber containing foam elements adapted to withhold said biological product containers present in said capsule.

Abstract: A washing plant (10) comprises a battery (12) of washing and heat-disinfection machines (14, 16, 18) disposed along an alignment axis (X), able to operate in parallel with respect to each other in order to effect the washing and heat-disinfection, at least a translator slider (20) mobile in an automatic manner parallel to the alignment axis (X) in a front position to said battery (12), which receives the objects to be washed and both transports them in correspondence to the entrance of one of the machines (14, 16, 18) selected on each occasion depending on the washing program set or depending on availability, and moves them inside the desired machine (14, 16, 18) in a direction of feed (F) substantially perpendicular to said alignment axis (X), transport means (24) being provided to direct the objects to be washed toward the translator slider (20) operating in a direction of transport (Y) substantially parallel to said alignment axis (X).

Abstract: A system and device for use in a security area, and more particularly, a rack system and holding device for placing various objects that are processed through a security area are taught.

Abstract: Systems, apparatus and methods for transporting substrates between system components of an electronic device manufacturing system are provided. The systems and apparatus include an electrostatic end effector having a base, an electrode pair on the base, and spacer members for spacing the substrate from the electrode pairs to provide a gap between the electrode pair and the substrate. Methods of the invention as well as numerous other aspects are provided.

Abstract: A traveling type dipping apparatus in a painting system of a vehicle body of an automobile, usable as mechanism to rotate and dip the vehicle body having been supported on a conveying traveling body horizontally in a forward facing direction in a treatment liquid while conveying the vehicle body.

Abstract: A parts feeding device includes a magazine for housing pallets, a parts feeding table capable of supporting a plurality of pallets in a state where a tray mounted on a topmost pallet is positioned within a movable range of a parts retrieving head and in a state where an upside of the tray is open, and a relay device which inserts and removes the pallets into and from the magazine and the parts feeding table.

Abstract: An apparatus for transporting a wafer-shaped article, comprises a holder configured to hold a wafer-shaped article of a predetermined diameter, attached to a robot arm that is horizontally movable, via a linkage. The holder is vertically movable relative to the distal end of the robot arm via the linkage from a retracted position to an extended position.

Abstract: A substrate relay apparatus (200) includes a chassis (202) that is arranged to surround openings (144) formed at side walls of adjacent transfer apparatuses and has a dimension in the width direction between the side walls of the transfer apparatuses that is smaller than the substrate size, a gate valve (201) that is arranged inside the chassis (202) between the side walls of the adjacent transfer apparatuses and is configured to open and close with respect to the openings (144), and support pins (250) that are arranged on both sides of the gate valve (201) and are configured to support a wafer (W) that straddles the gate valve (201).

Abstract: An apparatus includes a dedicated material handling module having a dedicated automated material handling system (AMHS) defines a transport route between a first tool and a second tool selected from a plurality of tools in a fabrication facility. The dedicated ANHS is configured to transport wafer carriers between the first tool and the second tool or vice versa independent of a fabrication facility AMHS that is configured to transport wafer carriers among the plurality of tools. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract: Embodiments of the invention relate to a rigging table system that delivers the members from the cutting station to a location behind the workers at the rigging table, transports the members vertically below the surface of the floor on which the workers stand, horizontally transports the members underneath the floor on which the workers stand, and delivers the members vertically above the surface of the floor in front of the workers for assembly on the rigging table. The members are delivered through the use of systems that drop, slide, lift, and extend the members of the truss to the desired locations using automatic sensors or call buttons.

Abstract: A front semiconductor opening wafer container for large diameter wafers includes a container portion and a door. The container portion includes a left closed side, a right closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers. The door is attachable to the container portion to close the open front and selectively latchable to the container portion. The container portion includes a means for accommodating large diameter wafers, particularly 450 mm wafers. Optimized sag control is provided as well as enhanced structural rigidity, and wafer seating features.

Abstract: A substrate processing system 10 includes a multiple number of substrate processing units 40A and 40B having substrate processing modules 40a and 40b, respectively; substrate buffers 30a and 30b which respectively correspond to the substrate processing units 40A and 40B; and a first substrate transfer device 50 configured to take out substrates W from substrate receptacles 20 on substrate mounting tables 25 into substrate buffers 30a and 30b. When a second substrate transfer device 60b of the substrate processing unit 40B is broken down, a substrate W remaining in the substrate buffer 30b corresponding to the substrate processing unit 40B is delivered into the substrate buffer 30a corresponding to the substrate processing unit 40A by a substrate delivery device 35.

Abstract: A transfer device 17 in a semiconductor processing system includes first and second actuation mechanisms 9A, 9B having first and second support sections movable on first and second vertical planes, respectively, the latter being parallel with each other. First and second movable blocks 18A, 18B are supported on the first and second support sections so that they may be horizontally moved by the first and second actuation mechanisms. Disposed on the first and second movable blocks are first and second handling mechanism 19A, 19B capable of extension and contraction for handling a processing subject substrate W. A control section 20 controls the operation of the first and second actuation mechanisms so that the first and second movable blocks may not interfere with each other.

Abstract: The present embodiment provides for methods and systems for use in processing objects such as wafers, including polishing and/or grinding wafers. Some embodiments provide systems that include a front-end module and a processing module. The front end module couples with a storage device that stores objects for processing. The front-end module can comprise a single robot, a transfer station, and a plurality of end effectors. The processing module is coupled with the front-end module such that the single robot delivers objects from the storage device to the processing module. The processing module comprising a rotating table, and a spindle with a carrier configured to retrieve the delivered object and process the object on the rotating table.

Abstract: A substrate transfer device that transfers a substrate by allowing a substrate opening formed on a front surface of a substrate transfer vessel to face an opening formed on a partition wall from one side of the partition wall and separating a cover body of the substrate transfer vessel from the other side of the partition wall includes a door configured to open and close the opening from the other side of the partition wall; a reciprocating unit configured to straightly move the door back and forth between a first position where the opening is closed and a second position away from the first position toward the other side of the partition wall; and a rotating unit configured to rotate the door around a rotation axis in a straightly moving direction of the door between the second position and a third position deviated from a region facing the opening.

Abstract: A component transport apparatus includes: a transport hand including a plurality of index units each one of which is capable of holding a component; a movable body that moves the transport hand; and a plurality of functional stations on which the components are mounted. The index units function to mount the components on the functional stations. The functional stations are spaced apart at intervals along a movement direction of the transport hand. The index units are spaced apart at intervals equal to the intervals at which the functional stations are spaced apart along the movement direction of the transport hand.

Abstract: A work piece transfer mechanism for use in a chamber has at least one port through which a work piece may be passed along a linear work piece transfer path between a retracted location inside the chamber and an extended location outside the chamber. The chamber has a predetermined internal dimension of given axial extent in the direction of the transfer path, and the transfer mechanism includes a work piece support movable with a linear stroke. The work piece support is driven along the linear stroke by a drive lever pivotally attached to the work piece support by a pivot, and the drive lever is drivable such that the pivot is driven along a linear path to move the work piece support along the linear work piece transfer path. The linear work piece transfer path includes a portion beyond the port of axial extent greater than predetermined internal dimension.

Abstract: A vending machine, In a method and apparatus for handling a package in an automated dispensary, a package is positioned in an inspection station of the dispensary. Images are captured of the package and are read to identify data on labels or on the package itself. The data is encoded as source data in an identifying label which is applied to the package and is used subsequently in handling the package for dispensing and other inventory management procedures.

Abstract: A system for unloading inventory items includes an inventory holder, an unloading station, and a mobile drive unit. The inventory holder stores inventory items. The unloading station includes a barrier that is operable to prevent inventory items from moving past the barrier as the inventory holder moves past the barrier. The mobile drive unit is operable to move the inventory holder toward the unloading station and to move the inventory holder past the barrier.

Abstract: Embodiments of the invention relate to a system for storing and/or transporting platforms of pipette tips. The system includes packaging in which a stacked tower of platforms may be transported. Embodiments of the present invention further include a loader for transferring platforms from the packaging to a rack for holding pipette tip platforms. The loader transfers the platforms by accessing the uppermost platform in the stack.

Abstract: A system for handling sample vials includes a vault for receiving a series of storage cartridges. Inside the cartridges are one or more discs providing vial recesses. In multidisc cartridges, through passages are provided to place and retrieve vials into and from the subjacent discs. A pick up device is moved until it aligns with a selected vial and the vial is pneumatically removed. A device is provided to reverse orientation of a vial moving through the system. A venturi operated system is provided including symmetrical bleed off ports to propel vials through the system without inducing excessive spinning of the vials. A piping system from a central bank to a multiplicity of analytical instruments includes a minimum number of through conduits and a diverter at each instrument location for sending the vial either to the instrument or downstream toward another diverter and instrument.

Abstract: A method, device, and apparatus is provided for detecting moisture and/or electrically conductive remains on a wafer after the wafer is removed from a drying chamber of a processing tool that includes wet clean processing. Embodiments include fixing a wafer to an endeffector between a processing chamber and a FOUP, moving the wafer from the processing chamber toward the FOUP, detecting moisture and/or electrically conductive remains on the wafer, and delivering the wafer to the FOUP, if no moisture and/or electrically conductive remains are detected, or delivering the wafer to a buffer station, if moisture and/or electrically conductive remains are detected.

Abstract: Provided are an apparatus and method for supplying a light-emitting diode (LED) wafer that may quickly and accurately transfer LED wafers by acquiring position information of pockets in a carrier in which the LED wafers are to be seated. The apparatus may include a cassette in which a plurality of LED wafers are loaded, a carrier including a plurality of pockets in which the LED wafers are seated, an aligning unit to align the LED wafers that are to be seated in the carrier, a transfer robot to transfer the LED wafers from the cassette to the aligning unit, a picker to hold, in an adsorbed state, the LED wafers transferred to the aligning unit, or to release the adsorbed state, a capturing unit to fix the picker, and to acquire position information of the pockets, and an LED wafer loading robot to transfer the picker and the capturing unit from the aligning unit to the carrier.

Abstract: A method and apparatus for the continuous sublimation of a substance includes cascading a material containing a substance capable of sublimation, such as water, between a plurality of trays vertically stacked within a processing zone provided within a processing chamber. A substantially atmospheric environment is maintained within the processing zone at a temperature whereby the substance sublimes forming a sublimate within the environment. The environment containing the sublimate is contacted with a drying agent such as a desiccant to maintain the environment whereby the substance sublimes at substantially atmospheric pressure and at the controlled temperature.

Abstract: Described is a system and apparatus for stripping fluids from the surface of a passing vehicle. The apparatus includes an inflatable blower bag for attaching with a duct structure. The inflatable blower bag includes an entrance for receiving air from the support structure and an exit for directing air onto a passing vehicle. A flexible water stripping blade is positioned proximate the exit such that as the bag falls onto a passing vehicle, the flexible blade engages with the passing vehicle and strips water from the passing vehicle.

Abstract: There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A linear transport chamber includes linear tracks and robot arms riding on the linear tracks to linearly transfer substrates along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers. A four-axis robot arm is disclosed, capable of linear translation, rotation and articulation, and z-motion.

Abstract: A processing apparatus of the present invention processes for a wafer. The processing apparatus includes an XY stage which includes a wafer chuck which holds the wafer and an elevating device which rises relative to the wafer chuck to hold the wafer, and a wafer conveying robot hand which conveys the wafer from the XY stage at a wafer transfer position. The XY stage moves to change a direction at an angle between degree and degree via the wafer transfer position in a state where the elevating device rises relative to the wafer chuck. The wafer conveying robot hand has a shape which does not interfere with the XY stage which moves to change the direction at the angle when the wafer conveying hand is positioned at the wafer transfer position.