Abstract: Provided is a substrate processing apparatus which can efficiently transfer substrates using a conveying mechanism including a plurality of substrate holding members. The substrate processing apparatus transfers a processed substrate to an intermediate conveying unit using a transport mechanism when the processed substrate returns to a substrate receiving unit.

Abstract: An integrated robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly can comprise a multiple end effector for moving a plurality of workpieces, a single end effector for moving a single workpiece, a rotation chuck incorporated on the robot body to provide alignment capability, and an optional identification subsystem for identify the object during transport. The present invention robot assembly can be used in a sorter or stocker equipment, in processing equipment, and a transfer system.

Abstract: Provided are an apparatus and method for treating a substrate. More particularly, an apparatus and method for treating a substrate through a supercritical process are provided. The apparatus includes a housing having an entrance in a side thereof and providing a space for performing a process, a door for opening and closing the entrance, and a support member disposed on the door to receive a substrate thereon.

Abstract: A substrate handling apparatus for handling a substrate is disclosed. The substrate handling apparatus includes a substrate feeding device to feed the substrate towards an exposure area, a substrate receiving device to receive the substrate from the exposure area, and a substrate stabilization device to maintain, at least in the exposure area, the substrate substantially flat at an exposure height and/or tilt, the substrate stabilization device configured for contactless stabilization of the flexible substrate.

Abstract: A method and apparatus for processing material cascading through a treatment chamber uses a plurality of vertically stacked shelves divided into trays by spaced apart openings. As the shelves rotate, material contained with each tray is discharged through one of the openings to one or more trays of an underlying shelf. The material to be processed is supplied to the uppermost shelf through one or more material inlets, and discharged from the lowermost shelf through one or more material outlets. The material that enters each feed opening stays substantially together as it spirals down through the chamber. The multiple trays provide for shorter retention time of material within each tray which is adaptable for processing heat sensitive materials along separate material flow paths within the treatment chamber.

Abstract: A cell for fabricating a part having reinforcing fibers embedded in a matrix, includes a clean section for performing clean operations including laying up the reinforcing fibers on a mandrel tool. The clean section satisfies clean room requirements for processing uncured composite materials. The cell further includes an adjacent dirty section for performing dirty operations including machining the layup after curing; a common end effector positioning system movable between the clean and dirty sections; and means for preventing contaminants in the dirty section from entering the clean section.

Abstract: To prevent an inert gas from stagnating in an internal space of a mount base of a load port apparatus, the load port apparatus includes: an outside air supply device for introducing an air from an external space, in which an operator works, into the internal space of the mount base; a casing surrounding a space in which a drive mechanism for a door is arranged; and a duct through which a gas inside the internal space of the casing is dischargeable.

Abstract: An apparatus for positioning a functional device, wherein the apparatus has a main body, a carrier element that can be disposed on the main body to receive the functional device, positioning stops, which are mounted displaceably to clamp the functional device, an actuating device which is adapted such that, by actuating the actuating device, the positioning stops can be transferred between an operating state engaging the functional device and an operating state releasing the functional device, and a force transmitting element which is adapted to transmit an actuating force from the actuating device to the positioning stops, wherein the actuating device and the force transmitting element are coupled in such a manner that, in the operating state engaging the functional device, the force transmitting element transmits a functional device force of the functional device to the actuating device in such a manner that the actuating device remains in a rest position with respect to the carrier element, in spite of the

Abstract: A substrate loader adapted to load and unload a substrate to and from a moveable holder having a seal. The substrate loader has a base and a holder support frame coupled to the base, the holder support frame adapted to repeatably position the moveable holder relative to a predetermined datum. The substrate transport is coupled to the base and having a substrate chuck and adapted to move and transport the substrate relative to the holder. The substrate transport is deterministically positioned relative to the predetermined datum and is adapted to move the substrate from a first position, with the substrate captured by the moveable holder, to a second position with the substrate disengaged from the holder and the seal, the substrate transport movement of the substrate from the first to the second position effecting disengagement from the holder and the seal substantially without contacting the substrate.

Abstract: In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker.

Abstract: In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker.

Abstract: Preparation of a wafer processing or measuring tool for a job can be initiated prior to assigning a wafer carrier to deliver wafers to the tool. The automated process may include transfer of wafers from a container, such as a bare wafer stocker, or between two tools.

Abstract: A substrate conveying container opening/closing device includes an elevator carriage provided in a substrate transfer area and configured to be moved up and down by an elevator mechanism, a cover member for opening and closing an opening of a wall, a seal member for sealing a gap between the cover member and the periphery of the opening, a lid detaching/attaching mechanism provided in the cover member and configured to detach and attach the lid, a guide unit provided in the elevator carriage and configured to guide the cover member upward so that the cover member can advance from a retracting position toward the wall, a guideway provided in the wall to extend in a direction perpendicular to a seal surface of the opening, and a rotating body provided in the cover member and configured to roll downward along the guideway as the elevator carriage is moved downward.

Abstract: In a production system general-purpose cell for general-purpose use in processing and transportation of a received workpiece in a production system of processing and delivering the workpiece, the production system general-purpose cell includes a base unit having a planar shape of quadrangle and supporting at least a robot for use in transportation of the workpiece such that the robot is movable on the planar area of quadrangle, a parts supply unit for supplying parts of the workpiece to the robot supported by the base unit, and a processing area extending outside the base unit. The robot supported by the base unit having a motion range set in a range from inside to outside the base unit in a form including at least part of the processing area.

Abstract: A substrate transferring system and a substrate transferring method are disclosed. The substrate transferring system comprises a substrate processing stage comprising a first substrate processing stage and a second substrate processing stage; a substrate outlet stage being adapted to output a substrate; a substrate transferring stage being disposed between the first substrate processing stage and the second substrate processing stage to receive the substrate from the substrate processing stage; a substrate supporting stage being disposed adjacent to the substrate transferring stage to receive the substrate from the substrate transferring stage; and a substrate conveying and transshipping stage being disposed in parallel with the substrate outlet stage to receive the substrate from the substrate supporting stage and to transfer the substrate to the substrate outlet stage.

Abstract: Provided is a buffer unit, which includes a frame including a base plate, a first vertical plate, and a second vertical plate, wherein the first and second vertical plates are spaced apart from each other on the base plate, a first buffer on which a photomask is placed, the first buffer being allowed to be reversed between the first and second vertical plates; and a plurality of driving parts disposed at outsides of the first and second vertical plates, and driving the first buffer to grip and reverse the photomask placed on the first buffer.

Abstract: An assembly unit with an industrial robot for handling a vehicle body is provided. The industrial robot can be moved by coupling to the vehicle body in the conveying direction, in which a conveyor belt conveys the vehicle body. The industrial robot retains in any conveying situation its exact position relative to the workpiece in all directions. A transport platform serves to transport the industrial robot. The transport platform can be moved independently of the conveyor belt and without use of rails if the industrial robot is decoupled from the vehicle body. A component storage unit can be coupled to the transport platform. The component storage unit then can also be moved by the transport platform. The industrial robot can be designed for a small load to achieve a cost-effective assembly unit.

Abstract: Embodiments of the present invention generally provide an apparatus and method for transferring substrates in a processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint when compared to conventional techniques.

Abstract: An apparatus 200 for delivering semiconductor components 212 to a substrate 206a; 206b; 500a; 500b; 500c during semiconductor package manufacturing is disclosed. The apparatus 200 comprises a platform 216 and a plurality of delivery modules 202a, 202b affixed to the platform 216. Each of the plurality of delivery modules 202a, 202b has a support device 204a; 204b for supporting the substrate 206a; 206b; 500a; 500b; 500c, as well as a delivery device 208a; 208b for delivering the semiconductor components 212 to the substrate 206a; 206b; 500a; 500b; 500c. In particular, heights of the support devices 204a, 204 are mutually levelled for conveying the substrate 206a; 206b; 500a; 500b; 500c between the plurality of delivery modules 202a, 202b.

Abstract: A cartridge transporting device includes: a cartridge holder in which a cartridge receiving a recording medium is inserted and which holds the inserted cartridge; a supporting frame that supports the cartridge holder to be freely move between an insertion position and a drawn-in position; a locking member that moves between a locking position and a non-locking position, moves to the locking position, and locks the cartridge holder at the insertion position; a holder driving member that is movable in a predetermined direction and moves the cartridge holder between the insertion position and the drawn-in position; and a moving mechanism that moves the holder driving member in the predetermined direction, wherein when the cartridge holder starts to move from the insertion position to the drawn-in position, the holder driving member moves such that the cartridge holder locked by the locking member is unlocked.

Abstract: A coating apparatus includes a housing, a number of coating chambers, a first lifting rod, a second lifting rod, and a third lifting rod. The housing includes a bottom wall with an opening defined thereon, a first side wall, and a second side wall opposite to the first side wall. The coating chambers are vertically aligned with each other and received in the housing. Each coating chamber defines an inlet and an outlet at two opposite sides thereof, two inlets of each two adjacent coating chambers faces the first side wall and the second side wall respectively. The first lifting rod and the second lifting rod are disposed adjacent to the second side wall and the first side wall respectively for moving a substrate among the coating chambers. The third lifting rod is disposed between the first lifting rod and the second lifting rod for carrying the substrate into and out of the housing through the opening.

Abstract: The present invention generally provides an apparatus and a method for automatically calibrating the placement of fragile substrates into a substrate carrier. Embodiments of the present invention also provide an apparatus and a method for inspecting the fragile substrates prior to processing to prevent damaged substrates from being further processed or broken in subsequent transferring steps. Embodiments of the invention also generally provide an apparatus and a method for determining the alignment and orientation substrates that are to be delivered into or removed from a substrate carrier. Embodiments of the invention further provide an apparatus and method for accurately positioning the substrate carrier for substrate loading. The substrate carriers are generally used to support a batch of substrates that are to be processed in a batch processing chamber.

Abstract: The present invention relates to a system (10) for handling slides, including a first and at least a second module-receiving area (24 through 28) for receiving at least one module (30, 34) for handling slides each. The first module-receiving area (24) accommodates a coverslipper module (30, 32) for coverslipping thin sections on slides with a mounting medium and a cover slip (48).

Abstract: A system produces devices that include a semiconductor part and a non-semiconductor part. A front end is configured to receive a semiconductor part and to process the semiconductor part. A back end is configured to receive the processed semiconductor part and to assemble the processed semiconductor part and a non-semiconductor part into a device. A transfer device is configured to automatically handle the semiconductor part in the front end and to automatically transfer the processed semiconductor part to the back end.

Abstract: There are disposed two second substrate transferring apparatuses 60a and 60b, which are configured to transfer substrates W between substrate processing units 40 and a substrate accommodating part 30, in the up and down direction so as to correspond to the respective groups to which the plurality of substrate processing units 40 are divided. In addition, there is disposed a substrate displacing apparatus 35 that is configured to displace a substrate W, which has been transferred by a first substrate transferring apparatus 50 to the substrate accommodating part 30 and is not yet processed by the wafer processing unit 40, to another position in the up and down direction in the substrate accommodating part 30, as well as displace a substrate W, which has been processed by the wafer processing unit 40a and transferred by the second substrate transferring apparatus 60a to the substrate accommodating part 30, to another position in the up and down direction in the substrate accommodating part 30.

Abstract: A plant for building tyres includes a plurality of working locations, at least one first working location being associated with at least two loading/unloading locations, a proximal one and a distal one, each of said working locations and loading/unloading locations being associable with a forming drum. The production cycle is controlled by the method of: (i) loading a first forming drum into the at least one first working location; (ii) loading a second forming drum into the loading/unloading location; (iii) at the end of the working provided in the at least one first working location, unloading the first forming drum into the proximal loading/unloading location.

Abstract: A transfer device (10) for an IML process for transporting and inserting a label (8) into an annular gap-shaped mold cavity (9) of a multi-part injection molding tool (1), in particular for manufacturing of tubes or other containers of circular, oval, square or other shaped cross-section. This device (10) comprises at least one transfer tube (13) with a suitably shaped annular gap (21) for receiving and transferring a label (8), wherein the annular gap (21) is formed by an inner core tube (22) and an outer tubular shell (23). Ejection means are provided within the annular gap (21) to enable inserting of a label, which is lying therein, into the mold cavity (9). This ejection means may comprise an air pressure wave or at least a displaceably arranged ejector member (24).

Abstract: The present invention relates to a system and method for continuous loading of consumables into an analyzer comprising a stacker unit which can be uncoupled from the transport system for transporting the consumables from the stacker to the analytical modules and within and/or between the analytical modules.

Abstract: The invention relates to a method for execution upon processing of at least one histological sample that is arranged, in particular after an infiltration process, in a closed cassette (2). The method is characterized in that prior to opening of the cassette (2), the sample is detached from the cover of the cassette (2) and/or isolated.

Abstract: This machine generally is an apparatus for preparing rolls of previously wound material for an unwinding machine. More particularly industrial robots are used to improve the apparatus onto which rolls of sheet form material and the like can be loaded in preparation for unwinding and then, when a previously loaded roll has been unwound, disposing of the remaining core. The robots are programmable robots including a means for engaging the transfer plug and placing the plug into the tubular core of a large roll.

Abstract: There is provided a loading unit which can avoid the need to enhance the performance of a lifting elevator mechanism, thus preventing an increase in the cost of the lifting elevator mechanism. The loading unit is configured to vertically move a substrate holder 56, holding a plurality of substrates W, into and out of a cylindrical processing container 46 upon heat treatment of the substrates W. The loading unit includes: a lifting elevator mechanism 66 for holding and vertically moving the substrate holder 56 and a cap 62; and a pressing mechanism 86, having a piezoelectric actuator 88, for upwardly pressing against the cap 62 lying at a bottom opening 44 of the processing container 46.

Abstract: The invention relates to methods and apparatus in which a plurality of ALD reactors are placed in a pattern in relation to each other, each ALD reactor being configured to receive a batch of substrates for ALD processing, and each ALD reactor comprising a reaction chamber accessible from the top. A plurality of loading sequences is performed with a loading robot. Each loading sequence comprises picking up a substrate holder carrying a batch of substrates in a storage area or shelf, and moving said substrate holder with said batch of substrates into the reaction chamber of the ALD reactor in question.

Abstract: An apparatus for transferring and securing a substrate is shown. A pressure source is provided that is adapted to provide positive and negative pressure. A vacuum chuck is provided having a top side with a plurality of vacuum chuck portals formed therein. Each vacuum chuck portal is in fluid communication with the pressure source. The substrate is secured to the top side of the vacuum chuck when the pressure source provides negative pressure to the vacuum chuck portals. An intermediate member that selectively cooperates with the vacuum chuck to support and transfer the substrate between the vacuum chuck and the intermediate member is provided. The intermediate member has a plurality of receiving spaces and a plurality of transfer members. The receiving spaces and transfer members are adjacent to one another in an alternating pattern, and each transfer member has a top side with a plurality of transfer member portals formed therein.

Abstract: A substrate treating apparatus includes a pod storage unit 9 between a substrate treating unit 11 and a pod storage and transport unit 7, with a transport robot 19 transporting FOUPs 3 between a load port 5 and a rack array 33. A transport robot 31 transports the FOUPs 3 between the rack array 33, a rack array 69 and a receiver 27. The transportation between the load port 5 and rack array 33 and the transportation between the rack array 69, rack array 33 and receiver 27 can be carried out substantially in parallel. As a result, the efficiency of transporting the FOUPs 3 can be improved to improve throughput. Moreover, an increase in apparatus size can be inhibited since only the pod storage unit 9 is disposed between the pod storage and transport unit 7 and substrate treating unit 11. The capacity for storing the FOUPs 3 can be increased to make effective use of the high throughput of the apparatus.

Abstract: The present invention relates to a device (1) for transporting blanks (2) made from an initially plastic, especially ceramic, material towards a dryer (3), from the dryer (3) and towards a kiln (4), with a dryer supply device (7) for supplying the blanks (2) to the dryer (3) and a removal and supply device (8) for removing the blanks (2) from the dryer (3) and for supplying the blanks (2) to the kiln (4). Transport trays (5) made from a heat-resistant material for the blanks (2) are associated with the device (1). The supply device (7) provides a blank-loading device (19) for loading the blanks (2) in each case onto a transport tray (5), and the removal and supply device (8) provides a transfer device (22a, 22b, 22c) for gripping the respective transport tray (5) loaded with the blanks (2) and transferring it to the kiln (4). The present invention further relates to a method for transporting blanks.

Abstract: A method for the production and control of plates for electronics comprising a first step in which a plate is positioned, by means of positioning means, in a loading station; a second step in which the plate is disposed in a deposition station associated with a unit for depositing metal, or other material, in which the metal is deposited on the plate, in order to generate on the plates metal tracks, according to a pre-determined and desired topological disposition; a third step in which the plate is disposed in an exit station and a detection means is activated so as to detect the presence of defects in the plate; and a fourth step in which the plate is discharged from the exit station. In the first step the detection means is activated to identify defects in the plate disposed in the loading station. In the second step the deposition unit is activated in order to deposit the metal on the plate when in the first step the detection means has not detected any defect in the plate.

Abstract: According to one embodiment, a cargo inspection method includes transporting a first guideway vehicle over a guideway from a first inspection station to a second inspection station. A first non-intrusive scanning mechanism associated with the first inspection station is used to acquire a first set of data associated with cargo stored in the first guideway vehicle. The first set of data acquired by the first non-intrusive scanning mechanism associated with the first inspection station is analyzed to determine the identity of the cargo stored on the first guideway vehicle. The first set of data acquired by the first non-intrusive scanning mechanism is compared with a first manifest that describes the cargo that is declared to be stored on the first guideway vehicle. It is determined that the first guideway vehicle contains contraband cargo if the identity of the cargo does not match the first manifest.

Abstract: An article supply apparatus includes a container storage rack for storing containers, and an article storage rack for storing articles taken out of the container. The article supply apparatus includes a transfer apparatus for transporting the articles between the container of the container storage rack and the article storage rack. The article supply apparatus includes a transportation apparatus for transporting the container between the transfer apparatus and the container storage rack, and a supply apparatus for taking required articles out of the article storage rack, and supplying the articles to a processing tool and supply the articles from the processing tool to the article storage rack.

Abstract: The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.

Abstract: A substrate cartridge includes a cartridge main body that houses a substrate and an information-maintaining section that is housed in the cartridge main body and maintains information that includes at least specification information of specification values of the substrate housed in the cartridge main body.

Abstract: A device and a method for loading a food processing machine, in particular a filling machine or a cutter, with food, including a container for receiving the food, a lifting means by which the container can be driven upwards, a drive for the lifting means, and a measuring means for detecting the amount of food in the container.

Abstract: In aspects of the assembly jig and method of the invention, when a packaging substrate is curved concaving upward at temperatures of melting solder, the gap between the assembly jig and the packaging substrate can be made smaller than the dimension of the sum of the thickness of the semiconductor chip and the thickness of the melted solder by allowing a part of the bottom surface of the chip positioning piece to become always, or substantially always, in contact with the upper surface of the packaging substrate owing to the weight of the chip positioning jig itself. As a consequence, the semiconductor chip does not slip aside out of the opening of the chip positioning piece. Therefore, the semiconductor chip can be positioned accurately on the packaging substrate.

Abstract: A transfer device 17 in a semiconductor processing system includes first and second actuation mechanisms 9A, 9B having first and second support sections movable on first and second vertical planes, respectively, the latter being parallel with each other. First and second movable blocks 18A, 18B are supported on the first and second support sections so that they may be horizontally moved by the first and second actuation mechanisms. Disposed on the first and second movable blocks are first and second handling mechanism 19A, 19B capable of extension and contraction for handling a processing subject substrate W. A control section 20 controls the operation of the first and second actuation mechanisms so that the first and second movable blocks may not interfere with each other.

Abstract: A component tube holding arrangement for holding one or more component tubes and for vibratory feeding of components in a picking position in a component mounting machine, as well as a combination of such a component tube holding arrangement and a vibratory feed magazine. The arrangement comprises a support surface for supporting component tubes, a reception portion for receiving component tubes, and at least one component stop at the reception portion defining a picking position for fed components. The arrangement also comprises identification means holding information of the identity of the arrangement. The arrangement is further arranged to be releasably mountable in a component mounting machine or in a vibratory feed magazine arranged to be loaded into the component mounting machine. The component tube holding arrangement lacks component feeding means and is arranged for allowing vibratory feeding means provided in the magazine.

Abstract: A system and device for use in a security area, and more particularly, a rack system and holding device for placing various objects that are processed through a security area are taught.

Abstract: The invention refers to a feed and load unit serving for feeding or removing one or more work pieces in the machining chamber of a machine tool for machining purposes. For this the feed and load unit comprises at least two work piece carriers movably on a guide path. The work piece carrier serves for picking up at least one work piece. In the guide path a guide path section, angularly or diagonally to the direction of conveying of the work pieces on the guide path, movably by a drive is, provided. The guide path section is able to pick up at least one work piece carrier. The guide path section is shifted for loading and unloading purposes in the direction of the machining chamber.

Abstract: An end effector having a first arm and a second arm extending from an end effector support body is provided. The first arm and the second arm each have support extensions for supporting a peripheral region of a substrate on opposing sides of a diameter of the substrate. The height of support contacts on opposing sides of the diameter is different relative to a horizontal datum plane. In one embodiment, the end effector includes additional arms extending from the end effector support body. A system for supporting a substrate is provided also.

Abstract: An automatic part feeder includes a base, a rotatable disk covering the base, a part delivering devices, and a rotatable disk driving device received in the base. Each of the part delivering devices includes a ring-shaped receiving room opening toward a first end surface of the base, a first driving motor having a first rotatable shaft, and an ejector pole having one end extending through the ring-shaped receiving room and another end threadedly engaged with the first rotatable shaft. The rotatable disk driving device has a second driving motor having a second rotatable shaft. The rotatable disk includes receiving holes, and the second rotatable shaft engages with the rotatable disk and is configured for driving the rotatable disk to rotate to align the receiving holes with the respective ring-shaped receiving rooms to receive the parts ejected from the ring-shaped receiving rooms.

Abstract: A system and method for receiving, handling and storing used rolls following unwinding of sheet material therefrom includes: (a) transferring the cores to a remnant cleaning station, (b) inspecting for (i) remnant material, (ii) repairable damage or (iii) irreparable damage; and (c) for those cores cleaned, repaired, or satisfactory as is, transferring them to a storage rack for the specific size and length.

Abstract: An electronic component manufacturing method includes the steps of preparing at least one electronic component chip having a first surface and a second surface opposite each other; holding the electronic component chip between a first plate and a second plate such that the first surface is in contact with a first elastic layer of the first plate and the second surface is in contact with a second elastic layer of the second plate; and turning the electronic component chip by relatively moving the first and second plates in a planar direction thereof using a planar movement mechanism and moving the first and second plates in accordance with a turning path of the electronic component chip using the planar movement mechanism and a vertical movement mechanism.